A vacuum isolation valve and a vacuum system having the same

Abstract

The present invention provides a vacuum isolation valve and a vacuum system having the same, which belong to the field of vacuum valve technology; the vacuum isolation valve includes: a valve body, having an open end suitable for connecting to the outer wall of a vacuum chamber, a valve plate suitable for extending into the vacuum chamber through the open end being slidably arranged in the valve body; a valve seat suitable for being arranged on the inner wall of the vacuum chamber, the valve seat having a valve hole suitable for connecting to the vent hole of the vacuum chamber, and the valve hole suitable for being closed in cooperation with the valve plate. The moving space of the valve plate of the present invention is the valve body and the vacuum chamber, and the valve plate moves toward and away from the valve seat to open and close the valve hole; during the movement of the valve plate, it does not contact the outside world, so it does not raise dust, ensuring that the vacuum environment inside the vacuum chamber is always in a clean state, and can meet higher and more special vacuum requirements.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, and in particular to a vacuum isolation valve and a vacuum system having the same. Background Art

[0002] The vacuum industry has developed into an indispensable part of the industrial system. The vacuum industry cannot do without vacuum valves. General vacuum valves need to be composed of a drive, a valve body, a valve seat, a valve plate and a sealing ring, and the valve plate is located outside the vacuum chamber.

[0003] The above-mentioned vacuum valve, when the valve plate moves, is prone to raise dust, which cannot meet the needs of certain special vacuum occasions. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defect that the valve plate of the vacuum valve in the prior art easily raises dust during movement and fails to meet the vacuum requirements in certain special occasions, thereby providing a vacuum valve capable of reducing dust raised by the valve plate and a vacuum system having the same.

[0005] In order to solve the above technical problems, the vacuum isolation valve provided by the present invention comprises:

[0006] A valve body having an opening end adapted to be in communication with an outer wall of the vacuum chamber, wherein a valve plate adapted to extend into the vacuum chamber through the opening end is slidably disposed in the valve body;

[0007] The valve seat is suitable for being arranged on the inner side wall of the vacuum chamber, and the valve seat has a valve hole suitable for being connected with the vent hole of the vacuum chamber, and the valve hole is suitable for being closed in cooperation with the valve plate.

[0008] As a preferred solution, the valve seat is integrally formed on the inner wall of the vacuum chamber.

[0009] As a preferred solution, the valve body has a first cavity and a second cavity, a piston is slidably arranged in the first cavity, and the second cavity is suitable for accommodating the valve plate, and the valve plate is connected to the piston through a valve stem;

[0010] A sealing assembly is provided between the first cavity and the second cavity, and the valve stem can slidably and sealably pass through the sealing assembly.

[0011] As a preferred solution, a differential air pumping structure is provided in the sealing component, and the differential air pumping structure includes:

[0012] The differential air extraction cavity is annular and is arranged around the valve stem. The differential air extraction cavity is sealed with the first cavity and the second cavity of the valve body respectively.

[0013] The differential air pumping hole has one end connected to the differential air pumping cavity and the other end suitable for connecting to the air pumping device.

[0014] As a preferred solution, the differential air pumping structure further includes:

[0015] A differential air pumping ring is concentrically arranged in the differential air pumping cavity, and has a gap between the differential air pumping ring and the valve stem and the inner wall of the differential air pumping cavity;

[0016] An elastic sealing ring is concentrically arranged in the differential air pumping cavity, and at least one elastic sealing ring is respectively arranged on both sides of the differential air pumping ring.

[0017] As a preferred solution, the second cavity of the valve body is sealed to the outer side wall of the vacuum chamber via a first sealing flange.

[0018] As a preferred solution, a second sealing flange is concentrically arranged between the first sealing flange and the outer side wall of the vacuum chamber.

[0019] A vacuum system comprises a vacuum isolation valve according to any one of the above-mentioned solutions.

[0020] The technical solution of the present invention has the following advantages:

[0021] 1. In the vacuum isolation valve provided by the present invention, the moving space of the valve plate is the valve body and the vacuum chamber, and the valve plate moves toward and away from the valve seat to realize the opening and closing of the valve hole; during the movement of the valve plate, the valve plate does not contact the outside world, so it will not raise dust, ensuring that the vacuum environment inside the vacuum chamber is always in a clean state, and can meet higher and more special vacuum requirements.

[0022] 2. In the vacuum isolation valve provided by the present invention, the valve seat is integrally formed on the inner wall of the vacuum chamber, which not only reduces the overall volume of the isolation valve, but also improves the airtightness between the valve seat and the vacuum chamber.

[0023] 3. The vacuum isolation valve provided by the present invention, when the isolation valve is in an open state, the valve plate moves into the second cavity, so that the valve plate and the vacuum chamber are separated and do not interfere with each other; in addition, there is space in the second cavity for adding other components to meet the different needs of users.

[0024] 4. The vacuum isolation valve provided by the present invention has a differential air pumping structure added between the first cavity and the second cavity, so that there is a differential air pumping cavity between the first cavity and the second cavity; when leakage occurs between the first cavity and the second cavity due to excessive pressure difference, the air first enters the differential air pumping cavity, and the air pumping device can pump away the air to avoid entering the vacuum chamber, thereby ensuring the vacuum degree of the vacuum chamber.

[0025] 5. In the vacuum isolation valve provided by the present invention, the differential air pumping ring and the elastic sealing ring are arranged in cooperation, so that the differential air pumping cavity is sealed and isolated from the first cavity and the second cavity respectively.

[0026] 6. The provision of the second sealing flange in the vacuum isolation valve provided by the present invention increases the accommodation space of the second cavity.

[0027] 7. The vacuum system provided by the present invention has the advantages of any one of the above solutions in turn because it has the vacuum isolation valve described in any one of the above solutions. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the specific implementation methods of the present invention or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0029] Figure 1 It is a front cross-sectional view of the vacuum isolation valve provided in the present invention.

[0030] Figure 2 for Figure 1 Magnified view of area A.

[0031] Figure 3 for Figure 1 Magnified view of area B.

[0032] Figure 4 for Figure 1 Magnified view of region C.

[0033] Figure 5 It is a schematic diagram of the three-dimensional structure of the valve plate.

[0034] Description of reference numerals:

[0035] 1. Sealing end cover; 2. Cylinder body; 3. First sealing flange; 4. First cavity; 5. Second cavity; 6. Connecting hole; 7. Piston; 8. Valve plate; 9. Valve stem; 10. Vacuum chamber; 11. First air source hole; 12. Second air source hole; 13. First in-position switch; 14. Second in-position switch; 15. First touch rod; 16. First sliding sleeve; 17. First compression spring; 18. Second touch rod; 19. Second sliding sleeve; 20. Second compression spring; 21. Second sealing flange; 22. First sealing screw; 23. Second sealing screw; 24. Valve seat; 25. Differential exhaust hole; 26. Differential exhaust ring; 27. Elastic sealing ring; 28. Pressing ring; 29. ​​Elastic retaining ring; 30. Protrusion. DETAILED DESCRIPTION

[0036] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0038] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0040] This embodiment provides a vacuum isolation valve, including: a valve body, a valve plate 8 , a valve seat 24 and a vacuum chamber 10 .

[0041] like Figure 1As shown, the valve body includes a sealing end cover 1, a cylinder body 2 and a first sealing flange 3, the sealing end cover 1, the cylinder body 2 and the first sealing flange 3 are sealed and connected in sequence, and the valve body is connected with the vacuum chamber 10 through the first sealing flange 3; the cylinder body 2 has a first cavity 4 that passes through its axis, and the first sealing flange 3 has a second cavity 5 inside, and the end of the first sealing flange 3 facing the cylinder body 2 has a connecting hole 6 that passes through the first cavity 4 and the second cavity 5. The first cavity 4 is slidably connected with a piston 7, and a sealing ring is sleeved on the circumference of the piston 7. The piston 7 is in sealing contact with the inner wall of the first cavity 4 through the sealing ring, and the first cavity 4 is divided into two parts that are not connected to each other; the center of the piston 7 is vertically connected with a valve stem 9, one end of the valve stem 9 passes through the connecting hole 6 and extends into the second cavity 5, and the end of the valve stem 9 away from the piston 7 is connected with a valve plate 8, and the valve stem 9 can drive the valve plate 8 to extend into the vacuum chamber 10.

[0042] like Figure 2 , Figure 3 As shown, the two sides of the piston 7 are provided with air source holes and in-position switches, respectively, the air source holes are respectively the first air source hole 11 and the second air source hole 12, and the in-position switches are respectively the first in-position switch 13 and the second in-position switch 14. The first air source hole 11 is provided on the sealing end cover 1 and connects the outside with the first cavity 4, the second air source is provided on the end of the first sealing flange 3 facing the cylinder body 2 and connects the outside with the first cavity 4; the first in-position switch 13 is connected to the sealing end cover 1, and the first in-position switch 13 cooperates with the first touch assembly to realize the limit of the piston 7. The second in-position switch 14 is connected to the first sealing flange 3, and the second in-position switch 14 cooperates with the second touch assembly to limit the piston 7; the first touch assembly includes: a first touch rod 15, a first sliding sleeve 16 and a first compression spring 17, the first sliding sleeve 16 is vertically connected to the sealing end cover 1, and the first compression spring 17 is sleeved in the inner cavity of the first sliding sleeve 16; the first touch rod 15 is sleeved in the first compression spring 17, one end of which faces the piston 7 and the other end of which faces the first in-position switch 13. The second touch assembly includes: a second touch rod 18, a second sliding sleeve 19 and a second compression spring 20, the second sliding sleeve 19 is vertically connected to the first sealing flange 3, and the second compression spring 20 is sleeved in the inner cavity of the second sliding sleeve 19; the second touch rod 18 is sleeved in the second compression spring 20, one end of which faces the piston 7 and the other end of which faces the second in-position switch 14.

[0043] like Figure 3As shown, a sealing component is provided between the first cavity 4 and the second cavity 5, and the sealing component is arranged in the connecting hole 6 of the first sealing flange 3, and the connecting hole 6 is a stepped hole, and the valve stem 9 can slide and seal through the sealing component. A differential air pumping structure is provided in the sealing component, and the differential air pumping structure includes: a differential air pumping cavity, a differential air pumping hole 25, a differential air pumping ring 26 and an elastic sealing ring 27; there are two elastic sealing rings 27, which are respectively sleeved on the valve stem 9, and the elastic sealing ring 27 facing the second cavity 5 abuts against the inner wall of the connecting hole 6, and the elastic sealing ring 27 away from the second cavity 5 is axially limited by a pressure ring 28 and an elastic retaining ring 29; the area between the two elastic sealing rings 27 constitutes The differential air pumping cavity is annularly arranged around the valve stem 9, and is sealed with the first cavity 4 and the second cavity 5 respectively; the differential air pumping ring 26 is concentrically arranged in the differential air pumping cavity, and abuts against the two elastic sealing rings 27 respectively, and there is a gap between the differential air pumping ring 26 and the valve stem 9 and the inner wall of the differential air pumping cavity; the differential air pumping hole 25 is opened on the first sealing flange 3, one end of which is connected with the differential air pumping cavity, and the other end is connected with the air pumping device.

[0044] like Figure 4 As shown, a second sealing flange 21 is connected between the first sealing flange 3 and the vacuum chamber 10; the first sealing flange 3 and the second sealing flange 21 are concentrically arranged and sealed with a first sealing screw 22 and a sealing ring; the second sealing method is sealed to the outer wall of the vacuum chamber 10 by a second sealing screw 23 and a sealing ring, and the second sealing flange 21 increases the accommodating space of the second cavity 5; a vent hole communicating with the outside is provided on the side of the vacuum chamber 10 away from the valve body; the valve seat 24 is integrally formed on the inner wall of the vacuum chamber 10, and a valve hole is opened on the valve seat 24, and the valve hole is communicated with the vent hole; the valve stem 9 pushes the valve plate 8 to move toward the vacuum chamber 10, and blocks the valve hole, so that the vacuum chamber 10 is not connected with the outside.

[0045] like Figure 5 As shown, an arc-shaped protrusion 30 is provided at one end of the valve plate 8 facing the valve stem 9. When the valve plate 8 is inserted into the valve hole, the side of the protrusion 30 facing away from the valve stem 9 is in close contact with the outer wall of the valve seat 24 to achieve sealing of the valve hole.

[0046] The vacuum isolation valve described above can be applied to a vacuum system.

[0047] Working principle:

[0048] When air enters the first air source hole 11, the piston 7 is pushed to move toward the vacuum chamber 10, and the piston 7 hits the second touch rod 18, so that the second touch rod 18 triggers the in-position signal of the second in-position switch 14, thereby limiting the position of the piston 7; at the same time, the valve stem 9 drives the valve plate 8 to extend into the valve hole of the valve seat 24, so that the valve plate 8 blocks the valve hole, so that the vacuum chamber 10 is not connected to the outside.

[0049] When the vacuum chamber 10 is not connected to the outside, there is a large pressure difference between the first cavity 4 and the second cavity 5; if leakage occurs, the air first enters the differential vacuum cavity, and the vacuum device can extract the air to avoid entering the vacuum chamber 10, thereby ensuring the vacuum degree of the vacuum chamber 10.

[0050] When air is introduced into the second air source hole 12, the piston 7 is pushed to move away from the vacuum chamber 10, and the in-position signal of the second in-position switch 14 is released; at the same time, the valve stem 9 drives the valve plate 8 to disengage from the valve hole of the valve seat 24, so that the vacuum chamber 10 is connected with the outside; the piston 7 continues to move until it hits the first touch rod 15, so that the first touch rod 15 triggers the in-position signal of the first in-position switch 13, thereby limiting the piston 7; at the same time, the valve stem 9 drives the valve plate 8 to enter the second cavity 5.

[0051] The moving space of the valve plate 8 is the second cavity 5 and the vacuum chamber 10. The valve plate 8 moves toward and away from the valve seat 24 to open and close the valve hole. During the movement, the valve plate 8 does not contact the outside world, so it will not raise dust, ensuring that the vacuum environment inside the vacuum chamber 10 is always in a clean state, which can meet higher and more special vacuum requirements.

[0052] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A vacuum isolation valve, characterized in that: include: A valve body having an opening end adapted to be in communication with an outer wall of the vacuum chamber (10), wherein a valve plate (8) adapted to extend into the vacuum chamber (10) through the opening end is slidably disposed in the valve body; a valve seat (24) adapted to be arranged on the inner side wall of the vacuum chamber (10), the valve seat (24) having a valve hole adapted to be in communication with the vent hole of the vacuum chamber (10), the valve hole adapted to cooperate with the valve plate (8) for sealing; The valve body comprises a first cavity (4) and a second cavity (5), the first cavity (4) being slidably provided with a piston (7), the second cavity (5) being suitable for accommodating the valve plate (8), the valve plate (8) being connected to the piston (7) via a valve stem (9); A sealing assembly is provided between the first cavity (4) and the second cavity (5), and the valve stem (9) can slidably and sealingly pass through the sealing assembly; An arc-shaped protrusion (30) is provided at one end of the valve plate (8) facing the valve stem (9); when the valve plate (8) is inserted into the valve hole, the side of the protrusion (30) facing away from the valve stem (9) is in close contact with the outer wall of the valve seat (24) to achieve sealing of the valve hole; The moving space of the valve plate (8) is the second cavity (5) and the vacuum chamber (10); the valve plate (8) moves towards and away from the valve seat (24) to open and close the valve hole; and the valve plate (8) does not come into contact with the outside world during the movement.

2. The vacuum isolation valve according to claim 1, characterized in that: The valve seat (24) is integrally formed on the inner wall of the vacuum chamber (10).

3. The vacuum isolation valve according to claim 1, characterized in that: A differential air pumping structure is provided in the sealing component, and the differential air pumping structure comprises: The differential air extraction cavity is annular and arranged around the valve stem (9), and the differential air extraction cavity is sealed with the first cavity (4) and the second cavity (5) of the valve body respectively; The differential air extraction hole (25) has one end connected to the differential air extraction cavity and the other end suitable for connecting to the air extraction device.

4. The vacuum isolation valve according to claim 3, characterized in that: The differential air pumping structure further includes: A differential air pumping ring (26) is concentrically arranged in the differential air pumping cavity, with a gap between the differential air pumping ring (26) and the valve stem (9) and the inner wall of the differential air pumping cavity; An elastic sealing ring (27) is concentrically arranged in the differential air pumping cavity, and at least one elastic sealing ring (27) is respectively arranged on both sides of the differential air pumping ring (26).

5. The vacuum isolation valve according to any one of claims 1 to 4, characterized in that: The second cavity (5) of the valve body is sealedly connected to the outer side wall of the vacuum chamber (10) via a first sealing flange (3).

6. The vacuum isolation valve according to claim 5, characterized in that: A second sealing flange (21) is also concentrically arranged between the first sealing flange (3) and the outer side wall of the vacuum chamber (10).

7. The vacuum isolation valve according to any one of claims 1 to 4, characterized in that: The second cavity (5) of the valve body is sealedly connected to the outer side wall of the vacuum chamber (10) via a first sealing flange (3).

8. The vacuum isolation valve according to claim 7, characterized in that: A second sealing flange (21) is also concentrically arranged between the first sealing flange (3) and the outer side wall of the vacuum chamber (10).

9. A vacuum system, characterized in that: The vacuum isolation valve comprises the vacuum isolation valve according to any one of claims 1 to 8.

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