A feed adjustment rack for a CVD furnace

Abstract

This invention provides a feed adjustment bracket for a CVD furnace, comprising: a movable support; an adjustment bracket connected to the movable support via several adjustment components, the position of which can be adjusted vertically along the movable support via the adjustment components; and a mounting hole on the adjustment bracket, into which a feed pipe is installed via a fine-tuning component, the position of which can be adjusted radially along the mounting hole via the fine-tuning component. This invention uses the adjustment components, i.e., rotating a nut, to adjust the position of the adjustment bracket, aligning the feed pipe of the adjustment component with the feed hole of the CVD furnace. This achieves the effect of easily adjustable vertical position of the feed pipe, avoiding collisions or friction between the feed hole and the feed pipe due to misalignment, which could lead to damage.

Description

Technical Field

[0001] This utility model relates to the technical field of CVD furnace feeding, and in particular to a feeding adjustment rack for a CVD furnace. Background Technology

[0002] The material to be reacted is usually fed into the CVD furnace by manually opening the feed port and then injecting the material into the furnace. This method is labor-intensive and inefficient.

[0003] To expedite the process of injecting materials into the furnace, a feed pipe is installed on a movable frame. When materials need to be injected, the feed pipe is inserted into the furnace via the movable frame. Normally, the feed pipe is located on the outside of the furnace body. However, during long-term operation, a misalignment may occur between the feed pipe and the feed hole. When the feed pipe is inserted into the furnace, it may rub against the feed hole of the furnace body or even collide with it, causing damage to the feed pipe. Utility Model Content

[0004] Therefore, the purpose of this utility model is to provide a feed adjustment frame for a CVD furnace that facilitates the adjustment of the feed pipe position.

[0005] This utility model provides the following technical solution: a feed adjustment rack for a CVD furnace, comprising:

[0006] A movable support;

[0007] An adjustable bracket is connected to the movable bracket via several adjusting components, which allow the position of the adjustable bracket to be adjusted along the vertical direction of the movable bracket.

[0008] Mounting hole: The adjusting bracket has a mounting hole, and the feed pipe is installed in the mounting hole through a fine-tuning component. The position of the feed pipe can be adjusted radially along the mounting hole through the fine-tuning component.

[0009] The adjustment assembly includes a first adjustment bolt with at least two nuts threaded onto it. The two nuts are located between the movable bracket and the adjustment bracket. The upper nut contacts the lower side of the adjustment bracket, and the lower nut contacts the upper side of the movable bracket. The vertical position of the movable bracket can be adjusted by rotating the upper nut.

[0010] Furthermore, the fine-tuning component includes a mounting ring disposed at the mounting hole of the adjusting bracket, at least three second adjusting bolts surrounding the mounting ring and threadedly connected to the mounting ring, the ends of the second adjusting bolts abutting against the outer wall of the feed tube, thereby fixing the feed tube within the mounting hole.

[0011] Furthermore, the second adjusting bolts are arranged at even intervals.

[0012] Furthermore, the mounting ring protrudes from the outer wall of the adjusting bracket.

[0013] Furthermore, the adjusting bracket has at least two mounting holes, which are located on the same side and are adjacent to each other. Each mounting hole is provided with a fine-tuning component, and the second adjusting bolt in the adjacent fine-tuning component is positioned on the opposite side away from the adjacent mounting ring.

[0014] Furthermore, a kit is provided inside the mounting hole, the feed tube is sleeved inside the kit, and the end of the second adjusting bolt abuts against the outer wall of the kit.

[0015] Furthermore, the adjustment assembly includes four nuts, two adjacent nuts clamping the movable bracket, and another two adjacent nuts clamping the adjustment bracket.

[0016] The beneficial effects of this utility model are as follows: By adjusting the component, i.e., by rotating the nut, the position of the adjusting bracket can be adjusted so that the feed pipe of the adjusting component is aligned with the feed hole of the CVD furnace. This achieves the effect of easy adjustment of the upper and lower positions of the feed pipe, avoiding the collision or friction between the feed hole and the feed pipe due to misalignment, which could lead to damage. Furthermore, through the fine-tuning component, the operator can adjust the radial position of the feed pipe by rotating the second adjusting bolt, thereby achieving a fine-tuning effect. This further facilitates the adjustment of the feed pipe's position, making it less likely for the feed hole and the feed pipe to come into contact, ensuring safe connection between the two. Attached Figure Description

[0017] Figure 1 This is a front view of the present invention.

[0018] Figure 2 This is a side view of the present invention.

[0019] Figure 3 This is a schematic diagram of the movable support, adjustment component, and fine-tuning component of this utility model.

[0020] Figure 4 This is a schematic diagram of the fine-tuning component of this utility model.

[0021] Figure 5This is a schematic diagram showing the fit between the feed pipe and the feed hole of the CVD furnace of this utility model.

[0022] The labels in the attached diagram are as follows: 1-moving bracket, 11-horizontal plate, 12-moving wheel, 13-first upright, 14-crossbeam, 15-first connecting plate, 2-adjusting bracket, 21-mounting bracket, 22-second upright, 23-second connecting plate, 3-adjusting assembly, 31-first adjusting bolt, 32-nut, 4-fine-tuning assembly, 41-mounting hole, 42-kit, 43-mounting ring, 44-second adjusting bolt, 5-feed pipe, 6-CVD furnace, 7-feed hole. Detailed Implementation

[0023] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Several embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the disclosure of this utility model will be more thorough and complete.

[0024] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0026] A feed adjustment rack for CVD furnace 6, such as Figure 1 and Figure 2 As shown, it includes: a movable support 1, an adjusting support 2, an adjusting component 3, and a fine-tuning component 4.

[0027] The movable support 1 is movable, thereby allowing the feed pipe 5 to be inserted into the CVD furnace 6, such as... Figure 3As shown, the movable support 1 includes a square horizontal plate 11, and two H-shaped first uprights 13 are fixedly connected to both sides of the horizontal plate 11. The front and rear sides of the two first uprights 13 are both fixedly connected to the inward side with first connecting plates 15. In order to enhance the support function of the two first uprights 13, a crossbeam 14 is fixedly connected between the two first uprights 13. Four moving wheels 12 are provided on the bottom side of the horizontal plate 11, and the four moving wheels 12 are distributed around the bottom side of the horizontal plate 11.

[0028] The adjusting bracket 2 is used to install the feed pipe 5 and adjust the position of the feed pipe 5. In this embodiment, two adjusting brackets 2 are provided. The number of adjusting brackets 2 can be increased or decreased according to the actual situation. No limit is made here. The two adjusting brackets 2 are also connected by the adjusting component 3.

[0029] like Figure 3 As shown, the adjustment bracket 2 includes a mounting bracket 21 in the shape of a square. A second upright 22 is fixedly connected to both the upper and lower sides of the mounting bracket 21. A first connecting plate 15 is fixedly connected to the second upright 22 extending inward. Seven mounting holes 41 are provided on both the front and rear sides of the mounting bracket 21. The mounting holes 41 on the front and rear sides are aligned with each other. The number of mounting holes 41 can be adjusted according to the actual situation and is not limited here.

[0030] Adjustment component 3 allows the position of adjustment bracket 2 to be adjusted along the vertical direction of the movable bracket 1; adjustment bracket 2 is connected to the movable bracket 1 through several adjustment components 3; the movable bracket 1 is connected to the lower adjustment bracket 2 through four adjustment components 3, and the upper adjustment bracket 2 is also connected to the lower adjustment bracket 2 through four adjustment components 3. The number of adjustment components 3 can be adjusted according to the actual scenario and is not limited here.

[0031] The adjusting assembly 3 includes a first adjusting bolt 31 and two nuts 32. The first adjusting bolt 31 passes through the first connecting plate 15 of the movable bracket 1 and the second connecting plate 23 on the lower side of the adjusting bracket 2. The two nuts 32 are threaded onto the first adjusting bolt 31 and are located between the first connecting plate 15 and the second connecting plate 23. The upper nut 32 supports the second connecting plate 23, and the lower nut 32 contacts the upper side of the first connecting plate 15, thus supporting the first adjusting bolt 31 on the first connecting plate 15. When the vertical position of the adjusting bracket 2 needs to be adjusted, the operator can rotate the upper nut 32 clockwise, which will push the adjusting bracket 2 upwards, thereby adjusting its position. When the adjusting bracket 2 needs to be moved downwards, simply rotate the upper nut 32 counterclockwise, and the lower nut 32 will move downwards. The adjusting bracket will then move downwards under its own weight, following the lower nut 32, thus adjusting the adjusting bracket 2 downwards. Figure 5 As shown, adjusting the vertical position of the adjusting brackets thereby adjusts the vertical position of the feed pipe 5, so that the feed pipe 5 is better aligned with the feed hole 7 of the CVD furnace 6; the two adjusting brackets 2 are connected together by the adjusting assembly 3. Figure 3 As can be seen, the first adjusting bolt 31 passes through the second connecting plate 23 on the upper part of the lower adjusting bracket 2 and through the second connecting plate 23 on the lower part of the upper adjusting bracket 2. Then, the upper nut 32 of the adjusting component 3 supports the lower second connecting plate 23 of the upper adjusting bracket 2. The adjustment method is also to adjust the up and down position of the upper adjusting bracket 2 by rotating the nut 32. Since the adjustment method is the same as that of the moving bracket 1 and the lower adjusting bracket 2 mentioned above, it will not be described in detail.

[0032] Furthermore, in other embodiments, the adjusting component 3 may include four nuts 32, such as Figure 3 As shown, the two nuts 32 on the upper side clamp the second connecting plate 23 between the two nuts 32, and the two nuts 32 on the lower side clamp the first connecting plate 15 between the two nuts 32. This prevents the adjusting bracket 2 from moving upward and causing it to detach from the first adjusting screw. Alternatively, the first adjusting bolt 31 can be fixed to the first connecting plate 15 by the two nuts 32 on the lower side. When it is necessary to adjust the vertical position of the adjusting bracket 2, the operator can rotate the nuts 32 on the upper side of the second connecting plate 23 upward, and then rotate the nuts 32 on the lower side of the second connecting plate 23 downward. The upper side is rotated to adjust the upward position of the adjusting bracket 2. When adjusting the downward position of the adjusting bracket 2, the operator can directly rotate the nut 32 on the lower side of the second connecting plate 23 to move it downward, and rotate the nut 32 on the upper side of the second connecting plate 23 to move it downward, so that the nut 32 on the upper side of the second connecting plate 23 presses the second connecting plate 23. Thus, the two nuts 32 clamp the second connecting plate 23, thereby fixing the adjusting bracket 2. The upper adjusting bracket 2 and the lower adjusting bracket 2 use an adjusting assembly 3 with four nuts 32. The operation method is similar to that described above, and will not be elaborated here.

[0033] Fine-tuning component 4, a feed pipe 5 is installed in the mounting hole 41 through the fine-tuning component 4, the position of the feed pipe 5 can be adjusted radially along the mounting hole 41 through the fine-tuning component 4;

[0034] like Figure 3 and Figure 4 As shown, the fine-tuning component 4 includes a mounting ring 43 disposed at the mounting hole 41 of the adjusting bracket 2, at least three second adjusting bolts 44 surrounding the mounting ring 43 and threadedly connected to the mounting ring 43, the ends of the second adjusting bolts 44 abutting against the outer wall of the feed pipe 5, thereby fixing the feed pipe 5 in the mounting hole 41;

[0035] In this embodiment, a mounting ring 43 is fixedly connected to the mounting hole 41 of the adjusting bracket 2. The mounting ring 43 is coaxial with the mounting hole 41 and protrudes from the outer wall of the adjusting bracket 2 to facilitate the rotation of the second adjusting bolt 44. In this embodiment, four second adjusting bolts 44 are provided, while in other embodiments, three may be provided. If there are three, the rotation angle between adjacent second adjusting bolts 44 is 120 degrees. Of course, the number of second adjusting bolts 44 can be increased, which is not limited here. In this embodiment, four through threaded holes are provided on the mounting ring 43. The threaded holes are evenly spaced, and the rotation angle between adjacent threaded holes is 90 degrees. The second adjusting bolts 44 are threadedly connected in the threaded holes. The end of the feed pipe 5 passes through the front and rear mounting holes 41 in sequence, and then the operator passes through... By screwing in the four second adjusting bolts 44, the ends of the second adjusting bolts 44 abut against the outer wall of the feed pipe 5, thereby installing the feed pipe 5 into the mounting hole 41. When it is necessary to fine-tune the position between the feed pipe 5 and the feed hole 7 of the CVD furnace 6, the operator can rotate the two lower second adjusting bolts 44 outwards from the mounting hole 41, and then screw the two upper second adjusting bolts 44 inwards from the mounting hole 41, thereby adjusting the position of the feed pipe 5 downwards. Rotating the two upper second adjusting bolts 44 outwards and the two lower second adjusting bolts 44 inwards from the mounting hole 41 can also adjust the position of the feed pipe 5 upwards. Adjusting the left and right position of the feed pipe 5 is also done by rotating the two left and right second adjusting bolts 44, which is similar to adjusting the up and down position of the feed pipe 5, and will not be described in detail here.

[0036] Furthermore, the two fine-tuning components 4 located on the same side and adjacent to each other have their second adjusting bolts 44 positioned away from the adjacent mounting rings 43. In other words, the second adjusting bolts 44 are not positioned on the adjacent sides of the two adjacent mounting rings 43 to avoid interference when rotating the second adjusting bolts 44. The four second adjusting bolts 44 are arranged in an X-shape, which makes it easier for people to rotate the second adjusting bolts 44 and adjust the position of the feed pipe 5.

[0037] A kit 42 is provided inside the mounting hole 41, the feed pipe 5 is sleeved inside the kit 42, and the end of the second adjusting bolt 44 abuts against the outer wall of the kit 42.

[0038] The kit 42 has a hollow internal structure and is cylindrical in shape. The outer wall of the feed pipe 5 is press-fitted with the inside of the kit 42, so that the feed pipe 5 contacts the outer wall of the kit 42 and the kit 42 contacts the end of the second adjusting bolt 44. This avoids the second adjusting bolt 44 from directly contacting the end of the second adjusting bolt 44, which could easily cause damage to the feed pipe 5.

[0039] In summary, by adjusting component 3, i.e. by rotating nut 32, the position of adjusting bracket 2 is adjusted so that the feed pipe 5 of adjusting component 3 is aligned with the feed hole 7 of CVD furnace 6. This achieves the effect of easily adjusting the vertical position of feed pipe 5, avoiding misalignment between feed hole 7 and feed pipe 5, which could cause collision or friction and damage. Furthermore, by using fine-tuning component 4, the operator can adjust the radial position of feed pipe 5 by rotating second adjusting bolt 44, thereby achieving a fine-tuning effect. This further facilitates the adjustment of the position of feed pipe 5, making it less likely for feed hole 7 and feed pipe 5 to come into contact, ensuring safe connection between the two.

[0040] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0041] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A feed adjustment rack for a CVD furnace, characterized in that, include: A movable support; An adjustable bracket is connected to the movable bracket via several adjusting components, which allow the position of the adjustable bracket to be adjusted along the vertical direction of the movable bracket. Mounting hole: The adjusting bracket has a mounting hole, and the feed pipe is installed in the mounting hole through a fine-tuning component. The position of the feed pipe can be adjusted radially along the mounting hole through the fine-tuning component. The adjustment assembly includes a first adjustment bolt with at least two nuts threaded onto it. The two nuts are located between the movable bracket and the adjustment bracket. The upper nut contacts the lower side of the adjustment bracket, and the lower nut contacts the upper side of the movable bracket. The vertical position of the movable bracket can be adjusted by rotating the upper nut.

2. The feed adjustment frame according to claim 1, characterized in that, The fine-tuning assembly includes a mounting ring disposed at the mounting hole of the adjusting bracket, at least three second adjusting bolts surrounding the mounting ring and threadedly connected to the mounting ring, the ends of the second adjusting bolts abutting against the outer wall of the feed tube, thereby fixing the feed tube inside the mounting hole.

3. The feed adjustment frame according to claim 2, characterized in that, The second adjusting bolts are evenly spaced.

4. The feed adjustment frame according to claim 2, characterized in that, The mounting ring protrudes from the outer wall of the adjusting bracket.

5. The feed adjustment frame according to claim 2, characterized in that, The adjusting bracket has at least two mounting holes, which are located on the same side and are adjacent to each other. Each mounting hole is provided with a fine-tuning component, and the second adjusting bolt in the adjacent fine-tuning component is set to the opposite side away from the adjacent mounting ring.

6. The feed adjustment frame according to claim 2, characterized in that, A kit is provided inside the mounting hole, the feed tube is sleeved inside the kit, and the end of the second adjusting bolt abuts against the outer wall of the kit.

7. The feed adjustment frame according to claim 1, characterized in that, The adjustment assembly includes four nuts, two of which clamp the movable bracket, and the other two of which clamp the adjustment bracket.

Images