Rotary lifting device suitable for 200l vat acid soaking
By designing a rotary lifting device suitable for 200L containers, the acid soaking process was automated and rotated uniformly, solving the problems of increased workload and contact risks associated with manual operation, and improving work efficiency and safety.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HUBEI XINGLI ELECTRONIC MATERIALS CO LTD
- Filing Date
- 2025-06-16
- Publication Date
- 2026-05-29
AI Technical Summary
The existing 200L tank acid soaking process requires manual operation, which increases the workload of operators and the risk of exposure to hydrofluoric acid, and cannot ensure that all parts of the tank are evenly exposed to hydrofluoric acid.
A rotary lifting device comprising a lifting mechanism, a fixing mechanism, and a rotating mechanism was designed. The device utilizes a motor-driven ball screw to achieve vertical lifting and rotation of the bucket, and combines a clamp and a vertical fixing rod to achieve multi-dimensional fixing and uniform rotation.
The entire acid soaking process has been automated, reducing labor costs, ensuring uniform contact of hydrofluoric acid in all parts of the tank, and improving the metal leaching rate and operational safety.
Smart Images

Figure CN224298798U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the technical field of chemical product processing equipment, and in particular relates to a rotary lifting device suitable for acid soaking in 200L barrels. Background Technology
[0002] Electronic-grade hydrofluoric acid is a high-purity product made from industrial anhydrous hydrofluoric acid through a purification process. This substance is a colorless, transparent liquid with strong oxidizing, corrosive, and irritating odors. It reacts with metals, oxides, and silicates. Its purity must meet the stringent standards of the semiconductor and other electronics industries. It can be used in chip acid soaking and etching processes to remove impurities from silicon wafer surfaces and precisely control the etching accuracy of circuit structures.
[0003] Hydrofluoric acid is a highly oxidizing electronic-grade chemical. The 200L containers are made of plastic and undergo ultrapure water cleaning upon arrival at the factory before being filled. To minimize the impact of the 200L containers on the quality of the electronic-grade hydrofluoric acid during filling, a pretreatment process is added before cleaning. This involves soaking the 200L containers in electronic-grade hydrofluoric acid. The strong oxidizing properties of hydrofluoric acid help to leach out any metal elements present in the plastic material of the 200L containers, thus reducing the impact of these metal elements on the filling process.
[0004] The acid soaking process for a 200L container involves adding 4-5L of electronic-grade hydrofluoric acid, tightening the lid with a torque wrench, then laying the container horizontally. The operator stands on the side of the container and shakes it back and forth 15 times on each side, repeating this process on all four sides. This method presents several problems: 1. It increases the workload for operators; 2. It increases the risk of operators directly contacting hydrofluoric acid; 3. It cannot ensure that every part of the 200L container comes into contact with hydrofluoric acid. Summary of the Invention
[0005] To address the problems in the prior art, this utility model provides a rotary lifting device suitable for 200L acid foaming drums, comprising a lifting mechanism, a fixing mechanism, and a rotating mechanism. The lifting mechanism includes a first motor, the output end of which is connected to the input end of a first reducer. The output end of the first reducer is connected to one end of a first worm gear. The first worm gear is connected to a first worm wheel, which is connected to one end of a ball screw. A first bushing is provided on the ball screw, and a light shaft is provided around the ball screw. A second bushing is provided on the light shaft. A connecting plate is provided between the first bushing and the second bushing. A first connecting rod and a second connecting rod are provided at both ends of the connecting plate. The first connecting rod is rotatably connected to a first connecting shaft, and the second connecting rod is rotatably connected to a second connecting shaft. A fixing mechanism is provided between the first connecting shaft and the second connecting shaft, and a rotating mechanism is provided at the other end of the second connecting shaft.
[0006] In a preferred embodiment, the output end of the first motor is detachably connected to the input end of the first reducer via a coupling, and the output end of the first reducer is detachably connected to one end of the first worm via a coupling.
[0007] In a preferred embodiment, the first worm gear is meshed with the first worm wheel, and the inner ring of the first worm wheel is fixedly connected to one end of the ball screw.
[0008] In a preferred embodiment, the ball screw is arranged parallel to the optical axis, and the first bushing and the second bushing are at the same horizontal height.
[0009] In a preferred embodiment, the first connecting rod is provided with a bearing, one end of the first connecting shaft is fixedly connected to the inner ring of the bearing, and the other end is fixedly connected to the fixing mechanism; the second connecting rod is also provided with a bearing, the middle part of the second connecting shaft is fixedly connected to the inner ring of the bearing, one end is fixedly connected to the fixing mechanism, and the other end is connected to the rotating mechanism for transmission.
[0010] In a preferred embodiment, the fixing mechanism includes a horizontal fixing mechanism and a vertical fixing mechanism. The horizontal fixing mechanism is a clamp, and the vertical fixing mechanism is a vertical fixing rod, with the vertical fixing rod fixedly mounted on the clamp.
[0011] In a preferred embodiment, the clamp consists of a semi-circular fixed clamp and two quarter-movable clamps. The two ends of the semi-circular fixed clamp are respectively hinged to one end of the quarter-movable clamp, and the other ends of the two quarter-movable clamps are detachably connected by bolts.
[0012] In a preferred embodiment, the vertical fixing rod includes a pole with fixing plates extending from both ends. The upper fixing plate has threaded holes that are threadedly connected to adjusting bolts. One end of the adjusting bolt is fixed with a fixing washer.
[0013] In a preferred embodiment, the rotating mechanism includes a second motor, the output end of which is detachably connected to the input end of a second reducer via a coupling, the output end of the second reducer is detachably connected to one end of a second worm via a coupling, the second worm is meshed with a second worm wheel, and the inner ring of the second worm wheel is fixedly connected to one end of a second connecting shaft.
[0014] The beneficial effects of this utility model are:
[0015] (1) Fully automated operation: The 200L barrel is vertically lifted by the ball screw driven by the first motor, replacing the traditional manual handling; the second motor drives the second worm gear to rotate the 200L barrel 360°, improving the acid soaking efficiency;
[0016] (2) Significant reduction in labor costs: The acid foaming operation that originally required two operators can now be completed by one person remotely controlling the equipment, saving labor costs;
[0017] (3) Multi-dimensional fixed structure:
[0018] The clamp consists of a semi-circular fixed clamp and a quarter-circular movable clamp. After being connected by bolts, it forms a circumferential clamping force on the 200L bucket. Together with the adjusting bolt of the vertical fixing rod, it tightens the bucket lid, achieving a double fixation of "horizontal clamping + vertical limiting" to prevent the bucket from shifting during rotation.
[0019] The ball screw is set parallel to the optical axis, and the first bushing and the second bushing are linked by a connecting plate to reduce the horizontal sway during the lifting process and ensure the stability of the fixing mechanism.
[0020] (4) Uniform rotation acid soaking operation: The rotating mechanism is driven by the second worm gear-worm wheel, so that the 200L tank maintains a uniform rotation speed during the acid soaking process. The contact time difference between hydrofluoric acid and various parts of the tank wall is relatively uniform, which significantly improves the uneven contact compared with the traditional manual shaking and increases the metal element precipitation rate. Attached Figure Description
[0021] Figure 1 This is a schematic diagram of the overall structure of this utility model.
[0022] Figure 2 This is a schematic diagram of the overall structure of this utility model from another perspective.
[0023] Figure 3 This is a top view of the present invention.
[0024] Figure 4 This is the left view of the present invention.
[0025] Figure 5 This is a front view of the present invention.
[0026] In the diagram: 1. First motor; 2. First reducer; 3. First worm gear; 4. First worm wheel; 5. Ball screw; 6. Optical shaft; 7. First bushing; 8. Connecting plate; 9. Second bushing; 10. First connecting rod; 11. First connecting shaft; 12. Second connecting rod; 13. Second connecting shaft; 14. Second motor; 15. Second reducer; 16. Second worm gear; 17. Second worm wheel; 18. Clamp; 19. Vertical fixing rod; 20. Adjusting bolt; 21. Fixing pad; 22. 200L bucket. Detailed Implementation
[0027] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments.
[0028] Example
[0029] like Figures 1-5The rotary lifting device shown is suitable for 200L acid foaming drums and includes a lifting mechanism, a fixing mechanism, and a rotating mechanism. The lifting mechanism includes a first motor 1, the output end of which is connected to the input end of a first reducer 2. The output end of the first reducer 2 is connected to one end of a first worm gear 3. The first worm gear 3 is connected to a first worm wheel 4, and the first worm wheel 4 is connected to one end of a ball screw 5. A first bushing 7 is provided on the ball screw 5, and a smooth shaft 6 is provided around the ball screw 5. A second bushing 9 is provided on the smooth shaft 6. A connecting plate 8 is provided between the first bushing 7 and the second bushing 9. A first connecting rod 10 and a second connecting rod 12 are provided at both ends of the connecting plate 8. The first connecting rod 10 is rotatably connected to a first connecting shaft 11, and the second connecting rod 12 is rotatably connected to a second connecting shaft 13. A fixing mechanism is provided between the first connecting shaft 11 and the second connecting shaft 13, and a rotating mechanism is provided at the other end of the second connecting shaft 13.
[0030] Furthermore, the output end of the first motor 1 is detachably connected to the input end of the first reducer 2 via a coupling, and the output end of the first reducer 2 is detachably connected to one end of the first worm gear 3 via a coupling.
[0031] Furthermore, the first worm 3 is meshed with the first worm wheel 4, and the inner ring of the first worm wheel 4 is fixedly connected to one end of the ball screw 5.
[0032] Furthermore, the ball screw 5 is arranged parallel to the optical axis 6, and the first bushing 7 and the second bushing 9 are at the same horizontal height.
[0033] Furthermore, the first connecting rod 10 is provided with a bearing, one end of the first connecting shaft 11 is fixedly connected to the inner ring of the bearing, and the other end is fixedly connected to the fixing mechanism; the second connecting rod 12 is also provided with a bearing, the middle part of the second connecting shaft 13 is fixedly connected to the inner ring of the bearing, one end is fixedly connected to the fixing mechanism, and the other end is connected to the rotating mechanism for transmission.
[0034] Furthermore, the fixing mechanism includes a horizontal fixing mechanism and a vertical fixing mechanism. The horizontal fixing mechanism is a clamp 18, and the vertical fixing mechanism is a vertical fixing rod 19. The clamp 18 is fixedly provided with the vertical fixing rod 19.
[0035] Furthermore, the clamp 18 consists of a semi-circular fixed clamp and two quarter-movable clamps. The two ends of the semi-circular fixed clamp are respectively hinged to one end of the quarter-movable clamp, and the other ends of the two quarter-movable clamps are detachably connected by bolts.
[0036] Furthermore, the vertical fixing rod 19 includes a pole with fixing plates extending from both ends. The upper fixing plate has threaded holes that are threadedly connected to the adjusting bolt 20. One end of the adjusting bolt 20 is fixedly provided with a fixing washer 21.
[0037] Furthermore, the rotating mechanism includes a second motor 14, the output end of which is detachably connected to the input end of a second reducer 15 via a coupling, the output end of the second reducer 15 is detachably connected to one end of a second worm 16 via a coupling, the second worm 16 is meshed with a second worm wheel 17, and the inner ring of the second worm wheel 17 is fixedly connected to one end of a second connecting shaft 13.
[0038] The above-mentioned device is used as follows: Place the 200L bucket 22 to be acid-soaked inside the clamp 18, close the two quarter-move clamps, and tighten the clamp 18 by tightening the bolts and nuts. Place the bottom of the 200L bucket 22 on the lower fixing plate of the vertical fixing rod 19, and tighten the adjusting bolt 20 of the upper fixing plate to make the fixing pad 21 tightly adhere to the upper part of the 200L bucket 22, ensuring that the 200L bucket 22 will not loosen in the vertical and horizontal directions. Then, start the first motor 1 to transmit power to the first reducer 2. The first reducer 2 amplifies the torque of the first motor 1 through its internal gear set, driving the first worm 3 to rotate. The first worm 3 meshes with the first worm wheel 4, thereby driving the first worm wheel 4 to rotate. The ball screw 5 is driven to rotate in place, and the first shaft... The first sleeve 7 converts the rotation of the lead screw into linear motion on the ball screw 5. Since the first sleeve 7 is connected to the second sleeve 9 through the connecting plate 8, the second sleeve 9 moves linearly on the optical axis 6, thereby lifting the 200L bucket 22. After the 200L bucket 22 is lifted to the specified height, the second motor 14 is started, transmitting power to the second reducer 15. The second reducer 15 amplifies the torque of the second motor 14 through the internal gear set, driving the second worm 16 to rotate. The second worm 16 meshes with the second worm wheel 17, thereby driving the second worm wheel 17 to rotate. The second worm wheel 17 drives the second connecting shaft 13 to rotate in place. The second connecting shaft 13 drives the 200L bucket 22 to rotate in place. The 200L bucket 22 drives the first connecting shaft 11 to rotate in place, completing the acid soaking process.
Claims
1. A rotary lifting device suitable for acid foaming in 200L tanks, characterized in that, The device includes a lifting mechanism, a fixing mechanism, and a rotating mechanism. The lifting mechanism includes a first motor (1), the output end of which is connected to the input end of a first reducer (2), the output end of which is connected to one end of a first worm (3), the first worm (3) is connected to a first worm wheel (4), the first worm wheel (4) is connected to one end of a ball screw (5), a first bushing (7) is provided on the ball screw (5), an optical shaft (6) is also provided around the ball screw (5), a second bushing (9) is provided on the optical shaft (6), a connecting plate (8) is provided between the first bushing (7) and the second bushing (9), a first connecting rod (10) and a second connecting rod (12) are provided at both ends of the connecting plate (8), the first connecting rod (10) is rotatably connected to the first connecting shaft (11), the second connecting rod (12) is rotatably connected to the second connecting shaft (13), a fixing mechanism is provided between the first connecting shaft (11) and the second connecting shaft (13), and a rotating mechanism is provided at the other end of the second connecting shaft (13).
2. The rotary lifting device for acid foaming in a 200L tank according to claim 1, characterized in that, The output end of the first motor (1) is detachably connected to the input end of the first reducer (2) via a coupling, and the output end of the first reducer (2) is detachably connected to one end of the first worm (3) via a coupling.
3. The rotary lifting device for acid foaming in a 200L tank according to claim 1, characterized in that, The first worm (3) is meshed with the first worm wheel (4), and the inner ring of the first worm wheel (4) is fixedly connected to one end of the ball screw (5).
4. The rotary lifting device for acid foaming in a 200L tank according to claim 1, characterized in that, The ball screw (5) is arranged parallel to the optical axis (6), and the first bushing (7) and the second bushing (9) are at the same horizontal height.
5. The rotary lifting device for acid soaking in a 200L tank according to claim 1, characterized in that, The first connecting rod (10) is provided with a bearing, one end of the first connecting shaft (11) is fixedly connected to the inner ring of the bearing, and the other end is fixedly connected to the fixing mechanism; the second connecting rod (12) is also provided with a bearing, the middle part of the second connecting shaft (13) is fixedly connected to the inner ring of the bearing, one end is fixedly connected to the fixing mechanism, and the other end is connected to the rotating mechanism for transmission.
6. The rotary lifting device for acid soaking in a 200L tank according to claim 1, characterized in that, The fixing mechanism includes a horizontal fixing mechanism and a vertical fixing mechanism. The horizontal fixing mechanism is a clamp (18), and the vertical fixing mechanism is a vertical fixing rod (19). The clamp (18) is fixedly provided with the vertical fixing rod (19).
7. The rotary lifting device for acid foaming in a 200L tank according to claim 6, characterized in that, The clamp (18) consists of a semi-circular fixed clamp and two quarter-movable clamps. The two ends of the semi-circular fixed clamp are respectively hinged to one end of the quarter-movable clamp, and the other ends of the two quarter-movable clamps are detachably connected by bolts.
8. The rotary lifting device for acid foaming in a 200L tank according to claim 6, characterized in that, The vertical fixing rod (19) includes a pole with fixing plates extending from both ends. The upper fixing plate has a threaded hole, which is threadedly connected to the adjusting bolt (20). One end of the adjusting bolt (20) is fixedly provided with a fixing pad (21).
9. The rotary lifting device for acid foaming in a 200L tank according to claim 1, characterized in that, The rotating mechanism includes a second motor (14), the output end of which is detachably connected to the input end of a second reducer (15) via a coupling, the output end of the second reducer (15) is detachably connected to one end of a second worm (16) via a coupling, the second worm (16) is meshed with a second worm wheel (17), and the inner ring of the second worm wheel (17) is fixedly connected to one end of a second connecting shaft (13).