A multi-functional transfer device

Abstract

This utility model relates to the technical field of workpiece conveying devices, and in particular to a multi-functional transfer device, comprising a main platform, a feeding mechanism located outside the main platform, a driving mechanism located inside the main platform, and a gripping mechanism connected to the driving mechanism. The feeding mechanism includes a receiving space for fixing the workpiece. The driving mechanism can drive the gripping mechanism to move relative to the main platform along a first movement direction and a second movement direction, so that the gripping mechanism can at least partially extend into the receiving space and grip the workpiece; the first movement direction and the second movement direction are perpendicular to each other. The transfer device of this utility model integrates feeding, gripping, multiple lifting and translation mechanisms to realize automatic loading and unloading of workpieces, so that the workpieces are accurately installed in the target position, greatly saving labor costs, simplifying the workpiece transfer steps, improving the workpiece transportation efficiency, reducing equipment space occupation, reducing production costs and accident risks, and improving product quality stability.

Description

Technical Field

[0001] This utility model relates to the technical field of workpiece conveying devices, and in particular to a multifunctional transfer device. Background Technology

[0002] In the loading and unloading process of heavy workpieces for vacuum coating, manual assistance is usually provided by various transportation equipment such as forklifts, overhead cranes, and electric hoists to transfer the workpieces to the substrate rack for substrate mounting. However, due to the heavy weight and large size of the workpieces, manual loading of heavy workpieces has many problems such as low efficiency, poor safety, and high risk of product contamination. In addition, the workpieces need to be transferred between multiple transportation equipment, which is time-consuming and labor-intensive, with a high risk of workpiece damage and significant safety hazards to workers.

[0003] This utility model was proposed in response to the shortcomings of the existing technology. Utility Model Content

[0004] This utility model addresses the aforementioned issues with existing methods for transferring heavy workpieces to substrate racks using multiple transport devices such as forklifts, overhead cranes, and electric hoists. Due to the workpieces' thickness and large size, manual loading of heavy workpieces presents numerous problems, including low efficiency, poor safety, and a high risk of product contamination. Furthermore, the workpieces need to be transferred between multiple transport devices, which is time-consuming, labor-intensive, and carries a high risk of workpiece damage, posing significant safety hazards to workers. Therefore, this invention proposes a multi-functional transfer device.

[0005] The technical solution adopted by this utility model to solve its technical problem is:

[0006] A multifunctional transfer device includes a main platform, a feeding mechanism located outside the main platform, a drive mechanism located inside the main platform, and a gripping mechanism connected to the drive mechanism. The feeding mechanism includes a receiving space for fixing workpieces. The drive mechanism can drive the gripping mechanism to move relative to the main platform along a first movement direction and a second movement direction, so that the gripping mechanism can at least partially extend into the receiving space and grip the workpiece. The first movement direction and the second movement direction are perpendicular to each other.

[0007] As described above, a multifunctional transfer device includes a drive mechanism comprising a first lifting device disposed on the main platform, a lifting platform connected to the first lifting device, a forward and backward moving device disposed on the lifting platform, and a secondary platform passing through the lifting platform and connected to the forward and backward moving device. A gripping mechanism is disposed within the secondary platform and connected to the forward and backward moving device via the secondary platform. The first lifting device drives the lifting platform to move relative to the main platform along a first direction of motion, thereby moving the secondary platform and the gripping mechanism along the first direction of motion. The forward and backward moving device drives the secondary platform to move relative to the lifting platform along a second direction of motion, thereby moving the gripping mechanism along the second direction of motion.

[0008] As described above, a multifunctional transfer device includes a gripping mechanism comprising a second lifting device disposed on the sub-platform, a first gripper assembly and a second gripper assembly disposed opposite to the second lifting device, wherein the second lifting device drives the first gripper assembly and the second gripper assembly to move toward or away from each other to clamp or release the workpiece; the first gripper assembly and the second gripper assembly are respectively provided with a first clamping groove and a second clamping groove, which together form a clamping space for fixing the workpiece.

[0009] As described above, in a multi-functional transfer device, the outer side of the auxiliary platform is provided with a connecting seat that is connected to the front and rear moving device, and the outer side of the lifting platform is provided with a first detection device connected to the connecting seat and a second detection device connected to the main platform. The first detection device is used to detect the front and rear translation position of the auxiliary platform relative to the lifting platform, and the second detection device is used to detect the lifting position of the lifting platform relative to the main platform.

[0010] As described above, in a multi-functional transfer device, a third detection device is provided between the gripping mechanism and the sub-platform. The third detection device is used to detect the lifting position of the first gripper assembly and / or the second gripper assembly relative to the sub-platform.

[0011] As described above, a multi-functional transfer device includes a wafer feeding mechanism comprising a third lifting device on the main platform, a first wafer feeding module connected to the third lifting device, and a second wafer feeding module on the main platform and opposite to the first wafer feeding module. The first wafer feeding module and the second wafer feeding module are respectively provided with a third clamping groove and a fourth clamping groove, which together form the wafer receiving space. The third lifting device is used to drive the first wafer feeding module to move closer to or away from the second wafer feeding module.

[0012] As described above, in a multi-functional transfer device, the first feeding module is connected to the third lifting device via a first mounting bracket. The first feeding module includes a plurality of first guide components, each of which is spaced apart along the length of the first mounting bracket. Each first guide component includes a first connecting bracket connected to the first mounting bracket and a universal ball assembly disposed inside the first connecting bracket. The third clamping groove is disposed in the first connecting bracket, and the universal ball assembly is disposed on both sides of the third clamping groove.

[0013] As described above, in a multi-functional transfer device, the second feeding module is connected to the main platform via a second mounting bracket. The second feeding module includes several second guide components, each of which is spaced apart along the length of the second mounting bracket. Each second guide component includes a mounting base connected to the second mounting bracket, a guide wheel rotatably disposed in the mounting base, and a limiting wheel rotatably disposed in the mounting base and located above the guide wheel. A fourth clamping groove is disposed in the guide wheel, and the limiting wheel is provided on both sides of the fourth clamping groove.

[0014] The multi-functional transfer device described above further includes a fourth detection device disposed between the first wafer feeding module and the main platform, the fourth detection device being used to detect the lifting position of the first wafer feeding module relative to the main platform.

[0015] As described above, a multifunctional transfer device includes a wafer inlet on one side of the wafer receiving space. The transfer device also includes at least one fifth detection device located on the main platform. The fifth detection device includes a rotating device located on the main platform and a limiting member connected to the rotating device. The rotating device drives the limiting member to rotate around the rotating device, thereby switching the limiting member between an initial state and a limiting state. When the limiting member is in the initial state, it is located outside the wafer receiving space. When the limiting member is in the limiting state, it rotates into the wafer receiving space and is opposite to the wafer inlet.

[0016] Compared with the prior art, the beneficial effects of this utility model are:

[0017] This invention proposes a multi-functional transfer device, including a workpiece feeding mechanism, a workpiece gripping mechanism, and a drive mechanism for moving the gripping mechanism. The workpiece is first loaded via the feeding mechanism, and then the drive mechanism drives the gripping mechanism to move longitudinally up and down and laterally forward and backward relative to the main platform. Through the coordinated operation of the feeding mechanism, gripping mechanism, and drive mechanism, the workpiece is fed into the platform and automatically transported to the target position. Compared to traditional methods of transporting workpieces using forklifts, overhead cranes, and electric hoists, this transfer device integrates feeding, gripping, multiple lifting, and translation mechanisms to achieve automatic loading and unloading of workpieces. This ensures the workpiece is accurately installed in the target position, significantly reducing labor costs, simplifying the transfer process, improving transport efficiency, minimizing equipment space requirements, lowering production costs and accident risks, and enhancing product quality stability.

[0018] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. Attached Figure Description

[0019] Figure 1 The three-dimensional multi-functional transfer device of this utility model Figure 1 ;

[0020] Figure 2 The three-dimensional multi-functional transfer device of this utility model Figure 2 ;

[0021] Figure 3 This diagram illustrates the connection between the main platform, the lifting platform, and the first lifting device of this utility model. Figure 1 ;

[0022] Figure 4 This diagram illustrates the connection between the main platform, the lifting platform, and the first lifting device of this utility model. Figure 2 ;

[0023] Figure 5 This is a schematic diagram showing the connection of the lifting platform, the front and rear moving device, the auxiliary platform, and the gripping mechanism of this utility model.

[0024] Figure 6 This is a perspective view of the sub-platform of this utility model;

[0025] Figure 7 This is a perspective view of the gripping mechanism of this utility model;

[0026] Figure 8 This is a schematic diagram showing the connection between the main platform and the wafer feeding mechanism of this utility model;

[0027] Figure 9 This is a perspective view of the first guide component of the feeding mechanism of this utility model;

[0028] Figure 10 This is a perspective view of the second guide component of the feeding mechanism of this utility model;

[0029] Figure 11 This is a right view of the multifunctional transfer device of this utility model;

[0030] Figure 12 This is a schematic diagram showing the connection between the first detection device and the third detection device of this utility model;

[0031] Figure 13 This is a connection diagram of the second detection device of this utility model;

[0032] Figure 14 This is a connection diagram of the fourth detection device of this utility model;

[0033] Figure 15 This is a schematic diagram of the initial state of the fifth detection device of this utility model;

[0034] Figure 16 This is a schematic diagram of the limiting state of the fifth detection device of this utility model;

[0035] Figure 17 This is a front view of the multifunctional transfer device of this utility model. Detailed Implementation

[0036] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings. The described embodiments are merely some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0037] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0038] Furthermore, the use of terms such as "first" and "second" in this utility model is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. Additionally, the technical solutions of the various embodiments can be combined with each other, but only on the basis of being achievable by those skilled in the art. When the combination of technical solutions is contradictory or impossible to implement, such a combination of technical solutions should be considered non-existent and not within the scope of protection claimed by this utility model.

[0039] like Figure 1 As shown in Figure 17, this utility model provides a multifunctional transfer device, including a main platform 1, a feeding mechanism 2, a driving mechanism 3, and a gripping mechanism 4. The feeding mechanism 2 is located outside the main platform 1 and includes a receiving space for fixing workpieces. The gripping mechanism 4 is connected to the driving mechanism 3 and is positioned between the driving mechanism 3 and the feeding mechanism 2. The driving mechanism 3 can drive the gripping mechanism 4 to move relative to the main platform 1 along a first movement direction and a second movement direction, so that the gripping mechanism 4 can at least partially extend into the receiving space and grip the workpiece; the first movement direction and the second movement direction are perpendicular to each other. Figure 1 As shown, Figure 1 The Z-axis is the first direction of motion axis, and the Y-axis is the second direction of motion axis. In this embodiment, the drive mechanism 3 can drive the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1. Through the coordinated operation of the feeding mechanism 2, the gripping mechanism 4, and the drive mechanism 3, the workpiece feeding and automatic transport of the workpiece to the target position can be realized. In practical applications, the workpiece can first be loaded into the feeding mechanism 2 manually or by other conveying equipment, and then the drive mechanism 3 can drive the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1. The mechanism 4, through its movement, enables the workpiece gripping mechanism 4 to grasp the workpiece in the receiving space and transport it to the substrate holder, thus realizing workpiece transfer during the vacuum coating production process. Compared with the traditional method of using forklifts, overhead cranes, and electric hoists to transport workpieces, the transfer device in this embodiment integrates mechanisms such as feeding, gripping, multiple lifting, and translation, realizing automatic loading and unloading of workpieces. This ensures that the workpiece is accurately installed in the substrate holder, greatly saving labor costs, simplifying the workpiece transfer steps, improving workpiece transportation efficiency, reducing equipment space occupation, lowering production costs and accident risks, and improving product quality stability.

[0040] In this embodiment, the transfer device can be applied to the transportation of heavy workpieces in different fields. The transfer device can be installed in the corresponding production line or configured with a separate walking device for independent operation. This embodiment does not make specific limitations. For example, when the transfer device is applied to the vacuum coating production line for the transportation of heavy workpieces, the workpiece can be loaded first through the feeding mechanism 2, and then the gripping mechanism 4 can be driven by the drive mechanism 3 to move longitudinally up and down and laterally forward and backward relative to the main platform 1. Through the coordinated operation of the feeding mechanism 2, the gripping mechanism 4 and the drive mechanism 3, the workpiece can be fed into the substrate holder and automatically transported to the substrate holder.

[0041] In this embodiment, the main platform 1 can be configured as a cuboid frame made of carbon steel profiles through welding and CNC machining to ensure the stability and accuracy of the main platform 1 as the main frame of the equipment. The main platform 1 is provided with a motion space for the drive mechanism 3 and the gripping mechanism 4 to move. The drive mechanism 3 is connected to the main platform 1 and located in the motion space. The motion space provides sufficient movement space for the drive mechanism 3 and the gripping mechanism 4 to move up and down and back and forth, so as to reduce the size of the equipment and thus reduce the space occupied by the equipment.

[0042] like Figure 1 and Figure 2As shown, in this embodiment, the driving mechanism 3 includes a first lifting device 31 disposed on the main platform 1, a lifting platform 32 connected to the first lifting device 31, a forward and backward moving device 33 disposed on the lifting platform 32, and a secondary platform 34 passing through the lifting platform 32 and connected to the forward and backward moving device 33. The gripping mechanism 4 is disposed in the secondary platform 34 and connected to the forward and backward moving device 33 through the secondary platform 34. The first lifting device 31 drives the lifting platform 32 to move relative to the main platform 1 along the first movement direction, and drives the secondary platform 34 and the gripping device 4. Mechanism 4 moves along the first direction of motion; the forward and backward moving device 33 drives the sub-platform 34 to move relative to the lifting platform 32 along the second direction of motion, and drives the gripping mechanism 4 to move along the second direction of motion; in this embodiment, the sub-platform 34 is set as a cuboid frame similar to the main platform 1. It should be noted that the volume of the sub-platform 34 is smaller than the volume of the main platform 1. The lifting platform 32 is set as a planar rectangular frame similar to the main platform 1; the first lifting device 31 is provided on the left and right sides of the main platform 1, and the lifting platform 32 is sleeved on the... The outer side of the auxiliary platform 34 is connected to the first lifting device 31. The short sides of both sides of the lifting platform 32 are equipped with the forward and backward moving devices 33 to ensure the motion balance of the lifting platform 32 and the auxiliary platform 34, thereby ensuring the normal movement of the gripping mechanism 4. In this embodiment, the lifting platform 32 is connected to the first lifting device 31, and the auxiliary platform 34 passes through the lifting platform 32. The forward and backward moving devices 33 allow the auxiliary platform 34 to be slidably connected to the lifting platform 32, thus enabling the lifting platform 32, the auxiliary platform 34, and the gripping mechanism 4 to move normally through the first lifting device 31. The gripping mechanism 4 moves longitudinally up and down within the main platform 1, and the secondary platform 34 and the gripping mechanism 4 move laterally forward and backward within the main platform 1 via the forward and backward moving device 33. This enables the gripping mechanism 4 to translate in different directions. The motion pattern is simple, which helps to reduce the difficulty of transporting heavy workpieces and protect the safety of transporting heavy workpieces. Furthermore, no additional lifting platform or translation mechanism is required during the transport of workpieces, which can shorten the cycle time. In addition, the coordinated motion of longitudinal lifting and lateral translation enables the gripping mechanism 4 to achieve a continuous "pick-up-transport-place" action, reducing idle waiting time and further improving the transport efficiency of workpieces.

[0043] In some alternative embodiments, such as Figure 3As shown, the first lifting device 31 includes a first active lifting module 311, which includes a first motor 3111, a first guide rail 3112 connected to the first motor 3111, and a first transmission slider 3113 movably connected to the first guide rail 3112. The first motor 3111 is located at the top of the main platform 1, and the first guide rail 3112 is located within the left and right side frames of the main platform 1. The lifting platform 32 is fixedly connected to the first transmission slider 3113. The first motor 3111 drives the first guide rail 3112 and the first transmission slider 3113. 13. The first transmission slider 3113 moves up and down along the first guide rail 3112, and drives the lifting platform 32 to move up and down through the first transmission slider 3113. Optionally, the first motor 3111 can be a servo motor or a hydraulic motor, and the first guide rail 3112 and the first transmission slider 3113 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the first motor 3111 is a servo motor, which improves the lifting efficiency and lifting accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure.

[0044] Further optional, such as Figure 3 As shown, the first lifting device 31 further includes a first auxiliary lifting module 312. The first auxiliary lifting module 312 includes a second guide rail 3121 at least located on one side of the first guide rail 3112 and a first driven slider 3122 movably connected to the second guide rail 3121. The second guide rail 3121 is located within the left and right side frames of the main platform 1. The lifting platform 32 is connected to the first driven slider 3122. When the lifting platform 32 moves up and down along the first guide rail 3112 via the first transmission slider 3113, the first driven slider 3122 is simultaneously driven to move up and down along the second guide rail 3121 via the lifting platform 32, thereby improving the movement stability of the lifting platform 32 and meeting the driving requirements for lifting heavy workpieces. Alternatively, the second guide rail 3121 and the second transmission slider 3123 may be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment.

[0045] In some alternative embodiments, such as Figure 4As shown, the forward and backward moving device 33 includes an active translation module 331. The active translation module 331 includes a second motor 3311, a third guide rail 3312 connected to the second motor 3311, and a second transmission slider 3313 movably connected to the third guide rail 3312. The third guide rail 3312 is located at the lower part of the short sides on both sides of the lifting platform 32. The second motor 3311 is located on the long side of the back of the lifting platform 32, that is, the second motor 3311 is away from the feeding mechanism 2 to avoid interfering with the normal operation of the feeding mechanism 2 and the gripping mechanism 4. The sub-platform 34 is fixedly connected to the second transmission slider 3313 and drives the third guide rail 3312 and the second transmission slider 3313 through the second motor 3311. The movable slider 3313 operates in coordination, causing the second transmission slider 3313 to move back and forth along the third guide rail 3312, and driving the sub-platform 34 to move back and forth along the third guide rail 3312 via the second transmission slider 3313. Optionally, the active translation module 331 can adopt a structure similar to the first active lifting module 311, the second motor 3311 can be a servo motor or a hydraulic motor, and the third guide rail 3312 and the second transmission slider 3313 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the second motor 3311 is a servo motor, which improves the lifting efficiency and lifting accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure.

[0046] In other alternative embodiments, such as Figure 4 As shown, a belt drive module 332 is provided between the second motor 3311 and the third guide rail 3312. The belt drive module 332 is used to transfer the kinetic energy of the second motor 3311 to the third guide rail 3312 to drive the third guide rail 3312 axially, and drive the second transmission slider 3313 to move through the third guide rail 3312, thereby realizing the back-and-forth movement of the sub-platform 34 relative to the lifting platform 32. The belt drive module 332 can absorb impact loads, realize buffering and shock absorption, and achieve the purpose of protecting the transfer device.

[0047] In some alternative embodiments, the forward and backward moving device 33 further includes an auxiliary translation module 333. The auxiliary translation module 333 includes a fourth guide rail 3331 disposed on the upper part of the lifting platform 32 and a second driven slider 3332 movably disposed on the fourth guide rail 3331. The fourth guide rail 3331 is disposed on the upper part of the short sides on the left and right sides of the lifting platform 32. The sub-platform 34 is connected to the second driven slider 3332. When the sub-platform 34 moves forward and backward along the third guide rail 3312 via the second transmission slider 3313, it simultaneously drives the second driven slider 3332 to move forward and backward along the fourth guide rail 3331, which helps to improve the stability and accuracy of the forward and backward movement of the sub-platform 34. Furthermore, by mounting the second motor 3311 on the long side of the back of the lifting platform 32, it is beneficial to increase the movable distance of the third guide rail 3312 and the fourth guide rail 3331, thereby increasing the forward and backward movement stroke of the sub-platform 34 and the gripping mechanism 4. Optionally, the fourth guide rail 3331 and the second driven slider 3332 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. In addition, the number of the second driven sliders 3332 can be selected according to the bottom length of the connecting seat 341 to further improve the stability and reliability of the auxiliary translation module 333 driving the sub-platform 34 to move forward and backward. The number of the second driven sliders 3332 is not specifically limited in this embodiment.

[0048] like Figure 5As shown in Figure 7, in this embodiment, the gripping mechanism 4 includes a second lifting device 41 disposed on the sub-platform 34, a first gripper assembly 42 and a second gripper assembly 43 disposed opposite to the second lifting device 41. The second lifting device 41 drives the first gripper assembly 42 and the second gripper assembly 43 to move towards or away from each other to clamp or release the workpiece. The first gripper assembly 42 and the second gripper assembly 43 are respectively provided with opposing first clamping grooves 420 and second clamping grooves 430, which together form a clamping space for fixing the workpiece. Specifically, the first gripper assembly 42 includes a first gripper frame 421 and first grippers 422 connected to the first gripper frame 421. There are a plurality of first grippers 422, each of which is spaced apart along the length direction of the first gripper frame 421, and each of the first grippers 422 is provided with a first clamping groove 420 facing the second gripper assembly 43. 3 includes a second gripper frame 431 and second grippers 432 connected to the second gripper frame 431. Multiple second grippers 432 are provided, each spaced apart along the length of the second gripper frame 431, and each second gripper 432 has a second clamping groove 430 facing the first gripper assembly 42. Each first clamping groove 420 and each second clamping groove 430 is arranged in a one-to-one correspondence. When each first gripper 422 and each second gripper 432 moves towards each other via the second lifting device 41, the clamping space can be formed by the first clamping groove 420 and each second clamping groove 430. The structure is simple and can reduce the contact area between each first gripper 422 and each second gripper 432 and the workpiece, which is beneficial for protecting the workpiece. Furthermore, by providing multiple first grippers 422 and second grippers 432, the gripping stability and transport stability of the gripping mechanism 4 for heavy workpieces are improved, thereby ensuring the safe transport of heavy workpieces.

[0049] Further optional, such as Figure 7As shown, the second lifting device 41 is disposed between the first gripper frame 421, the second gripper frame 431 and the sub-platform 34, and the second lifting device 41 is provided on both the front and rear sides of the sub-platform 34 to improve the moving stability of the gripping mechanism 4; specifically, the second lifting device 41 includes a second active lifting module 411, the second active lifting module 411 including a third motor 4111, a fifth guide rail 4112 connected to the third motor 4111, a third transmission slider 4113 movably disposed on the fifth guide rail 4112 and a third... The fourth transmission slider 4114 has a third motor 4111 located at the top of the sub-platform 34. The first gripper frame 421 is fixedly connected to the third transmission slider 4113, and the second gripper frame 431 is fixedly connected to the fourth transmission slider 4114. The third motor 4111 drives the fifth guide rail 4112, the third transmission slider 4113, and the fourth transmission slider 4114 to operate in coordination, causing the third transmission slider 4113 and the fourth transmission slider 4114 to move up and down along the fifth guide rail 4112, thereby achieving the desired motion through the third transmission slider. The movable slider 4113 drives the first gripper frame 421 to move up and down along the fifth guide rail 4112, and the fourth transmission slider 4114 drives the second gripper frame 431 to move up and down along the fifth guide rail 4112. The third transmission slider 4113 and the fourth transmission slider 4114 move in opposite directions to achieve opposite or reciprocating movement of the first gripper frame 421 and the second gripper frame 431. Furthermore, the first gripper frame 421 and the second gripper frame 431 drive the first gripper 422 and the second gripper 432 respectively. The first gripper assembly 42 and the second gripper assembly 43 move towards or away from each other, thereby clamping or releasing the workpiece. Optionally, the third motor 4111 can be a servo motor or a hydraulic motor, and the fifth guide rail 4112, the third transmission slider 4113, and the fourth transmission slider 4114 can be roller slider modules or lead screw slider modules, etc., which are not specifically limited in this embodiment. Preferably, the third motor 4111 is a servo motor, which improves the lifting efficiency and accuracy of the lifting platform 32 through servo control, and helps to reduce electrical connections, thereby simplifying the equipment structure. In addition, since the main platform 1 is set as a cuboid frame, when the auxiliary platform 34 moves up and down within the main platform 1 through the first lifting device 31, the top frame of the main platform 1 can make way for the third motor 4111.

[0050] Further optional, such as Figure 7As shown, the second lifting device 41 further includes a second auxiliary lifting module 412. The second auxiliary lifting module 412 includes at least one sixth guide rail 4121 disposed on the main platform 1 and located on one side of the fifth guide rail 4112, a third driven slider 4122 and a fourth driven slider 4123 movably connected to the sixth guide rail 4121. The third driven slider 4122 is fixedly connected to the first gripper frame 421, and the fourth driven slider 4123 is fixedly connected to the second gripper frame 431. When the first gripper frame 421 and the second gripper frame 431 move up and down along the fifth guide rail 4112 via the third drive slider 4113 and the fourth drive slider 4114 respectively, the third drive slider 4113 and the fourth drive slider 4114 move up and down along the fifth guide rail 4112. Driven slider 4122 and fourth driven slider 4123 drive the first gripper frame 421 and the second gripper frame 431 to move up and down along the sixth guide rail 4121. The third driven slider 4122 and fourth driven slider 4123 move in opposite directions to ensure that the first gripper assembly 42 and the second gripper assembly 43 move towards and away from each other. By setting the second auxiliary lifting module 412, the stability and accuracy of the first gripper assembly 42 and the second gripper assembly 43 moving towards or away from each other are improved. Optionally, the sixth guide rail 4121 and the third driven slider 4122 and the fourth driven slider 4123 can be roller slider modules or lead screw slider modules, etc., and this embodiment does not make specific limitations.

[0051] In other alternative embodiments, such as Figure 5 As shown, the front and rear sides of the first gripper frame 421 and the second gripper frame 431 are connected to the sub-platform 34 through the second active lifting module 411 and the second auxiliary lifting module 412, so as to further improve the stability and movement accuracy of the first gripper assembly 42 and the second gripper assembly 43 moving towards or away from each other.

[0052] In other alternative embodiments, such as Figure 6 As shown, the outer side of the sub-platform 34 is provided with a connecting seat 341 that is connected to the front and rear moving device 33. That is, both the left and right sides of the sub-platform 34 are fixedly connected to the second driven slider 3332 through the connecting seat 341, so as to eliminate assembly problems caused by processing errors and reduce assembly difficulty.

[0053] To improve the operational accuracy of the transfer device, such as Figure 11As shown in Figure 13, the transfer device further includes a first detection device 5 and a second detection device 6. The lifting platform 32 has a first detection device 5 connected to the connecting seat 341 and a second detection device 6 connected to the main platform 1 on its outer side. The first detection device 5 is used to detect the forward and backward translational position of the auxiliary platform 34 relative to the lifting platform 32, and the second detection device 6 is used to detect the lifting position of the lifting platform 32 relative to the main platform 1. Optionally, the first detection device 5 and the second detection device 6 can be photoelectric detection modules. Specifically, the first detection device 5 includes a first detection contact 51 disposed on the connecting seat 341 and a first sensor 52 disposed on the lifting platform 32. The first sensor 52 has a first coupling area 53 through which the first detection contact 51 can pass. The first detection contact 51 can move relative to the first sensor 52 through the forward and backward moving device 33. When the first detection contact 51 moves into the first coupling area 53 through the connecting seat 341, the second detection device 51... A detection contact 51 is coupled to a first sensor 52 to detect the position of the sub-platform 34 relative to the lifting platform 32. This indirectly detects the position of the gripping mechanism 4, which is beneficial for precise control of the gripping mechanism 4. Additionally, the second detection device 6 can adopt a structure similar to the first detection device 5. Specifically, the second detection device 6 includes a second detection contact 61 disposed on the lifting platform 32 and a second sensor 62 disposed on the main platform 1. The second sensor 62 has a second coupling area 63 through which the second detection contact 61 passes. When the second detection contact 61 moves through the lifting platform 32 into the second coupling area 63, the second detection contact 61 couples with the second sensor 62 to detect the position of the lifting platform 32 relative to the main platform 1. This indirectly detects the position of the sub-platform 34 and the gripping mechanism 4 relative to the main platform 1, which is beneficial for precise control of the gripping mechanism 4.

[0054] In this embodiment, as Figure 11 and Figure 12As shown, the detection mechanism further includes a third detection device 7 disposed between the gripping mechanism 4 and the sub-platform 34. The third detection device 7 is used to detect the lifting position of the first gripper assembly 42 and / or the second gripper assembly 43 relative to the sub-platform 34. The third detection device 7 may be disposed between the first gripper assembly 42 and the main platform 1, or between the second gripper assembly 43 and the main platform 1. Alternatively, two third detection devices 7 may be provided, with the first gripper assembly 42, the second gripper assembly 43, and the main platform 1 all provided with the third detection device 7. This embodiment does not impose specific limitations. The following describes the third detection device disposed between the first gripper assembly 42 and the main platform 1. The device 7 is described below. The third detection device 7 can adopt a structure similar to that of the first detection device 5. Specifically, the third detection device 7 includes a third detection contact 71 disposed on the first gripper frame 421 and a third sensor 72 disposed on the sub-platform 34. The third sensor 72 has a third coupling area 73 through which the third detection contact 71 passes. When the third detection contact 71 moves into the third coupling area 73 through the first gripper assembly 42, the third detection contact 71 couples with the third sensor 72 to detect the position of the first gripper assembly 42 relative to the sub-platform 34, which is beneficial for further precise control of the lifting and lowering movement of the gripping mechanism 4. It should be noted that when the transfer device is only equipped with a third detection device 7 to detect the lifting status of the first gripper assembly 42 or the second gripper assembly 43 relative to the sub-platform 34, the second lifting device 41 can be configured using existing technology so that the second lifting device 41 jointly controls the first gripper assembly 42 and the second gripper assembly 43, thereby enabling the first gripper assembly 42 and the second gripper assembly 43 to move the same distance towards or away from each other.

[0055] In other alternative embodiments, such as Figure 1 and Figure 8As shown, the wafer feeding mechanism 2 includes a third lifting device 21 disposed on the main platform 1, a first wafer feeding module 22 connected to the third lifting device 21, and a second wafer feeding module 23 disposed on the main platform 1 and opposite to the first wafer feeding module 22. The first wafer feeding module 22 and the second wafer feeding module 23 are respectively provided with opposing third clamping grooves 221 and fourth clamping grooves 231, which enclose the wafer receiving space. The third lifting device 21 is used to drive the first wafer feeding module 22 to move closer to or away from the second wafer feeding module 23. In this embodiment, the third lifting device 21 is disposed on the main platform 1, and the second wafer feeding module 23 is fixedly connected to the bottom of the main platform 1 and located below the first wafer feeding module 22, i.e., the first... The feeding module 22 is provided with a third clamping groove 221 facing the second feeding module 23, and the second feeding module 23 is provided with a fourth clamping groove 231 facing the first feeding module 22. In practical applications, the workpiece can be placed in the fourth clamping groove 231 by other conveying equipment, and the first feeding module 22 can be moved closer to the second feeding module 23 by the third lifting device 21, so that the first feeding module 22 clamps the workpiece through the third clamping groove 221, and fixes the workpiece in the receiving space, thereby realizing the feeding action of the feeding mechanism 2, so as to facilitate the gripping mechanism 4 to grip the workpiece. After the gripping mechanism 4 grips the workpiece, the third lifting device 21 drives the first feeding module 22 to move away from the second feeding module 23, so that the feeding mechanism 2 releases the workpiece, which is beneficial for the gripping mechanism 4 to further transport the workpiece.

[0056] Optional, such as Figure 1 and Figure 8 As shown, the third lifting device 21 includes a left lifting device and a right lifting device located opposite each other on the left and right sides of the main platform 1. Each of the left and right lifting devices includes a fourth motor 211 located on the top of the main platform 1, a seventh guide rail 212 connected to the fourth motor 211, and a fifth transmission slider 213 movably connected to the seventh guide rail 212. The fifth transmission sliders 213 on both sides are respectively connected to the first feeding module 22. The fourth motor 211 drives the seventh guide rail 212 and the fifth transmission slider 213 to work together, so that the fifth transmission slider 213 moves up and down along the seventh guide rail 212, and drives the first feeding module 22 to move up and down along the seventh guide rail 212, so that the first feeding module 22 moves towards or away from the second feeding module 23, thereby realizing the clamping or releasing of the workpiece by the first feeding module 22 and the second feeding module 23.

[0057] In this embodiment, as Figure 1 , 8As shown in Figure 9, the first feeding module 22 is connected to the third lifting device 21 via a first mounting bracket 24. Optionally, the first mounting bracket 24 can be configured as a long strip profile. The first feeding module 22 includes a plurality of first guide components 222, each of which is spaced apart along the length of the first mounting bracket 24. Each first guide component 222 includes a first connecting bracket 2221 connected to the first mounting bracket 24 and a universal ball assembly 2222 disposed inside the first connecting bracket 2221. The third clamping groove 221 is disposed in the first connecting bracket 2221. Both sides of the first mounting bracket 24 are provided with the universal ball assembly 2222. In this embodiment, the first connecting bracket 2221 is located at the lower part of the first mounting bracket 24, and the third clamping groove 221 is located in the first connecting bracket 2221 and extends downward. At least one universal ball assembly 2222 is provided on both the front and rear sides of the third clamping groove 221. The universal ball assembly 2222 includes a fixing member 22221 connected to the first connecting bracket 2221 and a ball 22222 rotatably disposed on the fixing member 22221. The fixing member 22221 is provided with a rotating groove for installing the ball 22222, and the ball 22222 extends at least partially out. The workpiece is placed in the third clamping groove 221. In practical applications, when the workpiece is in the fourth clamping groove 231, the second feeding module 23 supports the workpiece, and the third lifting device 21 drives the first feeding module 22 to move closer to the second feeding module 23. The top of the workpiece is clamped by the third clamping groove 221, so that the workpiece is fixed in the receiving space. At the same time, the balls 22222 located on the front and rear sides of the third clamping groove 221 make rolling contact with the workpiece. After the gripping mechanism 4 grips the workpiece from the receiving space, the third lifting assembly drives the first feeding module 22 to move away from the second feeding module 23 to release the workpiece, so that the gripping mechanism 4 can move freely. It can further transport the workpiece; wherein, during the process of the first guide component 222 moving up and down relative to the workpiece to clamp or release the workpiece, the first feeding module 22 as a whole generates a vertical relative movement between itself and the workpiece, while the balls 22222 on the front and rear sides of the third clamping groove 221 always maintain rolling contact with the workpiece. Compared with the first feeding module 22 using a single horizontal rolling direction guide wheel, which is prone to scratching the workpiece when moving vertically, the first feeding module 22 in this embodiment, which is equipped with a universal ball component 2222, can effectively avoid scratching the surface of the workpiece, thereby achieving the purpose of protecting the workpiece and improving the quality of vacuum coating products.

[0058] In some alternative embodiments, in order to precisely control the moving distance of the first wafer feeding module 22, such as Figure 14As shown, the transfer device further includes a fourth detection device 8 disposed between the first wafer feeding module 22 and the main platform 1. The fourth detection device 8 is used to detect the lifting position of the first wafer feeding module 22 relative to the main platform 1. In this embodiment, the fourth detection device 8 has a similar structure to the first detection device 5 to reduce equipment costs. Specifically, the fourth detection device 8 includes a fourth detection contact 81 disposed on the third lifting device 21 or the first wafer feeding module 22, and a fourth sensor 82 disposed on the main platform 1. The fourth sensor 82 has a fourth coupling area 83 through which the fourth detection contact 81 passes. Optionally, the fourth detection contact 81 can be installed at one of the fifth transmission sliders 213 of the third lifting device 21, or it can be installed at... The fourth sensor 82 is installed at the first mounting bracket 24 of the first feeding module 22, and the fourth detection contact 81 is installed accordingly. This embodiment does not specify a particular limitation. When the first feeding module 22 moves away from the second feeding module 23 to release the workpiece through the third lifting device 21, the fourth detection contact 81 is simultaneously driven by the third lifting device 21 to move into the fourth coupling area 83, so that the fourth detection contact 81 is coupled with the fourth sensor 82 to detect the position of the first feeding module 22 relative to the main platform 1. This is beneficial for accurately controlling the lifting distance of the first feeding module 22, thereby improving the workpiece transportation efficiency and making way for the gripping mechanism 4 to further transport the workpiece, avoiding interference between the first feeding module 22 and the gripping mechanism 4.

[0059] In some alternative embodiments, to improve the feeding efficiency of the feeding mechanism 2, the feeding mechanism 2 is provided with a driving surface for driving the workpiece to move in the receiving space, such as... Figure 1 , 8As shown in Figure 10, the second feeding module 23 is connected to the main platform 1 via a second mounting bracket 25. Optionally, the second mounting bracket 25 can be configured as a long strip profile. The second feeding module 23 includes a plurality of second guide components 232, each second guide component 232 being spaced apart along the length direction of the second mounting bracket 25. Each second guide component 232 includes a mounting base 2321 connected to the second mounting bracket 25, a guide wheel 2322 rotatably disposed within the mounting base 2321, and a limiting wheel 2323 rotatably disposed on the mounting base 2321 and located above the guide wheel 2322. The fourth clamping groove 231 is provided in the guide wheel 2322, and the limiting wheels 2323 are provided on both sides of the fourth clamping groove 231. In this embodiment, the workpiece can be pushed into the receiving space from the side of the feeding mechanism 2 by human or mechanical force. During this process, the guide wheel 2322 rotates axially due to the moving friction of the workpiece, thereby forming a driving surface on the top of the guide wheel 2322 that can drive the workpiece to move. The driving surface assists the workpiece in moving within the receiving space, which helps to improve the feeding efficiency of the workpiece. The horizontal rolling friction between the guide wheel 2322 and the workpiece can avoid workpiece damage and improve workpiece quality. Furthermore, as Figure 10 As shown, to prevent the workpiece from swaying during feeding, the guide wheel 2322 is also provided with limiting wheels 2323 on both sides that contact the front and rear sides of the workpiece. The limiting wheels 2323 on both sides position the workpiece, effectively preventing it from swaying and keeping it on the same horizontal movement path, thus ensuring smooth feeding of the workpiece. At the same time, the limiting wheels 2323 on both sides rotate axially due to the friction of the workpiece, which can further drive the workpiece to move within the feeding space, thereby further improving the feeding efficiency of the workpiece. It should be noted that the rotation axis of the limiting wheel 2323 is perpendicular to the rotation axis of the guide wheel 2322.

[0060] Further optional, such as Figure 10 As shown, the limiting wheel 2323 is connected to the top of the mounting base 2321 via the second connecting bracket 2324. The second connecting bracket 2324 and the mounting base 2321 are connected by a positioning component 2325. The positioning component 2325 includes tightening screws, tightening bolts, etc., which are not specifically limited in this embodiment. In practical applications, at least one positioning component 2325 is provided, and the distance between the limiting wheels 2323 on both sides can be adjusted by the positioning component 2325, thereby limiting the swing of the workpiece by the limiting wheels 2323 on both sides.

[0061] Further optional, such as Figure 10As shown, the guide wheel 2322 is provided with extensions 23221 on both sides of the driving surface. The extensions 23221 extend circumferentially along the guide wheel 2322. The extensions 23221 can restrict the workpiece from deviating from the driving surface, thereby ensuring that the workpiece is fed smoothly.

[0062] In some alternative embodiments, each of the first guide components 222 is evenly spaced along the first mounting bracket 24, and each of the second guide components 232 is evenly spaced along the length direction of the second mounting bracket 25. This allows each of the first grippers 422 to be inserted into the space between two adjacent first guide components 222, and each of the second grippers 432 to be inserted into the space between two adjacent second guide components 232. This facilitates the gripping of workpieces by the first gripper components 42 and the second gripper components 43, avoids interference between the feeding mechanism 2 and the gripping mechanism 4, improves the workpiece transport efficiency, and enhances the structural compactness between the feeding mechanism 2 and the gripping mechanism 4, thereby reducing the volume of the transfer device.

[0063] In other alternative embodiments, such as Figure 15 As shown in —17, Figure 17 The arrow in the diagram indicates the wafer feeding direction. A wafer inlet 201 is provided on one side of the wafer receiving space. The transfer device also includes at least one fifth detection device 9 located on the main platform 1. The fifth detection device 9 includes a rotating device 91 located on the main platform 1 and a limiting member 92 connected to the rotating device 91. The rotating device 91 drives the limiting member 92 to rotate around the rotating device 91, thereby switching the limiting member 92 between an initial state and a limited state. When the limiting member 92 is in the following position... Figure 15 In the initial state shown, the limiting member 92 is located outside the contact space; when the limiting member 92 is in the following state... Figure 16In the limited position shown, the limiting member 92 rotates into the contact space and is opposite to the inlet 201. In this embodiment, the fifth detection device 9 is connected to the main platform 1 through the third mounting bracket 11, and the fifth detection device 9 is located between the first inlet module 22 and the second inlet module 23. Optionally, the third mounting bracket 11 can be a long strip profile, which is not specifically limited in this embodiment. The rotating device 91 can be configured as a rotating cylinder or a rotating motor, which is not specifically limited in this embodiment. In practical applications, the rotating device 91 drives the limiting member 92 to switch from the initial state to the limited state, so that the limiting member 92 extends into the contact. Within the space and opposite to the inlet 201, the workpiece is pushed into the receiving space from the inlet 201, and the workpiece moves through the second inlet module 23 until it contacts the limiting member 92. The limiting member 92 precisely limits the position of the workpiece in the receiving space, which is beneficial for the gripping mechanism 4 to accurately grip the workpiece, thereby improving the workpiece transportation efficiency. In addition, the limiting member 92 can be rotated to the outside of the receiving space by the rotating device 91, so that the limiting member 92 switches from the limiting state to the initial state. It should be noted that the limiting member 92 can be rotated 90° by the rotating device 91 to switch between the initial state and the limiting state.

[0064] In other alternative embodiments, such as Figure 1 , 15As shown in Figure 16, two fifth detection devices 9 can be configured. One fifth detection device 9a can be located away from the inlet 201, and the other fifth detection device 9b is located between the first fifth detection device 9a and the inlet 201. It should be noted that the specific installation positions of the two fifth detection devices 9 can be set according to the width of the workpiece, and this utility model does not impose specific limitations. During the production process, one or two fifth detection devices 9 can be activated according to the width of the workpiece. When the workpiece is wide, the middle fifth detection device 9b can be kept in the initial state, and the fifth detection device 9a can be activated to the limit state to accurately position the workpiece in the receiving space, which is beneficial for the precise gripping of the gripping mechanism 4. When the workpiece is narrow, the middle fifth detection device 9b can be kept in the initial state first, and the fifth detection device 9a can be activated to the limit state, so that the first narrow workpiece can be gripped first and positioned in the receiving space through the fifth detection device 9a. Then, the middle fifth detection device 9b can be activated to the limit state. The second, narrower workpiece is fed into the receiving space and positioned by the fifth detection device 9b, enabling the feeding mechanism 2 to feed two workpieces at once. This allows the gripping mechanism 4 to transport two narrower workpieces simultaneously, further improving the workpiece transport device. It should be noted that since both the first feeding module 22 and the second feeding module 23 are equipped with multiple corresponding first guide components 222 and second guide components 232, and both the first gripper component 42 and the second gripper component 43 are equipped with multiple corresponding first grippers 422 and second grippers 432, for example, the first guide component 222 and the second guide component 232 corresponding to the left side of the main platform 1 can clamp the workpiece located on the left side of the receiving space, and the first guide component 222 and the second guide component 232 corresponding to the right side of the main platform 1 can clamp the workpiece located on the right side of the receiving space. The same applies to the first gripper component 42 and the second gripper component 43, which will not be elaborated further here. Therefore, the gripping mechanism 4 can simultaneously grip and transport two workpieces.

[0065] like Figure 1 and Figure 2 As shown, Figure 1 This indicates that the multi-functional transfer device is in the contact state. Figure 2 This indicates that the multifunctional transfer device is in a feeding state corresponding to the target position. Based on any of the above embodiments, the multifunctional transfer device can be applied to the transportation of heavy sheet-like workpieces in fields such as vacuum coating or other fields. This utility model does not impose specific limitations. The control method of the transfer device includes steps S100 to S600, wherein:

[0066] S100. The fifth detection device 9 is activated to the limit state;

[0067] Specifically, the limiting member 92 is driven to rotate 90° toward the contact space by the rotating device 91, so that the limiting member 92 is switched from the initial state to the limiting state; in addition, the limiting member 92 can be switched from the limiting state to the initial state by the rotating device 91 driving the limiting member 92 to rotate 90° toward the outside of the contact space.

[0068] In some alternative embodiments, the transfer device may be equipped with a fifth detection device 9a and a fifth detection device 9b. If the width of the workpiece is large, the fifth detection device 9a can be activated to the limit state. If the width of the workpiece is small, the fifth detection device 9a and the fifth detection device 9b can be activated sequentially to the limit state according to the feeding sequence.

[0069] S200, The workpiece is received at the receiving position via the feeding mechanism 2:

[0070] Specifically, the transfer device is positioned as follows: Figure 1 The workpiece is in the contact state shown, i.e., the feeding mechanism 2 and the gripping mechanism 4 are in the contact position. The workpiece can be pushed into the contact space from the feeding port 201. The workpiece is supported by the guide wheel 2322 of the second feeding module 23. At the same time, the guide wheel 2322 rotates axially due to the friction of the workpiece and forms the driving surface. The workpiece is further driven into the contact space through the driving surface. Meanwhile, the workpiece swing is restricted by the limiting wheels 2323 on the front and rear sides. The limiting wheels 2323 on both sides rotate axially due to the friction of the workpiece, further driving the workpiece into the contact space to improve the feeding efficiency of the workpiece. The workpiece moves to contact the limiting member 92 of the fifth detection device 9 and stops. Then, the first feeding module 22 moves down through the third lifting device 21 and clamps the top of the workpiece through the third clamping groove 221, so that the workpiece is fixed in the contact space, thereby completing the feeding.

[0071] It should be noted that the receiving position is located on the lower part of the main platform 1 to reduce the difficulty of feeding the workpiece. In other words, during the feeding process of the feeding mechanism 2, the feeding mechanism 2 picks up the workpiece from the receiving position. At this time, the first transmission slider 3113 in the first lifting device 31 is close to the bottom of the first guide rail 3112, so that the first gripper assembly 42 is kept on the lower side of the first mounting bracket 24, thereby making the gripping mechanism 4 close to the receiving position, so as to shorten the displacement distance of the gripping mechanism 4 and improve the efficiency of gripping the workpiece.

[0072] S300, The workpiece is gripped by the gripping mechanism 4;

[0073] Specifically, the gripping mechanism 4, corresponding to the receiving position, is driven by the second lifting device 41 to move the first gripper assembly 42 and the second gripper assembly 43 in opposite directions, so that the first gripper assembly 42 and the second gripper assembly 43 open. The movement of the first gripper assembly 42 and the second gripper assembly 43 in opposite directions stops when the third detection contact 71 couples with the third sensor 72. At this point, the distance between the first gripper assembly 42 and the second gripper assembly 43 is greater than the height of the workpiece. Then, the forward and backward moving device 33 drives the sub-platform 34 to move forward relative to the lifting platform 32 along the second movement direction, and the sub-platform 34 drives the gripping mechanism 4 to extend forward, so that each of the... The first gripper 422 is inserted into the space between two adjacent first guide components 222, and each of the second grippers 432 is inserted into the space between two adjacent second guide components 232, so that the first clamping groove 420 of each first gripper 422 and the second clamping groove 430 of each second gripper 432 are respectively aligned with the top and bottom of the workpiece; then, the second lifting device 41 drives the first gripper assembly 42 and the second gripper assembly 43 to move towards each other, and clamps the workpiece through the first clamping groove 420 and the second clamping groove 430, so that the workpiece is fixed in the clamping space, thereby completing the action of the gripping mechanism 4 to grip the workpiece.

[0074] S400, disengage the workpiece from the feeding mechanism 2;

[0075] Specifically, after the gripping mechanism 4 grips the workpiece, the third lifting device 21 drives the first feeding module 22 to move upward, causing the first feeding module 22 to release the workpiece. The first feeding module 22 stops moving upward when the fourth detection contact 81 couples with the fourth sensor 82, indicating that the first feeding module 22 has moved into position, thus providing space for the gripping mechanism 4 to further transport the workpiece. Subsequently, the first lifting device 31 drives the lifting platform 32 to move upward relative to the main platform 1 along the first movement direction, raising the workpiece until it is disengaged from the fourth clamping slot 231. This causes the workpiece to detach from the feeding mechanism 2. During this upward movement, the lifting platform 32 stops when the second detection contact 61 couples with the second sensor 62, indicating that the lifting platform 32 has moved into position, so that the workpiece is aligned with the target position (such as the workpiece placement position of the substrate holder in a vacuum coating production line). It should be noted that the first feeding module 22 and the gripping mechanism 4 can be controlled to move upward simultaneously by a corresponding control system, or the first feeding module 22 and the gripping mechanism 4 can be controlled to move upward sequentially by individual control. This utility model does not make any specific limitations.

[0076] In addition, once the gripping mechanism 4 grips the workpiece, it can trigger the fifth detection device 9 to switch to the initial state, causing the limiting member 92 to rotate to the outside of the receiving space.

[0077] S500, the workpiece is further transported to the target position by the gripping mechanism 4;

[0078] Specifically, the secondary platform 34 is driven to continue moving forward relative to the lifting platform 32 along the second movement direction by the forward and backward moving device 33. The secondary platform 34 drives the gripping mechanism 4 to move further forward. The secondary platform 34 stops moving forward when the first detection contact 51 couples with the first sensor 52, indicating that the gripping mechanism 4 has continued to move forward into place. At this time, the workpiece is in the target position (such as the workpiece placement position of the substrate holder in a vacuum coating production line). Subsequently, the first gripper assembly 42 and the second gripper assembly 43 are driven to move in opposite directions by the second lifting device 41. The first gripper assembly 42 and the second gripper assembly 43 are opened to release the workpiece, and the first gripper assembly 42 and the second gripper assembly 43 move in opposite directions until the third detection contact 71 is coupled with the third sensor 72, thereby stopping the transfer device from the receiving state to the feeding state corresponding to the target position, thus completing the transfer of the workpiece from the transfer device to the target position. It should be noted that the clamping and releasing actions of the target position (such as the substrate holder) on the workpiece can refer to the feeding mechanism 2, or can be implemented by existing technology, and this utility model does not make specific limitations.

[0079] S600, The transfer device is reset;

[0080] Specifically, the auxiliary platform 34 is driven to move backward relative to the lifting platform 32 along the second movement direction by the forward and backward moving device 33, so that the first gripper assembly 42 and the second gripper assembly 43 move backward away from the target position (such as the substrate holder in the vacuum coating production line) to reset. Subsequently, the lifting platform 32 can be driven to move downward relative to the main platform 1 along the first movement direction to the receiving position by the first lifting device 31 to realize the reset of the transfer device, so that the transfer device is reset from the feeding state to the receiving state, thereby enabling the transfer device to repeat steps S100 to S500 to facilitate the transfer of workpieces again.

[0081] It should be noted that, based on the above control method, the specific installation positions and specific detection positions of the first detection device 5, the second detection device 6, the third detection device 7 and the fourth detection device 8 can be set according to the specific application of the transfer device, and this utility model does not make specific limitations.

[0082] This utility model proposes a multi-functional transfer device, including a feeding mechanism 2, a gripping mechanism 4, and a drive mechanism 3 for moving the gripping mechanism 4. The feeding mechanism 2 first loads the workpiece, and then the drive mechanism 3 drives the gripping mechanism 4 to move longitudinally up and down and laterally forward and backward relative to the main platform 1. Through the coordinated operation of the feeding mechanism 2, the gripping mechanism 4, and the drive mechanism 3, the workpiece is fed into the machine and automatically transported to the target position. Compared to the traditional method of transporting workpieces using forklifts, overhead cranes, and electric hoists, this utility model's transfer device integrates feeding, gripping, multiple lifting, and translation mechanisms to achieve automatic loading and unloading of workpieces. This ensures that the workpiece is accurately installed in the target position, significantly saving labor costs, simplifying the workpiece transfer process, improving workpiece transportation efficiency, reducing equipment space occupation, lowering production costs and accident risks, and enhancing product quality stability.

[0083] The above examples are merely illustrative of the technical content of this utility model to facilitate reader understanding, but do not imply that the implementation of this utility model is limited to these embodiments. Any technical extensions or re-creations made based on this utility model are protected by this utility model. The scope of protection of this utility model is defined by the claims.

Claims

1. A multi-functional transfer device, characterized by, The device includes a main platform (1), a feeding mechanism (2) located outside the main platform (1), a driving mechanism (3) located inside the main platform (1), and a gripping mechanism (4) connected to the driving mechanism (3). The feeding mechanism (2) includes a receiving space for fixing the workpiece. The driving mechanism (3) can drive the gripping mechanism (4) to move relative to the main platform (1) along a first movement direction and a second movement direction, so that the gripping mechanism (4) can at least partially extend into the receiving space and grip the workpiece. The first movement direction and the second movement direction are perpendicular to each other.

2. The multi-functional transport device of claim 1, wherein, The drive mechanism (3) includes a first lifting device (31) disposed on the main platform (1), a lifting platform (32) connected to the first lifting device (31), a front-to-back moving device (33) disposed on the lifting platform (32), and a sub-platform (34) passing through the lifting platform (32) and connected to the front-to-back moving device (33). The gripping mechanism (4) is disposed in the sub-platform (34) and connected to the front-to-back moving device (33) through the sub-platform (34). The first lifting device (31) drives the lifting platform (32) to move relative to the main platform (1) along the first direction of movement, and drives the sub-platform (34) and the gripping mechanism (4) to move along the first direction of movement. The front-to-back moving device (33) drives the sub-platform (34) to move relative to the lifting platform (32) along the second direction of movement, and drives the gripping mechanism (4) to move along the second direction of movement.

3. A multi-functional transfer device as claimed in claim 2, wherein, The gripping mechanism (4) includes a second lifting device (41) provided on the sub-platform (34), a first gripper assembly (42) and a second gripper assembly (43) provided opposite to the second lifting device (41). The second lifting device (41) drives the first gripper assembly (42) and the second gripper assembly (43) to move towards or away from each other to clamp or release the workpiece. The first gripper assembly (42) and the second gripper assembly (43) are respectively provided with a first clamping groove (420) and a second clamping groove (430), which together form a clamping space for fixing the workpiece.

4. A multifunctional transfer device as described in claim 2, characterized in that, The outer side of the sub-platform (34) is provided with a connecting seat (341) connected to the front and rear moving device (33). The outer side of the lifting platform (32) is provided with a first detection device (5) connected to the connecting seat (341) and a second detection device (6) connected to the main platform (1). The first detection device (5) is used to detect the front and rear translation position of the sub-platform (34) relative to the lifting platform (32), and the second detection device (6) is used to detect the lifting position of the lifting platform (32) relative to the main platform (1).

5. A multifunctional transfer device as described in claim 3, characterized in that, A third detection device (7) is provided between the gripping mechanism (4) and the sub-platform (34). The third detection device (7) is used to detect the lifting position of the first gripper assembly (42) and / or the second gripper assembly (43) relative to the sub-platform (34).

6. A multifunctional transfer device as described in claim 1, characterized in that, The wafer feeding mechanism (2) includes a third lifting device (21) located on the main platform (1), a first wafer feeding module (22) connected to the third lifting device (21), and a second wafer feeding module (23) located on the main platform (1) and opposite to the first wafer feeding module (22). The first wafer feeding module (22) and the second wafer feeding module (23) are respectively provided with a third clamping groove (221) and a fourth clamping groove (231). The wafer receiving space is formed by the third clamping groove (221) and the fourth clamping groove (231). The third lifting device (21) is used to drive the first wafer feeding module (22) to move closer to or away from the second wafer feeding module (23).

7. A multifunctional transfer device as described in claim 6, characterized in that, The first feeding module (22) is connected to the third lifting device (21) through the first mounting bracket (24). The first feeding module (22) includes a plurality of first guide components (222). Each first guide component (222) is spaced apart along the length direction of the first mounting bracket (24). Each first guide component (222) includes a first connecting bracket (2221) connected to the first mounting bracket (24) and a universal ball assembly (2222) disposed inside the first connecting bracket (2221). The third clamping groove (221) is disposed in the first connecting bracket (2221), and the universal ball assembly (2222) is disposed on both sides of the third clamping groove (221).

8. A multifunctional transfer device as described in claim 6, characterized in that, The second wafer feeding module (23) is connected to the main platform (1) via the second mounting bracket (25). The second wafer feeding module (23) includes several second guide components (232). Each second guide component (232) is spaced apart along the length direction of the second mounting bracket (25). Each second guide component (232) includes a mounting base (2321) connected to the second mounting bracket (25), a guide wheel (2322) rotatably disposed in the mounting base (2321), and a limiting wheel (2323) rotatably disposed in the mounting base (2321) and located above the guide wheel (2322). The fourth clamping groove (231) is disposed in the guide wheel (2322), and the limiting wheel (2323) is provided on both sides of the fourth clamping groove (231).

9. A multifunctional transfer device as described in claim 6, characterized in that, It also includes a fourth detection device (8) located between the first wafer feed module (22) and the main platform (1), the fourth detection device (8) being used to detect the lifting position of the first wafer feed module (22) relative to the main platform (1).

10. A multifunctional transfer device as described in claim 1, characterized in that, The bonding space is provided with a bonding port (201) on one side. The transfer device also includes at least one fifth detection device (9) provided on the main platform (1). The fifth detection device (9) includes a rotating device (91) provided on the main platform (1) and a limiting member (92) connected to the rotating device (91). The rotating device (91) drives the limiting member (92) to rotate around the rotating device (91) so that the limiting member (92) switches between an initial state and a limiting state. When the limiting member (92) is in the initial state, the limiting member (92) is outside the bonding space. When the limiting member (92) is in the limiting state, the limiting member (92) rotates into the bonding space and is opposite to the bonding port (201).

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