A fixed platform for thin and flexible film substrates

By setting a fixed area and a fixed platform with built-in vacuum adsorption holes on both sides of the coating area, the problem of deformation of the thin and soft substrate under vacuum adsorption method is solved, and the flatness of the substrate in the coating area and the uniformity of the functional layer thickness are achieved. The manufacturing cost is reduced and the solidification speed of the functional layer and the stretching of the substrate are improved.

CN110538777BActive Publication Date: 2024-12-27VIGOR GAS PURIFICATION TECHNOLOGIES (SUZHOU) CO LTD
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Patent Information

Application Number
CN201910903320.0
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2019-09-24
Publication Date
2024-12-27
Estimated Expiration
2039-09-24

AI Technical Summary

Technical Problem

In the prior art, when fixing a thin and flexible substrate, vacuum adsorption method leads to the formation of pits on the substrate surface, resulting in a difference in coating thickness, especially in photoelectric thin film materials, which affects functionality.

Method used

Fixed areas are set on both sides of the coating area, and vacuum adsorption holes are built-in to fix the substrate through a vacuum generator to avoid deformation of the coating area. A heating device and controller are installed in the coating area to ensure the flatness of the substrate and the uniformity of the functional layer. .

Benefits of technology

It realizes the uniformity of high-precision coating thickness of the thin and soft substrate, reduces processing costs, and improves the solidification speed of the functional layer and the stretching of the substrate, making it suitable for industrial production.

✦ Generated by Eureka AI based on patent content.

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Abstract

A fixed platform for a thin and flexible substrate comprises a base, a surface of the base is provided with a table for supporting the thin and flexible substrate, a coating machine for coating the thin and flexible substrate is provided in the table area, the base comprises a coating area and fixed areas on both sides of the coating area, the fixed area is provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected to a vacuum generator, and the coating machine coats the thin and flexible substrate in the coating area; the thin and flexible substrate is laid flat on the table, and the vacuum adsorption holes fix the thin and flexible substrate in the fixed area in the fixed area through the negative pressure generated by the vacuum generator, and the fixed areas are provided on both sides of the coating area, so that the thin and flexible substrate in the coating area is laid flat and no pits appear on the surface of the thin and flexible substrate, thereby ensuring the uniformity of the coating thickness during the high-precision coating of the thin and flexible substrate in the coating area.
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Description

Technical Field

[0001] The invention relates to the technical field of printing equipment, and in particular to a fixing platform for a thin and flexible film substrate. Background Art

[0002] The extrusion slit coating method is widely used in new thin-film solar cells, new display materials, optical functional films, environmentally friendly permeable films and other new industries due to its precise controllability of the coating film quality. In the process of coating the functional material on the surface of the flexible sheet, the substrate needs to be fixed on the platform. The existing technology usually uses vacuum adsorption, which is simple and has strong operability in industrial mass production.

[0003] like Figure 1 As shown, a coating base includes a base having a table surface for supporting a substrate, and a vacuum adsorption hole for adsorbing the substrate is opened on the table surface.

[0004] When the thickness of the substrate is relatively thick (thickness > 100um), because the vacuum adsorption force is small, the overall deformation is relatively small relative to the thickness of the substrate, and the effect on the thickness of the functional layer coated on the substrate surface is also small; however, when the thickness of the substrate is less than 50um and the texture is soft, when the coating base uses vacuum adsorption to fix the substrate, the substrate material at the vacuum adsorption holes will inevitably undergo adsorption deformation, and pits will appear on the substrate under the action of the vacuum adsorption holes. On this basis, the coating of the functional layer is completed, and differences in coating thickness are inevitable. Especially in optoelectronic thin film materials, thickness differences will lead to functional differences, and there is room for improvement in the existing technology. Summary of the invention

[0005] In order to solve the above technical problems, the present invention proposes a fixing platform for a thin and flexible substrate, in which the substrate is fixed on the fixing platform by fixing areas located on both sides of the coating area, and the vacuum adsorption holes are arranged in the fixing areas to avoid deformation of the substrate in the coating area, thereby ensuring the uniformity of the coating thickness of the thin and flexible substrate during the high-precision coating process.

[0006] To achieve the above-mentioned purpose, the technical solution of the present invention is as follows: a fixed platform for a thin and flexible substrate, comprising a base, the surface of the base is provided with a table surface for supporting the thin and flexible substrate, a coater for coating the thin and flexible substrate is provided in the table surface area, the base comprises a coating area and a fixed area located on both sides of the coating area, the fixed area is provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected to a vacuum generator, and the coater coats the thin and flexible substrate in the coating area.

[0007] By adopting the above technical solution, the thin and flexible substrate is spread flat on the table surface, and the vacuum adsorption holes fix the thin and flexible substrate in the fixed area in the fixed area through the negative pressure generated by the vacuum generator. The fixed area is arranged on both sides of the coating area, so that the thin and flexible substrate in the coating area is spread flat and no pits appear on the surface of the thin and flexible substrate, thereby ensuring the uniformity of the coating thickness during the high-precision coating process of the thin and flexible substrate in the coating area.

[0008] The present invention is further configured such that: the coating area is provided with a heating device.

[0009] By adopting the above technical solution, since no vacuum adsorption holes are provided in the coating area, a heating device can be provided in the coating area to heat the thin and flexible substrate in the coating area, thereby increasing the solidification speed of the functional layer on the surface of the thin and flexible substrate.

[0010] The present invention is further configured as follows: the two fixing areas are symmetrically arranged on both sides of the coating area.

[0011] By adopting the above technical solution, the force on the thin and flexible substrate is made more uniform, thereby ensuring the flatness of the thin and flexible substrate in the coating area.

[0012] The present invention is further configured such that: the fixing area and the coating area are located in the same plane.

[0013] By adopting the above technical solution, it is convenient to continuously process the thin and flexible substrate, and ensure the smoothness of the thin and flexible substrate sliding on the table.

[0014] The present invention is further configured as follows: the fixing area is in an outwardly convex arc structure, and the edge of the fixing area is connected to the coating area.

[0015] By adopting the above technical solution, the arc-shaped structure allows the thin and flexible substrate to be more stretched on the table surface, thereby improving the flatness and stretching degree of the thin and flexible substrate in the coating area.

[0016] The present invention is further configured such that: the vacuum adsorption hole is tangent to the arc surface of the fixing area.

[0017] By adopting the above technical solution, the fixing effect of the fixing area of ​​the arc structure on the thin and flexible substrate is guaranteed.

[0018] The present invention is further configured as follows: the fixing area is arranged obliquely toward a side away from the coating area, and an edge of the fixing area is connected to the coating area.

[0019] By adopting the above technical solution, the fixing area of ​​the inclined structure can improve the stretchability of the thin and flexible substrate on the table surface, while ensuring the smoothness of the sliding of the thin and flexible substrate on the table surface, which is convenient for industrial production.

[0020] The present invention is further configured such that: the vacuum adsorption hole is perpendicular to the plate surface of the fixing area and / or the vacuum adsorption hole is arranged at an angle to the panel of the fixing area.

[0021] By adopting the above technical solution, the fixing effect of the inclined fixing area on the thin and flexible substrate is improved.

[0022] The present invention is further configured such that: the vacuum generator is connected to a controller for controlling the working state of the vacuum generator.

[0023] By adopting the above technical solution, after the coating of the thin and flexible substrate in the coating area is completed, the vacuum adsorption function is removed by the controller, so that the thin and flexible substrate can be moved more easily, thereby realizing continuous coating of the thin and flexible substrate.

[0024] The present invention is further configured as follows: the coating process is an extrusion slit coating process.

[0025] By adopting the above technical solution, the accuracy of the thickness of the functional layer is guaranteed.

[0026] In summary, the present invention has the following technical effects:

[0027] 1. The fixed areas arranged on both sides of the coating area can reduce the difficulty of coating on thin and flexible substrates and ensure the flatness of the thin and flexible substrates during coating;

[0028] 2. Since the thin and flexible substrate in the fixed area is not used for coating, the requirements for the vacuum adsorption holes in the fixed area can also be reduced, and the requirements for the aperture and distribution of the vacuum adsorption holes are reduced, thereby reducing the processing cost of the fixed platform manufacturing;

[0029] 3. For the vacuum adsorption holes in the fixed area, vacuum adsorption holes of different hole shapes and directions can be set according to different thin and flexible substrates, so as to more easily achieve the adsorption effect on substrates of various thicknesses. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below.

[0031] Figure 1 It is a structural schematic diagram of a coating base in the prior art;

[0032] Figure 2 This is a schematic diagram of the structure of the fixed platform in Example 1;

[0033] Figure 3 It is a structural schematic diagram of the fixed platform in Example 2;

[0034] Figure 4 This is a schematic diagram of the structure of the fixed platform in Example 3.

[0035] In the figure: 1. base; 11. fixing area; 12. coating area; 2. thin and flexible substrate; 3. functional layer; 4. vacuum adsorption hole; 5. vacuum generator; 6. pit; 7. heating device; 8. controller. DETAILED DESCRIPTION

[0036] The present invention will be further described in detail below in conjunction with the accompanying drawings.

[0037] Embodiment 1:

[0038] A fixed platform for a thin and flexible substrate includes a base, the surface of the base is provided with a table for supporting the thin and flexible substrate, a coating machine for coating the thin and flexible substrate is provided in the table area (not shown in the figure), the base includes a coating area and a fixed area located on both sides of the coating area, the fixed area is provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected to a vacuum generator, and the coating machine coats the thin and flexible substrate in the coating area. The thin and flexible substrate is laid flat on the table, and the vacuum adsorption holes fix the thin and flexible substrate in the fixed area in the fixed area through the negative pressure generated by the vacuum generator. The fixed areas are provided on both sides of the coating area, so that the thin and flexible substrate in the coating area is laid flat and no pits appear on the surface of the thin and flexible substrate, thereby ensuring the uniformity of the coating thickness during the high-precision coating of the thin and flexible substrate in the coating area.

[0039] Since there are no vacuum adsorption holes in the coating area, a heating device is provided in the coating area, so that a heating device can be provided in the coating area to heat the thin and flexible substrate in the coating area, thereby increasing the solidification speed of the functional layer on the surface of the thin and flexible substrate.

[0040] In order to ensure that the two sides of the thin and flexible substrate are subjected to uniform force, the two fixing areas are symmetrically arranged on both sides of the coating area.

[0041] In the embodiment, the fixing area and the coating area are located in the same plane, so that the thin and flexible substrate can slide continuously on the table surface to facilitate continuous processing of the thin and flexible substrate.

[0042] In order to facilitate the sliding of the thin and flexible substrate on the table, the vacuum generator is connected to a controller for controlling the working state of the vacuum generator. The controller controls the intermittent operation of the vacuum generator, so that the thin and flexible substrate is intermittently fixed on the table. When the vacuum generator is not working, it is convenient for the thin and flexible substrate to slide on the table.

[0043] In order to ensure the uniformity of the thickness of the functional layer on the thin and flexible substrate, the coating process in this scheme is an extrusion slit coating process.

[0044] Embodiment 2:

[0045] The difference between Example 2 and Example 1 is that the fixing area is in an outwardly convex arc structure.

[0046] In Example 2, the fixing area is in an outwardly convex arc-shaped structure, and the edge of the fixing area is connected to the coating area. The vacuum adsorption holes in the fixing area are tangent to the arc surface of the fixing area.

[0047] Embodiment 3:

[0048] The difference between Example 3 and Example 1 is that the fixing area is inclined toward the side away from the coating area.

[0049] In Example 3, the fixing area is inclined toward a side away from the coating area, and an edge of the fixing area is connected to the coating area.

[0050] The vacuum adsorption holes in Embodiment 1 and Embodiment 3 may be opened perpendicular to the plate surface of the fixing area, or may be arranged at an angle to the panel of the fixing area, or may be arranged in a staggered manner in both ways.

[0051] It should be pointed out that a person skilled in the art can make several modifications and improvements without departing from the inventive concept of the present invention, and these modifications and improvements all fall within the protection scope of the present invention.

Claims

1. A fixed platform for a thin and flexible film substrate, comprising a base, a surface of the base is provided with a table for supporting the thin and flexible film substrate, a coating machine for coating the thin and flexible film substrate is provided in the table area, characterized in that: The base includes a coating area and fixed areas located on both sides of the coating area, the fixed area is provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected to a vacuum generator, and the coating machine coats the thin and soft film substrate in the coating area; The fixing area is symmetrically arranged on both sides of the coating area; The fixing area is in an outwardly convex arc-shaped structure, and the edge of the fixing area is connected to the coating area; The curved structure allows the thin and flexible film substrate to stretch more on the table surface, improving the flatness and stretching degree of the thin and flexible film substrate in the coating area; The vacuum adsorption hole is tangent to the arc surface of the fixing area; The coating process is an extrusion slit coating process; The vacuum generator is connected to a controller for controlling the working state of the vacuum generator. The controller controls the intermittent operation of the vacuum generator, so that the thin and flexible film substrate is intermittently fixed on the table. When the vacuum generator is not working, it is convenient for the thin and flexible film substrate to slide on the table, thereby realizing continuous coating of the thin and flexible film substrate.

2. A fixed platform for a thin and flexible film substrate, comprising a base, the surface of the base is provided with a table for supporting the thin and flexible film substrate, and a coating machine for coating the thin and flexible film substrate is provided in the table area, characterized in that: The base includes a coating area and fixed areas located on both sides of the coating area, the fixed area is provided with a plurality of vacuum adsorption holes, the vacuum adsorption holes are connected to a vacuum generator, and the coating machine coats the thin and soft film substrate in the coating area; The fixing area is symmetrically arranged on both sides of the coating area; The fixing area is inclined toward a side away from the coating area, and the edge of the fixing area is connected to the coating area; the fixing area with an inclined structure can improve the stretchability of the thin and flexible film substrate on the table surface, while ensuring the smoothness of the thin and flexible film substrate sliding on the table surface; The vacuum adsorption hole is perpendicular to the plate surface of the fixing area; The coating process is an extrusion slit coating process; The vacuum generator is connected to a controller for controlling the working state of the vacuum generator. The controller controls the intermittent operation of the vacuum generator, so that the thin and flexible film substrate is intermittently fixed on the table. When the vacuum generator is not working, it is convenient for the thin and flexible film substrate to slide on the table, thereby realizing continuous coating of the thin and flexible film substrate.

3. The fixing platform for a thin and flexible film substrate according to claim 1 or 2, characterized in that: The coating zone is provided with a heating device.