A soft X-ray light source

Abstract

The present application discloses a soft X-ray light source, comprising a vacuum target chamber, a refrigeration cavity and a nozzle, wherein the refrigeration cavity and the nozzle are accommodated in the vacuum target chamber, and the nozzle is arranged on the refrigeration cavity. The soft X-ray light source also comprises a support plate, a bellows and a three-dimensional displacement mechanism, wherein the support plate is arranged on the vacuum target chamber, and a refrigerant inlet pipe, a refrigerant outlet pipe and a working gas pipe passing through the support plate are arranged on the support plate, the refrigerant inlet pipe and the refrigerant outlet pipe are connected with the refrigeration cavity, and the working gas pipe passes through the refrigeration cavity and is connected with the nozzle; the bellows is arranged between the support plate and the vacuum target chamber, and the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe all pass through the inside of the bellows; and the three-dimensional displacement mechanism is arranged between the support plate and the vacuum target chamber. The present application can realize the adjustment of the nozzle position in the three-axis directions of X, Y and Z.

Description

Technical Field

[0001] The present application relates to the field of soft X-rays, and more specifically to a soft X-ray light source. Background Art

[0002] X-rays are a type of electromagnetic radiation with a very short wavelength, about 0.01 to 100 angstroms, between ultraviolet rays and gamma rays. They have a high penetrating power and can penetrate many substances that are opaque to visible light. The shorter the wavelength, the greater the energy of the X-ray, which is also called hard X-rays. X-rays with longer wavelengths have lower energy and are called soft X-rays. Usually, X-rays with a wavelength less than 0.1 angstroms are called superhard X-rays, those with a wavelength in the range of 0.1 to 10 angstroms are called hard X-rays, and those with a wavelength in the range of 10 to 100 angstroms are called soft X-rays.

[0003] In recent years, soft X-rays have been widely used in many scientific fields, especially in the fields of soft X-ray microscopy and soft X-ray projection lithography, where the demand for soft X-ray light sources with low debris, high brightness and high stability is growing. In addition, in disciplines such as atomic spectroscopy, molecular spectroscopy, and plasma physics, soft X-ray light sources are often required as a necessary means of experiment. Therefore, the application demand for soft X-ray light sources has been on a rapid upward trend.

[0004] The earliest laser plasma soft X-ray light sources used solid metal targets, which produced a lot of metal debris. These debris could damage the optical devices close to the light source, making them unable to function normally, greatly reducing their efficacy and causing the optical path in the experiment or instrument to not work properly. Therefore, with the advancement of technology, liquid microfluidic targets began to be widely used.

[0005] However, the prior art uses liquid microfluidic target devices with fixed structures and non-adjustable structures. The position of the nozzle is fixed and non-adjustable after installation. Many soft X-ray applications, such as soft X-ray microscopes, require the light source to have a high degree of geometric symmetry. If there are errors in the light source device during processing or the nozzle position deviates due to instrument aging, it will directly affect the application of the instrument and reduce the application performance. Summary of the invention

[0006] The purpose of the present application is to provide a soft X-ray light source, thereby solving the problem that the position of the soft X-ray light source in the above-mentioned prior art cannot be adjusted.

[0007] In order to solve the above technical problems, the technical solution of the present application is to provide a soft X-ray light source, which includes a vacuum target chamber, a refrigeration cavity and a nozzle, the refrigeration cavity and the nozzle are accommodated in the vacuum target chamber, and the nozzle is arranged on the refrigeration cavity. The soft X-ray light source also includes a support plate, a bellows and a three-dimensional displacement mechanism. The support plate is arranged on the vacuum target chamber, and a refrigerant inlet pipe, a refrigerant outlet pipe and a working gas pipe passing through the support plate are arranged on the support plate. The refrigerant inlet pipe and the refrigerant outlet pipe are respectively communicated with the refrigeration cavity, and the working gas pipe passes through the refrigeration cavity and is connected to the nozzle; the bellows is arranged between the support plate and the vacuum target chamber, and the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe all pass through the inside of the bellows; the three-dimensional displacement mechanism is arranged between the support plate and the vacuum target chamber.

[0008] According to one embodiment of the present application, the three-dimensional displacement mechanism includes a first displacement regulator, a second displacement regulator and a third displacement regulator, and the first displacement regulator, the second displacement regulator and the third displacement regulator are all arranged between the support plate and the vacuum target chamber and respectively control the support plate to move in three directions perpendicular to each other.

[0009] According to one embodiment of the present application, the soft X-ray light source also includes a first support plate, a second support plate and a third support plate which are arranged in parallel with each other and sleeved on the outside of the bellows, the first support plate is movably fixed to the support plate through the third displacement adjuster, the second support plate is movably fixed to the first support plate through the second displacement adjuster, the second support plate is also movably fixed to the third support plate through the first displacement adjuster, and the third support plate is fixed to the vacuum target chamber.

[0010] According to one embodiment of the present application, the first displacement adjuster includes a first support frame, a first pusher, a first guide rail and a first guide rail groove, the first support frame is fixed to the third support plate, the first pusher is fixed to the first support frame and corresponds to the second support plate, the first guide rail is fixed to the third support plate along a first direction, and the first guide rail groove is fixed under the second support plate and slides with the first guide rail.

[0011] According to one embodiment of the present application, the second displacement adjuster includes a second support frame, a second pusher, a second guide rail and a second guide rail groove, the second support frame is fixed to the second support plate, the second pusher is fixed to the second support frame and corresponds to the first support plate, the second guide rail is fixed to the second support plate along a second direction, the second guide rail groove is fixed under the first support plate and slides with the second guide rail, and the first direction and the second direction are perpendicular to each other.

[0012] According to one embodiment of the present application, the third displacement adjuster includes a screw and a nut, the screw is evenly fixed on the first support plate along a third direction, the support plate is fixed on the bolt through the cooperation of the nut and the bolt, and the third direction is perpendicular to the first direction and the second direction.

[0013] According to an embodiment of the present application, the third displacement adjuster adopts a plurality of steppers arranged along a third direction, the support plate is fixed to the first support plate through the steppers, and the third direction is perpendicular to the first direction and the second direction.

[0014] According to one embodiment of the present application, the first propeller or the second propeller adopts a differential head.

[0015] According to one embodiment of the present application, one section of the working gas pipeline is formed into a condensation chamber with an increased cross-sectional area, and at least a portion of the condensation chamber is located in the refrigeration chamber.

[0016] According to an embodiment of the present application, a metal adapter is provided at the nozzle, and the metal adapter is located at the bottom of the refrigeration cavity.

[0017] According to one embodiment of the present application, a temperature sensor is provided at the nozzle.

[0018] In view of the above-mentioned shortcomings, the soft X-ray light source provided by the present application is provided with a three-dimensional displacement mechanism on the device to adjust the nozzle position in the three-axis directions of X, Y, and Z, thereby adjusting the geometric position of the light source. In addition, the refrigerant in the refrigeration chamber is directly in contact with the straight-through pipe through which the working gas passes to cool down. The refrigeration effect can be adjusted with the selection of the refrigerant, and can reach extremely low temperatures and liquefy certain working gases with low liquefaction points, such as liquid nitrogen; the nozzle is heated at the nozzle outlet through a resistance wire on the periphery to increase the stability of the liquid flow; at the same time, the present application uses a multi-channel vacuum system, and a conical metal table and a vacuum pump pipeline are used under the nozzle to prevent the low-temperature micro-flow from further gasifying during the flow process, thereby reducing the vacuum degree and causing the consumption of soft X-rays. Another set of vacuum pumps is arranged above the vacuum target chamber cavity to extract the gas in the cavity to maintain a high vacuum in the cavity. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0020] Figure 1 is a three-dimensional schematic diagram of a soft X-ray light source according to an embodiment of the present application;

[0021] Figure 2 is based on Figure 1 A partially enlarged stereoscopic schematic diagram of a soft X-ray light source, wherein a three-dimensional displacement mechanism is shown;

[0022] Figure 3 is based on Figure 1 A partially cutaway perspective schematic diagram of a soft X-ray light source;

[0023] Figure 4 is based on Figure 1 A cross-sectional schematic diagram of a soft X-ray light source, wherein only the upper half is shown;

[0024] Figure 5 is based on Figure 1 A cross-sectional schematic diagram of a soft X-ray light source, wherein only the lower half is shown;

[0025] Figure 6 is based on Figure 5 A partially enlarged perspective schematic diagram of a soft X-ray light source, wherein a nozzle and a heating mechanism are shown;

[0026] Figure 7 is based on Figure 1 Schematic diagram of the external equipment connections of the soft X-ray light source. DETAILED DESCRIPTION

[0027] The present application is further described below in conjunction with specific examples. It should be understood that the following examples are only used to illustrate the present application and are not used to limit the scope of the present application.

[0028] It should be noted that when a component / part is referred to as being "set on" another component / part, it may be directly set on the other component / part or there may also be an intermediate component / part. When a component / part is referred to as being "connected / coupled" to another component / part, it may be directly connected / coupled to the other component / part or there may be an intermediate component / part at the same time. The term "connection / coupling" as used herein may include electrical and / or mechanical physical connections / couplings. The term "includes / comprising" as used herein refers to the presence of a feature, step or component / part, but does not exclude the presence or addition of one or more other features, steps or components / parts. The term "and / or" as used herein includes any and all combinations of one or more relevant listed items.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein are only for the purpose of describing specific embodiments and are not intended to limit this application.

[0030] In addition, in the description of this application, the terms "first", "second", etc. are only used for descriptive purposes and to distinguish similar objects. There is no order of precedence between the two, and they cannot be understood as indicating or implying relative importance. In addition, in the description of this application, unless otherwise specified, the meaning of "plurality" is two or more.

[0031] Figure 1 is a three-dimensional schematic diagram of a soft X-ray light source according to an embodiment of the present application, comprising Figure 1 It can be seen that the soft X-ray light source provided in the present application includes a three-dimensional displacement mechanism, a vacuum target chamber, a refrigeration mechanism and a light source generating mechanism. The components are described in detail below in conjunction with the accompanying drawings.

[0032] exist Figure 1In the invention, the three-dimensional displacement mechanism includes a support plate 10, a bellows 60, a first flange 30, a first displacement regulator 70, a second displacement regulator 80 and a third displacement regulator 14, wherein the support plate 10 is plate-shaped; the bellows 60 is cylindrical and can be extended and retracted along its axial direction, the top of the bellows 60 is sealed and arranged on the lower plate surface of the support plate 10, the bottom of the bellows 60 is tightly connected to the first flange 30, and the support plate 10, the bellows 60 and the first flange 30 form a closed substantially cylindrical space; the cylindrical space is defined as The vertical center line of the Z axis (i.e., the vertical direction of the paper in the figure) is the Z axis direction, and two mutually perpendicular directions in a plane perpendicular to the Z axis direction are defined as the X axis and the Y axis directions; a plurality of first screws 24 extending along the Z axis direction are provided on the first flange 30, and a ring-shaped third support plate 23 is fixedly provided on the top of the first screw 24, and a first displacement adjuster 70 is provided on the third support plate 23; the second support plate 22 and the third support plate 23 have the same shape and are arranged parallel to each other, and the second support plate 22 is located above the third support plate 23 and passes through the first support plate 23. A displacement regulator 70 is connected to the third support plate 23, and a second displacement regulator 80 is provided on the second support plate 22; the first support plate 21 and the second support plate 22 have the same shape and are arranged parallel to each other, the first support plate 21 is located above the second support plate 22 and is connected to the second support plate 22 through the second displacement regulator 80; the first support plate 21, the second support plate 22 and the third support plate 23 are arranged roughly in a stacked manner and have through holes of the same size, and the bellows 60 is accommodated in these through holes; a plurality of (usually The support plate 10 is fixed to the second screw rod 15 by means of an adjusting nut 14. At this time, the adjusting nut 14 forms a third displacement adjuster. The third displacement adjuster 14 can adjust the position of the support plate 10 along the Z-axis direction. The support plate 10 is also provided with a working gas pipeline 11, a refrigerant outlet pipeline 12 and a refrigerant inlet pipeline 13. The working gas pipeline 11, the refrigerant outlet pipeline 12 and the refrigerant inlet pipeline 13 pass through the support plate 10 from the outside and are inserted into the interior of the bellows 60.

[0033] Further, in Figure 1In the embodiment, the vacuum target chamber comprises a three-way pipe 40 and a multi-way pipe 50. The three-way pipe 40 has three outlets: a top outlet, a bottom outlet and a side outlet. A cylindrical space extending in the Z-axis direction is formed between the top outlet and the bottom outlet, and the side outlet is connected to the cylindrical space. A second flange 41 is provided at the top outlet, a third flange 42 is provided at the side outlet, and a fourth flange 43 is provided at the bottom outlet. The first flange 30 is tightly connected to the second flange 41 through a gasket and bolts. The multi-way pipe 50 has an upper opening, a lower opening and a plurality of side openings. A cylindrical space extending in the Z-axis direction is formed between the upper opening and the lower opening, and the side opening is connected to the cylindrical space. At the same time, a fifth flange 51 is formed at the upper opening, a sixth flange 53 is formed at the lower opening, and corresponding flanges 52, 54, etc. can be provided at the side openings. The fifth flange 51 is tightly connected to the fourth flange 43 through a gasket and bolts. A vacuum exhaust port 511 is provided in the middle of the sixth flange 53. It should be noted by those skilled in the art that, although the first flange 30 is tightly connected to the second flange 41, the cylindrical space in the bellows 60 on the upper side of the first flange 30 is not connected to the cylindrical space in the tee 40 on the lower side of the second flange 41; although the fourth flange 43 is tightly connected to the fifth flange 51, the cylindrical space in the tee 40 on the upper side of the fourth flange 43 is connected to the cylindrical space in the multi-way tube 50 on the lower side of the fifth flange 51. The multiple side openings on the side of the multi-way tube 50 can be provided with CCD holders 55, CCD adapters 56, laser protective covers 57, observation windows 58, 59, etc. as needed, which are commonly used by those skilled in the art and will not be described in detail here.

[0034] Furthermore, Figure 2 is based on Figure 1 A partially enlarged stereoscopic schematic diagram of the soft X-ray source. Figure 2 It can be seen that the first flange 30 and the second flange 41 are provided with bolt holes evenly distributed near the circumference, and the first flange 30 and the second flange 41 are tightly connected by inserting fastening bolts into the bolt holes; the first flange 30 is fixedly connected to the third support plate 23 through a plurality of first screws 24, so that the two cannot move relative to each other; the first displacement regulator 70 includes a first bracket 71, a first pusher 72, a first guide rail 73 and a first guide rail groove 74 ( Figure 4), wherein the first bracket 71 is L-shaped, one end of the first bracket 71 is fixed on the third support plate 23, and the other end of the first bracket 71 protrudes upward and is perpendicular to the plane where the third support plate 23 is located; the first pusher 72 is arranged on the other end of the first bracket 71 along the X-axis direction and is aligned with the second support plate 22, so that the movement of the first pusher 72 can push the second support plate 22 to move; two first guide rails 73 are arranged on the upper surface of the third support plate 23 and extend along the X-axis direction, the two first guide rails 73 are symmetrically arranged about the bellows 60 and are parallel to each other, and the lower surface of the second support plate 22 is provided with a first guide rail groove 74 ( Figure 4 ), the first guide rail 73 is accommodated in the first guide rail groove 74 and can slide along the first guide rail groove 74, when the first pusher 72 moves, the second support plate 22 slides along the first guide rail 73 in the X-axis direction; the second displacement regulator 80 includes a second bracket 81, a second pusher 82, a second guide rail 83 and a second guide rail groove, wherein the second bracket 81 is L-shaped, one end of the second bracket 81 is fixed on the second support plate 22, and the other end of the second bracket 81 protrudes upward and is perpendicular to the plane where the first support plate 21 is located; the second pusher 82 is arranged on the other end of the second bracket 81 along the Y-axis direction and is aligned with the first support plate 21, so that the movement of the second pusher 82 can push the first support plate 21 to move; the two second guide rails 83 are arranged on the upper surface of the second support plate 22 and extend along the Y-axis. , the two second guide rails 83 are symmetrically arranged about the bellows 60 and are parallel to each other, and a second guide rail groove cooperating with the second guide rail 83 is provided on the lower surface of the first support plate 21, and the second guide rail 83 is accommodated in the second guide rail groove and can slide along the second guide rail groove. When the second propeller 82 moves, the first support plate 21 slides along the second guide rail 83 in the Y-axis direction; since the bellows 60 is cylindrical and can be extended and retracted in the axial direction, the top seal of the bellows 60 is arranged on the lower plate surface of the support plate 10, and the support plate 10 is fixed to the second screw 15 by the adjusting nut 14. Therefore, when the first propeller 71 and the second propeller 82 are adjusted respectively, the support plate 10 will also move accordingly along the X-axis direction and the Y-axis direction; when the third displacement adjuster 14 is adjusted, the support plate 10 moves accordingly along the Z-axis direction.

[0035] Further, Figure 3 is based on Figure 1 A partially cutaway perspective diagram of a soft X-ray source. Figure 4 is based on Figure 1 Schematic diagram of the cross section of the soft X-ray source. Figure 5 is based on Figure 1 A cross-sectional diagram of a soft X-ray source. Figure 4 , Figure 5 Combination Figure 3It can be seen that the support plate 10 is also provided with a working gas pipeline 11, a refrigerant outlet pipeline 12 and a refrigerant inlet pipeline 13, which pass through the support plate 10 from the outside and are inserted into the bellows 60. The refrigeration mechanism includes a refrigeration chamber 44, a refrigerant inlet pipeline 13 and a refrigerant outlet pipeline 12, wherein the refrigeration chamber 44 is formed in a cylindrical shape and is accommodated in the vacuum target chamber. Specifically, the refrigeration chamber 44 extends from the inside of the three-way pipe 40 into the inside of the multi-way pipe 50, and the refrigerant inlet pipeline 13 and the refrigerant outlet pipeline 12 are respectively connected and fixed to the top of the refrigeration chamber 44 through the inside of the bellows 60, the first flange 30 and the second flange 41 from the top of the support plate 10, so that the refrigerant can be transported from the refrigerant inlet pipeline 13 into the refrigeration chamber 44 to reduce the temperature in the refrigeration chamber 44, and the gas generated in the refrigeration chamber 44 is discharged from the refrigeration chamber 44 via the refrigerant outlet pipeline 12; the working gas pipeline 11 is connected to the top of the support plate 10 from the top of the support plate 10. The end passes through the inside of the bellows 60, the first flange 30, the second flange 41 and the refrigeration chamber 44. The working gas pipeline 11 is connected to the nozzle after passing through the refrigeration chamber 44. A condensation chamber 111 with an increased cross-sectional area is formed in the middle of the working gas pipeline 11. At least a part of the condensation chamber 111 is located in the refrigeration chamber 44. It should be noted that the interior of the working gas pipeline 11 is not connected to the interior of the refrigeration chamber 44. The working gas (such as nitrogen) is transported to the nozzle through the working gas pipeline 11 and is liquefied in the process. When flowing out through the nozzle, the state of the working gas has become a liquefied state. The moisture in the working gas is condensed when passing through the condensation chamber 11, so that the working gas that continues to move forward maintains its purity to prevent the nozzle from being blocked.

[0036] Figure 6 is based on Figure 5 A partially enlarged stereoscopic schematic diagram of the soft X-ray source. Figure 6 Combination Figure 3It can be seen that the light source generating mechanism includes a nozzle 36, which is arranged below the refrigeration cavity 44 and fixed below the refrigeration cavity 44 through an adapter 35. The nozzle 36 is connected to the working gas pipeline 11 so that the working gas that has been condensed and turned into liquid flows out from the nozzle 36; the adapter 35 usually adopts a metal adapter to make the temperature transfer more rapid and accurate; a temperature sensor 31 is arranged on the periphery of the adapter 35 to facilitate real-time monitoring of the temperature change around the nozzle 36, and the temperature sensor 31 is connected to an external device through one of the plugs 17 arranged on the top of the support plate 10. A connecting piece 32 is also arranged below the refrigeration cavity 44, and a resistance wire bracket 33 is arranged on the connecting piece 32. A resistance wire 34 is arranged on the resistance wire bracket 33, wherein a part of the resistance wire is spirally wrapped around the side of the nozzle 36, and the resistance wire 34 is connected to another plug 17 arranged on the top of the support plate 10 through a wire to facilitate power supply to the resistance wire. The heating of the resistance wire 34 can offset the temperature drop caused by the evaporation and condensation of the refrigerant liquid, and will not destroy the high vacuum of the environment around the cryogenic liquid, so that the stability of the micro-liquid flow is further improved. At the same time, when the nozzle 36 is blocked by condensation, it can be unblocked by heating the resistance wire 34. A metal frustum 37 is also provided below the nozzle 36, which is usually provided at 15 mm below the nozzle 36. The top of the metal frustum 37 is provided with a hollow groove inside the metal frustum 37, which is used to receive the residual liquid flowing out of the nozzle 36. The design of the metal frustum 37 can better remove the residual liquid that has a greater impact on the vacuum degree due to evaporation in time, thereby reducing the consumption of soft X-rays. The bottom of the metal frustum 37 is further connected to the vacuum exhaust port 511 through a metal adapter 513 and a metal joint 512, so that the above-mentioned residual liquid can be extracted through the vacuum exhaust port 511. It should be noted that the metal adapter 513 is also provided with a heat-conducting rod 38 extending along the Z-axis direction, and the heat-conducting rod 38 is connected to the refrigeration chamber 44 so that the temperature of the metal adapter 513 and the metal frustum 37 is equivalent to the temperature at the nozzle 36 through heat transfer, thereby ensuring that the residual liquid will not change state due to temperature changes, so that the vacuum degree in the vacuum target chamber will be reduced, affecting the brightness of the soft X-rays. Alternatively, the metal adapter 513 is also provided with a heat-conducting pipe 38 extending along the Z-axis direction, and the heat-conducting pipe 38 is connected to the refrigeration chamber 44 so that the refrigerant in the refrigeration chamber 44 can be transported to the metal adapter 513 and the metal frustum 37, so that its temperature is equivalent to the temperature in the refrigeration chamber 44, thereby preventing the cryogenic liquid microflow from further gasifying during the flow process to reduce the vacuum degree and cause the consumption of soft X-rays.

[0037] Since the nozzle 36 is fixed on the refrigeration chamber 44, and the refrigeration chamber 44 is fixed on the support plate 10 through the refrigerant inlet pipe 13, the refrigerant outlet pipe 12 and the working gas pipe 11, the multi-axis adjustment of the geometric position of the nozzle 36 can be achieved through the first displacement regulator 70, the second displacement regulator 80 and the third displacement regulator 14, and the nozzle in the vacuum target chamber can be adjusted in the three directions of X, Y and Z axes when the light source is working, so as to control the position of the liquid microflow, and finally achieve the purpose of adjusting the position of the soft X-ray light source.

[0038] Figure 7 is based on Figure 1 Schematic diagram of the external equipment connection of the soft X-ray light source, consisting of Figure 7 It can be seen that the soft X-ray light source also includes a refrigerant storage 1, which is connected to the refrigerant inlet pipe 13 through a transmission pipe 2, and a low-temperature solenoid valve 3 is arranged on the transmission pipe 2 to automatically control the input amount of the refrigerant and maintain the pressure in the refrigeration chamber stable; the soft X-ray light source further includes a molecular vacuum pump 4, which is connected to the refrigerant outlet pipe 12 through a vacuum transmission pipe 200, and a high-temperature buffer chamber 6 is arranged on the vacuum transmission pipe 200, and a heater 7 is arranged at the high-temperature buffer chamber 6. A vacuum solenoid valve 5 is also arranged between the high-temperature buffer chamber 6 and the molecular vacuum pump 4. The extracted low-temperature refrigerant is heated by the high-temperature buffer chamber 6 and the heater 7 to prevent the refrigerant with too low temperature from damaging the vacuum solenoid valve 5 and the molecular vacuum pump 4. The vacuum solenoid valve 5 can set a vacuum threshold value, close when the pressure in the refrigeration chamber is too low, and open when the pressure in the refrigeration chamber is too high, thereby realizing the control of the temperature in the refrigeration chamber. The molecular vacuum pump 4 is used to circulate the refrigerant in the refrigeration chamber 44, so that a lower refrigeration temperature can be achieved at the nozzle, which is precisely adjustable and has a higher refrigeration efficiency. Some gases with very low liquefaction points (such as nitrogen) can be liquefied, and a more stable injection and a longer injection distance can be obtained, so that the stability of the soft X-ray light source is stronger, and it is also suitable for more types of gas targets. A vacuum gauge interface 510 is also provided on the side of the multi-way tube 50, and the vacuum gauge is connected to the multi-way tube 50 through the vacuum gauge interface 510 to measure the vacuum degree inside the multi-way tube 50. The light source generating mechanism also includes a high-energy laser pulse generator, and the high-energy laser pulse inlet is provided at one of the outlets on the side of the multi-way tube 50, and a laser focusing lens 8 is provided outside the outlet. The laser focusing lens 8 can focus the high-energy laser pulse 100 on the nozzle 36 inside the multi-way tube 50 and act on the liquid microflow, so that the liquid microflow is plasmatized and soft X-rays are generated. In order to maintain the vacuum degree in the multi-way pipe 50 and the three-way pipe 40, a vacuum pumping device is connected to the third flange 42 on the three-way pipe 40 and the vacuum exhaust port 511 at the bottom of the multi-way pipe 50. Since the vacuum outlets are respectively located at the upper and lower ends of the vacuum target chamber, the vacuum degree in the vacuum target chamber can be maintained at a very high level.

[0039] It should be noted by those skilled in the art that the first displacement regulator and the second displacement regulator mentioned in the technical solution of the present application can adopt differential heads, and the third displacement regulator can be replaced by other stepping devices, that is, any adjustment mechanism that can realize manual and automatic adjustment of linear displacement with micron precision, such as an electric displacement stage, falls within the protection scope of the present application. It should also be noted by those skilled in the art that the nozzle can adopt a low-temperature resistant glass nozzle, and the adapter, adapter and metal frustum can be made of low-temperature resistant metal materials; high-energy laser pulses can be generated by high-energy nanosecond pulse lasers, and can also be generated by other short-pulse high-energy laser light sources, such as femtosecond pulse lasers, etc., which will not be repeated here. The vacuum pump in the present application can adopt ion pumps, Roots pumps, etc. to achieve high vacuum in the vacuum target chamber. Nitrogen is preferably used as the working gas, and nitrogen is only used as a target material for generating laser plasma. Any substance (gas or liquid) that can generate laser plasma and radiate soft X-rays of a certain intensity, such as alcohol, xenon, etc., falls within the protection scope of the present application.

[0040] The above is only a preferred embodiment of the present application, and is not intended to limit the scope of the present application. The above embodiments of the present application can also be modified in various ways. That is, all simple, equivalent changes and modifications made according to the claims and the contents of the specification of the present application fall within the scope of protection of the claims of the present patent application. The conventional technical contents are not described in detail in this application.

Claims

1. A soft X-ray light source, comprising a vacuum target chamber, a refrigeration chamber and a nozzle, wherein the refrigeration chamber and the nozzle are accommodated in the vacuum target chamber, and the nozzle is arranged on the refrigeration chamber, characterized in that: The soft X-ray light source also includes: A support plate, the support plate is arranged on the vacuum target chamber, a refrigerant inlet pipe, a refrigerant outlet pipe and a working gas pipe passing through the support plate are arranged on the support plate, the refrigerant inlet pipe and the refrigerant outlet pipe are communicated with the refrigeration cavity, the working gas pipe passes through the refrigeration cavity and is connected to the nozzle, and the interior of the working gas pipe is not communicated with the interior of the refrigeration cavity; a bellows, wherein the bellows is disposed between the support plate and the vacuum target chamber, and the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe all pass through the inside of the bellows; and A three-dimensional displacement mechanism, wherein the three-dimensional displacement mechanism is disposed between the support plate and the vacuum target chamber; The refrigeration chamber is fixed to the support plate through the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe, and the geometric position of the nozzle is adjusted through the three-dimensional displacement mechanism.

2. The soft X-ray light source according to claim 1, characterized in that: The three-dimensional displacement mechanism includes a first displacement regulator, a second displacement regulator and a third displacement regulator which are connected in sequence. The first displacement regulator, the second displacement regulator and the third displacement regulator are all arranged between the support plate and the vacuum target chamber and respectively control the support plate to move in three directions perpendicular to each other.

3. The soft X-ray light source according to claim 2, characterized in that: The soft X-ray light source also includes a first support plate, a second support plate and a third support plate which are arranged in parallel with each other and sleeved on the outside of the bellows, the first support plate is movably fixed to the support plate through the third displacement adjuster, the second support plate is movably fixed to the first support plate through the second displacement adjuster, the second support plate is simultaneously movably fixed to the third support plate through the first displacement adjuster, and the third support plate is fixed to the vacuum target chamber.

4. The soft X-ray light source according to claim 3, characterized in that: The first displacement adjuster includes a first support frame, a first pusher, a first guide rail and a first guide rail groove, the first support frame is fixed to the third support plate, the first pusher is fixed to the first support frame and corresponds to the second support plate, the first guide rail is fixed to the third support plate along a first direction, and the first guide rail groove is fixed under the second support plate and slidably cooperates with the first guide rail.

5. The soft X-ray light source according to claim 4, characterized in that: The second displacement adjuster includes a second support frame, a second pusher, a second guide rail and a second guide rail groove, the second support frame is fixed to the second support plate, the second pusher is fixed to the second support frame and corresponds to the first support plate, the second guide rail is fixed to the second support plate along a second direction, the second guide rail groove is fixed under the first support plate and slides with the second guide rail, and the first direction and the second direction are perpendicular to each other.

6. The soft X-ray light source according to claim 5, characterized in that: The third displacement adjuster includes a screw and a nut. The screw is evenly fixed on the first support plate along a third direction. The support plate is fixed on the bolt through the cooperation of the nut and the screw. The third direction is perpendicular to the first direction and the second direction.

7. The soft X-ray light source according to claim 5, characterized in that: The third displacement regulator uses a plurality of steppers arranged along a third direction, the support plate is fixed to the first support plate through the steppers, and the third direction is perpendicular to the first direction and the second direction.

8. The soft X-ray light source according to claim 5, characterized in that: The first propeller or the second propeller adopts a differential head.

9. The soft X-ray light source according to claim 1, characterized in that: One section of the working gas pipeline is formed into a condensation cavity with an increased cross-sectional area, and at least a portion of the condensation cavity is located in the refrigeration cavity.

10. The soft X-ray light source according to claim 1, characterized in that: A metal adapter is provided at the nozzle, and the metal adapter is located at the bottom of the refrigeration cavity.

11. The soft X-ray light source according to claim 1, characterized in that: A temperature sensor is arranged at the nozzle.

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