Operating frequency adjustment method, operating frequency control circuit, and radio-frequency power supply device

Abstract

The present application relates to the technical field of radio frequency. Provided are an operating frequency adjustment method for a radio-frequency circuit, and an operating frequency control circuit and a radio-frequency power supply device. The operating frequency adjustment method for a radio-frequency circuit comprises: controlling a radio-frequency circuit to provide output at different operating frequencies to a load; measuring circuit parameters of the radio-frequency circuit during output at each operating frequency; on the basis of the circuit parameters of the radio-frequency circuit during output at each operating frequency, performing calculation to obtain a resonant frequency of the radio-frequency circuit; and adjusting an operating frequency of the radio-frequency circuit to the resonant frequency. The present application can quickly determine a resonant frequency of a radio-frequency circuit, and adjust an operating frequency of the radio-frequency circuit to the resonant frequency.

Description

Working frequency adjustment method, working frequency control circuit and radio frequency power supply equipment

[0001] This application claims priority to the Chinese patent application filed with the Patent Office of China on December 20, 2023, with application number 202311754223.2 and application name “Working frequency adjustment method, working frequency control circuit and radio frequency power supply equipment”, the entire contents of which are incorporated by reference into this application. Technical Field

[0002] The present application relates to the field of radio frequency technology, and in particular to a method for adjusting the operating frequency of a radio frequency circuit, an operating frequency control circuit, and a radio frequency power supply device. Background Art

[0003] With the increasing popularity of radio frequency (RF) applications, RF circuits are increasingly being used in various fields. The operating frequency of an RF circuit is particularly important for its output, and operating at its resonant frequency can achieve optimal results. However, with the increasing complexity of current RF circuit designs and the increasing diversity of components, adjusting the values ​​of components such as inductors and capacitors has become increasingly difficult. Even after repeated testing, finding the resonant frequency of an RF circuit is difficult.

[0004] Therefore, how to quickly determine the resonant frequency of the RF circuit and adjust the operating frequency of the RF circuit to the resonant frequency becomes an issue that needs to be considered.

[0005] Summary of the Invention

[0006] The present application provides a method for adjusting the operating frequency of a radio frequency circuit, an operating frequency control circuit, and a radio frequency power supply device, which can quickly determine the resonant frequency of the radio frequency circuit and adjust the operating frequency of the radio frequency circuit to the resonant frequency.

[0007] In a first aspect, a method for adjusting the operating frequency of a radio frequency circuit is provided, the method comprising: controlling the radio frequency circuit to output to a load at different operating frequencies; detecting circuit parameters of the radio frequency circuit when outputting at each operating frequency; calculating the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit when outputting at each operating frequency; and adjusting the operating frequency of the radio frequency circuit to the resonant frequency.

[0008] In a possible implementation, the RF circuit includes an RF power supply, and controlling the RF circuit to output to the load at different operating frequencies includes: controlling the RF power supply of the RF circuit to output to the load at at least a first operating frequency f1 and a second operating frequency f2.

[0009] In a possible implementation, detecting circuit parameters of the radio frequency circuit when outputting at each operating frequency includes: detecting circuit parameters of the radio frequency circuit when outputting at a first operating frequency f1 and a second operating frequency f2.

[0010] In one possible embodiment, the resonant frequency of the RF circuit is calculated based on the circuit parameters of the RF circuit when it outputs each operating frequency, including: calculating the equivalent inductance value L and the equivalent capacitance value C of the RF circuit based on the circuit parameters of the RF circuit when it outputs the first operating frequency f1 and the second operating frequency f2; and then calculating the resonant frequency f0 of the RF circuit based on the equivalent inductance value L and the equivalent capacitance value C.

[0011] In a possible embodiment, the detection of circuit parameters of the RF circuit when it outputs at the first operating frequency f1 and the second operating frequency f2 includes: detecting the first voltage value U1 and the first current value I1 of the RF circuit when it outputs at the first operating frequency f1, and the second voltage value U2 and the second current value I2 of the RF circuit when it outputs at the second operating frequency f2, as well as the resistance value R of the load; wherein the first voltage value U1 and the second voltage value U2 are respectively the output voltage values ​​U of the RF power supply when it outputs at the first operating frequency f1 and the second operating frequency f2, and the first current value I1 and the second current value I2 are respectively the current values ​​I of the RF circuit when it outputs at the first operating frequency f1 and the second operating frequency f2.

[0012] In a possible embodiment, the equivalent inductance value L and the equivalent capacitance value C of the RF circuit are calculated based on the circuit parameters of the RF circuit when it outputs the first operating frequency f1 and the second operating frequency f2, including: based on the first voltage value U1 and the first current value I1 of the RF circuit when it outputs the first operating frequency f1, and the second voltage value U2 and the second current value I2 of the RF circuit when it outputs the second operating frequency f2, and the resistance value R of the load, to calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit.

[0013] In a possible implementation, the equivalent inductance L and the equivalent capacitance C of the RF circuit are calculated based on the first voltage value U1 and the first current value I1 of the RF circuit when it outputs the first operating frequency f1, the second voltage value U2 and the second current value I2 of the RF circuit when it outputs the second operating frequency f2, and the resistance value R of the load, including: calculating the equivalent inductance L and the equivalent capacitance C of the RF circuit according to the following relational expressions: first relational expression: U1=I1(R+jX1), X1=L*2πf1-1 / (C*2πf1), where j is an imaginary unit and X1 is the reactance value of the RF circuit when it outputs the first operating frequency f1; second relational expression: U2=I2(R+jX2), X2=L*2πf2-1 / (C*2πf2), where j is an imaginary unit and X2 is the reactance value of the RF circuit when it outputs the second operating frequency f2.

[0014] In a possible implementation manner, the resonant frequency f0 of the RF circuit is calculated based on the equivalent inductance value L and the equivalent capacitance value C, including: based on the equivalent inductance value L and the equivalent capacitance value C, through the relationship expression The resonant frequency f0 of the RF circuit is calculated.

[0015] In the second aspect, an operating frequency control circuit is also provided for adjusting the operating frequency of the radio frequency circuit, and the operating frequency control circuit includes: a control unit for controlling the radio frequency circuit to output to the load at different operating frequencies; a circuit parameter detection unit for detecting the circuit parameters of the radio frequency circuit when it outputs at each operating frequency; wherein the control unit is also used to calculate the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit when it outputs at each operating frequency, and control the operating frequency of the radio frequency circuit to be adjusted to the resonant frequency.

[0016] In a third aspect, a radio frequency power supply device is provided, comprising the aforementioned operating frequency control circuit and a radio frequency circuit. The operating frequency control circuit controls the execution of the steps in the aforementioned method for adjusting the operating frequency of the radio frequency circuit to adjust the operating frequency of the radio frequency circuit. The radio frequency circuit has a resonant frequency f0, and the radio frequency circuit further comprises: an radio frequency power supply configured to output power to the load at different operating frequencies; and a radio frequency output terminal configured to connect to the load. The operating frequency control circuit comprises: a control unit configured to control the radio frequency circuit to output power to the load at different operating frequencies; a circuit parameter detection unit configured to detect circuit parameters of the radio frequency circuit at each operating frequency output; the control unit further configured to calculate the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit at each operating frequency output, and control the adjustment of the operating frequency of the radio frequency circuit to the resonant frequency. The method for adjusting the operating frequency of the radio frequency circuit comprises: controlling the radio frequency circuit to output power to the load at different operating frequencies; detecting the circuit parameters of the radio frequency circuit at each operating frequency output; calculating the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit at each operating frequency output; and adjusting the operating frequency of the radio frequency circuit to the resonant frequency. The present application can quickly determine the resonant frequency of the radio frequency circuit and adjust the operating frequency of the radio frequency circuit to the resonant frequency.

[0017] The operating frequency adjustment method, operating frequency control circuit and radio frequency power supply device of the radio frequency circuit of the present application can quickly determine the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit when it outputs each operating frequency, and adjust the operating frequency of the radio frequency circuit to the resonant frequency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.

[0019] FIG1 is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in an embodiment of the present application.

[0020] FIG2 is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in yet another embodiment of the present application.

[0021] FIG3 is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in another embodiment of the present application.

[0022] FIG4 is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in yet another embodiment of the present application.

[0023] FIG5 is a schematic structural diagram of an operating frequency control circuit in an embodiment of the present application.

[0024] FIG6 is a schematic structural diagram of a radio frequency power supply device in an embodiment of the present application.

[0025] FIG7 is a circuit diagram of a radio frequency power supply device in an embodiment of the present application.

[0026] Explanation of the accompanying symbols: 1. RF power supply equipment, 10. Operating frequency control circuit, 110. Control unit, 120. Circuit parameter detection unit, 20. RF circuit, 210. RF power supply, 220. RF output terminal, 230. Inductor and capacitor network, L1, equivalent inductance, C1, equivalent capacitance, U, output voltage value, I, current value, RL, load, GND, ground. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0028] In the description of the embodiments of the present application, it should be noted that the terms "inside" and "outside" etc. indicating orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present application and simplifying the description, and do not imply or indicate that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application.

[0029] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0030] In describing the embodiments of the present application, it should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.

[0031] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.

[0032] Please refer to Figure 1, which is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in an embodiment of the present application. As shown in Figure 1, the present application provides a method for adjusting the operating frequency of a radio frequency circuit, and the method for adjusting the operating frequency of a radio frequency circuit includes:

[0033] Step S100: Control the radio frequency circuit to output to the load at different operating frequencies;

[0034] Step S200: detecting circuit parameters of the radio frequency circuit at each operating frequency output;

[0035] Step S300: Calculating the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit at each operating frequency output;

[0036] Step S400: adjusting the operating frequency of the radio frequency circuit to the resonant frequency.

[0037] Therefore, the operating frequency adjustment method of the above-mentioned RF circuit in this application can quickly determine the resonant frequency of the RF circuit based on the circuit parameters of the RF circuit when it outputs each operating frequency, and adjust the operating frequency of the RF circuit to the resonant frequency.

[0038] Among them, the existing methods often require determining the values ​​of components such as inductors and capacitors in the RF circuit to calculate the resonant frequency, or determining whether the maximum output power is reached by adjusting the values ​​of components such as inductors and capacitors in the RF circuit. The operating frequency adjustment method of the present application, regardless of whether the design of the RF circuit is complex, can calculate the resonant frequency of the RF circuit based on the circuit parameters of the RF circuit when it outputs each operating frequency, without having to determine the values ​​of components such as inductors and capacitors in the RF circuit one by one, nor adjusting the values ​​of components such as inductors and capacitors in the RF circuit, and can determine the resonant frequency of the RF circuit, which is simple to calculate and more efficient.

[0039] In one or more embodiments, when the duration of the RF circuit outputting at the resonant frequency reaches a preset time, the RF circuit can be controlled to re-execute the aforementioned steps S100 to S400 to avoid changes in the resonant frequency of the RF circuit and a decrease in output power due to the long-term failure to adjust the operating frequency of the RF circuit.

[0040] In which, when the duration of the RF circuit outputting at the resonant frequency reaches a preset time, the circuit parameters of the RF circuit when outputting at the resonant frequency can also be detected. Based on the circuit parameters of the RF circuit when outputting at the resonant frequency, it is determined whether to control the RF circuit to re-execute the aforementioned steps S100 to S400, so as to execute the aforementioned steps S100 to S400 when it is necessary to redetermine the resonant frequency of the RF circuit.

[0041] The circuit parameters may at least include the current value I of the RF circuit when outputting at the resonant frequency. By determining the initial phase angle of the current value I, when the initial phase angle is not zero, the RF circuit is controlled to re-execute the aforementioned steps S100 to S400.

[0042] In one or more embodiments, when the load connected to the RF circuit changes, the RF circuit can be controlled to re-execute the aforementioned steps S100 to S400 to avoid the change in the resonant frequency of the RF circuit caused by the change in the load. Failure to adjust the operating frequency of the RF circuit will result in a decrease in output power.

[0043] Please refer to FIG2 , which is a flow chart of a method for adjusting the operating frequency of an RF circuit in another embodiment of the present application. The RF circuit includes an RF power supply, as shown in FIG2 , step S100: controlling the RF circuit to output to a load at different operating frequencies, including:

[0044] Step S110: Control the radio frequency power of the radio frequency circuit to output to the load at least the first operating frequency f1 and the second operating frequency f2.

[0045] Therefore, the resonant frequency of the RF circuit can be determined by simply controlling the RF power supply of the RF circuit to output at least the first operating frequency f1 and the second operating frequency f2 to the load.

[0046] As shown in FIG2 , step S200 : detecting circuit parameters of the RF circuit at each operating frequency output, including:

[0047] Step S210: Detecting circuit parameters of the radio frequency circuit when outputting at the first operating frequency f1 and the second operating frequency f2.

[0048] Therefore, the circuit parameters of the radio frequency circuit when outputting at the first operating frequency f1 and the second operating frequency f2 are detected to calculate the resonant frequency of the radio frequency circuit.

[0049] As shown in FIG2 , step S300 : calculating the resonant frequency of the RF circuit based on the circuit parameters of the RF circuit at each operating frequency output, including:

[0050] Step S310: Calculating an equivalent inductance value L and an equivalent capacitance value C of the RF circuit based on circuit parameters of the RF circuit when outputting at the first operating frequency f1 and the second operating frequency f2;

[0051] Step S320: Calculate the resonant frequency f0 of the RF circuit according to the equivalent inductance value L and the equivalent capacitance value C.

[0052] Therefore, based only on the circuit parameters of the RF circuit when it outputs the first operating frequency f1 and the second operating frequency f2, the equivalent inductance value L and the equivalent capacitance value C of the RF circuit can be calculated, and then the resonant frequency f0 of the RF circuit can be obtained.

[0053] Specifically, if the values ​​of components such as inductors and capacitors in the RF circuit are not adjusted, the resonant frequency of the RF circuit generally will not change. However, if the values ​​of components such as inductors and capacitors in the RF circuit are determined one by one, or the values ​​of components such as inductors and capacitors in the RF circuit are adjusted, it will often cause the calculation to be complicated, the number of tests to increase, and the difficulty of testing to increase. The operating frequency adjustment method of the present application can calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit based only on the circuit parameters of the RF circuit when it outputs the first operating frequency f1 and the second operating frequency f2, and thus obtain the resonant frequency f0 of the RF circuit.

[0054] Please refer to FIG3 , which is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in another embodiment of the present application. As shown in FIG2 and FIG3 , step S210 : detecting circuit parameters of the radio frequency circuit when outputting at a first operating frequency f1 and a second operating frequency f2 , including:

[0055] Step S211: detecting a first voltage value U1 and a first current value I1 of the RF circuit at a first operating frequency f1, a second voltage value U2 and a second current value I2 of the RF circuit at a second operating frequency f2, and a resistance value R of the load;

[0056] Among them, the first voltage value U1 and the second voltage value U2 are the output voltage values ​​U of the RF power supply when it outputs at the first operating frequency f1 and the second operating frequency f2, respectively, and the first current value I1 and the second current value I2 are the current values ​​I of the RF circuit when it outputs at the first operating frequency f1 and the second operating frequency f2, respectively.

[0057] Therefore, by detecting the output voltage value U of the RF power supply when it outputs at the first operating frequency f1 and the second operating frequency f2, and detecting the current value I of the RF circuit when it outputs at the first operating frequency f1 and the second operating frequency f2, as well as the resistance value R of the load, the resonant frequency of a complex RF circuit can be obtained by detecting only a few circuit parameters of the RF circuit.

[0058] As shown in FIG2 and FIG3, step S310: based on the circuit parameters of the RF circuit when outputting at the first operating frequency f1 and the second operating frequency f2, calculating the equivalent inductance value L and the equivalent capacitance value C of the RF circuit, including:

[0059] Step S311: Based on the first voltage value U1 and the first current value I1 of the RF circuit when it is output at the first operating frequency f1, the second voltage value U2 and the second current value I2 of the RF circuit when it is output at the second operating frequency f2, and the resistance value R of the load, the equivalent inductance value L and the equivalent capacitance value C of the RF circuit are calculated.

[0060] Therefore, the equivalent inductance L and the equivalent capacitance C of the RF circuit can be calculated using the first voltage value U1 , the first current value I1 , the second voltage value U2 , the second current value I2 , and the resistance value R of the load.

[0061] It should be noted that no matter which components the RF circuit includes, if the values ​​of the inductor, capacitor and other components in the RF circuit are not adjusted, the RF circuit has a basically unchanged resonant frequency, that is, it has an equivalent inductance value L and an equivalent capacitance value C. The equivalent inductance value L and the equivalent capacitance value C may come from the inductor, capacitor and other components in the RF circuit, or may come from the RF power supply in the RF circuit or the load outside the RF circuit, or may only be the parasitic inductance and parasitic capacitance in the RF circuit.

[0062] Please refer to FIG4 , which is a flow chart of a method for adjusting the operating frequency of a radio frequency circuit in another embodiment of the present application. As shown in FIG3 and FIG4 , step S311: based on the first voltage value U1 and the first current value I1 of the radio frequency circuit when it is output at the first operating frequency f1, and the second voltage value U2 and the second current value I2 of the radio frequency circuit when it is output at the second operating frequency f2, and the resistance value R of the load, the equivalent inductance value L and the equivalent capacitance value C of the radio frequency circuit are calculated, including:

[0063] Step S3110: Calculate the equivalent inductance L and equivalent capacitance C of the RF circuit according to the following relationship expression:

[0064] The first relational expression: U1=I1(R+jX1), X1=L*2πf1-1 / (C*2πf1), where j is an imaginary unit and X1 is the reactance value of the RF circuit when it outputs at the first operating frequency f1; the second relational expression: U2=I2(R+jX2), X2=L*2πf2-1 / (C*2πf2), where j is an imaginary unit and X2 is the reactance value of the RF circuit when it outputs at the second operating frequency f2.

[0065] Therefore, by combining the first relational expression and the second relational expression, the two unknown quantities in the relational expression, namely the equivalent inductance value L and the equivalent capacitance value C of the radio frequency circuit, can be obtained.

[0066] As shown in FIG2 , FIG3 , and FIG4 , step S320 : further calculating the resonant frequency f0 of the RF circuit according to the equivalent inductance value L and the equivalent capacitance value C, including:

[0067] Step S3210: According to the equivalent inductance value L and the equivalent capacitance value C, the relationship expression The resonant frequency f0 of the RF circuit is calculated.

[0068] Thus, the equivalent inductance value L and the equivalent capacitance value C of the RF circuit are obtained, and the resonant frequency f0 of the RF circuit can also be calculated.

[0069] The operating frequency adjustment method of the RF circuit of the present application, through the above steps, regardless of whether the design of the RF circuit is complex, can calculate the resonant frequency of the RF circuit based on the circuit parameters of the RF circuit when it outputs each operating frequency, without having to determine the values ​​of components such as inductors and capacitors in the RF circuit one by one, nor without having to adjust the values ​​of components such as inductors and capacitors in the RF circuit. Moreover, it is only necessary to control the RF power supply of the RF circuit to output to the load at least at the first operating frequency f1 and the second operating frequency f2, so as to calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit, and thus obtain the resonant frequency f0 of the RF circuit.

[0070] Please refer to Figure 5, which is a schematic diagram of the structure of the operating frequency control circuit in one embodiment of the present application. As shown in Figure 5, the present application also provides an operating frequency control circuit 10 for adjusting the operating frequency of the radio frequency circuit 20. The operating frequency control circuit 10 includes: a control unit 110 for controlling the radio frequency circuit 20 to output to the load RL at different operating frequencies; a circuit parameter detection unit 120 for detecting the circuit parameters of the radio frequency circuit 20 at each operating frequency output; wherein the control unit 110 is further used to calculate the resonant frequency of the radio frequency circuit 20 based on the circuit parameters of the radio frequency circuit 20 at each operating frequency output, and control the operating frequency of the radio frequency circuit 20 to be adjusted to the resonant frequency.

[0071] Thus, the control unit 110 can quickly determine the resonant frequency of the RF circuit 20 based on the circuit parameters of the RF circuit 20 at each operating frequency output detected by the circuit parameter detection unit 120, and adjust the operating frequency of the RF circuit 20 to the resonant frequency.

[0072] In one or more embodiments, the control unit 110 controls the RF power supply 210 of the RF circuit 20 to output to the load RL at least at a first operating frequency f1 and a second operating frequency f2. The circuit parameters of the RF circuit 20 at each operating frequency output include at least a first voltage value U1 and a first current value I1 at the first operating frequency f1, a second voltage value U2 and a second current value I2 at the second operating frequency f2, and a resistance value R of the load RL. The circuit parameter detection unit 120 is used to detect the first voltage value U1 and the first current value I1 of the RF circuit 20 at the first operating frequency f1, a second voltage value U2 and a second current value I2 of the RF circuit 20 at the second operating frequency f2, and the resistance value R of the load RL. The first voltage value U1 and the second voltage value U2 are the output voltage values ​​U of the RF power supply 210 at the first operating frequency f1 and the second operating frequency f2, respectively, and the first current value I1 and the second current value I2 are the current values ​​I of the RF circuit 20 at the first operating frequency f1 and the second operating frequency f2, respectively.

[0073] Among them, when the control unit 110 controls the RF power supply 210 of the RF circuit 20 to output to the load RL at least at the first operating frequency f1 and the second operating frequency f2, the load RL with a standard resistance value of 50Ω can be directly used. Then, the circuit parameter detection unit 120 only detects whether the resistance value of the load RL is 50Ω once, and can be substituted into the following relational expression to calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit 20, which is more convenient for detection and calculation.

[0074] In one or more embodiments, the control unit 110 calculates the equivalent inductance L and the equivalent capacitance C of the RF circuit 20 based on the circuit parameters of the RF circuit 20 when it outputs the first operating frequency f1 and the second operating frequency f2, and then calculates the resonant frequency f0 of the RF circuit 20 based on the equivalent inductance L and the equivalent capacitance C.

[0075] The control unit 110 calculates the equivalent inductance L and the equivalent capacitance C of the RF circuit 20 according to the following relationship expressions:

[0076] The first relational expression: U1=I1(R+jX1), X1=L*2πf1-1 / (C*2πf1), where j is an imaginary unit and X1 is the reactance value of the RF circuit 20 when it outputs at the first operating frequency f1; the second relational expression: U2=I2(R+jX2), X2=L*2πf2-1 / (C*2πf2), where j is an imaginary unit and X2 is the reactance value of the RF circuit 20 when it outputs at the second operating frequency f2.

[0077] Then, according to the equivalent inductance value L and the equivalent capacitance value C, the relationship expression The resonant frequency f0 of the radio frequency circuit 20 is obtained by calculation.

[0078] In one or more embodiments, the circuit parameter detection unit 120 may include a voltage detection unit, a current detection unit, etc., wherein the voltage detection unit may be a voltmeter, or other voltage detection devices such as a voltage sensor, or a voltage detection circuit composed of components such as resistors, capacitors, and diodes; the current detection unit may be an ammeter, or other current detection devices such as a Hall sensor, or a current detection circuit composed of components such as resistors, capacitors, and diodes.

[0079] In one or more embodiments, the control unit 110 can be a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate logic devices, transistor logic devices, and other logic control devices, or a microprocessor such as a micro control unit (MCU).

[0080] The operating frequency adjustment method of the RF circuit 20 and the operating frequency control circuit 10 of the present application, through the above steps and structures, regardless of whether the design of the RF circuit 20 is complex, the control unit 110 can calculate the resonant frequency of the RF circuit 20 based on the circuit parameters of the RF circuit 20 detected by the circuit parameter detection unit 120 when the RF circuit 20 outputs at each operating frequency, without having to determine the values ​​of components such as inductors and capacitors in the RF circuit 20 one by one, nor without having to adjust the values ​​of components such as inductors and capacitors in the RF circuit 20. The control unit 110 only needs to control the RF power supply 210 of the RF circuit 20 to output to the load RL at least at the first operating frequency f1 and the second operating frequency f2, so as to calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit 20, and thus obtain the resonant frequency f0 of the RF circuit 20.

[0081] Please refer to Figures 6 and 7. Figure 6 is a schematic diagram of the structure of an RF power supply device in an embodiment of the present application, and Figure 7 is a schematic diagram of the circuit of an RF power supply device in an embodiment of the present application. As shown in Figures 6 and 7, the present application also provides an RF power supply device 1, comprising the above-mentioned operating frequency control circuit 10 and an RF circuit 20. The operating frequency control circuit 10 controls the execution of the steps in the above-mentioned operating frequency adjustment method of the RF circuit 20 to adjust the operating frequency of the RF circuit 20, wherein the RF circuit 20 has a resonant frequency f0. The RF circuit 20 also includes: an RF power supply 210 for outputting different operating frequencies to a load RL; and an RF output terminal 220 for connecting to the load RL.

[0082] As shown in Figure 5, the operating frequency control circuit 10 includes: a control unit 110, used to control the RF circuit 20 to output to the load RL at different operating frequencies; a circuit parameter detection unit 120, used to detect the circuit parameters of the RF circuit 20 when it outputs at each operating frequency; wherein the control unit 110 is also used to calculate the resonant frequency of the RF circuit 20 based on the circuit parameters of the RF circuit 20 when it outputs at each operating frequency, and control the operating frequency of the RF circuit 20 to be adjusted to the resonant frequency.

[0083] As shown in FIG1 , the operating frequency adjustment method of the radio frequency circuit includes:

[0084] Step S100: Control the radio frequency circuit to output to the load at different operating frequencies;

[0085] Step S200: detecting circuit parameters of the radio frequency circuit at each operating frequency output;

[0086] Step S300: Calculating the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit at each operating frequency output;

[0087] Step S400: adjusting the operating frequency of the radio frequency circuit to the resonant frequency.

[0088] Among them, the more specific structure of the operating frequency control circuit 10 can be found in the relevant content of the operating frequency control circuit 10 in any of the aforementioned embodiments, and the more specific steps of the operating frequency adjustment method of the RF circuit can be found in the relevant content of the operating frequency adjustment method of the RF circuit in any of the aforementioned embodiments, which will not be repeated here.

[0089] Thus, the control unit 110 can quickly determine the resonant frequency of the RF circuit 20 based on the circuit parameters of the RF circuit 20 at each operating frequency output detected by the circuit parameter detection unit 120, and adjust the operating frequency of the RF circuit 20 to the resonant frequency.

[0090] As shown in FIG7 , the RF circuit 20 may further include a capacitor-inductor network, which includes at least one equivalent inductor L1 and at least one equivalent capacitor C1 . The at least one equivalent inductor L1 is connected in series or in parallel with the at least one equivalent capacitor C1 .

[0091] It should be noted that the RF circuit 20 can perform impedance matching, and the inductor and capacitor network 230 can be used to impedance match the internal impedance of the RF power supply 210 with the impedance of the load RL. The RF circuit 20 may not perform impedance matching. The equivalent inductance L1 and the equivalent capacitance C1 of the inductor and capacitor network 230 shown in FIG7 merely indicate that the RF power supply 210 in the RF circuit 20 or the load RL outside the RF circuit 20 has an equivalent inductance value L equal to the equivalent inductance L1 and an equivalent capacitance value C equal to the equivalent capacitance C1, or merely indicate that the parasitic inductance and parasitic capacitance in the RF circuit 20 are equal to the equivalent inductance L1 and the equivalent capacitance C1.

[0092] In one or more embodiments, the circuit parameter detection unit 120 can detect the output voltage value U of the RF power supply 210 of the RF circuit 20 and the current value I of the RF circuit 20 when the RF circuit 20 outputs at the first operating frequency f1 and the second operating frequency f2 as shown in Figure 7, wherein the current value I of the RF circuit 20 is the main current value of the RF circuit 20, that is, the RF circuit 20 shown in Figure 7 includes an RF power supply 210, an inductor and capacitor network 230 and an RF output end 220 connected in series, then the circuit parameter detection unit 120 can also detect the current value I of the RF circuit 20 between the RF power supply 210 and the inductor and capacitor network 230, or the current value I of the RF circuit 20 at other places, all of which are the main current value of the RF circuit 20, and the present application is not limited to this.

[0093] In one or more embodiments, one end of the RF power supply 210 is connected to the LC network 230 or one end of the RF output terminal 220 , and the other end of the RF power supply 210 may be grounded GND.

[0094] The operating frequency adjustment method, operating frequency control circuit 10 and RF power supply device 1 of the RF circuit 20 of the present application, through the above steps and structures, regardless of whether the design of the RF circuit 20 is complex, the control unit 110 can calculate the resonant frequency of the RF circuit 20 based on the circuit parameters of the RF circuit 20 detected by the circuit parameter detection unit 120 when it outputs at each operating frequency, without having to determine the values ​​of components such as inductors and capacitors in the RF circuit 20 one by one, nor without having to adjust the values ​​of components such as inductors and capacitors in the RF circuit 20. The control unit 110 only needs to control the RF power supply 210 of the RF circuit 20 to output to the load RL at least at the first operating frequency f1 and the second operating frequency f2, so as to calculate the equivalent inductance value L and the equivalent capacitance value C of the RF circuit 20, and thus obtain the resonant frequency f0 of the RF circuit 20.

[0095] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. A method for adjusting the operating frequency of a radio frequency circuit, characterized in that: include: Control the RF circuit to output to the load at different operating frequencies; Detect circuit parameters of the RF circuit at each operating frequency output; The resonant frequency of the RF circuit is calculated based on the circuit parameters of the RF circuit at each operating frequency output; Adjust the operating frequency of the RF circuit to the resonant frequency.

2. The method for adjusting the operating frequency of a radio frequency circuit according to claim 1, characterized in that: The radio frequency circuit includes a radio frequency power supply, and the control of the radio frequency circuit to output to the load at different operating frequencies includes: The radio frequency power source of the radio frequency circuit is controlled to output to the load at least a first operating frequency f1 and a second operating frequency f2.

3. The method for adjusting the operating frequency of a radio frequency circuit according to claim 2, characterized in that: The circuit parameters of the detection radio frequency circuit at each operating frequency output include: The circuit parameters of the radio frequency circuit are detected when the radio frequency circuit outputs the first working frequency f1 and the second working frequency f2.

4. The method for adjusting the operating frequency of a radio frequency circuit according to claim 3, characterized in that: The step of calculating the resonant frequency of the radio frequency circuit based on the circuit parameters of the radio frequency circuit at each operating frequency output includes: Based on the circuit parameters of the radio frequency circuit when the radio frequency circuit outputs at the first operating frequency f1 and the second operating frequency f2, an equivalent inductance value L and an equivalent capacitance value C of the radio frequency circuit are calculated; Then, the resonant frequency f0 of the RF circuit is calculated based on the equivalent inductance value L and the equivalent capacitance value C.

5. The method for adjusting the operating frequency of a radio frequency circuit according to claim 4, characterized in that: The circuit parameters of the detection radio frequency circuit when outputting at the first working frequency f1 and the second working frequency f2 include: Detecting a first voltage value U1 and a first current value I1 of the RF circuit when it outputs at a first operating frequency f1, a second voltage value U2 and a second current value I2 of the RF circuit when it outputs at a second operating frequency f2, and a resistance value R of the load; Among them, the first voltage value U1 and the second voltage value U2 are respectively the output voltage values ​​U of the RF power supply when it outputs at the first operating frequency f1 and the second operating frequency f2, and the first current value I1 and the second current value I2 are respectively the current I of the RF circuit when it outputs at the first operating frequency f1 and the second operating frequency f2.

6. The method for adjusting the operating frequency of a radio frequency circuit according to claim 5, characterized in that: The method of calculating the equivalent inductance value L and the equivalent capacitance value C of the radio frequency circuit based on the circuit parameters of the radio frequency circuit when the radio frequency circuit outputs at the first operating frequency f1 and the second operating frequency f2 includes: Based on the first voltage value U1 and the first current value I1 of the RF circuit when it outputs at the first operating frequency f1, the second voltage value U2 and the second current value I2 of the RF circuit when it outputs at the second operating frequency f2, and the resistance value R of the load, the equivalent inductance value L and the equivalent capacitance value C of the RF circuit are calculated.

7. The method for adjusting the operating frequency of a radio frequency circuit according to claim 6, characterized in that: The equivalent inductance value L and the equivalent capacitance value C of the RF circuit are calculated based on the first voltage value U1 and the first current value I1 when the RF circuit outputs at the first operating frequency f1, the second voltage value U2 and the second current value I2 when the RF circuit outputs at the second operating frequency f2, and the resistance value R of the load, including: The equivalent inductance L and equivalent capacitance C of the RF circuit are calculated according to the following relationship expressions: The first relational expression: U1=I1(R+jX1), X1=L*2πf1-1 / (C*2πf1), wherein j is an imaginary unit, and X1 is the reactance value of the radio frequency circuit when it outputs at the first operating frequency f1; The second relational expression: U2=I2(R+jX2), X2=L*2πf2-1 / (C*2πf2), wherein j is an imaginary unit, and X2 is the reactance value of the RF circuit when it outputs at the second operating frequency f2.

8. The method for adjusting the operating frequency of a radio frequency circuit according to claim 7, characterized in that: The step of calculating the resonant frequency f0 of the radio frequency circuit according to the equivalent inductance value L and the equivalent capacitance value C includes: Then according to the equivalent inductance value L and the equivalent capacitance value C, through the relationship expression The resonant frequency f0 of the RF circuit is calculated.

9. A working frequency control circuit for adjusting the working frequency of a radio frequency circuit, characterized in that: The operating frequency control circuit comprises: A control unit, used to control the radio frequency circuit to output to the load at different operating frequencies; A circuit parameter detection unit, used to detect the circuit parameters of the radio frequency circuit at each operating frequency output; The control unit is further used to calculate the resonant frequency of the RF circuit based on the circuit parameters of the RF circuit when it outputs each operating frequency, and control the operating frequency of the RF circuit to be adjusted to the resonant frequency.

10. A radio frequency power supply device, characterized in that: The invention comprises an operating frequency control circuit and a radio frequency circuit according to claim 9, wherein the operating frequency control circuit controls the execution of the steps in the operating frequency adjustment method of the radio frequency circuit according to any one of claims 1 to 8 to adjust the operating frequency of the radio frequency circuit, wherein the radio frequency circuit has a resonant frequency f0, and the radio frequency circuit further comprises: A radio frequency power supply, used for outputting to the load at different operating frequencies; The radio frequency output terminal is used to connect the load.

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