Vacuum laminating machine

Abstract

The present invention discloses a vacuum laminating machine, which includes a workbench provided with a vacuum chamber part; a laminating fixture can be accommodated in the vacuum chamber part, and includes a film holding part, a substrate holding part, a first support part and a first positioning part. The first support part is configured to support the substrate holding part or the film holding part when the substrate holding part and the film holding part are closed; the first positioning part is configured to position the film holding part and the substrate holding part when the substrate holding part and the film holding part are closed; a film loading part is configured to obtain a film and load it onto the film holding part after adjusting the position of the film; a substrate loading part is configured to obtain a substrate and load it onto the substrate holding part after adjusting the position of the substrate; the laminating part includes a pressing head and a laminating driving part, and at least the pressing head can be accommodated in the vacuum chamber part. The laminating driving part is connected to the pressing head and drives the pressing head to press the substrate holding part or the film holding part, so as to laminate the film and the substrate. The vacuum laminating machine of the present invention has a simpler and more compact structure.

Description

Technical Field

[0001] The invention relates to the technical field of film lamination, in particular to a vacuum film lamination machine. Background Art

[0002] Lamination usually refers to laminating a film onto a substrate. For example, various substrate products have been widely used in various electronic devices, such as touch screens are widely used in various display devices, and curved glass is widely used in mobile devices. Since these substrates are in direct contact with human fingers, office desks, clothes, backpacks, etc. during use, they are prone to scratches and damage. In order to protect the surface of the substrate, lamination is often required on the surface of the substrate during the manufacturing process.

[0003] Existing vacuum laminating machines usually position the film and substrate in a vacuum chamber and then perform lamination in a vacuum environment, resulting in a bulky and complex structure. Summary of the invention

[0004] The present invention aims to solve one of the technical problems existing in the prior art. To this end, the present invention proposes a vacuum laminating machine, which has a simpler and more compact structure.

[0005] The vacuum laminating machine according to the embodiment of the present invention is used to press a diaphragm onto a substrate, comprising a workbench, the workbench being provided with a vacuum chamber; a laminating jig which can be accommodated in the vacuum chamber, the laminating jig comprising a diaphragm holding portion, a substrate holding portion, a first supporting portion and a first positioning portion, wherein the diaphragm holding portion absorbs and holds the diaphragm; the substrate holding portion absorbs and holds the substrate, and is arranged to overlap with the diaphragm holding portion so that the diaphragm and the substrate are opposite; the first supporting portion is arranged to support the substrate holding portion or the diaphragm holding portion when the substrate holding portion and the diaphragm holding portion overlap; the first positioning portion The part is configured to position the diaphragm holding part and the substrate holding part when the substrate holding part and the diaphragm holding part are covered; the diaphragm loading part is configured to obtain the diaphragm and load it to the diaphragm holding part after adjusting the position of the diaphragm; the substrate loading part is configured to obtain the substrate and load it to the substrate holding part after adjusting the position of the substrate; the film pressing part, the film pressing part includes a pressing head and a film pressing driving part, at least the pressing head can be accommodated in the vacuum chamber part, the film pressing driving part is connected to the pressing head, and drives the pressing head to press the substrate holding part or the diaphragm holding part so that the diaphragm and the substrate are pressed together.

[0006] In some embodiments, a covering portion is also provided on the workbench, and the covering portion has a first cover and a covering driving portion. The covering driving portion is connected to the first cover to drive the first cover to seal and press the workbench to form the vacuum chamber between the inner cavity of the first cover and the workbench.

[0007] In some embodiments, a rotating table is also provided on the workbench, and the laminating jig includes several parts, which are respectively installed on the rotating table, and each of the laminating jigs switches its position on the workbench as the rotating table rotates; a covering part, the covering part has a first cover and a covering driving part, the covering driving part is connected to the first cover, and drives the first cover to seal the rotating table to form the vacuum chamber between the inner cavity of the first cover and the rotating table.

[0008] In some embodiments, the film loading portion and the substrate loading portion are respectively located on two sides of the laminating jig.

[0009] In some embodiments, the diaphragm loading part includes a diaphragm storage part; a first loading robot part, a diaphragm adsorption part is provided at the end of which, and the diaphragm adsorption part is installed to the end of the first loading robot part through a first adjustment platform; a first detection part is configured to detect the position of the diaphragm adsorbed on the diaphragm adsorption part.

[0010] In some embodiments, a second detection unit is further provided, and the second detection unit is configured to detect the position of the diaphragm holding unit before the diaphragm feeding unit feeds the diaphragm to the diaphragm holding unit.

[0011] In some embodiments, the lamination portion is mounted to the first cover, and at least the pressing head is accommodated in the inner cavity.

[0012] In some embodiments, the first supporting portion is arranged on one side of the diaphragm holding portion, and the substrate holding portion and the first supporting portion are hinged and swing open or close relative to the diaphragm holding portion; when the substrate holding portion is closed relative to the diaphragm holding portion, it is located above the diaphragm holding portion.

[0013] In some embodiments, a second supporting portion is further included, wherein the second supporting portion and the first supporting portion are respectively arranged on both sides of the diaphragm holding portion to elastically support the substrate holding portion together; the substrate holding portion is pressed by the pressure head and covers the diaphragm holding portion.

[0014] In some embodiments, the membrane holding portion includes a flexible holding member and a third supporting portion, the flexible holding member absorbs and holds the membrane, and the third supporting portion is disposed below the flexible holding member to elastically support the flexible holding member.

[0015] The vacuum laminating machine of the present invention loads the position-adjusted diaphragm onto the diaphragm holding portion of the laminating jig via the diaphragm loading portion, loads the position-adjusted substrate onto the substrate holding portion of the laminating jig via the substrate loading portion, and positions the diaphragm holding portion and the substrate holding portion on the laminating jig respectively. Therefore, there is no need to position the diaphragm and the substrate in the vacuum chamber. In addition, the size of the vacuum chamber only needs to be compatible with the laminating jig and the laminating portion, so the structure is simpler and more compact. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 is a three-dimensional diagram of an embodiment of the vacuum laminator of the present invention;

[0017] Figure 2 yes Figure 1 A top view of a vacuum laminator;

[0018] Figure 3 yes Figure 1 Schematic diagram of the diaphragm feeding part;

[0019] Figure 4 yes Figure 3 A three-dimensional diagram of the first feeding robot;

[0020] Figure 5 yes Figure 3 A three-dimensional schematic diagram of a diaphragm storage unit;

[0021] Figure 6 yes Figure 3 A three-dimensional schematic diagram of a first detection unit;

[0022] Figure 7 yes Figure 1 Schematic diagram of the laminating jig in the open state;

[0023] Figure 8 yes Figure 1 Schematic diagram of the film pressing fixture in the closed state;

[0024] Fig. 9 yes Figure 7 A schematic diagram of a substrate holding portion;

[0025] Fig.10 yes Figure 7 A schematic diagram of a laminating jig omitting a substrate holding portion;

[0026] Fig.11 yes Figure 7 Exploded view of the laminating jig;

[0027] Fig.12 yes Figure 1 Schematic diagram of the vacuum chamber part and the film pressing part;

[0028] Fig.13are schematic diagrams of a membrane and a substrate, wherein (a) is a schematic diagram of the membrane, and (b) is a schematic diagram of the substrate. DETAILED DESCRIPTION

[0029] The following will be combined with the embodiments to clearly and completely describe the concept of the present invention and the technical effects produced, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0030] In the description of the embodiments of the present invention, if orientation descriptions are involved, the orientations or positional relationships indicated by “up”, “down”, “front”, “back”, “left”, “right”, etc. are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0031] In the description of the embodiments of the present invention, if a feature is referred to as being "set", "fixed", "connected", or "installed" on another feature, it may be directly set, fixed, or connected to the other feature, or it may be indirectly set, fixed, connected, or installed on the other feature. In the description of the embodiments of the present invention, if "several" is involved, it means more than one, if "multiple" is involved, it means more than two, if "greater than", "less than", or "exceeds" is involved, it should be understood as not including the number itself, and if "above", "below", or "within" is involved, it should be understood as including the number itself. If "first" or "second" is involved, it should be understood as being used to distinguish technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0032] Fig.13 Schematic diagrams of a membrane 501 and a substrate 502, wherein (a) is a schematic diagram of the membrane 501, and (b) is a schematic diagram of the substrate 502, referring to Fig.13 Before describing the vacuum laminator of the invention, the diaphragm 501 and the substrate 502 are described first. The diaphragm 501 is a diaphragm 501 used to protect, for example, display screens and housings of electronic products, which is well known to those skilled in the art. The substrate 502 is a component such as a display screen and housing of an electronic product. The substrate 502 can be a flat substrate 502 or a curved substrate 502 such as curved glass or a curved housing.

[0033] Figure 1This is a three-dimensional diagram of a vacuum laminator. Figure 2 yes Figure 1 The top view of the vacuum laminator, see Figure 1 , Figure 2 The vacuum laminating machine according to the embodiment of the present invention is used to attach a film 501 to a substrate 502, and includes a workbench 101, wherein the workbench 101 is provided with a vacuum chamber 401, a laminating jig 5, a film loading section 3, a substrate loading section 2, and a laminating section 41. The laminating jig 5 can be accommodated in the vacuum chamber 401. The laminating jig 5 includes a diaphragm holding portion 51, a substrate holding portion 52, a first supporting portion 53 and a first positioning portion 54, wherein the diaphragm holding portion 51 absorbs and holds the diaphragm 501; the substrate holding portion 52 absorbs and holds the substrate 502, and is arranged to overlap with the diaphragm holding portion 51 so that the diaphragm 501 and the substrate 502 are opposite; the first supporting portion 53 is arranged to support the substrate holding portion 52 or the diaphragm holding portion 51 when the substrate holding portion 52 and the diaphragm holding portion 51 overlap; the first positioning portion 54 is arranged to position the diaphragm holding portion 51 and the substrate holding portion 52 when the substrate holding portion 52 and the diaphragm holding portion 51 overlap. The diaphragm feeding portion 3 is arranged to obtain the diaphragm 501 and after adjusting the position of the diaphragm 501, feed it to the diaphragm holding portion 51; the substrate feeding portion 2 is arranged to obtain the substrate 502 and after adjusting the position of the substrate 502, feed it to the substrate holding portion 52. The laminating portion 41 includes a pressing head 411 ( Figure 1 The pressure head 411 can be accommodated in the vacuum chamber 401, and the pressure head 411 is connected to the film pressing driving part 412, and drives the pressure head 411 to press the substrate holding part 52 or the diaphragm holding part 51 to press the diaphragm 501 and the substrate 502 together.

[0034] In this embodiment, since the diaphragm 501 with adjusted position is loaded onto the diaphragm holding portion 51 of the laminating jig 5 through the diaphragm loading portion 3, and the substrate 502 with adjusted position is loaded onto the substrate holding portion 52 of the laminating jig 5 through the substrate loading portion 2, and the diaphragm holding portion 51 and the substrate holding portion 52 are positioned on the laminating jig 5 respectively, there is no need to position the diaphragm 501 and the substrate 502 in the vacuum chamber 401. In addition, the size of the vacuum chamber 401 only needs to be adapted to the laminating jig 5 and the laminating portion 41. For example, the length and width of the vacuum chamber 401 only need to be slightly larger than the length and height of the laminating jig 5, so the structure is simpler and more compact.

[0035] In some embodiments, in order to improve the efficiency of the vacuum laminator, a rotating table 44 is further provided on the workbench 101, and the laminating jig 5 includes several parts, which are respectively mounted on the rotating table 44, and each laminating jig 5 switches positions on the workbench 101 as the rotating table 44 rotates. Specifically, a avoidance groove 102 can be started in the middle of the workbench 101, and the rotating table 44 can be accommodated in the avoidance groove 102. The rotating table 44 can be connected to a DD motor known to those skilled in the art, or a combination of a servo motor and a divider (not shown, the lower part of the workbench 101), so as to rotate. For example, two laminating jigs 5 may be installed on the rotating table 44. The two laminating jigs 5 are distributed 180 degrees along the circumference of the rotating table 44, and the position of one of the laminating jigs 5 is used as a loading station. The film loading section 3 obtains the film 501 and adjusts the position of the film 501 before loading it to the laminating jig 5 serving as the loading station. The substrate loading section 2 obtains the substrate 502 and adjusts the position of the substrate 502 before loading it to the same laminating jig 5. After loading is completed, the DD motor (or a combination of a servo motor and a divider) drives the rotating table to rotate 180 degrees (lamination position) and enter the vacuum chamber 401 area, and lamination is performed through the laminating section 41. In this way, the loading and laminating processes can be performed simultaneously, which can improve the efficiency of lamination.

[0036] It can be imagined that the laminating jig 5 ensures the positional accuracy between the diaphragm holding portion 51 and the substrate holding portion 52 through the first positioning portion 54, thereby ensuring the accuracy between the diaphragm 501 and the substrate 502, and further ensuring the accuracy during laminating. Therefore, before the diaphragm 501 and the substrate 502 are loaded, it is necessary to ensure the loading accuracy of the diaphragm 501 and the substrate 502. The diaphragm loading portion 3 and the substrate loading portion 2 are described in detail below.

[0037] In some embodiments, the film loading part 3 and the substrate loading part 2 are respectively located on both sides of the lamination jig 5. For example, when the lamination jig 5 is mounted on the rotating table 44, the film loading part 3 and the substrate loading part 2 are respectively arranged on both sides of the lamination jig 5 located at the loading station, so as to independently load the film 501 and the substrate 502 to the lamination jig 5. In the following embodiments, since the structures of the film loading part 3 and the substrate loading part 2 are roughly the same, the film loading part 3 is taken as an example for detailed description, and the substrate loading part 2 is briefly mentioned when necessary.

[0038] Figure 3 is a schematic diagram of the diaphragm feeding part 3, Figure 4 is a three-dimensional diagram of the first loading robot 32. It should be noted that Figure 3 , Figure 4 In FIG. 3 , only some parts related to the film feeding part 3 are shown. Figure 3 , Figure 4, and auxiliary reference Figure 1 , Figure 2 In this embodiment, the film feeding unit 3 includes a film storage unit 31, a first feeding robot unit 32 and a first detection unit 35 (in Figure 1 The first feeding robot 32 is covered by a transparent acrylic plate. A film adsorption unit 33 is provided at the end of the first feeding robot 32. The film adsorption unit 33 is installed at the end of the first feeding robot 32 through a first adjustment platform 34. The first detection unit 35 is configured to detect the position of the film 501 adsorbed on the film adsorption unit 33.

[0039] It can be imagined that the robot of the first loading robot part 32 can be a two-axis robot, a three-axis robot, etc. known to those skilled in the art, and the end of the first loading robot part 32 refers to the end of the two-axis robot or the three-axis robot where the actuator is installed, such as the end where the clamp, suction cup, etc. are installed. The first adjustment platform 34 can be a UVW alignment platform, such as the UVW alignment platform produced by TOYO. The first detection part 35 can use an image sensor, such as a CCD (i.e., a charge coupled device image sensor), or other smart cameras, etc. The diaphragm adsorption part 33 can select, for example, a vacuum suction cup 331 (refer to Figure 4 ) adsorption membrane 501.

[0040] It should be noted that the first adjustment platform 34 needs to be adjusted according to the position of the diaphragm 501 detected by the first detection unit 35, that is, the first adjustment platform 34 needs to communicate with the first detection unit 35. As for the communication and control methods between the first adjustment platform 34 and the first detection unit 35, they are well known to those skilled in the art and will not be described in detail here.

[0041] In this embodiment, since the film feeding part 3 is provided with a first detection part 35, and the first feeding manipulator part 32 is provided with a first adjustment platform 34, after the first feeding manipulator part 32 is adsorbed onto the film 501, the first adjustment platform 34 can accurately adjust the position of the film 501 according to the position of the film 501 detected by the first detection part 35, thereby improving the feeding accuracy of the film 501. In addition, since the accurate position of the film 501 has been determined before feeding, there is no need to adjust it in the vacuum chamber part 401, which can make the size of the vacuum chamber part 401 more compact, for example, it only needs to be adapted to the laminating jig 5 for holding the film 501 and the substrate 502. When the size of the vacuum chamber part 401 is more compact, the specifications of the vacuum laminating machine can be further reduced, thereby reducing the cost of the equipment.

[0042] Figure 5 is a three-dimensional schematic diagram of the membrane storage unit 31, referring to Figure 5In some embodiments, the film storage unit 31 includes a storage table 311 and a lifting motor 312. The film 501 is stacked on the storage table 311. The lifting motor 312 is connected to the storage table 311 to drive the storage table 311 to rise and fall. Therefore, in the initial state, multiple film sheets 501 can be stacked on the storage table 311. The lifting motor 312 drives the storage table 311 to rise and fall according to the stacking height of the film sheets 501, so that the first loading robot 32 can accurately absorb the film 501.

[0043] In order to determine the stacking height of the film 501, the film storage unit 31 may also be provided with a photoelectric sensor 313, such as a through-beam photoelectric sensor, to detect the presence or absence of the film 501. Specifically, the position of the film 501 detected by the photoelectric sensor 313 may be used as the adsorption position of the first loading robot 32, and the lifting motor 312 drives the storage table 311 to rise so that the film 501 can be detected by the photoelectric sensor 313. This position is the position where the first loading robot 32 drives the film adsorption unit 33 to descend. With the loading of the first loading robot 32, when the photoelectric sensor 313 does not detect the film 501, the lifting motor 312 drives the storage table 311 to rise so that the film 501 stored in the storage table 311 can be detected by the photoelectric sensor 313.

[0044] In order to prevent the diaphragm adsorption part 33 from adsorbing multiple diaphragms 501 at one time, the diaphragm storage part 31 can also be provided with a brush 314. The brush 314 is set at the position where the first loading robot part 32 drives the diaphragm adsorption part 33 to rise. The diaphragm 501 adsorbed by the diaphragm adsorption part 33 will collide with the brush 314 during loading. As a result, the diaphragm 501 that is not adsorbed by the vacuum suction cup 331 of the diaphragm adsorption part 33 will be brushed off by the brush 314, thereby ensuring that the diaphragm adsorption part 33 only adsorbs one diaphragm 501 at a time.

[0045] In some embodiments, the storage platform 311 can be elastically and telescopically connected to the lifting motor 312. Specifically, for example, the lifting motor 312 is connected to the transfer platform 315 and drives the transfer platform 315 to rise and fall. The storage platform 311 can be elastically and telescopically supported to the transfer platform 315 through the support of, for example, the buffer spring 316 and the guide of the guide shaft (not shown, the buffer spring 316 is embedded on the guide shaft). Therefore, when the vacuum suction cup 331 of the diaphragm adsorption part 33 adsorbs the diaphragm 501, the storage platform 311 can adaptively buffer according to the pressure of the diaphragm adsorption part 33, prevent the diaphragm adsorption part 33 from directly hitting the storage platform 311 to cause damage to the vacuum suction cup 331 of the diaphragm adsorption part 33, and prevent wrinkles from appearing when the diaphragm 501 is adsorbed. In addition, in this embodiment, the diaphragm adsorption part 33 can be directly and rigidly mounted to the first adjustment platform 34, thereby further improving the accuracy of the first adjustment platform 34 in adjusting the position of the diaphragm 501.

[0046] In some embodiments, the storage table 311 is disposed on the upper portion of the workbench 101 (see Figure 1 ), the lifting motor 312 is arranged at the lower part of the workbench 101. Specifically, a motor mounting seat 317 is arranged at the lower part of the workbench 101, and the lifting motor 312 is mounted on the motor mounting seat 317. The lifting motor 312 is connected to the transfer table 315 located at the upper part of the workbench 101 through a screw transmission mechanism. In this way, the installation space of the workbench 101 can be fully utilized, and the upper part of the workbench 101 can be made more compact.

[0047] In some embodiments, the diaphragm storage unit 31 further includes a diaphragm positioning unit 37, which is disposed on the side of the storage platform 311 and is arranged to be adjustable relative to the storage platform 311. Specifically, a reference plate 373 is disposed on one side of the storage platform 311, and the diaphragm positioning unit 37 is disposed on the side of the storage platform 311 opposite to the reference plate 373. The diaphragm positioning unit 37 includes a positioning plate 374, an adjusting bolt 375, and a sliding shaft 376. The positioning plate 374 is connected to the adjusting bolt 375 and the sliding shaft 376, respectively. By rotating the adjusting bolt 375, the positioning plate 374 is moved closer to the storage platform 311 or away from the storage platform 311, thereby adjusting the distance between the positioning plate 374 and the reference plate 373, so that the diaphragm storage unit 31 can adapt to diaphragms 501 of different sizes, and has higher versatility.

[0048] In some embodiments, the diaphragm positioning portion 37 includes an X-axis positioning portion 371 and a Y-axis positioning portion 372. The X-axis positioning portion 371 is adjustably arranged on the side of the storage platform 311 in the X-axis direction, and the Y-axis positioning portion 372 is adjustably arranged on the side of the storage platform 311 in the Y-axis direction. Correspondingly, a first reference plate 373a is arranged on the other side of the storage platform 311 in the X-axis direction, and a second reference plate 373b is arranged on the other side of the storage platform 311 in the Y-axis direction. Thus, the distance between the X-axis positioning portion 371 and the first reference plate 373a, and the distance between the Y-axis positioning portion 372 and the second reference plate 373b can be adjusted respectively, so that the diaphragm storage portion 31 can adapt to more diaphragms 501 of different sizes, and has higher versatility.

[0049] Figure 6 is a three-dimensional schematic diagram of the first detection unit 35, referring to Figure 6In some embodiments, in order to adapt to diaphragms 501 of different sizes, the first detection unit 35 includes a CCD351 and an adjustment motor 352, and the adjustment motor 352 is connected to the CCD351 and drives the CCD351 to change the detection position. Thus, the adjustment motor 352 drives the CCD351 to change the detection position according to the size of the diaphragm 501 to adapt to diaphragms 501 of different sizes. The adjustment motor 352 may include two motors, which respectively adjust the position of the CCD351 in the X-axis direction and the position in the Y-axis direction. The adjustment motor 352 may drive the CCD351 to change the detection position through a transmission mechanism such as a screw transmission mechanism.

[0050] In some embodiments, the first detection unit 35 includes two locations, respectively detecting the diagonal corners of the diaphragm 501. Thus, the contour of the diaphragm 501 can be completely detected, so that the first adjustment platform 34 can adjust the position of the diaphragm 501 according to the accurate contour of the diaphragm 501 detected by the two first detection units 35.

[0051] Continue to refer to Figure 1 , Figure 3 In some embodiments, the first detection unit 35 is disposed below the first loading robot 32. At the end of the first loading robot 32, a first light source unit 38 is installed to assist the first detection unit 35 in detection. The first light source unit 38 may be an LED light source known to those skilled in the art. By disposing the first detection unit 35 below the first loading robot 32, the driving stroke of the first loading robot 32 can be reduced. For example, the first detection unit 35 may be disposed between the film storage unit 31 and the path of the film pressing jig 5 for holding the film 501. After the first loading robot 32 is adsorbed onto the film 501 from the film storage unit 31, it passes through the first detection unit 35 and detects the exact position of the film 501. The first adjustment platform 34 is adjusted based on the exact position of the film 501 detected by the first detection unit 35, and then the first loading robot 32 unloads the film 501 to the film pressing jig 5. It is understandable that the first detection unit 35 may also be disposed below the workbench 101 to further reduce the driving stroke of the first loading robot arm 32 .

[0052] Continue to refer to Figure 4In some embodiments, a second detection unit 36 ​​is further provided, and the second detection unit 36 ​​is configured to detect the position of the diaphragm holding unit 51 before the diaphragm feeding unit 3 feeds the diaphragm 501 to the diaphragm holding unit 51. For example, the second detection unit 36 ​​is mounted to the end of the first feeding robot 32. Thus, the diaphragm adsorption unit 33 is adsorbed to the diaphragm 501, and after being accurately adjusted by the first adjustment platform 34, the position of the diaphragm holding unit 51 (i.e., the position of the film pressing jig 5 where the diaphragm 501 is placed) is accurately detected by the second detection unit 36, and the first feeding robot 32 can accurately place the diaphragm 501 on the diaphragm holding unit 51. It can be imagined that the second detection unit 36 ​​is not limited to being installed at the end of the first feeding robot 32, and the second detection unit 36 ​​can be set at any position of the workbench 101 as long as it can detect the position of the diaphragm holding unit 51 for holding the diaphragm 501.

[0053] Continue to refer to Figure 1 Similarly, the substrate loading unit 2 includes a substrate storage unit 21, a second loading robot unit 22 and a third detection unit 25 (in Figure 1 The second feeding robot 22 is provided with a substrate adsorption unit 23 at its end, and the substrate adsorption unit 23 is mounted to the end of the second feeding robot 22 through a second adjustment platform 24. The third detection unit 25 is configured to detect the position of the substrate 502 adsorbed on the substrate adsorption unit 23.

[0054] Figure 7 is a schematic diagram of the laminating jig 5 in an open state, Figure 8 is a schematic diagram of the film pressing jig 5 in the closed state, Fig. 9 is a schematic diagram of the substrate holding portion 52, Fig.10 Schematic diagram of the lamination jig 5 with the substrate holding portion 52 omitted. Fig.11 This is an exploded view of the film pressing fixture 5, refer to Figures 7 to 11 , and auxiliary reference Figure 1 , the laminating jig 5 for holding and positioning the diaphragm 501 and the substrate 502 respectively will be described in detail.

[0055] Reference Figure 1 , Figure 7 , Figure 8As mentioned above, the laminating jig 5 includes a diaphragm holding portion 51, a substrate holding portion 52, a first supporting portion 53 and a first positioning portion 54. The diaphragm holding portion 51 absorbs and holds the diaphragm 501; the substrate holding portion 52 absorbs and holds the substrate 502. In addition, the substrate holding portion 52 is configured to overlap with the diaphragm holding portion 51 so that the diaphragm 501 and the substrate 502 are opposite to each other. It can be understood that the overlap of the substrate holding portion 52 and the diaphragm holding portion 51 does not mean that the two must be pressed against each other, but only means that the two are opposite and can be close to each other when external force is applied to the two; the first supporting portion 53 is configured to support the substrate holding portion 52 or the diaphragm holding portion 51 when the substrate holding portion 52 and the diaphragm holding portion 51 overlap; the first positioning portion 54 is configured to position the diaphragm holding portion 51 and the substrate holding portion 52 when the substrate holding portion 52 and the diaphragm holding portion 51 overlap.

[0056] In this embodiment, since a diaphragm holding portion 51 for adsorbing and holding the diaphragm 501 and a substrate holding portion 52 for adsorbing and holding the substrate 502 are provided, and a first supporting portion 53 and a first positioning portion 54 are provided between the diaphragm holding portion 51 and the substrate holding portion 52, the position accuracy of the diaphragm 501 and the substrate 502 can be ensured before vacuum lamination. In addition, since the positioning is performed by a mechanical lamination jig, the structure is compact and there is no need to perform positioning in the vacuum chamber 401. Therefore, the size of the vacuum chamber 401 only needs to be adapted to the lamination jig 5, which can make the size of the vacuum chamber 501 more compact.

[0057] In some embodiments, the diaphragm holding portion 51 includes a flexible holding member 511, and the flexible holding member 511 absorbs and holds the diaphragm 501. The material of the flexible holding member 511 can be selected from, for example, silica gel, etc. Of course, the material of the flexible holding member 511 can also be selected from other flexible materials known to those skilled in the art that can be used to hold the diaphragm 501. Due to the static electricity between the diaphragm 501 and the flexible holding member 511, the diaphragm 501 can be stably and directly adsorbed onto the flexible holding member 511. Therefore, by providing the flexible holding member 511, the diaphragm 501 can be directly adsorbed and held. Of course, it is conceivable that in order to more stably adsorb the diaphragm 501, a plurality of diaphragm adsorption holes (vacuum suction holes) can also be opened on the flexible holding member 511 to adsorb the diaphragm 501.

[0058] Fig. 9 is a schematic diagram of the substrate holding portion 52, referring to Fig. 9In some embodiments, the substrate holding portion 52 is provided with a substrate adsorption hole 521 (vacuum suction hole, vacuum can be generated by a known method such as a vacuum generator) capable of adsorbing the substrate 502. In order to protect the substrate 502 and prevent the substrate 502 from being damaged when the substrate 502 is loaded or vacuum pressed, the substrate holding portion 52 also includes a substrate protection member 522. Specifically, the substrate holding portion 52 may include a first holding plate 523, and the substrate protection member 522 may be detachably mounted to the first holding plate 523. The substrate protection member 522 may be made of a wear-resistant material such as Teflon, nylon, or POM. The substrate adsorption hole 521 is directly provided on the substrate protection member 522, and the substrate 502 is directly adsorbed and held by the substrate protection member 522. By arranging the substrate protection member 522 to be detachably mounted to the first holding plate 523, different substrate protection members 522 may be conveniently replaced according to the shape of the substrate 502.

[0059] Fig.10 Schematic diagram of the lamination jig 5 with the substrate holding portion 52 omitted. Fig.11 This is an exploded view of the film pressing fixture 5, refer to Fig.10 , Fig.11 , and continue to refer to Figure 7 , Figure 8 In some embodiments, in order to enable the laminating jig 5 to be a component that can be independently assembled and disassembled relative to the vacuum laminating machine, the laminating jig 5 also includes a jig base 56, and the diaphragm holding portion 51, the first supporting portion 53 and the first positioning portion 54 are respectively mounted on the jig base 56, thereby facilitating the assembly and disassembly of the laminating jig 5. It can be imagined that in this embodiment, the diaphragm holding portion 51 and the first supporting portion 53 are respectively mounted on the jig base 56, and the substrate holding portion 52 can be mounted on the first supporting portion 53. In other embodiments, the substrate holding portion 52 and the first supporting portion 53 can also be mounted on the jig base 56, and the diaphragm holding portion 51 can be mounted on the first supporting portion 53.

[0060] In some embodiments, the first support portion 53 is disposed on one side of the diaphragm holding portion 51, and the substrate holding portion 52 and the first support portion 53 are hinged and swing open or closed relative to the diaphragm holding portion 51. Specifically, the first support portion 53 and the diaphragm holding portion 51 are respectively mounted on the fixture base 56, the first support portion 53 is located on one side of the diaphragm holding portion 51 (for example, one side in the length direction), and the substrate holding portion 52 is hinged to the first support portion 53 through the hinge shaft 531. In this way, the positions of the substrate holding portion 52 and the diaphragm holding portion 51 relative to each other can be initially positioned.

[0061] In some embodiments, in order to more stably support the substrate holding portion 52 to ensure that the substrate holding portion 52 and the diaphragm holding portion 51 are accurately positioned after overlapping each other, a second supporting portion 55 is also included. The second supporting portion 55 and the first supporting portion 53 are respectively arranged on both sides of the diaphragm holding portion 51 to jointly support the substrate holding portion 52.

[0062] In some embodiments, the first support portion 53 and the second support portion 55 elastically support the substrate holding portion 52, respectively. When pressure is applied to the substrate holding portion 52, it moves toward the diaphragm holding portion 51 and covers the diaphragm holding portion 51. Specifically, the first accommodating cavity 561 and the second accommodating cavity 562 are respectively provided on both sides of the length direction of the jig base 56. The first accommodating cavity 561 is used to accommodate the first support portion 53, and the second accommodating cavity 562 is used to accommodate the second support portion 55. A jig cover plate 563 is provided on the first accommodating cavity 561 and the second accommodating cavity 562. The jig cover plate 563 is locked to the jig base 56 to limit the first support portion 53 and the second support portion 55. Taking the first support part 53 as an example, the first support part 53 includes a first support block 532, a first driving shaft 533 and a first spring 534. The first support block 532 is used to support the substrate holding part 52. The first driving shaft 533 abuts against the first support block 532. One end of the first spring 534 abuts against the first accommodating cavity 561, and the other end abuts against the first support block 532, and pushes the first support block 532 to abut against the jig cover 563. During vacuum lamination, when pressure is applied to the substrate holding part 52 from above the substrate holding part 52, the first spring 534 is compressed, thereby enabling the substrate holding part 52 to move in the direction of laminating the diaphragm holding part 51. When lamination is completed, the substrate holding part 52 is pushed to move in the direction away from the diaphragm holding part 51 under the action of the first spring 534. The second support part 55 can be set with reference to the first support part 53, and will not be described in detail here.

[0063] By setting the first support part 53 and the second support part 55 to elastically support the substrate holding part 52 respectively, it can be ensured that before vacuum lamination, the substrate holding part 52 and the diaphragm holding part 51 are not in contact with each other, so as to prevent wrinkles or bubbles from appearing between the diaphragm 501 and the substrate 502 due to contact. During the vacuum lamination process, the vacuum lamination process can be buffered to prevent the substrate holding part 52 and the diaphragm holding part 51 from hard contact and causing lamination failure. Of course, it is understandable that the first support part 53 and the second support part 55 can also be extended and retracted by other actuators (such as cylinders, motors, etc.) so that the substrate holding part 52 and the diaphragm holding part 51 can be covered.

[0064] In some embodiments, in order to further buffer the vacuum lamination process, the diaphragm holding portion 51 further includes a third support portion 512, which is disposed below the flexible holding member 511 and elastically supports the flexible holding member 511. Specifically, the jig base 56 may be provided with a third accommodating chamber 564 between the first accommodating chamber 561 and the second accommodating chamber 562, and the third support portion 512 is accommodated in the third accommodating chamber 564. Similarly, the third support portion 512 may include a third support block 512a, a third driving shaft 512b, and a third spring (not shown). The third support block 512a supports the flexible holding member 511, the third driving shaft 512b is connected to the third support block 512a, and one end of the third spring abuts against the third support block 512a, and the other end abuts against the third accommodating chamber 564. In this way, it is possible to further prevent the failure of lamination caused by hard contact between the substrate holding portion 52 and the diaphragm holding portion 51.

[0065] In some embodiments, in order to enable the third support portion 512 to adapt itself according to the deformation of the flexible retaining member 511, the third support portion 512 includes multiple locations, each independently supporting the flexible retaining member 511. In order to position each third support portion 512, a plurality of positioning grooves 563a may be provided on the jig cover 563, and the third support blocks 512a are respectively accommodated in these positioning grooves 563a.

[0066] In some embodiments, in order to enable the lamination jig 5 to adapt to different substrates 502, the flexible retainer 511 is arranged to be detachable in the diaphragm retaining portion 51. Specifically, the diaphragm retaining portion 51 may include a second retaining plate 513, which is locked to the jig base 56 (or the jig cover 563), and a fourth accommodating cavity 513a is arranged in the middle of the second retaining plate 513, and the flexible retainer 511 is accommodated in the fourth accommodating cavity 513a and pressed by the second retaining plate 513. Therefore, the flexible retainer 511 can be removed by simply removing the second retaining plate 513, so that the flexible retainer 511 can be replaced according to different substrates 502.

[0067] In some embodiments, the first positioning portion 54 includes a first positioning pin 541, which is elastically and telescopically arranged on the jig base 56; the substrate holding portion 52 is provided with a first positioning hole 524, and when the substrate holding portion 52 and the diaphragm holding portion 51 are covered, the first positioning pin 541 is inserted into the first positioning hole 524. In this embodiment, the elastic expansion and contraction of the first positioning pin 541 can be designed with reference to the elastic expansion and contraction structure of the first support portion 53, and will not be described in detail here. It can be understood that in this embodiment, although the first positioning pin 541 is arranged on the jig base 56 and the first positioning hole 524 is arranged on the substrate holding portion 52, it is not limited to this. For example, the first positioning pin 541 can also be arranged on the diaphragm holding portion 51. Alternatively, the first positioning pin 541 can also be arranged on the substrate holding portion 52, and correspondingly, the first positioning hole 524 is arranged on the jig base 56.

[0068] Fig.12 is a schematic diagram of the vacuum chamber 401 and the film pressing part 41, Fig.12 In order to facilitate observation of the vacuum chamber 401, the first cover 421 is partially cut open. Fig.12 , and continue to refer to Figure 1 The formation of the vacuum cover portion 401 and the film pressing portion 41 are described in detail below.

[0069] In some embodiments, a cover-fitting part 42 is further provided on the workbench 101, and the cover-fitting part 42 has a first cover 421 and a cover-fitting driving part 422, and the cover-fitting driving part 422 is connected to the first cover 421, and drives the first cover 421 to press the workbench 101 in a sealed manner, so as to form a vacuum chamber 401 between the inner cavity 423 of the first cover 421 and the workbench 101. Specifically, the sides of the inner cavity 423 of the first cover 421 are closed (for example, when a visual window or other joints are provided, they are all sealed and fastened), and an opening is provided at the surface pressed with the workbench 101, thereby, the mounting surface of the workbench 101 can be directly used as a part of forming the vacuum chamber 401, and the cover-fitting part 42 that can press the workbench 101 in a sealed manner is provided, which is not only compact in structure, but also simple to control. Of course, it is conceivable that the vacuum chamber can also be a vacuum chamber with an independent cavity known to those skilled in the art.

[0070] It is conceivable that in the embodiment where a rotating table 44 is provided on the workbench 101, the cover-close driving unit 422 drives the first cover 421 to seal the rotating table 44, so as to form a vacuum chamber 401 between the inner cavity 423 of the first cover 421 and the rotating table 44. The following is a detailed description taking the film pressing jig 5 being provided on the rotating table 44 as an example. In this embodiment, the film pressing jig 5 can be directly locked onto the rotating table 44. It is conceivable that when the film pressing jig 5 and the rotating table 44 need to be sealed, a first sealing ring (not shown) can also be provided between the film pressing jig 5 and the rotating table 44 so that the film pressing jig 5 is sealed and locked to the rotating table 44. A second sealing ring 424 is provided on the surface where the first cover 421 and the rotating table 44 are pressed together. When the first cover 421 is pressed together with the rotating table 44, the vacuum chamber 401 is formed between the inner cavity 423 of the first cover 421 and the rotating table 44 through the sealing of the second sealing ring 424. The cover driving unit 422 can be a motor, a cylinder, a hydraulic cylinder, etc. known to those skilled in the art, preferably a cylinder.

[0071] A vacuum environment can be formed in the vacuum chamber 401 by any known method. For example, a vacuum pump, a vacuum generating pump or other vacuum device (not shown) can be used for vacuuming. The vacuum interface (such as an aviation plug) can be set on the rotating table 44 or on the first cover 421 as needed.

[0072] In some embodiments, in order to make the structure of the vacuum laminating machine 4 more compact, the laminating unit 41 can be installed on the first cover 421, and at least the pressure head 411 is accommodated in the inner cavity 423 of the first cover 421. Therefore, the height of the vacuum chamber 401 only needs to be slightly higher than the height of the laminating jig 5 + the height of the pressure head 411 + the driving stroke of the laminating driving unit 412, which can make the structure of the vacuum laminating machine 4 more compact. In this embodiment, the laminating driving unit 412 can be selected as a cylinder, and the cylinder body 412a of the cylinder of the laminating driving unit 412 is sealed and installed on the outside of the first cover 421 (for example, a third sealing ring (not shown) is provided between the mounting surface of the cylinder body 412a of the cylinder and the outer side surface of the first cover 421), and the piston rod of the cylinder extends into the inner cavity 423 of the first cover 421 and is connected to the pressure head 411.

[0073] In actual operation, first, the cover-closing driving part 422 of the cover-closing part 42 drives the first cover 421 to extend toward the rotating table 44 and press the rotating table 44 to form a vacuum chamber 401 between the inner cavity 423 of the first cover 421 and the rotating table 44. At this time, the film pressing jig 5 and the pressing head 411 of the film pressing part 41 are respectively accommodated in the vacuum chamber 401. The vacuum pumping device performs vacuuming. After the vacuum chamber 401 forms a vacuum environment, the film pressing driving part 412 of the film pressing part 41 drives the pressing head 411 to abut against the substrate holding part 52 (or the diaphragm holding part 51), and the substrate holding part 52 and the diaphragm holding part 51 are brought close to each other, so that the diaphragm 501 and the substrate 502 are pressed together. Since the diaphragm 501 and the substrate 502 are pressed together under a vacuum environment, wrinkles, bubbles, etc. can be prevented from occurring when the diaphragm 501 and the substrate 502 are pressed together.

[0074] In order to further improve the lamination quality of the diaphragm 501 and the substrate 502, in some embodiments, a heating unit (not shown) is further provided in the vacuum chamber 401. Similarly, the heating unit can be provided on the rotating table 44 or on the inner cavity 423 of the first cover 421 to heat the vacuum chamber 401. The heating unit can be a thermocouple or other components capable of heating. In order to control the heating temperature of the heating unit, a temperature sensor (not shown) can also be provided in the vacuum chamber 401. Similarly, the temperature sensor can be installed on the rotating table 44 or on the inner cavity 423 of the first cover 421. During lamination, the temperature of the vacuum chamber 401 can be raised to 60°C. Of course, those skilled in the art can also set the heating temperature of the vacuum chamber 401 according to actual conditions. Thus, the membrane 501 can be pressed onto the substrate 502 while the vacuum chamber 401 is heated and the membrane 501 is softened, which can further prevent wrinkles or bubbles from appearing when the membrane 501 and the substrate 502 are pressed together, thereby further improving the lamination quality of the membrane 501 and the substrate 502.

[0075] It is conceivable that, in this embodiment, a heat insulation plate 413 may be provided between the lamination pressing head 411 and the lamination driving unit 412 to prevent the heat in the vacuum chamber 401 from being transferred to the lamination driving unit 412 .

[0076] When the film pressing part 41 is installed on the first cover 421, the film pressing part 41 presses the substrate holding part 52 (or the film holding part 51), and a reaction force is generated on the first cover 421. When the reaction force is too large, the state of the first cover 421 pressing the rotating table 44 may become loose, thereby causing the vacuum to break. In some embodiments, it also includes an adsorption part 43, which is arranged on the first cover 421. When the first cover 421 is pressed on the rotating table 44, the adsorption part 43 is adsorbed to the rotating table 44. In this way, the cover-closing driving part 422 can be assisted to make the first cover 421 stably and tightly pressed on the rotating table 44. In order to save costs, the adsorption part 43 can use an electromagnet, for example, including two electromagnets, which are respectively arranged on both sides of the first cover 421. Of course, the adsorption part 43 can also use vacuum adsorption, such as a vacuum suction cup.

[0077] The various specific technical features described in the above specific embodiments can be combined in any way without contradiction. To avoid unnecessary repetition, the present invention does not separately explain various possible combinations.

[0078] The above embodiments are only used to illustrate the technical solutions of the present invention but not to limit the same. Any modification or equivalent substitution that does not depart from the scope of the present invention shall be included in the technical solutions of the present invention.

Claims

1. A vacuum laminating machine for laminating a film onto a substrate, characterized in that, it includes a workbench, and the workbench is provided with a vacuum chamber part; a film laminating fixture that can be accommodated in the vacuum chamber part. The film laminating fixture includes: a fixture base, a film holding part, a substrate holding part, a first support part, and a first positioning part. One of the film holding part and the substrate holding part and the first support part are respectively installed on the fixture base, and the other of the film holding part and the substrate holding part is installed on the first support part. Wherein, the film holding part adsorbs and holds the film; the substrate holding part adsorbs and holds the substrate and is arranged to cover the film holding part so that the film and the substrate face each other; the first support part is arranged to support the substrate holding part or the film holding part when the substrate holding part and the film holding part are covered; the first positioning part is arranged to position the film holding part and the substrate holding part when the substrate holding part and the film holding part are covered; a film loading part arranged to obtain the film and, after adjusting the position of the film, load it onto the film holding part; a substrate loading part arranged to obtain the substrate and, after adjusting the position of the substrate, load it onto the substrate holding part; a film laminating part. The film laminating part includes a pressing head and a film laminating driving part. At least the pressing head can be accommodated in the vacuum chamber part. The film laminating driving part is connected to the pressing head and drives the pressing head to press the substrate holding part or the film holding part so that the film and the substrate are laminated; a rotating table. A plurality of the film laminating fixtures are respectively installed on the rotating table, and each film laminating fixture switches positions on the workbench as the rotating table rotates; The film loading part includes: a film storage part; a first loading robotic arm with a film adsorption part at its end. The film adsorption part is installed at the end of the first loading robotic arm through a first adjustment platform; a first detection part arranged to detect the position of the film adsorbed on the film adsorption part; The vacuum laminating machine is further provided with a second detection part arranged to detect the position of the film holding part before the film loading part loads the film onto the film holding part.

2. The vacuum laminating machine according to claim 1, characterized in that, the workbench is further provided with a covering part. The covering part has a first cover and a covering driving part. The covering driving part is connected to the first cover and drives the first cover to hermetically press the rotating table to form the vacuum chamber part between the inner cavity of the first cover and the rotating table.

3. The vacuum laminating machine according to claim 1 or 2, characterized in that, the film loading part and the substrate loading part are respectively located on both sides of the film laminating fixture.

4. The vacuum laminating machine according to claim 2, characterized in that, the film laminating part is installed on the first cover, and at least the pressing head is accommodated in the inner cavity.

5. The vacuum laminating machine according to claim 1, characterized in that, The first support portion is disposed on one side of the diaphragm holding portion, and the substrate holding portion and the first support portion are hinged and swing open or close relative to the diaphragm holding portion; When the substrate holding portion is closed relative to the diaphragm holding portion, it is located above the diaphragm holding portion.

6. The vacuum laminating machine according to claim 5, characterized in that, further comprising a second support portion, the second support portion and the first support portion are respectively disposed on both sides of the diaphragm holding portion, and jointly and elastically support the substrate holding portion; The substrate holding portion is pressed by the pressing head and closed with the diaphragm holding portion.

7. The vacuum laminating machine according to claim 1 or 5, characterized in that, the diaphragm holding portion includes a flexible holding member and a third support portion, the flexible holding member adsorbs and holds the diaphragm, and the third support portion is disposed below the flexible holding member and elastically supports the flexible holding member.

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