Ignition bubble and furnace tube apparatus

Abstract

An ignition bubble and furnace tube device, the ignition bubble comprising: a transition cavity, the transition cavity having opposite first and second ends, the inner diameter of the transition cavity gradually decreasing from the first end to the second end; wherein the second end of the transition cavity is used to connect the jet pipe of the furnace tube device, and the cavity inner wall of the second end of the transition cavity is smoothly connected with the pipe inner wall of the jet pipe; the transition cavity is configured to guide the airflow to flow from the first end to the second end and into the jet pipe. The application can reduce the retention and accumulation of water vapor in the ignition bubble to achieve rapid and complete discharge, solve the problem of spherical particle defects on the wafer surface, and improve the stability of the wet oxygen oxidation process and the quality of the wafer product.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically to an ignition bulb and furnace tube device. Background Technology

[0002] In semiconductor wet oxidation processes, existing furnace tube equipment typically includes a heat treatment furnace and an external ignition bulb (torch). During the process, pure hydrogen and oxygen are introduced into the ignition bulb in a certain ratio. Under the action of the heater, they reach the ignition point and undergo a combustion reaction. The generated high-temperature water vapor is transported into the furnace tube through a jet pipe to oxidize the wafer inside the furnace tube to form a silicon oxide thin film.

[0003] In related technologies, the ignition bulbs mostly adopt a horizontal structure. The water vapor generated by combustion is transported through the jet pipe and enters the furnace tube from bottom to top. After ignition, the residual water vapor is purged by nitrogen gas (TN2, i.e. nitrogen gas flowing through the Torch) and dilution nitrogen gas (DN2) flowing through the ignition bulb.

[0004] However, due to the structural design of the ignition bulb, water vapor cannot be discharged smoothly and tends to accumulate inside the ignition bulb. After ignition, as the temperature drops rapidly, the residual water vapor condenses to form condensate. This condensate is subsequently carried into the furnace tube by the airflow, eventually resulting in a large number of spherical defect particles on the wafer surface. Utility Model Content

[0005] The utility model description section introduces a series of simplified concepts, which will be further explained in detail in the detailed description section. This utility model description section is not intended to limit the key features and essential technical features of the claimed technical solution, nor is it intended to determine the scope of protection of the claimed technical solution.

[0006] To address the existing problems, this utility model provides an ignition bulb, the ignition bulb comprising:

[0007] A transition cavity having a first end and a second end opposite to each other, wherein the inner diameter of the transition cavity gradually decreases from the first end to the second end;

[0008] The second end of the transition cavity is used to connect to the jet pipe of the furnace tube equipment, and the inner wall of the second end of the transition cavity is smoothly connected to the inner wall of the jet pipe.

[0009] The transition cavity is configured to guide airflow from its first end to its second end and into the jet duct.

[0010] In some embodiments of this application, the inner diameter of the second end of the transition cavity is the same as the inner diameter of the jet pipe.

[0011] In some embodiments of this application, the inner wall of the transition cavity includes a first inner wall surface and a second inner wall surface disposed opposite to each other along the height direction of the transition cavity;

[0012] Along the direction from the first end to the second end of the transition cavity, the first inner wall surface is arranged with a gradually decreasing height in the height direction, and the height difference between the two ends of the first inner wall surface is a first height difference;

[0013] Along the direction from the first end to the second end of the transition cavity, the second inner wall surface is either set to maintain a constant height or to gradually decrease in height in the height direction, and the height difference between the two ends of the second inner wall surface is the second height difference;

[0014] Wherein, the first height difference is greater than the second height difference.

[0015] In some embodiments of this application, the first inner wall surface includes at least one arcuate surface, the arcuate surface having an arcuate cross-section along the axial direction of the transition cavity, and the arcuate cross-section extending along the axial direction of the transition cavity.

[0016] In some embodiments of this application, the first inner wall surface includes at least two arcuate surfaces, and two adjacent arcuate surfaces are smoothly connected.

[0017] In some embodiments of this application, the at least two arcuate surfaces include a first arcuate surface and a second arcuate surface that are smoothly connected. The first arcuate surface and the second arcuate surface are arranged sequentially along the direction from the first end to the second end of the transition cavity. The curvature direction of the first arcuate surface faces the interior of the transition cavity, and the curvature direction of the second arcuate surface faces the exterior of the transition cavity.

[0018] In some embodiments of this application, the radius of curvature of the first arcuate surface is greater than or equal to the radius of curvature of the second arcuate surface.

[0019] In some embodiments of this application, the arcuate surface near the second end of the transition cavity is configured as follows:

[0020] It is smoothly connected to the inner wall of the jet pipe.

[0021] In some embodiments of this application, an air intake cavity is also included, wherein the arcuate surface near the first end of the transition cavity is smoothly connected to the inner wall of the air intake cavity.

[0022] The inner diameter of the air intake cavity is twice the radius of curvature of the arc surface that is smoothly connected to it.

[0023] According to another aspect of this application, a furnace tube device is provided, comprising the ignition bulb described in any one of the above-mentioned methods.

[0024] The ignition bulb and furnace tube equipment of this application have an inner diameter of the transition cavity that gradually decreases from its first end to its second end, and the inner wall of the cavity at its second end is smoothly connected to the inner wall of the jet pipe. This structure eliminates geometric abrupt changes such as steps or sudden interfaces at the connection between the two, forming a smooth flow channel. This avoids airflow eddies and stagnation, reduces water vapor flow resistance, improves conveying efficiency, and reduces the retention and accumulation of water vapor in the ignition bulb to achieve rapid and thorough discharge. This significantly reduces the condensation of water vapor caused by cooling after ignition, and a small amount of residual condensate can also be smoothly discharged with the airflow to avoid entering the furnace tube and contacting the wafer. This solves the problem of spherical particle defects on the wafer surface and improves the stability of the wet oxidation process and the quality of wafer products. Attached Figure Description

[0025] The following drawings, which are incorporated herein by reference as part of this invention, are provided for understanding the invention. The drawings illustrate embodiments of the invention and their descriptions, serving to explain the principles of the invention.

[0026] In the attached image:

[0027] Figure 1 A schematic diagram of a structure in the related art, showing an ignition bulb connected to an intake pipe and a jet pipe, is shown.

[0028] Figure 2 A schematic diagram of the ignition bulb according to a specific embodiment of the present invention is shown.

[0029] Figure 3 A schematic diagram of the ignition bulb according to a specific embodiment of the present invention is shown.

[0030] Figure 4 The diagram shows a schematic of an ignition bulb connected to an air intake pipe and an air jet pipe according to a specific embodiment of the present invention. Detailed Implementation

[0031] In the following description, numerous specific details are set forth in order to provide a more thorough understanding of the present invention. However, it will be apparent to those skilled in the art that the present invention can be practiced without one or more of these details. In other instances, certain technical features well-known in the art have not been described in order to avoid confusion with the present invention.

[0032] It should be understood that this invention can be embodied in various forms and should not be construed as being limited to the embodiments set forth herein. Rather, providing these embodiments will make the disclosure thorough and complete, and will fully convey the scope of this invention to those skilled in the art. In the drawings, for clarity, the dimensions of layers and regions, as well as their relative dimensions, may be exaggerated. The same reference numerals denote the same elements throughout.

[0033] It should be understood that when an element or layer is referred to as "on," "adjacent to," "connected to," or "coupled to" other elements or layers, it may be directly on, adjacent to, connected to, or coupled to other elements or layers, or there may be intervening elements or layers. Conversely, when an element is referred to as "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" other elements or layers, there are no intervening elements or layers. It should be understood that although the terms first, second, third, etc., may be used to describe various elements, components, areas, layers, and / or portions, these elements, components, areas, layers, and / or portions should not be limited by these terms. These terms are only used to distinguish one element, component, area, layer, or portion from another element, component, area, layer, or portion. Therefore, without departing from the teachings of this utility model, the first element, component, area, layer, or portion discussed below may be referred to as a second element, component, area, layer, or portion.

[0034] Spatial relation terms such as “below,” “under,” “below,” “under,” “above,” “above,” etc., are used herein for convenience of description to describe the relationship between one element or feature shown in the figure and other elements or features. It should be understood that, in addition to the orientation shown in the figure, spatial relation terms are intended to also include different orientations of the device in use and operation. For example, if the device in the figure is flipped, then the element or feature described as “below” or “under” the other element or feature will be oriented “above” the other element or feature. Therefore, the exemplary terms “below” and “under” can include both upper and lower orientations. The device may be otherwise oriented (rotated 90 degrees or otherwise) and the spatial descriptive terms used herein will be interpreted accordingly.

[0035] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of the invention. When used herein, the singular forms “a,” “an,” and “the” are also intended to include the plural forms unless the context clearly indicates otherwise. It should also be understood that the terms “comprising” and / or “including,” when used in this specification, identify the presence of the stated features, integers, steps, operations, elements, and / or components, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, components, and / or groups. When used herein, the term “and / or” includes any and all combinations of the associated listed items.

[0036] like Figure 1 As shown, the ignition bulb 110 in the related technology adopts a horizontal structure, with one end connected to an air intake pipe 120, which includes a hydrogen intake pipe 121 and an oxygen intake pipe 122, and the other end connected to a jet pipe 130. The ignition bulb 110 has a uniform inner diameter, and its inner diameter is larger than that of the jet pipe 130. Due to the significant difference in their inner diameters, such as... Figure 1 As shown in the dashed box area, the connection points form geometrical abrupt changes such as steps or abrupt interfaces.

[0037] During the process, pure hydrogen and oxygen are introduced into the ignition bulb 110 in a certain proportion. Under the action of the heater 140, the ignition point is reached and a combustion reaction occurs. The generated high-temperature water vapor is transported to the furnace tube through the jet pipe 130 to oxidize the wafer inside the furnace tube and form a silicon oxide film.

[0038] Due to a geometric abrupt change at the connection between the ignition bulb 110 and the jet pipe 130, water vapor discharge is obstructed, causing it to accumulate inside the ignition bulb 110. After ignition, the temperature of the ignition bulb 110 drops sharply, and the residual water vapor condenses to form condensate, which subsequently enters the furnace tube with TN2 and adheres to the wafer surface, forming spherical particle defects.

[0039] To solve at least one of the above-mentioned technical problems, this application provides an ignition bulb, which includes:

[0040] The transition cavity has a first end and a second end, and the inner diameter of the transition cavity gradually decreases from the first end to the second end.

[0041] The second end of the transition cavity is used to connect the jet pipe of the furnace tube equipment, and the inner wall of the second end of the transition cavity is smoothly connected to the inner wall of the jet pipe.

[0042] The transition cavity is configured to guide airflow from its first end to its second end and into the jet duct.

[0043] According to the ignition bubble of this application, the inner diameter of the transition cavity gradually decreases from its first end to its second end, and the inner wall of the cavity at its second end is smoothly connected to the inner wall of the jet pipe. This structure eliminates geometric abrupt changes such as steps or abrupt interfaces at the connection between the two, forming a smooth flow channel. This can avoid airflow eddies and stagnation, reduce water vapor flow resistance, improve conveying efficiency, and reduce the retention and accumulation of water vapor in the ignition bubble to achieve rapid and thorough discharge. This significantly reduces the condensation of water vapor caused by cooling after ignition, and a small amount of residual condensate can also be smoothly discharged with the airflow to avoid entering the furnace tube and contacting the wafer, thereby solving the problem of spherical particle defects on the wafer surface and improving the stability of the wet oxidation process and the quality of wafer products.

[0044] To fully understand this application, detailed steps and structures will be presented in the following description to illustrate the technical solutions proposed in this application. Preferred embodiments of this application are described in detail below; however, in addition to these detailed descriptions, this application may have other implementation methods.

[0045] The following is for reference. Figures 2-4 This application describes an ignition bulb 200 according to one embodiment. The ignition bulb 200 includes a transition cavity 210 having opposing first and second ends, the inner diameter of which gradually decreases from the first end to the second end; wherein the second end of the transition cavity 210 is used to connect to a jet duct 320 of a furnace tube device, and the inner wall of the second end of the transition cavity 210 is smoothly connected to the inner wall of the jet duct 320; the transition cavity 210 is configured to guide airflow from its first end to its second end and into the jet duct 320.

[0046] In this embodiment, the inner diameter of the transition cavity 210 gradually decreases from its first end to its second end, and the ignition bulb 200 is configured such that the inner wall of the second end of the transition cavity 210 is smoothly connected to the inner wall of the jet pipe 320. This structure eliminates geometric abrupt changes such as steps or sudden interfaces at the connection point, forming a smooth flow channel that guides the airflow from the first end of the transition cavity 210 to the second end and into the jet pipe 320. This avoids the formation of eddies or stagnation of airflow at the connection point, significantly reduces the resistance to water vapor flow, improves its delivery efficiency to the jet pipe 320, reduces the retention and accumulation of water vapor in the ignition bulb 200, and allows the water vapor generated during ignition to be quickly and completely discharged.

[0047] This significantly reduces water vapor condensation caused by temperature drop after ignition; even if a small amount of residual condensate remains, it can be smoothly discharged with the airflow, preventing it from being carried into the furnace tube and contacting the wafer. This solves the problem of spherical particle defects on the wafer surface and improves the stability of the wet oxidation process and the quality of wafer products.

[0048] In some embodiments, the ignition bulb 200 is applied to a furnace tube device. Specifically, it can be applied to the wet oxidation process of the furnace tube device. One end of the ignition bulb 200 is connected to the gas inlet assembly to receive the reaction gas, and the other end is connected to the furnace tube body through a jet pipe; its function is to complete the gas mixing and combustion reaction inside to generate high-temperature water vapor, and guide the water vapor to be stably delivered into the furnace tube through structural design, providing the required reaction environment for the wafer oxidation process.

[0049] In some embodiments, the inner diameter of the second end of the transition cavity 210 is consistent with the inner diameter of the jet pipe 320.

[0050] In this embodiment, by gradually decreasing the inner diameter of the transition cavity 210 from its first end to its second end, and ensuring that the inner diameter of the second end of the transition cavity 210 matches the inner diameter of the jet pipe 320, a smooth connection is achieved between the inner wall of the second end of the transition cavity 210 and the inner wall of the jet pipe 320. This eliminates geometric abrupt changes such as steps or sudden interfaces at the connection point, allowing the airflow to maintain a continuous and stable flow state when passing through the connection, effectively avoiding local airflow disturbances or resistance surges caused by abrupt changes at the connection. Consequently, water vapor can be transported more smoothly along the smooth and continuous channel, reducing stagnation and accumulation at the connection, lowering the risk of condensate formation, thereby enhancing the suppression effect on spherical particle defects on the wafer surface and improving process stability.

[0051] For example, such as Figure 3 As shown, the inner diameter of the transition cavity 210 gradually decreases from its first end to its second end: the inner diameter of the first end of the transition cavity 210 is d0, and then it gradually decreases from d0 through d1, d2, d3, d4, d5, d6, d7... until it finally decreases to dn. The inner diameter of the second end of the transition cavity 210 is dn, and this inner diameter is... Figure 4 The inner diameter of the jet pipe 320 is consistent.

[0052] In some embodiments, such as Figure 2 As shown, the inner wall of the transition cavity 210 includes a first inner wall surface 211 and a second inner wall surface 212 disposed opposite to each other along the height direction of the transition cavity 210. Along the direction from the first end to the second end of the transition cavity 210, the first inner wall surface 211 is disposed with a gradually decreasing height, and the height difference between the two ends of the first inner wall surface 211 is a first height difference; along the direction from the first end to the second end of the transition cavity 210, the second inner wall surface 212 is disposed with a constant height or a gradually decreasing height, and the height difference between the two ends of the second inner wall surface 212 is a second height difference; wherein, the first height difference h1 is greater than the second height difference. The first height difference h1 is not 0, and the second height difference h2 can be 0 or not 0; their specific values ​​can be set according to actual conditions and are not limited thereto.

[0053] Specifically, the first inner wall surface 211, through a gradually decreasing height structure within the first height difference h1 range, constructs a dominant directional flow-guiding structure: its large height difference can produce a significant guiding effect, guiding water vapor to flow smoothly from the first end to the second end of the transition cavity 210 along the inclined direction of the first inner wall surface 211. This avoids local turbulence caused by abrupt height changes and can also accelerate the movement rate of the airflow to the second end through a moderate inclination angle, reducing the residence time of the airflow in the transition cavity 210. For the second inner wall surface 212, as its height gradually decreases within the range of the second height difference h2, since the second height difference h2 is less than the first height difference h1, a secondary height reduction structure adapted to the first inner wall surface 211 can be formed. Through a relatively gentle tilting trend combined with the dominant flow guidance of the first inner wall surface 211, the convergence effect of the airflow towards the second end is enhanced, and the flow field is avoided from being biased to one side due to the excessive height difference between the two sides. When its height remains unchanged, a stable flow field constraint surface can be formed on the corresponding side of the transition cavity 210. By cooperating with the height difference of the first inner wall surface 211, it provides asymmetrical but orderly boundary guidance for the airflow, ensuring that the airflow flows along the dominant direction and suppressing the flow field turbulence that may be caused by excessive tilting on one side.

[0054] The height configuration of the first inner wall surface 211 and the second inner wall surface 212 combined creates an ordered flow field inside the transition cavity 210 that is adapted to the flow characteristics of water vapor: the dominant effect of the first height difference h1 is used to accelerate the airflow guidance, and the adaptability of the second height difference h2 or the stability of the constant height is used to optimize the flow field distribution, effectively reducing flow resistance and guiding the airflow to be transported quickly towards the jet pipe 320, thereby reducing the amount of water vapor remaining in the transition cavity 210 and the probability of condensation, which is beneficial to suppressing the generation of particle defects on the wafer surface and improving the stability and reliability of the wet oxidation process.

[0055] In some embodiments, the first inner wall surface 211 includes at least one arcuate surface, the cross-section of which along the axial direction of the transition cavity 210 is arcuate, and the arcuate cross-section extends along the axial direction of the transition cavity 210; when the first inner wall surface 211 includes at least two arcuate surfaces, adjacent two arcuate surfaces are smoothly connected. For example, Figure 1 The cross-sectional line of the first inner wall surface 211 shown is the cross-section of the arc-shaped surface along the axial direction of the transition cavity 210.

[0056] The aforementioned structural design enables the first inner wall surface 211 of the transition cavity 210 to form a smooth curved surface that continuously varies along the axial direction of the transition cavity 210. Specifically, when the first inner wall surface 211 of the transition cavity 210 includes a single arcuate surface, the single arcuate surface can guide the airflow to flow stably along a preset path; when the first inner wall surface 211 of the transition cavity 210 includes multiple smoothly connected arcuate surfaces, the multiple smoothly connected arcuate surfaces can eliminate local structural abrupt changes through the gradual transition of curvature, further optimizing the airflow trajectory. This effectively avoids the formation of eddies or stagnation of airflow within the transition cavity 210, reduces water vapor flow resistance, promotes its rapid discharge, reduces condensate generation, thereby enhancing the suppression effect on wafer surface particle defects and improving the stability of the wet oxidation process.

[0057] In some embodiments, such as Figure 2 As shown, at least one arcuate surface includes a first arcuate surface 2111 and a second arcuate surface 2112 that are smoothly connected, and the tangents of the two are... Figure 2 Tangent 1 in the middle. The first arc-shaped surface 2111 and the second arc-shaped surface 2112 are arranged sequentially along the direction from the first end to the second end of the transition cavity 210. The bending direction of the first arc-shaped surface 2111 is towards the inside of the transition cavity 210, and the bending direction of the second arc-shaped surface 2112 is towards the outside of the transition cavity 210.

[0058] Specifically, the center of curvature of the first arc-shaped surface 2111 is located inside the transition cavity 210, and its curvature direction is towards the inside of the cavity; the center of curvature of the second arc-shaped surface 2112 is located outside the transition cavity 210, and its curvature direction is towards the outside of the cavity. The two are arranged sequentially from the first end to the second end of the transition cavity 210, forming a combination of arc-shaped surfaces with opposite curvature directions: the first arc-shaped surface 2111, which is closer to the first end, guides the airflow to converge smoothly towards the center of the cavity through its inward curvature, reducing local flow obstruction; the second arc-shaped surface 2112, which is closer to the second end, adapts to the transition requirements of the airflow to the jet pipe 320 through its outward curvature.

[0059] The above structure adapts to the water vapor flow characteristics through a composite transition path, enabling the curvature of the inner wall of the transition cavity 210 to change in an orderly manner along the airflow path. The synergistic effect of the two ensures that the inner wall of the transition cavity 210 maintains a continuous and smooth curvature transition, which can further optimize the airflow dynamics characteristics, avoid abrupt changes in local resistance caused by a single curvature, effectively suppress the generation of eddies, reduce the residence time and accumulation of water vapor in the cavity, thereby reducing the risk of condensate generation, enhancing the suppression effect on spherical particle defects on the wafer surface, and improving the stability of the wet oxidation process.

[0060] It should be noted that at least one arcuate surface is not limited to including the first arcuate surface 2111 and the second arcuate surface 2112, but may also include other surfaces, which are not limited.

[0061] In some embodiments, the radius of curvature of the first arcuate surface 2111 is greater than or equal to the radius of curvature of the second arcuate surface 2112.

[0062] Taking the first arc-shaped surface 2111 having a larger radius of curvature than the second arc-shaped surface 2112 as an example, the first arc-shaped surface 2111 bends towards the inside of the cavity, and its radius of curvature is larger than that of the second arc-shaped surface 2112. This makes the first arc-shaped surface 2111 have a relatively gentle curvature, which can reduce local obstruction to airflow and guide water vapor to converge smoothly along the surface. At the same time, the second arc-shaped surface 2112 bends towards the outside of the cavity and has a smaller radius of curvature, forming a more significant curvature. The two constitute a continuous and coordinated curvature transition relationship. This structure can further optimize the flow trajectory of airflow in the transition cavity 210, reduce local resistance, and promote the rapid and unrestricted delivery of water vapor to the jet pipe 320, thereby reducing water vapor residue inside the cavity and subsequent condensate generation, enhancing the suppression effect on spherical particle defects on the wafer surface, and improving the stability of the wet oxidation process.

[0063] For example, such as Figure 2 As shown, the radius of curvature of the first arc-shaped surface 2111 is R1, and the radius of curvature of the second arc-shaped surface 2112 is R2, where R1 is greater than R2. Of course, this application does not exclude the possibility that the radius of curvature of the first arc-shaped surface 2111 is equal to the radius of curvature of the second arc-shaped surface 2112.

[0064] In some embodiments, the arcuate surface near the second end of the transition cavity 210 is configured to smoothly connect with the inner wall of the jet duct 320. This smooth connection creates a continuous and smooth transition interface between the end of the arcuate surface and the inner wall of the jet duct 320, eliminating geometric abrupt changes such as steps or sudden interfaces that may exist at the connection point. Therefore, when the airflow flows along the arcuate surface to the jet duct 320, local flow field disturbances or eddies caused by geometric abrupt changes at the connection point can be avoided, reducing the flow resistance at the connection point and thus improving the continuity and stability of water vapor transport.

[0065] In a specific embodiment, such as Figure 2 and Figure 4 As shown, taking at least one arcuate surface including a first arcuate surface 2111 and a second arcuate surface 2112 as an example, the second arcuate surface 2112 can be configured to smoothly connect with the inner wall of the jet pipe 320, and the tangents of the two are... Figure 4Tangent 3 in the middle. Of course, when at least one arcuate surface includes only one arcuate surface or more other arcuate surfaces, the other arcuate surfaces can be configured to smoothly connect with the inner wall of the jet duct 320, and there is no limitation on this.

[0066] In some embodiments, the ignition bulb 200 further includes an air intake chamber 220. For example... Figure 4 As shown, one end of the air inlet chamber 220 is used to connect to the air inlet pipe 310 of the furnace tube equipment. The air inlet pipe 310 includes a hydrogen inlet pipe 311 and an oxygen inlet pipe 312, which are used to introduce pure hydrogen and oxygen into the ignition bulb 200 in a certain proportion. Under the action of the heater 330, the ignition point is reached and a combustion reaction occurs. The other end of the air inlet chamber 220 is connected to the first end of the transition chamber 210.

[0067] Specifically, the arc-shaped surface near the first end of the transition cavity 210 smoothly connects to the inner wall of the intake cavity 220. This structural design creates a continuous and uninterrupted transition interface between the arc-shaped surface and the inner wall of the intake cavity 220. By matching the radius of curvature with the inner diameter, the geometric abrupt change at the connection between the intake cavity 220 and the transition cavity 210 is eliminated. Therefore, when airflow enters the transition cavity 210 from the intake cavity 220, it can flow smoothly along the curvature direction of the arc-shaped surface, avoiding local eddies or flow resistance caused by structural discontinuities. This ensures the stability and continuity of airflow delivery and helps reduce water vapor retention in the transition region.

[0068] Furthermore, the inner diameter of the intake chamber 220 is consistent with the radius of curvature of the smoothly connected arc surface. By matching the radius of curvature with the inner diameter, the geometric abrupt change at the connection between the two is further eliminated.

[0069] In a specific embodiment, such as Figure 2 As shown, taking at least one arcuate surface including a first arcuate surface 2111 and a second arcuate surface 2112 as an example, the first arcuate surface 2111 can be smoothly connected to the inner wall of the intake cavity 220, and the tangents of the two are... Figure 2 Tangent 2 in the diagram indicates that the inner diameter of the intake cavity 220 is twice the radius of curvature of the first arc-shaped surface 2111. For example, if the inner diameter of the intake cavity 220 is d0 and the radius of curvature of the first arc-shaped surface 2111 is R1, then d0 = 2 * R1. Of course, when at least one arc-shaped surface includes only one arc-shaped surface or more other arc-shaped surfaces, the other arc-shaped surfaces can be configured to smoothly connect with the inner wall of the intake cavity 220, and this is not limited.

[0070] It should be noted that the smooth connection mentioned above can also be called a tangent connection, which means that two curved surfaces form a continuous and smooth transition structure at the intersection. Specifically, the two curved surfaces have a common tangent plane at their intersection line (or intersection point), and there are no geometric discontinuities such as abrupt angle changes, steps, or creases at the intersection line (or intersection point).

[0071] According to another aspect of this application, a furnace tube device is provided, including an ignition bulb.

[0072] The ignition bulb can be implemented as the ignition bulb 200 mentioned above, which can be referred to in the above introduction and will not be repeated here.

[0073] In summary, according to the ignition bulb and furnace tube device of this application embodiment, the inner diameter of the transition cavity gradually decreases from its first end to its second end, and the inner wall of the cavity at its second end is smoothly connected to the inner wall of the jet pipe. This structure eliminates geometric abrupt changes such as steps or abrupt interfaces at the connection between the two, forming a smooth flow channel. This avoids airflow eddies and stagnation, reduces water vapor flow resistance, improves conveying efficiency, and reduces the stagnation and accumulation of water vapor in the ignition bulb to achieve rapid and thorough discharge. This significantly reduces the condensation of water vapor caused by cooling after ignition, and a small amount of residual condensate can also be smoothly discharged with the airflow to avoid entering the furnace tube and contacting the wafer, thereby solving the problem of spherical particle defects on the wafer surface and improving the stability of the wet oxidation process and the quality of wafer products.

[0074] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of this application. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of this application. All such changes and modifications are intended to be included within the scope of this application as claimed in the appended claims.

[0075] Similarly, it should be understood that, in order to simplify this application and aid in understanding one or more aspects of the application, various features of this application may sometimes be grouped together in a single embodiment, figure, or description thereof in the description of exemplary embodiments of this application. However, this approach should not be construed as reflecting an intention that the claimed application requires more features than are expressly recited in each claim. Rather, as reflected in the corresponding claims, the point of application is that the corresponding technical problem can be solved with fewer features than all of a single disclosed embodiment. Therefore, the claims following the detailed description are hereby expressly incorporated into that detailed description, wherein each claim itself is a separate embodiment of this application.

[0076] Furthermore, those skilled in the art will understand that although some embodiments described herein include certain features but not others included in other embodiments, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, in the claims, any one of the claimed embodiments can be used in any combination.

[0077] It should be noted that the above embodiments are illustrative of this application and not limiting of it, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

Claims

1. An igniter bulb characterized by, The ignition bulb includes: A transition cavity having a first end and a second end opposite to each other, wherein the inner diameter of the transition cavity gradually decreases from the first end to the second end; The second end of the transition cavity is used to connect to the jet pipe of the furnace tube equipment, and the inner wall of the second end of the transition cavity is smoothly connected to the inner wall of the jet pipe. The transition cavity is configured to guide airflow from its first end to its second end and into the jet duct.

2. The igniter bulb of claim 1 wherein, The inner diameter of the second end of the transition cavity is the same as the inner diameter of the jet pipe.

3. The igniter bulb of claim 1 wherein, The inner wall of the transition cavity includes a first inner wall surface and a second inner wall surface that are disposed opposite to each other along the height direction of the transition cavity. Along the direction from the first end to the second end of the transition cavity, the first inner wall surface is arranged with a gradually decreasing height in the height direction, and the height difference between the two ends of the first inner wall surface is a first height difference; Along the direction from the first end to the second end of the transition cavity, the second inner wall surface is either set to maintain a constant height or to gradually decrease in height in the height direction, and the height difference between the two ends of the second inner wall surface is the second height difference; Wherein, the first height difference is greater than the second height difference.

4. The igniter bulb of claim 3 wherein, The first inner wall surface includes at least one arc-shaped surface, the cross section of which along the axial direction of the transition cavity is arc-shaped, and the arc-shaped cross section extends along the axial direction of the transition cavity.

5. The igniter bulb of claim 4 wherein, The first inner wall surface includes at least two arcuate surfaces, and two adjacent arcuate surfaces are smoothly connected.

6. The igniter bulb of claim 5 wherein, The at least two arcuate surfaces include a first arcuate surface and a second arcuate surface that are smoothly connected. The first arcuate surface and the second arcuate surface are arranged sequentially along the direction from the first end to the second end of the transition cavity. The curvature direction of the first arcuate surface is towards the inside of the transition cavity, and the curvature direction of the second arcuate surface is towards the outside of the transition cavity.

7. The igniter bulb of claim 6 wherein, The radius of curvature of the first arc-shaped surface is greater than or equal to the radius of curvature of the second arc-shaped surface.

8. The igniter bulb of any one of claims 4 to 7, wherein, The arc-shaped surface near the second end of the transition cavity is configured as follows: It is smoothly connected to the inner wall of the jet pipe.

9. The igniter bulb of any one of claims 4 to 7, wherein, It also includes an air intake cavity, wherein the arc-shaped surface near the first end of the transition cavity is smoothly connected to the inner wall of the air intake cavity; The inner diameter of the air intake cavity is twice the radius of curvature of the arc surface that is smoothly connected to it.

10. A furnace tube apparatus, characterized by, Includes the ignition bubble as described in any one of claims 1 to 9.

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