A vacuum joint

Abstract

The utility model provides a vacuum joint belongs to vacuum system technical field. Including the joint main part, the top edge of joint main part is fixed with horizontal butt joint disc, the upper end face of butt joint disc surrounds the joint main part and is equipped with the mounting groove of concentricity, the mounting groove is inlayed with sealing washer, and the mounting groove inner bottom surface elasticity is equipped with a plurality of vertical top post, top post will sealing washer elastic resistance export mounting groove half thickness outside. Top post sets up four, and evenly distributes in mounting groove inner bottom surface. The mounting groove inner bottom surface is equipped with the insertion slot that supplies top post lower end vertical insertion, and the spring that connects top post is fixed in the insertion slot bottom. The utility model discloses, not only convenient for replacing sealing washer, easy to maintain, and can prolong the service life of sealing washer, and the whole use effect is good.

Description

Technical Field

[0001] This utility model relates to the field of vacuum system technology, and in particular to a vacuum connector. Background Technology

[0002] Vacuum connectors are key basic components of vacuum systems and are widely used in various fields that require the establishment, maintenance, or control of a vacuum environment. Their core function is to achieve reliable sealed connections between vacuum pipelines, chambers, pumps, valves, sensors, and other vacuum components, ensuring that the system can achieve and maintain the required vacuum level (from rough vacuum to extremely high vacuum).

[0003] Currently, existing vacuum connectors are generally as follows: Figure 5 As shown, the device includes a connector body 01, with a mating plate 02 fixedly attached to one end edge of the connector body 01. A sealing ring 03 is embedded in the mating plate 02. In actual use, the sealing ring 03 of this type of vacuum connector is easily over-compressed and completely pushed into the bottom of the sealing groove of the mating plate 02. This makes it difficult for operators to completely remove the failed sealing ring for replacement during later maintenance, which is not only inefficient but may also damage the surface of the sealing groove, creating a potential leakage hazard.

[0004] Therefore, this application provides a vacuum connector to solve the above-mentioned technical problems. Utility Model Content

[0005] The technical problem to be solved by this utility model is to provide a vacuum connector to solve the problem that the sealing ring is easily pushed into the deep sealing groove in the existing structure, which leads to difficulty in replacement, low maintenance efficiency and easy damage to the sealing surface.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] A vacuum connector includes a connector body, a horizontal mating plate fixed to the top edge of the connector body, and a concentric mounting groove formed around the upper end surface of the mating plate surrounding the connector body. A sealing ring is embedded in the mounting groove, and a plurality of vertical top posts are elastically mounted on the bottom surface of the mounting groove. The top posts elastically push the sealing ring out of the mounting groove by half its thickness.

[0008] Optionally, four top posts are provided and evenly distributed on the bottom surface of the mounting groove.

[0009] Optionally, the bottom surface of the mounting groove is provided with a slot for the lower end of the top post to be vertically inserted, and a spring connected to the top post is fixed at the bottom of the slot.

[0010] Optionally, the sealing ring is an annular sealing gasket adapted to the shape of the mounting groove.

[0011] Optionally, an annular groove is provided in the middle of the lower end face of the sealing ring, and an annular skeleton is embedded in the groove.

[0012] Optionally, the lower end face of the annular frame is provided with a docking groove, and the number of docking grooves is the same as the number of top columns.

[0013] Optionally, the top end of the top post is inserted into the mating groove.

[0014] Compared with the prior art, this utility model has at least the following beneficial effects:

[0015] In the above solution, thanks to the cooperation of the mounting groove, the top column, and the spring, when the mating plate is separated from the equipment, pipes, and other components, the top column can be used to elastically push the sealing ring out of the mounting groove, which makes it convenient to replace the aging or deformed sealing ring without having to use a pointed tool to pry it out, thus avoiding damage to the sealing surface or O-ring groove.

[0016] In the above solution, thanks to the cooperation between the sealing ring and the annular skeleton, the annular skeleton can be used to support the sealing ring, so that the sealing ring can maintain the O-shape that fits the mounting groove. This facilitates quick installation and removal of the sealing ring in the mounting groove and can alleviate the problem of deformation of the sealing ring during long-term use to a certain extent, thus improving the service life of the sealing ring.

[0017] In summary, this device not only facilitates the replacement of the sealing ring and is easy to maintain, but also extends the service life of the sealing ring, resulting in good overall performance. Attached Figure Description

[0018] The accompanying drawings, which are incorporated herein and form part of the specification, illustrate embodiments of the present invention and, together with the specification, further serve to explain the principles of the present invention and enable those skilled in the art to implement and use the present invention.

[0019] Figure 1 This is a schematic diagram of the structure of this utility model;

[0020] Figure 2 This is a structural breakdown diagram of the present invention;

[0021] Figure 3 This is a schematic diagram of the internal structure of the connector body of this utility model;

[0022] Figure 4 This is a schematic diagram of the internal structure of the sealing ring of this utility model;

[0023] Figure 5 This is a schematic diagram of the structure of a vacuum connector in the prior art.

[0024] [Figure Labels]

[0025] 01. Connector body; 02. Connecting plate; 03. Sealing ring; 1. Connector body; 2. Connecting plate; 201. Mounting groove; 3. Sealing ring; 301. Slot; 4. Top column; 5. Spring; 6. Annular frame; 601. Connecting groove.

[0026] As shown in the figure, specific structures and devices are marked in the figure to clearly illustrate the structure of the embodiment of this utility model. However, this is only for illustrative purposes and is not intended to limit this utility model to this specific structure, device and environment. Those skilled in the art can adjust or modify these devices and environments according to specific needs. Detailed Implementation

[0027] The present invention provides a vacuum connector in detail below with reference to the accompanying drawings and specific embodiments. It should be noted that, to make the embodiments more detailed, the following embodiments are the best and preferred embodiments; those skilled in the art can also use other alternative methods to implement some known technologies; and the accompanying drawings are only for more specific description of the embodiments and are not intended to specifically limit the present invention.

[0028] It should be noted that the use of terms such as "an embodiment," "an embodiment," "an exemplary embodiment," and "some embodiments" in the specification indicates that the described embodiment may include a specific feature, structure, or characteristic, but not every embodiment necessarily includes that specific feature, structure, or characteristic. Furthermore, when a specific feature, structure, or characteristic is described in connection with an embodiment, implementing such a feature, structure, or characteristic in conjunction with other embodiments (whether explicitly described or not) should be within the knowledge of those skilled in the art.

[0029] Generally, terms can be understood at least partly from their use in context. For example, depending at least partly on the context, the term "one or more" as used herein can be used to describe any feature, structure, or characteristic in a singular sense, or a combination of features, structures, or characteristics in a plural sense. Additionally, the term "based on" can be understood not necessarily to convey an exclusive set of factors, but rather, alternatively, depending at least partly on the context, to allow for the presence of other factors that are not necessarily explicitly described.

[0030] It is understood that the meanings of “on”, “above”, and “above” in this utility model should be interpreted in the broadest manner, such that “on” not only means “directly on” something, but also includes the meaning of being “on” something with an intervening feature or layer, and that “above” or “above” not only means “on” something, but also includes the meaning of being “on” something without an intervening feature or layer.

[0031] Furthermore, spatially related terms such as “below,” “under,” “lower,” “above,” and “upper” are used herein for convenience to describe the relationship of one element or feature to one or more other elements or features, as illustrated in the accompanying drawings. Spatially related terms are intended to cover different orientations in the use or operation of the device other than those depicted in the accompanying drawings. The device may be oriented in other ways, and the spatially related descriptive terms used herein can be interpreted similarly.

[0032] like Figures 1-4 As shown, an embodiment of this utility model provides a vacuum connector, including a connector body 1. The connector body 1 is made of 316L stainless steel by precision forging and CNC machine tool processing. Its surface is electrolytically polished to Ra0.15 to minimize gas adsorption and surface gas release effects. A horizontal docking plate 2 is integrally formed on the top edge of the connector body 1 by milling. The diameter of the docking plate 2 is larger than the outer diameter of the connector body 1. The upper end face of the docking plate 2 has concentrically arranged mounting grooves 201 around the connector body 1. The mounting grooves 201 are annular, and four cylindrical slots are evenly distributed at the bottom of the grooves.

[0033] Each slot contains a compression spring 5 press-fitted in. After heat treatment (tempering at 500℃ for 2 hours), the elastic modulus of the spring 5 stabilizes at 2100MPa. When compressed to 12mm, it generates a preload of 25N. After 1 million compression cycles, it exhibits no permanent deformation. The top of the spring 5 is connected to a top post 4. The surface of the top post 4 is hard chrome plated with a chrome layer thickness of 3μm and a hardness of HV850 or higher to reduce friction and wear with the subsequent sealing ring 3.

[0034] The sealing ring 3 is made of a blend of fluororubber (FKM) and silicone rubber, with a Shore hardness of 70±2. Its inner diameter is 0.15mm smaller than the inner diameter of the mounting groove 201 to form an interference fit, and its outer diameter is flush with the outer diameter of the mounting groove 201. An annular groove 301 is formed in the center of the lower end face of the sealing ring 3, into which a 304 stainless steel annular skeleton 6 is embedded. Four mating grooves 601 are formed on the lower end face of the annular skeleton 6, with a diameter 0.15mm larger than the diameter of the ball head of the top post 4. The sealing ring 3 can be inserted into the mounting groove 201. At this time, the top of the top post 4 is precisely inserted into the mating groove 601, forming a positioning fit and preventing axial displacement or rotation of the sealing ring 3 under high pressure conditions.

[0035] The working principle of this utility model is as follows: In actual use, when the vacuum connector is mated with the equipment flange, the sealing ring 3 undergoes approximately 30% compression deformation under pressure. The top column 4, under the reaction force, compresses the spring 5 and retracts. At this point, the contact pressure at the sealing surface reaches 0.35 MPa. Tested with a helium mass spectrometer, at an ultimate vacuum of 1.33 × 10⁻³ Pa, the leakage rate is less than 5 × 10⁻¹¹ Pa·m. 3 / s, meeting SEMI standards.

[0036] When it is necessary to replace the sealing ring 3, simply use a PTFE pry bar to gently press the edge of the sealing ring 3. The top post 4 will automatically push the sealing ring 3 out of the groove under the action of the spring 5 (specifically, about half the total thickness of the sealing ring 3). This allows the staff to quickly disassemble and replace the sealing ring 3 without other tools, making it convenient to use.

[0037] This utility model encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this utility model. To provide the public with a thorough understanding of this utility model, specific details are described in detail in the following preferred embodiments; however, those skilled in the art will fully understand this utility model even without these detailed descriptions. Furthermore, to avoid unnecessary confusion regarding the essence of this utility model, well-known methods, processes, procedures, components, and circuits are not described in detail.

[0038] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A vacuum connector, comprising a connector body (1), wherein a horizontal mating plate (2) is fixed to the top edge of the connector body (1), characterized in that, The upper end face of the docking plate (2) is provided with a concentric mounting groove (201) around the connector body (1). A sealing ring (3) is embedded in the mounting groove (201), and a plurality of vertical top posts (4) are elastically installed on the bottom surface of the mounting groove (201). The top posts (4) elastically push the sealing ring (3) out of the mounting groove (201) by half its thickness.

2. The vacuum connector according to claim 1, characterized in that, Four top columns (4) are provided and are evenly distributed on the bottom surface of the mounting groove (201).

3. The vacuum connector according to claim 2, characterized in that, The bottom surface of the mounting groove (201) is provided with a slot for the lower end of the top post (4) to be vertically inserted, and a spring (5) connected to the top post (4) is fixed at the bottom of the slot.

4. The vacuum connector according to claim 1, characterized in that, The sealing ring (3) is an annular sealing gasket that is adapted to the shape of the mounting groove (201).

5. The vacuum connector according to claim 4, characterized in that, The sealing ring (3) has an annular groove (301) in the middle of its lower end face, and an annular skeleton (6) is embedded in the groove (301).

6. The vacuum connector according to claim 5, characterized in that, The lower end face of the annular frame (6) is provided with a docking groove (601), and the docking groove (601) is provided with the same number as the top column (4).

7. The vacuum connector according to claim 6, characterized in that, The top end of the top post (4) is inserted into the docking groove (601).

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