A micro gyroscope sensitive unit with improved scale factor and gyroscope

Abstract

The present invention provides a micro-gyroscope sensitive unit and a gyroscope with improved proportional factor, which relates to the technical field of gyroscopes, and can prevent the quality factor of the resonator from decreasing while achieving a high electromechanical coupling coefficient, so as to obtain a micro-vibration gyroscope with improved bias performance, high sensitivity and excellent signal-to-noise ratio; the sensitive unit includes a housing, a sensitive unit base and a resonator, the housing is fixedly connected to the sensitive unit base, the resonator is arranged inside the housing, a plurality of piezoelectric ceramics are arranged on the vertical wall of the resonator, the piezoelectric ceramics are connected to external electronic components, and a plurality of openings for improving the proportional factor are arranged between two adjacent piezoelectric ceramics. The gyroscope uses the above sensitive unit. The technical solution provided by the present invention is applicable to the process of designing, manufacturing and using a gyroscope.

Description

[Technical field]

[0001] The present invention relates to the technical field of gyroscopes, and in particular to a micro-gyroscope sensitive unit with improved proportional factor and a gyroscope. [Background technology]

[0002] The angle of rotation or angular rate can be measured by at least three physical phenomena, namely conservation of angular momentum, the Sagnac effect, and the Coriolis force. In its most common form, a gyroscope is a device that uses one of these phenomena to measure or maintain orientation and angular velocity. The measurement of the gyroscope's angular rotation rate can be integrated over time to determine the change in the gyroscope's angular orientation. For example, gyroscopes can be used in applications such as inertial navigation systems (INS), inertial measurement units (IMU), platform stabilization, ground vehicle attitude control systems (ACS), drilling survey instruments, aircraft, ships, spacecraft, and / or other applications.

[0003] A Coriolis vibrating gyroscope (CVG) is a type of mechanical structure (resonator) gyroscope that couples one vibration mode to another (or multiple) modes under the action of an external Coriolis force. When only two resonant modes are involved, namely the primary and secondary vibration modes, the CVG becomes a single-axis angular rate (or angle) sensor.

[0004] CVG is an important inertial technology that facilitates the miniaturization of gyroscopes and is suitable for mass production. In particular, when used as a resonator in a vibrating gyroscope, it can form a micro-electro-mechanical system (MEMS), which is made of etched silicon or quartz wafers, and its preparation process is similar to that of integrated circuits (ICs).

[0005] Compared with gyroscopes that use conservation of angular momentum (i.e., rate gyroscopes, rate integrating gyroscopes, floating gyroscopes, and dynamically tuned gyroscopes (DTGs)), vibratory gyroscopes have many advantages, such as being easier to produce, less expensive, easier to assemble, smaller in size, and having more stable operating performance (including vibration, shock, and temperature), which makes vibratory gyroscopes more reliable and have a longer service life.

[0006] Vibratory gyroscopes can be designed to operate in open loop, force rebalance (i.e., closed loop), and / or full angle modes of operation. Both force rebalance and open loop modes provide direct measurement of the rotational speed of the sensing axis. Full angle mode provides a measurement of the net rotation angle after initialization.

[0007] Various shapes of resonators can be used in vibratory gyroscopes. These resonators can be macroscopic systems or microscopic (MEMS), but only axisymmetric macroscopic resonators have navigation-grade performance (i.e. drift error less than 0.01 degrees / hour).

[0008] In this axisymmetric Coriolis gyroscope, the resonator preferably uses a hemispherical shape, and the edge of the shell undergoes an elliptical deformation during the main mode, with four nodes 90° apart from each other and located in the plane XY perpendicular to the axis of symmetry of the shell (denoted as Z). The secondary mode is also elliptical and can be derived from the deformation of the main mode rotated by 45°. The wave number of both modes is equal to 2. Assuming that the resonator is completely axisymmetric, the two modes will have the same resonant frequency. When the main mode is energized, any rotation W about the Z axis will generate a Coriolis force that tends to transfer energy from the first-order mode to the second-order mode. In the closed-loop configuration, the force required to balance the second-order mode will be proportional to W. In the full-angle working mode configuration, the second-order mode is free to receive energy transmitted to it from the first-order mode. If the control system maintains the total vibration energy at a set value, the combination of the main mode and the secondary mode will produce a new elliptical mode with the nodes rotated by an angle proportional to the input rotation angle relative to the axis XY of the resonator.

[0009] Hemispherical Coriolis gyroscopes are usually made of metallized silicon dioxide (Northrop Grumman, Safran), and an electrode system formed between the resonator and the electrode carrier (also made of metallized silicon dioxide) under high vacuum is used to generate electrostatic force and capacitive detection signals to control the resonator and measure the rotational angular rate or net rotation angle. Because the system is relatively complex, bulky and difficult to produce, its price remains high. For less demanding applications, requiring only tactical-grade performance (1°hr to 10° / hr) or smaller size, metal cylinders and piezoelectric sensors can be used instead of axisymmetric designs.

[0010] The first use of cylindrical resonators was in the 80s, using a metal cylinder with a PZT piezoelectric structure glued to the wall of the cylinder, close to the edge of the top of the cylinder. A rod supporting the cylinder was placed outside, in the center of the flat bottom of the cylinder. In 2005, an alternative design that was smaller and easier to assemble was proposed, this time placing the support rod inside the resonator and all the piezoelectric ceramic structures were glued to the outside of the flat bottom of the resonator, rather than the outer curved surface of the resonator. Once the resonator is connected to a mounting base and encapsulated under moderate vacuum, this structure forms what is called a CVG sensitive element (SE). Although the cylindrical resonator in this specific case is relatively small, with an outer diameter of about 25mm, the final SE dimensions are roughly 25mm high and 39mm mounting base diameter. The total mass is just under 80 grams.

[0011] Unfortunately, these sizes and masses are still too large, which prevents the use of these macroscopically sized high-precision axisymmetric cylindrical Coriolis gyroscopes in many IMU and platform stabilization applications.

[0012] To overcome this problem, an improved axisymmetric design of CVG sensitive unit (SE) is proposed, such asFigure 1 As shown, a cylindrical resonator is still used, but a support rod is placed at the center of its flat bottom on the outside, in a wine glass configuration.

[0013] This arrangement leaves a large free space inside the resonator to facilitate machining operations, especially the machining of its inner diameter. Since the outer dimensions of the resonator are to be reduced and miniaturized, the placement of support rods inside the resonator would make its inner diameter impossible to machine. In addition, multiple piezoelectric structures are connected to the vertical walls of the cylinder (still at its ends, but on the plane after cutting the curved surface) to avoid connecting them to the curved surface, while also allowing very precise and equiangular positioning. The number of piezoelectric structures is a multiple of 2, preferably 8. Still for reasons of size reduction, the resonator is connected to a circular mounting base with a groove on the outer diameter to accommodate a circular mounting damper. The cross-section of this damper is I-shaped and is sandwiched in the middle of the SE, allowing the entire structure to be clamped on the user's mounting plate ( Figure 1 (not shown).

[0014] In terms of operating modes, the improved CVG sensor (SE) design can operate in open-loop, force rebalance (i.e., closed-loop), or full-angle operating modes, assuming the use of appropriate control electronics. To achieve high gyro sensitivity and thus improve signal-to-noise ratio, both open-loop and force rebalance modes require excellent electromechanical-piezoelectric gain to drive and maintain the first-order mode to a set amplitude, as well as for sensing the second-order mode (open-loop) or applying force to balance the second-order mode (closed-loop).

[0015] Electromechanical piezoelectric gain is mainly based on piezoelectric properties, including direct piezoelectric effect and reverse piezoelectric effect, depending on whether the piezoelectric structure connected to the cylindrical resonator is used to sense or drive the vibration of the first and second modes. For example, Figure 2 is an example of a closed loop configuration. On the measurement side (direct piezoelectric effect), the charge accumulated on the metal surface of the piezoelectric structure in response to mechanical stress (generated by the first and second order modes in the cylinder structure) is typically converted into a voltage that can be processed by the control electronics. On the drive side, the piezoelectric reverse effect is used with the control electronics to generate a voltage on the driven piezoelectric structure to produce an electric field, which in turn produces mechanical strain. Since the piezoelectric structure is rigidly attached to the cylinder wall, the local mechanical strain leads to mechanical stress, and when all of this is done at the first and second order mode resonant frequencies, forces are generated that control the above modes.

[0016] In order to obtain high piezoelectric electromechanical gains, high-efficiency piezoelectric materials are usually considered and assumed to have a high piezoelectric charge coefficient (d ij ) of PZT material.

[0017] The position of each piezoelectric structure along the resonator wall is also important, such as when the first or second mode is energized, Figure 3 As shown in the figure, the mechanical strain reaches the maximum value at the top of the resonator (i.e., at its edge, where the elliptical vibration occurs), and tends to zero at the bottom of the resonator, and even becomes zero at the location of the support rod (the support rod is placed on the vibration node). Therefore, from the perspective of gyroscope sensitivity (i.e., scale factor) and signal-to-noise ratio, placing the piezoelectric structure at the bottom layer (the end close to the base of the sensitive unit) will inevitably have an adverse effect.

[0018] Placing the piezoelectric structure on top (as with the START gyro) also has negative effects, such as a decrease in the quality factor of the main and secondary modes.

[0019] Therefore, it is necessary to study a micro gyroscope sensitive unit and a gyroscope with improved scale factor to address the deficiencies of the prior art and to solve or alleviate one or more of the above problems. [Summary of the invention]

[0020] In view of this, the present invention provides a micro-gyroscope sensitive unit and a gyroscope with improved proportional factor, which can prevent the quality factor of the resonator from decreasing while achieving high electromechanical coupling, thereby obtaining a micro-vibration gyroscope with improved bias performance, high sensitivity and excellent signal-to-noise ratio.

[0021] The present invention provides a micro-gyroscope sensitive unit with improved proportional factor, comprising a shell, a sensitive unit base and a resonator, wherein the shell is fixedly connected to the sensitive unit base, the resonator is arranged inside the shell, a plurality of piezoelectric ceramics are arranged on the vertical wall of the resonator, the piezoelectric ceramics are connected to external electronic components, and the characteristic is that a plurality of openings for improving the proportional factor are arranged between two adjacent piezoelectric ceramics.

[0022] According to the above aspects and any possible implementation, there is further provided an implementation, in which the openings between two adjacent piezoelectric ceramics are evenly arranged.

[0023] According to the above aspects and any possible implementation, there is further provided an implementation, in which the number of openings between every two adjacent piezoelectric structures is equal and uniformly arranged.

[0024] According to the above aspects and any possible implementation manner, an implementation manner is further provided, wherein the opening is specifically a through hole.

[0025] According to the aspects and any possible implementations described above, an implementation is further provided, wherein the shape of the opening includes but is not limited to a rectangle, an ellipse, and a circle.

[0026] According to the aspects described above and any possible implementation method, an implementation method is further provided, wherein the resonator is in the shape of a high-foot wine glass, including a wine glass portion and a support rod; one end of the support rod is fixedly connected to the outer surface of the bottom of the wine glass portion, and the other end is fixedly connected to the base of the sensitive unit.

[0027] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the inner diameter of the wine glass portion is uniformly thick at the top and bottom, and the piezoelectric structure is evenly arranged on the vertical outer wall of the wine glass portion near one end of the support rod.

[0028] According to the above aspects and any possible implementation, there is further provided an implementation, wherein the vertical wall is provided with a plurality of planes for mounting the piezoelectric structure.

[0029] According to the above aspects and any possible implementation manner, there is further provided an implementation manner, wherein parallel surfaces of the top and bottom of the piezoelectric ceramic have metal layers.

[0030] According to the aspects described above and any possible implementation method, an implementation method is further provided, wherein a mounting blind hole is provided on the base of the sensitive unit; a fixing point is provided between the outer end of the support rod and the mounting blind hole, and the fixing point is a bonding point or a welding point.

[0031] On the other hand, the present invention provides a micro gyroscope with improved scale factor, characterized in that the gyroscope comprises a control circuit and any of the above-mentioned sensitive units, and the control circuit is connected to the sensitive unit through the sensitive unit base.

[0032] Compared with the prior art, the present invention can achieve the following technical effects:

[0033] (1) Multiple piezoelectric structures are connected to the outer diameter of the resonator, near the flat bottom of the resonator, in a circular and equiangular manner. This structure is particularly useful for avoiding the reduction of the quality factor of the resonator and improving performance;

[0034] (2) The top and bottom parallel surfaces of the piezoelectric structure are metallized to make these surfaces conductive and allow electrical connections to be made using wire bonds;

[0035] (3) The piezoelectric structure has a high to medium quality factor to maintain the quality factor of the cylindrical resonator and has a high piezoelectric charge coefficient;

[0036] (4) A number of openings are provided between two adjacent piezoelectric structures. The design of the openings helps to reduce the stiffness of the resonator in which the piezoelectric structures are placed, allowing the cylinder to deform in these areas, thereby increasing the mechanical strain and ultimately improving the sensitivity of the gyroscope and the signal-to-noise ratio.

[0037] Of course, any product implementing the present invention does not necessarily need to achieve all of the above-mentioned technical effects at the same time.

Brief Description of the Drawings

[0038] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0039] Figure 1 showing a Coriolis gyroscope sensitive element defined within a cylindrical resonator, a piezoelectric structure attached thereto, and a view of a portion of the support rod assembly entering the sensitive element base;

[0040] Figure 2 A functional block diagram is shown representing a Coriolis gyroscope in a closed loop configuration with its resonator, sensing and driving piezoelectric structures and its control electronics;

[0041] Figure 3 shows the mechanical strain distribution of the Coriolis gyroscope resonator;

[0042] Figure 4 A wine glass-shaped resonator of a Coriolis gyroscope sensing unit according to an embodiment of the present invention is shown.

[0043] Among them, in the figure:

[0044] 1. Wine glass part; 2. Resonator; 3. Flat mounting surface; 4. Support rod; 5. Opening. [Specific implementation method]

[0045] In order to better understand the technical solution of the present invention, the embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0046] It should be clear that the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments, and are not intended to limit the present invention. The singular forms "a", "said" and "the" used in the embodiments of the present invention and the appended claims are also intended to include plural forms, unless the context clearly indicates other meanings.

[0048] In order to overcome the above problems, the present invention proposes a sensitive unit resonator designed for a miniature Coriolis gyroscope, which has high measurement accuracy, high sensitivity and excellent signal-to-noise ratio, and substantially avoids one or more disadvantages of the prior art.

[0049] According to the technical solution of the present invention, a micro gyroscope with improved scale factor is proposed, which is characterized by comprising:

[0050] A resonator, the resonator is in the shape of a high-foot wine glass, comprising a wine glass portion and a support rod arranged outside the cavity of the wine glass portion, the first end of the support rod is fixedly connected to the outer surface of the bottom of the wine glass cavity, and the second end (i.e., the outer end of the support rod) is fixedly connected to the base of the sensitive unit; a plurality of piezoelectric structure mounting grooves are arranged at equal angles on the vertical outer wall of the resonator; preferably, the piezoelectric structure is attached to the vertical outer wall of the wine glass portion near one end of the support rod;

[0051] a plurality of piezoelectric structures having a metallized top surface and a metallized bottom surface, the piezoelectric structures being mounted in piezoelectric structure mounting recesses on a vertical wall of the resonator;

[0052] A plurality of openings are located on the outer wall of the resonator between adjacent piezoelectric structures and are evenly arranged at equal angles;

[0053] Sensitive unit base, including:

[0054] An installation blind hole is located at the center of the base, and the second end of the support rod is fixedly connected to the installation blind hole;

[0055] Multiple binding posts, metal binding posts running through the sensitive unit base, are used to connect with the piezoelectric structure and external electronic components to achieve transmission of piezoelectric signals; a glass piece is provided between the metal binding post and the sensitive unit base, which, on the one hand, seals together with the binding post and the sensitive unit base, and on the other hand, can cut off the conductive performance between the binding post and the sensitive unit base; the structure of the metal binding post is not the only way to connect the piezoelectric structure with the external control circuit element, and the connection can also be achieved through a conductive structure provided in the non-conductive sensitive unit base;

[0056] A damper mounting groove is located on the outermost end portion vertically extending from the side wall of the mounting blind hole;

[0057] An external vibration damper is installed in a vibration damper installation groove, and the vibration damper installation groove is arranged on the outer circumference of the sensitive unit base;

[0058] The front circuit board is electrically connected to the terminal.

[0059] Furthermore, the terminal is electrically connected to the piezoelectric structure via a bonding wire.

[0060] Furthermore, the piezoelectric structure is a piezoelectric structure made of PZT ceramic material.

[0061] Furthermore, the number of the piezoelectric structures is a multiple of 2, and is divided into two piezoelectric structure groups of the same number, including a first-order mode driving / measurement piezoelectric structure group and a second-order mode driving / measurement piezoelectric structure group.

[0062] Furthermore, it is characterized in that the number of the piezoelectric structures is 8.

[0063] Furthermore, the shape of the opening includes but is not limited to rectangle, ellipse or circle.

[0064] Furthermore, the opening, the piezoelectric structure installation groove and the resonator are all one-step molded structures.

[0065] Furthermore, gluing points or welding points are provided between the piezoelectric structure and the piezoelectric structure mounting groove, and between the second end of the support rod and the mounting blind hole.

[0066] Furthermore, welding points are provided between the piezoelectric structure and the piezoelectric structure mounting groove, and between the second end of the support rod and the mounting blind hole, and are optionally provided with a metal coating.

[0067] The following is an embodiment of the present invention, an example of which is shown in the accompanying drawings.

[0068] A preferred embodiment of the present invention includes a high-foot wine glass-shaped resonator, including a wine glass portion 1 and a support rod 4 arranged outside the wine glass portion, one end of the support rod 4 being fixedly connected to the outer side of the bottom of the wine glass portion. A plurality of piezoelectric structures 2 are connected to the vertical cylindrical wall at the bottom end of the wine glass portion of the resonator (i.e., one end near the support rod). The number of piezoelectric structures 2 is a multiple of 2, preferably 8, and is divided into 2 groups, each group having the same number of piezoelectric structures. One group is responsible for driving and measuring the first-order mode, and the other group is responsible for driving and measuring the second-order mode. The resonator is connected to a mounting base (i.e., a sensitive unit base) via a support rod. A plurality of openings passing through the wall of the resonator are distributed between the piezoelectric structures and arranged equiangularly along the circumference, and the openings are through holes.

[0069] Figure 4 The Coriolis gyro sensitive unit comprises a high-foot wine glass-shaped resonator, including a wine glass portion 1 and a support rod 4 arranged outside the wine glass portion, one end of the support rod is fixedly connected to the outer side of the bottom of the wine glass portion, and the entire cup is placed upside down with the mouth facing downward.

[0070] A plurality of piezoelectric structures 2 are attached to the outer peripheral wall of the resonator and are distributed at equal angles around the circumference. This structure is particularly useful for avoiding a decrease in the quality factor of the resonator and improving performance. These piezoelectric structures are used to drive and measure the first and second order resonant modes of the resonator. The top and bottom parallel surfaces of the piezoelectric structures are metallized to make these surfaces conductive and allow electrical connection using wire bonding (i.e., connection to the terminals provided on the base of the sensing unit).

[0071] The number of piezoelectric structures is divided into two groups, and the number of piezoelectric structures in each group is the same. One group is responsible for the main mode, and the other group is responsible for the secondary mode.

[0072] The preferred arrangement is to use eight piezoelectric structures made of PZT ceramic material with a high to medium quality factor to maintain the quality factor of the cylindrical resonator and a high piezoelectric charge coefficient (d ij ). When the number of piezoelectric structures is 8, the piezoelectric structures are evenly distributed every 45°.

[0073] In order to facilitate the assembly of the piezoelectric structure 2, the flat surface of the resonator can be cut to ensure a flat installation of the piezoelectric structure. Of course, these flat mounting surfaces 3 (which can also be the bottom surface of the mounting groove) will be processed in one machine operation without removing the resonator from the machining center to maintain positioning and coaxiality accuracy.

[0074] The piezoelectric structure is installed flat or grooved on the outer surface of the resonator. An opening 5 is provided between two adjacent piezoelectric structures, the opening is located in the middle of the two adjacent piezoelectric structures, and all the openings 5 ​​are evenly distributed at equal angles on the outer surface of the resonator. One embodiment of the present invention includes a plurality of openings, which are also distributed along the circumference and at equal angles. The provision of the openings helps to reduce the stiffness of the resonator in which the piezoelectric structure is placed, and allows the cylinder to deform in these areas, thereby increasing the mechanical strain, and ultimately improving the sensitivity of the gyroscope and the signal-to-noise ratio.

[0075] The planar cut area for mounting the piezoelectric structure or the piezoelectric structure mounting grooves and openings are preferably processed simultaneously in one machine operation during the preliminary preparation process.

[0076] The shape of the opening is not limited to a rectangle, and can also be other shapes, such as an ellipse, a circle, etc. However, some shapes that can achieve the best gyroscope sensitivity often have more difficult processing technology. In order to control costs, a trade-off can be made between improving sensitivity and price. In terms of assembly process, the piezoelectric structure can be assembled to the resonator, and the resonator support rod can be assembled to the SE base by gluing or welding. In the case of welding, an appropriate selective surface coating can be included to increase the wettability of the component surface. The preparation of the surface coating can be performed before or after machining the opening.

[0077] The SE base (i.e., the sensitive unit base) is provided with a number of through-type terminals, which are made of metal, and glass is provided between the terminals and the SE base for sealing and blocking the conductivity between the terminals and the metal SE base. The terminals are used to realize wire bonding between the external control electronic equipment and the piezoelectric structure.

[0078] The above is a detailed introduction to a micro-gyroscope sensitive unit and a gyroscope with improved proportional factor provided by the embodiment of the present application. The description of the above embodiment is only used to help understand the method and core idea of ​​the present application; at the same time, for those skilled in the art, according to the idea of ​​the present application, there will be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as limiting the present application.

[0079] For example, certain words are used in the specification and claims to refer to specific components. Those skilled in the art should understand that hardware manufacturers may use different nouns to refer to the same component. This specification and claims do not use differences in names as a way to distinguish components, but use differences in the functions of components as the criteria for distinction. As mentioned throughout the specification and claims, "including" and "comprising" are open-ended terms, so they should be interpreted as "including / including but not limited to". "Approximately" means that within an acceptable error range, those skilled in the art can solve the technical problem within a certain error range and basically achieve the technical effect. The subsequent description of the specification is a preferred embodiment of the present application, but the description is for the purpose of illustrating the general principles of the present application, and is not used to limit the scope of the present application. The scope of protection of the present application shall be determined by the definition of the attached claims.

[0080] It should also be noted that the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a product or system including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such a product or system. In the absence of more restrictions, the elements defined by the sentence "comprises a ..." do not exclude the existence of other identical elements in the product or system including the elements.

[0081] It should be understood that the term "and / or" used in this article is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist at the same time, and B exists alone. In addition, the character " / " in this article generally indicates that the associated objects before and after are in an "or" relationship.

[0082] The above description shows and describes several preferred embodiments of the present application, but as mentioned above, it should be understood that the present application is not limited to the form disclosed herein, and should not be regarded as excluding other embodiments, but can be used in various other combinations, modifications and environments, and can be modified within the scope of the application concept described herein through the above teachings or the technology or knowledge of the relevant field. The changes and modifications made by those skilled in the art do not deviate from the spirit and scope of the present application, and should be within the scope of protection of the claims attached to the present application.

Claims

1. A micro gyroscope sensitive unit with improved scale factor, characterized in that: The sensitive unit includes a housing, a sensitive unit base and a resonator, wherein the housing is fixedly connected to the sensitive unit base, the resonator is arranged inside the housing, and 8 piezoelectric structures are arranged on the vertical wall of the resonator, and are divided into two piezoelectric structure groups of the same number, including a first-order mode driving / measuring piezoelectric structure group and a second-order mode driving / measuring piezoelectric structure group; The piezoelectric structures are evenly distributed every 45°; the piezoelectric structures are made of PZT ceramic material; the piezoelectric structures are connected to external electronic components, and a number of openings for improving the proportional factor are provided between two adjacent piezoelectric structures; The openings between two adjacent piezoelectric structures are arranged evenly; the number of openings between every two adjacent piezoelectric structures is equal and they are arranged evenly; the openings are specifically through holes; The resonator is in the shape of a goblet, including a goblet portion and a support rod; the inner diameter of the goblet portion is uniformly thick at the top and bottom, and the piezoelectric structure is evenly arranged on the vertical outer wall of the goblet portion near one end of the support rod; the vertical wall is provided with a plurality of planes for mounting the piezoelectric structure; Wherein, the top and bottom parallel surfaces of the piezoelectric structure have metal.

2. The micro gyroscope sensitive unit with improved scale factor according to claim 1, characterized in that: The shapes of the opening include rectangle, ellipse and circle.

3. The micro gyroscope sensitive unit with improved scale factor according to claim 1, characterized in that: One end of the support rod is fixedly connected to the outer surface of the bottom of the wine glass portion, and the other end is fixedly connected to the base of the sensitive unit.

4. The micro gyroscope sensitive unit with improved scale factor according to claim 3, characterized in that: The base of the sensitive unit is provided with a mounting blind hole; a fixing point is provided between the outer end of the support rod and the mounting blind hole, and the fixing point is a bonding point or a welding point.

5. A micro gyroscope with improved scale factor, characterized in that: The gyroscope comprises a control circuit and a sensitive unit as claimed in any one of claims 1 to 4, wherein the control circuit is connected to the sensitive unit via the sensitive unit base.

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