An improved silicon tetrafluoride reactor

The improved reactor system with staged temperature control and separation processes effectively addresses low conversion and impurity issues in STF production, achieving high-purity silicon tetrafluoride.

WO2025165712A1 Publication Date: 2025-08-07ARKEMA INC
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Patent Information

Application Number
PCT/US2025/013311
Authority / Receiving Office
WO · WO
Patent Type
Applications
Current Assignee / Owner
Priority Date
2024-01-30
Filing Date
2025-01-28
Publication Date
2025-08-07

AI Technical Summary

Technical Problem

Existing reactor systems for producing silicon tetrafluoride (STF) suffer from low conversion efficiency, high impurity levels, particularly hydrofluoric acid (HF) and water, leading to undesirable side reactions and operational issues.

Method used

An improved reactor design comprising multiple stages with controlled temperature gradients and separation processes to produce purified silicon tetrafluoride, including initial and intermediate reactors and separators, followed by an absorber for gas washing, achieving high purity STF.

Benefits of technology

The design achieves a purified silicon tetrafluoride product with at least 99 wt% purity and low fluorosilicic acid content, minimizing undesirable reactions and operational issues.

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Abstract

The present disclosure relates to a system for the production of silicon tetrafluoride. In one implementation, a reactor is configured to at least convert fluorosilicic acid (FSA) into silicon tetrafluoride at a reaction zone. A separator receives the products of the reactor and is configured to separate the products into at least a gaseous stream and a liquid stream. At least one additional reactor is configured receive the at least a liquid stream of the reactor and configured to yield a refined product at a reaction zone. At least one additional separator is configured to separate the refined product into at least a gaseous stream and a liquid stream at a separating zone. Finally, a washer is configured to receive and wash the gaseous stream of the product and the gaseous stream of the refined product at a washing zone, wherein the washer yields a purified silicon tetrafluoride product.
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