Method and device for detecting F atomic concentration

Abstract

The invention relates to a detection method and a detection device for the F atom concentration, wherein, a titration HP absorption spectroscopy is adopted for measuring the F atom concentration; a route selection electric excited continuous wave HP laser is adopted to be a probe light source; the absorption spectrum intensity of HF molecules in a flow field is measured through an infrared window. Because the concentration of F atoms which are dissociated by a system to be detected is certain, when the flow rate of infused hydrogen is increased gradually, the concentration of HF molecules generated can be increased along with the increase of the flow rate until all the F atoms are reacted completely, and the absorption spectrum intensity A of the HF molecules can also be increased gradually to a stable vale; when A is just a maximum value, the corresponding hydrogen flow rate is equal to the F atom concentration. Moreover, the F atom concentration can be directly calculated through the absorption spectrum intensity of the HF molecules after related parameters are obtained by fitting of data which is obtained by titration processes for many times. The invention is a detection method and a detection device for the F atom concentration with simple and convenient operation, simple and compact structure, low cost, high measuring precision and good stability.

Description

technical field

[0001] The present invention mainly relates to the detection field of F atoms, in particular to a detection method and a detection device of F atom concentration, and is especially suitable for the diagnosis of electro-excited HF / DF chemical lasers, all-gas-phase oxygen-iodine chemical lasers, and the engraving of F-containing plasmas. Etching processing silicon-containing semiconductor field. Background technique

[0002] For electrically excited HF / DF lasers and all-gas-phase oxygen-iodine chemical lasers, the yield and yield of F atoms are the most important performance indicators of the core device - the discharge tube, and the direct decisive factor for the power and efficiency of the laser. F atom online detection technology is very important for The improvement and optimization of the laser is of great significance. In the field of semiconductor etching processing, in order to improve the processing efficiency and effect, the research on how to effici...

Examples

Embodiment Construction

[0054] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0055] like figure 1 And shown in Fig. 2, the detection method of a kind of F atom concentration of the present invention, its steps are:

[0056] (1) A mixed gas containing F atoms is passed into the titration device. Infrared lenses are provided on both sides of the titration device as transmission windows. After passing through the two infrared lenses in turn, it is transmitted out, and the power signal intensity at this time is detected by the infrared power detector as the base signal S 0 , this is because the absorption and reflection of the infrared window itself will lose part of the probe light, so without injecting H 2 Space-time measurement once;

[0057] (2), the gas H is passed into the titration device 2 , the mixed gas containing F atoms and H 2 Rapid reaction occurs F+H 2 →HF+H;

[0058] When the F atom flows th...

technical field

[0001] The present invention mainly relates to the detection field of F atoms, in particular to a detection method and a detection device of F atom concentration, and is especially suitable for the diagnosis of electro-excited HF / DF chemical lasers, all-gas-phase oxygen-iodine chemical lasers, and the engraving of F-containing plasmas. Etching processing silicon-containing semiconductor field. Background technique

[0002] For electrically excited HF / DF lasers and all-gas-phase oxygen-iodine chemical lasers, the yield and yield of F atoms are the most important performance indicators of the core device - the discharge tube, and the direct decisive factor for the power and efficiency of the laser. F atom online detection technology is very important for The improvement and optimization of the laser is of great significance. In the field of semiconductor etching processing, in order to improve the processing efficiency and effect, the research on how to effici...

Examples

Embodiment Construction

[0054] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.

[0055] like figure 1 And shown in Fig. 2, the detection method of a kind of F atom concentration of the present invention, its steps are:

[0056] (1) A mixed gas containing F atoms is passed into the titration device. Infrared lenses are provided on both sides of the titration device as transmission windows. After passing through the two infrared lenses in turn, it is transmitted out, and the power signal intensity at this time is detected by the infrared power detector as the base signal S 0 , this is because the absorption and reflection of the infrared window itself will lose part of the probe light, so without injecting H 2 Space-time measurement once;

[0057] (2), the gas H is passed into the titration device 2 , the mixed gas containing F atoms and H 2 Rapid reaction occurs F+H 2 →HF+H;

[0058] When the F atom flows th...

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