A two-wire square cutting machine for single crystal silicon rods

Abstract

The present invention relates to a two-wire square cutting machine for single crystal silicon rods, belonging to the technical field of single crystal silicon rod processing equipment, comprising a base, on which a loading assembly, a unloading assembly, a cutting head mechanism, a clamping mechanism and a feed slide assembly are arranged, the loading assembly and the unloading assembly are connected to the base through a supporting assembly, the feed slide assembly is arranged above the base through a column frame, the clamping mechanism is fixedly arranged below the feed slide assembly, and the cutting lines bypass the cutting head mechanism to form parallel lines to cut the single crystal silicon rods. Compared with the traditional four-wire square cutting machine, the present invention adopts two cutting lines for square cutting, which not only optimizes the cutting head mechanism to make the operation more stable, but also can adapt to the square cutting requirements of different margins of the edge skin and the ridge line, realizes the stepless adjustment of the cutting line distance, improves the cutting efficiency of the equipment, and is fully automated. It has the characteristics of high production capacity, stable cutting quality and low labor intensity, and has far-reaching significance for realizing industrial automation.

Description

Technical Field

[0001] The invention belongs to the technical field of single crystal silicon rod processing equipment, and in particular relates to a two-wire square cutting machine for single crystal silicon rods. Background Art

[0002] The manufacturing process of silicon wafers used in solar panels is divided into several steps: crystal pulling, truncation, squaring, grinding, and slicing. Crystal pulling is to generate cylindrical single-crystal silicon rods in a crystal pulling furnace by chemical deposition, with a maximum length of 6 meters; truncation refers to cutting the single-crystal silicon rods pulled out of the crystal into small sections of varying lengths (100-700mm); squaring refers to cutting the truncated single-crystal silicon rods of different lengths into rectangular shapes, producing four irregularly shaped (arc-shaped cross-sections ⌒) residual materials (called edge skins in the industry); grinding refers to the process of grinding and polishing the four surfaces of the rectangular single-crystal silicon rods after squaring with a grinding tool, and rounding the four edges. Slicing refers to cutting the ground rectangular single-crystal silicon rods into silicon wafers about 0.15mm thick for the final production of solar panels. At present, the industry mostly uses "four-wire" squaring machines to achieve the squaring of single crystal silicon rods, that is, the cutting lines at the cutting machine head form a "well" shape. This type of equipment has a complex structure and high cost. In addition, the spacing between the cutting lines is fixed, and it can only be used to cut off the edge skin but cannot cut off the edges of the silicon rod. Summary of the invention

[0003] In view of the various deficiencies in the prior art and in order to solve the above-mentioned problems, a two-wire square cutting machine for single crystal silicon rods is now proposed.

[0004] To achieve the above object, the present invention provides the following technical solutions:

[0005] A two-wire square cutting machine for a single crystal silicon rod comprises a base, on which a loading assembly, a unloading assembly, a cutting head mechanism, a clamping mechanism and a feed slide assembly are arranged, the loading assembly and the unloading assembly are connected to the base through a supporting assembly, the supporting assembly is arranged perpendicular to the feeding direction of the feed slide assembly, the loading assembly and the unloading assembly are respectively located at two ends of the supporting assembly, and the feeding directions of the loading assembly and the unloading assembly are perpendicular to the feeding direction of the feed slide assembly;

[0006] The feed slide assembly is arranged above the base through a column frame, the clamping mechanism is fixed below the feed slide assembly, and the clamping mechanism and the slide mechanism feed synchronously, the cutting head mechanism is located on one side of the support assembly, and the cutting line bypasses the cutting head mechanism to form a parallel line to cut the single crystal silicon rod.

[0007] Furthermore, the loading assembly includes a loading fixing plate, a first clamp and a second clamp, the first clamp and / or the second clamp are movably connected to the loading fixing plate, the longitudinal sections of the first clamp and the second clamp are both V-shaped, and the V-shaped openings of the two are arranged relative to each other to form a space for accommodating single crystal silicon rods, and a loading support block is provided on the upper surface of the loading fixing plate and between the first clamp and the second clamp.

[0008] Furthermore, the material unloading assembly includes a material unloading fixed plate, a material unloading cylinder, a support plate and a material unloading support block with an L-shaped longitudinal cross-section, the cylinder end of the material unloading cylinder is fixedly connected to the upper surface of the material unloading fixed plate, and the piston end thereof is fixedly connected to the lower surface of the support plate, the number of the material unloading support blocks is set to two, and the two material unloading support blocks are arranged on the upper surface of the support plate opposite to each other, and a guide column is provided between the material unloading fixed plate and the support plate.

[0009] Furthermore, the support assembly includes a pad, a loading electric cylinder module and a unloading electric cylinder module, a loading assembly support plate is provided on the guide rail slider of the loading electric cylinder module, a unloading assembly support plate fixedly connected to a unloading fixed plate is provided on the guide rail slider of the unloading electric cylinder module, a loading buffer assembly is provided on the loading assembly support plate, the loading buffer assembly includes a first buffer seat, a second buffer seat and a buffer spring, the bottom of the first buffer seat is fixedly connected to the loading assembly support plate, and the top thereof is a free end, the bottom of the second buffer seat is a free end, and the top thereof is fixedly connected to the loading fixed plate, and the two ends of the buffer spring are respectively connected to the first buffer seat and the second buffer seat.

[0010] Furthermore, the feed slide assembly includes a slide, a slide drive motor and a feed screw. The two ends of the feed screw are fixedly connected to the column frame through a screw support frame. The outer sleeve of the feed screw is provided with a sliding seat that is threadedly matched with the slide. The bottom of the sliding seat is fixedly connected to the slide, and one side of the sliding seat is connected to the output end of the slide drive motor. The slide is slidably connected to the column frame through a slider located below it.

[0011] Furthermore, the clamping mechanism includes a fixed chuck, a movable chuck and a clamp edge skin assembly, the top end of the fixed chuck is fixedly connected to the slide, the top end of the movable chuck is slidably connected to the slide, the fixed chuck and the movable chuck are both floating chucks, and the floating chuck includes a chuck body, a diaphragm arranged on the rear side of the chuck body, and a ball head arranged between the chuck body and the diaphragm.

[0012] Furthermore, the number of the side skin clamping assemblies is set to two, and the two side skin clamping assemblies are respectively connected to the fixed chuck and the movable chuck, the side skin clamping assembly includes at least two side skin clamping cylinders, and the at least two side skin clamping cylinders are located on the periphery of the fixed chuck or the movable chuck, and at least one of the two side skin clamping assemblies is connected to the side skin rotating element.

[0013] Furthermore, the cutting head mechanism includes a left cutting component, a right cutting component and a winding component. The left cutting component and the right cutting component are symmetrically distributed, and a clearance is provided between the two for the single crystal silicon rod to pass through. The left cutting component and the right cutting component both include a wire mesh bracket and a first cutting wheel and a second cutting wheel vertically distributed on the wire mesh bracket. The first cutting wheel and the second cutting wheel are located in the same plane. The wire mesh brackets located at the left cutting component and the right cutting component are arranged opposite to each other. The cutting wire sequentially passes around the first cutting wheel and the second cutting wheel located at the left cutting component and the right cutting component to form parallel lines for cutting single crystal silicon rods. The bottom of the wire mesh bracket is slidably connected to the base.

[0014] Furthermore, the winding mechanism includes a wire take-up reel and a wire pay-off reel, and the wire take-up reel and the wire pay-off reel are both arranged along the horizontal direction and parallel to the wire mesh support, and the two are located on different sides of the cutting mechanism, and the wire take-up reel and the wire pay-off reel are both provided with a winding drive assembly and a wire arrangement drive assembly.

[0015] Furthermore, a side of the base away from the supporting component is provided with an edge skinning component, the edge skinning component includes an edge skinning conveyor and a material receiving box, the edge skinning conveyor includes an edge skinning motor, a belt, a ramp and a material receiving box, the edge skinning motor drives the belt to operate, the top of the material receiving box is arranged opposite to the parallel line formed by the cutting line, and the bottom end thereof is connected to the ramp, and the ramp is fixedly connected to the frame of the edge skinning conveyor.

[0016] The beneficial effects of the present invention are:

[0017] Compared with the traditional four-wire squarer, the present application adopts two cutting lines for square cutting, which not only optimizes the cutting head mechanism to make the operation more stable, but also can adapt to the square cutting needs of different margins of the edge skin and the ridge line, realize the infinitely adjustable cutting line distance, improve the cutting efficiency of the equipment, and operate fully automatically, with the characteristics of high production capacity, stable cutting quality and low labor intensity. In addition, the floating chuck can adapt to the inclination of the end face of the single crystal silicon rod, realize the complete fit between the clamping mechanism and the end face of the single crystal silicon rod, and improve the clamping stability, which has far-reaching significance for the realization of industrial automation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention;

[0019] Figure 2 It is a schematic diagram of the structure of the feeding component;

[0020] Figure 3 It is a schematic diagram of the structure of the blanking component;

[0021] Figure 4 is a schematic diagram of the support component structure;

[0022] Figure 5It is a schematic diagram of the combination of the clamping mechanism and the feed slide assembly;

[0023] Figure 6 It is a schematic diagram of the floating chuck structure;

[0024] Figure 7 It is a schematic diagram of the cutting head mechanism structure;

[0025] Figure 8 It is a schematic diagram of the cutting line direction.

[0026] In the attached drawings: 1-base, 2-loading assembly, 3-unloading assembly, 4-support assembly, 5-cutting head mechanism, 6-clamping mechanism, 7-feed slide assembly, 8-column frame, 9-edge skin assembly, 10-cutting line;

[0027] 201-feeding fixed plate, 202-first clamping jaw, 203-second clamping jaw, 204-feeding support block, 205-thrust cylinder, 206-support plate;

[0028] 301- material unloading fixing plate, 302- material unloading cylinder, 303- support plate, 304- material unloading support block, 305- guide column, 306- upper column, 307- lower column;

[0029] 401- pad, 402- feeding electric cylinder module, 403- unloading electric cylinder module, 404- feeding assembly support plate, 405- unloading assembly support plate, 406- first buffer seat, 407- second buffer seat, 408- buffer spring;

[0030] 501-left cutting assembly, 502-right cutting assembly, 503-wire net support, 504-first cutting wheel, 505-second cutting wheel, 506-receiving drum, 507-paying drum, 508-tension support, 509-tension driving element, 510 tension wheel, 511-line wheel, 512-first transition wheel, 513-margin detection probe, 514-detection cylinder;

[0031] 601-fixed chuck, 602-moving chuck, 603-side clamp cylinder, 604-chuck body, 605-diaphragm, 606-ball head, 607-chuck rotating motor, 608-moving chuck center axis, 609-moving chuck rotating bearing sleeve, 610-moving chuck bracket, 611-moving chuck lead screw, 612-moving chuck feed motor;

[0032] 701-slide, 702-slide drive motor, 703-feed screw, 704-screw support frame, 705-sliding block, 706-sliding seat;

[0033] 901-side skin motor, 902-belt, 903-ramp. DETAILED DESCRIPTION

[0034] In order to enable those skilled in the art to better understand the technical solution of the present invention, the technical solution of the present invention is clearly and completely described below in conjunction with the accompanying drawings of the present invention. Based on the embodiments in this application, other similar embodiments obtained by ordinary technicians in this field without making creative work should all fall within the scope of protection of this application. In addition, the directional words mentioned in the following embodiments, such as "up", "down", "left", "right", etc., are only reference to the directions of the accompanying drawings. Therefore, the directional words used are used to illustrate rather than limit the invention.

[0035] Embodiment 1:

[0036] refer to Figure 1 A two-wire square cutting machine for a single crystal silicon rod comprises a base 1, on which a column frame 8 is provided, on which a loading assembly 2, a unloading assembly 3, a cutting head mechanism 5, a clamping mechanism 6, a feed slide assembly 7 and an edge skinning assembly 9 are provided. Specifically: the single crystal silicon rod is transported to the target position through the loading component 2, the feed slide component 7 drives the clamping mechanism 6 to feed and clamp the single crystal silicon rod located at the loading component 2, the clamping mechanism 6 clamps the single crystal silicon rod to the cutting head mechanism 5 for a first square cutting, and then the clamping mechanism 6 clamps the single crystal silicon rod to the target position once and rotates 90°, the clamping mechanism 6 clamps the single crystal silicon rod to the cutting head mechanism 5 for a second square cutting, the clamping mechanism 6 clamps the single crystal silicon rod to the target position for a second time and rotates 45° to cut off the edges, rotates again to cut off another pair of edges, and finally forms a single crystal silicon block, the clamping mechanism 6 places the single crystal silicon block on the unloading component 3 to complete the unloading, and at the same time, the edge skin formed by the first square cutting and the second square cutting is output through the edge skin connecting component 9.

[0037] refer to Figures 1 to 3 The loading assembly 2 and the unloading assembly 3 are connected to the base 1 through the support assembly 4, and the support assembly 4 is arranged perpendicular to the feeding direction of the feed slide assembly 7. Specifically, the loading assembly 2 and the unloading assembly 3 are respectively located at both ends of the support assembly 4, and the support assembly 4 can drive the loading assembly 2 and the unloading assembly 3 to feed respectively, and the feeding direction of the loading assembly 2 and the unloading assembly 3 is perpendicular to the feeding direction of the feed slide assembly 7.

[0038] refer to Figure 2, the loading assembly 2 includes a loading fixed plate 201, a first clamp 202 and a second clamp 203, and the first clamp 202 and / or the second clamp 203 are movably connected to the loading fixed plate 201, that is, the first clamp 202 and the second clamp 203 can move toward each other to change the distance. In this embodiment, the bottom of the first clamp 202 is fixedly connected to the loading fixed plate 201, and the bottom of the second clamp 203 is movably connected to the loading fixed plate 201 through a slide rail and a slider, and the second clamp 203 is connected to a thrust cylinder 205 for pushing the second clamp 203 closer to or away from the first clamp 202. In order to improve the clamping stability of the single crystal silicon rod, the longitudinal sections of the first clamp 202 and the second clamp 203 are both V-shaped, and the V-shaped openings of the two are arranged relatively to form a space for accommodating the single crystal silicon rod. At the same time, in order to limit the position of the single crystal silicon rod placed in the space, a support plate 206 is provided on one side of the loading fixing plate 201 and is arranged opposite to the space for accommodating the single crystal silicon rod, that is, the support plate 206 abuts against one end surface of the single crystal silicon rod, thereby limiting the position of the single crystal silicon rod. In addition, a plurality of loading support blocks 204 are provided on the upper surface of the loading fixing plate 201 and located between the first clamping jaw 202 and the second clamping jaw 203, and two loading support blocks 204 form a support block group, and the longitudinal section of the support block group is V-shaped to adapt to the circumferential curvature of the single crystal silicon rod and support the single crystal silicon rod.

[0039] refer to Figure 3 The material unloading assembly 3 comprises a material unloading fixed plate 301, a material unloading cylinder 302, a support plate 303 and a material unloading support block 304 with an L-shaped longitudinal section. The cylinder end of the material unloading cylinder 302 is fixedly connected to the upper surface of the material unloading fixed plate 301, and the piston end thereof is fixedly connected to the lower surface of the support plate 303. That is, the height of the material unloading assembly 3 can be adjusted by the extension and contraction of the material unloading cylinder 302. The material unloading support blocks 304 are provided in two numbers, and the two material unloading support blocks 304 are oppositely arranged on the upper surface of the support plate 303 to form a groove for accommodating the single crystal silicon block.

[0040] A guide column 305 for guiding is provided between the blanking fixed plate 301 and the supporting plate 303. Preferably, the guide column 305 includes an upper column 306 and a lower column 307, wherein a cavity is provided inside the upper column 306, and the inner diameter of the upper column 306 is greater than the outer diameter of the lower column 307, the bottom of the lower column 307 is fixedly connected to the blanking fixed plate 301, and the top of the lower column 307 is embedded in the cavity of the upper column 306, a flange is provided on the outer wall of the lower column 307, a groove is provided on the inner wall of the upper column 306, the flange is embedded in the groove, and the flange and the groove are both arranged in the vertical direction, and at the same time, the length of the lower column 307 embedded in the cavity of the upper column 306 is greater than the maximum stroke of the blanking cylinder 302, that is, during the height adjustment process, the flange is always embedded in the groove to prevent the upper column 306 and the lower column 307 from being separated.

[0041] refer to Figure 4 The support assembly 4 includes a pad 401, a loading electric cylinder module 402 and a unloading electric cylinder module 403. The guide rail slider of the loading electric cylinder module 402 is provided with a loading assembly support plate 404 connected to the loading assembly 2 to drive the loading assembly 2 to feed. The guide rail slider of the unloading electric cylinder module 403 is provided with a unloading assembly support plate 405 fixedly connected to the unloading fixed plate 301 to drive the unloading assembly 3 to feed. At the same time, the loading electric cylinder module 402 and the unloading electric cylinder module 403 are arranged opposite to each other, and both are located at the two ends of the pad 401, that is, the initial positions of the loading assembly 2 and the unloading assembly 3 are both located at the end of the pad 401. The pad 401 is arranged along the feeding direction perpendicular to the feed slide assembly 7, and the loading electric cylinder module 402 and the unloading electric cylinder module 403 are driven by motors respectively.

[0042] During the specific operation, first, place the single crystal silicon rod above the support block group, start the thrust cylinder 205, and push the second clamp 203 close to the first clamp 202 to clamp the silicon rod. Then, the loading electric cylinder module 402 drives the loading component 2 to feed to the target position on the base 1, and the clamping mechanism 6 feeds to the target position to clamp the single crystal silicon rod. At this time, the second clamp 203 is away from the first clamp 202, and the loading electric cylinder module 402 drives the loading component 2 to reset, and the clamping mechanism 6 clamps the single crystal silicon rod to the cutting head mechanism to perform edge and ridge removal to complete the square opening to form a single crystal silicon block. Finally, the unloading electric cylinder module 403 drives the unloading component 3 to feed to the target position, and the clamping mechanism 6 places the single crystal silicon block between the two unloading support blocks 304. The clamping mechanism 6 is reset, and at the same time, the unloading electric cylinder module 403 drives the unloading component 3 to reset to complete the unloading operation. At the same time, in the process of the clamping mechanism 6 feeding to the target position to clamp the single crystal silicon rod, in order to avoid the clamping force pushing the loading assembly 2 to cause displacement, a loading buffer assembly is provided on the loading assembly support plate 404, and the loading buffer assembly includes a first buffer seat 406, a second buffer seat 407 and a buffer spring 408. The bottom of the first buffer seat 406 is fixedly connected to the loading assembly support plate 404, and the top thereof is a free end. The bottom of the second buffer seat 407 is a free end, and the top thereof is fixedly connected to the loading fixed plate 201. The two ends of the buffer spring 408 are respectively connected to the first buffer seat 406 and the second buffer seat 407 to buffer the clamping force.

[0043] Embodiment 2:

[0044] refer to Figure 1 , Figure 5 and Figure 6 The feed slide assembly 7 is arranged above the base 1 through a column frame 8, and the clamping mechanism 6 is fixedly arranged below the feed slide assembly 7, and the clamping mechanism 6 and the slide mechanism 7 are fed synchronously.

[0045] Specifically, the feed slide assembly 7 includes a slide 701, a slide drive motor 702 and a feed screw 703. The two ends of the feed screw 703 are fixedly connected to the column frame 8 through a screw support frame 704, respectively. The outer sleeve of the feed screw 703 is provided with a sliding seat 706 that is threadedly matched with the slide seat 706. The bottom of the sliding seat 706 is fixedly connected to the slide 701, and one side of the sliding seat 706 is connected to the output end of the slide drive motor 702. At the same time, the slide 701 is slidably connected to the slide rail on the column frame 8 through a slider 705 located below it. That is to say, starting the slide drive motor 702 can drive the sliding seat 706 and the slide 701 to feed along the column frame 8, and at the same time drive the clamping mechanism 6 to feed as a whole.

[0046] The clamping mechanism 6 includes a fixed clamp 601, a movable clamp 602 and a clamp edge skin assembly. The top of the fixed clamp 601 is fixedly connected to the slide 701, and the top of the movable clamp 602 is slidably connected to the slide 701. That is to say, the spacing between the fixed clamp 601 and the movable clamp 602 is adjustable to clamp the single crystal silicon rod. At the same time, in order to improve the fit between the fixed clamp 601, the movable clamp 602 and the end face of the single crystal silicon rod, the fixed clamp 601 and the movable clamp 602 are both floating clamps. The floating clamp includes a clamp body 604, a diaphragm 605 arranged at the rear side of the clamp body 604, and a ball head 606 arranged between the clamp body 604 and the diaphragm 605. With the help of the adaptive function between the ball head 606, the clamp body 604, and the diaphragm 605, the floating clamp is completely fitted with the end face of the single crystal silicon rod, thereby improving the clamping stability. Meanwhile, the movable chuck 602 includes a chuck rotating motor 607 in addition to the floating chuck. A movable chuck central axis 608 is fixedly connected to the side of the diaphragm 605, and the movable chuck central axis 608 is connected to the output end of the chuck rotating motor 607, that is, the chuck rotating motor 607 can drive the movable chuck 602 to rotate. The movable chuck 602 is slidably connected to the slide 701 through the movable chuck bracket 610. Here, the sliding connection is preferably that the movable chuck feed motor 612 drives the movable chuck lead screw 611. The movable chuck bracket 610 is sleeved on the movable chuck lead screw 611 and the two are threadedly matched. A movable chuck bearing is provided between the movable chuck bracket 610 and the movable chuck central axis 608. That is, the movable chuck feed motor 612 can drive the movable chuck 602 to feed as a whole, and at the same time, the movable chuck 602 can rotate relative to the movable chuck bracket 610. The side of the diaphragm 605 located in the fixed chuck 601 is connected to the fixed chuck center axis, and the fixed chuck 601 is fixedly connected to the slide 701 through a fixed chuck bracket, and a fixed chuck bearing is provided between the fixed chuck center axis and the fixed chuck bracket, that is, the fixed chuck 601 can rotate relative to the fixed chuck bracket, that is, the fixed chuck 601 can be driven to rotate synchronously during the rotation of the movable chuck 602.

[0047] In order to clamp the edge skin of the single crystal silicon rod, the fixed chuck 601 and the movable chuck 602 are both provided with an edge skin clamping assembly, and the edge skin clamping assembly includes at least two edge skin clamping cylinders 603, and the at least two edge skin clamping cylinders 603 are located on the periphery of the fixed chuck 601 or the movable chuck 602. Among them, the periphery of the fixed chuck bracket is provided with a fixed chuck rotating bearing, and the periphery of the fixed chuck rotating bearing is provided with a fixed chuck rotating bearing sleeve, and the edge skin clamping cylinder 603 located at the fixed chuck 601 is fixedly connected to the fixed chuck rotating bearing sleeve, and at the same time, the periphery of the movable chuck bracket is provided with a movable chuck rotating bearing, and the periphery of the movable chuck rotating bearing is provided with a movable chuck rotating bearing sleeve 609, and the edge skin clamping cylinder 603 located at the movable chuck 602 is fixedly connected to the periphery of the movable chuck rotating bearing sleeve 609. In addition, at least one of the two edge skin clamping assemblies is connected to the edge skin rotating element 614. In this embodiment, the two edge skin clamping components are both provided with edge skin rotating elements 614, and an edge skin clamping cylinder 603 is respectively provided above and below the fixed chuck 601 and the movable chuck 602. The edge skin clamping cylinder 603 located at the fixed chuck 601 has an automatic locking function to prevent the edge skin material from being displaced and causing edge collapse due to inconsistent air pressure at both ends during cutting. The edge skin clamping cylinder 603 is connected to the edge skin rotating element 614 through a connecting rod 613, that is, the edge skin clamping cylinder 603 can rotate relative to the fixed chuck 601 and the movable chuck 602. In addition, the initial positions of the two edge skin clamping cylinders 603 located at the fixed chuck 601 and the movable chuck 602 are that the two are arranged along the vertical direction.

[0048] During operation, the fixed chuck 601 and the movable chuck 602 clamp the single crystal silicon rod and feed it to the cutting head mechanism 5, then, the edge skin clamping cylinder 603 rotates 90° and the piston extends to clamp the edge skin for one square cutting, the piston of the edge skin clamping cylinder 603 retracts, and the edge skin falls off, then, the clamping mechanism 6 clamps the single crystal silicon rod and resets it to the target position once, the movable chuck 602 rotates 90°, the piston of the edge skin clamping cylinder 603 extends to clamp another pair of edge skins, the clamping mechanism 6 clamps the single crystal silicon rod to the cutting head mechanism 5 for a second square cutting, the piston retracts, the edge skin falls off, the clamping mechanism 6 clamps the single crystal silicon rod and resets it to the target position for the second time, the movable chuck 602 rotates 45°, the edge skin clamping cylinder 603 resets to the initial position, resets to the target position after cutting the edge line, and the movable chuck 602 rotates again to cut off another pair of edge lines, finally forming a single crystal silicon block.

[0049] In some other embodiments, one of the two side skin clamping components is connected to the side skin rotating element 614, and the other one is not provided with the side skin rotating element 614, such as the side skin rotating element 614 is not provided at the fixed clamp 601. At this time, the two side skin clamping cylinders 603 located at the fixed clamp 601 are located in the same horizontal plane as the fixed clamp 601, and the side skin rotating element 614 is selected from a motor or a cylinder.

[0050] Embodiment three:

[0051] refer to Figure 1 , Figure 7 and Figure 8 The cutting head mechanism 5 is located at one side of the support assembly 4, and the cutting line 10 bypasses the cutting head mechanism 5 to form a parallel line for cutting the single crystal silicon rod. That is to say, the cutting head mechanism 5 and the support assembly 4 are respectively located at the two ends of the process of the feed slide assembly 7. The cutting head mechanism 5 includes a left cutting assembly 501, a right cutting assembly 502 and a winding assembly. The left cutting assembly 501 and the right cutting assembly 502 are symmetrically distributed, and a clearance is provided between the two for the single crystal silicon rod to pass through. The fixed clamp 601 and the movable clamp 602 clamp the single crystal silicon rod through the clearance gap to achieve square cutting.

[0052] The left cutting assembly 501 and the right cutting assembly 502 both include a wire mesh support 503 and a first cutting wheel 504 and a second cutting wheel 505 vertically distributed on the wire mesh support 503. The first cutting wheel 504 and the second cutting wheel 505 are located in the same plane. The first cutting wheel 504 is connected to the cutting motor, that is, the first cutting wheel 504 serves as a driving wheel and the second cutting wheel 505 serves as a driven wheel. The wire mesh supports located in the left cutting assembly 501 and the right cutting assembly 502 are arranged opposite to each other, and the cutting line 10 sequentially passes around the first cutting wheel and the second cutting wheel located in the left cutting assembly 501 and the right cutting assembly 502 to form parallel lines for cutting single crystal silicon rods. In this embodiment, the parallel lines are arranged along the vertical direction. In some other embodiments, the parallel lines may be arranged along the horizontal direction or inclined.

[0053] At the same time, the bottom of the wire mesh support 503 is slidably connected to the base 1, that is, the spacing between the left cutting assembly 501 and the right cutting assembly 502 is adjustable, that is, the cutting line spacing is adjustable, which is highly practical. The top of the wire mesh support 503 is horizontally provided with a first transition wheel 512, and the lowest point of the wheel groove of the first cutting wheel 504 is located in the same horizontal plane as the wheel groove of the first transition wheel 512. The bottom of the wire mesh support 503 is provided with a second transition wheel parallel to the first transition wheel 512 and located in the clearance, and the lowest point of the wheel groove of the second cutting wheel 505 is located in the same horizontal plane as the wheel groove of the second transition wheel. In order to ensure the tension of the cutting line 10, the two wire mesh brackets 503 are provided with a tension bracket 508 perpendicular to the side away from the clearance. The tension bracket 508 is provided with a tension driving element 509, a tension wheel 510, and a wire arrangement wheel 511. The tension driving element 509 drives the tension wheel 510 to rotate to achieve the effect of tensioning the cutting line 10. The wire arrangement wheel 511 is tilted to achieve the reversal of the cutting line 10. The tension driving element 509 is a motor or a cylinder.

[0054] In addition, in order to detect the actual margin size after cutting the single crystal silicon rod, check whether the size after cutting is qualified and whether the cutting spacing needs to be adjusted, a margin detection component is provided on the wire mesh bracket 503, and the margin detection component includes a margin detection probe 513 and a detection cylinder 514. The margin detection probe 513 is connected to the piston end of the detection cylinder 514, and the detection cylinder 514 pushes the margin detection probe 513 to generate displacement to detect the actual margin size after cutting the single crystal silicon rod and store it in the control system to establish a cutting database.

[0055] The winding mechanism includes a wire take-up reel 506 and a wire pay-off reel 507, and the wire take-up reel 506 and the wire pay-off reel 507 are both arranged along the horizontal direction and parallel to the wire mesh support 503, and the two are located on different sides of the cutting mechanism, and the wire take-up reel 506 and the wire pay-off reel 507 are both provided with a winding drive assembly and a wire arranging drive assembly, and the winding drive assembly is used to drive the wire take-up reel 506 and the wire pay-off reel 507 to rotate to realize the reeling and releasing of the cutting line 10, and the wire arranging drive assembly is used to drive the wire take-up reel 506 and the wire pay-off reel 507 to produce displacement to realize wire arranging. Taking a single wire mesh bracket 503 as an example, the cutting line 10 is led to the wire arrangement wheel 511, the tension wheel 510, the first transition wheel 512, the first cutting wheel 504, and the second cutting wheel 505 in sequence via the wire pay-off drum 507. Finally, the cutting line 10 is led to the second transition wheel of another wire mesh bracket via the second transition wheel. The direction of the cutting line 10 in the other wire mesh bracket is opposite to the above direction. Finally, the cutting line 10 is connected to the wire take-up drum 506.

[0056] Embodiment 4:

[0057] refer to Figure 1 A side of the base 1 away from the supporting component 4 is provided with an edge skin component 9, and the edge skin component 9 includes an edge skin conveyor and a material receiving box. The edge skin conveyor includes an edge skin motor 901, a belt 902, a slope 903 and a material receiving box. The edge skin motor 901 drives the belt 902 to operate. The top of the material receiving box is arranged opposite to the parallel line formed by the cutting line 10, which is convenient for holding the edge skin and the edge line. The bottom end of the material receiving box is connected to the slope 903, and the slope 903 is fixedly connected to the frame of the edge skin conveyor.

[0058] The present invention has been described in detail above. The above description is only a preferred embodiment of the present invention and should not limit the scope of implementation of the present invention. That is, all equivalent changes and modifications made within the scope of this application should still fall within the scope of the present invention.

Claims

1. A two-wire square cutting machine for single crystal silicon rods, comprising a base (1), on which a loading assembly (2), a unloading assembly (3), a cutting head mechanism (5), a clamping mechanism (6) and a feed slide assembly (7) are arranged, characterized in that: The loading assembly (2) and the unloading assembly (3) are connected to the base (1) via a support assembly (4); the support assembly (4) is arranged perpendicular to the feeding direction of the feed slide assembly (7); the loading assembly (2) and the unloading assembly (3) are respectively located at two ends of the support assembly (4); and the feeding directions of the loading assembly (2) and the unloading assembly (3) are perpendicular to the feeding direction of the feed slide assembly (7); The material unloading assembly (3) comprises a material unloading fixed plate (301), a material unloading cylinder (302), a support plate (303) and a material unloading support block (304) having an L-shaped longitudinal section, wherein the cylinder end of the material unloading cylinder (302) is fixedly connected to the upper surface of the material unloading fixed plate (301), and the piston end of the material unloading cylinder (302) is fixedly connected to the lower surface of the support plate (303), the number of the material unloading support blocks (304) is set to two, and the two material unloading support blocks (304) are arranged on the upper surface of the support plate (303) opposite to each other, and a guide column (305) is arranged between the material unloading fixed plate (301) and the support plate (303); The support assembly (4) comprises a pad (401), a loading electric cylinder module (402) and a unloading electric cylinder module (403); a loading assembly support plate (404) is provided on the guide rail slider of the loading electric cylinder module (402); a unloading assembly support plate (405) fixedly connected to the unloading fixed plate (301) is provided on the guide rail slider of the unloading electric cylinder module (403); a loading buffer assembly is provided on the loading assembly support plate (404); the loading buffer assembly comprises a first buffer seat (406), a second buffer seat (407) and a buffer spring (408); the bottom of the first buffer seat (406) is fixedly connected to the loading assembly support plate (404), and the top thereof is a free end; the bottom of the second buffer seat (407) is a free end, and the top thereof is fixedly connected to the loading fixed plate (201); and the two ends of the buffer spring (408) are respectively connected to the first buffer seat (406) and the second buffer seat (407); The feed slide assembly (7) is arranged above the base (1) through a column frame (8), the clamping mechanism (6) is fixedly arranged below the feed slide assembly (7), and the clamping mechanism (6) and the feed slide assembly (7) are fed synchronously, the cutting head mechanism (5) is located on one side of the support assembly (4), and the cutting line (10) bypasses the cutting head mechanism (5) to form a parallel line to cut the single crystal silicon rod; The clamping mechanism (6) comprises a fixed chuck (601), a movable chuck (602) and a side skin clamping assembly, wherein the side skin clamping assembly is provided in two pieces, and the two side skin clamping assemblies are respectively connected to the fixed chuck (601) and the movable chuck (602), and the side skin clamping assembly comprises at least two side skin clamping cylinders (603), and the at least two side skin clamping cylinders (603) are located at the periphery of the fixed chuck (601) or the movable chuck (602), and at least one of the two side skin clamping assemblies is connected to the side skin rotating element (614), and the side skin clamping cylinder (603) can rotate relative to the fixed chuck (601) and the movable chuck (602); The cutting head mechanism (5) comprises a symmetrically distributed left cutting assembly (501) and a right cutting assembly (502); the spacing between the left cutting assembly (501) and the right cutting assembly (502) is adjustable, and the cutting line distance is adjustable to meet the requirements of squaring different margins of the edge skin and the edge line; The left cutting assembly (501) and the right cutting assembly (502) both comprise a wire mesh support (503), a margin detection assembly being provided on the wire mesh support (503), the margin detection assembly comprising a margin detection probe (513) and a detection cylinder (514), the margin detection probe (513) being connected to a piston end of the detection cylinder (514), the detection cylinder (514) pushing the margin detection probe (513) to generate displacement so as to detect the actual margin size after the single crystal silicon rod is cut.

2. A two-wire single crystal silicon rod squaring machine according to claim 1, characterized in that: The loading assembly (2) comprises a loading fixing plate (201), a first clamp (202) and a second clamp (203); the first clamp (202) and / or the second clamp (203) are movably connected to the loading fixing plate (201); the longitudinal sections of the first clamp (202) and the second clamp (203) are both V-shaped, and the V-shaped openings of the two are arranged relative to each other to form a space for accommodating a single crystal silicon rod; a loading support block (204) is provided on the upper surface of the loading fixing plate (201) and between the first clamp (202) and the second clamp (203).

3. A two-wire single crystal silicon rod squaring machine according to claim 1, characterized in that: The feed slide assembly (7) comprises a slide (701), a slide drive motor (702) and a feed screw (703); the two ends of the feed screw (703) are respectively fixedly connected to the column frame (8) via a screw support frame (704); the outer sleeve of the feed screw (703) is provided with a sliding seat (706) threadedly matched with the feed screw (703); the bottom of the sliding seat (706) is fixedly connected to the slide (701), and one side thereof is connected to the output end of the slide drive motor (702); the slide (701) is slidably connected to the column frame (8) via a slider (705) located below the slide (701).

4. A two-wire single crystal silicon rod squaring machine according to claim 3, characterized in that: The top end of the fixed chuck (601) is fixedly connected to the slide table (701), and the top end of the movable chuck (602) is slidably connected to the slide table (701). Both the fixed chuck (601) and the movable chuck (602) are floating chucks, and the floating chuck comprises a chuck body (604), a diaphragm (605) arranged on the rear side of the chuck body, and a ball head (606) arranged between the chuck body (604) and the diaphragm (605).

5. The two-wire single crystal silicon rod squaring machine according to claim 1, characterized in that: The cutting head mechanism (5) further comprises a winding assembly, a clearance gap for the single crystal silicon rod to pass through is provided between the left cutting assembly (501) and the right cutting assembly (502), the left cutting assembly (501) and the right cutting assembly (502) further comprising a first cutting wheel (504) and a second cutting wheel (505) vertically distributed on the wire mesh support (503), the first cutting wheel (504) and the second cutting wheel (505) being located in the same plane, the wire mesh supports located on the left cutting assembly (501) and the right cutting assembly (502) being arranged opposite to each other, the cutting wire (10) sequentially passes around the first cutting wheel and the second cutting wheel located on the left cutting assembly (501) and the right cutting assembly (502) to form a parallel line for cutting the single crystal silicon rod, and the bottom of the wire mesh support (503) is slidably connected to the base (1).

6. A two-wire single crystal silicon rod squaring machine according to claim 5, characterized in that: The wire winding assembly comprises a wire take-up reel (506) and a wire pay-off reel (507), the wire take-up reel (506) and the wire pay-off reel (507) are both arranged in a horizontal direction and parallel to the wire net support (503), and are located on different sides of the cutting mechanism, and the wire take-up reel (506) and the wire pay-off reel (507) are both provided with a wire winding drive assembly and a wire arrangement drive assembly.

7. A two-wire single crystal silicon rod squaring machine according to any one of claims 1 to 6, characterized in that: A side skinning assembly (9) is provided on a side of the base (1) away from the support assembly (4), the side skinning assembly (9) comprising a side skinning conveyor and a material receiving box, the side skinning conveyor comprising a side skinning motor (901), a belt (902), a slope (903) and a material receiving box, the side skinning motor (901) drives the belt (902) to operate, the top of the material receiving box is arranged opposite to the parallel line formed by the cutting line (10), and the bottom of the material receiving box is connected to the slope (903), and the slope (903) is fixedly connected to the frame of the side skinning conveyor.

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