A bearing device and a method of using a bearing device

Abstract

This invention discloses a carrier device and a method of using the carrier device. The carrier device includes a body with an adsorption surface for adsorbing a substance. The body also includes a vacuum pipeline, a first vacuum port, and a second vacuum port. The first vacuum port is disposed on the surface of the adsorption surface, and the second vacuum port is connected to the outside environment. The first and second vacuum ports are connected through the vacuum pipeline. The device also includes a switching component that can switch the first vacuum port between a connected state and a closed state. The vacuum release time of the substance to be adsorbed in the above-described carrier device can be significantly shortened, and production efficiency can be improved.

Description

Technical Field

[0001] This invention relates to the field of load-bearing components, and more specifically to a load-bearing device and a method of using the load-bearing device. Background Technology

[0002] To ensure the flatness of the wafer surface during testing and operation, the industry currently mostly uses wafer carriers with vacuum adsorption. These carriers have air channels (or pores) on them. When it is necessary to fix the wafer, the vacuum valve can be opened to form a sealed vacuum cavity between the wafer and the carrier, thus fixing the wafer. After testing is completed, the vacuum valve can be closed to release the vacuum adsorption between the wafer and the carrier, so as to facilitate subsequent wafer transfer.

[0003] However, when the wafer is fixed, a sealed vacuum cavity is formed between the wafer and the carrier disk. Even if the vacuum valve is closed later, the vacuum between the wafer and the carrier disk cannot be released in time. This means that for a period of time after the vacuum valve is closed, the carrier disk still has a certain degree of adsorption force on the wafer. If the wafer is transferred at this time, it is easy to cause microcracks or even breakage of the wafer, which seriously affects the quality of the wafer.

[0004] To address this, one existing solution is to wait for a period of time to allow the vacuum adsorption to dissipate slowly and naturally before transferring the wafer, but this would affect the overall production efficiency of the machine.

[0005] Therefore, how to provide a solution to overcome or alleviate the above-mentioned defects remains a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this invention is to provide a support device and a method of using the support device, wherein the vacuum release time of the support device can be shortened, thereby improving production efficiency.

[0007] To solve the above-mentioned technical problems, the present invention provides a carrier device, including a body, the body including an adsorption surface for adsorbing a substance to be adsorbed; the body also includes a vacuum pipeline, a first vacuum hole and a second vacuum hole; the first vacuum hole is disposed on the surface of the adsorption surface, the second vacuum hole is connected to the outside, and the first vacuum hole and the second vacuum hole are connected through the vacuum pipeline; it also includes a switching component, the switching component being able to switch the first vacuum hole to a connected state or a closed state.

[0008] With this structure, when it is necessary to fix the adsorbent, the first vacuum port can be switched to a closed state with the outside via the switching component. Then, a vacuum process can be performed to fix the adsorbent by negative pressure adsorption. After the operation on the adsorbent is completed, the pumping component can be turned off, and then the first vacuum port can be switched to a state with the outside via the switching component. This allows the vacuum pipeline to be connected to the atmosphere through the second vacuum port. Due to the pressure difference, the outside atmosphere can quickly fill the vacuum channel between the body and the adsorbent to release the vacuum adsorption on the adsorbent. This allows for rapid transfer of the adsorbent under safe conditions. Compared with existing technologies, the vacuum release time can be significantly shortened, and production efficiency can be improved.

[0009] Optionally, the switching component switches the second vacuum orifice between an open state and a blocked state; or, the switching component switches the vacuum line between a conducting state and a closed state.

[0010] Optionally, the switch component has a sealing element. In the open state, the sealing element allows the vacuum line to communicate with the atmosphere through the second vacuum hole, and in the sealed state, the sealing element disconnects the vacuum line from the atmosphere.

[0011] Optionally, the switching component further includes a driving member, which is pulsatorically connected to the blocking member and is used to drive the blocking member to switch between the open state and the blocking state.

[0012] Optionally, the driving component is a cylinder, a hydraulic cylinder, or a motor.

[0013] Optionally, the drive component is mounted on the side of the body away from the adsorption surface.

[0014] Optionally, the outlet end of the second vacuum hole is located on the outer peripheral wall of the body.

[0015] Optionally, the switching component switches the second vacuum hole between an open state and a blocked state; the outer edge of the body is provided with a notch, the outlet end of the second vacuum hole is located at the bottom wall of the notch, and in the blocked state, the blocking member is inserted into the notch.

[0016] Optionally, the sealing member has a sealing face, the part of the body opposite to the sealing face is a sealing mating face, the outlet end of the second vacuum hole is located on the sealing mating face, and at least one of the sealing face and the sealing mating face is provided with a sealing element to seal the gap between the sealing face and the second vacuum hole in the sealing state.

[0017] Optionally, the sealing member has a sealing face, and the outlet end of the second vacuum hole is provided with a sealing member. In the sealed state, the sealing member can seal the gap between the sealing face and the second vacuum hole.

[0018] Optionally, the switching component includes a blocking member; the body is provided with an opening, the opening being connected to the vacuum line through a connecting channel, and the blocking member is configured to slide into or out of the vacuum line through the connecting channel to shut off or open the vacuum line.

[0019] Optionally, the switching component switches the second vacuum orifice between an open state and a blocked state; it also includes an air blowing component connected to the vacuum pipeline.

[0020] Optionally, a monitoring switch is also included for monitoring the status information of the switching component.

[0021] Optionally, the switching component is a switching valve.

[0022] Optionally, it further includes: a vacuum pumping component, which is connected to the vacuum pipeline.

[0023] The present invention also provides a method of using a support device, applicable to the above-mentioned support device, the method of use including an adsorption step and a release step; the adsorption step includes: controlling the switching component to disconnect the vacuum pipeline from the outside; drawing a vacuum into the vacuum pipeline to generate an adsorption force on the adsorption surface through the first vacuum hole, so that the adsorption surface adsorbs the object to be adsorbed; the release step includes: controlling the switching component to connect the first vacuum hole to the outside.

[0024] Optionally, the bearing device further includes an air blowing component connected to the vacuum pipeline; the release step further includes controlling the air blowing component to blow air into the vacuum pipeline. Attached Figure Description

[0025] Figure 1 A partial structural schematic diagram of one specific embodiment of the body of the support device provided by the present invention;

[0026] Figure 2 for Figure 1 Cross-sectional view at the second vacuum hole;

[0027] Figure 3 This is a structural diagram showing the fit between the body of the bearing device and the sealing component provided by the present invention;

[0028] Figure 4 A structural diagram showing the fit between the body and the switching component of the bearing device provided by the present invention;

[0029] Figure 5 This is a schematic diagram of the sealing component.

[0030] Figure 1-5 The annotations in the accompanying drawings are explained as follows:

[0031] 1. Body, 11. First vacuum hole, 12. Second vacuum hole, 13. Notch, 131. Sealing mating surface;

[0032] 2 Switching components, 21 Sealing components, 211 Sealing face, 22 Driving components, 23 Sealing components, 24 Monitoring switches. Detailed Implementation

[0033] To enable those skilled in the art to better understand the technical solutions of the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0034] The terms "first" and "second" used in this article are used only for the convenience of describing two or more structures or components that are identical or similar in structure and / or function, and do not indicate any special limitation on order and / or importance.

[0035] Please refer to Figure 1-5 , Figure 1 This is a partial structural diagram of one specific embodiment of the body of the support device provided by the present invention. Figure 2 for Figure 1 Cross-sectional view at the second vacuum hole. Figure 3 This is a structural diagram showing the mating structure of the body and the sealing component of the bearing device provided by the present invention. Figure 4 This is a structural diagram showing the fit between the body of the bearing device and the switching component provided by the present invention. Figure 5 This is a schematic diagram of the sealing component.

[0036] like Figure 1-3 As shown, the present invention provides a carrier device, including a body 1, which has an adsorption surface for adsorbing a substance to be adsorbed. The body 1 can be disc-shaped or other shapes, depending on the shape and structure of the substance to be adsorbed. The body 1 also has a vacuum pipeline, a first vacuum hole 11, and a second vacuum hole 12. The first vacuum hole 11 is disposed on the surface of the adsorption surface, and the second vacuum hole 12 is connected to the outside. The first vacuum hole 11 and the second vacuum hole 12 are connected through the vacuum pipeline. The invention also includes a switch component 2, which can switch the first vacuum hole 11 between a connected state and a closed state.

[0037] With this structure, when it is necessary to fix the adsorbent, the first vacuum port 11 can be switched to a closed state with the outside through the switch component 2. Then, a vacuum process can be performed to fix the adsorbent through negative pressure adsorption. After the operation on the adsorbent is completed, the pumping component (such as a vacuum source, a vacuum valve mentioned in the background art, etc.) can be turned off. Then, the first vacuum port 11 can be switched to a state connected to the outside through the switch component 2. The vacuum pipeline and the atmosphere can be connected through the second vacuum port 12. Due to the existence of the pressure difference, the outside atmosphere can be quickly filled into the vacuum channel between the body 1 and the adsorbent to release the vacuum adsorption on the adsorbent. Thus, the adsorbent can be quickly transferred under safe conditions. Compared with the prior art, the vacuum release time can be greatly shortened and the production efficiency can be improved.

[0038] The switching component 2 can switch the state of the first vacuum hole 11 being connected to the outside world by switching the second vacuum hole 12 between an open state and a blocked state, or by switching the vacuum pipeline between a conducting state and a closed state.

[0039] Specifically, the switch component 2 may be equipped with a blocking component 21. In the open state, the blocking component 21 can open the second vacuum hole 12; in the blocked state, the blocking component 21 can block the second vacuum hole 12. The switching between the open and blocked states of the blocking component 21 can be manual or automatic.

[0040] When manually switched, the sealing component 21 should be able to fix the sealing component 21 to the body 1 in order to seal the second vacuum hole 12. For example, the sealing component 21 may have an insertion part, which can be connected to the second vacuum hole 12 by means of interference fit, threaded connection, etc., to ensure that the sealing component 21 does not fall off in the sealed state. In the open state, the sealing component 21 can be directly removed and placed elsewhere for storage. Alternatively, the sealing component 21 can also be connected to the body 1 by means of a rope, hinge, etc. In this case, even if the sealing connection between the sealing component 21 and the second vacuum hole 12 is released, the sealing component 21 can still be connected to the body 1, which can effectively prevent the loss of the sealing component 21 and facilitate the quick installation of the sealing component 21.

[0041] When automatic switching is enabled, the switch component 2 may also include a drive component 22, which is connected to the blocking component 21 in a transmission manner, and is used to drive the blocking component 21 to switch between an open state and a blocking state.

[0042] The driving component 22 can take many forms, depending on the specific action requirements of the blocking component 21. If the switching between the opening and blocking states of the blocking component 21 is a linear displacement, the driving component 22 can be a component that can directly generate linear displacement, such as a cylinder or hydraulic cylinder. Alternatively, the driving component 22 can also be a motor. In this case, a transmission mechanism such as a gear rack or worm gear can be provided between the driving component 22 and the blocking component 21 to convert the rotational displacement output by the motor into linear displacement. If the switching between the opening and blocking states of the blocking component 21 is a rotational displacement, for example, if the blocking component 21 is hinged to the body 1, the driving component 22 can be a component that can directly generate rotational displacement, such as a motor. Of course, the driving component 22 in this case can also be a driving component in the form of a cylinder or hydraulic cylinder, as mentioned above.

[0043] The drive component 22 can be mounted on an external bracket or other component. In this case, there may be no connection between the drive component 22 and the main body 1. Alternatively, the drive component 22 can also be mounted on the main body 1. The specific mounting position is related to the position of the outlet end of the second vacuum port 12. In the attached drawings, the drive component 22 can be located on the side of the main body 1 away from the adsorption surface. The drive component 22 and the main body 1 can be fixed by means of screws or other connectors, or by means of snap-fitting, welding, etc.

[0044] Taking the scheme shown in the attached diagram as an example, the outlet end of the second vacuum hole 12 can be located on the outer peripheral wall of the body 1, combined with... Figure 4 The driving component 22 can be located on the lower surface of the body 1 and close to the outer peripheral wall of the body 1.

[0045] Furthermore, the outer edge of the body 1 may also be provided with a notch 13, and the outlet end of the second vacuum hole 12 may be located at the bottom wall of the notch 13. In the blocked state, the sealing member 21 may be inserted into the notch 13, so as to avoid excessive increase in the space occupied by the device due to the installation of the sealing member 21.

[0046] In addition, the outlet end of the second vacuum hole 12 can also be located in other parts of the body 1, such as the lower surface, etc., and can be set according to actual needs.

[0047] Combination Figure 5 The sealing member 21 may have a sealing surface 211, and the part of the body 1 opposite to the sealing surface 211 may be a sealing mating surface 131 (in the embodiment shown in the figure, the bottom wall of the notch groove 13). The outlet end of the second vacuum hole 12 may be located at the sealing mating surface 131. At least one of the sealing surface 211 and the sealing mating surface 131 may be provided with a sealing member 23 to seal the gap between the sealing surface 211 and the second vacuum hole 12 in the sealing state, thereby avoiding air leakage at the second vacuum hole 12 to a large extent.

[0048] The structure of the aforementioned sealing element 23 is related to its installation position. When it is installed on the sealing mating surface 131, it can be arranged around the outlet end of the second vacuum hole 12. The structure can be an O-ring or the like. In the sealing state, the sealing surface 211 can squeeze the sealing element 23 to form a seal. When it is installed on the sealing surface 211, the sealing element 23 can also be an O-ring, which is then squeezed with the sealing mating surface 131 to form a seal. Alternatively, the sealing element 23 can also be a rubber ball, rubber block, etc. In the sealing state, this type of sealing element 23 can be directly inserted into the second vacuum hole 12 to form a seal.

[0049] In addition to the option of setting the seal 23 on the sealing face 211 and / or the sealing mating face 131, the seal 23 can also be set directly on the outlet end of the second vacuum hole 12. In this case, the seal 23 can be a sealing sleeve, a part of which can be inserted into the second vacuum hole 12 and the other part can extend out of the second vacuum hole 12 so as to cooperate with the sealing face 211 to seal the gap between the sealing face 211 and the second vacuum hole 12.

[0050] The switching component 2 can switch the vacuum pipeline to either the on or off state by providing an opening (not shown in the figure) in the body 1. The opening can be located on the side of the body 1 away from the adsorption surface (the lower surface in the figure). The opening can be connected to the vacuum pipeline through a connecting channel (not shown in the figure). The aforementioned sealing component 21 can be configured to slide into or out of the vacuum pipeline through the connecting channel, thereby enabling the vacuum pipeline to be turned off or on.

[0051] At this time, the aforementioned second vacuum hole 12 located on the outer peripheral wall of the main body 1 may exist. Alternatively, the opening together with the connecting channel may be understood as the second vacuum hole 12, that is, the sealing member 21 can slide in and out of the second vacuum hole 12 to realize the connection and disconnection between the vacuum pipeline and the second vacuum hole 12 and the outside world.

[0052] Vacuum release of the adsorbate can be achieved by gradually filling it with external atmosphere. In this case, no other positive pressure inflation equipment is needed, and the structure of the bearing device provided by the present invention can be relatively simple. In addition, when air is filled into the vacuum channel from the atmosphere, the air pressure on the upper and lower sides of the adsorbate will eventually be the same, which will not cause the adsorbate to be blown up, thus better ensuring the safety of the vacuum release process.

[0053] Alternatively, an air blowing component can be installed, which can be connected to a vacuum pipeline. When it is necessary to release the adsorbate under vacuum, air can be blown into the vacuum pipeline through the air blowing component, which is more conducive to the rapid release of the adsorbate.

[0054] Furthermore, it may also include a monitoring switch 24 for monitoring the status information of the sealing element 21, which can be displayed on a screen for timely viewing.

[0055] The aforementioned monitoring switch 24 can directly monitor the status information of the sealing component 21. In this case, the monitoring switch 24 can be a limit switch, position sensor, etc., to obtain the status information of the sealing component 21 by monitoring the position or stroke of the sealing component 21. Alternatively, the monitoring switch 24 can also indirectly feed back the status information of the sealing component 21 by monitoring the status information of the driving component 22. Taking the driving component 22 as a cylinder as an example, the monitoring switch 24 can be a cylinder sensor, which can monitor whether the piston rod of the cylinder is in the extended state or the retracted state, and thus indirectly determine whether the sealing component 21 is in the open state or the blocked state.

[0056] In the above-mentioned schemes, the structure of the switching component 2 is described by taking the example that the blocking component 21 can be displaced (linear displacement or rotational displacement) relative to the body 1 to switch the state of the blocking component 21. In fact, the switching component 2 can also adopt other structures. For example, the switching component 2 can be in the form of a switching valve. In this case, it can be installed in the second vacuum hole 12 or at the outlet end of the second vacuum hole 12. The blocking component 21 can be the valve core of the switching valve. By driving the valve core to move, the switching between the blocking state and the opening state can be completed.

[0057] It should be noted that the number of second vacuum holes 12 is not limited in the embodiments of the present invention. It is related to the number of first vacuum holes 11 and the communication structure between each first vacuum hole 11. If all first vacuum holes 11 are connected, the number of second vacuum holes 12 is related to the required vacuum release speed. It should be understood that the more second vacuum holes 12 there are, the faster the vacuum release speed will be. Correspondingly, the more switching components 2 are required. The switching components 2 and the second vacuum holes 12 can be in one-to-one correspondence, or one switching component 2 can control the blocking or opening of multiple second vacuum holes 12 at the same time. The specific determination can be made according to the actual situation.

[0058] The present invention also provides a method of using the carrier device, applicable to the carrier devices involved in the above embodiments. The method of use includes an adsorption step and a release step. The adsorption step includes: controlling the switch component 2 to disconnect the vacuum pipeline from the outside; drawing a vacuum into the vacuum pipeline to generate an adsorption force on the adsorption surface through the first vacuum hole 11, thereby adsorbing the object to be adsorbed through the adsorption surface. The release step includes: controlling the switch component 2 to connect the first vacuum hole 11 to the outside.

[0059] Since the aforementioned support device already possesses the above-mentioned technical effects, the method of using the support device will also possess similar technical effects, and therefore will not be elaborated upon here.

[0060] Furthermore, the aforementioned support device may also include an air-blowing component, which can be connected to a vacuum line. Thus, the aforementioned release step may further include controlling the air-blowing component to blow air into the vacuum line, thereby further shortening the vacuum release time.

[0061] The above are merely preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A supporting device, characterized in that, Includes a body (1), the body (1) including an adsorption surface, the adsorption surface being used to adsorb the substance to be adsorbed; The main body (1) is also provided with a vacuum pipeline, a first vacuum hole (11) and a second vacuum hole (12); The first vacuum hole (11) is disposed on the surface of the adsorption surface, and the second vacuum hole (12) is connected to the outside world. The first vacuum hole (11) and the second vacuum hole (12) are connected through the vacuum pipeline. The system also includes a switch component (2), which switches the first vacuum hole (11) between the connected state and the closed state. The switching component (2) switches the second vacuum hole (12) between an open state and a blocked state; when the second vacuum hole (12) is in a blocked state, a vacuum is drawn into the vacuum pipeline, which can generate an adsorption force on the adsorption surface through the first vacuum hole (11).

2. The bearing device according to claim 1, characterized in that, The switch component (2) includes a sealing component (21). In the open state, the sealing component (21) allows the vacuum pipeline to communicate with the outside through the second vacuum hole (12). In the sealed state, the sealing component (21) disconnects the vacuum pipeline from the outside.

3. The bearing device according to claim 2, characterized in that, The switching component (2) further includes a driving component (22), which is connected to the blocking component (21) for driving the blocking component (21) to switch between the open state and the blocking state.

4. The bearing device according to claim 3, characterized in that, The driving component (22) is a cylinder, a hydraulic cylinder, or a motor.

5. The bearing device according to claim 3, characterized in that, The drive component (22) is installed on the side of the body (1) away from the adsorption surface.

6. The bearing device according to any one of claims 2-5, characterized in that, The outlet end of the second vacuum hole (12) is located on the outer peripheral wall of the body (1).

7. The bearing device according to claim 6, characterized in that, The switching component (2) switches the second vacuum hole (12) between an open state and a blocked state; the outer edge of the body (1) is provided with a notch (13), the outlet end of the second vacuum hole (12) is located at the bottom wall of the notch (13), and in the blocked state, the blocking component (21) is inserted into the notch (13).

8. The bearing device according to any one of claims 2-5, characterized in that, The sealing member (21) has a sealing face (211), and the part of the body (1) facing the sealing face (211) is a sealing mating face (131). The outlet end of the second vacuum hole (12) is located on the sealing mating face (131). At least one of the sealing face (211) and the sealing mating face (131) is provided with a sealing member (23) to seal the gap between the sealing face (211) and the second vacuum hole (12) in the sealing state.

9. The bearing device according to any one of claims 2-5, characterized in that, The sealing member (21) has a sealing face (211), and the outlet end of the second vacuum hole (12) is provided with a sealing member (23). In the sealed state, the sealing member (23) can seal the gap between the sealing face (211) and the second vacuum hole (12).

10. The bearing device according to claim 1, characterized in that, The switch component (2) includes a sealing component (21); The body (1) is provided with an opening, which is connected to the vacuum pipeline through a connecting channel. The sealing member (21) is configured to slide into or out of the vacuum pipeline through the connecting channel to shut off or open the vacuum pipeline.

11. The bearing device according to claim 1, characterized in that, The switching component (2) switches the second vacuum hole (12) between an open state and a blocked state; It also includes: an air blowing component, which is connected to the vacuum pipeline.

12. The bearing device according to any one of claims 1-5, characterized in that, It also includes a monitoring switch (24) for monitoring the status information of the switch component (2).

13. The bearing device according to any one of claims 1-5, characterized in that, Also includes: An air extraction component is connected to the vacuum pipeline.

14. A method of using a bearing device, characterized in that, The method of use is applicable to the carrier device according to any one of claims 1-13, and includes an adsorption step and a release step; The adsorption step includes: controlling the switch component (2) to disconnect the vacuum pipeline from the outside; drawing a vacuum into the vacuum pipeline so that the adsorption surface generates an adsorption force through the first vacuum hole (11) and the adsorption surface adsorbs the adsorbent; The release step includes: stopping the vacuum pumping and controlling the switch component (2) to connect the first vacuum hole (11) to the outside.

15. The method of using the bearing device according to claim 14, characterized in that, The bearing device further includes an air blowing component, which is connected to the vacuum pipeline; The release step further includes controlling the blowing component to blow air into the vacuum line.

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