FILTER UNIT

Abstract

A filter unit includes a substrate having an opening, a Fabry-Perot interference filter disposed on the substrate so as to overlap the opening in a Z-axis direction, and a conductor substrate disposed on the substrate so as not to overlap the Fabry-Perot interference filter in the Z-axis direction and electrically connected to the Fabry-Perot interference filter. A first recess portion and a second recess portion are formed in the substrate with the Z-axis direction as the depth direction. The first recess portion and the second recess portion are arranged in an X-axis direction perpendicular to the Z-axis direction. The Fabry-Perot interference filter is disposed in the first recess portion. A conductor substrate is disposed in the second recess portion. The substrate includes a separator disposed between the first recess portion and the second recess portion.

Description

Technical area

[0001] The present disclosure relates to a filter unit having a Fabry-Perot interference filter. State of the art

[0002] To configure a filter unit using a Fabry-Perot interference filter comprising a pair of mirror sections with a variable spacing, the following structure is conceivable. That is, a CAN package includes a shaft and a cap, a conductor substrate disposed on the shaft in the CAN package, a Fabry-Perot interference filter disposed on the conductor substrate in the CAN package, and a plurality of lead pins penetrating the shaft (see, for example, US 2017 - 0 350 760 A). Summary of the inventionTechnical problem

[0003] However, in the filter unit adopting the above-described structure, it is difficult to thin the filter unit in an optical axis direction (i.e., the direction in which a pair of mirror portions face each other) of the Fabry-Perot interference filter. Therefore, there is a problem that the filter unit is not suitable for placement in a region (for example, a region between lenses in a lens barrel) that is narrow in the optical axis direction of the Fabry-Perot interference filter.

[0004] The object of the present disclosure is to provide a filter unit suitable for arrangement in a region narrow in an optical axis direction of a Fabry-Perot interference filter. Solution to the problem

[0005] A filter unit according to one aspect of the present disclosure may be [1] "a filter unit comprising: a substrate having a light transmitting portion; a Fabry-Perot interference filter having a pair of mirror portions facing each other in a first direction and spaced apart by a variable distance, the Fabry-Perot interference filter being arranged on the substrate so as to overlap the light transmitting portion in the first direction;and a conductor substrate arranged on the carrier so as not to overlap the Fabry-Perot interference filter when viewed in the first direction, and electrically connected to the Fabry-Perot interference filter, wherein a first recess portion and a second recess portion are formed in the carrier with the first direction as the depth direction, the first recess portion and the second recess portion are arranged in a second direction perpendicular to the first direction, the Fabry-Perot interference filter is arranged in the first recess portion, the conductor substrate is arranged in the second recess portion, and the carrier comprises a separator arranged between the first recess portion and the second recess portion.

[0006] In the filter unit according to aspect [1], the Fabry-Perot interference filter is disposed in the first recess portion formed in the substrate with the first direction as the depth direction, and the conductor substrate is disposed in the second recess portion formed in the substrate with the first direction as the depth direction, so that it does not overlap the Fabry-Perot interference filter on the substrate when viewed from the first direction. This allows, for example, the filter unit to be thinner in the first direction, which is the optical axis direction (that is, the direction in which the pair of mirror portions face each other) of the Fabry-Perot interference filter.Furthermore, in the configuration where the Fabry-Perot interference filter is arranged so as not to overlap the conductor substrate, the degree of freedom of arrangement of the Fabry-Perot interference filter and the conductor substrate is improved compared to the prior art configuration where the Fabry-Perot interference filter is arranged on the conductor substrate, and thus there is a possibility that the positioning of the Fabry-Perot interference filter and the conductor substrate becomes difficult. However, in the filter unit 1 described in [1], the substrate includes a separator disposed between the first recess portion and the second recess portion. Thus, the Fabry-Perot interference filter and the conductor substrate can be easily and accurately positioned with respect to the substrate using the separator as a reference (for example, a mechanical positioning unit or a reference coordinate).Furthermore, in the filter unit in which the separator is not formed, for example, when the conductor substrate is attached to the support, an adhesive member for attaching the conductor substrate can reach the Fabry-Perot interference filter. Since the Fabry-Perot interference filter is sensitive to stress, if a relatively hard resin such as an adhesive member is adhered, the Fabry-Perot interference filter may malfunction due to the influence of stress. However, in the filter unit according to aspect [1], the separator is positioned between the conductor substrate and the Fabry-Perot interference filter, so that the separator can prevent the adhesive member from reaching the Fabry-Perot interference filter. This makes it possible to suppress the occurrence of malfunctions of the Fabry-Perot interference filter due to the adhesion of the adhesive member.Therefore, the filter unit according to aspect [1] is suitable for arrangement in an area which is narrow in the optical axis direction of the Fabry-Perot interference filter.

[0007] A filter unit according to one aspect of the present disclosure may be [2] “the filter unit according to aspect [1], wherein the first recess portion includes a pair of first surfaces facing each other with the Fabry-Perot interference filter interposed therebetween in a third direction perpendicular to both the first direction and the second direction, the second recess portion includes a pair of second surfaces facing each other with the conductor substrate interposed therebetween in the third direction, and the separator is connected to at least one of the pair of first surfaces or at least one of the pair of second surfaces.”According to the filter unit described in [2], since the partition member is bonded to at least one of the pair of first surfaces or at least one of the pair of second surfaces, the mechanical strength of the substrate is increased and, for example, a change in the shape of the light transmitting portion in the substrate can be suppressed.

[0008] A filter unit according to one aspect of the present disclosure may be [3] "the filter unit according to aspect [2], in which the partition member is continuously formed so as to extend from one of the pair of first surfaces to the other (first surface) or from one of the pair of second surfaces to the other (second surface)." According to the filter unit described in [3], since the partition member is continuously formed so as to extend from one of the pair of first surfaces to the other or from one of the pair of second surfaces to the other, the mechanical strength of the substrate is further increased, and, for example, a change in the shape of the light transmitting portion in the substrate can be suppressed.

[0009] A filter unit according to one aspect of the present disclosure may be [4] "the filter unit according to aspect [1], wherein the first recess portion includes a pair of first surfaces facing each other with the Fabry-Perot interference filter interposed therebetween in a third direction perpendicular to both the first direction and the second direction, the second recess portion includes a pair of second surfaces facing each other with the conductor substrate interposed therebetween in the third direction, and the separator is separated from the pair of first surfaces and the pair of second surfaces." According to the filter unit described in [4], it is possible to easily and accurately position the Fabry-Perot interference filter and the conductor substrate with respect to the support by using the separator, while reducing the size of the separator.

[0010] A filter unit according to one aspect of the present disclosure may be [5] "the filter unit according to any one of aspects [1] to [4], wherein a height of the separator in the first direction is equal to or smaller than a height of the Fabry-Perot interference filter in the first direction." According to the filter unit described in [5], for example, in a case where the Fabry-Perot interference filter and the conductor substrate are connected by the cable / wire, the cable can be easily connected to the Fabry-Perot interference filter.

[0011] A filter unit according to one aspect of the present disclosure may be [6] "the filter unit according to any one of aspects [1] to [5], in which a height of the separator in the first direction is equal to or smaller than a height of the conductor substrate in the first direction." According to the filter unit described in [6], for example, in a case where the Fabry-Perot interference filter and the conductor substrate are connected by the cable, the cable can be easily connected to the conductor substrate.

[0012] A filter unit according to one aspect of the present disclosure may be [7] "the filter unit according to any one of aspects [1] to [6], in which the Fabry-Perot interference filter is positioned at the center of the support as viewed in the first direction." According to the filter unit described in [7], even if an external force acts on the support from the side with respect to the first direction, the external force can be prevented from reaching the Fabry-Perot interference filter. Moreover, for example, the Fabry-Perot interference filter can be arranged on a center line of a tube by inserting the support into the tube, such as a lens barrel.

[0013] A filter unit according to one aspect of the present disclosure may be [8] "the filter unit according to aspect [7], in which an outer edge of the support has a circular shape when viewed in the first direction." According to the filter unit described in [8], even when the external force acts laterally on the support from the first direction, it is possible to prevent the external force from acting on the Fabry-Perot interference filter in a balanced manner. Furthermore, for example, when the pipe has a cylindrical shape, the Fabry-Perot interference filter can be easily and accurately arranged on the center line of the pipe.

[0014] A filter unit according to one aspect of the present disclosure may be [9] "the filter unit according to any one of aspects [1] to [6], wherein both the outer edge of the Fabry-Perot interference filter and an inner edge of the first recess portion have a rectangular shape when viewed in the first direction." According to the filter unit described in [9], the Fabry-Perot interference filter can be easily and accurately positioned with respect to the substrate.

[0015] A filter unit according to one aspect of the present disclosure may be

[10] "the filter unit according to any one of aspects [1] to [9], wherein the Fabry-Perot interference filter is arranged on a first mounting surface of the carrier, the conductor substrate is arranged on a second mounting surface of the carrier, and the first mounting surface and the second mounting surface are positioned on the same plane." According to the filter unit described in

[10] , the filter unit may be formed thinner in the first direction, which is the optical axis direction of the Fabry-Perot interference filter.

[0016] The filter unit according to one aspect of the present disclosure may be

[11] "the filter unit according to any one of aspects [1] to

[10] , wherein the second recess portion reaches the outer edge of the substrate when viewed from the first direction." According to the filter unit described in

[11] , since the second recess portion in which the conductor substrate is disposed reaches the outer edge of the substrate when viewed from the first direction, the electrical connection can be established from the side with respect to the first direction with a simple configuration.

[0017] The filter unit according to one aspect of the present disclosure may be

[12] "the filter unit according to any one of aspects [1] to

[11] , which further comprises: a light-transmitting member and an adhesive member, wherein the light-transmitting member covers at least one opening of the first recess portion, and the adhesive member is disposed between the conductor substrate and the support, and between the conductor substrate and the light-transmitting member." According to the filter unit described in

[12] , it is possible to form a package that accommodates the Fabry-Perot interference filter through the support, the conductor substrate, the light-transmitting member, and the adhesive member, while suppressing an increase in thickness in the first direction, which is the optical axis direction of the Fabry-Perot interference filter. This makes it possible to protect the Fabry-Perot interference filter from moisture, particulate matter, and the like.

[0018] A filter unit according to one aspect of the present disclosure may be

[13] "the filter unit according to any one of aspects [1] to

[12] , wherein a distance from an inner edge of the first recessed portion to an outer edge of the substrate in one direction is greater than a width of the Fabry-Perot interference filter in the one direction when viewed from the first direction." According to the filter unit described in

[13] , even if an external force acts on the substrate from the side with respect to the first direction, the external force can be prevented from reaching the Fabry-Perot interference filter.

[0019] The filter unit according to one aspect of the present disclosure may be

[14] "the filter unit according to any one of aspects [1] to

[13] , wherein the light transmitting portion is an opening formed in the substrate, an outer edge of the Fabry-Perot interference filter has a rectangular shape when viewed in the first direction, a distance from an outer edge of the Fabry-Perot interference filter to an outer edge of the substrate in a direction perpendicular to one side of the outer edge of the Fabry-Perot interference filter when viewed from the first direction is greater than a length of a diagonal of the outer edge of the Fabry-Perot interference filter, and a width of the opening when viewed from the first direction is smaller than a width of the Fabry-Perot interference filter in the direction perpendicular to the one side."According to the filter unit described in

[14] , it is possible to suppress stray light from entering the Fabry-Perot interference filter because the aperture is very small compared to the carrier viewed from the first direction.

[0020] The filter unit according to one aspect of the present disclosure may be

[15] "the filter unit according to any one of aspects [1] to

[14] , wherein when a width of the Fabry-Perot interference filter in a third direction perpendicular to the first direction and the second direction is set as Wf, a width of the conductor substrate in the third direction is set as Ws, a width of the first groove portion in the third direction is set as W1, and a width of the second groove portion in the third direction is set as W2, a relationship of "Wf ≤ W1 < Ws ≤ W2" or a relationship of "Ws ≤ W2 < Wf ≤ W1" holds / holds".According to the filter unit described in

[15] , since the width W1 of the first groove portion and the width W2 of the second groove portion differ from each other, the positioning of the Fabry-Perot interference filter and the conductor substrate with respect to the support can be performed easily and accurately by using a boundary portion between the first groove portion and the second groove portion as a reference (e.g., a mechanical positioning device or a reference coordinate). Furthermore, the strength of the support can be ensured compared to a case where the smaller width of the width W1 of the first groove portion and the width W2 of the second groove portion is matched to / corresponds to the larger width.Furthermore, in a case where the relationship of "Wf ≤ W1 < Ws ≤ W2" exists, even if the external force acts on the conductor substrate from the side with respect to the first direction, it can be transmitted from the boundary portion between the first groove portion and the second groove portion to the support, and it is possible to suppress the action of the external force on the Fabry-Perot interference filter. On the other hand, in a case where the relationship of "Ws ≤ W2 < Wf ≤ W1" exists, stray light can be prevented from entering the Fabry-Perot interference filter via the second groove portion where the conductor substrate is arranged.

[0021] The filter unit according to one aspect of the present disclosure may be

[16] "the filter unit according to aspect

[14] , in which a relationship of 'Wf = W1' exists." According to the filter unit described in

[16] , the Fabry-Perot interference filter can be positioned more easily and accurately with respect to the mount.

[0022] The filter unit according to one aspect of the present disclosure may be

[17] "the filter unit according to aspect

[14] or

[15] , in which a relationship of 'Ws = W2' holds." According to the filter unit described in

[17] , the conductor substrate can be positioned more easily and accurately with respect to the holder.

[0023] The filter unit according to one aspect of the present disclosure may be

[18] "the filter unit according to any one of aspects [1] to

[17] , wherein a through-hole opening to an inner surface of the first recessed portion and an outer surface of the substrate is formed in the substrate." According to the filter unit described in

[18] , for example, even if gas is generated in the first recessed portion while the opening of the first recessed portion is covered with a member at the time of manufacturing the filter unit, the gas can escape from the through-hole to the outside. Advantageous effects of the invention

[0024] According to the present disclosure, it is possible to provide a filter unit suitable for arrangement in a region narrow in an optical axis direction of a Fabry-Perot interference filter. Brief description of the drawings Fig. 1 is a perspective view of a Fabry-Perot interference filter included in a filter unit of an embodiment. Fig. Figure 2 is a cross-sectional view of the Fabry-Perot interference filter along the Fig. Line II-II shown in Figure 1. Fig. 3 is a plan view of the filter unit according to the embodiment. Fig. 4 is a cross-sectional view of the filter unit along the line IV-IV in Fig. 3. Fig. 5 is a plan view of a part of the filter unit according to the embodiment. Fig. 6 is a plan view of a part of the filter unit according to the embodiment. Fig. 7 is a bottom view of the filter unit according to the embodiment. Fig. 8 is a cross-sectional view of a lens barrel having the filter unit according to the embodiment. Fig. 9 is a plan view of a part of a filter unit according to a modification. Fig. 10 is a cross-sectional view of a part of a lens barrel having the filter unit according to a modification. Fig. 11 is a cross-sectional view of a Fabry-Perot interference filter according to a modification. Fig. 12 is a plan view of a part of a filter unit according to a modification. Description of the embodiments

[0025] Embodiments of the present disclosure will be described in detail below with reference to the drawings. Note that in the drawings, like or corresponding parts are designated by like reference numerals, and redundant descriptions are omitted. [Configuration of the Fabry-Perot interference filter included in the filter unit]

[0026] As in Fig. As shown in Figure 1, a Fabry-Perot interference filter 10 includes a light-transmitting region 10a. The Fabry-Perot interference filter 10 is a rectangular, plate-shaped element whose thickness direction is a Z-axis direction. The light-transmitting region 10a is a columnar region with a center line parallel to the Z-axis direction. Viewed from the Z-axis direction, the center of the light-transmitting region 10a coincides with the center of the Fabry-Perot interference filter 10.

[0027] As in Fig. As shown in Figure 2, the Fabry-Perot interference filter 10 includes a substrate 11 with the Z-axis direction as its thickness direction. The material of the substrate 11 is, for example, silicon, quartz, glass, or the like. The substrate 11 includes a pair of surfaces 11a and 11b. The pair of surfaces 11a and 11b face each other in the Z-axis direction. A first stack structure 12 is stacked on the surface 11a of the substrate 11. The second stack structure 13 is stacked on the surface 11b of the substrate 11.

[0028] The first stack structure 12 includes an anti-reflection layer 121, a first stacked body 122, an intermediate layer 123, and a second stacked body 124. The anti-reflection layer 121, the first stacked body 122, the intermediate layer 123, and the second stacked body 124 are stacked in this order on the surface 11a of the substrate 11. A gap (air gap) S is formed between the first stacked body 122 and the second stacked body 124 by the intermediate layer 123 in a frame shape. When the material of the substrate 11 is silicon, the material of the anti-reflection layer 121 and the intermediate layer 123 is, for example, silicon oxide or the like. A thickness of the intermediate layer 123 is, for example, an integer multiple of 1 / 2 of a design main wavelength. It should be noted that the thickness of the intermediate layer 123 may be greater than an integer multiple of 1 / 2 of the design main wavelength if necessary.

[0029] A portion of the first stacked body 122 corresponding to the light-transmitting region 10a functions as the mirror portion 14. The mirror portion 14 is supported by the substrate 11 via the anti-reflection layer 121. For example, the first stacked body 122 includes a plurality of polysilicon layers and a plurality of silicon nitride layers, with the layers alternately stacked on top of each other. An optical thickness of each of the layers constituting the mirror portion 14 is, for example, an (integer) multiple of 1 / 4 of the design main wavelength. Note that a silicon oxide layer may be used instead of the silicon nitride layer.

[0030] A part of the second stacked body 124 corresponding to the light-transmitting region 10a functions as the mirror portion 15. The mirror portion 15 is supported on the substrate 11 via the anti-reflection layer 121, the first stacked body 122, and the intermediate layer 123, and faces the mirror portion 14 via a gap S. For example, the second stacked body 124 includes a plurality of polysilicon layers and a plurality of silicon nitride layers, each alternately stacked on top of the other. The optical thickness of each of the layers constituting the mirror portion 15 is, for example, an (integer) multiple of 1 / 4 of the design main wavelength. Note that a silicon oxide layer may be used instead of the silicon nitride layer.A plurality of through holes are formed in a portion of the second stacked body 124 corresponding to the gap S, so that the function of the mirror portion 15 is substantially unaffected. The plurality of through holes is used when the gap S is formed by etching a portion of the intermediate layer 123.

[0031] A first electrode 125 and a second electrode 126 are formed in the mirror portion 14. The first electrode 125 surrounds the light-transmitting region 10a when viewed from the Z-axis direction. The second electrode 126 overlaps the light-transmitting region 10a when viewed from the Z-axis direction. The shape of the second electrode 126, viewed from the Z-axis direction, is substantially the same as the shape of the light-transmitting region 10a when viewed from the Z-axis direction. The first electrode 125 and the second electrode 126 are each formed by doping a portion of a polysilicon layer with an impurity to reduce the resistance of the portion.

[0032] A third electrode 127 is formed in the mirror portion 15. The third electrode 127 faces the first electrode 125 and the second electrode 126 across the gap S. The third electrode 127 is formed by doping a portion of a polysilicon layer with an impurity to reduce the resistance of the portion. For example, the distance between the second electrode 126 and the third electrode 127 is substantially equal to the distance between the first electrode 125 and the third electrode 127.

[0033] The first stack structure 12 is provided with a pair of terminals 16 to form the light passage area 10a (see Fig. 1). Each terminal 16 is arranged in a through-hole formed in the second stacked body 124 and the intermediate layer 123, opening on the opposite side of the substrate 11 and reaching the first stacked body 122. Each terminal 16 is electrically connected to the first electrode 125 via a wiring 125a.

[0034] The first stack structure 12 is provided with a pair of terminals 17 to form the light passage area 10a (see Fig. 1). Each terminal 17 is arranged in a through-hole formed in the second stacked body 124 and the intermediate layer 123 so as to open to the opposite side of the substrate 11 and reach the intermediate layer 123. Each terminal 17 is electrically connected to the second electrode 126 via a wiring 126a and is also electrically connected to the third electrode 127 via a wiring 127a. Note that a direction in which the terminal pair 17 is arranged with the light-transmitting region 10a therebetween is a direction perpendicular to a direction in which the terminal pair 16 is arranged with the light-transmitting region 10a therebetween (see Fig. 1).

[0035] A pair of grooves 122a is formed in the first stack body 122. Each groove 122a extends annularly to surround a portion of the wiring 126a extending from each terminal 17 along the Z-axis direction. Each groove 122a electrically insulates the first electrode 125 from the wiring 126a. A groove 122b is formed in the first stack body 122. The groove 122b extends annularly along an inner edge of the first electrode 125. The groove 122b electrically insulates the first electrode 125 from the second electrode 126. Areas within the grooves 122a and 122b may be filled with an insulating material or a gap.

[0036] A pair of grooves 124a is formed in the second stack body 124. Each groove 124a extends annularly to surround each terminal 16. Each groove 124a electrically insulates each terminal 16 from the third electrode 127. Areas within the grooves 124a may be filled with an insulating material or a gap.

[0037] The second stack structure 13 includes an anti-reflection layer 131, a third stack body 132, an intermediate layer 133, and a fourth stack body 134. The anti-reflection layer 131, the third stack body 132, the intermediate layer 133, and the fourth stack body 134 are stacked in this order on the surface 11b of the substrate 11. The anti-reflection layer 131 and the intermediate layer 133 have a similar configuration to the anti-reflection layer 121 and the intermediate layer 123, respectively. The third stack body 132 and the fourth stack body 134 have stack structures that are symmetrical to those of the first stack body 122 and the second stack body 124, respectively, with respect to the substrate 11. The anti-reflection layer 131, the third stacked body 132, the intermediate layer 133 and the fourth stacked body 134 have the function of suppressing warpage of the substrate 11.

[0038] In the third stacked body 132, the intermediate layer 133, and the fourth stacked body 134, an opening 18 is formed to encompass the light-transmitting region 10a. The opening 18 overlaps the light-transmitting region 10a when viewed from the Z-axis direction. The shape of the opening 18 in the Z-axis direction is substantially identical to the shape of the light-transmitting region 10a in the Z-axis direction. That is, the center line of the opening 18 coincides with the center line of the light-transmitting region 10a. The opening 18 is open on the side opposite the substrate 11 and extends to the anti-reflection layer 131.

[0039] A light-shielding layer 135 is formed on a surface of the fourth stacked body 134 opposite to the substrate 11. The material of the light-shielding layer 135 is, for example, aluminum or the like. A protective layer 136 is formed on a surface of the light-shielding layer 135 and an inner surface of the opening 18. The material of the protective layer 136 is, for example, aluminum oxide or the like. Note that by setting a thickness of the protective layer 136 to 100 nm or less (preferably about 30 nm), the optical influence of the protective layer 136 can be made negligible.

[0040] In the Fabry-Perot interference filter 10 configured as described above, when a potential difference is generated between the first electrode 125 and the third electrode 127 by applying a voltage to the first electrode 125 and the third electrode 127 via the plurality of terminals 16 and 17, an electrostatic force corresponding to the potential difference is generated between the first electrode 125 and the third electrode 127. By the electrostatic force generated between the first electrode 125 and the third electrode 127, the mirror portion 15 is attracted toward the mirror portion 14, and the distance between the mirror portion 14 and the mirror portion 15 is adjusted. At this time, the second electrode 126, which has the same potential as the third electrode 127, functions as a compensating electrode, and the mirror portion 15 is kept flat in the light transmission region 10a.

[0041] As described above, in the Fabry-Perot interference filter 10, the pair of mirror portions 14 and 15 facing each other in the Z-axis direction function as a pair of mirror portions whose distance from each other is variable. Here, the wavelength of the light passing through the Fabry-Perot interference filter 10 depends on the distance between the mirror portion 14 and the mirror portion 15. Therefore, the wavelength of the light passing through the Fabry-Perot interference filter 10 can be selected by adjusting the voltage (potential difference between the first electrode 125 and the third electrode 127) applied to the first electrode 125 and the third electrode 127. [Filter unit configuration]

[0042] As in the Fig. 3 and Fig. 4, a filter unit 1 comprises a carrier 2, a light-transmitting element 3, a conductor substrate 4, a connector 5, a cover 6 and the above-described Fabry-Perot interference filter 10. In Fig. 3, the light transmission element 3 and the adhesive elements 73 and 75 described later are shown by two-dot dashed lines.

[0043] The beam 2 is a circular plate-shaped member whose thickness direction is the Z-axis direction (first direction). That is, viewed in the Z-axis direction, an outer edge 2E of the beam 2 has a circular shape. The beam 2 has a pair of surfaces 2a and 2b and a side surface 2c. The pair of surfaces 2a and 2b are opposite to each other in the Z-axis direction. The side surface 2c connects the outer edge of the surface 2a and the outer edge of the surface 2b. The material of the beam 2 is, for example, a metal material such as stainless steel or a plastic material. The outer diameter of the beam 2 is, for example, 20 mm to 50 mm. The thickness of the beam 2 in the Z-axis direction is, for example, 2 mm to 5 mm.

[0044] As in the Fig. 4 and Fig. 5, a first recessed portion 21 and a second recessed portion 22 are formed in the substrate 2. The first recessed portion 21 and the second recessed portion 22 each open to the surface 2a with the Z-axis direction as the depth direction. The bottom surface (first mounting surface) 21a of the first recessed portion 21 and the bottom surface (second mounting surface) 22a of the second recessed portion 22 are arranged in the same plane, which is perpendicular to the Z-axis direction. The thickness from the bottom surfaces 21a and 22a to the surface 2b of the substrate 2 in the Z-axis direction is, for example, approximately 100 µm. The first recessed portion 21 and the second recessed portion 22 are arranged in the X-axis direction (second direction, which is perpendicular to the first direction). Fig. 5, the illustration of the light transmission element 3 and the adhesive elements 73 and 75 to be described later is omitted.

[0045] The first recessed portion 21 includes a center point C of the beam 2 when viewed from the Z-axis direction. The first recessed portion 21 does not extend to the outer edge 2E of the beam 2 when viewed from the Z-axis direction. The inner edge 21E of the first recessed portion 21 has a rectangular shape when viewed from the Z-axis direction. In the present embodiment, the inner edge 21E of the first recessed portion 21 has a rectangular shape when viewed in the Z-axis direction with the X-axis direction as the longitudinal direction. The width of the first recessed portion 21 in the X-axis direction is, for example, 5 mm to 20 mm. The width of the first recessed portion 21 in the Y-axis direction is, for example, 2.2 mm to 22 mm. The depth of the first recessed portion 21 in the Z-axis direction is, for example, 0.2 mm to 2 mm.

[0046] The second recessed portion 22 does not include the center point C of the beam 2 when viewed from the Z-axis direction. The second recessed portion 22 extends to the outer edge 2E of the beam 2 when viewed from the Z-axis direction. The inner edge 22E of the second recessed portion 22 has a rectangular shape when viewed from the Z-axis direction. In the present embodiment, the inner edge 22E of the second recessed portion 22 has a rectangular shape when viewed from the Z-axis direction with the X-axis direction as the longitudinal direction. In the present embodiment, the second recessed portion 22 extends in the X-axis direction to the side surface 2c of the beam 2 on the opposite side to the first recessed portion 21. The second recessed portion 22 extends to the outer edge 2E of the beam 2 on the short side of the second recessed portion 22 when viewed from the Z-axis direction.Since the second recessed portion 22 does not cross the beam 2 in the Z-axis direction, the beam 2 has higher rigidity than a configuration in which the second recessed portion 22 crosses the beam 2. The width of the second recessed portion 22 in the X-axis direction is, for example, 8 mm to 23 mm. The width of the second recessed portion 22 in the Y-axis direction is, for example, 3 mm to 24 mm. The depth of the second recessed portion 22 in the Z-axis direction is, for example, 0.2 mm to 2 mm.

[0047] A width W2 of the second recessed portion 22 in the Y-axis direction (third direction perpendicular to both the first direction and the second direction) is larger than a width W1 of the first recessed portion 21 in the Y-axis direction. In the present embodiment, the center line of the first recessed portion 21, which is parallel to the X-axis direction, passes through the center point C of the carrier 2 when viewed from the Z-axis direction. In the present embodiment, the center line of the second recessed portion 22, which is parallel to the X-axis direction, coincides with the center line of the first recessed portion 21, which is parallel to the X-axis direction, when viewed from the Z-axis direction.

[0048] An opening (light transmitting portion) 23 and a through-hole 24 are formed in the substrate 2. The opening 23 and the through-hole 24 are open to the bottom surface (inner surface) 21a of the first recessed portion 21 and the surface (outer surface) 2b of the substrate 2, respectively. That is, the first recessed portion 21 is open on the side opposite to the opening 23 with the Z-axis direction as the depth direction. The opening 23 and the through-hole 24 are arranged in the X-axis direction. The opening 23 defines a columnar space with a center line parallel to the Z-axis direction. Viewed from the Z-axis direction, the center of the opening 23 coincides with the center C of the substrate 2. The inner diameter of the opening 23 is, for example, 2 mm to 15 mm.

[0049] The first recess portion 21 has a pair of side surfaces (first surfaces) 21b and 21c facing each other in the Y-axis direction. The side surfaces 21b and 21c are perpendicular to the Y-axis direction. The second recess portion 22 has a pair of side surfaces (second surfaces) 22b and 22c facing each other in the Y-axis direction. The side surfaces 22b and 22c are perpendicular to the Y-axis direction.

[0050] A widened portion 25 is formed on the substrate 2. The widened portion 25 is widened in the X-axis direction toward the side opposite to the second recessed portion 22 and in the Y-axis direction on both sides of the opening of the first recessed portion 21. The widened portion 25 is a recessed portion formed in the substrate 2 so as to open toward the surface 2a with the Z-axis direction as the depth direction and reach the opening of the first recessed portion 21. In the present embodiment, the width of the widened portion 25 in the Y-axis direction is equal to the width W2 of the second recessed portion 22 in the Y-axis direction.

[0051] The carrier 2 includes a partition member 26. The partition member 26 is arranged between the first recessed portion 21 and the second recessed portion 22. The partition member 26 is formed integrally with the other part of the carrier 2 as a part of the carrier 2. In the present embodiment, the partition member 26 is a wall portion extending in the Y-axis direction between the bottom surface 21a of the first recessed portion 21 and the bottom surface 22a of the second recessed portion 22. In the present embodiment, the partition member 26 is formed continuously to extend from the side surface 22b to the side surface 22c.Viewed in the Z-axis direction, one end of the partition member 26 is connected to an end portion of the side surface 22b near the first recessed portion 21, and the other end of the partition member 26 is connected to an end portion of the side surface 22c near the first recessed portion 21. In the present embodiment, the height of the partition member 26 in the Z-axis direction, relative to the plane in which the bottom surface 21a and the bottom surface 22a lie, is less than the height of the surface 2a of the substrate 2 in the Z-axis direction and is less than the height of a bottom surface 25a of the expansion portion 25 in the Z-axis direction. The width of the partition member 26 in the X-axis direction is, for example, 0.5 mm to 5 mm. The height of the partition member 26 in the Z-axis direction is, for example, 0.1 mm to 2 mm.

[0052] The Fabry-Perot interference filter 10 is arranged on the substrate 2 with the Z-axis direction as the thickness direction so as to overlap the opening 23 as viewed in the Z-axis direction. More specifically, the Fabry-Perot interference filter 10 is arranged in the first recess portion 21 with the Z-axis direction as the thickness direction so as to overlap the opening 23 as viewed in the Z-axis direction. In the present embodiment, the Fabry-Perot interference filter 10 is arranged to be sandwiched between the pair of side surfaces 21b and 21c in the Y-axis direction. The Fabry-Perot interference filter 10 is in contact with the separator 26 and the pair of side surfaces 21b and 21c in the first recess portion 21. The side surface of the Fabry-Perot interference filter 10 is covered with the separator 26 and the pair of side surfaces 21b and 21c.In the present embodiment, the height of the Fabry-Perot interference filter 10 in the Z-axis direction, relative to the bottom surface 21a of the first recessed portion 21, is less than the height of the surface 2a of the substrate 2 in the Z-axis direction and less than the height of the bottom surface 25a of the widened portion 25 in the Z-axis direction. In the present embodiment, the height of the partition member 26 in the Z-axis direction, relative to the bottom surface 21a of the first recessed portion 21, is equal to or less than the height of the Fabry-Perot interference filter 10 in the Z-axis direction. The width of the Fabry-Perot interference filter 10 in the X-axis direction is, for example, 2 mm to 20 mm. The width of the Fabry-Perot interference filter 10 in the Y-axis direction is, for example, 2 mm to 20 mm. The thickness of the Fabry-Perot interference filter 10 in the Z-axis direction is, for example, 300 µm to 650 µm.

[0053] As described above, the Fabry-Perot interference filter 10 is a rectangular plate-shaped member whose thickness direction is a Z-axis direction. Therefore, the outer edge 10E of the Fabry-Perot interference filter 10 has a rectangular shape when viewed in the Z-axis direction. The Fabry-Perot interference filter 10 is arranged on the bottom surface 21a of the first recessed portion 21 such that each side of the outer edge 10E is parallel to the X-axis direction or the Y-axis direction when viewed from the Z-axis direction, and the opening 18 faces the opening 23. The center line of the opening 18 coincides with the center line of the opening 23. That is, when viewed from the Z-axis direction, the Fabry-Perot interference filter 10 is positioned at the center C of the substrate 2. When viewed from the Z-axis direction, the opening 18 is positioned within the opening 23.

[0054] The Fabry-Perot interference filter 10 is attached / fixed to the bottom surface 21a with an adhesive member 71. The adhesive member 71 is arranged point-like between the bottom surface 21a and a corner portion of the Fabry-Perot interference filter 10. This makes it possible to prevent stresses caused by the deformation of the substrate 2 and / or the adhesive member 71 due to temperature changes from being applied to the Fabry-Perot interference filter 10. The material of the adhesive member 71 is, for example, a polyimide resin, a silicone resin, an epoxy resin, an acrylic resin, or a hybrid resin thereof.

[0055] As in the Fig. 4 and Fig. 6, the light-transmitting member 3 is arranged on the substrate 2 with the Z-axis direction as the thickness direction so as to cover the opening of the first recessed portion 21. More specifically, the light-transmitting member 3 is arranged in the expanded portion 25 with the Z-axis direction as the thickness direction so as to cover the opening of the first recessed portion 21. In the present embodiment, the light-transmitting member 3 covers part of the opening of the second recessed portion 22 together with the opening of the first recessed portion 21. In the present embodiment, when the bottom surface 25a of the expanded portion 25 is taken as a reference, the height of the light-transmitting member 3 as viewed in the Z-axis direction is smaller than the height of the surface 2a of the substrate 2 as viewed in the Z-axis direction.

[0056] The light-transmitting element 3 is a rectangular plate-shaped element whose thickness direction is the Z-axis direction and whose length direction is the X-axis direction. Therefore, the outer edge 3E of the light-transmitting element 3, viewed from the Z-axis direction, has a rectangular shape with the X-axis direction as the length direction. The light-transmitting element 3 is arranged on the bottom surface 25a of the expanding portion 25 such that each side of the outer edge 3E, viewed from the Z-axis direction, is parallel to the X-axis direction or the Y-axis direction. For example, the light-transmitting element 3 is a bandpass filter that transmits light in a predetermined wavelength range.

[0057] The light-transmitting element 3 is attached to the bottom surface 25a and the side surface 25b of the expanded portion 25 with the adhesive elements 72 and 73. The adhesive elements 72 are arranged in a point-like manner between the bottom surface 25a and a corner portion of the light-transmitting element 3. The adhesive elements 73 are arranged along the corner portion formed by the side surface 25b and the surface 3a of the light-transmitting element 3. The surface 3a is a surface of the light-transmitting element 3 that is opposite to the first recessed portion 21. A part of the adhesive elements 73 also protrudes between the side surface 25b of the expanded portion 25 and the side surface of the light-transmitting element 3. The material of the adhesive elements 72 and 73 is, for example, a polyimide resin, a silicone resin, an epoxy resin, an acrylic resin, or a hybrid resin thereof.

[0058] As in the Fig. 4 and Fig. As shown in Figure 5, the conductor substrate 4 is arranged on the support 2 with the Z-axis direction as the thickness direction so that it does not overlap the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. More specifically, the conductor substrate 4 is arranged in the second recess portion 22 with the Z-axis direction as the thickness direction so that it does not overlap the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. In the present embodiment, the conductor substrate 4 is arranged so that it is sandwiched between the pair of side surfaces 22b and 22c in the Y-axis direction. The conductor substrate 4 is in contact with the separator 26 in the second recess portion 22.In the present embodiment, the height of the conductor substrate 4 in the Z-axis direction, with the bottom surface 22a of the second recessed portion 22 as a reference, is less than the height of the surface 2a of the carrier 2 in the Z-axis direction and less than the height of the bottom surface 25a of the expansion portion 25 in the Z-axis direction. In the present embodiment, with the bottom surface 22a of the second recessed portion 22 as a reference, the height of the separator 26 in the Z-axis direction is equal to or less than the height of the conductor substrate 4 in the Z-axis direction.

[0059] The conductor substrate 4 is a rectangular plate-shaped substrate with a thickness direction in the Z-axis direction and a length direction in the X-axis direction. Therefore, the outer edge 4E of the conductor substrate 4, viewed from the Z-axis direction, has a rectangular shape with the X-axis direction as the length direction. The conductor substrate 4 is arranged on the bottom surface 22a of the second recess portion 22 such that each side of the outer edge 4E, viewed from the Z-axis direction, is parallel to the X-axis direction or the Y-axis direction.

[0060] The conductor substrate 4 is fixed to the bottom surface 22a of the second recessed portion 22 with an adhesive member 74. The adhesive member 74 includes a pair of first parts 74a and a second part 74b. The pair of first parts 74a face each other between the bottom surface 22a and the conductor substrate 4 and each extends in the X-axis direction. A part of each first part 74a also protrudes between the side surface of the second recessed portion 22 and the side surface of the conductor substrate 4. The second part 74b faces the separator 26 between the bottom surface 22a and the conductor substrate 4 and extends in the Y-axis direction. The material of the adhesive member 74 is, for example, a polyimide resin, a silicone resin, an epoxy resin, an acrylic resin, or a hybrid resin thereof.

[0061] The conductor substrate 4 is electrically connected to the Fabry-Perot interference filter 10. More specifically, the terminal 41 of the conductor substrate 4 is electrically connected via a cable 8 to the terminal 16 near the separator 26 among the terminal pairs 16 of the Fabry-Perot interference filter 10, and the terminal 42 of the conductor substrate 4 is electrically connected via the cable 8 to the terminal 17 near the separator 26 among the terminal pairs 17 of the Fabry-Perot interference filter 10. The terminal pair 41 and 42 are arranged in a region along the separator 26 on the surface 4a of the conductor substrate 4 on the light-transmitting element 3 side. Each cable 8 passes through a gap between the separating member 26 and the light-passing member 3. Viewed from the X-axis direction, each cable 8 is accommodated in the first recessed portion 21 and the second recessed portion 22.The width of the separator 26 in the X-axis direction is smaller than the width of the Fabry-Perot interference filter 10 in the X-axis direction. This allows the distance between the Fabry-Perot interference filter 10 and the conductor substrate 4 to be shortened.

[0062] The connector 5 is attached / mounted on the surface 4a of the conductor substrate 4 and electrically connected to the conductor substrate 4. A part 5a of the connector 5 is positioned outside the side surface 2c of the carrier 2 over a region of the second recessed portion 22 that reaches the side surface 2c of the carrier 2. The part 5a of the connector 5 is provided with a connection hole 51 open to the side opposite the center C of the carrier 2. The connector 5 is received in the second recessed portion 22 in the Z-axis direction. In the filter unit 1, a voltage is applied from external wiring connected to the connector 5 to the terminal pair 16 and 17 via the conductor substrate 4 and the pair of wires 8.

[0063] As in the Fig. 4 and Fig. As shown in Fig. 6, an adhesive member 75 is disposed between the conductor substrate 4 and the light-transmitting member 3. The adhesive member 75 extends along a portion of the outer edge 3E of the light-transmitting member 3 that overlaps the conductor substrate 4 when viewed from the Z-axis direction. The adhesive member 75 seals a gap between the conductor substrate 4 and the light-transmitting member 3 outside the pair of terminals 41 and 42 (on the side opposite to the center point C of the base 2). The material of the adhesive member 75 is, for example, a polyimide resin, a silicone resin, an epoxy resin, an acrylic resin, or a hybrid resin thereof. In the present embodiment, the adhesive members 74 and 75 constitute "an adhesive member 7 disposed between the conductor substrate 4 and the base 2, and between the conductor substrate 4 and the light-transmitting member 3."

[0064] As in the Fig. 4 and Fig. As shown in Fig. 7, the cover 6 is arranged on the surface 2b of the substrate 2 so as to cover the opening 23 and the through-hole 24. The cover 6 is a plate-shaped member having optical transparency and is arranged on the surface 2b of the substrate 2 with the Z-axis direction as the thickness direction. For example, the cover 6 has a circular plate shape, and the outer edge 6E of the cover 6 is positioned inside the outer edge 2E of the substrate 2 as viewed in the Z-axis direction. The cover 6 is fixed to the surface 2b with an adhesive member 76 arranged along the outer edge 6E of the cover 6. The material of the adhesive member 76 is, for example, a polyimide resin, a silicone resin, an epoxy resin, an acrylic resin, or a hybrid resin thereof. A light-shielding film 61 is provided on a surface 6a of the cover 6 opposite to the substrate 2.The light-shielding film 61 overlaps the through-hole 24 in the Z-axis direction. The light-shielding film 61 has a size sufficient to prevent light from entering the through-hole 24 through the cover 6. The light-shielding film 61 is, for example, a chromium plating film or the like.

[0065] As in Fig. 4, in the filter unit 1, the substrate 2 and the light-transmitting member 3 form a housing 200 having a first wall portion 210, a second wall portion 220, and a surrounding portion 230. More specifically, a part of the substrate 2 forms the first wall portion 210, and a part of the light-transmitting member 3 forms the second wall portion 220. Another part of the substrate 2 and another part of the light-transmitting member 3 form the surrounding portion 230. The first wall portion 210 is a wall portion having the opening 23, and specifically, is a portion (i.e., the bottom wall portion of the first recessed portion 21) of the substrate 2 that overlaps an area in the first recessed portion 21 when viewed from the Z-axis direction.The second wall portion 220 is a wall portion opposite the first wall portion 210 in the Z-axis direction, and is specifically a portion of the light-transmitting member 3 that overlaps an area in the first recessed portion 21 when viewed from the Z-axis direction. The surrounding portion 230 is a part surrounding the area between the first wall portion 210 and the second wall portion 220, and is specifically a part in the substrate 2 and the light-transmitting member 3 that surrounds the area in the first recessed portion 21 when viewed from the Z-axis direction.

[0066] Therefore, the following can be said for the filter unit 1. The first recessed portion 21 is defined by the first wall portion 210 and the surrounding portion 230. An area in the first recessed portion 21 corresponds to an area in the housing 200. The second recessed portion 22 is formed in the surrounding portion 230 such that it opens toward the second wall portion 220 with the Z-axis direction as the depth direction. Viewed from the Z-axis direction, an outer edge 200E of the housing 200 coincides with the outer edge 2E of the carrier 2 (see Fig. 3). The conductor substrate 4 is fixed to the housing 200 so that it does not overlap the Fabry-Perot interference filter 10 when viewed from the Z-axis direction. The conductor substrate 4 is fixed to the housing 200 so that the entire conductor substrate 4 is embedded in the surrounding portion 230. Note that "the entire conductor substrate 4 is embedded in the surrounding portion 230" means that the entire conductor substrate 4 overlaps the surrounding portion 230 when viewed from the X-axis direction, the Y-axis direction, and the Z-axis direction. At least a part of the conductor substrate 4 is exposed to the outside of the housing 200.In the present embodiment, at least a part of the conductor substrate 4 is exposed to the outside of the housing 200 through a portion of the opening of the second recessed portion 22 that is not covered with the light-transmitting member 3 and a portion of the second recessed portion 22 that reaches the side surface 2c of the carrier 2.

[0067] As in Fig. 5, a width Wf of the Fabry-Perot interference filter in the Y-axis direction is equal to or smaller than the width W1 of the first groove portion in the Y-axis direction. A width Ws of the conductor substrate in the Y-axis direction is larger than the width W1 of the first groove portion in the Y-axis direction and equal to or smaller than the width W2 of the second groove portion in the Y-axis direction. Thus, in the filter unit 1, the relationship of "Wf ≤ W1 < Ws ≤ W2" is established. In the present embodiment, the relationship of "Wf = W1" and the relationship of "Ws = W2" are established. In the filter unit 1, the relationship of "W1 < 2Wf" is preferably established. In the filter unit 1, the relationship of "W2 < 2Ws" is preferably established.

[0068] Note that "Wf = W1" means that Wf and W1 are substantially equal, and "Ws = W2" means that Ws and W2 are substantially equal. For example, "Wf = W1" means that W1 is a value of "Wf" or greater and "1.1xWf" or less, and "Ws = W2" means that W2 is a value of "Ws" or greater and "1.1xWSs" or less.

[0069] As in Fig. 3, the “distance D1 from the inner edge 21E of the first recessed portion 21 to the outer edge 2E of the substrate 2” in the Y-axis direction (one direction) as viewed from the Z-axis direction is larger than the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction. The thickness of the “section from the inner edge 21E of the first recessed portion 21 to the outer edge 2E of the substrate 2” in the Y-axis direction is greater than the thickness of the Fabry-Perot interference filter 10. When viewed in the Z-axis direction, the “distance D2 from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the substrate 2” in the Y-axis direction (a direction perpendicular to one side of the outer edge 10E of the Fabry-Perot interference filter 10) is greater than the length L of the diagonal of the outer edge 10E of the Fabry-Perot interference filter 10.The “distance D2 from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the support 2” in the Y-axis direction may be about 2 to 3 times the length L of the diagonal of the outer edge 10E of the Fabry-Perot interference filter 10. When viewed from the Z-axis direction, the width W3 of the opening 23 is smaller than the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction. The “distance D2 from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the carrier 2” is approximately 2 to 3 times the length L of the diagonal of the outer edge 10E of the Fabry-Perot interference filter 10, and the width “distance D2 from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the carrier 2” surrounds the opening 23. The carrier 2, which is integrally formed without combining the plurality of parts, includes a thick portion surrounding the first recessed portion 21 and the second recessed portion 22.The thick portion is a portion of the beam 2 whose thickness in the Z-axis direction is greater than the depth of the first recessed portion 21 in the Z-axis direction. The area of ​​the thick portion, viewed from the Z-axis direction, is 50% or more of the area of ​​the beam 2 viewed from the Z-axis direction.

[0070] The "distance D1 from the inner edge 21E of the first recessed portion 21 to the outer edge 2E of the substrate 2" in the specified direction corresponds to the "distance from the inner edge of the surrounding portion 230 to the outer edge of the surrounding portion 230" in the specified direction. Furthermore, the "distance D2 from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the substrate 2" in the specified direction corresponds to the "distance from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge of the surrounding portion 230" in the specified direction. [Method for manufacturing the filter unit]

[0071] A method for manufacturing the filter unit 1 described above will be described with reference to Fig. 4. First, the substrate 2 is prepared, and the uncured adhesive member 71 is placed on the bottom surface 21a of the first recessed portion 21 and the uncured adhesive member 74 is placed on the bottom surface 22a of the second recessed portion 22. Next, the Fabry-Perot interference filter 10 is placed on the bottom surface 21a of the first recessed portion 21, and the conductor substrate 4 is placed on the bottom surface 22a of the second recessed portion 22. The connector 5 is pre-mounted on the surface 4a of the conductor substrate 4. Then, the adhesive members 71 and 74 are cured. At this time, since the Fabry-Perot interference filter 10 is inserted into the first recessed portion 21 while in contact with the separator 26, the Fabry-Perot interference filter is accurately positioned with respect to the opening 23.Furthermore, since the conductor substrate 4 is inserted into the second recessed portion 22 while in contact with the separator 26, the conductor substrate 4 is accurately positioned with respect to the Fabry-Perot interference filter 10. Subsequently, the terminal 41 of the conductor substrate 4 is electrically connected to the terminal 16 of the Fabry-Perot interference filter 10 via the cable 8, and the terminal 42 of the conductor substrate 4 is electrically connected to the terminal 17 of the Fabry-Perot interference filter 10 via the cable 8. For a reliable cable connection between the Fabry-Perot interference filter 10 and the conductor substrate 4, it is important that the conductor substrate 4 be accurately positioned with respect to the Fabry-Perot interference filter 10. Among the terminal pair 16, the terminal 16 to which the cable 8 is connected is positioned closer to the separator 26 (conductor substrate 4) than the center of the Fabry-Perot interference filter 10.Likewise, among the terminal pair 17, the terminal 17 to which the cable 8 is connected is positioned closer to the separator 26 (conductor substrate 4) than the center of the Fabry-Perot interference filter 10. Thus, the length of each cable 8 can be shortened.

[0072] Subsequently, the uncured adhesive member 72 is placed on the bottom surface 25a of the expanded portion 25. Subsequently, the light-transmitting member 3 is placed on the bottom surface 25a of the expanded portion 25. Subsequently, the adhesive member 72 is cured. Subsequently, the uncured adhesive member 73 is placed along the corner portion formed by the side surface 25b of the expanded portion 25 and the surface 3a of the light-transmitting member 3, and the uncured adhesive member 75 is sandwiched between the conductor substrate 4 and the light-transmitting member 3. Subsequently, the adhesive members 73 and 75 are cured. At this time, the gas generated from the adhesive members 73 and 75 is discharged from the interior of the first recessed portion 21 to the outside through the through-hole 24. Subsequently, the cover 6 is placed on the surface 2b of the substrate 2.Subsequently, the uncured adhesive member 76 is arranged along the outer edge 6E of the cover 6. The adhesive member 76 is then cured. The light-shielding film 61 is pre-applied to the surface 6a of the cover 6. As described above, the filter unit 1 is obtained. [Structure of a lens tube containing the filter unit]

[0073] As in Fig. As shown in Figure 8, a lens barrel 300 includes a tube 310, an optical bundling system 320 having a plurality of lenses, an optical imaging system 330 having a plurality of lenses, and the filter unit 1 described above. The lens barrel 300 is used as an interchangeable lens of a hyperspectral camera. The hyperspectral camera is a camera that can split light into several tens to several hundred bands to capture an image for each band.

[0074] The tube 310 includes a main body portion 311 and a proximal end portion 312. The main body portion 311 holds the optical bundling system 320, the optical imaging system 330, and the filter unit 1. The proximal end portion 312 is configured to be detachable from the camera body of the hyperspectral camera.

[0075] The optical bundle system 320 is arranged in an area on the side opposite the proximal end portion 312, in the area on the inside of the main body portion 311. The optical imaging system 330 is arranged in an area on the side of the proximal end portion 312, in the area inside the main body portion 311. The filter unit 1 is arranged in an area between the optical bundle system 320 and the optical imaging system 330, in an area inside the main body portion 311. The optical axis of the optical bundle system 320, the optical axis of the optical imaging system 330, and the optical axis of the filter unit 1 (i.e., the center lines of the openings 18 and 23) coincide with the center line of the tube 310.

[0076] The optical bundle system 320 and the optical imaging system 330 form a non-telecentric optical system. The optical bundle system 320 is an optical system that bundles the on-axis / on-axis incident light and the off-axis / off-axis incident light. The filter unit 1 is arranged at a position where the on-axis incident light and the off-axis incident light intersect in the optical bundle system 320. The filter unit 1 functions as a diaphragm at this position. The optical imaging system 330 forms an image of the light that has passed through the filter unit 1 on an image sensor of a hyperspectral camera. Note that the optical bundle system 320 and the optical imaging system 330 can also form a telecentric optical system.

[0077] The filter unit 1 is fixed within the main body portion 311 by being sandwiched between a flange surface 311a provided on the main body portion 311 and a fixing ring 313. The flange surface 311a is an inward-facing flange surface provided on the main body portion 311 so as to face the bundling optical system 320 side. The filter unit 1 is fixed to the inside of the main body portion 311 in a state where the opening 23 is positioned on the bundling optical system 320 side with respect to the Fabry-Perot interference filter 10. For example, the opening 23 of the filter unit 1 is positioned at a position where the on-axis incident light and the off-axis incident light of the bundling optical system 320 intersect.

[0078] The connector 5 is disposed in an opening 311b formed in the main body portion 311. The connection opening 51 of the connector 5 is open to the outside of the tube 310 through the opening 311b. An adhesive member 77 is disposed between the side surface of the connector 5 and the inner surface of the opening 311b. This seals a gap between the side surface of the connector 5 and the inner surface of the opening 311b. [Activities and effects]

[0079] In the filter unit 1, the Fabry-Perot interference filter 10 is arranged in the first recessed portion 21, and the conductor substrate 4 is arranged in the second recessed portion 22 so as not to overlap the Fabry-Perot interference filter 10 on the support 2 in the Z-axis direction. This allows, for example, the filter unit 1 to be thinner in the Z-axis direction, which is the optical axis direction (i.e., the direction in which the pair of mirror portions 14 and 15 face each other) of the Fabry-Perot interference filter 10.Furthermore, in the filter unit 1 in which the Fabry-Perot interference filter 10 is arranged so as not to overlap the conductor substrate 4, the degree of freedom of arrangement of the Fabry-Perot interference filter and the conductor substrate is improved compared to the prior art configuration in which the Fabry-Perot interference filter is arranged on the conductor substrate, and thus there is a possibility that the positioning of the Fabry-Perot interference filter 10 and the conductor substrate 4 becomes difficult. However, in the filter unit 1, the substrate 2 includes a separator 26 arranged between the first recessed portion 21 and the second recessed portion 22. Thus, the Fabry-Perot interference filter 10 and the conductor substrate 4 can be easily and accurately positioned with respect to the substrate 2 using the separator 26 as a reference (for example, a mechanical positioning unit or a reference coordinate).Furthermore, in the filter unit in which the separator 26 is not formed, for example, when the conductor substrate 4 is fixed to the support 2, an adhesive member for fixing the conductor substrate 4 can reach the Fabry-Perot interference filter 10. Since the Fabry-Perot interference filter 10 is sensitive to stress, if a relatively hard resin such as an adhesive member is adhered, the Fabry-Perot interference filter 10 may malfunction due to the influence of stress. However, in the filter unit 1, since the separator 26 is positioned between the conductor substrate 4 and the Fabry-Perot interference filter 10, the separator 26 can prevent the adhesive member 74 from reaching the Fabry-Perot interference filter 10. Thereby, the occurrence of a malfunction of the Fabry-Perot interference filter 10 due to the adhesion of the adhesive member 74 can be suppressed.Therefore, the filter unit 1 is suitable for arrangement in an area that is narrow in the optical axis direction of the Fabry-Perot interference filter 10.

[0080] In the filter unit 1, the side surface of the Fabry-Perot interference filter 10 is covered with the separator 26 and the pair of side surfaces 21b and 21c. As a result, the scattered light emerging from the side surface of the Fabry-Perot interference filter 10 is absorbed by the separator 26 and the pair of side surfaces 21b and 21c, and the scattered light can be prevented from propagating from the first recessed portion 21 to the second recessed portion 22. Furthermore, in the filter unit 1, the separator 26 prevents the Fabry-Perot interference filter 10 from coming into contact with the conductor substrate 4. Therefore, for example, even in a case where irregularities are generated on the surface of the conductor substrate 4 on the side of the Fabry-Perot interference filter 10, or in a case where the direction of the conductor substrate 4 is inclined, the Fabry-Perot interference filter 10 can be easily and accurately positioned.In addition, since the separating element 26 is provided in the filter unit 1, the mechanical strength of the carrier 2 is improved and, for example, deformation of the opening 23 is suppressed.

[0081] In the filter unit 1, the first recess portion 21 has a pair of facing side surfaces 21b and 21c, between which the Fabry-Perot interference filter 10 is arranged in the Y-axis direction. The second recess portion 22 has a pair of facing side surfaces 22b and 22c, between which the conductor substrate 4 is arranged in the Y-axis direction. The separator 26 is connected to at least one of the two side surfaces 22b and 22c. This increases the mechanical strength of the substrate 2 and, for example, suppresses deformation of the opening 23.

[0082] In the filter unit 1, the separating element 26 is formed continuously, extending from the side surface 22b to the side surface 22c. This further increases the mechanical strength of the support 2 and, for example, further suppresses deformation of the opening 23.

[0083] In the filter unit 1, the height of the separator 26 in the Z-axis direction is equal to or smaller than the height of the Fabry-Perot interference filter 10 in the Z-axis direction. For example, in a case where the Fabry-Perot interference filter 10 and the conductor substrate 4 are connected by the cable, the cable can be easily connected to the Fabry-Perot interference filter 10.

[0084] In the filter unit 1, the height of the separator 26 in the Z-axis direction is equal to or smaller than the height of the conductor substrate 4 in the Z-axis direction. For example, in a case where the Fabry-Perot interference filter 10 and the conductor substrate 4 are connected by a cable, the cable can be easily connected to the conductor substrate 4.

[0085] In the filter unit 1, the Fabry-Perot interference filter 10 is positioned at the center of the support 2, as viewed from the Z-axis direction. This prevents the external force from reaching the Fabry-Perot interference filter 10 even when an external force acts on the support 2 from the side in the Z-axis direction. Furthermore, the Fabry-Perot interference filter 10 can be arranged on a center line of a tube 310 by inserting the support 2 into the tube 310, such as a lens barrel 300.

[0086] In the filter unit 1, the outer edge 2E of the support 2 has a circular shape in the Z-axis direction. Therefore, even if an external force acts on the support 2 from the side with respect to the Z-axis direction, the external force can be balanced and prevented from reaching the Fabry-Perot interference filter 10. Furthermore, for example, when the tube 310 has a cylindrical shape, the Fabry-Perot interference filter 10 can be easily and accurately positioned on the center line of the tube 310.

[0087] Since the support 2 in the filter unit 1 is a circular plate-shaped member, the filter unit 1 can be prevented from falling into the pipe 310 when the filter unit 1 is inserted into the pipe 310.

[0088] In the filter unit 1, both the outer edge 10E of the Fabry-Perot interference filter 10 and the inner edge 21E of the first recessed portion 21 have a rectangular shape when viewed from the Z-axis direction. This allows the Fabry-Perot interference filter 10 to be easily and accurately positioned with respect to the substrate 2.

[0089] In the filter unit 1, the Fabry-Perot interference filter 10 is arranged on the bottom surface 21a, the conductor substrate 4 is arranged on the bottom surface 22a, and the bottom surface 21a and the bottom surface 22a are positioned on the same plane. This allows the filter unit 1 to be further thinned in the Z-axis direction, which is the optical axis direction of the Fabry-Perot interference filter 10.

[0090] In the filter unit 1, the second recessed portion 22 extends to the outer edge 2E of the substrate 2 as viewed in the Z-axis direction. This makes it possible to realize electrical connection from the side with respect to the Z-axis direction with a simple configuration.

[0091] The filter unit 1 includes a light-transmitting member 3 and an adhesive member 7 (adhesive members 74 and 75). In the filter unit 1, the light-transmitting member 3 covers the opening of the first recessed portion 21, and the adhesive member 7 is interposed between the conductor substrate 4 and the support 2, and between the conductor substrate 4 and the light-transmitting member 3. This makes it possible to form an assembly / package / package that accommodates the Fabry-Perot interference filter 10 through the support 2, the conductor substrate 4, the light-transmitting member 3, and the adhesive member 7, while suppressing an increase in thickness in the Z-axis direction, which is the optical axis direction of the Fabry-Perot interference filter 10. This makes it possible to protect the Fabry-Perot interference filter 10 from moisture, particles, and the like.

[0092] In the filter unit 1, viewed in the Z-axis direction, the "distance D1 from the inner edge 21E of the first recessed portion 21 to the outer edge 2E of the substrate 2" in the Y-axis direction is larger than the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction. This prevents the external force from reaching the Fabry-Perot interference filter 10 even when an external force acts on the substrate 2 from the side in the Z-axis direction.

[0093] In the filter unit 1, the distance from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the support 2 in the Y-axis direction is greater than the diagonal length L of the outer edge 10E of the Fabry-Perot interference filter 10, and the width W3 of the opening 23 is smaller than the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction when viewed from the Z-axis direction. Since the opening 23 is very small in the Z-axis direction compared to the support 2, the penetration of stray light into the Fabry-Perot interference filter 10 can be suppressed.

[0094] In the lens barrel 300 described above, the filter unit 1 functions as a membrane between the bundling optical system 320 and the imaging optical system 330. This can increase the depth of field in the hyperspectral camera to which the lens barrel 300 is attached.

[0095] In the filter unit 1, a relationship of "Wf ≤ W1 < Ws ≤ W2" is established for the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction, the width Ws of the conductor substrate 4 in the Y-axis direction, the width W1 of the first recess portion 21 in the Y-axis direction, and the width W2 of the second recess portion 22 in the Y-axis direction. Since the width W1 of the first recess portion 21 and the width W2 of the second recess portion 22 are different from each other, the positioning of the Fabry-Perot interference filter 10 and the conductor substrate 4 with respect to the carrier 2 can be performed easily and accurately by using a boundary portion between the first recess portion 21 and the second recess portion 22 as a reference (e.g., a mechanical positioning unit or a reference coordinate).Furthermore, the strength of the substrate 2 can be secured compared to a case where the width W1 of the first recessed portion 21 is matched to the width W2 of the second recessed portion 22. Even if the external force acts on the conductor substrate 4 from the lateral direction with respect to the Z-axis direction, the external force can be diverted from the boundary portion between the first recessed portion 21 and the second recessed portion 22 to the substrate 2, and it is possible to suppress the action of the external force on the Fabry-Perot interference filter 10.Furthermore, in the filter unit 1, portions of the substrate 2 on both sides of the first recess portion 21 in the Y-axis direction approach the conductor substrate 4, as compared with a case where the width W1 of the first recess portion 21 is matched to the width W2 of the second recess portion 22, so that heat generated in the conductor substrate 4 can be efficiently dissipated to the substrate 2.

[0096] In the filter unit 1, a relationship of "Wf = W1" is established for the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction and the width W1 of the first recessed portion 21 in the Y-axis direction. This allows the Fabry-Perot interference filter 10 to be positioned more easily and accurately with respect to the carrier 2.

[0097] In the filter unit 1, a relationship of "Ws = W2" is established for the width Ws of the conductor substrate 4 in the Y-axis direction and the width W2 of the second recess portion 22 in the Y-axis direction. This allows the conductor substrate 4 to be positioned more easily and accurately with respect to the carrier 2.

[0098] In the filter unit 1, the substrate 2 is formed with the through-hole 24, which is open to the bottom surface 21a of the first recessed portion 21 and the surface 2b of the substrate 2. Therefore, gas generated in the first recessed portion 21 in a state where the opening of the first recessed portion 21 is covered with the light-transmitting member 3 at the time of manufacturing the filter unit 1 can escape to the outside through the through-hole 24. [Modifications]

[0099] The present disclosure is not limited to the above-mentioned embodiment. For example, in a case where a relationship of “Wf ≤ W1 < Ws ≤ W2” is established for the width Wf of the Fabry-Perot interference filter 10 in the Y-axis direction, the width Ws of the conductor substrate 4 in the Y-axis direction, the width W1 of the first recess portion 21 in the Y-axis direction, and the width W2 of the second recess portion 22 in the Y-axis direction (a Fig. 5) holds, the relationship of “Wf < W1” can be used. Similarly, if the relationship of “Wf ≤ W1 < Ws ≤ W2” holds (the case shown in Fig. 5), the relationship of “Ws < W2” can be used.

[0100] In addition, as in Fig. 9, a relationship of "Ws ≤ W2 < Wf ≤ W1" can be used for the Y-axis width Wf of the Fabry-Perot interference filter 10, the Y-axis width Ws of the conductor substrate 4, the Y-axis width W1 of the first recessed portion 21, and the Y-axis width W2 of the second recessed portion 22. Also in this case, the Fabry-Perot interference filter 10 and the conductor substrate 4 can be easily and accurately positioned with respect to the substrate 2. Furthermore, the strength of the substrate 2 can be secured compared to a case where the width W2 of the second recessed portion 22 matches / corresponds to the width W1 of the first recessed portion 21. In addition, the penetration of stray light into the Fabry-Perot interference filter 10 via the second recess portion 22 in which the conductor substrate 4 is arranged can be suppressed.In addition, portions of the carrier 2 on both sides of the second recess portion 22 in the Y-axis direction come closer to the conductor substrate 4 than in a case where the width W2 of the second recess portion 22 is matched to the width W1 of the first recess portion 21, so that heat generated in the conductor substrate 4 can be efficiently dissipated to the carrier 2.

[0101] The widening section 25 can be widened at least in the Y-axis direction with respect to at least the opening of the first recess section 21. For example, as in Fig. 9, the widening portion 25 may extend from the opening of the first recessed portion 21 to the opening of the second recessed portion 22 and may be widened at least in the Y-axis direction with respect to the opening of the first recessed portion 21 and the opening of the second recessed portion 22. This applies not only to the case where the relationship of “Ws ≤ W2 < Wf ≤ W1” exists (the relationship shown in Fig. 9), but also for the case where the relationship “Wf ≤ W1 < Ws ≤ W2” exists (the case shown in Fig. 5). When the widening portion 25 extends from the opening of the first recessed portion 21 to the opening of the second recessed portion 22, it is possible to more stably support the light-transmitting element 3 on the substrate 2 while suppressing an increase in the thickness of the Fabry-Perot interference filter 10 in the Z-axis direction, which corresponds to the optical axis direction.

[0102] In addition, the filter unit 1, as shown in (a) and (b) in Fig. 10, comprise a flexible conductor substrate 9 to be connected to an external wiring. In the example of the device shown in (a) in Fig. In the lens barrel shown in Figure 10, one end portion of the flexible conductor substrate 9 is connected to the conductor substrate 4, and the connector 5 connected to the other end portion of the flexible conductor substrate 9 is arranged in the opening 311b of the tube 310. In this case, the adhesive member 77 is arranged between the side surface of the connector 5 and the inner surface of the opening 311b. In the lens barrel shown in (b) in Fig. In the example of the lens barrel shown in Figure 10, one end portion of the flexible conductor substrate 9 is connected to the conductor substrate 4, and the other end portion of the flexible conductor substrate 9 is drawn outward through the opening 311b of the tube 310. In this case, the adhesive member 77 is disposed between the flexible conductor substrate 9 and the inner surface of the opening 311b.

[0103] In addition, the filter unit 1 may comprise a Fabry-Perot interference filter as shown in Fig. 11. A Fig. The Fabry-Perot interference filter 400 shown in Figure 11 will be described. The Fabry-Perot interference filter 400 includes a substrate layer 411, a mirror portion 412, and a driving electrode 413. The substrate layer 411 has a surface 411a and a surface 411b facing each other. The substrate layer 411 is formed of a light-transmitting material. The mirror portion 412 is, for example, a metal foil, a dielectric multilayer film, or a composite film thereof. The driving electrode 413 is formed of, for example, a metal material.

[0104] The Fabry-Perot interference filter 400 further includes a substrate layer 421, a mirror portion 422, and a drive electrode 423. The substrate layer 421 has a surface 421a and a surface 421b facing each other. The substrate layer 421 is formed from a light-transmitting material. The mirror portion 422 is, for example, a metal foil, a dielectric multilayer film, or a composite film thereof. The drive electrode 423 is formed from, for example, a metallic material.

[0105] A recessed portion 414 is formed on the surface 411a of the substrate layer 411. The bottom surface 414a of the recessed portion 414 is provided with a protrusion portion 415. With the bottom surface 414a as a reference, the height of an end surface 415a of the protrusion portion 415 is less than the height of the surface 411a of the substrate layer 411. The mirror portion 412 is provided on the end surface 415a of the protrusion portion 415. The drive electrode 413 is provided on the bottom surface 414a of the recessed portion 414 so as to surround the protrusion portion 415. The drive electrode 413 is electrically connected to an electrode pad / cushion (not shown) via, for example, a wiring (not shown) provided on the substrate layer 411. The electrode pad is provided, for example, in an externally accessible region in the substrate layer 411.

[0106] The surface 421b of the substrate layer 421 is connected to the surface 411a of the substrate layer 411, for example, by plasma welding or the like. A mirror portion 422 and a drive electrode 423 are provided on the surface 421b of the substrate layer 421. The mirror portion 422 faces the mirror portion 412 across the gap S. The drive electrode 423 is provided on the surface 421b of the substrate layer 421 so as to surround the mirror portion 422 and faces the drive electrode 413 across the gap S. The drive electrode 423 is electrically connected to an electrode pad (not shown) via, for example, a wiring (not shown) provided on the substrate layer 421. The electrode pad is provided, for example, in an externally accessible region in the substrate layer 421.

[0107] On the surface 421a of the substrate layer 421, a groove 424 is formed so as to surround the mirror portion 422 and the drive electrode 423 when viewed from the Z-axis direction. The groove 424 extends in a ring shape. A portion of the substrate layer 421 surrounded by the groove 424 is movable in a direction in which the pair of mirror portions 412 and 422 face each other, and a portion where the groove 424 is formed is formed as a diaphragm-shaped support portion 425.

[0108] Note that the membrane-shaped holding portion 425 may be formed by forming a groove surrounding the mirror portion 422 and the drive electrode 423 in the Z-axis direction on the surface 421a and / or the surface 421b of the substrate layer 421. A groove surrounding the mirror portion 412 and the drive electrode 413 when viewed from the Z-axis direction may be formed in the substrate layer 411 to form a membrane-shaped holding portion in the substrate layer 411. Instead of the membrane-shaped holding portion, the holding portion may be formed by a plurality of radially arranged supports.

[0109] In the Fig. In the Fabry-Perot interference filter 400 formed in Figure 11, when a potential difference is generated between the drive electrode 413 and the drive electrode 423 by applying a voltage to the drive electrode 413 and the drive electrode 423, an electrostatic force corresponding to the potential difference is generated between the drive electrode 413 and the drive electrode 423. By generating an electrostatic force between the drive electrode 413 and the drive electrode 423, a portion of the substrate layer 421 surrounded by the groove 424 is attracted toward the substrate layer 411, and the distance between the mirror portion 412 and the mirror portion 422 is adjusted. As a result, light having a wavelength corresponding to the distance between the mirror portion 412 and the mirror portion 422 is transmitted.

[0110] In the filter unit 1, the outer edge 2E of the support 2 may have a shape other than circular, for example, a rectangular shape when viewed from the Z-axis direction. In the filter unit 1, the outer edge 10E of the Fabry-Perot interference filter 10, the outer edge 4E of the conductor substrate 4, the inner edge 21E of the first recessed portion 21, and the inner edge 22E of the second recessed portion 22 may each have a shape other than rectangular.

[0111] In the filter unit 1, the Fabry-Perot interference filter 10 may be offset from the center C of the substrate 2 when viewed from the Z-axis direction. In the filter unit 1, the mounting surface of the substrate 2 on which the Fabry-Perot interference filter 10 is arranged is not the bottom surface 21a of the first recessed portion 21. In the filter unit 1, the mounting surface of the substrate 2 on which the conductor substrate 4 is arranged may not be the bottom surface 22a of the second recessed portion 22. In the filter unit 1, the mounting surface of the substrate 2 on which the Fabry-Perot interference filter 10 is arranged and the mounting surface of the substrate 2 on which the conductor substrate 4 is arranged may not be on the same plane.

[0112] In the filter unit 1, the entire Fabry-Perot interference filter 10 may not be arranged in the first recessed portion 21. In the filter unit 1, the entire light-transmitting element 3 may not be arranged in the widened portion 25. In the filter unit 1, the entire conductor substrate 4 may not be arranged in the second recessed portion 22. In the filter unit 1, the conductor substrate 4 may be fixed to the housing 200 such that a part of the conductor substrate 4 is embedded in the surrounding portion 230. Note that "a part of the conductor substrate 4 is embedded in the surrounding portion 230" means that the part of the conductor substrate 4 overlaps the surrounding portion 230 when viewed from any of the X-axis direction, the Y-axis direction, and the Z-axis direction.

[0113] In the filter unit 1, as in (a) in Fig. 12, a part of the separating element 26 may be interrupted. In the position shown in (a) in Fig. In the modification shown in Figure 12, a middle / central portion of the separating element 26 is interrupted in the Y-axis direction. That is, the separating element 26 does not completely separate the first recessed portion 21 and the second recessed portion 22, but may partially separate the first recessed portion 21 and the second recessed portion 22. The first recessed portion 21 and the second recessed portion 22 may be connected to each other via an interrupted portion of the separating element 26. In the modification shown in (a) in Fig. In the modification shown in Figure 12, the separating element 26 has a portion connected to the side surface 22b and a portion connected to the side surface 22c. The portion of the separating element 26 connected to the side surface 22b is separated from the portion connected to the side surface 22c.

[0114] In the filter unit 1, the separating element 26 can be connected to only one of the two side surfaces 22b and 22c. For example, in the embodiment shown in (a) in Fig. 12, the separating element 26 may comprise only one of the portion connected to the side surface 22b and the portion connected to the side surface 22c.

[0115] In the filter unit 1, as in (b) in Fig. 12, the separating element 26 may be separated (formed) from the pair of side surfaces 22b and 22c. For example, the separating element 26 may be formed as shown in (b) in Fig. 12, may be a projection portion that is independent of the side surfaces 22b and 22c (not connected to the side surfaces 22b and 22c).

[0116] In the filter unit 1, the partition member 26 may be formed between the pair of side surfaces 21b and 21c of the first recessed portion 21, as viewed from the Z-axis direction. In this case, the partition member 26 may be connected to at least one of the two side surfaces 21b and 21c.

[0117] For example, the separating element 26 may be formed continuously so that it extends from the side surface 21b to the side surface 21c. If the separating element 26 is connected to at least one of the two side surfaces 21b and 21c, a part of the separating element 26 may be formed as shown in (a) in Fig. 12. In addition, the separating member 26 may be separated from the pair of side surfaces 21b and 21c, as in the modification in (b) in Fig.12. For example, the separator 26 may be a protrusion portion that is independent of the side surfaces 21b and 21c (not connected to the side surfaces 21b and 21c). The Fabry-Perot interference filter 10 and the conductor substrate 4 may also not be in contact with the separator 26, but are preferably arranged as close as possible to the separator 26. For example, the distance between the Fabry-Perot interference filter 10 and the separator 26 in the X-axis direction and the distance between the conductor substrate 4 and the separator 26 in the X-axis direction may be smaller than the width Wf of the Fabry-Perot interference filter 10. In this case, the length of each cable 8 can be shortened. The separator 26 may be formed separately from the substrate 2 and fixed to the substrate 2.

[0118] The height of the separator 26 in the Z-axis direction is not limited to that described above. For example, the height of the separator 26 in the Z-axis direction may be greater than the height of the Fabry-Perot interference filter 10 in the Z-axis direction, with the bottom surface 21a of the first recessed portion 21 serving as a reference point. The height of the separator 26 in the Z-axis direction may be greater than the height of the conductor substrate 4 in the Z-axis direction, with the bottom surface 22a of the second recessed portion 22 serving as a reference point.

[0119] In the filter unit 1, a light anti-reflection layer can be formed on at least one of the side surface 21b and the side surface 21c of the separating element 26. The light anti-reflection layer can be formed over the entire surface of the substrate 2. For example, if the substrate 2 is made of stainless steel, the light anti-reflection layer can be formed by chrome plating the surface of the substrate 2. In the filter unit 1, the Fabry-Perot interference filter 10 can be arranged at a distance from at least one of the separating elements 26, the side surface 21b, and the side surface 21c.

[0120] In the filter unit 1, as viewed in the Z-axis direction, the “distance from the inner edge 21E of the first recessed portion 21 to the outer edge 2E of the substrate 2” in a direction other than the Y-axis direction may be larger than the width of the Fabry-Perot interference filter 10 in that one direction. In the filter unit 1, the “distance from the outer edge 10E of the Fabry-Perot interference filter 10 to the outer edge 2E of the support 2” in the “direction perpendicular to one side of the outer edge 10E of the Fabry-Perot interference filter 10” and not the Y-axis direction may be greater than the length of the diagonal of the outer edge 10E of the Fabry-Perot interference filter 10, and the width of the opening 23 may be smaller than the width of the Fabry-Perot interference filter 10 in the direction perpendicular to the one side when viewed from the Z-axis direction.

[0121] In the filter unit 1, the opening 23 in the substrate 2 is formed as a light-transmitting portion, but for example, a region in the opening 23 containing a light-transmitting material, an optical element (e.g., a lens, a filter, or the like) may be arranged in the opening 23, or the light-transmitting portion in the substrate 2 may be formed as a light-transmitting portion. In either case, the light-transmitting portion may transmit light emitted from the Fabry-Perot interference filter 10 (or the Fabry-Perot interference filter 400) or transmit light incident on the Fabry-Perot interference filter 10 (or the Fabry-Perot interference filter 400). In the filter unit 1, the through-hole 24 may be open to the inner surface of the first recessed portion 21 and the outer surface of the substrate 2. In the filter unit 1, the cover 6 may also not be arranged on the surface 2b of the carrier 2.In the filter unit 1, a light anti-reflection layer may be formed on the surface 2b of the carrier 2 and / or the inner surface of the opening 23.

[0122] The filter unit 1 may not include the cover 6. If the filter unit 1 does not include the cover 6, for example, a light-shielding plate may be provided on the surface 2b of the substrate 2 so as to overlap the through-hole 24. The light-shielding plate may have a size that does not prevent light from entering the opening 23. That is, the light-shielding plate may be arranged so as not to overlap the opening 23 in the Z-axis direction. If the filter unit 1 does not include the cover 6, the adhesive member 71 may be continuously arranged so as to surround the opening 23 as viewed in the Z-axis direction. Thereby, the gap between the Fabry-Perot interference filter 10 and the bottom surface 21a of the first recessed portion 21 is sealed by the adhesive member 71.If the filter unit 1 does not include a cover 6, a glass substrate may be disposed between the Fabry-Perot interference filter 10 and the bottom surface 21a of the first recessed portion 21. This can prevent the Fabry-Perot interference filter 10 from being exposed to the outside of the filter unit 1 via the opening 23.

[0123] In the filter unit 1, a region in the opening 18 may be filled with a light-transmitting material (e.g., a light-transmitting resin or the like), or an optical element (e.g., a lens, a filter, or the like) may be disposed in the opening 18. That is, a region in the opening 18 may be formed as a light-transmitting region in the Fabry-Perot interference filter 10. In this case, too, it is possible to prevent stray light from entering the Fabry-Perot interference filter 10 because the light-transmitting region is positioned within the opening 23 when viewed in the Z-axis direction. List of reference symbols 1 filter unit 2 carriers 2b Surface (outer surface) 3 Light transmission element 4 Conductor substrate 7 Adhesive element 10, 400 Fabry-Perot interference filters 10E outer edge 14, 15, 412, 422 mirror section 21 first in-depth section 21E inner edge 21a Floor surface (first mounting surface, inner surface) 21b, 21c Side surface (first surface) 22 second in-depth section 22a Floor surface (second mounting surface) 22b, 22c Side surface (second surface) 23 Opening (light transmission section) 24 through holes 26 Separator QUOTES CONTAINED IN THE DESCRIPTION

[0000] This list of documents submitted by the applicant was generated automatically and is included solely for the convenience of the reader. This list is not part of the German patent or utility model application. The DPMA assumes no liability for any errors or omissions. Cited patent literature

[0000] US 2017 - 0 350 760 A

[0002]

Claims

[1] Filter unit comprising: a carrier with a light transmitting section; a Fabry-Perot interference filter having a pair of mirror sections facing each other in a first direction and having a variable distance from each other, the Fabry-Perot interference filter being arranged on the support so as to overlap the light transmitting section as viewed in the first direction; and a conductor substrate arranged on the carrier such that it does not overlap the Fabry-Perot interference filter when viewed in the first direction, and which is electrically connected to the Fabry-Perot interference filter, wherein a first recess portion and a second recess portion are formed in the carrier with the first direction as the depth direction, the first recessed portion and the second recessed portion are arranged in a second direction perpendicular to the first direction, the Fabry-Perot interference filter is arranged in the first recess section, the conductor substrate is arranged in the second recess portion, and the carrier comprises a separating element arranged between the first recess portion and the second recess portion. [2] Filter unit according to claim 1, wherein the first recess portion comprises a pair of first surfaces facing each other, with the Fabry-Perot interference filter disposed between them in a third direction perpendicular to both the first direction and the second direction, the second recess portion comprises a pair of second surfaces facing each other with the conductor substrate disposed therebetween in the third direction, and the separating element is connected to at least one of the pair of first surfaces or to at least one of the pair of second surfaces. [3] A filter unit according to claim 2, wherein the partition member is formed continuously so as to extend from one of the pair of first surfaces to the other or from one of the pair of second surfaces to the other. [4] Filter unit according to claim 1, wherein the first recess portion comprises a pair of first surfaces facing each other, with the Fabry-Perot interference filter disposed therebetween in a third direction perpendicular to both the first direction and the second direction, the second recess portion comprises a pair of second surfaces facing each other with the conductor substrate disposed therebetween in the third direction, and the separating element is separated from the pair of first surfaces and the pair of second surfaces. [5] The filter unit according to any one of claims 1 to 4, wherein a height of the separating element in the first direction is equal to or smaller than a height of the Fabry-Perot interference filter in the first direction. [6] The filter unit according to any one of claims 1 to 5, wherein a height of the separator in the first direction is equal to or smaller than a height of the conductor substrate in the first direction. [7] A filter unit according to any one of claims 1 to 6, wherein the Fabry-Perot interference filter is positioned at a center of the carrier as viewed in the first direction. [8] The filter unit according to claim 7, wherein an outer edge of the support has a circular shape when viewed in the first direction. [9] The filter unit according to any one of claims 1 to 6, wherein both an outer edge of the Fabry-Perot interference filter and an inner edge of the first recess portion have a rectangular shape as viewed in the first direction. [10] Filter unit according to one of claims 1 to 9, wherein the Fabry-Perot interference filter is arranged on a first mounting surface of the carrier, the conductor substrate is arranged on a second mounting surface of the carrier and the first mounting surface and the second mounting surface are in the same plane. [11] The filter unit according to any one of claims 1 to 10, wherein the second recessed portion reaches an outer edge of the carrier as viewed in the first direction. [12] Filter unit according to one of claims 1 to 11, further comprising: a light transmission element; and an adhesive element, whereby the light-passing element covers at least one opening of the first recessed section, and the adhesive element is arranged between the conductor substrate and the carrier and between the conductor substrate and the light transmission element. [13] The filter unit according to any one of claims 1 to 12, wherein a distance from an inner edge of the first recess portion to an outer edge of the support in one direction is greater than a width of the Fabry-Perot interference filter in the one direction when viewed from the first direction. [14] Filter unit according to one of claims 1 to 13, wherein the light-transmitting portion is an opening formed in the carrier, an outer edge of the Fabry-Perot interference filter has a rectangular shape when viewed in the first direction, a distance from the outer edge of the Fabry-Perot interference filter to an outer edge of the support in a direction perpendicular to a side of the outer edge of the Fabry-Perot interference filter, when viewed from the first direction, is greater than a length of a diagonal of the outer edge of the Fabry-Perot interference filter, and a width of the opening when viewed from the first direction is smaller than a width of the Fabry-Perot interference filter in the direction perpendicular to the one side. [15] The filter unit according to any one of claims 1 to 14, wherein when a width of the Fabry-Perot interference filter in a third direction perpendicular to both the first direction and the second direction is set as Wf, a width of the conductor substrate in the third direction is set as Ws, a width of the first recess portion in the third direction is set as W1, and a width of the second recess portion in the third direction is set as W2, a relationship of “Wf ≤ W1 < Ws ≤ W2” or a relationship of “Ws ≤ W2 < Wf ≤ W1” exists. [16] A filter unit according to claim 14, wherein a relationship of “Wf = W1” holds. [17] A filter unit according to claim 14 or 15, wherein a relationship of “Ws = W2” holds. [18] A filter unit according to any one of claims 1 to 17, wherein a through hole is formed in the support and is open to an inner surface of the first recessed portion and an outer surface of the support.

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