A mounting head
By designing a mounting head including a liftable spindle and a spring, precise control of the pressure of the suction nozzle during the chip mounting process is achieved, the problem of difficult chip mounting accuracy and pressure control in the prior art is solved, and the mounting quality and accuracy are improved.
Patent Information
- Application Number
- CN202010738685.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2020-07-28
- Publication Date
- 2025-04-15
- Estimated Expiration
- 2040-07-28
AI Technical Summary
The prior art is difficult to achieve high-precision mounting of bare chips, especially during thin and brittle chip mounting, which makes it difficult to accurately control the mounting pressure, resulting in damage such as chip cracking, edge collapse, etc.
A mounting head is designed, including a base and multiple springs. The base is equipped with a liftable spindle, and a suction nozzle is provided at the end of the spindle. The spring connects the base and the spindle. The expansion and contraction direction of the spring is the same as the axis direction of the spindle. The precise control of the chip pressure by the suction nozzle is achieved through the tension of the spring.
Accurate control of the pressure of the suction nozzle during chip mounting process, improve the accuracy and quality of chip mounting, and avoid damage caused by excessive pressure of the chip.
Smart Images

Figure CN111785665B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of semiconductor packaging, and in particular to a mounting head. Background Art
[0002] With the miniaturization and integration of semiconductor circuits, higher requirements are placed on high-density three-dimensional mounting technology. Existing multifunctional assembly systems are generally used to automatically mount bare chips on substrates, such as mounting VCSEL chips on ceramic multilayer substrates according to the pressure that the chips can withstand. When mounting thin and brittle chips such as GaAs, SiC, and GaN, precise control of mounting pressure is particularly important. Improper mounting pressure can cause damage to the chips such as dark cracks and edge collapse. Therefore, precise control of pressure during the picking and placing of bare chips is the key to achieving high-quality and high-precision mounting of VCSEL chips. Therefore, a mounting head is needed to achieve precise pressure control during bare chip mounting. Summary of the invention
[0003] The technical problem to be solved by the present invention is to provide a high-precision mounting head.
[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: a mounting head, including a base and multiple springs, the base is provided with a liftable spindle, the end of the spindle is provided with a suction nozzle, the spring connects the base and the spindle, and the expansion and contraction direction of the spring is the same as the axial direction of the spindle.
[0005] The beneficial effects of the present invention are as follows: a liftable spindle is arranged on the base of the placement head, the spindle and the base are connected by a spring, the expansion and contraction direction of the spring is the same as the axial direction of the spindle, a suction nozzle is arranged at the end of the spindle, when the spindle is in a free state, the pressure of the suction nozzle on the chip is the gravity exerted on the spindle, as the placement head moves downward, the spring is gradually tightened, and then the pressure of the suction nozzle on the chip is gradually increased, and the control of the spindle by the spring can realize the precise control of the pressure of the suction nozzle on the chip, improve the placement accuracy of the chip, and prevent the excessive pressure exerted on the chip by the spindle and the suction nozzle from causing damage to the chip. BRIEF DESCRIPTION OF THE DRAWINGS
[0006] Figure 1 It is a structural schematic diagram of a placement head according to the first embodiment of the present invention;
[0007] Figure 2 It is a front view of the mounting head of the first embodiment of the present invention;
[0008] Figure 3 An exploded view of a placement head according to Embodiment 1 of the present invention;
[0009] Figure 4 It is a partial structural schematic diagram of a placement head according to the first embodiment of the present invention;
[0010] Figure 5 It is a schematic diagram of the structure of the main shaft in the placement head of the first embodiment of the present invention.
[0011] Description of labels:
[0012] 1. Base; 11. Mounting position; 12. Rotating shaft; 13. Third spring pull rod; 14. Bottom plate; 15. Contact; 2. Spring; 21. Pull-up spring; 22. Pull-down spring; 3. Main shaft; 31. First spring pull rod; 32. Second spring pull rod; 33. First through hole; 34. Second through hole; 35. Fixing hole; 4. Clamping wheel; 5. Card plate; 6. Press plate; 7. Mounting seat; 8. Inlet pipe; 81. First inlet pipe; 82. Second inlet pipe; 83. Inlet port. DETAILED DESCRIPTION
[0013] In order to explain the technical content, achieved objectives and effects of the present invention in detail, the following is an explanation in combination with the implementation modes and the accompanying drawings.
[0014] The most critical concept of the present invention is that a liftable spindle is arranged on the base of the mounting head, the spindle and the base are connected by a spring, and the expansion and contraction direction of the spring is the same as the axial direction of the spindle.
[0015] Please refer to Figures 1 to 5 A placement head includes a base 1 and a plurality of springs 2. The base 1 is provided with a liftable spindle 3, an end of the spindle 3 is provided with a suction nozzle, the spring 2 connects the base 1 and the spindle 3, and the extension direction of the spring 2 is the same as the axial direction of the spindle 3.
[0016] The structural principle of the present invention is briefly described as follows: a liftable spindle 3 is arranged on the base 1 of the placement head, and the spindle 3 is connected to the base 1 through a spring 2. The extension direction of the spring 2 is the same as the axial direction of the spindle 3. A suction nozzle is arranged at the end of the spindle 3. When the spindle 3 is in a free state, the pressure of the suction nozzle on the chip is the gravity exerted on the spindle 3. As the placement head moves downward, the spring 2 is gradually tightened, and then the pressure of the suction nozzle on the chip gradually increases.
[0017] From the above description, it can be seen that the beneficial effect of the present invention is that the placement head provided by the present invention realizes precise control of the pressure of the nozzle on the chip through the control of the main shaft 3 by the spring 2, thereby improving the placement accuracy of the chip and preventing the main shaft 3 and the nozzle from exerting excessive pressure on the chip, thereby preventing damage to the chip.
[0018] Furthermore, it also includes a plurality of clamping wheels 4, which are rotatably disposed on the base 1, and the plurality of clamping wheels 4 abut against the main shaft 3 from different directions.
[0019] From the above description, it can be seen that the clamping wheel 4 limits the moving direction of the spindle 3 to prevent the spindle 3 from being displaced in the horizontal direction during the lifting and lowering process, which may cause the suction nozzle set at the end of the spindle 3 to be offset. At the same time, the static friction between the clamping wheel 4 and the spindle 3 is extremely small, and the clamping wheel 4 has little effect on the vertical movement of the spindle 3, thereby ensuring the accuracy of the placement head.
[0020] Furthermore, the base 1 is provided with a mounting position 11 for mounting the clamping wheel 4 , and a rotating shaft 12 matched with the clamping wheel 4 is provided in the mounting position 11 .
[0021] Furthermore, it also includes a clamping plate 5 , which respectively abuts against two ends of the rotating shaft 12 , and the clamping plate 5 is connected to the base 1 .
[0022] Furthermore, it also includes a pressure plate 6 arranged on the base 1, the pressure plate 6 is located on the side of the main shaft 3 away from the base 1, and a mounting seat 7 is provided on the side of the pressure plate 6 close to the main shaft 3, and the clamping wheel 4 is provided on the mounting seat 7.
[0023] From the above description, it can be seen that multiple clamping wheels 4 contact the main shaft 3 from different directions to ensure that there is no horizontal displacement of the main shaft 3 during the lifting and lowering process. The clamping wheels 4 are rotatably set on the base 1, which further reduces the influence of the clamping wheels 4 on the vertical movement of the main shaft 3.
[0024] Furthermore, the main shaft 3 is provided with a first spring pull rod 31 and a second spring pull rod 32 , the spring 2 includes an upper pull spring 21 and a lower pull spring 22 , the first spring pull rod 31 is connected to the upper pull spring 21 , and the second spring pull rod 32 is connected to the lower pressure spring 2 .
[0025] From the above description, it can be seen that a spring pull rod connected to the spring 2 is arranged on the main shaft 3. The spring pull rod is driven by the extension and contraction of the spring 2, and then the main shaft 3 is driven to rise and fall in the vertical direction, thereby improving the control accuracy of the position of the main shaft 3 and realizing precise control of the pressure generated by the suction nozzle on the chip.
[0026] Furthermore, the first spring pull rod 31 and the second spring pull rod 32 are arranged in the main shaft 3, and the main shaft 3 is provided with a first through hole 33 for the pull-up spring 21 to extend into and a second through hole 34 for the second spring pull rod 32 to extend out.
[0027] From the above description, it can be seen that the spring pull rod is arranged in the main shaft 3, which reduces the overall volume of the labeling head and facilitates the installation of the labeling head on the machine tool equipment. At the same time, the main shaft 3 is designed as a hollow structure to reduce the weight of the main shaft 3 itself, thereby reducing the pressure exerted by the suction nozzle on the chip.
[0028] Furthermore, the base 1 is provided with a third spring pull rod 13 connected to the pull-up spring 21 .
[0029] It can be seen from the above description that a third spring pull rod 13 is provided on the base 1 , and the third spring pull rod 13 is connected to the pull-up spring 21 , so as to achieve precise control of the pull-up spring 21 , thereby improving the control accuracy of the main shaft 3 .
[0030] Furthermore, the main shaft 3 is also provided with a fixing hole 35 for installing a suction nozzle and an air intake pipe 8 connected to the fixing hole 35, the air intake pipe 8 includes a first air intake pipe 81 and a second air intake pipe 82 that are connected to each other, the first air intake pipe 81 extends into the main shaft 3 at one end away from the second air intake pipe 82, and the second air intake pipe 82 is provided with an air inlet port 83 at one end away from the first air intake pipe 81.
[0031] From the above description, it can be seen that the suction nozzle is connected to the fixing hole 35 at the end of the spindle 3, the fixing hole 35 is connected to the air inlet pipe 8, and the air inlet pipe 8 is connected to the pneumatic device on the machine tool equipment so that the suction nozzle can adsorb the chip. The air inlet pipe 8 includes a first air inlet pipe 81 and a second air inlet pipe 82. The first air inlet pipe 81 extends into the spindle 3, the second air inlet pipe 82 is at a certain angle to the first air inlet pipe 81, and an air inlet port 83 is provided at the end of the second air inlet pipe 82, which is convenient for the air inlet pipe 8 to be connected to the pneumatic device.
[0032] Furthermore, the base 1 further includes a bottom plate 14 , on which a contact 15 is disposed, and the contact 15 faces a side away from the base 1 .
[0033] From the above description, it can be seen that a contact 15 is set on the bottom plate 14 of the base 1, facing the side away from the base 1. When the placement head descends to a certain position, the contact 15 contacts the object located at the bottom of the placement head, so that the placement head stops descending, thereby preventing the placement head from colliding with other objects during operation.
[0034] Embodiment 1
[0035] Please refer to Figures 1 to 5 , Embodiment 1 of the present invention is: a placement head, comprising a base 1, a main shaft 3 which can be raised and lowered is provided on the base 1, a spring 2 connected to the main shaft 3 and a clamping wheel 4 which abuts against the main shaft 3 are provided on the base 1, a suction nozzle is provided at the lower end of the main shaft 3, when the main shaft 3 is in a free state, the pressure exerted by the suction nozzle on the chip is equal to the gravity exerted on the main shaft 3, when the placement head moves downward, the main shaft 3 moves downward accordingly, the suction nozzle abuts against the chip, and the pressure exerted by the suction nozzle on the chip gradually increases, at which time the spring 2 is gradually tightened, so as to achieve the effect of accurately controlling the pressure exerted by the suction nozzle on the chip, and at the same time avoid excessive pressure exerted by the suction nozzle on the chip causing dark cracks or edge collapse of the chip.
[0036] Furthermore, the base 1 is provided with a plurality of air pipes for connecting to a machine tool, so as to facilitate the connection between the placement head and a pneumatic device on the machine tool. The spindle 3 on the placement head is driven to rise and fall by the pneumatic device arranged on the machine tool, thereby realizing automatic control of the suction nozzle.
[0037] like Figure 1 and Figure 2 As shown, in this embodiment, the number of the clamping wheels 4 is five, and the five clamping wheels 4 abut against the main shaft 3 from different directions, wherein four of the clamping wheels 4 are arranged on the base 1, and the base 1 is provided with a mounting position 11 for mounting the clamping wheel 4, and a rotating shaft 12 is arranged in the mounting position 11, and the clamping wheel 4 is sleeved on the rotating shaft 12 so that the clamping wheel 4 can rotate in the mounting position 11, and the base 1 is also provided with a clamping plate 5 connected to the base 1, and the clamping plate 5 is provided with a notch for avoiding the clamping wheel 4, and the two ends of the notch respectively abut against the rotating shaft 12 to limit the clamping wheel 4 in the mounting position 11. The base 1 is also provided with a pressing plate 6, and the pressing plate 6 is located on the side of the main shaft 3 away from the base 1, and a mounting seat 7 is arranged on the side of the pressing plate 6 close to the main shaft 3, and a clamping wheel 4 is arranged in the mounting seat 7. The five clamping wheels 4 are in contact with the spindle 3 to limit the horizontal displacement of the spindle 3, ensuring that the suction nozzle will not deviate when the spindle 3 is raised or lowered in the vertical direction, thereby ensuring the accuracy of the placement head in adsorbing and placing chips. At the same time, the static friction between the spindle 3 and the clamping wheels 4 is extremely small, thereby reducing the influence of the clamping wheels 4 on the lifting and lowering movement of the spindle 3, so that the position of the spindle 3 during lifting and lowering can be accurately controlled, thereby ensuring the control accuracy of the placement head.
[0038] Furthermore, a bottom plate 14 is provided at the bottom of the base 1, and a hole for installing a contact 15 is provided on the bottom plate 14. The contact 15 is arranged toward the end away from the base 1. When the mounting head descends to a certain position, the contact 15 touches the object at the bottom of the mounting head to stop the mounting head from descending, thereby preventing the mounting head from descending too much, causing the nozzle to exert too much pressure on the chip, or the base 1 from colliding with other objects, so that the mounting head can move within the range of ensuring the safety of the equipment. Preferably, an insulating sleeve is provided in the hole to wrap the contact 15, so that the contact 15 is stably arranged in the hole, while reducing the impact on the contact 15 when it contacts other objects.
[0039] like Figure 3 and Figure 4As shown, the spring 2 includes an upper pull-up spring 21 and a lower pull-down spring 22, the upper pull-up spring 21 connects the upper end of the main shaft 3 in the vertical direction with the base 1, and the lower pull-down spring 22 connects the lower end of the main shaft 3 in the vertical direction with the base 1, and the main shaft 3 is provided with a first spring pull rod 31 connected to the upper pull-up spring 21 and a second spring pull rod 32 connected to the lower pull spring 22. Optionally, the base 1 is also provided with a third spring pull rod 13 connected to the upper pull spring 21, and the third spring pull rod 13 is screwed to the base 1.
[0040] Further, the first spring pull rod 31 and the second spring pull rod 32 are arranged in the spindle 3, and the spindle 3 is provided with a first through hole 33 and a second through hole 34 that are connected, the first spring pull rod 31 is arranged in the first through hole 33, and the pull-up spring 21 extends into the first through hole 33 and is connected to the first spring pull rod 31, the second spring pull rod 32 is arranged in the second through hole 34, and the head of the second spring pull rod 32 extends out of the second through hole 34 and is connected to the pull-down spring 22. The spindle 3 is arranged to be hollow to reduce the overall weight of the spindle 3 and reduce the pressure of the spindle 3 on the chip in a free state. At the same time, the first pull rod and the second pull rod are arranged in the spindle 3 to reduce the overall volume of the mounting head, which is conducive to the mounting head being installed on a machine tool with a relatively narrow activity space, thereby improving the versatility of the mounting head.
[0041] Preferably, the first spring pull rod 31 is arranged on the axis of the main shaft 3, so that the pull-up spring 21 coincides with the axis of the main shaft 3, the second spring pull rod 32 is perpendicular to and connected to the first spring pull rod 31, and the pull-down spring 22 is parallel to the axis of the main shaft 3, so as to prevent the main shaft 3 from shaking in the horizontal direction when the pull-up spring 21 and the pull-down spring 22 are extended and retracted to drive the main shaft 3 to rise and fall, further improve the stability of the main shaft 3 during movement, and enable the suction nozzle arranged at the end of the main shaft 3 to more accurately adsorb to the target chip.
[0042] Please refer to Figure 5 The end of the spindle 3 close to the chip is provided with a fixing hole 35 for installing a suction nozzle and an air inlet pipe 8 connected to the fixing hole 35. The air inlet pipe 8 includes a first air inlet pipe 81 and a second air inlet pipe 82 that are connected. The first air inlet pipe 81 is arranged in the spindle 3. The spindle 3 is provided with a hole for installing the first air inlet pipe 81. The second air inlet pipe 82 is provided with an air inlet hole connected to a pneumatic device at one end away from the first air inlet pipe 81. Preferably, the first air inlet pipe 81 and the second air inlet pipe 82 are arranged at a certain angle to facilitate the connection between the pneumatic device and the air inlet pipe 8.
[0043] In summary, the mounting method provided by the present invention generates little pressure on the chip, and can accurately control the pressure generated by the suction nozzle on the chip, thereby avoiding dark cracks or edge collapse of the chip during the process of picking up and mounting the chip by the suction nozzle, thereby improving the chip mounting precision and chip mounting quality. The overall mounting head is easy to install and is convenient to connect to the machine tool.
[0044] The above descriptions are merely embodiments of the present invention and are not intended to limit the patent scope of the present invention. Any equivalent transformations made using the contents of the present invention's specification and drawings, or directly or indirectly applied in related technical fields, are also included in the patent protection scope of the present invention.
Claims
1. A placement head, characterized in that: It comprises a base and a plurality of springs, wherein the base is provided with a liftable main shaft, the end of the main shaft is provided with a suction nozzle, the spring connects the base and the main shaft, and the expansion and contraction direction of the spring is the same as the axial direction of the main shaft; The spring comprises an upward pull spring and a downward pull spring, wherein the upward pull spring connects the upper end of the main shaft in the vertical direction with the base, and the downward pull spring connects the lower end of the main shaft in the vertical direction with the base, and the main shaft is provided with a first spring pull rod connected to the upward pull spring and a second spring pull rod connected to the downward pull spring; The first spring pull rod and the second spring pull rod are arranged in the main shaft, and the main shaft is provided with a first through hole and a second through hole that are connected. The first spring pull rod is arranged in the first through hole and the pull-up spring extends into the first through hole and is connected to the first spring pull rod. The second spring pull rod is arranged in the second through hole, and the head of the second spring pull rod extends out of the second through hole and is connected to the pull-down spring; the second spring pull rod is perpendicular to and connected to the first spring pull rod.
2. The placement head according to claim 1, characterized in that: It also includes a plurality of clamping wheels, which are rotatably arranged on the base, and the plurality of clamping wheels abut against the main shaft from different directions.
3. The placement head according to claim 2, characterized in that: The base is provided with a mounting position for mounting the clamping wheel, and a rotating shaft matched with the clamping wheel is arranged in the mounting position.
4. The placement head according to claim 3, characterized in that: It also includes a clamping plate, which respectively abuts against two ends of the rotating shaft and is connected to the base.
5. The placement head according to claim 2, characterized in that: It also includes a pressing plate arranged on the base, the pressing plate is located on a side of the main shaft away from the base, a mounting seat is arranged on a side of the pressing plate close to the main shaft, and the clamping wheel is arranged on the mounting seat.
6. The placement head according to claim 1, characterized in that: A third spring pull rod connected to the pull-up spring is arranged on the base.
7. The placement head according to claim 1, characterized in that: The main shaft is also provided with a fixing hole for installing a suction nozzle and an air intake pipe connected to the fixing hole. The air intake pipe includes a first air intake pipe and a second air intake pipe that are connected to each other. An end of the first air intake pipe away from the second air intake pipe extends into the main shaft, and an end of the second air intake pipe away from the first air intake pipe is provided with an air inlet.
8. The placement head according to claim 1, characterized in that: The base also includes a bottom plate, on which a contact is arranged, and the contact faces a side away from the base.
Citation Information
Patent Citations
Integrated adhesive head of sheet adhesive machine
CN1533239A
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CN212676223U
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US5012874A