Flexible Substrates

Abstract

A flexible substrate according to one embodiment includes a flexible insulating substrate and a plurality of wirings provided on the insulating substrate. The insulating substrate includes a first opening, a second opening having a shape different from that of the first opening, and a first line portion. The first line portion is arranged between the first opening and the second opening.

Description

Technical Field

[0001] Embodiments of the present invention relate to a flexible substrate. Background Art

[0002] In recent years, the application of flexible substrates with flexibility and stretchability has been studied in various fields. For example, it is considered that a flexible substrate with electrical components arranged in a matrix is ​​attached to a housing of an electronic device or a curved surface of a human body. As electrical components, various sensors such as touch sensors and temperature sensors or display components can be applied.

[0003] For flexible substrates, it is necessary to study countermeasures so that the wiring will not be damaged by stress due to bending or expansion. As such countermeasures, for example, it is proposed to provide a honeycomb-shaped opening in the substrate supporting the wiring, or to form a shape that allows the wiring to meander (wave-shaped) (for example, refer to patent documents 1 to 3).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2015-198101

[0007] Patent Document 2: Japanese Patent Application Publication No. 2015-198102

[0008] Patent Document 3: Japanese Patent Application Publication No. 2017-118109 Summary of the invention

[0009] Flexible substrates require not only flexibility and stretchability but also narrower wiring pitches and higher density electrical components.

[0010] One of the objects of the present disclosure is to provide a flexible substrate capable of achieving narrower pitch of wiring and higher density of electrical components.

[0011] A flexible substrate according to one embodiment includes a flexible insulating substrate and a plurality of wirings provided on the insulating substrate. The insulating substrate includes a first opening, a second opening having a shape different from that of the first opening, and a first line portion. The first line portion is arranged between the first opening and the second opening. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic plan view of the flexible substrate 100 according to the first embodiment.

[0013] Figure 2 It is a schematic plan view in which a part of the flexible substrate 100 is enlarged.

[0014] Figure 3 yes Figure 2 FIG. 5 is a schematic cross-sectional view of a portion of the flexible substrate 100 shown in FIG.

[0015] Figure 4 yes Figure 2 FIG. 5 is a schematic cross-sectional view of a portion of the flexible substrate 100 shown in FIG.

[0016] Figure 5 1 is a schematic cross-sectional view showing a manufacturing process of the flexible substrate 100 .

[0017] Figure 6 It shows that the Figure 5 A schematic cross-sectional view of subsequent manufacturing steps.

[0018] Figure 7 It shows that the Figure 6 A schematic cross-sectional view of subsequent manufacturing steps.

[0019] Figure 8 It shows that the Figure 7 A schematic cross-sectional view of subsequent manufacturing steps.

[0020] Fig. 9 It shows that the Figure 8 A schematic cross-sectional view of subsequent manufacturing steps.

[0021] Fig.10 It is a schematic plan view of a flexible substrate 200 according to the second embodiment.

[0022] Fig.11 It is a schematic plan view in which the flexible substrate 200 is enlarged.

[0023] Fig.12 It is a schematic plan view of a flexible substrate 300 according to the third embodiment.

[0024] Fig.13 It is a cross-sectional view schematically showing the connection between the scanning lines and signal lines and the electrical elements in the flexible substrate 300 .

[0025] Fig.14 yes Fig.12 Schematic cross-sectional view of the flexible substrate 300 near the corner C9.

[0026] Fig.15 yes Fig.12 Schematic cross-sectional view of the flexible substrate 300 near the corner C7.

[0027] Fig.16 yes Fig.12 Schematic cross-sectional view of the flexible substrate 300 near the corner C8.

[0028] Fig.17 yes Fig.12 Schematic cross-sectional view of the flexible substrate 300 near the corner C10. DETAILED DESCRIPTION

[0029] Several embodiments will be described with reference to the drawings.

[0030] In addition, the present disclosure is only an example, and appropriate changes that are easy to think of for those skilled in the art to maintain the main purpose of the invention are certainly included in the scope of the present invention. In addition, in order to make the description clearer, the drawings are sometimes schematically shown compared to the actual form, but this is only an example and does not limit the interpretation of the present invention. In each figure, the same or similar elements that are continuously configured are sometimes omitted from the reference numerals. In addition, in this specification and each figure, the same reference numerals are sometimes marked on the constituent elements that perform the same or similar functions as the constituent elements described for the figures that have already appeared, and repeated detailed descriptions are omitted.

[0031] [First embodiment]

[0032] Figure 1 This is a schematic top view of the flexible substrate 100 of the first embodiment. In this embodiment, as shown in the figure, a first direction D1, a second direction D2, a third direction D3, and a fourth direction D4 are defined. Each direction D1 to D4 is parallel to the main surface of the flexible substrate 100 and is a direction intersecting with each other. In this embodiment, the first direction D1 and the second direction D2 intersect perpendicularly, but may intersect at an angle other than perpendicular. In addition, the third direction D3 and the fourth direction D4 intersect perpendicularly in this embodiment, but may intersect at an angle other than perpendicular. .

[0033] The flexible substrate 100 has a plurality of scanning lines 1, a plurality of signal lines 2, and a plurality of electrical components 3. The scanning lines 1 and the signal lines 2 are examples of wirings of the flexible substrate 100. The scanning lines 1 and the signal lines 2 can be formed of, for example, a metal material or a transparent conductive material, and can be a single-layer structure or a stacked structure. In addition to the scanning lines 1 and the signal lines 2, the flexible substrate 100 can also have other types of wirings such as power lines for supplying power to the electrical components 3.

[0034] The plurality of scanning lines 1 extend in the first direction D1 as a whole and are arranged in the second direction D2. The plurality of signal lines 2 extend in the second direction D2 as a whole and are arranged in the first direction D1. Specifically, the scanning line 1 has a waveform shape in which a straight line portion parallel to the first direction D1, a straight line portion parallel to the third direction D3, and a straight line portion parallel to the second direction D2 are repeated in sequence. Similarly, the signal line S has a waveform shape in which a straight line portion parallel to the second direction D2, a straight line portion parallel to the fourth direction D4, and a straight line portion parallel to the first direction D1 are repeated in sequence.

[0035] A polygonal area A is formed by two adjacent scanning lines 1 and two adjacent signal lines 2. Figure 1 In the example of , regions A of the same shape are repeatedly arranged along the first direction D1 and the second direction D2.

[0036] The electrical element 3 is electrically connected to the scanning line 1 and the signal line 2. In the example shown in the figure, the electrical element 3 is arranged at a portion of the scanning line 1 and the signal line 2 parallel to the second direction D2. However, the arrangement position of the electrical element 3 is not limited to this example.

[0037] For example, the electrical component 3 is a sensor, a semiconductor component, or an actuator. For example, as a sensor, a temperature sensor, a pressure sensor, or a touch sensor can be applied. For example, as a semiconductor component, a light-emitting component, a light-receiving component, a diode, or a transistor can be applied. In the case where the electrical component 3 is a light-emitting component, a flexible display with flexibility and stretchability can be realized. As a light-emitting component, for example, a light-emitting diode or an organic electroluminescent element can be applied. In addition, the electrical component 3 is not limited to the components illustrated here, and components with various functions can also be applied. The electrical component 3 can be a capacitor or a resistor.

[0038] The scanning line 1 supplies a scanning signal to the electrical element 3. For example, when the electrical element 3 is a sensor with a signal output, the output signal from the electrical element 3 is supplied to the signal line 2. In addition, when the electrical element 3 is a light emitting element or an actuator that operates according to an input signal, a driving signal is supplied to the signal line 2. A controller including a scanning signal supply source, a driving signal supply source, or a processor that processes an output signal may be provided on the flexible substrate 100 or may be provided on a device connected to the flexible substrate 100.

[0039] Figure 2 1 is a schematic top view of a part of the flexible substrate 100. It shows a state in which the scanning line 1 and the signal line 2 are close to and extend in parallel near the electrical element 3, but in fact, as will be used later Figure 3 As described above, the scanning lines 1 and the signal lines 2 are stacked in the thickness direction of the flexible substrate 100 .

[0040] The flexible substrate 100 includes a flexible insulating base material 4 that supports the scanning lines 1 and the signal lines 2. The insulating base material 4 can be formed of polyethylene, for example, but is not limited to this example.

[0041] The insulating substrate 4 includes a plurality of line portions 41, a plurality of line portions 42 (dummy line portions), and a plurality of island portions 43. The line portion 41 overlaps with at least one of the scanning line 1 and the signal line 2. The line portion 42 does not overlap with either the scanning line 1 or the signal line 2. The line portion 41 and the line portion 42 are both straight lines. The island portion 43 overlaps with the electrical element 3 and is connected to the line portion 41. The line portion 42 is an example of the first line portion. The line portion 41 is an example of the second line portion.

[0042] The line portions 41 and 42 form a polygonal second opening AP2 which is different from the polygonal first opening AP1 and the first opening AP2. Figure 2 In the example, the first opening AP1 is a star-shaped octagon having eight corners C1 to C8. The second opening AP2 is a rectangle having four corners C7 to C10. The corners C1 to C10 are portions connected by two or more line portions 41 or line portions 41 and line portions 42 at different angles. The shapes of the first opening AP1 and the second opening AP2 are not limited to this example, and various shapes may be used.

[0043] exist Figure 2 In the example, the number of the plurality of line portions 41 and 42 (first plurality of line portions) that are connected to the line portion 42 between the first opening AP1 and the second opening AP2 and constitute the first opening AP1 is different from the number of the plurality of line portions 41 and 42 (second plurality of line portions) that are connected to the line portion 42 between the first opening AP1 and the second opening AP2 and constitute the second opening AP2. However, the number of the line portions 41 and 42 that constitute the first opening AP1 may be the same as the number of the line portions 41 and 42 that constitute the second opening AP2.

[0044] The line portion 41 between the corners C1 and C2, and the line portion 41 between the corners C7 and C10 overlap with the scanning line 1 and are parallel to the first direction D1. The line portion 41 between the corners C5 and C6, and the line portion 41 between the corners C8 and C9 overlap with the signal line 2 and are parallel to the first direction D1.

[0045] The line portion 41 between the corners C3 and C4 and the line portion 41 between the corners C9 and C10 overlap the scanning line 1 and the signal line 2 and are parallel to the second direction D2. The line portion 42 between the corners C7 and C8 does not overlap with either the scanning line 1 or the signal line 2 and is parallel to the second direction D2.

[0046] The line portion 41 between the corners C2 and C3, and the line portion 41 between the corners C6 and C7 overlap with the scanning line 1 and are parallel to the third direction D3. The line portion 41 between the corners C1 and C8, and the line portion 41 between the corners C4 and C5 overlap with the signal line 2 and are parallel to the fourth direction D4.

[0047] As described above, the first opening AP1 and the second opening AP2 are formed by a plurality of line portions 41 and 42 extending in different directions in four directions. The first opening AP1 and the second opening AP2 are included in one area A. The first opening AP1 and the second opening AP2 are equivalent to two areas divided by the line portion 42. From another point of view, the line portion 42 is arranged at the boundary between the first opening AP1 and the second opening AP2. It is also possible to form three or more openings in the area A by providing two or more line portions 42 in the area A.

[0048] The inner angle θ1 of the first opening AP1 of the corners C1, C3, C5, and C7 is smaller than the inner angle θ2 of the first opening AP1 of the corners C2, C4, C6, and C8 (θ1<θ2). Figure 2 In the example, the interior angle θ1 is an acute angle (θ1<90°), and the interior angle θ2 is an angle exceeding 180° (θ2>180°).

[0049] The shape of the first opening AP1 is 4-fold symmetric so that the shape remains the same even when rotated 90 degrees. However, the first opening AP1 is not limited to this example, and may have 4-fold or more rotational symmetry such as 5-fold or 6-fold symmetry. In addition, the first opening AP1 may have 3-fold or less symmetry.

[0050] The island 43 is arranged near the center of the line portion 41 overlapping the scanning line 1 and the signal line 2. The electrical element 3 is arranged above the island 43. The island 43 is larger than the electrical element 3. Figure 2 The island-shaped portion 43 protrudes from the edge of the electric element 3. For example, if the line portion 41 between the corners C3 and C4 is focused, the length L1 from the upper end of the line portion 41 in the figure to the island-shaped portion 43 and the length L2 from the lower end in the figure to the island-shaped portion 43 are equal to each other. However, the length L1 and the length L2 may be different.

[0051] The scanning line 1 has a first portion 11 shown by a solid line and a second portion 12 shown by a dotted line. The second portion 12 overlaps the electric element 3. The first portion 11 and the second portion 12 are arranged in different layers and are electrically connected via contact holes CH1 and CH2.

[0052] Figure 3 It is shown Figure 2 FIG. 1 is a schematic cross-sectional view of a portion of the flexible substrate 100 shown by F3A-F3B in FIG. The flexible substrate 100 includes a first organic insulating layer 5, a second organic insulating layer 6, a coating layer 7, and a support film 8 in addition to the above-mentioned elements. The first organic insulating layer 5 and the second organic insulating layer 6 are both formed of an organic material. The coating layer 7 is formed of, for example, parylene (poly-para-xylene).

[0053] The first organic insulating layer 5 covers the upper surface of the insulating substrate 4. The scanning line 1 (the first portion 11) is arranged on the first organic insulating layer 5. The second organic insulating layer 6 covers the scanning line 1 and the first organic insulating layer 5. The signal line 2 is arranged on the second organic insulating layer 6. The coating layer 7 covers the signal line 2, the insulating substrate 4, the first organic insulating layer 5, and the second organic insulating layer 6.

[0054] The support film 8 covers the lower surface of the insulating substrate 4. The coating layer 7 and the support film 8 are in contact with each other in a region where there is no insulating substrate 4. That is, the support film 8 overlaps with the plurality of line portions 41 and 42, the first opening AP1, and the second opening AP2 in a plan view. The support film 8 may be formed by coating the insulating substrate 4 and the lower surface of the coating layer 7 with a resin material, or may be attached via an adhesive layer.

[0055] In addition, the first organic insulating layer 5 and the second organic insulating layer 6 may be provided in the region without the insulating substrate 4 (the first opening AP1 and the second opening AP2). However, from the viewpoint of the flexibility and stretchability of the flexible substrate 100, it is preferred that the first organic insulating layer 5 and the second organic insulating layer 6 be provided in the region without the insulating substrate 4. Figure 3 The configuration shown.

[0056] Figure 4 yes Figure 2 A schematic cross-sectional view of a portion of the flexible substrate 100 indicated by F4A-F4B in FIG. An inorganic insulating layer 9 (passivation layer) is formed between the electrical element 3 and the island-shaped portion 43. The inorganic insulating layer 9 is in an island shape that overlaps with the electrical element 3 when viewed from above. The first portion 11 of the scanning line 1 is arranged on the first organic insulating layer 5. The second portion 12 of the scanning line 1 is arranged on the inorganic insulating layer 9 (i.e., below the first organic insulating layer 5). The second portion 12 is electrically connected to the electrical element 3. Figure 4 In the example, the end portion of the second portion 12 is covered by the first organic insulating layer 5 .

[0057] The contact holes CH1 and CH2 are provided in the first organic insulating layer 5 in the region overlapping with the island 43 and the inorganic insulating layer 9 in a plan view. The first portion 11 of the scanning line 1 is electrically connected via the connecting members CM1 and CM2 respectively arranged in the contact holes CH1 and CH2. The connecting members CM1 and CM2 may be part of the first portion 11 or may be provided separately from the first portion 11.

[0058] Figures 5 to 9 1 is a schematic cross-sectional view showing an example of a method for manufacturing the flexible substrate 100 in sequence. Figure 5In the embodiment, an insulating substrate 4 is formed on the glass substrate GL. The insulating substrate 4 has convex portions corresponding to the line portions 41, the line portions 42, and the island-shaped portion 43. At this stage, the insulating substrate 4 is also formed in the region corresponding to the first opening AP1 and the second opening AP2. The scanning line 1, the signal line 2, the electrical element 3, the first organic insulating layer 5, the second organic insulating layer 6, and the inorganic insulating layer 9 are formed above the line portions 41, the line portions 42, and the island-shaped portion 43. As an example, the thickness T1 of the insulating substrate 4 in the region corresponding to the first opening AP1 and the second opening AP2 is greater than 1 μm and less than 2 μm (1 μm ≤ T1 ≤ 2 μm). The thickness T2 of the insulating substrate 4 in the region corresponding to the line portions 41, the line portions 42, and the island-shaped portion 43 is greater than the thickness T1 and less than 20 μm (T1 ≤ T2 ≤ 20 μm).

[0059] exist Figure 6 The coating layer 7 is formed in the flexible substrate 100. The coating layer 7 fills up the regions corresponding to the first opening AP1 and the second opening AP2, and passes through the line portion 41, the line portion 42, and the island portion 43 and continues throughout the flexible substrate 100.

[0060] exist Figure 7 In the embodiment, a temporary support film TF is attached to the upper surface of the coating layer 7. As the temporary support film TF, for example, a polyethylene terephthalate (PET) film can be used. With the temporary support film TF attached, the glass substrate GL is irradiated with laser light LZ from below to peel the glass substrate GL from the insulating base material 4.

[0061] exist Figure 8 In the embodiment, dry ashing is performed on the lower surface of the insulating base material 4 using, for example, oxygen gas. Thus, the insulating base material 4 in the region corresponding to the first opening AP1 and the second opening AP2 is removed.

[0062] exist Fig. 9 In the embodiment, a support film 8 is formed on the lower surface of the insulating substrate 4 and the coating 7. The support film 8 can also be formed by coating the lower surface of the insulating substrate 4 and the coating 7 with a resin material, or can be formed by attaching a previously prepared support film 8 via an adhesive layer. Thereafter, the temporary support film TF is peeled off to obtain Figure 3 as well as Figure 4 The cross-sectional shape of the flexible substrate 100 is shown.

[0063] As described above, in the flexible substrate 100 of the present embodiment, the insulating substrate 4 has the first opening AP1 and the second opening AP2. In this way, by providing the first opening AP1 and the second opening AP2 of different shapes, it is possible to give the flexible substrate 100 stretchability and flexibility in various directions. In addition, the line portions 41 and the line portions 42 constituting the first opening AP1 and the second opening AP2 are straight lines that are the basic shape of a general array design. Therefore, compared with the case of using a curved pattern such as a waveform shape, it is very easy to achieve a narrow pitch of the scanning line 1 and the signal line 2 and a high density of the electrical element 3.

[0064] The line portion 42 does not overlap with any of the scanning lines 1 and the signal lines 2. Thus, by providing the line portion 42 that does not support the wiring, the shapes of the first opening AP1 and the second opening AP2 can be appropriately realized regardless of the shapes of the scanning lines 1 and the signal lines 2.

[0065] The first openings AP1 and the second openings AP2 are included in a region A defined by two adjacent scanning lines 1 and two adjacent signal lines 2. The region A is arranged in a matrix shape throughout the flexible substrate 100, and therefore the first openings AP1 and the second openings AP2 are also dispersedly arranged throughout the flexible substrate 100. Thus, good stretchability and flexibility can be imparted to a wide range of the flexible substrate 100.

[0066] In addition, Figure 2 In the example shown, the first opening AP1 has a four-fold symmetric shape. This can reduce the direction dependency of the stretchability and flexibility of the flexible substrate 100 compared to, for example, a case where the first opening AP1 has a two-fold symmetric shape.

[0067] Moreover, in Figure 2 In the example shown, the first opening AP1 includes an internal angle θ2 of 180° or more. If the shape includes such a large internal angle, the area of ​​the first opening AP1 can be reduced compared to the case where the first opening AP1 is formed using only an internal angle less than 180°. As a result, the scanning lines 1, the signal lines 2, and the electrical elements 3 can be formed at a high density.

[0068] like Figure 4 As shown in FIG. 1 , an island-shaped inorganic insulating layer 9 is disposed between the electrical element 3 and the insulating substrate 4. Since the electrical element 3 and the second portion 12 of the scanning line 1 are protected by the inorganic insulating layer 9, the reliability of the flexible substrate 100 can be improved. On the other hand, inorganic films are more susceptible to cracks than organic films, and therefore, when wiring is formed on the inorganic film, disconnection due to cracks may occur. However, in Figure 4In the embodiment, the inorganic insulating layer 9 is not provided under the first portion 11 of the scanning line 1 or the signal line 2. Therefore, the scanning line 1 and the signal line 2 are not easily disconnected. Furthermore, if the inorganic insulating layer 9 is provided on the entire flexible substrate 100, the stretchability and flexibility of the flexible substrate 100 will be hindered, but such a problem will not occur if the inorganic insulating layer 9 is formed in an island shape.

[0069] In addition, by using the contact holes CH1 and CH2 to form the first portion 11 and the second portion 12 of the scanning line 1 arranged in different layers, the degree of freedom in design near the electrical element 3 is improved. Since these contact holes CH1 and CH2 are provided above the inorganic insulating layer 9, the reliability of the connection position between the first portion 11 and the second portion 12 can also be improved.

[0070] The island portion 43 of the insulating substrate 4 is arranged below the electric element 3. Thus, the electric element 3 can be well supported. Furthermore, the insulating substrate 4 is supported by a supporting film 8, and the supporting film 8 overlaps not only the line portion 41, the line portion 42, and the island portion 43, but also the first opening AP1 and the second opening AP2. By providing such a supporting film 8, the overall strength of the flexible substrate 100 is increased, and the intrusion of moisture from below can be prevented, thereby improving reliability.

[0071] like Figure 2 As shown in FIG. 1 , the electric element 3 is arranged on the line portion 41 and is located at a position separated from the connection point between the line portions 41. Therefore, even when the flexible substrate 100 is stretched or bent, stress is not easily transmitted to the vicinity of the electric element 3. Therefore, the reliability of the electric element 3 is improved. As described above, as long as the lengths L1 and L2 from the two ends of the line portion 41 to the island portion 43 are equal, the stress applied to the electric element 3 can be extremely reduced.

[0072] In addition to the above, this embodiment can also obtain various appropriate effects.

[0073] [Second embodiment]

[0074] The second embodiment will be described. The configuration and effects not specifically mentioned are the same as those of the first embodiment.

[0075] Fig.10 1 is a schematic top view of the flexible substrate 200 of this embodiment. In this embodiment, in addition to the first to fourth directions D1 to D4, a fifth direction D5 and a sixth direction D6 are defined as shown in the figure. Each direction D1 to D6 is parallel to the main surface of the flexible substrate 200 and is a direction intersecting with each other.

[0076] The scanning line 1 has a waveform shape in which a straight line portion parallel to the first direction D1, a straight line portion parallel to the third direction D3, a straight line portion parallel to the first direction D1, and a straight line portion parallel to the fifth direction D5 are repeated in sequence. The signal line 2 has a waveform shape in which a straight line portion parallel to the second direction D2, a straight line portion parallel to the fourth direction D4, a straight line portion parallel to the second direction D2, and a straight line portion parallel to the sixth direction D6 are repeated in sequence.

[0077] A polygonal first region A1 and a second region A2 are formed by two adjacent scanning lines 1 and two adjacent signal lines 2. The first region A1 and the second region A2 are alternately and repeatedly arranged along the first direction D1 in the row between the two adjacent scanning lines 1. Moreover, in the row RW1 and the row RW2 shown in the figure, the shapes of the first region A1 and the second region A2 are linearly symmetrical with respect to an axis parallel to the first direction D1.

[0078] From another point of view, the first area A1 and the second area A2 are alternately and repeatedly arranged in the second direction D2 in the column between two adjacent signal lines 2. Moreover, in the column CL1 and the column CL2 shown in the figure, the shapes of the first area A1 and the second area A2 are linearly symmetrical with respect to the axis parallel to the second direction D2.

[0079] The scanning line 1 has an extension portion 13. The extension portion 13 extends from the position where the scanning line 1 is bent toward the electrical element 3. Except for the extension portion 13, the scanning line 1 and the signal line 2 are not parallel. Thus, the capacitive coupling between the scanning line 1 and the signal line 2 can be suppressed. In addition, except for the extension portion 13, the scanning line 1 and the signal line 2 are bent at an obtuse angle. Thus, compared with the case of bending at an acute angle, the stress concentration on the bent portion can be suppressed.

[0080] Fig.11 It is a schematic top view of the row RW1 of the flexible substrate 200 in an enlarged manner. It shows that the extension 13 of the scanning line 1 and the signal line 2 are close to and extend in parallel near the electrical element 3, but in fact, the extension 13 and the signal line 2 are stacked in the thickness direction of the flexible substrate 200.

[0081] The scanning line 1 and the signal line 2 overlap with the line portion 41. A plurality of line portions 42 are arranged in the first area A1. On the other hand, no line portion 42 is arranged in the second area A2. In the first area A1, a polygonal first opening AP1 and two second openings AP2 are formed by the line portions 41 and 42. In the second area A2, a polygonal third opening AP3 is formed by the line portion 41.

[0082] The first opening AP1 is an octagon having eight corners C11 to C18. Figure 2The third opening AP3 is a rectangular shape similar to the second opening AP2 shown in FIG. Figure 2 The first opening AP1 shown is an octagonal shape identical to the star.

[0083] The line portion 42 between the corners C11 and C12, and the line portion 42 between the corners C15 and C16 are parallel to the first direction D1. The line portion 42 between the corners C12 and C13, and the line portion 42 between the corners C16 and C17 are parallel to the second direction D2. The line portion 41 between the corners C13 and C14, and the line portion 41 between the corners C17 and C18 overlap the scanning line 1 and are parallel to the fifth direction D5. The line portion 41 between the corners C14 and C15, and the line portion 41 between the corners C11 and C18 overlap the signal line 2 and are parallel to the fourth direction D4.

[0084] exist Fig.10 In the row RW2 shown, the first area A1 also includes the first opening AP1 and two second openings AP2, and the second area A2 includes the third opening AP3. The shapes of these openings AP1 to AP3 of the row RW2 are linearly symmetrical with the openings AP1 to AP3 of the row RW1 with respect to the axis parallel to the first direction D1. Therefore, the first opening AP1 of the row RW2 includes a line portion 41 parallel to the third direction D3 and a line portion 41 parallel to the sixth direction D6. In this way, the pattern of the insulating substrate 4 is composed of a plurality of line portions 41 and 42 extending in different directions of the six directions.

[0085] The internal angle θ3 of the first opening AP1 of the corners C11, C13, C15, and C17 is an acute angle (θ3<90°). The internal angle θ4 of the first opening AP1 of the corners C12 and C16 is an angle greater than 180° (θ4>180°), and is 270° in one example. The internal angle θ5 of the first opening AP1 of the corners C14 and C18 is an angle greater than 180° and less than θ4 (180°<θ5<θ4). The first opening AP1 is twice symmetrical so that it has the same shape even when rotated 180°. However, this example is not limiting, and the first opening AP1 also has three or more rotational symmetries.

[0086] The extension portion 13 of the scanning line 1 overlaps with the line portion 41 provided with the electrical element 3. The extension portion 13 is formed in the same layer as the first portion 11, and is electrically connected to the second portion 12 below the electrical element 3 via the contact hole CH. The contact hole CH penetrates the organic insulating layer 5 similarly to the contact holes CH1 and CH2 of the first embodiment, and overlaps with the inorganic insulating layer 9 and the island portion 43 when viewed from above.

[0087] In the present embodiment, the insulating base material 4 has three types of openings AP1 to AP3 having different shapes from each other. This allows the flexible substrate 100 to be provided with stretchability and flexibility in more directions than in the first embodiment.

[0088] The first opening AP1 and the two second openings AP2 are included in the first area A1, and the third opening AP3 is included in the second area A2. However, the first area A1 and the second area A2 are alternately repeated in both the first direction D1 and the second direction D2. Thus, the openings AP1 to AP3 are dispersedly arranged, and good stretchability and flexibility can be given to the flexible substrate 200 in a wide range.

[0089] Furthermore, since the shape of each opening AP1 to AP3 is reversed for each row or column and a plurality of line portions 41 and 42 extending in six different directions exist, the direction dependence of the stretchability and flexibility of the flexible substrate 100 can be greatly reduced.

[0090] [Third embodiment]

[0091] The third embodiment will be described. The configuration and effects not specifically mentioned are the same as those of the first embodiment.

[0092] Fig.12 FIG. 1 is a schematic top view of a flexible substrate 300 according to the present embodiment. The planar shapes of the scanning line 1, the signal line 2, and the insulating substrate 4 are similar to Figure 2 Same, in Fig.12 2 and 3 show, in enlarged form, the second opening AP2 having corners C7 to C10 and the structure in the vicinity thereof.

[0093] In the present embodiment, the first portion 11 of the scanning line 1 is arranged between the corner C9 and the corner C10, and between the corner C10 and the corner C7. The other portion of the scanning line 1 overlapping the line portion 41 is the second portion 12 arranged in a layer different from the first portion 11. The electrical element 3 is arranged inside the second opening AP2 near the line portion 41 between the corner C9 and the corner C10. The island portion 43 protrudes from the line portion 41 to the inside of the second opening AP2.

[0094] The signal line 2 includes a first portion 21 indicated by a solid line and a second portion 22 indicated by a dotted line. The first portion 21 and the second portion 22 are arranged in different layers. Fig.12 In the example of FIG. 4 , the first portion 21 is disposed between the corner C8 and the corner C9 and between the corner C9 and the corner C10 . The other portion of the signal line 2 overlapping the line portion 41 is the second portion 22 .

[0095] The scanning line 1 has a first extension portion 14 and a second extension portion 15 near the electrical element 3. These extension portions 14 and 15 are electrically connected via a contact hole CH11. The first extension portion 14 and the first portion 11 are arranged in the same layer, and the second extension portion 15 and the second portion 12 are arranged in the same layer.

[0096] The signal line 2 has a first extension portion 23 and a second extension portion 24 near the electrical element 3. These extension portions 23 and 24 are electrically connected via the contact hole CH12. The first extension portion 23 and the first portion 21 are arranged in the same layer, and the second extension portion 24 and the second portion 22 are arranged in the same layer.

[0097] The second extending portion 15 of the scanning line 1 is connected to the gate of the switching element SW included in the electric element 3. The second extending portion 24 of the signal line 2 is connected to the source or drain of the switching element SW.

[0098] At corner C9, the first portion 11 and the second portion 12 of the scan line 1 are electrically connected via contact hole CH13. At corner C7, the first portion 11 and the second portion 12 of the scan line 1 are electrically connected via contact hole CH14. At corner C8, the first portion 21 and the second portion 22 of the signal line 2 are electrically connected via contact hole CH15. At corner C10, the first portion 21 and the second portion 22 of the signal line 2 are electrically connected via contact hole CH16.

[0099] Fig.13 This is a cross-sectional view schematically showing the connection between the scanning line 1 and the signal line 2 and the electrical element 3. To simplify the description, the extensions 14 and 15 of the scanning line 1 and the contact hole CH11, and the extensions 23 and 24 of the signal line 2 and the contact hole CH12 are shown in the same cross section.

[0100] The contact hole CH11 is provided in the first organic insulating layer 5. The contact hole CH12 is provided in the second organic insulating layer 6. The contact holes CH11 and CH12 overlap with the island portion 43 and the inorganic insulating layer 9 in a plan view. The first extension portion 14 and the second extension portion 15 of the scanning line 1 are electrically connected via the connection component CM11 arranged in the contact hole CH11. The first extension portion 23 and the second extension portion 24 of the signal line 2 are electrically connected via the connection component CM12 arranged in the contact hole CH12. The connection component CM11 may be a part of the first extension portion 14 or may be provided separately from the first extension portion 14. Similarly, the connection component CM12 may be a part of the first extension portion 23 or may be provided separately from the first extension portion 23.

[0101] Fig.141 is a schematic cross-sectional view of the flexible substrate 300 along the scanning line 1 near the corner C9. The first portion 11 of the scanning line 1 is arranged on the first organic insulating layer 5. The second portion 12 of the scanning line 1 is arranged on the insulating substrate 4 (line portion 41). The contact hole CH13 is provided in the first organic insulating layer 5. The first portion 11 and the second portion 12 are electrically connected via the connecting member CM13 arranged in the contact hole CH13.

[0102] Fig.15 1 is a schematic cross-sectional view of the flexible substrate 300 along the scanning line 1 near the corner C7. The contact hole CH14 is provided in the first organic insulating layer 5. The first portion 11 and the second portion 12 of the scanning line 1 are electrically connected via the connecting member CM14 disposed in the contact hole CH14.

[0103] Fig.16 1 is a schematic cross-sectional view of the flexible substrate 300 along the signal line 2 near the corner C8. The first portion 21 of the signal line 2 is arranged on the second organic insulating layer 6. The second portion 22 of the signal line 2 is arranged on the insulating substrate 4 (line portion 41). The contact hole CH15 is provided in the first organic insulating layer 5 and the second organic insulating layer 6. The first portion 21 and the second portion 22 are electrically connected via the connecting member CM15 arranged in the contact hole CH15.

[0104] Fig.17 1 is a schematic cross-sectional view of the flexible substrate 300 along the signal line 2 near the corner C10. The contact hole CH16 is provided in the first organic insulating layer 5 and the second organic insulating layer 6. The first portion 21 and the second portion 22 of the signal line 2 are electrically connected via the connection member CM16 disposed in the contact hole CH16.

[0105] Furthermore, the connection components CM11, CM13, and CM14 may be part of the first portion 11 of the scanning line 1 or may be provided separately from the first portion 11. Furthermore, the connection components CM12, CM15, and CM16 may be part of the first portion 21 of the signal line 2 or may be provided separately from the first portion 21.

[0106] When the flexible substrate 300 is extended or bent, a large stress is applied to the position where the two line portions of the insulating substrate 4 are connected, that is, the bent portion of the scanning line 1 and the signal line 2. As in the present embodiment, if a structure is adopted in which the scanning line 1 is divided into the first part 11 and the second part 12, and the two parts are connected through a contact hole at the bent portion, the stress applied to the scanning line 1 at the bent portion can be relieved. Similarly, if a structure is adopted in which the signal line 2 is divided into the first part 21 and the second part 22, and the two parts are connected through a contact hole at the bent portion, the stress applied to the signal line 2 at the bent portion can be relieved. As a result, disconnection of the scanning line 1 and the signal line 2 can be suppressed.

[0107] In addition, the shape of the opening of the insulating substrate 4 and the shape of the area formed by the scanning line 1 and the signal line 2 are not limited to the contents disclosed in the first to third embodiments. For example, the insulating substrate 4 may not have the line portion 42 that does not overlap with either the scanning line 1 or the signal line 2. In addition, the insulating substrate 4 may have at least a portion including a curved line portion in addition to the straight line portion.

[0108] All flexible substrates that can be implemented by those skilled in the art by appropriately modifying the design based on the flexible substrate described as the embodiment of the present invention belong to the scope of the present invention as long as they include the gist of the present invention.

[0109] It should be understood that within the scope of the present invention, those skilled in the art can think of various variations, and these variations also belong to the scope of the present invention. For example, those skilled in the art can add, delete or design the contents obtained by appropriately adding, omitting or changing the conditions of the constituent elements with respect to the above-mentioned embodiments, as long as they have the gist of the present invention, they all belong to the scope of the present invention.

[0110] In addition, it should be understood that other effects brought about by the modes described in each embodiment that are clearly known from the description of this specification or that are easily conceivable by those skilled in the art are of course also brought about by the present invention.

[0111] Description of Reference Numerals

[0112] 100, 200, 300…flexible substrate, 1…scanning line, 2…signal line, 3…electrical element, 4…insulating substrate, 41, 42…line portion, 43…island portion, 5…first organic insulating layer, 6…second organic insulating layer, 7…coating layer, 8…support film, 9…inorganic insulating layer, C1 to C10…corner portion.

Claims

1. A flexible substrate, comprising: Flexible insulating substrate; as well as a plurality of wirings provided on the insulating substrate, The insulating substrate includes a first opening, a second opening having a shape different from that of the first opening, an island portion located between the first opening and the second opening, and a first line portion. The plurality of wirings include: A plurality of scanning lines extending along a first direction and arranged in a second direction orthogonal to the first direction; and a plurality of signal lines extending along the second direction and arranged in parallel in the first direction, The first openings and the second openings are arranged alternately. The first line portion is arranged between the first opening and the second opening, The scanning line and the signal line are arranged in parallel with each other at a position where the island portion is provided.

2. The flexible substrate according to claim 1, wherein: The first line portion does not overlap with the plurality of wirings in a plan view.

3. The flexible substrate according to claim 1, wherein: The first opening and the second opening are included in a region partitioned by two adjacent scanning lines and two adjacent signal lines.

4. The flexible substrate according to claim 3, wherein: There is also an electrical element, which is located in the island portion and to which a scanning signal is supplied from the scanning line. An inorganic insulating layer is disposed between the electric element and the insulating substrate.

5. The flexible substrate according to claim 1, wherein: The first opening is composed of the first line portion and a first plurality of line portions of the insulating substrate connected to the first line portion. The second opening is composed of the first line portion and a second plurality of line portions of the insulating substrate connected to the first line portion. The number of the first plurality of line portions is different from the number of the second plurality of line portions.

6. The flexible substrate according to claim 1, wherein: The shape of the first opening has four-fold or more rotational symmetry.

7. The flexible substrate according to claim 1, wherein: The first opening is formed of a plurality of line portions extending in four or more different directions.

8. The flexible substrate according to claim 1, wherein: The first opening includes an internal angle of 180° or more.

9. The flexible substrate according to claim 1, wherein: It also has an organic insulating layer overlapping the insulating substrate in a plan view, The wiring includes a first portion arranged above the organic insulating layer and a second portion arranged below the organic insulating layer. The first portion and the second portion are electrically connected via a contact hole provided in the organic insulating layer.

10. The flexible substrate according to claim 1, wherein: further comprising a supporting film for supporting the insulating substrate, The supporting film overlaps the first opening and the second opening in a plan view.

11. A flexible substrate, comprising: Flexible insulating substrate; as well as A plurality of wirings provided on the insulating substrate, The insulating substrate includes a plurality of first openings, a plurality of second openings having a shape different from that of the plurality of first openings, a plurality of third openings having a shape different from that of the first openings and the second openings, and an island portion located between the first openings and the second openings. The insulating substrate is arranged in a linear shape between the plurality of first openings and the plurality of second openings, The insulating substrate is arranged in a linear shape between the plurality of second openings and the plurality of third openings, The plurality of wirings include: A plurality of scanning lines extending along a first direction and arranged in a second direction orthogonal to the first direction; as well as a plurality of signal lines extending along the second direction and arranged in parallel in the first direction; The scanning line and the signal line are arranged in parallel with each other at a position where the island portion is provided.

12. The flexible substrate according to claim 11, wherein: In a region defined by two adjacent scanning lines and two adjacent signal lines, one first opening and one second opening are respectively provided.

13. The flexible substrate according to claim 12, wherein: It also has an electrical element to which a scanning signal is supplied from the scanning line, The electrical element is supported by an island portion of the insulating substrate located between the first opening and the second opening. An inorganic insulating layer is disposed between the electric element and the insulating substrate.

14. The flexible substrate according to claim 11, wherein: The shape of the first opening has four-fold or more rotational symmetry.

15. The flexible substrate according to claim 11, wherein: The first opening is formed of a plurality of line portions extending in four or more different directions.

16. The flexible substrate according to claim 13, wherein: The first opening includes an internal angle of 180° or more.

17. The flexible substrate according to claim 11, wherein: It also has an organic insulating layer overlapping the insulating substrate in a plan view, The wiring includes a first portion arranged above the organic insulating layer and a second portion arranged below the organic insulating layer. The first portion and the second portion are electrically connected via a contact hole provided in the organic insulating layer.

18. The flexible substrate according to claim 11, wherein: further comprising a supporting film for supporting the insulating substrate, The supporting film overlaps the first opening and the second opening in a plan view.

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