Positioning mechanism of crystal bar fixed-angle bonding machine

Abstract

The present invention provides a positioning mechanism for a crystal bar fixed-angle bonding machine, belonging to the technical field of semiconductor equipment. It solves the problem of low bonding accuracy of existing crystal bar fixed-angle bonding machines. The positioning mechanism of this crystal bar fixed-angle bonding machine includes a fixture for horizontally positioning a material plate and a correction reference vertical plate vertically arranged above the fixture and capable of rotating relative to the fixture. A positioning frame is connected to the correction reference vertical plate and can slide in a direction perpendicular to the plate surface of the correction reference vertical plate. A flexible suction cup capable of adsorbing the crystal bar is connected to the positioning frame. When the flexible suction cup adsorbs the crystal bar, the positioning frame can retract and make the crystal bar press against the correction reference vertical plate. A pressing block is also provided on the correction reference vertical plate. When the flexible suction cup adsorbs the crystal bar and the crystal bar presses against the correction reference vertical plate, the pressing block can descend and press the crystal bar tightly on the material plate. The bonding accuracy of this crystal bar fixed-angle bonding machine is higher.

Description

Technical Field

[0001] The present invention belongs to the technical field of semiconductor equipment and relates to a positioning mechanism of a crystal bar fixed-angle bonding machine. Background Art

[0002] Crystal oscillators are essential components in digital circuits and provide clock references for digital circuits. The quartz wafers inside crystal oscillators are made by cutting crystal bars. Before cutting the crystal bar, there is a very important fixed-angle bonding process. The specific process is to measure the angle between the outer processing surface and the oriented atomic plane of the crystal bar by X-ray diffraction, and then bond the crystal bar to the workpiece plate at the correct angular attitude. The purpose of the fixed-angle bonding process is to make the angle between the cutting surface of the cut wafer and the oriented atomic plane (abbreviated as wafer angle) within a specified angle range. For wafers with different frequencies, different wafer angles are required, and the angle error determines the temperature-frequency characteristics of the crystal oscillator.

[0003] The existing stick-bar process is as follows: from angle measurement to final bonding positioning, it is an open-loop system. After adjusting the deflection angle, the crystal bar is manually pressed and held, and the crystal bar and the workpiece plate are bonded together with glue, and finally the glue is cured for a certain period of time. Since it is an open-loop system, errors caused by various factors during the process cannot guarantee the accuracy of the attitude angle between the crystal bar and the workpiece plate, resulting in poor accuracy of the cut wafer angle.

[0004] There is also a crystal bar orientation bonding machine disclosed in a patent document (application number: 201620999397.4), which includes a workbench, an X-ray generator and an X-ray receiver are installed on the workbench, a vertical plate is also fixed on the workbench, a motor mounting seat that can move vertically under the drive of a driving device one is slidably connected to the vertical plate, a rotating motor and an angle adjustment detection mechanism for controlling and detecting the rotation angle of the rotating motor are installed on the motor mounting seat, a clamp is installed on the motor shaft of the rotating motor, a bonding platform is arranged below the clamp, the bonding platform is slidably connected to the workbench and can horizontally translate the crystal bar under the drive of a driving device two and place it on the upper clamp for positioning, and then rotate and adjust the orientation. After the angle is adjusted, it descends to the bonding platform for bonding. This device can realize the bonding of the crystal bar. However, since it is difficult to ensure the absolute parallelism between the upper side and the lower side of the crystal bar, and the clamp is adsorbed on the upper side of the crystal bar for positioning, that is, the upper side of the crystal bar abuts against the reference surface on the clamp, and when the crystal bar is cut, it needs to be based on the bonding platform. It is difficult to ensure the absolute fit between the lower side of the crystal bar and the upper side of the bonding platform after the above crystal bar descends, resulting in low bonding accuracy and large randomness. Summary of the Invention

[0005] The object of the present invention is to address the problems existing in the prior art and propose a positioning mechanism of a crystal bar fixed-angle bonding machine to solve the problem of low bonding accuracy of existing crystal bar fixed-angle bonding machines.

[0006] The object of the present invention can be achieved by the following technical solutions: The positioning mechanism of the ingot fixed-angle bonding machine includes a fixture for horizontally positioning the material plate and a correction reference vertical plate vertically arranged above the fixture and capable of rotating relative to the fixture. It is characterized in that a positioning frame capable of sliding in a direction perpendicular to the plate surface of the correction reference vertical plate is connected to the correction reference vertical plate, a flexible suction cup capable of adsorbing the ingot is connected to the positioning frame, and when the flexible suction cup adsorbs the ingot, the positioning frame can retract and make the ingot press against the correction reference vertical plate. A pressing block is further provided on the correction reference vertical plate. When the flexible suction cup adsorbs the ingot and the ingot presses against the correction reference vertical plate, the pressing block can descend and press the ingot tightly on the material plate.

[0007] The ingot needs to be bonded to the material plate. After the material plate is horizontally positioned on the fixture, the upper side surface of the material plate is the final reference surface. The bottom surface of the ingot needs to be closely attached to the upper side surface of the material plate to ensure the bonding accuracy. For this reason, the present application provides a positioning frame that can horizontally expand and contract and a pressing block that can vertically lift. The positioning frame adsorbs and positions the ingot through a flexible suction cup, that is, a combination of a flexible suction cup and a pressing block is adopted. The ingot is placed on the upper side surface of the material plate, and the ingot is manually abutted against the flexible suction cup. After the flexible suction cup adsorbs the ingot, the positioning frame contracts, so that the ingot abuts against the correction reference vertical plate. Due to the existence of processing and assembly errors, the correction reference vertical plate and the upper side surface of the material plate are not absolutely perpendicular at the microscopic level. This causes a small gap to be generated between the ingot and the upper side surface of the material plate after the ingot is adsorbed and abutted against the correction reference vertical plate. At this time, the pressing block presses down to correct the ingot, so that the bottom surface of the ingot is tightly attached to the upper side surface of the material plate. This causes a small amount of deformation such as tilting and offset of the flexible suction cup to adapt to the small offset of the side surface of the ingot. In this process, the flexible characteristic of the flexible suction cup can prevent the ingot from detaching from the hard suction cup or the ingot moving relative to the hard suction cup and scratching the ingot. After the bottom surface of the ingot is closely attached to the upper side surface of the material plate, the flexible suction cup cuts off the air and releases the ingot. The positioning frame contracts and then extends again, so that the flexible suction cup abuts against and adsorbs the side surface of the ingot again. And during the process of the flexible suction cup cutting off the air and releasing the ingot, the small amount of deformation of the flexible suction cup can be restored, so that the flexible suction cup adsorbs the side surface of the ingot again in a natural state. In this way, the process of the flexible suction cup adsorbing, the pressing block pressing down, the flexible suction cup releasing and then adsorbing again, and the pressing block releasing and then pressing down can be repeated several times as needed, so as to prevent the flexible suction cup from adsorbing the ingot in a deformed state, resulting in the ingot detaching from the upper side surface of the material plate under the elastic force of the deformed flexible suction cup when the angle is adjusted after the pressing block is released, affecting the angle adjustment accuracy. The bottom surface of the ingot abuts against the upper side surface of the material plate and uses this surface as the final reference, so that the subsequent scanning is also based on this to ensure that the bonded angle is the target angle and is not affected by other factors, thereby improving the final bonding accuracy.

[0008] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, the positioning frame includes a long strip-shaped moving plate, the moving plate is slidably arranged at the rear side of the correction reference vertical plate, and a plurality of the above-mentioned flexible suction cups are arranged on the front side of the moving plate, and the flexible suction cups all protrude from the front plate surface of the correction reference vertical plate. The moving plate is located at the rear side of the correction reference vertical plate to avoid interference with the crystal bar. The moving plate is used to drive the flexible suction cup to expand and contract and ensure the stability of both.

[0009] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, a horizontal cylinder is fixed on the rear side of the correction reference vertical plate, the horizontal cylinder is arranged backward, and the piston rod of the horizontal cylinder is fixedly connected with the moving plate through a connecting plate. A limit seat capable of adjusting the maximum moving stroke of the moving plate is also fixed on the rear side of the correction reference vertical plate. The horizontal cylinder is connected with the moving plate through the connecting plate and is used to drive the moving plate to move back and forth. The moving stroke of the moving plate is adjusted and limited through the limit seat to ensure the reliability of the moving plate.

[0010] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, a rear limit block is fixed on the connecting plate, and a rear limit post is screwed on the limit seat. The rear limit post is arranged forward and is opposite to the rear side surface of the rear limit block. When the positioning frame retracts backward, the rear limit block can abut against the rear limit post. When the flexible suction cup adsorbs the crystal bar and the positioning frame retracts so that the crystal bar abuts against the correction reference vertical plate, the rear limit post can limit the rear limit block, limit the retracting stroke of the positioning frame, avoid the crystal bar falling off the flexible suction cup due to excessive retraction of the positioning frame, ensure the positioning accuracy of the crystal bar, and the rear limit post is screwed with the limit seat, and the limiting position of the rear limit post can be adjusted as needed, with wider applicability.

[0011] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, a front limit block is fixed on the horizontal cylinder or the correction reference vertical plate, and a front limit post is screwed on the rear limit block or the connecting plate. The front limit post is arranged forward and is opposite to the rear side surface of the front limit block. When the positioning frame extends forward by a set distance, the front limit post can abut against the front limit block. When the positioning frame extends forward by a set stroke, the front limit post can abut against the front limit block, so as to limit the forward stroke of the positioning frame. Similarly, the front limit post can adjust the limiting position as needed, with wider applicability. Through the arrangement of the front limit post and the rear limit post, the positioning frame can only move within the set stroke range, ensuring reliability.

[0012] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, the positioning frame further includes a strip-shaped buffer plate. The buffer plate is located on the front side of the moving plate and is slidably connected to the moving plate, and the sliding direction of the buffer plate is the same as that of the moving plate. The flexible suction cups are arranged on the front side surfaces at both ends of the buffer plate. A buffer spring for buffering when the buffer plate moves backward relative to the moving plate is further provided between the buffer plate and the moving plate. After manually placing the crystal bar on the material plate, the crystal bar can be pressed towards the correction reference vertical plate. The buffer plate can compress the buffer spring and retract, and the crystal bar can abut against the correction reference vertical plate, ensuring that the side surface of the crystal bar is flush with the correction reference vertical plate and also ensuring that the side surface of the crystal bar is in close contact with several flexible suction cups, thereby avoiding the situation that individual flexible suction cups are separated from the side surface of the crystal bar after manually placing the crystal bar, resulting in difficulty in adsorption in place and ensuring the positioning reliability.

[0013] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, guide sleeves are fixed at both ends of the moving plate. Guide columns are vertically fixed at both ends of the rear side surface of the buffer plate. The two guide columns are respectively slidably inserted into the two guide sleeves. Limit pieces are further fixed at the ends of the guide columns. The buffer spring is sleeved on the guide column and acts on the rear side surface of the buffer plate. Under the action of the buffer spring, the limit piece abuts against the rear end surface of the guide sleeve. Through the cooperation of the guide column and the guide sleeve, the stability of the buffer plate and the flexible suction cups is ensured, and the limit piece limits the buffer plate to ensure the position accuracy of the flexible suction cups in the natural state.

[0014] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, the front plate surface of the correction reference vertical plate has several forwardly protruding reference convex parts. The front end surfaces of the several reference convex parts are reference surfaces. The several reference surfaces are coplanar and vertically arranged. When the flexible suction cups adsorb the crystal bar and the positioning frame retracts, the crystal bar can be pressed against the several reference surfaces. The correction reference vertical plate abuts against the side surface of the crystal bar through the reference surfaces of multiple reference convex parts, that is, by means of multi-point abutment, which can not only ensure the position accuracy of the crystal bar but also avoid the increase in the processing difficulty of the reference surface caused by the fitting and abutment of surfaces. The reference convex parts can be fixed on the correction reference vertical plate by means of inlaying. The reference convex parts can be made of wear-resistant materials to increase the service life and reduce the processing difficulty.

[0015] In the positioning mechanism of the above-mentioned crystal bar fixed-angle bonding machine, a vertically arranged vertical cylinder is further fixed on the correction reference vertical plate. The vertical cylinder is connected to a pressing block. Pressing discs are fixed at both ends of the lower side surface of the pressing block and are arranged downward. The driving component can be located at the rear side of the correction reference vertical plate or at the front side of the correction reference vertical plate, and it can drive the pressing block to press down and ensure the stability of the pressing block.

[0016] In the positioning mechanism of the aforementioned ingot angle bonding machine, the flexible suction cup is trumpet-shaped and made of rubber. A suction hole connected to a vacuum generator is located at the center of the flexible suction cup. This rubber material allows the flexible suction cup to deform adaptively with the ingot, preventing damage to the ingot.

[0017] Compared with the existing technology, the positioning mechanism of this crystal ingot fixed angle bonding machine has the following advantages:

[0018] 1. Since the present application adopts a combination of a flexible suction cup and a pressure block, the bottom surface of the crystal rod is pressed against the upper side of the material plate under the action of the pressure block, and then the flexible suction cup is cut off to release the crystal rod. During the process of the flexible suction cup cutting off the air and releasing the crystal rod, the slight deformation of the flexible suction cup can be restored, so that the flexible suction cup can be adsorbed to the side of the crystal rod again in a natural state, thereby avoiding the flexible suction cup adsorbing the crystal rod in a deformed state, resulting in the crystal rod being separated from the side of the material plate under the elastic force of the deformed flexible suction cup when the angle is adjusted after the pressure block is released, affecting the angle adjustment accuracy. The bottom surface of the crystal rod is abutted against the upper side of the material plate and this surface is used as the final reference, so that subsequent scanning is also based on this to ensure that the angle of the completed bonding is the target angle and is not affected by other factors, thereby improving the final bonding accuracy.

[0019] 2. After manually placing the crystal ingot on the material plate, you can press the crystal ingot toward the correction reference vertical plate. The crystal ingot can be against the correction reference vertical plate, ensuring that the side of the crystal ingot is in contact with several flexible suction cups. This avoids the situation where individual flexible suction cups are separated from the side of the crystal ingot after manual placement, making it difficult to adsorb into place, and ensures positioning reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 It is a three-dimensional structural diagram of this positioning mechanism.

[0021] Figure 2 It is a schematic diagram of the three-dimensional structure at the correction reference vertical plate.

[0022] Figure 3 It is the structural front view at the correction reference vertical plate.

[0023] Figure 4 It is a schematic diagram of the three-dimensional structure of the second viewing angle at the correction reference stand.

[0024] Figure 5 yes Figure 3 Partial structural cross-sectional view at AA in the middle.

[0025] Figure 6 yes Figure 3 Cross-sectional view of the local structure at BB in the middle.

[0026] Figure 7 It is a schematic diagram of the three-dimensional structure of the third perspective at the correction reference stand.

[0027] Figure 8 yes Figure 3 Structural cross-section view at CC in the middle.

[0028] In the figure, 1, scanning direct drive motor; 2, rotating frame; 21, turntable; 22, side plate; 23, top plate; 3, correction direct drive motor; 31, turntable; 4, moving frame; 41, fixture; 411, fixed clamping plate; 412, movable clamping plate; 5, correction reference vertical plate; 51, reference protrusion; 52, clearance gap; 53, avoidance gap; 54, notch; 55, position sensor; 6, positioning frame; 61, moving plate; 611, mounting hole; 612, guide sleeve; 62, buffer Punch plate; 621, guide column; 622, buffer spring; 623, limit plate; 63, positioning block; 631, air guide hole; 64, connecting block; 65, connecting plate; 651, rear limit block; 652, front limit column; 66, horizontal cylinder; 661, front limit block; 7, flexible suction cup; 71, air suction hole; 8, limit seat; 81, mounting part; 811, rear limit column; 9, vertical cylinder; 91, lifting plate; 92, pressure block; 93, pressure plate; 10, material plate. DETAILED DESCRIPTION

[0029] The following are specific embodiments of the present invention and the accompanying drawings to further describe the technical solution of the present invention, but the present invention is not limited to these embodiments.

[0030] like Figure 1 、 Figure 2 、 Figure 3As shown, the positioning mechanism of the crystal bar fixed-angle bonding machine. The crystal bar fixed-angle bonding machine includes a vertically arranged scanning direct drive motor 1 and a rotating frame 2 connected to the output end of the scanning direct drive motor 1. The rotating frame 2 includes a turntable 21, two side plates 22 and a top plate 23. The turntable 21 is horizontally arranged and connected to the output end of the scanning direct drive motor 1. The two side plates 22 are strip-shaped and vertically fixed at the two side edges of the turntable 21. The top plate 23 is fixed on the top of the two side plates 22, making the rotating frame 2 as a whole in the shape of a rectangular frame. The positioning mechanism includes a fixture 41 and a correction reference vertical plate 5. The fixture 41 includes a moving frame 4 slidably connected to the rotating disk in the horizontal direction. The moving frame 4 can be driven by a screw-nut assembly for position adjustment. A fixed clamping plate 411 is fixed on one side of the moving frame 4, and a movable clamping plate 412 is connected by bolts on the other side. By adjusting the bolts, the movable clamping plate 412 and the fixed clamping plate 411 can clamp the material plate 10 horizontally placed on the moving frame 4. A vertically downward correction direct drive motor 3 is fixed on the top plate 23. A rotating table 31 is connected to the output end of the correction direct drive motor 3. The correction reference vertical plate 5 is vertically arranged, and the top end is fixed on the rotating table 31, so that when the moving frame 4 moves, the material plate 10 can pass through below the correction reference vertical plate 5. The correction reference vertical plate 5 can be of a split type, such as including a front plate body and a rear plate body that are fitted and spliced together, which is convenient for processing and the installation of other components. A positioning frame 6 is slidably connected to the correction reference vertical plate 5 in the horizontal direction. The moving direction of the positioning frame 6 is perpendicular to the plate surface of the correction reference vertical plate 5. A plurality of flexible suction cups 7 are connected to the front end of the positioning frame 6. The plurality of flexible suction cups 7 can protrude from the front plate surface of the correction reference vertical plate 5 to adsorb the crystal bar. When the flexible suction cups 7 adsorb the crystal bar, the positioning frame 6 can retract and make the crystal bar press against the correction reference vertical plate 5. A pressing block 92 is also slidably connected to the correction reference vertical plate 5 in the vertical direction. When the flexible suction cups 7 adsorb the crystal bar and the crystal bar presses against the correction reference vertical plate 5, the pressing block 92 can descend and press the crystal bar tightly on the material plate 10.

[0031] Specifically, in combination with Figure 4 、 Figure 5As shown in the figure, the positioning frame 6 includes a moving plate 61, a buffer plate 62 and two positioning blocks 63. A horizontal air cylinder 66 is horizontally fixed on the rear side surface of the correction reference vertical plate 5. The piston rod of the horizontal air cylinder 66 is arranged backward. Both the moving plate 61 and the buffer plate 62 are strip-shaped plates, and both are horizontal and arranged parallel to the correction reference vertical plate 5. The moving plate 61 is located at the rear side of the correction reference vertical plate 5, and a connecting block 64 is fixed on the rear side surface of the moving plate 61. A connecting plate 65 is fixed on the connecting block 64. The connecting plate 65 is L-shaped strip-shaped. One end of the connecting plate 65 faces forward and is fixed to the side part of the connecting block 64, and the other end extends to the rear side of the horizontal air cylinder 66 and is fixed to the piston rod of the horizontal air cylinder 66. The buffer plate 62 is located at the front side of the moving plate 61. Guide columns 621 are vertically fixed on the rear side surfaces at both ends of the buffer plate 62. Installation holes 611 are opened on both sides of the moving plate 61, and guide sleeves 612 are screwed and fixed in the installation holes 611. The axial direction of the guide sleeve 612 is arranged in the front-rear direction. The two guide columns 621 of the buffer plate 62 are respectively slidably inserted into the two guide sleeves 612 of the moving plate 61. Disc-shaped limit pieces 623 are fixed at the rear ends of the two guide columns 621. A buffer spring 622 is also sleeved on the guide column 621. The rear end of the buffer spring 622 extends into the installation hole 611 and abuts against the front end of the guide sleeve 612. The front end of the buffer spring 622 abuts against the rear side surface of the buffer plate 62. Under the action of the buffer spring 622, the limit piece 623 abuts against the rear end face of the guide sleeve 612, so that a gap is formed between the buffer plate 62 and the moving plate 61. The two positioning blocks 63 are respectively fixed on the front side surfaces at both ends of the buffer plate 62. Rectangular avoidance notches 53 are opened at both ends of the lower edge of the correction reference vertical plate 5. The two positioning blocks 63 respectively pass through the two avoidance notches 53. The flexible suction cups 7 are divided into two groups. The two groups of flexible suction cups 7 are respectively fixed on the front side surfaces of the two positioning blocks 63. The lower part of the front plate surface of the correction reference vertical plate 5 has two groups of forward protruding reference convex parts 51. The two groups of reference convex parts 51 are respectively close to the two positioning blocks 63. The reference convex parts 51 are columnar, and their front end surfaces are reference surfaces. The reference surfaces of the two groups of reference convex parts 51 are coplanar and vertically arranged. When the flexible suction cups 7 adsorb the crystal bar and the positioning frame 6 retracts, the crystal bar can be pressed against a plurality of reference surfaces. Combined with Figure 6 As shown in the figure, the flexible suction cup 7 is horn-shaped and made of rubber material. An air guide hole 631 communicating with the vacuum generating device is opened on the positioning block 63. An air suction hole 71 is opened at the central position of the flexible suction cup 7. The air suction hole 71 communicates with the air guide hole 631.

[0032] Combined with Figure 7As shown, a limit seat 8 capable of adjusting the maximum moving stroke of the positioning frame 6 is fixed on the rear side surface of the correction reference vertical plate 5. The limit seat 8 is in the shape of a strip plate and is arranged horizontally toward the rear. The limit seat 8 is located below the horizontal cylinder 66. The rear end portion of the limit seat 8 has an upwardly protruding mounting portion 81. The connecting plate 65 is located between the horizontal cylinder 66 and the mounting portion 81. A rear limit block 651 is fixed on the connecting plate 65. A rear limit column 811 is screwed on the mounting portion 81. The rear limit column 811 is arranged forward and opposite to the rear side surface of the rear limit block 651. When the positioning frame 6 retracts backward and causes the crystal rod to rest against the reference protrusion 51, the rear limit block 651 can rest against the rear limit column 811 to form a limit. A front limit block 661 is fixed to the side of the horizontal cylinder 66, and a front limit column 652 is screwed on the rear limit block 651. The front limit column 652 is set forward and opposite to the rear side of the front limit block 661. When the positioning frame 6 extends forward a set distance, the front limit column 652 can abut against the front limit block 661 to form a limit.

[0033] Combine Figure 8 As shown, a downwardly-set vertical cylinder 9 is also fixed to the rear side of the correction reference plate 5. A clearance notch 52 is provided in the middle of the correction reference plate 5. A lifting plate 91 is slidably connected in the vertical direction in the clearance notch 52. The piston rod of the vertical cylinder 9 is fixedly connected to the rear end of the lifting plate 91. The pressure block 92 is T-shaped as a whole and is located on the front side of the correction reference plate 5. The upper end of the pressure block 92 is fixedly connected to the front end of the lifting plate 91. The two ends of the lower side of the pressure block 92 are fixed with downwardly-set pressure plates 93. A position sensor 55 is also fixed to the correction reference plate 5, and a notch 54 is provided in the middle of the lower edge of the correction reference plate 5. The notch 54 is located below the clearance notch 52. The position sensor 55 is arranged forward and extends into the notch 54.

[0034] During operation, the material plate 10 is horizontally placed on the fixture 41. The movable clamping plate 412 and the fixed clamping plate 411 clamp the material plate 10 through bolts. The ingot is placed on the upper side of the material plate 10 and manually pressed towards the alignment reference vertical plate 5. The buffer plate 62 can compress the buffer spring 622 and retract. The ingot can abut against the reference convex portion 51 to ensure that both sides of the ingot are in contact with the two groups of flexible suction cups 7. The flexible suction cups 7 suck air to generate a vacuum, that is, the flexible suction cups 7 adsorb the ingot. The horizontal cylinder 66 drives the positioning frame 6 to retract backward, so that the ingot abuts against the reference convex portion 51. Then the pressing block 92 descends and presses the ingot tightly, so that the bottom surface of the ingot fits tightly with the upper side of the material plate 10. Then the flexible suction cups 7 cut off the air supply to release the ingot. The positioning frame 6 retracts and then extends again, so that the flexible suction cups 7 are in contact with and adsorb the side of the ingot again. In this way, the process of the flexible suction cups 7 adsorbing, the pressing block 92 pressing down, the flexible suction cups 7 releasing and then adsorbing again, and the pressing block 92 releasing and then pressing down can be repeated several times as needed, so that the ingot has precise positioning. After the ingot is positioned, the rotating frame 2 rotates to obtain compensation angle information. Then the pressing block 92 rises to release the ingot. The alignment direct drive motor 3 drives the alignment reference vertical plate 5 to rotate relative to the material plate 10 according to the compensation angle information to adjust the angle of the ingot relative to the material plate 10. After the angle of the ingot is corrected, the bonding process is carried out.

[0035] The specific embodiments described herein are merely illustrative of the spirit of the present invention. Those skilled in the art to which the present invention pertains can make various modifications or supplements to the described specific embodiments or use similar methods for substitution, but will not deviate from the spirit of the present invention or exceed the scope defined by the appended claims.

[0036] Although terms such as the scanning direct drive motor 1, the rotating frame 2, the turntable 21, etc. are used more frequently in this article, the possibility of using other terms is not excluded. Using these terms is only to more conveniently describe and explain the essence of the present invention; interpreting them as any additional limitation is contrary to the spirit of the present invention.

Claims

1. The positioning mechanism of a crystal bar fixed-angle bonding machine, comprising a fixture (41) for horizontally positioning a material plate (10) and a correction reference vertical plate (5) vertically arranged above the fixture (41) and capable of rotating relative to the fixture (41), characterized in that, A positioning frame (6) capable of sliding in a direction perpendicular to the plate surface of the correction reference vertical plate (5) is connected to the correction reference vertical plate (5). A flexible suction cup (7) capable of adsorbing a crystal bar is connected to the positioning frame (6). When the flexible suction cup (7) adsorbs the crystal bar, the positioning frame (6) can retract and press the crystal bar against the correction reference vertical plate (5). A pressing block (92) is further provided on the correction reference vertical plate (5). When the flexible suction cup (7) adsorbs the crystal bar and the crystal bar is pressed against the correction reference vertical plate (5), the pressing block (92) can descend and press the crystal bar tightly on the material plate (10). A horizontal cylinder (66) is fixed to the rear side of the correction reference vertical plate (5). A plurality of reference convex parts (51) protruding forward are provided on the front plate surface of the correction reference vertical plate (5). A vertical cylinder (9) arranged downward is also fixed to the correction reference vertical plate (5). The horizontal cylinder (66) drives the positioning frame (6) to retract backward, so that the crystal bar abuts against the reference convex parts (51). Then the pressing block (92) descends and presses the crystal bar tightly, so that the bottom surface of the crystal bar fits and presses against the upper side surface of the material plate (10). Then the flexible suction cup (7) cuts off the air supply to release the crystal bar. The positioning frame (6) retracts and then extends again, so that the flexible suction cup (7) abuts against and adsorbs the side surface of the crystal bar again. In this way, the process of the flexible suction cup (7) adsorbing, the pressing block (92) pressing down, the flexible suction cup (7) releasing and then adsorbing again, and the pressing block (92) releasing and then pressing down can be repeated several times as required.

2. The positioning mechanism of the ingot fixed-angle bonding machine according to claim 1, characterized in that, The positioning frame (6) includes a long strip-shaped moving plate (61). The moving plate (61) is slidably arranged at the rear side of the correction reference vertical plate (5). A plurality of the above-mentioned flexible suction cups (7) are provided on the front side of the moving plate (61), and the flexible suction cups (7) all protrude from the front plate surface of the correction reference vertical plate (5).

3. The positioning mechanism of the ingot fixed-angle bonding machine according to claim 2, characterized in that, A horizontal cylinder (66) is fixed to the rear side of the correction reference vertical plate (5). The horizontal cylinder (66) is arranged backward, and the piston rod of the horizontal cylinder (66) is fixedly connected to the moving plate (61) through a connecting plate (65). A limit seat (8) capable of adjusting the maximum moving stroke of the moving plate (61) is also fixed to the rear side of the correction reference vertical plate (5).

4. The positioning mechanism of the crystal bar fixed-angle bonding machine according to claim 3, characterized in that, A rear limit block (651) is fixed to the connecting plate (65). A rear limit post (811) is screwed on the limit seat (8). The rear limit post (811) is arranged forward and is opposite to the rear side surface of the rear limit block (651). When the positioning frame (6) retracts backward, the rear limit block (651) can abut against the rear limit post (811).

5. The positioning mechanism of the crystal bar fixed-angle bonding machine according to claim 4, characterized in that, A front limit block (661) is fixed to the horizontal cylinder (66) or the correction reference vertical plate (5). A front limit post (652) is screwed on the rear limit block (651) or the connecting plate (65). The front limit post (652) is arranged forward and is opposite to the rear side surface of the front limit block (661). When the positioning frame (6) extends forward by a set distance, the front limit post (652) can abut against the front limit block (661).

6. The positioning mechanism of the crystal bar fixed-angle bonding machine according to any one of claims 2 to 5, characterized in that, The positioning frame (6) further includes a strip-shaped buffer plate (62). The buffer plate (62) is located on the front side of the moving plate (61) and is slidably connected to the moving plate (61). The sliding direction of the buffer plate (62) is the same as that of the moving plate (61). The flexible suction cups (7) are arranged on the front side surfaces at both ends of the buffer plate (62). A buffer spring (622) for buffering when the buffer plate (62) moves backward relative to the moving plate (61) is further provided between the buffer plate (62) and the moving plate (61).

7. The positioning mechanism of the crystal bar fixed-angle bonding machine according to claim 6, characterized in that, Guide sleeves (612) are fixed at both ends of the moving plate (61). Guide columns (621) are vertically fixed at both ends of the rear side surface of the buffer plate (62). The two guide columns (621) are respectively slidably inserted into the two guide sleeves (612). A limit piece (623) is further fixed at the end of the guide column (621). The buffer spring (622) is sleeved on the guide column (621) and acts on the rear side surface of the buffer plate (62). Under the action of the buffer spring (622), the limit piece (623) abuts against the rear end surface of the guide sleeve (612).

8. The positioning mechanism of the crystal bar fixed-angle bonding machine according to any one of claims 1 to 5, characterized in that, The front end surfaces of a plurality of the reference convex portions (51) are reference surfaces. These plurality of reference surfaces are coplanar and vertically arranged. When the flexible suction cups (7) adsorb the ingot and the positioning frame (6) retracts, the ingot can be pressed against the plurality of reference surfaces.

9. The positioning mechanism of the crystal bar fixed-angle bonding machine according to any one of claims 1 to 5, characterized in that The vertical air cylinder (9) is connected to the pressing block (92). Pressing disks (93) arranged downward are fixed at both ends of the lower side surface of the pressing block (92).

10. The positioning mechanism of the crystal bar fixed-angle bonding machine according to any one of claims 1 to 5, characterized in that, The flexible suction cup (7) is in a horn shape and is made of rubber material. An air suction hole (71) communicated with a vacuum generating device is opened at the central position of the flexible suction cup (7).

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