Lamp chamber heat dissipation structure and photoetching equipment

Abstract

The utility model discloses a lamp chamber heat dissipation structure and photoetching equipment, and relates to the technical field of photoetching equipment. The lamp chamber heat dissipation structure comprises a light source, a lamp chamber body, an air inlet assembly and an air exhaust assembly. The air inlet assembly and the air exhaust assembly are arranged at the two opposite ends of the lamp chamber body respectively. The lamp chamber body comprises a containing cavity defined by an upper lampshade and a lower lampshade which are oppositely arranged, and the light source is arranged in the containing cavity. The air inlet assembly comprises an air inlet hole communicating with the lamp chamber body, and the lamp chamber body communicates with the outside through the air inlet hole. The exhaust assembly comprises an exhaust channel communicating with the lamp chamber body, and the lamp chamber body communicates with the outside through the exhaust channel. Air enters the lamp chamber body through the air inlet hole and then is exhausted from an outlet of the exhaust channel through the upper lampshade and the lower lampshade in sequence. According to the lamp chamber heat dissipation structure, the heat dissipation effect in the lamp chamber can be improved, and then the temperature stability of a light source and the yield of chip manufacturing are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoetching equipment technical field, specifically, relate to a lamp room heat dissipation structure and photoetching equipment. BACKGROUND

[0002] In semiconductor manufacturing, photoetching equipment directly influences chip manufacturing precision and efficiency. Among them, the light source in photoetching equipment supplies energy for photoresist exposure, decides key indexes such as photoetching resolution. In order to improve exposure yield and manufacturing efficiency, photoetching equipment often adopts thousands of watts even higher power mercury lamp as light source, and is arranged in lamp room.

[0003] However, the existing mercury lamp lamp room heat dissipation mechanism is imperfect, cannot promptly dissipate heat, causes the temperature in lamp room to be too high and fluctuate greatly, seriously influences mercury lamp temperature stability, is easy to cause energy supply uneven when photoresist exposure, pattern transfer precision reduces, greatly reduces chip manufacturing yield. In addition, unstable light source leads to equipment needing frequent debugging maintenance, reduces production efficiency, increases cost. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing a lamp room heat dissipation structure and photoetching equipment, it can improve the heat dissipation effect in lamp room, and then guarantee the temperature stability of light source and the yield of chip manufacturing.

[0005] The embodiment of the utility model is realized as follows:

[0006] One aspect of the utility model provides a lamp room heat dissipation structure, including light source, lamp room main part and the air intake component and exhaust component that set up respectively in the opposite two ends of lamp room main part, lamp room main part includes the containing cavity that is enclosed by oppositely arranged upper lamp cover and lower lamp cover, and the light source is arranged in the containing cavity, the air intake component includes the air inlet hole that communicates with lamp room main part, and the lamp room main part is communicated with the outside through the air inlet hole, the exhaust component includes the exhaust passage that communicates with lamp room main part, and the lamp room main part is communicated with the outside through the exhaust passage, and air enters lamp room main part through air inlet hole, and is discharged by the outlet of exhaust passage in turn through upper lamp cover and lower lamp cover.

[0007] Optionally, the upper lamp cover is provided with a positive electrode air jet nozzle, and the lower lamp cover is provided with a negative electrode air jet nozzle opposite to the positive electrode air jet nozzle, and the positive electrode air jet nozzle and the negative electrode air jet nozzle are used for jetting air to form a counterflow air flow field.

[0008] Optionally, the lamp room heat dissipation structure further comprises a temperature sensor and a control assembly, the temperature sensor is arranged in the containing cavity, and the control assembly is connected with the temperature sensor and the light source; the temperature sensor is used for detecting the real-time temperature in the containing cavity and transmitting the real-time temperature information to the control assembly; the control assembly can adjust the brightness of the light source through the real-time temperature information.

[0009] Optionally, the exhaust assembly further comprises a water-cooled heat exchanger arranged in the exhaust channel; the air in the lamp chamber body enters the water-cooled heat exchanger in sequence through the upper lamp shade and the lower lamp shade, and is exhausted from the outlet of the exhaust channel after being cooled by the water-cooled heat exchanger.

[0010] Optionally, the exhaust assembly further comprises a flow guide plate arranged in the exhaust channel and located at the inlet of the water-cooled heat exchanger; the air enters the water-cooled heat exchanger through the flow guide plate.

[0011] Optionally, the exhaust assembly further comprises an exhaust blower arranged at the outlet of the exhaust channel.

[0012] Optionally, the air inlet assembly comprises an air inlet chamber in communication with the lamp chamber body, at least one side wall of the air inlet chamber is provided with an air inlet baffle, and the air inlet hole is arranged on the air inlet baffle.

[0013] Optionally, the air inlet baffle is a louver structure with adjustable angle, and the air inlet hole is formed between two adjacent blades.

[0014] Optionally, the side of the lamp chamber body facing the air inlet chamber is provided with a mounting bottom plate, and a plurality of through holes are arranged on the mounting bottom plate; the air inlet chamber is arranged on the top of the mounting bottom plate.

[0015] In another aspect, the utility model provides a kind of photoetching equipment, it includes lamp chamber heat dissipation structure.

[0016] The utility model has the advantages of:

[0017] The application provides a lamp chamber heat dissipation structure, which comprises a light source, a lamp chamber body, and an air inlet assembly and an air outlet assembly arranged at opposite ends of the lamp chamber body respectively. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation to the scope. For those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0019] Figure 1 Figure 1 is a structural schematic diagram of the lamp chamber heat dissipation structure provided by the embodiment of the present application;

[0020] Figure 2 Figure 2 is another structural schematic diagram of the lamp chamber heat dissipation structure provided by the embodiment of the present application;

[0021] Figure 3 Figure 3 is a third structural schematic diagram of the lamp chamber heat dissipation structure provided by the embodiment of the present application;

[0022] Figure 4 Figure 4 is a side view of the lamp chamber heat dissipation structure provided by the embodiment of the present application.

[0023] Icon: 100 - lamp room heat dissipation structure; 110 - light source; 120 - lamp room main body; 121 - upper lampshade; 1211 - positive jet nozzle; 122 - lower lampshade; 1221 - negative jet nozzle; 123 - mounting bottom plate; 130 - air inlet assembly; 131 - air inlet hole; 132 - air inlet chamber; 133 - air inlet baffle; 140 - air exhaust assembly; 141 - air exhaust channel; 142 - water-cooled heat exchanger; 143 - guide plate; 144 - air exhaust blower; 150 - temperature sensor. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some embodiments of the present application, rather than all the embodiments of the present application. The components of the embodiments of the present application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present application is usually placed during use, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application.

[0026] The terms "arrangement", "mounting", "connection", "connection" should be broadly understood, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0027] Please refer to Figure 1The embodiment provides a lamp chamber heat dissipation structure 100, which comprises a light source 110, a lamp chamber main body 120, and air inlet and outlet assemblies 130 and 140 respectively arranged at opposite ends of the lamp chamber main body 120; the lamp chamber main body 120 comprises a containing cavity formed by oppositely arranged upper and lower lamp covers 121 and 122, and the light source 110 is arranged in the containing cavity; the air inlet assembly 130 comprises an air inlet hole 131 in communication with the lamp chamber main body 120, and the lamp chamber main body 120 is in communication with the outside through the air inlet hole 131; the air outlet assembly 140 comprises an air outlet channel 141 in communication with the lamp chamber main body 120, and the lamp chamber main body 120 is in communication with the outside through the air outlet channel 141; after air enters the lamp chamber main body 120 through the air inlet hole 131, the air is sequentially discharged from the outlet of the air outlet channel 141 through the upper and lower lamp covers 121 and 122.

[0028] Specifically, the lamp chamber heat dissipation structure 100 comprises the light source 110, the lamp chamber main body 120, and the air inlet and outlet assemblies 130 and 140 respectively arranged at opposite ends of the lamp chamber main body 120. Since the light source 110 is an important element in the photolithography process, a large amount of heat is generated during operation of the light source 110, and a good heat dissipation environment is needed to ensure stable operation. The lamp chamber main body 120 provides a space structure for accommodating and protecting the light source 110. The air inlet and outlet assemblies 130 and 140 are respectively arranged at opposite ends of the lamp chamber main body 120, and are used to build an air circulation channel. Through the cooperation of air inlet and outlet, the heat in the lamp chamber can be effectively discharged to maintain a suitable temperature environment.

[0029] As shown in Figure 1 The cross sections of the upper and lower lamp covers 121 and 122 are trapezoidal structures, and the upper and lower lamp covers 121 and 122 are respectively provided with air inlets and outlets at opposite ends along the air flow direction. The air inlet of the upper lamp cover 121 is in communication with the air inlet hole 131, and the air outlet faces the light source 110. The inner diameter of the air inlet of the upper lamp cover 121 is smaller than that of the air outlet, so that the contact between air and the light source 110 is increased, and the heat emitted by the light source 110 can be better carried away. The air inlet of the lower lamp cover 122 faces the light source 110, and the air outlet is in communication with the air outlet channel 141. The inner diameter of the air inlet of the lower lamp cover 122 is larger than that of the air outlet, so that the air can more quickly carry away the heat emitted by the light source 110, and the heat dissipation effect is improved. By arranging the cross sections of the upper and lower lamp covers 121 and 122 in trapezoidal structures, the air flow path can be guided, and the air flowability and the heat dissipation effect are improved.

[0030] The air inlet assembly 130 includes an air inlet hole 131 in communication with the lamp chamber body 120. The air inlet hole 131 serves as an entrance for cold air from the outside to enter the lamp chamber body 120, enabling air with a relatively low temperature from the outside to be introduced into the lamp chamber body 120 through the air inlet hole 131 and absorb the heat generated by the light source 110, thereby achieving the purpose of reducing the temperature of the lamp chamber. At the same time, the lamp chamber body 120 is in communication with the outside through the outlet of the air exhaust channel 141. The outlet of the air exhaust channel 141 enables the air with a higher temperature after heat exchange to be discharged from the lamp chamber body 120. The air inlet hole 131 and the outlet of the air exhaust channel 141 cooperate with each other to form a circulating flow path for the air in the lamp chamber.

[0031] As shown in Figure 1 , the air exhaust assembly 140 includes an air exhaust channel 141 in communication with the lamp chamber body 120, and the lamp chamber body 120 is in communication with the outside through the air exhaust channel 141. When the air in the lamp chamber is heated after heat exchange, the hot air will enter the air exhaust channel 141 and be quickly guided to the outside environment. The design of the air exhaust channel 141 can enhance the efficiency and directivity of air exhaust, and can more effectively exhaust hot air to avoid the accumulation of hot air near the lamp chamber, thereby further strengthening the air circulation effect in the lamp chamber and ensuring the continuity and stability of heat dissipation.

[0032] It should be noted that, in an embodiment of the present application, first, as shown in Figure 2 , the upper lamp cover 121 is provided with a positive air jet nozzle 1211, and the lower lamp cover 122 is provided with a negative air jet nozzle 1221 opposite to the positive air jet nozzle 1211, and the positive air jet nozzle 1211 and the negative air jet nozzle 1221 are used for air jet to form a counter-jet flow field.

[0033] Specifically, as shown in Figure 2 , inside the upper lamp cover 121, a positive air jet nozzle 1211 is arranged, which can spray gas into the accommodation cavity space inside the lamp chamber body 120 according to the set pressure and flow parameters. Similarly, a negative air jet nozzle 1221 is arranged in the lower lamp cover 122, which also has the function of gas jet. The negative air jet nozzle 1221 is in an opposite arrangement state with the positive air jet nozzle 1211, and the two correspond to each other in spatial position, and jointly form a gas flow environment.

[0034] The positive jet nozzle 1211 and the negative jet nozzle 1221 can form a counterflow air flow field inside the accommodating cavity of the lamp chamber body 120 through respective jet actions. The existence of the counterflow air flow field can greatly change the flow state of the air in the lamp chamber, promote the air in the lamp chamber to form more intense convection, enhance the heat exchange efficiency between the air and the light source 110 and other heat generating components, thereby further improving the heat dissipation performance of the entire lamp chamber heat dissipation structure 100, and ensuring that the light source 110 continuously works in a stable temperature environment.

[0035] Secondly, as shown in Figure 2 The exhaust assembly 140 further includes an exhaust blower 144 arranged at the outlet of the exhaust passage 141. As the core power source of the exhaust assembly 140, the exhaust blower 144 functions to enhance the air flow speed and exhaust efficiency inside the lamp chamber body 120 by actively extracting air.

[0036] Compared with the traditional natural convection mode, the setting of the exhaust blower 144 improves the efficiency of the entire heat dissipation system. The exhaust blower 144 extracts air in such a way that hot air can more quickly escape from the light source 110, reducing the residence time of heat in the local area. Moreover, the directional air flow generated by the exhaust blower 144 can strengthen the air circulation in the lamp chamber, forming a more efficient heat exchange process in cooperation with the fresh cold air introduced by the air inlet assembly 130. In addition, the setting of the exhaust blower 144 also optimizes the air flow stability in the exhaust passage 141, avoiding the problem of poor exhaust caused by changes in external environmental air pressure or pipeline resistance.

[0037] Thirdly, the lamp chamber heat dissipation structure 100 further includes a temperature sensor 150 and a control assembly, as shown in Figure 3 The temperature sensor 150 is arranged in the accommodating cavity, and the control assembly is connected with the temperature sensor 150 and the light source 110 respectively; the temperature sensor 150 is used for detecting the real-time temperature in the accommodating cavity and transmitting the real-time temperature information to the control assembly; the control assembly can adjust the brightness of the light source 110 through the real-time temperature information.

[0038] Specifically, as shown in Figure 3 The temperature sensor 150 is installed in the accommodating cavity formed by the upper lamp shade 121 and the lower lamp shade 122, which is the concentrated heat generation area of the light source 110. This layout ensures that the temperature sensor 150 can directly monitor the superimposed temperature field of the radiant heat of the light source 110 and the convection heat of the air, which can reduce environmental interference errors and improve the accuracy of temperature detection compared with external indirect temperature measurement.

[0039] The control component establishes data transmission with the temperature sensor 150 and is electrically connected to the drive circuit of the light source 110, so that the control component can not only acquire the temperature data in the accommodating cavity in real time, but also synchronously output adjustment commands to the light source 110.

[0040] The control component can perform threshold comparisons on the received temperature data. When the detected temperature exceeds a preset upper limit, the control component reduces the driving current of the light source 110, causing the output power and heat generation of the light source 110 to decrease synchronously; when the temperature is below a preset lower limit, the driving current is increased to maintain a stable operating temperature of the light source 110. This dynamic adjustment method keeps the temperature fluctuation of the accommodating cavity within a stable range, thereby improving the reliability of the lamp chamber heat dissipation structure 100.

[0041] The lamp chamber heat dissipation structure 100 provided in this application includes a light source 110, a lamp chamber body 120, and an air intake assembly 130 and an exhaust assembly 140 respectively disposed at opposite ends of the lamp chamber body 120. The air intake assembly 130 and the exhaust assembly 140 disposed at opposite ends of the lamp chamber body 120 form a more reasonable airflow path, allowing air to enter and exit the lamp chamber body 120 in an orderly manner, thus improving air circulation within the lamp chamber. The lamp chamber body 120 includes a receiving cavity formed by an upper lampshade 121 and a lower lampshade 122 disposed opposite to each other. The light source 110 is disposed within the receiving cavity. The arrangement of the upper and lower lampshades 122 better guides the airflow path within the receiving cavity, allowing air to pass sequentially through the upper lampshade 121 and the lower lampshade 122. This design allows for more thorough contact between air and the light source 110, thereby more effectively removing heat and improving heat dissipation. The air intake assembly 130 includes an air intake hole 131 communicating with the lamp chamber body 120, through which the lamp chamber body 120 communicates with the outside. The exhaust assembly 140 includes an exhaust duct 141 communicating with the lamp chamber body 120, through which the lamp chamber body 120 communicates with the outside. After air enters the lamp chamber body 120 through the air intake hole 131, it passes sequentially through the upper lamp cover 121 and the lower lamp cover 122 and is discharged from the outlet of the exhaust duct 141. Compared with the disordered airflow and ineffective heat dissipation in the prior art, this application can more efficiently remove heat from the lamp chamber and maintain a stable temperature inside the lamp chamber by setting an orderly airflow path. The above-mentioned lamp chamber heat dissipation structure 100 can improve the heat dissipation effect inside the lamp chamber, thereby ensuring the temperature stability of the light source 110 and the yield of chip manufacturing.

[0042] Optionally, such as Figure 2 As shown, the exhaust assembly 140 also includes a water-cooled heat exchanger 142, which is disposed in the exhaust duct 141. The air in the lamp chamber body 120 passes through the upper lamp cover 121 and the lower lamp cover 122 in sequence and then enters the water-cooled heat exchanger 142. After being cooled by the water-cooled heat exchanger 142, it is discharged from the outlet of the exhaust duct 141.

[0043] Specifically, the water-cooled heat exchanger 142 serves as an efficient heat exchange device, and its main function is to absorb and carry away the heat in the gas by using the cooling liquid, thereby achieving the cooling treatment of the gas.

[0044] The water-cooled heat exchanger 142 is installed in the exhaust air passage 141, ensuring that the hot air flowing out of the lamp chamber body 120 can fully contact and exchange heat with the water-cooled heat exchanger 142 before being discharged. Such a layout makes the entire exhaust assembly 140 more compact and efficient, fully utilizing the space of the exhaust air passage 141, while also ensuring that the hot air can be cooled in time and effectively, and be ready for subsequent discharge to the external environment.

[0045] Through the setting of the water-cooled heat exchanger 142, the heat dissipation capacity of the lamp chamber heat dissipation structure 100 is further enhanced, and through a reasonable air flow path and an efficient heat exchange process, the problems of imperfect lamp chamber heat dissipation mechanism, excessively high temperature and large fluctuation in the prior art are effectively solved, and the yield and production efficiency of chip manufacturing are improved.

[0046] Further, as shown in Figure 2 , the exhaust assembly 140 further includes a flow guide plate 143, which is arranged in the exhaust air passage 141 and located at the inlet of the water-cooled heat exchanger 142. The air enters the water-cooled heat exchanger 142 through the flow guide plate 143. Preferably, the flow guide plate 143 is made of metal or high-temperature-resistant composite material. The flow guide plate 143 can optimize the air flow distribution in the exhaust air passage 141 and enhance the overall efficiency of the heat dissipation system.

[0047] The flow guide plate 143 is installed inside the exhaust air passage 141 and is adjacent to the air inlet end of the water-cooled heat exchanger 142. Before the hot air enters the water-cooled heat exchanger 142, the flow guide plate 143 rectifies the turbulent airflow into uniform and directional laminar flow through the flow guide grooves or blade structures on its surface, reduces the fluid boundary layer separation phenomenon, and thus ensures that the hot air is uniformly distributed into the heat exchange tube bundle of the water-cooled heat exchanger 142 at a uniform speed, avoiding the decrease of heat exchange efficiency caused by excessively high or low local flow rate, and further improving the heat exchange efficiency and reliability of the exhaust assembly 140.

[0048] In an embodiment of the present application, as shown in Figure 3 , the air inlet assembly 130 includes an air inlet chamber 132 communicating with the lamp chamber body 120, at least one side wall of the air inlet chamber 132 is provided with an air inlet baffle 133, and the air inlet hole 131 is arranged on the air inlet baffle 133.

[0049] Specifically, the main role of the air inlet chamber 132 is to serve as a transition area for external air to enter the lamp chamber body 120. The air inlet chamber 132 is in communication with the lamp chamber body 120, providing a channel for the flow of air, so that external air can smoothly enter the lamp chamber body 120 from the air inlet chamber 132. The air inlet chamber 132 can preliminarily buffer and regulate the entering air, avoiding the direct and disordered impact of external air on the components in the lamp chamber body 120, and helping to maintain the stability and uniformity of air flow in the lamp chamber body 120.

[0050] Please refer to Figure 3 and Figure 4 The side wall of the air inlet chamber 132 is provided with an air inlet baffle 133, which can play multiple roles. On the one hand, it can block and guide the air entering the air inlet chamber 132 to a certain extent, changing the flow direction and speed distribution of the air. For example, when external air impacts the air inlet chamber 132 at a high speed, the air inlet baffle 133 can slow down the flow rate of the air, so that the air enters the air inlet chamber 132 more smoothly. On the other hand, the air inlet baffle 133 can also filter out larger particulate impurities that may be carried in the external air to a certain extent, preventing these impurities from entering the lamp chamber body 120 along with the air, and causing damage to the precision components such as the light source 110 in the lamp chamber body 120.

[0051] For example, the air inlet baffle 133 is a louvered structure with adjustable angle, and an air inlet hole 131 is formed between adjacent two blades.

[0052] Specifically, the air inlet baffle 133 can be composed of multiple groups of parallel blades, each group of blades having a preset rotation angle. By dynamically adjusting the blade inclination angle, the air inlet flow and airflow direction can be accurately controlled to adapt to the heat dissipation requirements under different working conditions. This adjustable air inlet amount can make the temperature fluctuation of the accommodating cavity more flexible and controllable, thereby improving the use reliability of the lamp chamber heat dissipation structure 100.

[0053] Preferably, the blades of the air inlet baffle 133 can be drivenly connected with a control assembly, and the control assembly can adjust the inclination angle of the blades by electric driving. The control assembly can perform threshold comparison on the received temperature data. When the detected temperature exceeds the preset upper limit, the control assembly can increase the air inlet flow by adjusting the blade inclination angle; when the temperature is lower than the preset lower limit, the air inlet flow is reduced by adjusting the blade inclination angle. Through such an adjustment mode, the heat dissipation process of the lamp chamber heat dissipation structure 100 is more flexible and controllable.

[0054] In an implementable manner of the present application, as Figure 3As shown, the lamp chamber body 120 is provided with a mounting base plate 123 on the side facing the air inlet chamber 132, and the mounting base plate 123 is provided with a plurality of through holes; the air inlet chamber 132 is arranged on the top of the mounting base plate 123.

[0055] Specifically, as shown in the drawings, Figure 3 The mounting base plate 123 is arranged on the side of the lamp chamber body 120 facing the air inlet chamber 132, and is rigidly connected to the lamp chamber body 120 in a detachable and fixed manner. The upper lamp cover 121 is fixedly connected to the mounting base plate 123, thereby improving the connection stability of the lamp chamber heat dissipation structure 100. In addition, the air inlet chamber 132 is detachable from the mounting base plate 123, which facilitates separate disassembly, cleaning or replacement of the filter screen and other components, thereby further improving the reliability and service life of the lamp chamber heat dissipation structure 100.

[0056] The surface of the mounting base plate 123 is uniformly provided with a plurality of through holes, which enhances the uniformity of the airflow. The through holes form an airflow channel between the lamp chamber body 120 and the air inlet chamber 132, so that the cold air entering the air inlet chamber 132 enters the interior of the lamp chamber body 120 through the through holes and participates in the subsequent heat exchange process.

[0057] In another aspect of the embodiment, a photolithography device is provided, which comprises the lamp chamber heat dissipation structure 100. The lamp chamber heat dissipation structure 100 can improve the stability of the photolithography temperature through the integrated heat dissipation mechanism, thereby ensuring uniform supply of the photoresist during exposure, improving the chip manufacturing yield, production efficiency and service life of the photolithography device. The specific structure and beneficial effects of the lamp chamber heat dissipation structure 100 have been described in detail above, and will not be described again here.

[0058] The above is only an optional embodiment of the present application, and is not used to limit the present application. For those skilled in the art, the present application can have various changes and modifications. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the protection scope of the present application.

[0059] In addition, it should be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present application will not describe various possible combinations again.

Claims

1. A lamp chamber heat dissipation structure, characterized by, The lamp chamber heat dissipation structure (100) comprises a light source (110), a lamp chamber body (120), and an air inlet assembly (130) and an air outlet assembly (140) arranged at opposite ends of the lamp chamber body (120) respectively; the lamp chamber body (120) comprises a containing cavity formed by an upper lamp cover (121) and a lower lamp cover (122) arranged oppositely, and the light source (110) is arranged in the containing cavity; the air inlet assembly (130) comprises an air inlet hole (131) in communication with the lamp chamber body (120), and the lamp chamber body (120) is in communication with the outside through the air inlet hole (131); the air outlet assembly (140) comprises an air outlet channel (141) in communication with the lamp chamber body (120), and the lamp chamber body (120) is in communication with the outside through the air outlet channel (141); after the air enters the lamp chamber body (120) through the air inlet hole (131), the air is sequentially discharged from the outlet of the air outlet channel (141) through the upper lamp cover (121) and the lower lamp cover (122).

2. The lamp chamber heat sink structure of claim 1, wherein, A positive air jet nozzle (1211) is arranged in the upper lamp cover (121), and a negative air jet nozzle (1221) is arranged in the lower lamp cover (122) opposite to the positive air jet nozzle (1211), and the positive air jet nozzle (1211) and the negative air jet nozzle (1221) are used for jetting air to form a counter-impingement air flow field.

3. The lamp chamber heat sink structure of claim 1, wherein, The lamp chamber heat dissipation structure (100) further comprises a temperature sensor (150) and a control assembly, the temperature sensor (150) is arranged in the containing cavity, and the control assembly is connected with the temperature sensor (150) and the light source (110) respectively; the temperature sensor (150) is used for detecting the real-time temperature in the containing cavity and transmitting the real-time temperature information to the control assembly; the control assembly can adjust the brightness of the light source (110) through the real-time temperature information.

4. The lamp chamber heat sink structure of claim 1, wherein, The air outlet assembly (140) further comprises a water-cooled heat exchanger (142), and the water-cooled heat exchanger (142) is arranged in the air outlet channel (141); the air in the lamp chamber body (120) enters the water-cooled heat exchanger (142) sequentially through the upper lamp cover (121) and the lower lamp cover (122), and is discharged from the outlet of the air outlet channel (141) after being cooled by the water-cooled heat exchanger (142).

5. The lamp chamber heat sink structure of claim 4, wherein, The air outlet assembly (140) further comprises a flow guide plate (143), and the flow guide plate (143) is arranged in the air outlet channel (141) and located at the inlet of the water-cooled heat exchanger (142); the air enters the water-cooled heat exchanger (142) through the flow guide plate (143).

6. The lamp chamber heat sink structure of claim 1, wherein, The air outlet assembly (140) further comprises an air outlet blower (144), and the air outlet blower (144) is arranged at the outlet of the air outlet channel (141).

7. The lamp chamber heat sink structure of claim 1, wherein, The air inlet assembly (130) comprises an air inlet chamber (132) in communication with the lamp chamber body (120), at least one side wall of the air inlet chamber (132) is provided with an air inlet baffle (133), and the air inlet hole (131) is arranged on the air inlet baffle (133).

8. The lamp chamber heat sink structure of claim 7, wherein, The air inlet baffle (133) is a louver structure with adjustable angle, and the air inlet hole (131) is formed between two adjacent blades.

9. The lamp chamber heat sink structure of claim 7, wherein, The lamp chamber main body (120) is provided with a mounting bottom plate (123) on one side facing the air inlet chamber (132), and a plurality of through holes are arranged on the mounting bottom plate (123); the air inlet chamber (132) is arranged on the top of the mounting bottom plate (123).

10. A lithographic apparatus, characterized in that, The lamp chamber heat dissipation structure (100) comprises the lamp chamber heat dissipation structure (100) according to any one of claims 1-9.

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