A limiting lifting mechanism

Abstract

The utility model provides a kind of limit lifting mechanism, it is related to the technical field of semiconductor processing equipment.The utility model is provided with the limit stopper with different height limit surface by being set in the lifting driving element side close to bearing assembly, and limit stopper is moved and installed on driving element, so that in the bearing assembly lifting process, when bearing assembly moves to limit surface position, it can be effectively blocked, to realize reliable limit to bearing assembly upper end point.The utility model's limit stopper position is changed by the contact position of limit surface relative to bearing assembly, the lifting height of bearing assembly can be flexibly changed, which is conducive to adjusting limit lifting height according to process requirement.The utility model structure design is simple, adjustment mode is intuitive, different height positions can be switched quickly without replacing main components, the adaptability of equipment to different processes or different workpieces is improved, with the beneficial effects of convenient adjustment, high repeat positioning accuracy and maintenance efficiency improvement.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a limit lifting mechanism. Background Technology

[0002] In semiconductor manufacturing equipment, lift-pin mechanisms are used to transfer and position carrier components such as pins between different heights, and their lifting height needs to be precisely controlled according to process requirements. Existing technology typically limits the rising position of the connecting rod by setting a fixed-height screw limiter on the cylinder. However, this limiting method is a fixed structure and cannot flexibly adjust different height positions, thus limiting its use when switching processes or adapting to different products. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a limiting lifting mechanism to solve the related problems in the prior art.

[0004] To achieve the above and other related objectives, this utility model provides a limiting lifting mechanism, comprising:

[0005] A support assembly for loading a workpiece;

[0006] A lifting drive component is connected to the load-bearing component in a transmission manner to drive the load-bearing component to move up and down;

[0007] A limiter is provided on the side of the lifting drive member near the bearing assembly. The limiter has a limiting surface with different heights and is movably mounted on the drive member to limit the contact of the bearing assembly by adjusting the position of the limiting surface.

[0008] Furthermore, the lifting drive component is a cylinder.

[0009] Furthermore, the load-bearing assembly includes a connecting rod, a collar, and a supporting arm.

[0010] The supporting arm is circumferentially mounted on the connecting rod via the collar, and the connecting rod is connected to the drive shaft of the cylinder component via a coupling.

[0011] Furthermore, the supporting arms are provided in multiples and are evenly spaced and arranged circumferentially on the connecting rod.

[0012] Furthermore, the outer surface of the collar is provided with a limiting contact fitting, which is used to make a limiting contact fitting with the limiting surface of the limiter.

[0013] Furthermore, the limiter is a trapezoidal stop, and the bottom of the trapezoidal stop is provided with an inclined limiting mating surface.

[0014] Furthermore, the lifting drive component is provided with a guide rail on the side near the bearing component, and the limiter is slidably installed in the guide rail. The limiter can slide horizontally in the guide rail to adjust the position of the limiting surface.

[0015] Furthermore, fasteners are provided at both ends of the limiter, which are used to lock the limiter in the target position in the guide rail after the position of the limiter is adjusted.

[0016] Furthermore, the fastener is a fastening screw.

[0017] Furthermore, the limiter is made of a wear-resistant alloy material.

[0018] As described above, the limiting lifting mechanism of this utility model has at least the following beneficial effects, including but not limited to:

[0019] This invention features limiters with different height-limiting surfaces on the side of the lifting drive component near the load-bearing assembly. These limiters are movably mounted on the drive component, effectively blocking the load-bearing assembly when it reaches the limiting surface position during lifting, thus reliably limiting the load-bearing assembly's upward trajectory. By changing the contact position of the limiter relative to the load-bearing assembly, the lifting height of the load-bearing assembly can be flexibly altered, facilitating adjustments to the lifting height according to process requirements. This invention boasts a simple structural design and intuitive adjustment method, enabling rapid switching between different height positions without replacing major components. This enhances the equipment's adaptability to different processes or workpieces, offering advantages such as convenient adjustment, high repeatability, and improved maintenance efficiency. Attached Figure Description

[0020] Figure 1 The diagram shown is a structural schematic of a limit lifting mechanism in an embodiment of this application.

[0021] Figure 2 The diagram shown is a schematic representation of the structural arrangement of the limiter in an embodiment of this application.

[0022] Icons: 1. Load-bearing component, 2. Lifting drive component, 3. Limiter, 4. Limiting surface, 5. Connecting rod, 6. Collar, 7. Support arm, 8. Guide rail. Detailed Implementation

[0023] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model. It should be noted that, unless otherwise specified, the following embodiments and features described therein can be combined with each other.

[0024] It should be noted that the illustrations provided in the following embodiments are only schematic representations of the basic concept of the present invention. Therefore, the illustrations only show the components related to the present invention and are not drawn according to the number, shape and size of the components in actual implementation. In actual implementation, the form, quantity and proportion of each component can be arbitrarily changed, and the layout of the components may also be more complex.

[0025] Please refer to Figure 1 and Figure 2 This application discloses a limiting lifting mechanism, including a bearing assembly 1, a lifting drive 2, and a limiter 3. The bearing assembly 1 is used to load a workpiece. The lifting drive 2 is connected to the bearing assembly 1 to drive the bearing assembly 1 to move up and down. The limiter 3 is disposed on the side of the lifting drive 2 near the bearing assembly 1. The limiter 3 has a limiting surface 4 with different heights. The limiter 3 is movably mounted on the drive to limit the bearing assembly 1 by adjusting the position of the limiting surface 4.

[0026] It is worth noting that this invention, by setting a limiter 3 with different height limiting surfaces 4 on the side of the lifting drive component 2 near the bearing component 1, and movably mounting the limiter 3 on the drive component, effectively blocks the bearing component 1 when it moves to the position of the limiting surface 4 during the lifting process, thereby reliably limiting the lifting end point of the bearing component 1. The position of the limiter 3 in this invention, by changing the contact position of the limiting surface 4 relative to the bearing component 1, can flexibly change the lifting height of the bearing component 1, which is beneficial for adjusting its lifting height according to process requirements. This invention has a simple structural design and an intuitive adjustment method, enabling rapid switching between different height positions without replacing major components, improving the adaptability of the equipment to different processes or workpieces, and offering the advantages of convenient adjustment, high repeatability, and improved maintenance efficiency.

[0027] In some embodiments, the lifting drive 2 is a cylinder.

[0028] Specifically, one end of the cylinder is fixed to the frame or mounting base, and the other end is the output end of the drive shaft for connecting to the load-bearing component 1. The cylinder can drive the load-bearing component 1 to rise and fall by controlling the air source pressure and stroke. Its rod speed and torque can be adjusted by a pneumatic control valve and a buffer device to ensure smooth operation when in contact with the limit switch 3 and reduce mechanical impact. Optionally, the lifting drive component 2 can also be a hydraulic drive component or other equipment capable of driving linear motion, as long as it meets the corresponding requirements.

[0029] In some embodiments, please refer to Figure 1 The bearing assembly 1 includes a connecting rod 5, a collar 6, and a supporting arm 7. The supporting arm 7 is circumferentially mounted on the connecting rod 5 via the collar 6. The connecting rod 5 is connected to the drive shaft of the cylinder component via a coupling.

[0030] Specifically, the load-bearing component 1 includes a longitudinally arranged connecting rod 5, a collar 6 fitted onto the connecting rod 5, and a support arm 7 mounted on the outer periphery of the collar 6. The collar 6 is annular in shape, with mounting holes or bosses evenly distributed on its outer wall for fixing the support arm 7. The support arm 7 is connected to the collar 6 by bolts, pins, or welding, and is arranged circumferentially. The end of the connecting rod 5 is connected to the cylinder drive shaft via a coupling, which can absorb installation errors while transmitting lifting power and avoid jamming problems caused by direct connection. This structure facilitates modular maintenance and process adaptation.

[0031] In some embodiments, please refer to Figure 1 The supporting arms 7 are provided in multiples and are evenly spaced and arranged circumferentially on the connecting rod 5.

[0032] Specifically, the number of support arms 7 can be three, four, or more, depending on the size and weight of the workpiece. The arms are evenly distributed along the circumference of the collar 6, for example, in 120°, 90°, or other intervals to ensure symmetry. The support arms can be made of stainless steel, aluminum alloy, or high-strength plastic, and their cross-sectional shape can be rectangular, circular, or channel-shaped to meet load-bearing and rigidity requirements. The circumferentially uniform arrangement of the support arms 7 ensures that the workpiece remains balanced during lifting and lowering, effectively avoiding swaying caused by uneven loading.

[0033] In some embodiments, the outer surface of the collar 6 is provided with a limiting contact fitting member, which is used to limit contact fitting with the limiting surface 4 of the limiter 3.

[0034] Specifically, the outer surface of the collar 6 can be machined or fitted with a limiting contact fitting, which can be in the form of a shoulder, annular protrusion, reinforcing ring, or mounting block. When the surface of the limiting contact fitting contacts the limiting surface 4 of the limiter 3, a limiting effect is achieved. This design ensures that the limiting point is fixed in the area of ​​the collar 6, avoiding additional stress concentration on the connecting rod 5 or the supporting arm 7, and facilitating the replacement or maintenance of the contact fitting.

[0035] In some embodiments, please refer to Figure 2 The limiter 3 is a trapezoidal stop, and the bottom of the trapezoidal stop is provided with an inclined limiting mating surface.

[0036] Specifically, the limiter 3 has a trapezoidal block shape as its body, with an inclined limiting mating surface machined at the bottom. The inclination angle can be designed according to the height adjustment requirements. The inclined surface can be formed by machining or grinding, and can be surface hardened or coated. During the upward movement, the bearing component 1 gradually contacts the inclined surface, achieving a smooth stopping process, avoiding impact on the components from sudden stops, and improving positioning accuracy.

[0037] In some embodiments, please refer to Figure 2 The lifting drive component 2 is provided with a guide rail 8 on the side near the bearing component 1. The limiter 3 is slidably installed in the guide rail 8. The limiter 3 can slide horizontally in the guide rail 8 to adjust the position of the limiting surface 4.

[0038] Specifically, the guide rail 8 can be formed on the upper cover or base surface of the lifting drive component 2, and the bottom or side of the limiter 3 cooperates with the guide rail to form a sliding installation. The limiter 3 can move horizontally along the guide rail, and the position of the limiting surface 4 can be changed after adjustment. The structure of the guide rail 8 ensures the uniqueness of the adjustment direction, avoids the limiter 3 from deflecting or falling off, thereby achieving precise adjustment of the position of the limiting surface 4.

[0039] In some embodiments, fasteners are provided at both ends of the limiter 3, and the fasteners are used to lock the limiter 3 in the target position in the guide rail 8 after the position of the limiter 3 is adjusted.

[0040] Specifically, the fasteners at both ends of the limiter 3 can be screws, pressure plates, or clamps, as long as the fastening requirements are met. When the limiter 3 moves to the target position, the fasteners clamp it in place within the guide rail 8. The fasteners are positioned at both ends to ensure balanced force and prevent tilting or loosening caused by unilateral locking. The fasteners reliably hold the limiter 3 in the desired position, improving the stability of the limiting accuracy.

[0041] In some embodiments, the limiter 3 is made of a wear-resistant alloy material.

[0042] Specifically, the main body of the limiter 3 can be made of alloy steel, hard alloy, or metal materials that have undergone surface carburizing, nitriding, or plating. The choice of materials ensures that the limiter 3 is not easily worn under repeated contact and impact conditions. Replaceable wear-resistant linings can also be installed on the contact surface. This design improves the lifespan and operational stability of the limiter 3 and reduces maintenance costs caused by wear.

[0043] In summary, this invention provides limiters with different height-limiting surfaces on the side of the lifting drive component near the load-bearing component. These limiters are movably mounted on the drive component, effectively blocking the load-bearing component when it reaches the limiting surface position during lifting, thus reliably limiting the load-bearing component's upward trajectory. By changing the contact position of the limiter relative to the load-bearing component, the lifting height of the load-bearing component can be flexibly altered, facilitating adjustments to the lifting height according to process requirements. This invention features a simple structural design and intuitive adjustment method, enabling rapid switching between different height positions without replacing major components. This improves the equipment's adaptability to different processes or workpieces, offering advantages such as convenient adjustment, high repeatability, and improved maintenance efficiency.

[0044] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

[0045] Throughout this description, numerous specific details, such as examples of components and / or methods, are provided to provide a complete understanding of embodiments of this application. However, those skilled in the art will recognize that embodiments of this invention may be practiced without one or more of these specific details or by other devices, systems, components, methods, parts, materials, components, etc. In other instances, well-known structures, materials, or operations have not been specifically shown or described in detail to avoid obscuring aspects of embodiments of this application.

[0046] Throughout this specification, references to "an embodiment," "an embodiment," or "a specific embodiment" mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of the present invention, but not necessarily in all embodiments. Therefore, the various representations of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout the specification do not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic of any specific embodiment of the present invention can be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the embodiments described herein may be based on the teachings herein and will be considered part of the spirit and scope of the present invention.

[0047] It should also be understood that one or more of the elements shown in the figures may be implemented in a more separate or more integrated manner, or may even be removed because they are inoperable in certain circumstances or provided because they may be useful for a particular application.

[0048] Furthermore, unless otherwise expressly stated, any arrows in the accompanying drawings should be considered illustrative only and not limiting. Additionally, unless otherwise stated, the term "or" as used herein is generally intended to mean "and / or". Where a term is anticipated to provide a separation or combination capability that is unclear, a combination of components or steps will also be considered as indicated.

[0049] As used herein and throughout the claims below, unless otherwise specified, “a” and “the” include the plural references. Similarly, as used herein and throughout the claims below, unless otherwise specified, “in” means “in” and “on”.

[0050] The above description of the embodiments shown in this utility model (including the content in the abstract of the specification) is not intended to be an exhaustive enumeration or to limit the utility model to the precise forms disclosed herein. Although specific embodiments and examples of the utility model have been described herein for illustrative purposes only, various equivalent modifications are possible within the spirit and scope of the utility model, as will be recognized and understood by those skilled in the art. As indicated, these modifications can be made to the utility model in accordance with the above description of the embodiments of this application, and such modifications will be within the spirit and scope of the utility model.

[0051] This document has generally described the systems and methods in detail to aid in understanding the present invention. Furthermore, various specific details have been set forth to provide a general understanding of the embodiments of this application. However, those skilled in the art will recognize that embodiments of the present invention can be practiced without one or more specific details, or using other devices, systems, accessories, methods, components, materials, parts, etc. In other instances, well-known structures, materials, and / or operations have not been specifically shown or described in detail to avoid obscuring various aspects of the embodiments of this application.

Claims

1. A limiting lifting mechanism, characterized in that, include: A support assembly for loading a workpiece; A lifting drive component is connected to the load-bearing component in a transmission manner to drive the load-bearing component to move up and down; A limiter is provided on the side of the lifting drive member near the bearing assembly. The limiter has a limiting surface with different heights and is movably mounted on the drive member to limit the contact of the bearing assembly by adjusting the position of the limiting surface.

2. The limiting lifting mechanism according to claim 1, characterized in that, The lifting drive component is a cylinder.

3. The limiting lifting mechanism according to claim 2, characterized in that, The load-bearing assembly includes a connecting rod, a collar, and a support arm. The supporting arm is circumferentially mounted on the connecting rod via the collar, and the connecting rod is connected to the drive shaft of the cylinder component via a coupling.

4. A limiting lifting mechanism according to claim 3, characterized in that, The supporting arms are provided in multiples and are evenly spaced and arranged circumferentially on the connecting rod.

5. A limiting lifting mechanism according to claim 3, characterized in that, The outer surface of the collar is provided with a limiting contact fitting, which is used to make a limiting contact fitting with the limiting surface of the limiter.

6. The limiting lifting mechanism according to claim 1, characterized in that, The limiter is a trapezoidal stop, and the bottom of the trapezoidal stop is provided with an inclined limiting mating surface.

7. A limiting lifting mechanism according to claim 1, characterized in that, The lifting drive component is provided with a guide rail on the side near the bearing component. The limiter is slidably installed in the guide rail. The limiter can slide horizontally in the guide rail to adjust the position of the limiting surface.

8. A limiting lifting mechanism according to claim 7, characterized in that, The limiter is provided with fasteners at both ends, which are used to lock the limiter in the target position in the guide rail after the position of the limiter is adjusted.

9. A limiting lifting mechanism according to claim 8, characterized in that, The fastener is a fastening screw.

10. A limiting lifting mechanism according to any one of claims 1-9, characterized in that, The limiter is made of wear-resistant alloy material.

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