Optimization of a WDS microprobe for lithium detection

Abstract

A WDS microprobe optimized for lithium detection in a sample, comprising a Castaing microprobe coupled to a WDS spectrometer. It includes: a multilayer pseudocrystal having a spectral range including the emission wavelengths of lithium in its metallic form and in at least one of its oxide forms; a first and a second separation window disposed respectively at an interface between the WDS spectrometer and the chamber, and at an input of a proportional counter; each window being a silicon nitride film, 18 nm to 22 nm thick; each silicon nitride film being supported by a polycrystalline silicon grid, with a thickness between 7.5 µm and 8.5 µm, deposited on one face of the silicon nitride film;The silicon nitride film of the second separation window further comprises an aluminum film, with a thickness between 1 nm and 2 nm, deposited on the other side of the silicon nitride film; when the sample is bombarded by the electron beam, the WDS spectrometer is intended to be maintained at a pressure below 9.1 x 10⁻¹ Pa and the Castaing microprobe chamber is intended to be maintained at a pressure between 9.3 x 10⁻⁵ Pa and 2.5 x 10⁻⁵ Pa; a means for protecting the first separation window from overpressure or underpressure during the introduction or removal of the sample from the Castaing microprobe chamber. Figure for abstract: none.

Description

Title of the invention: Optimization of a WDS microprobe for lithium detection Technical field

[0001] The technical field of the invention is that of the elemental analysis of materials containing lithium in the context of waste recycling or the circular economy (Li-ion battery, aeronautical alloy, glasses, etc.). STATE OF THE PRIOR ART

[0002] Lithium, the 3rd element in the periodic table of Mendeleev, is used for numerous applications ranging from the energy field, such as for Li-ion batteries in electric vehicles, to the fields of ceramic materials, industrial glass and glass-ceramics.

[0003] In the context of the present invention, it is sought to carry out a quantitative, local and non-destructive analysis of lithium.

[0004] Currently, the quantitative analysis of lithium in materials is performed by destructive techniques on large sample masses (gram-scale), such as laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) or laser-induced plasma spectroscopy (LIBS). Quantitative analysis of lithium by non-destructive techniques is not possible with current standard X-ray analysis instruments.

[0005] Elemental analysis must also be local. Elemental analysis of lithium at the micrometric scale, and more precisely local elemental analysis by microstructure, is in fact fundamental, because it allows local access to quantities of major interest for the processes for producing materials containing lithium, such as, for example, the diffusion mechanisms of lithium in a material containing different microstructures (for example, a lithium battery that has undergone numerous usage cycles). Such an analysis also makes it possible to quantify the performance of materials, which is particularly useful in the field of energy storage (batteries) or the recycling and recovery of raw materials.

[0006] Local elementary analysis by microstructure is carried out using surface analysis techniques, which make it possible to characterize materials which are not necessarily organized in a structural manner, such as amorphous materials.

[0007] However, surface analysis techniques for lithium-containing materials are a real challenge for measuring lithium, because it is an ultra-light element whose elemental signature by the Li Ka line is of very low energy (close to 50 eV).

[0008] Local qualitative analysis techniques can be used such as: - electron energy loss spectroscopy (EELS) coupled with transmission electron microscopy observations; - nano SIMS “Secondary-Ion Mass Spectrometry”, a technique consisting of pulverizing the superficial atomic layers of a solid sample by bombarding it with an ion beam, then measuring the “secondary ions” emitted by a mass spectrometer; - XPS technique by Auger electron analysis; - analysis by Raman spectroscopy.

[0009] However, these techniques are qualitative or semi-quantitative analysis methods and do not allow access to a precise quantitative measurement, in particular on local microstructures which may be heterogeneous (document [1]).

[0010] X-ray microanalysis spectrometry techniques can also be used.

[0011] For example, EDS spectrometry equipped with specific detectors without separation windows can be used (document [2]). This spectrometry analysis technique makes it possible to detect the element lithium in a sample matrix. However, this technique suffers from very low spectral resolution and it will not be able to detect lithium in the case of materials containing certain elements such as Al, Fe, Co, Ni, Cu, Zn, Si, due to the spectral overlap of their emission lines with that of lithium (document [3]).

[0012] Another X-ray microanalysis technique using etched grating spectrometers (SXES) makes it possible to detect lithium with good resolution. However, the device is very expensive and no quantitative measurements have been carried out to date. Description of the invention

[0013] As previously stated, the inventors sought to obtain a local, quantitative and precise measurement (i.e. of the order of 0.5% elemental mass) of lithium.

[0014] This aim is achieved by means of a WDS microprobe optimized for lithium detection in a sample, the WDS microprobe comprising a Castaing microprobe coupled to a WDS spectrometer, the sample, included in an enclosure of the Castaing microprobe, being intended to be bombarded by an electron beam, to emit X-ray photons, which are intended to be diffracted by a monochromator crystal included in the WDS spectrometer, diffracted X-rays penetrating into a proportional counter, and a WDS spectrum being obtained, the WDS microprobe being characterized in that: - the monochromator crystal of the WDS spectrometer is a pseudo multilayer crystal having a spectral range including the emission wavelengths of lithium in its metal form and in at least one of its oxide forms; - a first separation window is arranged at an interface between the WDS spectrometer and the Castaing microprobe enclosure; - a second separation window is arranged at an input of the proportional counter, the diffracted X-rays passing through this second separation window when entering the proportional counter; - each of the first and second separation windows being a silicon nitride film, with a thickness of between 18 nm and 22 nm; - each silicon nitride film being supported by a polycrystalline silicon grid, with a thickness of between 7.5 pm and 8.5 pm, deposited on one of the two faces of the silicon nitride film; - the silicon nitride film of the second separation window further comprising an aluminum film, with a thickness of between 1 nm and 2 nm, deposited on the other of the two faces of the silicon nitride film; - when the sample is bombarded by the electron beam, the WDS spectrometer is intended to be maintained under a pressure lower than 9.1.10 1 Pa and the Castaing microprobe enclosure is intended to be maintained under a pressure between 9.3.10 5 Pa and 2.5.10 5 Pa; - a means to protect the first separation window from overpressure or underpressure when introducing or removing the sample from the Castaing microprobe enclosure.

[0015] In the context of the invention, a grid is a planar element (for example a silicon layer) provided with a plurality of holes which pass through in the direction of the thickness of the grid, preferably arranged at equal distances from each other. In the first and second separation windows, the grid serves as a mechanical support for the thin film of silicon nitride, while allowing the beam to pass through (the beam will pass through the holes in the grid).

[0016] The purpose of the aluminum layer is to cause a negative charge on the surface of the second separation window and to significantly improve charge collection. The thin film is intended to be located on the side where the X-ray beam arrives (i.e. spectrometer side).

[0017] In this disclosure, the expression “between ... and ...” must be understood as including the limits.

[0018] Advantageously, each grid is provided with a plurality of holes having a dimension between 0.323 mm and 0.343 mm, the holes preferably having a hexagonal cross section. The hexagonal shape is a preferred shape, but the holes could quite easily have a circular cross section.

[0019] The WDS microprobe optimized according to the invention allows the detection of lithium with a WDS spectrometer in different materials by local analysis on microstructures which can be homogeneous or heterogeneous at the pm scale.

[0020] According to the invention, the pseudo multilayer crystal is a stack of a set of layers which are repeated according to a stacking period d which is chosen to correspond to the reflected wavelength range to be analyzed. In our case, we seek to obtain a good reflection of the Li Ka line and to analyze the spectral range from 0.038 keV to 0.120 keV.

[0021] Preferably, the pseudo multilayer crystal is a stack of n sets of four layers, n being an integer between 20 and 30, deposited on a substrate, the four layers forming a stacking period d of 19.7 nm, the four layers being respectively a layer of pure silicon, a layer of pure boron, a layer of boron carbide, a layer of silicon carbide.

[0022] According to a variant of the invention, the means for protecting the first separation window from overpressure or underpressure is an automatic flow reduction valve, which is placed upstream of a primary pumping system of the Castaing electron microprobe. This automatic flow reduction valve can be placed between two ISO KF flanges.

[0023] The invention also relates to a method for detecting lithium in a sample using an optimized WDS microprobe as described above. The method comprises: - placing the sample in the WDS microprobe; - an application of a pressure lower than 9.1.10 1 Pa in the WDS spectrometer and a pressure between 9.3.105 Pa and 2.5.105 Pa in the Castaing microprobe enclosure; - bombardment of an area of ​​the sample with an electron beam, so that it emits X-rays; - diffraction of X-rays by the monochromator crystal; - a count of diffracted X-rays entering the proportional counter; - obtaining a WDS spectrum of the sample; - if the sample contains lithium in the bombarded area, detection of lithium by identification of one or more lithium emission lines in the WDS spectrum obtained.

[0024] It is specified that one or more lithium emission lines can be identified, because lithium can be in its metal form and / or in its oxide form.

[0025] The detection of energy shifts of the lithium emission line in the WDS spectrum provides information on the chemical state of lithium and its speciation (metal, oxide) with good resolution.

[0026] Preferably, the electron beam is obtained by applying an accelerating voltage of 5 kV and a current of 700 nA.

[0027] According to a variant of the invention, the method further comprises, for each identified lithium emission line: - a subtraction of a background noise and an adjustment by a Pseudo-Voigt function, to calculate an intensity of said identified lithium emission line; - a calculation of a form factor of said identified lithium emission line by taking as reference an intensity of the lithium emission line in metal form; - a comparison of the calculated form factor with form factors attributed respectively to an emission line of lithium in metal form and to one or more emission lines of lithium in oxide form; - a determination of the assigned form factor which is closest to the calculated form factor, from which it is deduced whether the detected lithium is in metal form or in oxide form. Brief description of the drawings

[0028] Other aspects, aims, advantages and characteristics of the invention will appear better on reading the following detailed description of preferred embodiments thereof, given by way of non-limiting example, and made with reference to the appended drawings in which:

[0029] [Fig.l] represents a simplified cross-sectional diagram of a Castaing microprobe equipped with a WDS spectrometer, the assembly also being called a “WDS microprobe”;

[0030] [Fig.2] represents an example of a multilayer structure of a low absorption material A and a high absorption material B;

[0031] [Fig.3] represents an example of a multilayer structure formed from the repetition of a stack of four layers of materials of different absorptions A, B, C, D;

[0032] [Fig.4] represents an example of a grid 23 to be placed on the first separation window;

[0033] [Fig.5] is a comparison of the WDS spectra of the Al^m line acquired with a WDS spectrometer, equipped with a multilayer crystal developed for soft X and thick separation windows (curve 1 (not the invention)) or ultra-thin (curve 2 (according to the invention));

[0034] [Fig.6] is a WDS spectrum carried out on a LiF sample using a Castaing microprobe and a WDS spectrometer optimized according to the invention allowing identification of the speciation of lithium with the emission of Li metal and Li oxide;

[0035] [Fig.7] is a comparison of WDS spectra of the Li oxide line acquired with a WDS spectrometer optimized according to the invention, for different current values ​​of the electron beam of the Castaing microprobe;

[0036] [Fig.8] shows WDS spectra with the main M and L lines of elements selected from Al, Si, Co, Ni, Cu, Zn, Fe, in the spectral range from 0.038 keV to 0.120 keV, obtained with a WDS spectrometer optimized according to the invention;

[0037] [Fig.9] is an electronic image of a quasi-crystal exhibiting in particular phases of Al5Li3Cu, Al2LiCu and pure Al;

[0038] [Fig. 10] is a WDS spectrum of the Al5Li3Cu phase of the quasicrystal of [Fig.9], obtained with a WDS spectrometer optimized according to the invention;

[0039] [Fig. 11] is a comparison of the WDS spectra of the measured phases Al5Li3Cu, Al2 LiCu and pure Al of the quasi-crystal of [Fig.9], obtained with a WDS spectrometer optimized according to the invention;

[0040] [Fig. 12] is a WDS spectrum acquired on a LiF sample using a WDS spectrometer optimized according to the invention, with an adjustment of the emission lines of Li metal and Li oxide by a Pseudo-Voigt function after subtraction of the continuous background;

[0041] [Fig. 13] is a WDS spectrum acquired on the Al5Li3Cu phase of the quasi-crystal of [Fig.9] using a WDS spectrometer optimized according to the invention, with an adjustment of the Li Ka line by a Pseudo-Voigt function after subtraction of the continuous background.

[0042] DETAILED DESCRIPTION OF PARTICULAR EMBODIMENTS

[0043] Thanks to the invention, lithium can be detected by local analysis in materials whose elementary matrix can be structurally organized or unorganized (amorphous). Detection can thus be carried out on materials having microstructures that are homogeneous or heterogeneous on the micrometer scale.

[0044] The invention allows local, quantitative and precise measurement of lithium.

[0045] The method presented according to the invention is carried out using a Castaing microprobe (or EPMA for “Electron Probe Micro Analysis” in English) and using the optimization of a wavelength dispersion spectrometer (WDS).

[0046] This optimization includes, among other things, the installation of a pseudo multi-layer crystal specifically adapted for the reflection of photons in the spectral range of very low energies (i.e. a few tens of eV (in our case 38 to 120 eV)), including the emission of photons characteristic of lithium, as well as specific weakly absorbing separation windows.

[0047] The usefulness of X-ray microanalysis lies in the possibility of carrying out a local and non-destructive analysis, which can be qualitative or quantitative. The aim of quantitative analysis is to obtain the concentration CA of each element A present in an unknown sample from the ratios between the intensity of a characteristic line emitted by element A in the sample to be analyzed and the intensity emitted by the same element in a witness whose stoichiometry is known a priori. This relative intensity ratio noted k-ratio or first Castaing approximation is then corrected for matrix effects by conventional models such as the ZAF method or the 0(pz) method which is generally better suited to the analysis of light elements. Principle of analysis by WDS spectrometry

[0048] The WDS microprobe is a Castaing microprobe, which is coupled to a WDS spectrometer; the WDS microprobe uses the technique of wavelength dispersion spectrometry (WDS) of X-rays from a sample under electron bombardment, in order to identify the concentration of elements present in the sample.

[0049] When an electron beam bombards a sample, a variety of interactions occur in the material between the electrons and the atoms of the sample which lead, among other things, to the emission of X-rays. The X-rays (or X-photons) thus emitted are said to be of the characteristic type when their emission is caused by ionization of the target atom, followed by its de-excitation.

[0050] The de-excitation of the atom is governed by probabilistic laws of atomic relaxation. As the characteristic photons resulting from electronic transitions have a specific energy, it is therefore possible to assign them to an element of the Mendeleev table. The identification of each element present in the sample is therefore carried out by measuring the energy (EDS) or the wavelength (WDS) of the characteristic photons which are collected by the detector, to display a spectrum of intensity of the photon flux as a function of the energy or the wavelength (WDS).

[0051] The energy E and the wavelength / . are subsequently used interchangeably with E=hc / Â, where h= 6.62x1034 Js (Planck constant).

[0052] The measured X-ray spectrum also contains a background signal consisting mainly of Bremsstrahlung radiation, which comes from the braking of the incident electrons by the mean field of the nuclei of the target atom and which depends on the average atomic number of the sample. Bremsstrahlung radiation can also provide additional information on the elemental composition of the sample.

[0053] In a known manner and as illustrated in [Fig.l], a WDS microprobe 1 comprises a Castaing microprobe 2 and a WDS spectrometer 3.

[0054] The Castaing microprobe 2 comprises an electron gun 4, an electron column 5 which serves to focus the beam 6 coming from the gun, a beam scanning device 7, as well as an optical microscope 8 to view the sample 9; an enclosure 10 (also called an analysis chamber or object movement chamber) extended by an introduction airlock 11 allowing the sample to be introduced into the enclosure.

[0055] The WDS 3 spectrometer comprises a monochromator crystal 12, a proportional counter 13 and a single-channel counting chain (not shown).

[0056] The electrons from a filament are accelerated in the electron gun; the electron beam is then aligned and focused in the electron column which is under vacuum; the beam 6 bombards the sample 9 which then emits X-rays; the radiation arriving on the monochromator crystal 12 is diffracted and discriminated; the proportional counter 13 and the counting chain are responsible for counting the X-rays.

[0057] The monochromator crystal chosen must have a high spectral resolving power to be able to separate close lines, good reflectivity, a high signal / background ratio to detect very low intensity peaks, as well as good mechanical and chemical stability.

[0058] For heavy elements, X-rays are selectively diffracted by a monochromator crystal with a known inter-reticular distance d. However, there is no natural crystal with a sufficiently large inter-reticular distance to be able to analyze the soft X-ray domain (emitted by light elements), which is why synthetic crystals (or pseudo-crystals), called multi-layer, have been created by stacking layers of a heavy diffracting material and a light material according to a periodicity d (or stacking period).

[0059] [Fig.2] shows the diagram of such a multilayer crystal 16 deposited on a substrate 17 and having a multilayer structure with alternating layers, formed from the periodic stacking of n sets 18 (n being an integer greater than or equal to 2), each set consisting of a layer 19 of material A having a low absorption coefficient, and a layer 20 of material B having a high absorption coefficient, the two layers being of respective thicknesses dA and dB and the set having a thickness d.

[0060] The monochromator crystal is curved (not shown) in such a way that the radiation, which is emitted divergently by the sample, arrives at the same angle on the crystal. It is placed, with the proportional counter 13 and the sample 9, on a focusing circle 14, called the Rowland circle. The selection of the analyzed line is then done by rotation of the monochromator crystal or by translation of the monochromator crystal and the proportional counter to keep the assembly on the Rowland circle permanently.

[0061] In the tests carried out to illustrate the invention, the radius of the Rowland circle used is 160 mm with the use of a WDS spectrometer from the supplier CAMECA.

[0062] Elements provided for the optimization of the WDS microprobe for the detection of lithium Monochromator crystal

[0063] The monochromator crystal used in the context of the present invention is a curved multilayer synthetic crystal, also called a pseudo crystal, specifically adapted for the reflection of photons in the spectral range of very low energies, including the emission of photons characteristic of lithium.

[0064] According to an exemplary embodiment of the invention illustrated in [Fig. 3], the multilayer pseudo crystal 16 is constituted by a set 18 of four layers 19, 20, 21, 22 of heavy materials and light materials arranged alternately on a substrate 17 (for example a flat substrate of a silicon monocrystal; preferably, the substrate chosen must be very slightly rough and the crystalline parameters must be adapted to those of the deposited materials so as not to create stresses and defects), forming a stacking period d of 197 angstroms, each set being stacked n times, n being an integer between 20 and 30. The four layers are respectively: a layer of pure silicon, a layer of pure boron, a layer of boron carbide, a layer of silicon carbide.

[0065] The thickness of each layer of the assembly affects the reflectivity properties which are previously simulated and determined by complex calculations.

[0066] For the reflection of the characteristic photons emitted by lithium, the pseudo multilayer crystal should theoretically have a stacking period of 25 nm. In practice, a compromise must be found between this theoretical value for the reflection of the signal coming from Li and the other elements of interest in the energy range. As mentioned above, the stacking period must roughly correspond to the range of reflected wavelengths that we wish to analyze.

[0067] By choosing a pseudo multilayer crystal having a period of 19.7 nm, this makes it possible to reflect wavelengths from 10.3 nm (120 eV) up to 32.6 nm (38 eV). These values ​​are a compromise between constraints given by the stacking distance of the multilayer and by the Bragg angles which are allowed by the device of the WDS p-probe optimized according to the invention.

[0068] By using two layers of weakly absorbing materials Si and B positioned on two layers of more absorbing materials B4C and SiC, the spectral analysis domain obtained with this crystal makes it possible to measure a range from 0.038 keV to 0.120 keV. Pressure

[0069] The WDS spectrometer is maintained under primary vacuum (i.e. a pressure lower than 9.1.10 1 Pa) and a low pressure is applied thereto (for example 1 bar); the vacuum level in the spectrometer is lower than that of the enclosure 10 of the microprobe which receives the sample, where a secondary vacuum prevails (i.e. a pressure between 9.3.105 Pa and 2.5.10 5 Pa (for example 4.5.105 Pa). Separation windows

[0070] In a known manner and depending on the pressure established in the WDS spectrometer, separation windows 15 can be arranged in the WDS spectrometer, one window being arranged at the interface between the spectrometer 3 and the enclosure 10 (receiving the sample to be measured) of the microprobe, and another window being arranged at the inlet of the proportional counter 15 (gas flow detector) which counts the characteristic photons.

[0071] These separation windows of the prior art are made of different types of materials, such as for example mylar™, or polypropylene membrane, and they have a thickness of the order of a hundred nanometers (typically 200 nm).

[0072] In the context of the present invention, each of the separation windows 15 is a silicon nitride film with a thickness of approximately 20 nm (plus or minus 2 nm).

[0073] The separation window arranged at the interface between the spectrometer 3 and the enclosure 10 is made of a thin film of silicon nitride (preferably Si3N4) and in order to reinforce the mechanical resistance of the thin film to the pressure prevailing in the WDS spectrometer and in the enclosure, the thin film is deposited on a polycrystalline silicon grid. The grid is positioned facing the enclosure 10.

[0074] The separation window arranged at the input of the proportional counter is a thin film of silicon nitride (preferably SiN), which is covered with a layer of aluminum, with a thickness of between 1 and 2 nm. The purpose of the aluminum layer is to cause a negative charge on the surface of the silicon nitride layer and to considerably improve the charge collection. The aluminum layer is arranged on one of the two opposite faces of the silicon nitride film and on the other of the two faces of the film is arranged a polycrystalline silicon grid. The grid is positioned facing the proportional counter 15.

[0075] The grids used in the two windows are made of polycrystalline silicon, have a thickness of between 7.5 pm and 8.5 pm; it may be a film with a thickness of 8 pm (plus or minus 0.5 pm) provided with through holes with a diameter of between 0.323 mm and 0.343 mm, arranged equidistant from each other. Preferably, the cross section of these holes has a hexagonal shape. As illustrated in [Fig.4], the holes may be arranged close to each other so that the grid will be constituted by the branches 23 of hexagons arranged adjacent to each other, the same branch being common to two hexagons.

[0076] These separation windows according to the invention are less absorbent in the very low energy range and allow the detection of more photons; they therefore allow the detection of a higher intensity. Automatic flow reduction valve

[0077] In order to protect the separation windows from pressure variations that may occur during the entry and exit of samples into the enclosure 10, an automatic flow reduction valve 24 has been placed upstream of the primary pumping system 25 between two ISO KF flanges, so that the valve flaps, when open, are oriented towards the vacuum pipe against the gas flow; the valve will allow the pressure to be automatically reduced in the event of a pressure change. This may, for example, be a throttle valve, for example the VAT series 31 model from the manufacturer VAT. How the WDS spectrometer works

[0078] A portion of the diffracted photons whose wavelength satisfies the Bragg relationship are detected by the proportional counter, which is a gas flow detector. In a known manner, this type of detector consists of an enclosure crossed by a gas flow (mixture of rare gases and a polyatomic gas); the enclosure has at its center an anode with a high polarization voltage (approximately 1500 V to 2500 V) and has an entry window, through which the X photons will penetrate into the enclosure. In the context of the present invention, the gas used is an argon / methane mixture.

[0079] The X-ray photon enters the detector enclosure through the entrance window and is absorbed by an atom of the gas which ionizes and releases a photoelectron. This electron is then accelerated by the strong electric field prevailing in the detector and will, in turn, create secondary ionizations which release other electrons by a succession of inelastic shocks with other atoms of the gas. The total electric charge caused by this avalanche phenomenon in the detector accumulates on the anode and causes a variation in the polarization voltage. The charge is then eliminated by a resistor according to the classical laws of exponential discharge of a capacitor. An X-ray photon thus creates an electric pulse.

[0080] The detector is a counter that operates in a proportional regime, that is to say that the increase in the bias voltage implies an increase in the number of secondary electrons created. The output signal of the detector is therefore proportional to the energy of the incident photon.

[0081] At the output of the detector, there is a single-channel counting chain, which includes a preamplifier, an amplifier and a single-channel analyzer.

[0082] The preamplifier transforms the charge variation into a current variation. The signal has the appearance of a Gaussian of a few mV amplitude. The amplifier will amplify this signal so that it reaches a few volts.

[0083] As the monochromator crystal (multilayer), oriented in Bragg incidence for Xo radiation, can diffract multiple orders of wavelength 2*X0 or 3*X0, the single-channel analyzer (PHA) is responsible for separating significant pulses from those coming from the background or multiple orders. Significant pulses, which originate from the characteristic X-ray lines, are the most probable and are found in the center of the Gaussian. Pulses from multiple orders of lines or background noise are less probable and are mainly present on the edges of the Gaussian.

[0084] By choosing high and low threshold values ​​on the pulse created by the X-ray radiation, signals whose height is outside the energy band delimited by the two thresholds are eliminated.

[0085] Several detection modes can be used to detect and amplify the intensity and configure the PHA (full adjustment, automatic adjustment, adjustment in manual mode around the energy band of the detected intensity).

[0086] When the entire single-channel counting chain is occupied, no further information can be processed and a dead time occurs. For a high counting rate, the loss of information can be significant. The dead time of the electronics is constant (a few hundred nanoseconds), but it is extensible for the detector (counter).

[0087] In order to be able to provide a correction for high counting rates, it is necessary to ensure that the dead time is constant and of a known value. It is therefore useful to deliberately introduce a higher constant electronic dead time (a few microseconds).

[0088] In the context of the present invention, we have used an aperture mode of the integral PHA in order to allow the detection of a wide photon energy range.

[0089] The adjustment values ​​of the detector and the single-channel counting chain are as follows: - detector power supply: 1480 V; - amplification gain: 3000; - time-out: 3 ps; - PHA baseline: 826 mV; - bandwidth of measured energy pulses: 4174 mV.

[0090] At the end of an analysis, the single-channel counting chain delivers a spectrum consisting of the continuous background and characteristic lines.

[0091] The natural form of a line that comes from the transition between two core levels of an atom is the convolution of the electronic densities of states (DOS) of these levels. The two DOS have a Lorentzian form according to the following equation (1): j [ u \ — H

[0092] with H the amplitude of the line, Eo its central energy (also called characteristic energy) and y the full width at half maximum (FWHM).

[0093] The resulting shape of an atomic line is therefore Lorentzian and its characteristic energy increases with the binding energy of the ejected electrons and therefore with the atomic number of the target.

[0094] Equation (1) is nevertheless not correct for Ka emissions from light elements, because the transitions involve valence electrons. The shape of the emission band of a light element, such as lithium, is a convolution of a Lorentzian and the DOS of the valence band, which has a typical width of a few eV and is very sensitive to the chemical state of the material.

[0095] The response function of the spectrometer has a Gaussian form according to the following equation (2): F (E) - H exp - ln2 x

[0096] with T the FWHM.

[0097] The final shape of the detected line is a convolution of these distributions, even if the broadening of the spectrometer is predominant for the WDS microprobe optimized according to the invention.

[0098] In this case, it is appropriate to describe the shape of the detected line by a Voigt function.

[0099] An easier approximation that is valid for fitting the shape of an emission line measured by a WDS microprobe with a multilayer monochromator crystal is the so-called Pseudo-Voigt linear expression (equation (3)): P(E) -H ( l-£)e.xp -ln2x

[0100] with a weighting factor k between the Gaussian contribution and the Lorentzian contribution (k=l for a pure Lorentzian form and k=0 for a pure Gaussian form).

[0101] Furthermore, the shape of the characteristic lines can be modified by the superposition of satellite peaks (resulting from multiple ionization phenomena) or by the superposition of other emission lines on the analyzed line (transition lines of other elements in the target and their multiple order emission lines).

[0102] Given the good spectral resolution of a WDS, this phenomenon is all the more visible.

[0103] Finally, the integral intensity I of the X photons collected by the spectrometer and perceived by the detector makes it possible to determine the concentration CA of the element A in the sample according to the following equation (4): 4(^)= " -U

[0104] - I^E) being the intensity of the detected X-ray radiation corresponding to the characteristic line characteristic i to the energy E, of element A and expressed in counts / s; - CA being the mass concentration of element A within the sample; - NA being Avogadro's number; -Ma being the atomic mass of element A; - ne_ being the number of incident electrons per unit of time; - being equal to adE), which corresponds to the cross section of f \ / lliTM production of the ij line; it is the sum of all the probabilities which lead to an electronic gap on the i sub-shell followed by a de-excitation by a radiative transition between the j and i sub-shells, depending on the energy; - being the depth distribution of X-rays emitted, weighted by the attenuation coefficient; -fr elfe being respectively the contributions of the other characteristic lines and the continuous background to the fluorescence; - IL being the probability that the X-ray radiation reaches the detector, the emission being assumed to be isotropic (this term being called geometric efficiency of the detector and representing the fraction of solid angle covered by the detector); - ^Eph) being the probability that the X-rays, of energy Eph, arriving at the detector are actually detected (this term being called intrinsic efficiency and varying according to the energy of the photon measured).

[0105] The numerous parameters of equation (4) make its resolution very difficult. In order to simplify its resolution, a calculation consists of comparing the intensity of a line of an element of the sample (1^ with respect to a line of a pure control or of known composition with a relative intensity (Z'™). This method is called the "k-ratio", or "apparent concentration" (equation (5)):

[0106] - ÿ(pz) being the depth ionization density of the X-rays; - PZ- being the volume depth; - f rc being the secondary emission by the continuous background; - f being the secondary emission by the characteristic lines.

[0107] With this equation (5), the concentrations of the elements in the sample are obtained through matrix correction calculations.

[0108] The first step is to extract the characteristic intensity in the acquired spectrum. For this, the contribution of the continuous background is removed under the characteristic intensity peaks.

[0109] The “k-ratio” method allows the apparent concentration of the sample to be calculated using a pure standard (this is a control or reference sample which has a known composition; it can be a material containing only one chemical element) measured under the same analysis conditions.

[0110] The second step consists of calculating the composition of the sample by correcting for matrix effects. A distinction is made between the 0(pz) model, which is based on the description of the p distribution of X-rays at depth z in the sample, and the ZAF model, which takes into account the production of primary ionization due to atomic numbers [Z], the absorption of radiation in the target [A] and the effects of secondary fluorescence emission [F].

[0111] The factors Z, A and F can be calculated from semi-empirical formulas depending on the composition of the control, the acceleration voltage, as well as the apparent composition of the sample. Each of these factors must be calculated for a sample of defined composition and therefore for each element. The corrected mass concentration is then calculated by successive iteration until the equation converges. Optimization of lithium detection

[0112] The optimization of a WDS microprobe according to the invention has notably made it possible to significantly improve the measurement of the intensity of the photons in the spectral range of lithium, in particular the spectral range from 0.038 keV to 0.120 keV with the use of the multilayer pseudo-crystal illustrated in [Fig.3] (set of four repeated layers (pure silicon layer / pure boron layer / boron carbide layer / silicon carbide layer)).

[0113] The optimization of a WDS microprobe according to the invention was implemented on the SXFive-TACTIS microprobe from the company CAMECA (which is a Castaing microprobe equipped with five WDS spectrometers and a hot cathode field emission electron gun (FEG)) to carry out validation measurements on different samples, but can be implemented on any other Castaing microprobe equipped with a WDS spectrometer capable of receiving a pseudo multilayer crystal.

[0114] A comparison of the WDS spectra acquired on a pure aluminum sample, which presents the Al L11>m line in the spectral domain of the pseudo multilayer crystal used, was carried out before and after the installation of the new thin windows.

[0115] With reference to [Fig.5], the comparison of the two WDS spectra obtained (curve 1: spectrum obtained with thick windows and curve 2: spectrum obtained with ultra-thin windows (20 nm)) makes it possible to show an improvement of a factor of 30 of the intensity measured in counts / nA.

[0116] Thick windows are made of different types of mylar™ or polypropylene membrane materials and have a thickness of the order of hundreds of nanometers, typically 200 nm.).

[0117] This comparison also makes it possible to observe that, for there to be a clear improvement, it is not enough to use a suitable pseudo crystal, but that it is indeed the combination of the suitable pseudo crystal, the ultra-thin windows, the application of the primary and secondary pressures, as well as the installation of the flow control valve (to protect the ultra-thin windows from sudden pressure variations), which makes it possible to obtain this improvement. Settings made

[0118] Before any adjustment for better detection of photons characteristic of lithium, the alignment of the electron beam was optimized.

[0119] Then, an electron beam acceleration voltage of 5 kV and a current of 700 nA were applied.

[0120] This voltage was determined using theoretical calculations carried out by Monte Carlo simulations with the Casino™ software at different high voltages for samples containing Li.

[0121] Similar work has been carried out (document [2]) for samples Li2, LiH, Li3N, Li2O, Li2S, LiF, LiCl. It is observed that the maximum intensity of the simulated Li Ka line for these different materials as a function of the acceleration voltage appears for an acceleration voltage lower than 5 kV for most materials including LiF.

[0122] During the LiF experiment, the maximum intensity was reached with a setting of 5 kV. This difference can probably be explained by surface effects that are not taken into account during perfect simulations.

[0123] These first results allowed a better adjustment to provoke more radiative transitions which contribute to the detected intensity.

[0124] The current intensity was maximized at 700 nA, in order to improve the detection efficiency of Li and to be able to study the spectral shape of its emission.

[0125] The electron beam was focused and adjusted with an impact surface of 1 pm on the surface of a non-metallized LiF sample and made conductive by a silver paint deposition around the observation area.

[0126] The WDS spectra acquired on the LiF material with a current intensity of 700 nA made it possible to detect two peaks ([Fig.6]): a peak at the position of 54 eV, characteristic energy for the photons emitted from a Li metal sample, and a peak at the position of 48 eV, characteristic energy for the photons emitted from a Li oxide sample.

[0127] The WDS spectrum acquired on LiF allows us to note a decrease in the continuous background to the right of the Li metal peak, which is due to the absorption threshold which is at 54 eV. The observation of this phenomenon allows us to identify with certainty the Li metal line.

[0128] The formation of Li oxide can be explained by the impact of the electron beam on LiF. A molecular separation mechanism of the crystallographic structure of LiF could lead to a reaction of the oxygen atoms present in the secondary vacuum of the WDS microprobe with Li leading to the formation of Li2O.

[0129] This formation of Li2O increases with the irradiation time of the electron beam and could be observed for different currents of the primary irradiation electron beam ([Fig.7]), curves 1, 2, 3 being respectively the spectra obtained for LiF with a current of 700 nA (curve 1), 575 nA (curve 2) and 207 nA (curve 3).

[0130] The optimization of the WDS microprobe according to the invention for soft X-rays allows the measurement of the intensity of photons in the spectral range from 0.038 keV to 0.120 keV.

[0131] It therefore allows the measurement of numerous low energy emission lines, such as for the elements Fe, Co, Ni, Al, Cu, Zn, Si, which are listed in table 1 below.

[0132] [Tables 1] element Fe Co Ni Al Cu Zn Si Emission line Mmu Mmu Mm, Mu Lu,ui M1U, Mu Mmjv.V' Mujv.V Lu,m Position (keV) 0.0512 0.0577 0.0649 0.0670 0.0725 0.0725 0.0743 0.0789, 0.0810 0.0922 Curve number 7 3 4 1 5 6 2

[0133] The position of these lines could be measured from pure samples. The results are presented in [Fig.8] (the number of the curves is indicated in Table 1) and make it possible to show an increase in the level of the continuous background with the energy of the emission line.

[0134] WDS spectra measurements were also carried out on a multiphase quasi-crystalline material. The different phases of this material are illustrated by the electron micrograph in [Fig.9]: the light gray phase (denoted 1) has a composition Al5Li3Cu, the white phase (denoted 2) has a composition Al2LiCu and the dark gray phase (denoted 3) is composed of pure Al.

[0135] The WDS microprobe optimized according to the invention makes it possible to clearly separate the Li Ka and Al L11>lu lines from the Al5Li3Cu composition phase ([Fig. 10]).

[0136] Considering the numerous materials of interest composed of Al and Li alloys, this result is very encouraging and presents an advantage compared to the detection of Li with an EDS spectrometer without separation windows (document [2]).

[0137] From the measurements obtained with the WDS spectra of the Al L11>lu line and the Li Ka line, it is possible to determine the resolution of the detection system (also called resolving power) improved according to the invention.

[0138] For metals, the location where the second derivative is equal to zero on the right side of the emission line corresponds to the Fermi level. For the measured Al L11>1U line, this position is equal to 73.4 eV, while the tabulated emission value is 72.5 eV in Table 1; the spectrometer therefore has a resolution of 0.9 eV at this energy.

[0139] For Li metal, which has a tabulated emission at 54.25 eV, the inflection point (second derivative equal to zero) for our measurement is at 53.9 eV; the resolution of the spectrometer is therefore 0.35 eV at this energy.

[0140] The WDS microprobe optimized according to the invention thus makes it possible to obtain a spectrometer measurement resolution of 0.35 eV for Li.

[0141] Comparison of the WDS spectra on the three different phases of the multiphase quasi-crystalline material ([Fig. 11]) shows that their differentiation is possible by studying the shape of the detected line. As a reminder, in [Fig. 11], curve 1 is the spectrum of the light gray phase of composition Al5Li3Cu; curve 2 is the spectrum of the white phase of composition Al2LiCu; curve 3 is the spectrum of the dark gray phase in pure Al. The shape of the detected line results from the interference of different signals and always contains information on the sample matrix. The WDS microprobe optimized according to the invention therefore allows elementary analyses to be carried out.

[0142] Calculation of the form factor specific to the chemical form of lithium

[0143] The high resolution of the peaks measured with the WDS microprobe optimized according to the invention allows the calculation of the APF form factor (for “Area / peak factor” in English) for a measured line.

[0144] The introduction of an area / peak shape factor is a useful concept that is sensitive to the chemical associations of the element and the sample matrix (document [4]). This factor can be understood as follows: there is a fixed proportion between the k-ratio calculated with the integral (area) intensity of the peak and the standard k-ratio, calculated with the maximum intensity.

[0145] The APF can be calculated for a given model sample intensity and a given spectrometer, and can be used in other measurement series as a weighting parameter for the maximum intensity versus the integral intensity of a standard. At this point, it is important to mention that there is no reason why two chemical states of an element should lead to the same emission band shape (and they can therefore be differentiated).

[0146] The advantage of calculating the APF factor is that further measurements under similar conditions can simply be made on the maximum of the line. Be careful, the APF factor should not be confused with the FWHM, which is often insensitive to alterations in the shape of the lines.

[0147] It is therefore possible to go back to the chemical signature of lithium by calculating the APF factors. [Fig. 12] shows the spectrum acquired on LiF (curve 1) with an adjustment of the emission lines by a Pseudo-Voigt function after subtraction of the background noise (curve 2, for Li oxide; curve 3, for Li metal).

[0148] Similarly, [Fig. 13] shows the processed WDS spectrum of the Al5Li3Cu phase (curve 1) of the Al5Li3Cu-Al2LiCu quasicrystal and the fitting of the Li oxide emission line by a Pseudo-Voigt function after subtraction of the background noise (curve 2).

[0149] The emission line adjustments allowed their central position and FWHM to be calculated. The Pseudo-Voigt adjustments were subsequently normalized to compare the line area. Table 2 lists the results of the spectrum processing.

[0150] It is specified that the calculation of the APF factor is done in relation to the area of ​​the peak intensity emitted by the Li metal.

[0151] [Tables2] Emission Li metal Li oxide (LiF) Li oxide (quasi-crystal) Center (eV) 52.8 47.7 48.1 FWHM (eV) 2.3 4.0 5.1 Area (eV) 2.5 4.3 6.0 APF 1 1.72 2.4

[0152] The APF factors allow the chemical signature of Li in the sample to be taken into account. Indeed, the resolution of the spectrometer remains unchanged for the two energy positions of the Li metal and Li oxide emission lines; the much greater broadening of the Li oxide peak therefore implies that the Li oxide emission band must be wider (wider DOS).

[0153] Thus, the WDS microprobe optimized according to the invention therefore makes it possible, thanks to its good resolution, to acquire spectra which give information on the natural width of the emission and this information is not drowned in noise or in the Gaussian broadening of the WDS spectrometer.

[0154] In conclusion, the WDS microprobe optimized according to the invention was used on different types of samples such as LiF, Al2LiCu and Al5Li3Cu. Measurements of pure elements exhibiting emission lines close to the Li line (Fe, Co, Ni, Al, Cu, Zn, Si) were also carried out. These different measurements made it possible to demonstrate the interest of the invention compared to the techniques of the prior art.

[0155] One of the advantages of an X-ray microanalysis using the WDS microprobe optimized according to the invention compared to an SXES technique (which could be a competing technique of X-ray microanalysis) is its lower cost, its ease of implementation and its good efficiency. It makes it possible to obtain high-quality information for the characterization of materials and to access qualitative and then quantitative analysis using correction calculations (ZAF and 0(pz) method). Another advantage of the invention is that it is possible to optimize any type of Castaing microprobe equipped with a Rowland circle spectrometer capable of receiving a pseudo multilayer crystal. References cited

[0156] [1] M. Golozar et al., “In Situ and In Operando Techniques to Study Li-Ion and Solid-State Batteries: Micro to Atomic Level”, Inorganics, 9(11), 2021, page 85

[0157] [2] P. Hovington et al., “Can we detect Li K X-ray in lithium compounds using energy dispersive spectroscopy?”, Scanning, 38, 2016, pages 571-578

[0158] [3] J. A. Ôsterreicher et al., “Spatial lithium quantification by backscattered électron microscopy coupled with energy-dispersive X-ray spectroscopy”, Scripta Materialia, 194, 2021, 113664

[0159] [4] G. F. Bastin et al., “Quantitative Electron Probe Microanalysis of Carbon in Binary Carbides; I-Principles and Procedures”, X-Ray Spectrometry, 15, 1986, pages 135-141

Claims

1. Claims WDS microprobe optimized for lithium detection in a sample, the WDS microprobe comprising a Castaing microprobe coupled to a WDS spectrometer, the sample, included in an enclosure of the Castaing microprobe, being intended to be bombarded by an electron beam, to emit X-ray photons, which are intended to be diffracted by a monochromator crystal included in the WDS spectrometer, diffracted X-rays penetrating a proportional counter, and a WDS spectrum being obtained, the WDS microprobe being characterized in that: - the monochromator crystal of the WDS spectrometer is a pseudo multilayer crystal having a spectral range including the emission wavelengths of lithium in its metal form and in at least one of its oxide forms, the pseudo multilayer crystal being a stack of n sets of four layers, n being an integer between 20 and 30, deposited on a substrate, the four layers (19, 20, 21, 22) forming a stacking period d of 19.7 nm, the four layers being respectively a layer of pure silicon, a layer of pure boron, a layer of boron carbide, a layer of silicon carbide; - a first separation window is arranged at an interface between the WDS spectrometer and the enclosure of the Castaing microprobe; - a second separation window is arranged at an input of the proportional counter, the diffracted X-rays passing through this second separation window when entering the proportional counter; - each of the first and second separation windows being a silicon nitride film, with a thickness of between 18 nm and 22 nm; - each silicon nitride film being supported by a polycrystalline silicon grid, with a thickness of between 7.5 pm and 8.5 pm, deposited on one of the two faces of the silicon nitride film; - the silicon nitride film of the second separation window further comprising an aluminum film, with a thickness of between 1 nm and 2 nm, deposited on the other of the two faces of the silicon nitride film; - when the sample is bombarded by the electron beam, the WDS spectrometer is intended to be maintained under a pressure lower than 9.1.10 1 Pa and the Castaing microprobe enclosure is intended to be maintained under a pressure between 9.3-105 Pa and 2.5.105 Pa; - a means for protecting the first separation window from overpressure or underpressure when introducing or removing the sample from the Castaing microprobe enclosure.

2. An optimized WDS microprobe according to claim 1, wherein each grid is provided with a plurality of holes having a dimension between 0.323 mm and 0.343 mm, the holes preferably having a hexagonal cross-section.

3. 3. An optimized WDS microprobe according to claim 1 or claim 2, wherein the means for protecting the first separation window from overpressure or underpressure is an automatic flow reduction valve, which is placed upstream of a primary pumping system of the Castaing electron microprobe.

4. A method for detecting lithium in a sample using a WDS microprobe according to any one of claims 1 to 3, comprising: - placing the sample in the WDS microprobe; - applying a pressure of less than 9.1.10 1 Pa in the WDS spectrometer and a pressure of between 9.3.105 Pa and 2.5.105 Pa in the enclosure of the Castaing microprobe; - bombarding an area of ​​the sample with an electron beam, so that it emits X-rays; - diffraction of the X-rays by the monochromator crystal; - counting the diffracted X-rays entering the proportional counter; - obtaining a WDS spectrum of the sample; - if the sample contains lithium in the bombarded area, detection of lithium by identification of one or more lithium emission lines in the WDS spectrum obtained.

5. The detection method according to claim 4, wherein the electron beam is obtained by applying an accelerating voltage of 5 kV and a current of 700 nA.

6. A detection method according to claim 4 or claim 5, further comprising, for each identified lithium emission line: - a subtraction of a background noise and an adjustment by a Pseudo-Voigt function, to calculate an intensity of said identified lithium emission line; - a calculation of a form factor of said lithium emission line identified by taking as reference an intensity of the emission line of lithium in metallic form; - a comparison of the calculated form factor with form factors attributed respectively to an emission line of lithium in metal form and to one or more emission lines of lithium in oxide form; - a determination of the assigned form factor which is closest to the calculated form factor, from which it is deduced whether the detected lithium is in metal form or in oxide form.

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