RF immunosensor probe for monitoring temperature of electrostatic chuck in substrate processing system

Abstract

To provide a sensor probe that is not affected by RF signals (RF bias signals, electrode signals, etc.) present in a temperature sensing environment.SOLUTION: In a substrate support 300, a sensor probe 190 includes an elongate body 330 that defines a cylindrical cavity 332 having an inner diameter. A printed circuit board 354 (such as a flexible PCB) fits into the cylindrical cavity. The sensor probe includes a first temperature sensing integrated circuit that is attached to a first end of the printed circuit board 354, and a cap is attached to a first end 334 of the elongate body 330. A threaded housing 336 at one end of the elongate body 330 receives a second end of the printed circuit board 354 and is attached to a base plate 310 of the substrate support.SELECTED DRAWING: Figure 3

Description

[Technical field]

[0001] [CROSS REFERENCE TO RELATED APPLICATIONS] This disclosure is a PCT International Application of U.S. Patent Application No. 62 / 854,476, filed May 30, 2019. The entire disclosure of the above application is incorporated herein by reference.

[0002] The present disclosure relates generally to substrate processing systems, and more particularly to a sensor probe for monitoring the temperature of an electrostatic chuck in a substrate processing system. [Background technology]

[0003] The discussion of the background art provided herein is intended to present the contents of the present disclosure generally, and the inventions of the presently listed inventors are not admitted expressly or impliedly as prior art to the present disclosure, to the extent that they are described in this Background section, or in aspects of the description that are not prior art at the time of filing.

[0004] Substrate processing systems perform processes on substrates, such as semiconductor wafers. Examples of substrate processing include deposition, ashing, etching, cleaning, and / or other processes. For substrate processing, a process gas mixture may be provided to a processing chamber. A plasma may be used to ignite the gases to promote a chemical reaction.

[0005] The substrate is placed on a substrate support in a processing chamber during processing. Temperature changes of the substrate support can affect the processing. For example, deposition or etching rates may be affected by different temperatures at different locations of the substrate. As a result, deposition or etching will be different at different locations. Some substrate supports include embedded temperature sensors to sense temperatures in multiple zones. In some examples, each zone of the multiple zones includes one or more redundant temperature sensors that are used as a backup in case the temperature sensor of that zone fails. When all temperature sensors in one of the multiple zones fail, replacement of the substrate support is necessary, which can be costly. Summary of the Invention

[0006] The sensor probe includes an elongate body defining an internal cavity having an inner diameter. A printed circuit board is configured to fit within the internal cavity. A first temperature sensing integrated circuit is mounted to a first end of the printed circuit board. A cap is mounted to a first end of the elongate body adjacent to the first temperature sensing integrated circuit. A housing is configured to receive a second end of the elongate body. The housing is configured to be mounted to a base plate of a substrate support.

[0007] In other features, the printed circuit board has a width less than the inner diameter and a length greater than the elongate body, the inner diameter being less than 3 mm and at least two of the three orthogonal dimensions of the first temperature sensing integrated circuit being less than 3 mm.

[0008] In other features, a potting material connects the cap and the first temperature sensing integrated circuit. The printed circuit board is flexible and bent at an angle adjacent to the first temperature sensing integrated circuit. The cap includes a first leg and a second leg extending from one side thereof and received in an internal cavity of the extension. The extension is mutually received in the housing. The extension includes a protrusion and further includes a spring positioned about the extension to bias between the internal cavity of the housing and the protrusion.

[0009] In other features, the first temperature sensing integrated circuit senses a temperature of a surface in contact with the cap, the surface being a layer within the electrostatic chuck.

[0010] In other features, the extension includes a radial projection that centers the extension in the cavity of the base plate. The extension includes a slot. The slot has an elongated oval shape and is aligned axially of the extension.

[0011] In other features, a shielding layer is disposed on at least one side of the printed circuit board. The housing defines an inclined surface. An O-ring is disposed between the housing and the cavity in the base plate against the inclined surface.

[0012] In other features, the printed circuit board is flexible. A connector is connected to a second end of the printed circuit board. The plurality of wires are connected by the connector to traces on the printed circuit board. A second temperature sensing integrated circuit is mounted on the printed circuit board between the first temperature sensing integrated circuit and the second end of the printed circuit board.

[0013] The sensor probe includes an elongate body defining an internal cavity having an inner diameter. A first printed circuit board is configured to fit within the internal cavity. A temperature sensing integrated circuit is mounted on the first printed circuit board. A housing is configured to receive one end of the elongate body and is configured to be mounted to a base plate of a board support. A second printed circuit board is disposed within the housing. A plurality of first conductors connect the first printed circuit board to the second printed circuit board. A plurality of second conductors are configured to connect the second printed circuit board to an external device.

[0014] In other features, the first printed circuit board has a width less than the inner diameter and a length less than the length of the extension body. The second printed circuit board has a length less than the length of the housing. The inner diameter is 3 mm or less and at least two of the three orthogonal dimensions of the temperature sensing integrated circuit are less than 3 mm.

[0015] In other features, the potting material is located within the elongated body. The first printed circuit board and the temperature sensing integrated circuit are mounted parallel to the length of the elongated body. The temperature sensing integrated circuit senses the temperature of a surface in contact with it. The surface is a layer within the electrostatic chuck. The elongated body includes a radial protrusion that centers the elongated body in the cavity of the base plate.

[0016] In other features, the elongated body includes a slot. The slot has an elongated oval shape and is aligned axially of the elongated body. The capacitor is connected to the first printed circuit board. The resistor is connected to the second printed circuit board. The shielding layer is disposed on a surface of the first printed circuit board.

[0017] The sensor probe includes an elongate body defining an internal cavity having an inner diameter. The temperature sensing integrated circuit is configured to fit within the internal cavity. The housing is configured to receive one end of the elongate body and is configured to be attached to a base plate of the substrate support. A plurality of conductors extend through the housing and the elongate body and are configured to connect the temperature sensing integrated circuit to an external device.

[0018] In other features, the inner diameter is 3 mm or less and at least two of the three orthogonal dimensions of the temperature sensing integrated circuit are less than 3 mm. The potting material is located within the elongated body. The temperature sensing integrated circuit is mounted parallel to the length of the elongated body. The temperature sensing integrated circuit is mounted perpendicular to the length of the elongated body.

[0019] In another feature, the temperature sensing integrated circuit senses a temperature of a surface in contact therewith, the surface being a layer within the electrostatic chuck. The elongate body includes a radial projection that centers the elongate body within a cavity in the base plate.

[0020] In other features, the elongated body includes a slot. The slot has an elongated oval shape and is aligned axially along the elongated body. A plurality of solder balls are attached to the temperature sensing integrated circuit. A plurality of first conductors are attached to the plurality of solder balls.

[0021] Further areas of applicability of the present disclosure will become apparent from the detailed description, the claims, and the drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the disclosure. [Brief description of the drawings]

[0022] The present disclosure will become better understood from the detailed description and the accompanying drawings.

[0023] [Figure 1] 1 is a functional block diagram of an exemplary capacitively coupled plasma (CCP) substrate processing system including a sensor probe according to the present disclosure.

[0024] [Diagram 2] 1 is a functional block diagram of an exemplary inductively coupled plasma (ICP) substrate processing system including a sensor probe according to the present disclosure.

[0025] [Diagram 3] 1 is a cross-sectional side view of an exemplary substrate support with a sensor probe according to the present disclosure.

[0026] [Figure 4A] 1 is a side view of an exemplary sensor probe according to the present disclosure.

[0027] [Figure 4B] 1 is a side cross-sectional view of an exemplary sensor probe according to the present disclosure.

[0028] [Diagram 5] 1 is a top view of an exemplary printed circuit board according to the present disclosure.

[0029] [Figure 6] 2 is an enlarged partial side view of an exemplary sensor probe body according to the present disclosure.

[0030] [Figure 7] 1 is an electrical circuit functional block diagram of an exemplary control circuit including a temperature sensing integrated circuit, a resistor, and a capacitor according to the present disclosure.

[0031] [Figure 8] 1 is a side view illustrating an example mounting of a temperature sensing integrated circuit on a printed circuit board according to the present disclosure.

[0032] [Figure 9A] 1 is a side view illustrating an example of mounting a temperature sensing integrated circuit and a printed circuit board to a metal cap according to the present disclosure. [Figure 9B] 1 is a side view illustrating an example of mounting a temperature sensing integrated circuit and a printed circuit board to a metal cap according to the present disclosure.

[0033] [Figure 10A] FIG. 13 is a side view illustrating an example of potting a temperature sensing integrated circuit into a cap according to the present disclosure. [Figure 10B] FIG. 13 is a side view illustrating an example of potting a temperature sensing integrated circuit into a cap according to the present disclosure.

[0034] [Figure 11A] 1 is a side view illustrating an example of the insertion of a printed circuit board, a temperature sensing integrated circuit, and a cap into a sensor probe body according to the present disclosure. [Figure 11B] 1 is a side view illustrating an example of the insertion of a printed circuit board, a temperature sensing integrated circuit, and a cap into a sensor probe body according to the present disclosure.

[0035] [Figure 12] FIG. 2 is a side view of another exemplary sensor probe according to the present disclosure.

[0036] [Figure 13] 13 is a cross-sectional side view of another exemplary sensor probe according to the present disclosure.

[0037] [Figure 14] 1 is a cross-sectional side view of a PCB with metal layers for EMI shielding according to the present disclosure.

[0038] [Figure 15] 13 is a cross-sectional side view of another exemplary sensor probe according to the present disclosure.

[0039] In the drawings, reference numbers may be repeated to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0040] The present disclosure relates to a sensor probe for sensing a surface temperature of a substrate in a processing chamber. The sensor probe comprises a temperature sensing integrated circuit. In some examples, the temperature sensing integrated circuit is located inside a body that is metallic and connected to a reference potential (such as ground). For example, the body may be grounded to a base plate. As a result, the body of the sensor probe acts as a Faraday cage, and the sensor probe is not affected by RF signals (such as RF bias signals, electrode signals, etc.) present in the temperature sensing environment. Alternatively, the body may be made of a metallic or non-metallic material, and a ground plane or electromagnetic shield may be used to reduce or further reduce electromagnetic interference (EMI).

[0041] In some examples, the temperature sensing integrated circuit has a small form factor of less than 3 mm in at least two of three orthogonal dimensions. In some examples, the temperature sensing integrated circuit has a small form factor of less than 2 mm in all three orthogonal dimensions. In some examples, the body of the sensor probe has an outer diameter of 4 mm or less and an inner diameter of 3 mm or less.

[0042] 1 and 2, an exemplary plasma processing chamber in which the sensor probe may be used is shown. As can be appreciated, the sensor probe may be used in a variety of other types of semiconductor processing equipment, such as cooling pedestals, spin chucks, processing chambers, etc. FIG. 1 shows an exemplary substrate processing system 110 according to the present disclosure. The substrate processing system 110 includes a processing chamber 122 that encloses other components of the substrate processing system 110 and contains an RF plasma (if used). The substrate processing system 110 includes an upper electrode 124 and a substrate support 126 (such as an electrostatic chuck (ESC)). During operation, a substrate 128 is disposed on the substrate support 126.

[0043] By way of example only, the upper electrode 124 may include a gas distributor 129, such as a showerhead, for introducing and distributing process gases. The gas distributor 129 may include a stem portion having one end coupled to the top surface of the processing chamber. A base portion is generally cylindrical and extends radially outward from the other end of the stem portion away from the top surface of the processing chamber. The substrate-facing surface or faceplate of the showerhead base portion includes a plurality of holes through which precursors, reactants, etching gases, inert gases, carrier gases, other process gases, or purge gases flow. Alternatively, the upper electrode 124 may include a conductive plate, and the process gases may be introduced in another manner.

[0044] The substrate support 126 includes a base plate 130 that functions as a lower electrode. The base plate 130 supports a heating plate 132, which may correspond to a ceramic multi-zone heating plate. A thermal resistance layer 134 may be disposed between the heating plate 132 and the base plate 130. The base plate 130 may include one or more channels 136 for flowing a coolant therethrough.

[0045] The RF generating system 140 generates and outputs an RF voltage to one of the upper electrode 124 and the lower electrode (e.g., the base plate 130 of the substrate support 126). The other of the upper electrode 124 and the base plate 130 may be DC grounded, AC grounded, or floating. By way of example only, the RF generating system 140 may include an RF generator 142 that generates RF plasma power that is supplied to the upper electrode 124 or the base plate 130 by a matched distribution network 144. In other examples, the plasma may be generated inductively or indirectly.

[0046] Gas supply system 150 includes one or more gas sources 152-1, 152-2, ..., and 152-N (collectively, gas sources 152), where N is an integer greater than zero. Gas sources 152 are connected to manifold 160 by valves 154-1, 154-2, ..., and 154-N (collectively, valves 154) and MFCs 156-1, 156-2, ..., and 156-N (collectively, MFCs 156). Secondary valves may be used between MFCs 156 and manifold 160. Although a single gas supply system 150 is shown, more than one gas supply system may be used.

[0047] The temperature controller 163 may be connected to a plurality of thermal control elements (TCEs) 164 disposed on the heating plate 132. The temperature controller 163 may be used to control the plurality of TCEs 164 to control the temperature of the substrate support 126 and the substrate 128. The temperature controller 163 may be in communication with a coolant assembly 166 to control the flow of coolant through the flow passage 136. For example, the coolant assembly 166 may include a coolant pump, a reservoir, and / or one or more temperature sensors. The temperature controller 163 operates the coolant assembly 166 to selectively flow coolant through the flow passage 136 to cool the substrate support 126.

[0048] A valve 170 and a pump 172 may be used to evacuate reactants from the processing chamber 122. A system controller 180 may be used to control the components of the substrate processing system 110. One or more sensor probes 190 may be inserted into cavities defined in the substrate support to sense a surface temperature.

[0049] Another exemplary substrate processing system 210 is shown in FIG. 2. The substrate processing system 210 includes a coil driver circuit 211. A pulse circuit 214 may be used to pulse the RF power on and off or to vary the amplitude or level of the RF power. A tuning circuit 213 may be directly connected to one or more inductive coils 216. The tuning circuit 213 tunes the output of the RF source 212 to a desired frequency and / or a desired phase, matches the impedance of the coils 216, and isolates the power between the coils 216. In some examples, the coil driver circuit 211 is replaced by one of the driver circuits described further below, along with control of the RF bias.

[0050] In some examples, a plenum 220 may be disposed between the coil 216 and the dielectric window 224 to control the temperature of the dielectric window 224 by hot and / or cold air flow. The dielectric window 224 is disposed along one side of the processing chamber 228. The processing chamber 228 further includes a substrate support (or pedestal) 232. The substrate support 232 may include an electrostatic chuck (ESC), or a mechanical chuck, or other types of chucks. Process gases are supplied to the processing chamber 228, and a plasma 240 is generated inside the processing chamber 228. The plasma 240 etches the exposed surface of the substrate 234. A driver circuit 252 (e.g., one of the driver circuits described below) may be used to provide an RF bias to an electrode of the substrate support 232 during operation.

[0051] A gas supply system 256 may be used to supply a process gas mixture to the process chamber 228. The gas supply system 256 may include a process gas / inert gas source 257, a gas metering system 258 such as valves and mass flow controllers, and a manifold 259. A gas supply system 260 may be used to supply gas 262 to the plenum 220 through a valve 261. The gas may include a cooling gas (cooling air) used to cool the coil 216 and the dielectric window 224. A heater / cooler 264 may be used to heat / cool the substrate support 232 to a predetermined temperature. An exhaust system 265 includes a valve 266 and a pump 267 to remove reactants from the process chamber 228 by purging or exhausting.

[0052] A controller 254 may be used to control the etching process. The controller 254 monitors system parameters and controls the supply of gas mixtures, ignition, maintenance, and extinguishing of plasma, removal of reactants, supply of cooling gases, etc. The controller 254 may also control various aspects of the coil driver circuit 211 and the driver circuit 252, as described in more detail below. One or more sensor probes 190 may be inserted into a cavity in the substrate support to sense the temperature of the substrate.

[0053] 3, 4A, and 4B, a substrate support 300, such as an electrostatic chuck (ESC), includes a base plate 310 disposed adjacent to a heater layer 314. Although the base plate of the substrate support is shown, the sensor probe may also be used to sense the surface temperature of other components of the substrate processing equipment. The heater layer 314 includes a heater 316. A ceramic layer 318 including an electrode 320 is disposed adjacent to the heater layer 314. The sensor probe 190 is inserted into a cylindrical cavity 332.

[0054] In some examples, the sensor probe 190 includes an extension 330 having a first end 334. The first end 334 of the sensor probe 190 has a diameter greater than a diameter of the extension 330. The extension 330 is received in a threaded housing 336 located at one end thereof.

[0055] The threaded housing 336 includes a first portion 338, a second portion 340, and a third portion 344. In some examples, the first portion 338, the second portion 340, and the third portion 344 are cylindrical with connected internal cavities. The second portion 340 has a diameter larger than the diameter of the first portion 338. The second portion 340 includes threads 346 that are received in a threaded hole 348 in a base plate 310 of the substrate support 300. The third portion 344 projects radially outward from the base plate 310 to allow the sensor probe 190 to rotate relative to the base plate 310 to allow insertion and removal.

[0056] A printed circuit board (PCB) 354 (such as a flexible PCB) extends through the extension 330 and from the third portion 344 of the threaded housing 336. The PCB 354 is connected by a connector 356 (such as a PCB) to one or more wires 360 that provide power, ground, and one or more signal lines between the PCB 354 and an integrated circuit located within the sensor probe 190.

[0057] 4A, the extension 330 of the sensor probe 190 includes a beveled surface 361 that provides a transition from the diameter of the extension 330 to the larger diameter at the first end 334. A spacer 362 protrudes radially from the extension 330 to evenly space the extension 330 within the cylindrical cavity 332. A beveled surface 372 provides a transition from the first portion 338 to the second portion 340 of the threaded housing 336. In some examples, an O-ring 376 is positioned against the beveled surface 372 and functions as an RF gasket.

[0058] 4B, the extension 330 includes a radially protruding surface 408 located along a first end 334. The sensor probe 190 includes a spring 410 located about the first end 334 adjacent an inner surface of a cavity formed in the threaded housing 336. The spring 410 biases one end of the extension 330 against a surface to determine the surface temperature.

[0059] A first integrated circuit 420 is mounted on the PCB 354. The first integrated circuit 420 senses a first temperature of the surface to be monitored. In some examples, a second integrated circuit 422 is mounted on the PCB 354. The second integrated circuit 422 is used to sense a temperature remote from the surface to be monitored for monitoring diagnostics and / or sanity checks of the first integrated circuit 420 and to increase the reliability of the temperature measured by the first integrated circuit 420.

[0060] 5 shows a PCB 354 with a first portion 508 that extends a distance greater than the extension 330 of the sensor probe 190. A first integrated circuit 420 is attached to one end of the first portion 508. If a second integrated circuit 422 is used, it is attached at a location remote from the first integrated circuit 420. A second end 510 of the PCB 354 includes terminals 526 connected to traces 522 (partially shown). The PCB 354 includes two or more layers including conductive traces, vias, ground planes, etc. to provide connections from the terminals 526 to the first integrated circuit 420 and / or the second integrated circuit 422.

[0061] 6, the extension 330 may include one or more slots 610 to facilitate heat transfer. In some examples, the slots 610 have an elongated oval shape and are aligned axially of the extension 330.

[0062] 7, a circuit 700 is shown having the first integrated circuit 420, resistors R1 and R2, and a capacitor C1. + is the V +A first reference potential, such as ground, is connected to the GND input and the second input of the first integrated circuit 420. The signal lines S1 and S2 are connected to the SDA and SGL lines of the first integrated circuit 420. Resistors R1 and R2 are connected to the voltage supply line V + and signal line S1 and signal line S2.

[0063] 8, there is shown the attachment of the first integrated circuit 420 to the PCB 354. Solder bumps 810 couple the pads of the first integrated circuit 420 to corresponding pads of the PCB 354.

[0064] 9A and 9B, the attachment of the first integrated circuit 420 and PCB 354 to a cap 820 is shown. In some examples, the cap 820 is made of metal and includes legs 822 and 824 extending from one side thereof. In FIG. 9A, the cap 820 is positioned or attached with the legs 822 and 824 extending perpendicular to the mounting surface of the PCB 354. In FIG. 9B, the cap 820 is positioned or attached with the legs 822 and 824 extending parallel to the mounting surface of the PCB 354.

[0065] 10A and 10B, there is shown the potting of the first integrated circuit 420 into the cap 820. A potting material 1010 is injected to attach the cap 820 to the integrated circuit.

[0066] 11A and 11B, PCB 354, first integrated circuit 420, and cap 820 are inserted into cavity 1100 of elongate body 330. In FIG. 11B, PCB 354 is bent at a right angle so that legs 822 and 824 of cap 820 are inserted into one end of elongate body 330.

[0067] 12 and 13, another exemplary sensor probe 1200 is shown. In FIG. 12, the sensor probe 1200 includes an extension body 1210 coupled to a threaded housing 1214. In some examples, the threaded housing 1214 includes a threaded surface 1216.

[0068] In FIG. 13, a first integrated circuit 1320 is attached to a first PCB 1326 by solder balls 1330. A capacitor 1334 is attached to the first PCB 1326. A second PCB 1350 is disposed in the threaded housing 1214 and includes an attached resistor 1360. One or more wires 1362 provide external connections. One or more wires or hard PCB traces 1366 provide connections between the first PCB 1326 and the second PCB 1350. A potting material 1370 is located inside the elongate body 1210. The first integrated circuit 1320 senses the temperature of a surface 1380.

[0069] 14, if additional shielding is needed, a shielding layer 1410 may be used to cover the top and / or bottom surfaces of the PCB 1400 to provide enhanced shielding. In some examples, the shielding layer 1410 includes a metal layer. In some examples, the shielding layer 1410 is connected to a reference potential, such as ground. In other examples, the shielding layer 1410 includes multiple conductors. In some examples, the multiple conductors are equally spaced apart to form a grid in one or more lateral directions. The multiple conductors are connected to a reference potential, such as ground.

[0070] 15, the sensor probes may be implemented without a printed circuit board. Although two sensor probes are shown to illustrate the variation in the location of the temperature sensing integrated circuit, one or more sensor probes may be used in a given application. The first sensor probe 1510-1 and the second sensor probe 1510-2 include an integrated circuit 1520-1 and an integrated circuit 1520-2 located within the elongated body 1210-1 and the elongated body 1210-2, respectively, adjacent to the surface-facing ends of the elongated body 1210-1 and the elongated body 1210-2, respectively. A plurality of solder balls 1530-1 and a plurality of solder balls 1530-2 provide connections to the integrated circuit 1520-1 and the integrated circuit 1520-2, respectively. The plurality of traces 1562-1 and the plurality of traces 1562-2 are soldered to selected ones of the plurality of solder balls 1530-1 and the plurality of solder balls 1530-2 to provide one or more external connections to the integrated circuits 1520-1 and 1520-2 through the threaded housings 1214-1 and 1214-2 and the elongated bodies 1210-1 and 1210-2, respectively. In some examples, the plurality of traces 1562-1 and the plurality of traces 1562-2 include insulated conductors.

[0071] Potting material 1570-1 and potting material 1570-2 are located within elongate body 1210-1 and elongate body 1210-2, respectively. Integrated circuit 1520-1 and integrated circuit 1520-2 sense the temperature of surface 1580. Integrated circuit 1520-1 and integrated circuit 1520-2 can be positioned parallel to elongate body 1210-1 and elongate body 1210-2, perpendicular to elongate body 1210-1 and elongate body 1210-2, or at an angle in between.

[0072] In some examples, the number of solder balls S is equal to the number of wires W (where S and W are integers greater than 1). In other examples, S>W or W>S.

[0073] The foregoing is merely illustrative in nature and is not intended to limit the disclosure, its application, or uses in any way. The broad teachings of the disclosure may be embodied in various forms. Thus, while the disclosure includes certain examples, other variations will become apparent upon review of the drawings, the specification, and the following claims, and the true scope of the disclosure should not be so limited. It should be understood that one or more steps in a method may be performed in a different order (or simultaneously) without altering the principles of the disclosure. Furthermore, although each embodiment is described above as having certain features, any one or more of those features described with respect to an embodiment of the disclosure may be implemented in other embodiments and / or may be implemented in combination with features of other embodiments (even if the combination is not specified). In other words, the described embodiments are not mutually exclusive, and permutations of one or more embodiments with each other remain within the scope of the disclosure.

[0074] Spatial and functional relationships between elements (e.g., between modules, circuit elements, semiconductor layers, etc.) are described using various terms including "connected," "engaged," "coupled," "adjacent," "adjacent," "on," "above," "below," and "disposed." When a relationship between a first element and a second element is described in the above disclosure, unless specified as "direct," the relationship may be a direct relationship in which there are no other intervening elements between the first element and the second element, but it may also be an indirect relationship in which there are one or more intervening elements (spatial or functional) between the first element and the second element. As used herein, the phrase at least one of A, B, and C should be interpreted as meaning a logic (A or B or C) using a non-exclusive logical OR, and should not be interpreted as meaning "at least one of A, at least one of B, and at least one of C."

[0075] In some embodiments, the controller is part of a system that may be part of the examples described above. Such systems may include semiconductor processing equipment with processing tools, chambers, processing platforms, and / or specific processing components (wafer pedestals, gas flow systems, etc.). These systems may be integrated with electronics for controlling pre-, during, and post-processing operations of semiconductor wafers or substrates. These electronics may be referred to as "controllers" and may control various components or sub-components of the system. The controller may be programmed to control any process disclosed herein, including supply of process gases, temperature settings (e.g., heating and / or cooling), pressure settings, vacuum settings, power settings, radio frequency (RF) generator settings, RF matching circuit settings, frequency settings, flow settings, fluid supply settings, position operation settings, wafer loading and unloading from the tool and other transport tools and / or load locks connected or coupled to the specific system, depending on the processing requirements and / or type of system.

[0076] In general, a controller may be defined as an electronic device having various integrated circuits, logic, memory, and / or software that receive instructions, issue instructions, control operations, enable cleaning operations, enable endpoint measurements, etc. Integrated circuits may include chips in firmware format that store program instructions, digital signal processors (DSPs), chips defined as application specific integrated circuits (ASICs), and / or one or more microprocessors or microcontrollers that execute the program instructions (e.g., software). Program instructions may be instructions communicated to the controller in the form of various personalizations (or program files) that define operational parameters for performing a particular process on or for a semiconductor wafer or for a system. In some embodiments, the operational parameters may be part of a recipe defined by a process engineer to accomplish one or more layers, materials, metals, oxides, silicon, silicon dioxide, surfaces, circuits, and / or one or more processing steps during the manufacture of a wafer die.

[0077] In some embodiments, the controller may be part of or coupled to a computer that is integrated or coupled with the system, or otherwise networked or combined with the system. For example, the controller may be in the "cloud" that allows remote access of wafer processing, or may be all or part of a fab host computer system. The computer may allow remote access to the system to monitor the progress of a manufacturing operation, review the history of past manufacturing operations, review trends or performance metrics from multiple manufacturing operations, modify parameters of a current process, set processing steps following a current process, or start a new process. In some examples, a remote computer (e.g., a server) may provide a process recipe to the system over a network that may include a local network or the Internet. The remote computer may include a user interface that allows entry or programming of parameters and / or settings that are then communicated from the remote computer to the system. In some examples, the controller receives instructions in the form of data that specify parameters for each processing step to be performed during one or more operations. It should be understood that the parameters may be specific to the type of process being performed and the type of tool that the controller is configured to connect to or control. Thus, as discussed above, the controller may be distributed, for example, by including one or more separate controllers networked together and cooperating toward a common purpose, such as the process or control described herein. An example of a controller distributed for such purposes would be one or more integrated circuits on the chamber that are located remotely (e.g., at the platform level or as part of a remote computer) and communicate with one or more integrated circuits that cooperate to control a process in the chamber.

[0078] Without being limited thereto, example systems may include plasma etch chambers or modules, deposition chambers or modules, spin rinse chambers or modules, metal plating chambers or modules, cleaning chambers or modules, bevel edge etch chambers or modules, physical vapor deposition (PVD) chambers or modules, chemical vapor deposition (CVD) chambers or modules, atomic layer deposition (ALD) chambers or modules, atomic layer etch (ALE) chambers or modules, ion implantation chambers or modules, track chambers or modules, and other semiconductor processing systems that may be related to or used in the fabrication and / or manufacturing of semiconductor wafers.

[0079] As described above, depending on the processing steps being performed by the tool, the controller may be in communication with one or more of other tool circuits or modules, other tool components, cluster tools, other tool interfaces, adjacent tools, nearby tools, tools located throughout the factory, a main computer, other controllers, or tools used to transport materials to and from tool locations and / or load ports in a semiconductor manufacturing factory.

Claims

1. A sensor probe comprising: an elongate body defining an interior cavity having an inner diameter; a printed circuit board configured to fit within the internal cavity; a first temperature sensing integrated circuit mounted to a first end of the printed circuit board; a cap attached to a first end of the elongate body adjacent to the first temperature sensing integrated circuit; a housing configured to receive a second end of the extension body, the housing configured to be attached to a base plate of a substrate support; The sensor probe comprises:

2. 2. The sensor probe according to claim 1, The printed circuit board has a width less than the inner diameter and a length greater than the extension body.

3. 2. The sensor probe according to claim 1, A sensor probe, wherein the inner diameter is equal to or less than 3 mm and at least two of three orthogonal dimensions of the first temperature sensing integrated circuit are less than 3 mm.

4. The sensor probe according to claim 1 , further comprising: The sensor probe further comprises a potting material connecting the cap and the first temperature sensing integrated circuit.

5. 2. The sensor probe according to claim 1, The printed circuit board is flexible and bends at an angle adjacent to the first temperature sensing integrated circuit.

6. 2. The sensor probe according to claim 1, The cap includes a first leg and a second leg extending from one side of the cap and received in the internal cavity of the extension body.

7. 2. The sensor probe according to claim 1, The extension body is reciprocally received in the housing, the sensor probe.

8. 2. The sensor probe according to claim 1, The sensor probe, wherein the extension comprises a protrusion, and further comprises a spring positioned about the extension and biased between an interior cavity of the housing and the protrusion.

9. 2. The sensor probe according to claim 1, The first temperature sensing integrated circuit senses the temperature of a surface in contact with the cap, a sensor probe.

10. 10. The sensor probe of claim 9, The surface is a layer within an electrostatic chuck.

11. 2. The sensor probe according to claim 1, The extension includes a radial protrusion for centering the extension within the cavity of the base plate.

12. 2. The sensor probe according to claim 1, The sensor probe, wherein the extension body includes a slot.

13. 13. The sensor probe of claim 12, The slot has an elongated oval shape and is aligned axially of the elongated body.

14. The sensor probe according to claim 1 , further comprising: The sensor probe includes a shielding layer disposed on at least one surface of the printed circuit board.

15. 2. The sensor probe according to claim 1, The sensor probe, wherein the housing defines an angled surface, and further comprising an O-ring disposed between the housing and the cavity in the base plate against the angled surface.

16. 2. The sensor probe according to claim 1, The printed circuit board is flexible.

17. 17. The sensor probe of claim 16, further comprising: a connector connected to a second end of the printed circuit board; a plurality of wires connected by the connector to traces on the printed circuit board; The sensor probe comprises:

18. The sensor probe according to claim 1 , further comprising: the sensor probe comprising a second temperature sensing integrated circuit mounted on the printed circuit board between the first temperature sensing integrated circuit and a second end of the printed circuit board.

19. A sensor probe comprising: an elongate body defining an interior cavity having an inner diameter; a first printed circuit board configured to fit within the internal cavity; a temperature sensing integrated circuit mounted on the first printed circuit board; a housing configured to receive one end of the extension body and configured to be attached to a base plate of a substrate support; a second printed circuit board disposed within the housing; a plurality of first conductors connecting the first printed circuit board to the second printed circuit board; a plurality of second conductors configured to connect the second printed circuit board to an external device; The sensor probe comprises:

20. 20. The sensor probe of claim 19, The first printed circuit board has a width less than the inner diameter and a length less than a length of the extension body.

21. 20. The sensor probe of claim 19, The second printed circuit board has a length that is less than a length of the housing.

22. 20. The sensor probe of claim 19, A sensor probe, wherein the inner diameter is 3 mm or less and at least two of three orthogonal dimensions of the temperature sensing integrated circuit are less than 3 mm.

23. 20. The sensor probe of claim 19, further comprising: The sensor probe comprises a potting material located within the elongate body.

24. 20. The sensor probe of claim 19, The sensor probe, wherein the first printed circuit board and the temperature sensing integrated circuit are mounted parallel to the length of the extension body.

25. 20. The sensor probe of claim 19, The temperature sensing integrated circuit senses the temperature of a surface in contact with the sensor probe.

26. 26. The sensor probe of claim 25, The surface is a layer within an electrostatic chuck.

27. 20. The sensor probe of claim 19, The extension includes a radial protrusion for centering the extension within the cavity of the base plate.

28. 20. The sensor probe of claim 19, The sensor probe, wherein the extension body includes a slot.

29. 29. The sensor probe of claim 28, The slot has an elongated oval shape and is aligned axially of the elongated body.

30. 20. The sensor probe of claim 19, further comprising: A sensor probe comprising a capacitor coupled to the first printed circuit board.

31. 20. The sensor probe of claim 19, further comprising: A sensor probe comprising a resistor connected to the second printed circuit board.

32. 20. The sensor probe of claim 19, further comprising: The sensor probe includes a shielding layer disposed on a surface of the first printed circuit board.

33. A sensor probe comprising: an elongate body defining an interior cavity having an inner diameter; a temperature sensing integrated circuit configured to fit within the internal cavity; a housing configured to receive one end of the extension body and configured to be attached to a base plate of a substrate support; a plurality of conductors passing through the housing and the elongate body and configured to connect the temperature sensing integrated circuit to an external device; The sensor probe comprises:

34. 34. The sensor probe of claim 33, A sensor probe, wherein the inner diameter is 3 mm or less and at least two of three orthogonal dimensions of the temperature sensing integrated circuit are less than 3 mm.

35. 34. The sensor probe of claim 33, further comprising: The sensor probe comprises a potting material located within the elongate body.

36. 34. The sensor probe of claim 33, The temperature sensing integrated circuit is mounted parallel to the length of the extension body.

37. 34. The sensor probe of claim 33, The temperature sensing integrated circuit is mounted perpendicular to the length of the extension body.

38. 34. The sensor probe of claim 33, The temperature sensing integrated circuit senses the temperature of a surface in contact with the sensor probe.

39. 39. The sensor probe of claim 38, The surface is a layer within an electrostatic chuck.

40. 34. The sensor probe of claim 33, The extension includes a radial protrusion for centering the extension within the cavity of the base plate.

41. 34. The sensor probe of claim 33, The sensor probe, wherein the extension body includes a slot.

42. 42. The sensor probe of claim 41, The slot has an elongated oval shape and is aligned axially of the elongated body.

43. 34. The sensor probe of claim 33, further comprising: A sensor probe comprising a plurality of solder balls attached to the temperature sensing integrated circuit, the plurality of first conductors being attached to the plurality of solder balls.

Images