Sensor device and method for plasma diagnostics
TW202644847APending Publication Date: 2026-11-01APPLIED MATERIALS INC
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Patent Information
- Application Number
- TW115128706
- Authority / Receiving Office
- TW · TW
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2021-08-05
- Filing Date
- 2022-07-29
- Publication Date
- 2026-11-01
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Abstract
Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.
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