68 results about "Plasma diagnostics" patented technology

The invention discloses an adaptive energy calibration method for a Timepix3 detector, and belongs to the field of plasma diagnosis, and the method comprises the steps: collecting a photon event through a detector, the photon event comprising arrival time, coordinates and energy information; sorting the photon events according to the arrival time of the photon events to obtain a sequence; mapping the sequence to an empty matrix in a time window sliding mode, searching and recording the area of a pixel cluster and the sum of count values, and compensating the count values according to a set threshold value; classifying according to the area of the pixel cluster, summing the counting values of the pixels in the pixel cluster to obtain the volume of the pixel cluster, and drawing a statistical histogram of the volume of the pixel cluster to form an energy spectrum; identifying an energy peak of each energy spectrum and performing Gaussian fitting, calculating a peak abscissa, and establishing a relationship between the volume of a pixel cluster and actual energy; and completing energy calibration by utilizing linear fitting of volume energy data of multiple groups of pixel clusters. According to the invention, the requirements for setting parameters such as radioactive source intensity, detector threshold, exposure time and the like are reduced.

The invention discloses a multi-mode magnetic field intelligent closed-loop plasma confinement system and method. The system comprises a multi-mode magnetic field generation module, a multi-dimensional plasma diagnosis module and a layered intelligent closed-loop control module. The multi-mode magnetic field generation module generates a steady-state, pulse and alternating composite magnetic field to realize adjustable space gradient; the multi-dimensional diagnosis module synchronously acquires electrical, optical and particle parameters, and ensures the accuracy through data fusion; and the hierarchical intelligent closed-loop control module generates an adjusting instruction to realize closed-loop optimization based on dynamic threshold and multi-algorithm scheduling. According to the method, the constraint performance is improved through the steps of initialization, data acquisition, state evaluation and closed-loop adjustment in combination with parameter self-optimization and three-level fault protection. According to the scheme, the plasma constraint time exceeds 300 s, the escape rate is lower than 5%, the adjustment response is smaller than or equal to 10 ms, the method adapts to multiple working conditions and can be popularized to the fields of nuclear fusion experiments and plasma processing, and the problems that a traditional system is poor in stability and lags in response are solved.

Methods of monitoring arcing in a process chamber, processing chambers and monitoring apparatus are described. At least one of the angular or radial position of a magnetron is determined in the chamber relative to a reference location on a surface of the substrate using positional information from one or more motors. An arcing profile is generated comprising a plurality of arcing states measured based at least on the determined angular and / or radial position of the magnetron.

The invention discloses a plasma diagnosis method and system, and the method comprises the steps: determining a proton source image based on a proton source; generating a first proton beam through the proton source; enabling the first proton beam to pass through the to-be-diagnosed area to form a second proton beam; receiving the second proton beam, and determining a target image; based on the proton source image and the target image, constructing an optimal transport problem from the proton source image to the target image; solving an optimal transport problem, and obtaining an optimal transport probability from the proton source image to the target image; and on the basis of the optimal transport probability, diagnosing the plasma in the to-be-diagnosed area. The plasma diagnosis method has higher calculation progress, and can overcome the defect of difficult convergence caused by singularity of a calculation equation in a strong magnetic field.

A plasma diagnostic apparatus includes a substrate having at least one probe, a plasma diagnostic circuit mounted on the substrate, configured to diagnose plasma in a chamber with the at least one probe, and to store diagnosis result information, a wireless communication circuit mounted on the substrate and configured to wirelessly transmit the diagnosis result information to an external device, and a battery mounted on the substrate and configured to supply power to the plasma diagnostic circuit and to the wireless communication circuit.

The application discloses a surface thermocouple system suitable for a full-tungsten divertor of a magnetic confinement device, and relates to the field of plasma diagnosis of magnetic confinement devices, and comprises a box-shaped support structure and a thermocouple assembly. The tungsten-copper string tube of the divertor is fixedly connected with the box-shaped support structure through fixing pins. The thermocouple assembly is composed of a thermocouple probe, a pyrolytic graphite shell, a base, a screw, a nut, a spring washer, a fixing support plate and a lead wire, and is installed in a cylindrical through hole between adjacent tungsten-copper string tubes and a gap between the tungsten-copper string tube and the box-shaped support structure. The application enables the surface thermocouple to be normally disassembled and maintained, and provides a direct means for measuring the surface temperature of the target plate of the full-tungsten divertor.

This application relates to the field of plasma diagnostic technology and discloses a plasma breakup prediction method based on Alfvén eigenmodes. The method includes: acquiring a diagnostic signal of the plasma; performing a frequency domain transformation on the diagnostic signal to obtain a corresponding amplitude spectrum; detecting the presence of a pressure Alfvén eigenmode (BAE) signal based on the amplitude spectrum; and if the detected pressure Alfvén eigenmode (BAE) is excited by a tearing mode (TM), then the pressure Alfvén eigenmode (BAE) is considered a valid precursor to plasma breakup. This application enables accurate prediction of plasma breakup.

The invention discloses a 10 MeV-level high-brightness ultrafast electron beam source based on quasi-linear laser wake field acceleration and a generation device thereof. Miniaturized repetition frequency ten-megawatt-level femtosecond laser interacts with a gas target capable of generating special gas flow distribution; based on a new quasi-linear laser wake field electron acceleration mechanism, the generation of a 10 MeV-level high-brightness high-performance ultrafast electron beam source can be accelerated. The device effectively solves the problem that it is difficult to accelerate generation of ultrafast electron beams with low energy dispersion, low emittance, high flow intensity, femtosecond pulse width, high brightness and high performance in a sub-ten-megawatt femtosecond laser driving wake field. Therefore, the method is expected to be widely applied to advanced fields such as ultrafast electron diffraction imaging and pumping detection, laser wake field and plasma diagnosis and measurement, high-energy particle acceleration, novel ultrafast coherent radiation source generation and the like.

This application relates to the field of plasma physics technology and provides an asymmetric inversion method and apparatus based on a matching mechanism for plasma diagnostics. The method acquires plasma magnetic flux data, observation lines, and measurement integral values. The magnetic flux data is preprocessed to obtain preprocessed magnetic flux data. Based on the preprocessed magnetic flux data, a closed magnetic surface uniquely matched to each observation line is determined. A lower triangular matrix is ​​constructed based on each observation line and the closed magnetic surface. An inversion equation is constructed based on this lower triangular matrix and the measurement integral values. Finally, the inversion equation is solved to determine the parameter distribution values ​​of the plasma. This method achieves three-dimensional spatial projection of the observation lines and magnetic flux, rapidly determining the position of the closed magnetic surface using geometric relationships, thus improving computational efficiency. Simultaneously, it accurately establishes a one-to-one correspondence between the closed magnetic surface and the observation lines, making the ill-posed problem in solving the matrix equations a unique solution, improving the success rate of solving using the stacking method, and significantly reducing computational errors.

The application relates to a kind of plasma diagnostic method and device based on femtosecond laser filament probe, belong to laser plasma diagnostic technical field, method utilizes the high peak power characteristics of femtosecond laser to form the femtosecond filament probe with only hundred microns in diameter and only several millimeters in length, and the internal substance of plasma can be excited again.Spectra signals when using and not using femtosecond filament probe are collected respectively, and the element information at the position of femtosecond filament probe at this moment is obtained by differentiating the spectrum.By scanning the relative position of femtosecond filament probe and plasma, the material content information at different spatial positions in plasma can be obtained, and by changing the delay time when femtosecond laser pulse and plasma are generated, the material distribution information in plasma at different time can be obtained, and the four-dimensional distribution information of the material in plasma can be obtained by coincidence of the spectrum under different positions and different delay times.

The invention relates to the technical field of electric propulsion, in particular to a plasma parameter diagnosis system in a vacuum chamber, which comprises a vacuum chamber, a plasma confinement acceleration device, a laser emitting device, a laser receiving device, a probe array, a microwave horn antenna array and a fixed bracket guide rail, wherein the plasma confinement acceleration device is arranged in the vacuum chamber; the laser emitting device is arranged on the fixed bracket guide rail on one side through a first adjusting bracket; the laser receiving device is arranged on the fixed support guide rail on the other side through a second adjusting support. The probe array is arranged in front of the plasma confinement acceleration device through the movable bracket; and the microwave horn antenna array is arranged on the side of the plasma confinement acceleration device. According to the invention, the synchronous measurement of the plasma state in multiple diagnosis modes can be realized, the plasma diagnosis time can be effectively saved, and the plasma performance can be measured and analyzed through multiple dimensions.

The application provides a kind of electric thruster beam plasma parameter characteristic diagnostic system and method, it is related to plasma diagnostic field, the system includes vacuum chamber, for accommodating electric thruster and providing vacuum environment;Optical fiber signal acquisition module is set to the inside of vacuum chamber, for from multiple angles acquisition optical signal of the beam plasma generated by electric thruster;Image acquisition module is set to the outside of vacuum chamber, with optical fiber signal acquisition module light path connection, for receiving optical signal and converting into two-dimensional image time sequence;Data processing module is connected with communication with image acquisition module, for processing two-dimensional image time sequence, to reconstruct the four-dimensional distribution of the parameter of beam plasma.The application realizes low disturbance, low cost multi-parameter synchronous diagnosis by means of calibration optical fiber, light splitting filter and inversion process, improves efficiency and resolution.

The invention discloses an identification method and related equipment for rapidly identifying a multi-modulus seed magnetic island, and relates to the field of magnetic confinement fusion plasma diagnosis. Wherein at least one group is used for switching observed circumferential positions in different time sequence segments through a waveguide switch in the quasi-optical transmission module. The method comprises the following steps: synchronously acquiring electronic temperature signals of two groups of microwave measurement subsystems at the same radial channel in a time sequence segment corresponding to different annular phase differences, carrying out time averaging on the electronic temperature signals, and judging and identifying a seed magnetic island corresponding to an annular modulus based on the same radial temperature difference and normalization, and further extracting a flat region based on the distribution of the electron temperature along with the radial channel to determine the width and the boundary position of the magnetic island. According to the invention, the rapid distinguishing and high-precision positioning of a plurality of annular modulus seed magnetic islands can be realized without adding extra detection channels.

This invention discloses a hydrogen isotope permeation research device based on radio frequency plasma, belonging to the field of hydrogen isotope permeation research technology. The device includes a quartz tube, one end of which is connected to an inlet unit, and the other end has a fixed flange with a gas venting channel. A permeation tube is detachably and sealed to the fixed flange, and the inner cavity of the permeation tube is connected to a permeation flux detection unit. A tubular furnace corresponding to the permeation tube and a coupling coil electrically connected to a radio frequency generator are fitted around the quartz tube. The device also includes an in-situ reverse cleaning unit that can replace the permeation flux detection unit and a plasma diagnostic unit that can replace the permeation tube. This invention uses a radio frequency plasma source, which has high plasma density and a wide parameter adjustment range, effectively processing combined hydrogen isotopes. The in-situ reverse cleaning unit improves the permeation flux and operational stability. The modular structure provides strong engineering scalability and can support the systematic research and engineering development of ultrapermeation pumps.

This invention provides a method for diagnosing parameters of non-uniform plasmas based on the local microwave penetration effect. This method relates to the fields of electromagnetics and plasma diagnostics, and includes a combined diagnosis of the electron density distribution and collision frequency of a plasma profile. The method models the plasma to the left of the peak layer by layer and iteratively optimizes the distribution results. The method also uses the maximum reflection coefficient amplitude slope to derive the plasma electron density peak. For the plasma to the right of the peak, the method models multiple distribution models, determining the model using the attenuation coefficient. Furthermore, the method uses the maximum reflection coefficient amplitude to diagnose the collision frequency. This method addresses the problem of diagnosing parameters of non-uniform plasma profiles.

The present invention provides a millimeter-wave coherent scattering diagnostic system for monitoring high-wavenumber turbulence in a superconducting tokamak. This system, belonging to the field of magnetic confinement fusion plasma diagnostics, comprises a millimeter-wave source, a first converging convex lens, a first high-density polyethylene (HDPE) vacuum window, a first concave mirror, a second concave mirror, a target plasma region, a third concave mirror, a fourth concave mirror, a second HDPE vacuum window, a second concave lens, and a millimeter-wave receiver, arranged sequentially along an optical path. The beam waist of the millimeter-wave coherent scattering diagnostic system is located at the center of the target plasma region. By arranging optical lens assemblies at the incident end and the signal receiving end within the vacuum of the tokamak device, the coherent scattering system can arrange the optical path in two different windows, increasing the scattering angle, enhancing the radial localization of the signal, and increasing the ability to scan different radial regions, thereby achieving long-term, stable, and effective measurement of high-wavenumber turbulence.

Methods of monitoring arcing in a process chamber, processing chambers and monitoring apparatus are described. At least one of the angular or radial position of a magnetron is determined in the chamber relative to a reference location on a surface of the substrate using positional information from one or more motors. An arcing profile is generated comprising a plurality of arcing states measured based at least on the determined angular and / or radial position of the magnetron.

This application relates to the field of flush probe evaluation, and specifically discloses a method for evaluating the accuracy of flush probe in high-temperature dynamic plasma diagnosis. Through theoretical calculations and test results of a high-enthalpy wind tunnel, the accuracy of directly using flush probes for measuring the plasma concentration in a high-temperature dynamic flow field is quantitatively evaluated, and a comparative evaluation of the detection data between electrostatic probes and flush probes is achieved.

Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.

The invention relates to a plasma diagnosis method and device based on a femtosecond laser filamentation probe, and belongs to the technical field of laser plasma diagnosis, the femtosecond filamentation probe with the diameter of only hundreds of microns and the length of only several millimeters is formed by using the high peak power characteristic of femtosecond laser, and substances in plasma can be excited again. Spectral signals when the femtosecond filamentation probe is used and when the femtosecond filamentation probe is not used are collected respectively, and element information at the position of the femtosecond filamentation probe at the moment is obtained by differentiating spectrums. The relative position of the femtosecond filamentation probe and the plasma is scanned to obtain the substance content information at different spatial positions in the plasma, and the substance distribution information in the plasma at different moments can be obtained by changing the delay time of the femtosecond laser pulse and the plasma generation moment. And conforming the spectrums at different positions and at different delay times to obtain four-dimensional distribution information of the substances in the plasma.

This application provides a multicolor instrument, a plasma diagnostic system, and a fusion reaction system. The multicolor instrument includes a first mirror assembly and an optical path box. The first mirror assembly is mounted on the inner wall of the optical path box via a lens flange. An angle exists between the axis of the first mirror assembly and the inner wall of the optical path box, and this angle is adjusted by tightening bolts passing through the lens flange. By mounting the first mirror assembly on the optical path box using a flange-bolt structure, a multicolor instrument with a simple structure, high reliability, flexibility, and ease of maintenance is obtained.

An intelligent plasma stabilization system for a fusion reactor, consisting of: a plasma diagnostic acquisition module for acquiring real-time plasma operating data from a variety of reactor sensors; a real-time plasma state analysis module for generating dynamic plasma state models based on the acquired operating data; an AI-based instability prediction module for predicting plasma instability events using machine learning algorithms; a dynamic magnetic field optimization module for autonomously adjusting the magnetic confinement parameters in response to predicted plasma instability events; and a central intelligent fusion control module for coordinating the operation of the plasma stabilization system to maintain plasma confinement stability in the fusion reactor.

The invention relates to the technical field of magnetic field measurement and plasma diagnosis, in particular to an anti-sputtering telescopic and deformable vacuum three-dimensional array magnetic field monitoring device and method. According to the technical scheme, the device comprises a power transmission device module, a rotating device module, a probe device module, a base and a signal transmission module, the power transmission device module is located in the base and is in nested connection with the rotating device module, the rotating device module is fixedly connected with the probe device module, and the signal transmission module is connected with the base; the power transmission device module is used for controlling the probe device module to move in the vertical or horizontal direction. According to the invention, the full-dimensional precise measurement of the three-dimensional magnetic field in the vacuum environment is realized, the measurement position and angle can be finely adjusted without moving the base, the measurement flexibility and the coverage range are greatly improved, good vacuum sealing performance and sputtering resistance are achieved, the operation is convenient, the positioning is precise, and the measurement efficiency and the data consistency are effectively improved.

MPCVD device comprises deposition platform, substrate platform, lifting platform, microwave quartz window, upper cover plate, baseplate, pressure sensors, composite windows, thickness measuring device, visual device, temperature measuring device, plasma diagnostic device, vacuum sealing ring and microwave shielding sealing ring. Reaction cavity is formed by upper cover plate and baseplate, and inlet hole is arranged on top of upper cover plate, while exhaust hole is arranged on baseplate; microwave quartz window is annular shaped and arranged between deposition platform and baseplate, and reaction cavity is isolated from air outside by microwave quartz window; lifting platform is provided with vacuum channel and cooling channel therein; vacuum cavity, which is communicated with vacuum channel, is formed by lower surface of substrate platform and upper surface of lifting platform; and pressure sensor for monitoring gas pressure is arranged in vacuum cavity.

The present application provides a plasma electromagnetic field detection method, device, terminal and storage medium, which relate to the field of plasma diagnostic technology. The method includes: constructing a plasma electromagnetic field physical model, collecting electromagnetic field data, the electromagnetic field data including the electric field intensity and magnetic induction intensity at each time and space point in the plasma; constructing a plasma time-space domain physical information neural network architecture, a multi-objective loss function and an adaptive sampling strategy, and training the plasma time-space domain physical information neural network architecture based on the multi-objective loss function, the adaptive sampling strategy and the electromagnetic field data; using the trained plasma time-space domain physical information neural network architecture to detect the electromagnetic field distribution of the plasma to be tested. The present application can improve the accuracy and reliability of detection.

The invention discloses an E / / B neutral particle analyzer detector for a Tokamak device, which belongs to the technical field of high-temperature plasma diagnosis and comprises a magnet structure for generating a specific magnetic field structure and a vacuum chamber structure for passage of charged ions. The electrode plate structures are used for guiding the charged ions to deflect; the detector main body structure is used for receiving the charged ions; the magnet structure is vertically fixed on a plane, the vacuum chamber structure is fixed and tightly attached in a gap of the magnet structure, the electrode plate structure is fixed in the vacuum chamber structure, and the detector main body structure is fixed in the vacuum chamber structure. While the target magnetic field structure and the energy detection range are met, the overall size and mass of the device are effectively optimized.

The invention discloses a method for measuring the service life of a first wall boron film of a Tokamak device, and belongs to the technical field of high-temperature plasma diagnos.The method comprises the steps that in the operation stage of a Tokamak plasma experiment, the mass change of a material is monitored in real time through a quartz crystal microbalance system located in a magnetic shadow area; based on monitoring data of the quartz crystal microbalance system, an evolution curve of accumulated mass change along with accumulated discharge time is drawn; performing local fitting and slope inspection on the slope of the evolution curve of the cumulative mass change along with the cumulative discharge time, and when the local fitting slope is remarkably changed, extracting plasma parameters under corresponding discharge conditions and confirming that the plasma parameters are in a stable state; and judging the end-of-life point of the first wall boron film based on the slope characteristic of the evolution curve of the cumulative mass change along with the cumulative discharge time. According to the invention, in-situ, real-time and accurate life measurement can be realized in the plasma discharge process.

The invention provides a laser plasma extreme ultraviolet light source ion debris measurement device and method, and relates to the technical field of plasma diagnosis, and the device comprises a signal processing device which is connected with an ion collection device and is used for processing an electric signal to obtain a processed signal; the data acquisition device is used for acquiring the processed signals; the calculation device is connected with the data acquisition device and is used for converting the acquired signal into an ion kinetic energy distribution spectrum and charge quantity information; the adjusting mechanism is used for realizing alignment of the ion debris measuring system and a plasma emission center; and the voltage source is used for providing bias voltage for the energy screening device. According to the invention, the defects of original ion debris measurement are improved, and kinetic energy distribution and charge state distribution of ion debris in an extreme ultraviolet light source system can be researched more deeply.

The invention provides an electric thruster beam plasma parameter characteristic diagnosis system and method, and relates to the field of plasma diagnosis, and the system comprises a vacuum chamber which is used for accommodating an electric thruster and providing a vacuum environment; the optical fiber signal acquisition module is arranged in the vacuum bin and is used for acquiring optical signals of beam plasma generated by the electric thruster from a plurality of angles; the image acquisition module is arranged outside the vacuum bin, is in light path connection with the optical fiber signal acquisition module and is used for receiving the optical signal and converting the optical signal into a two-dimensional image time sequence; and the data processing module is in communication connection with the image acquisition module and is used for processing the two-dimensional image time sequence so as to reconstruct four-dimensional distribution of parameters of the beam plasma. By means of optical fiber calibration, light splitting filtering and inversion processes, low-disturbance and low-cost multi-parameter synchronous diagnosis is achieved, and efficiency and resolution are improved.

The invention provides a contact type plasma diagnosis system and method, is applied to the technical field of scanning probes, and is used for solving the technical problem of poor anti-interference capability of a contact type plasma diagnosis system in the prior art. The method specifically comprises the steps that a main probe part collects main current under the combined action of measured plasma and electromagnetic interference, and a compensation probe part collects compensation current only under the action of electromagnetic interference; the probe data conversion circuit converts the main current and the compensation current into a main voltage and a compensation voltage, subsequent data processing and reduction are carried out to obtain the main current and the compensation current, the difference between the main current and the compensation current is obtained to obtain a target diagnosis current, and the electron temperature of the measured plasma is determined according to the target diagnosis current and the bias voltage. The main current and the compensation current are subjected to differential processing, the influence of electromagnetic interference is effectively removed, the anti-interference capability of the system is improved, the compensation current is converted into compensation voltage for transmission, the problem of large measurement error is avoided, and the measurement precision and reliability are improved.