Cutting device

Abstract

A cutting device is provided, which has a tool replacement device that is small, light or low-cost. The cutting device has a tool replacement device for replacing a cutting tool installed on a spindle of a first cutting unit and a cutting tool installed on a spindle of a second cutting unit, wherein the tool replacement device has a nut loading and unloading unit for loading and unloading a nut and a tool loading and unloading unit for loading and unloading a cutting tool, and the nut loading and unloading unit has: a rotating shaft; a first nut rotating part, which is fixed to one end side of the rotating shaft and rotates while holding a nut for fixing the cutting tool to the spindle of the first cutting unit; a second nut rotating part, which is fixed to the other end side of the rotating shaft and rotates while holding a nut for fixing the cutting tool to the spindle of the second cutting unit; a motor; and a power transmission unit, which is connected to the motor and the rotating shaft and transmits power of the motor to the rotating shaft.

Description

Technical Field

[0001] The present invention relates to a cutting device for cutting a workpiece. Background Art

[0002] In the manufacturing process of device chips, a wafer or the like is used in which devices such as IC (Integrated Circuit) and LSI (Large Scale Integration) are formed in multiple regions divided by multiple predetermined dividing lines (strips) intersecting each other. The wafer is divided along the predetermined dividing lines to obtain multiple device chips each having a device.

[0003] For example, a cutting device is used to split the wafer. The cutting device includes: a chuck table that holds the wafer; and a cutting unit that performs cutting processing on the wafer held by the chuck table. The cutting unit has a spindle (rotating shaft) on which an annular cutting tool for cutting the wafer is mounted, and the cutting tool is fixed to the front end of the spindle by a nut. The cutting tool mounted on the cutting unit is rotated to cut into the wafer, thereby cutting and splitting the wafer.

[0004] In addition, in the cutting of the wafer, a so-called facing dual-axis type cutting device is sometimes used, which has a pair of processing units and a pair of cutting tools installed in a mutually opposed manner. By using the facing dual-axis type cutting device, for example, two cutting processes with different processing conditions (type of cutting tool, cutting depth into the wafer, etc.) can be performed simultaneously.

[0005] The cutting tool is worn out due to the processing of the wafer, so it is necessary to replace it regularly. When replacing the cutting tool, first loosen the nut that fixes the cutting tool and remove it, and then remove the used cutting tool. Then, the replacement cutting tool is installed on the front end of the spindle and fixed with the nut. When the cutting tool is replaced manually, it takes time and there is a concern that the cutting tool or the nut will fall off by mistake during the operation. Therefore, attempts have been made to automatically replace the cutting tool.

[0006] Patent document 1 discloses a tool replacement device that is disposed facing a dual-axis cutting device and automatically replaces a cutting tool. The tool replacement device includes: a mechanism for loading and unloading the cutting tool (tool loading and unloading unit); and a mechanism for loading and unloading a nut for fixing the cutting tool to the front end of the spindle (nut loading and unloading unit).

[0007] Patent Document 1: Japanese Patent Application Publication No. 2007-229843

[0008] The tool replacement device mounted on the dual-axis cutting device replaces the cutting tools of a pair of cutting units respectively, and therefore has a pair of nut rotating parts for holding and rotating the nut. Furthermore, the pair of nut rotating parts are respectively connected to motors for rotating the nut rotating parts.

[0009] However, the motor for rotating the nut rotating part has considerable size and weight. Therefore, when a pair of nut rotating parts are provided with separate motors, the size and weight of the tool changing device increase. In addition, in order to construct and operate the tool changing device, it is necessary to prepare and maintain a plurality of motors, which increases the cost. Summary of the invention

[0010] The present invention has been made in view of the above problems, and an object of the present invention is to provide a cutting device having a tool changing device that is compact, lightweight, or low-cost.

[0011] According to one embodiment of the present invention, a cutting device is provided, which comprises: a chuck table for holding a workpiece; a first cutting unit and a second cutting unit, which have a spindle and cut the workpiece held by the chuck table using a cutting tool mounted on the spindle; and a tool replacement device for replacing the cutting tool mounted on the spindle of the first cutting unit and the cutting tool mounted on the spindle of the second cutting unit, wherein the tool replacement device comprises: a nut loading and unloading unit for tightening and removing a nut for fixing the cutting tool to the spindle; and a tool A loading and unloading unit is used to install the cutting tool on the main shaft and remove the cutting tool from the main shaft. The nut loading and unloading unit comprises: a rotating shaft portion; a first nut rotating portion, which is fixed to one end side of the rotating shaft portion and rotates while holding the nut for fixing the cutting tool to the main shaft of the first cutting unit; a second nut rotating portion, which is fixed to the other end side of the rotating shaft portion and rotates while holding the nut for fixing the cutting tool to the main shaft of the second cutting unit; a motor; and a power transmission unit, which is connected to the motor and the rotating shaft portion and transmits power of the motor to the rotating shaft portion.

[0012] In addition, the rotation axis of the first nut rotating part and the rotation axis of the second nut rotating part can be set on the same straight line. In addition, the power transmission unit can be a speed reducer that transmits the power in a manner that the rotation speed of the rotating shaft part is lower than the rotation speed of the motor and makes the torque of the first nut rotating part and the second nut rotating part larger than the torque of the motor. In addition, the speed reducer can have a bevel gear or a hypoid gear.

[0013] A cutting device according to one embodiment of the present invention has a tool replacement device for replacing a cutting tool. The tool replacement device also has: a motor; a rotating shaft having a first nut rotating portion fixed at one end and a second nut rotating portion fixed at the other end; and a power transmission unit for transmitting power of the motor to the rotating shaft.

[0014] The tool changing device can transmit the power of the motor to the first nut rotating part and the second nut rotating part via the power transmission unit and the rotating shaft. That is, one motor can be used to drive the two nut rotating parts. Thus, there is no need to separately provide motors for the first nut rotating part and the second nut rotating part, and the tool changing device can be miniaturized, lightweighted or cost-effective. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a perspective view showing a cutting device.

[0016] Figure 2 is a perspective view showing a cutting unit.

[0017] Figure 3 It is a perspective view showing the loading and unloading unit.

[0018] Figure 4 is a perspective view showing a power transmission unit.

[0019] Figure 5 It is a perspective view showing the interior of the power transmission unit.

[0020] Description of symbols

[0021] 11: workpiece; 13: belt; 15: frame; 2: cutting device; 4: base; 4a: opening; 4b: opening; 6: box holding table; 8: box; 10: moving mechanism; 10a: moving worktable; 12: dust and drip proof cover; 14: chuck worktable (holding worktable); 14a: holding surface; 16: fixture; 18: guide rail; 20: first supporting structure; 22: track; 24: moving mechanism; 26: holding unit; 26a: gripping mechanism; 28: track; 30: moving mechanism; 32: holding unit; 34: second supporting structure; 36a, 36b: moving mechanism; 38a, 38b: cutting unit; 40: shooting unit (camera); 42: cleaning unit; 44: rotating worktable; 46: Nozzle; 50: tool changing device (tool changing mechanism); 52a, 52b: tool holder; 54a, 54b: support shaft; 56a, 56b: holding portion; 58: base; 60: moving mechanism; 62: ball screw; 64: moving member; 66: support member; 66a: upper wall; 66b: side wall; 66c: support portion; 68: loading and unloading unit (loading and unloading mechanism); 70: housing; 72: spindle (rotating axis); 74: mounting seat; 76: flange; 76a: front; 76b: convex portion; 78: support shaft; 78a: threaded portion; 78b: concave portion; 80: cutting tool; 82: base; 82a: opening; 82b: gripping portion; 84: cutting blade; 86: nut; 86a: opening; 8 6b: through hole; 90: control unit (control unit); 100: nut loading and unloading unit; 102: motor; 102a: housing; 102b: rotating shaft (output shaft); 102c: pulley member (pulley unit); 104: power transmission unit (power transmission mechanism); 104a: housing; 104b: rotating shaft; 104c: pulley member (pulley unit); 104d: through hole; 106: rotating shaft; 108: connecting member; 110a, 110b: nut rotating part (nut rotating unit); 112: rotating member; 112a: front; 114: retaining pin; 116: holding member; 116a: claw; 118: cover; 120: first bearing; 122: second bearing; 124: gear Wheel unit; 126: first gear; 126a: tooth portion; 128: second gear; 128a: tooth portion; 128b: support surface; 130: cover portion; 130a: support surface; 140: tool loading and unloading unit; 142: motor; 142a: housing; 142b: pulley member (pulley portion); 144: power transmission unit (power transmission mechanism); 144a: housing; 144b: rotating shaft; 144c: pulley member (pulley portion); 144d: through hole; 146: rotating shaft portion; 148: connecting member; 150a, 150b: tool holding unit; 152: support member; 154a, 154b: tool holding unit; 156: base; 156a: front surface; 158: positioning pin;160: holding part; 160a: claw part. ; DETAILED DESCRIPTION

[0022] Hereinafter, an embodiment of one mode of the present invention will be described with reference to the drawings. First, a configuration example of a cutting device according to this embodiment will be described. Figure 1 It is a perspective view showing the cutting device 2 .

[0023] The cutting device 2 has a base 4 that supports the components of the cutting device 2. An opening 4a is formed at a corner of the front side of the base 4, and a box holding table 6 that is raised and lowered by a lifting mechanism (not shown) is provided inside the opening 4a. A box 8 that can accommodate a plurality of workpieces 11 is arranged on the upper surface of the box holding table 6. Figure 1 In FIG. 8 , the outline of the box 8 is shown by dotted lines.

[0024] The workpiece 11 is, for example, a disk-shaped wafer made of a semiconductor material such as silicon. The front side of the workpiece 11 is divided into a plurality of regions by a plurality of predetermined dividing lines (spacers) arranged in a grid-like manner in a mutually intersecting manner, and devices such as IC (Integrated Circuit) and MEMS (Micro Electro Mechanical Systems) are formed in each region. For example, when the workpiece 11 is cut and divided along the predetermined dividing lines by the cutting device 2, a plurality of device chips each having a device are obtained.

[0025] A circular belt 13 made of resin or the like and having a larger diameter than the workpiece 11 is attached to the back side of the workpiece 11. An annular frame 15 is attached to the outer periphery of the belt 13, and the frame 15 has an opening in the center portion having a larger diameter than the workpiece 11. The workpiece 11 is housed in the box 8 while being supported by the frame 15 via the belt 13.

[0026] In addition, there is no limitation on the material, shape, structure, size, etc. of the workpiece 11. For example, the workpiece 11 may be a wafer made of a semiconductor other than silicon, ceramic, resin, metal, etc. In addition, there is no limitation on the type, number, shape, structure, size, arrangement, etc. of the device formed on the workpiece 11, and the device may not be formed on the workpiece 11. In addition, the workpiece 11 may be stored in the box 8 in a state where it is not supported by the frame 15 or the tape 13 is not attached.

[0027] A rectangular opening 4b is formed on the side of the opening 4a so that the longitudinal direction is along the X-axis direction (front-back direction, processing feed direction). A ball screw type moving mechanism 10 and a dust and drip-proof cover 12 covering a part of the upper part of the moving mechanism 10 are arranged inside the opening 4b. The moving mechanism 10 has a moving table 10a, and the moving table 10a is moved along the X-axis direction.

[0028] A chuck table (holding table) 14 is provided on the movable table 10a to hold the workpiece 11. The chuck table 14 is connected to a rotation drive source (not shown) such as a motor, and rotates around a rotation axis substantially parallel to the Z-axis direction (vertical direction, up and down direction). The chuck table 14 is moved along the X-axis direction (processing feed) by the moving mechanism 10.

[0029] The upper surface of the chuck table 14 constitutes a holding surface 14a for holding the workpiece 11. The holding surface 14a is connected to a suction source (not shown) via a suction path (not shown) formed inside the chuck table 14. In addition, a plurality of clamps 16 are provided around the chuck table 14, and these clamps 16 hold and fix a frame 15 supporting the workpiece 11.

[0030] A pair of guide rails 18 are provided above the opening 4b so as to approach and move away from each other while maintaining a state substantially parallel to the Y-axis direction (left-right direction, indexing feed direction). The pair of guide rails 18 each have a support surface for supporting the frame 15 from below and a side surface substantially perpendicular to the support surface. The pair of guide rails 18 correspond to a temporary placement area for temporarily placing the workpiece 11, and clamp the frame 15 supporting the workpiece 11 along the X-axis direction and arrange (align) it at a predetermined position.

[0031] A gate-shaped first support structure 20 is arranged above the base 4 so as to straddle the opening 4b. A rail 22 is fixed along the Y-axis direction on the front surface side (guide rail 18 side) of the first support structure 20. A holding unit 26 is connected to the rail 22 via a moving mechanism 24.

[0032] The holding unit 26, for example, contacts the upper surface of the frame 15 and holds the frame 15 by suction. The holding unit 26 is raised and lowered by the moving mechanism 24 and moves in the Y-axis direction along the rail 22. The holding unit 26 holds the frame 15 aligned by the pair of guide rails 18 by suction and transports it to the chuck table 14.

[0033] In addition, a holding mechanism 26a for holding the frame 15 is provided on the opening 4a side of the holding unit 26. The holding unit 26 is moved in the Y-axis direction while the frame 15 stored in the cassette 8 is held by the holding mechanism 26a, so that the frame 15 is pulled out from the cassette 8 onto the pair of guide rails 18. In addition, the holding unit 26 is moved in the Y-axis direction while the frame 15 disposed on the pair of guide rails 18 is held by the holding mechanism 26a, so that the frame 15 is stored in the cassette 8.

[0034] In addition, a rail 28 is fixed along the Y-axis direction on the front surface side of the first support structure 20. A holding unit 32 is connected to the rail 28 via a moving mechanism 30. The holding unit 32, for example, contacts the upper surface of the frame 15 to hold the frame 15 by suction. In addition, the holding unit 32 is raised and lowered by the moving mechanism 30 and moves in the Y-axis direction along the rail 28.

[0035] A gate-shaped second support structure 34 is arranged behind the first support structure 20 so as to span the opening 4b. A pair of moving mechanisms 36a and 36b are fixed to both side ends of the front surface side (first support structure 20 side) of the second support structure 34. In addition, a cutting unit 38a (first cutting unit) is provided at the lower part of the moving mechanism 36a, and a cutting unit 38b (second cutting unit) is provided at the lower part of the moving mechanism 36b.

[0036] The cutting unit 38a is moved along the Y-axis direction and the Z-axis direction by the moving mechanism 36a, thereby adjusting the position of the cutting unit 38a in the Y-axis direction and the Z-axis direction. In addition, the cutting unit 38b is moved along the Y-axis direction and the Z-axis direction by the moving mechanism 36b, thereby adjusting the position of the cutting unit 38b in the Y-axis direction and the Z-axis direction.

[0037] Figure 2 : is a perspective view showing a cutting unit 38a. The cutting unit 38a has a cylindrical housing 70, and a cylindrical main shaft (rotating shaft) 72 is accommodated inside the housing 70. The front end (one end side) of the main shaft 72 is exposed to the outside of the housing 70, and a mounting seat 74 that is circular in top view is fixed to the front end. In addition, a rotation drive source (not shown) such as a motor that rotates the main shaft 72 is connected to the base end (the other end side) of the main shaft 72.

[0038] The mounting seat 74 has a disc-shaped flange portion 76 and a cylindrical support shaft 78 protruding from the center of the front surface 76a of the flange portion 76. In addition, an annular convex portion 76b protruding from the front surface 76a is provided on the front surface 76a side of the outer peripheral portion of the flange portion 76. The front end surface of the convex portion 76b is formed substantially parallel to the front surface 76a.

[0039] A threaded portion 78a is formed on the outer peripheral surface of the support shaft 78. In addition, a recessed portion 78b is formed in the central portion of the front end surface of the support shaft 78. An annular cutting tool 80 for cutting the workpiece 11 is mounted on the support shaft 78. The cutting tool 80 includes: an annular base 82 having a circular opening 82a in the central portion; and an annular cutting blade 84 formed along the outer edge of the base 82. In addition, an annular gripping portion 82b protruding in the width direction of the base 82 is formed around the opening 82a of the base 82.

[0040] The cutting edge 84 is formed by fixing abrasive grains made of diamond or the like with a nickel plating layer. However, the materials of the abrasive grains and the bonding material of the cutting edge 84 are not limited and can be appropriately selected according to the material of the workpiece 11 and the processing content.

[0041] An annular nut 86 for fixing the cutting tool 80 is fastened to the threaded portion 78a of the support shaft 78. A circular opening 86a corresponding to the diameter of the support shaft 78 is formed in the center of the nut 86. A thread groove corresponding to the threaded portion 78a formed on the support shaft 78 is formed in the opening 86a. In addition, a plurality of through holes 86b penetrating the nut 86 in the thickness direction are formed in the nut 86 at substantially equal intervals along the circumferential direction of the nut 86.

[0042] The cutting tool 80 is mounted on the mounting seat 74 in such a manner that the support shaft 78 is inserted into the opening 82a of the base 82. When the nut 86 is screwed and fastened to the threaded portion 78a of the support shaft 78 while the cutting tool 80 is mounted on the mounting seat 74, the cutting tool 80 is clamped between the front end surface of the convex portion 76b of the flange portion 76 and the nut 86. In this way, the cutting tool 80 is mounted on the front end portion of the spindle 72.

[0043] In addition, the structure of the cutting unit 38a is described here, and the structure of the cutting unit 38b is also the same as that of the cutting unit 38a. In addition, the cutting tool 80 installed in the cutting unit 38a and the cutting tool 80 installed in the cutting unit 38b are arranged to face each other. In addition, the cutting units 38a and 38b each have a nozzle for supplying a cutting fluid such as pure water to the workpiece 11 or the cutting tool 80.

[0044] like Figure 1 As shown, a photographing unit (camera) 40 is provided at a position adjacent to the cutting units 38a and 38b, respectively, for photographing the workpiece 11 held by the chuck table 14. The image acquired by the photographing unit 40 is used, for example, for aligning the workpiece 11 held by the chuck table 14 with the cutting units 38a and 38b.

[0045] When the workpiece 11 is placed on the chuck table 14 via the belt 13 and the frame 15 is fixed by the clamp 16, the negative pressure of the suction source is applied to the holding surface 14a, and the workpiece 11 is sucked and held by the chuck table 14 via the belt 13. Then, the workpiece 11 is cut by the rotating cutting tool 80 while supplying cutting fluid toward the workpiece 11.

[0046] A cleaning unit 42 is disposed on the side of the opening 4b (opposite to the opening 4a). The cleaning unit 42 has a rotating table 44 that holds the workpiece 11 in a cylindrical cleaning space. A rotation drive source (not shown) that rotates the rotating table 44 at a predetermined speed is connected to the lower part of the rotating table 44.

[0047] A nozzle 46 is disposed above the rotary table 44 for spraying a cleaning fluid (e.g., a mixed fluid of water and air) toward the workpiece 11 held by the rotary table 44. The fluid is sprayed toward the workpiece 11 from the nozzle 46 while the rotary table 44 holding the workpiece 11 is rotated, thereby washing the workpiece 11.

[0048] After the workpiece 11 is processed by the cutting units 38a and 38b, the workpiece 11 is transported to the cleaning unit 42 by the holding unit 32 and cleaned. Then, the workpiece 11 is sucked and held by the holding unit 26 and transported to the pair of guide rails 18. After the workpiece 11 is aligned by the pair of guide rails 18, the holding unit 26 holds the frame 15 by the holding mechanism 26a and stores the workpiece 11 in the box 8.

[0049] A main shaft 72 (see FIG. 1 ) mounted on the cutting unit 38a is provided on the back side (rear side) of the second support structure 34. Figure 2 ) and the cutting tool 80 mounted on the spindle 72 of the cutting unit 38b. The tool replacement device 50 has a pair of tool holders 52a and 52b for holding and storing a plurality of cutting tools 80. The tool holders 52a and 52b are arranged to face each other along the Y-axis direction.

[0050] The tool holder 52a has a cylindrical support shaft 54a arranged along the Y-axis direction and a disc-shaped holding portion 56a fixed to the front end of the support shaft 54a. In addition, the tool holder 52b has a cylindrical support shaft 54b arranged along the Y-axis direction and a disc-shaped holding portion 56b fixed to the front end of the support shaft 54b. The support shafts 54a and 54b are respectively connected to a rotation drive source (not shown) such as a motor, and rotate around a rotation axis substantially parallel to the Y-axis direction.

[0051] A plurality of cutting tools 80 are held on the front side of the holding portion 56a (tool holder 52b side) and the front side of the holding portion 56b (tool holder 52a side). Figure 1 2 shows an example in which six cutting tools 80 are held at substantially equal intervals on the holding parts 56a and 56b respectively along the circumferential direction of the holding parts 56a and 56b. The cutting tools 80 held by the holding part 56a and the cutting tools 80 held by the holding part 56b are opposed to each other.

[0052] A plate-shaped base 58 is provided in the region between the tool holders 52a and 52b. The base 58 is fixed to, for example, a fixing member (not shown) provided behind the second support structure 34. The base 58 is arranged substantially parallel to the horizontal direction (XY plane direction), and a moving mechanism 60 is fixed to the lower surface side of the base 58.

[0053] The moving mechanism 60 has a ball screw 62 fixed to the lower surface side of the base 58 along the X-axis direction. In addition, a rectangular parallelepiped moving member 64 is screwed to the ball screw 62, and a support member 66 formed in a U-shaped side view is fixed to the lower surface side of the moving member 64. The support member 66 is used to perform cutting tool 80 and nut 86 (see Figure 2 ) is supported by a loading and unloading unit (loading and unloading mechanism) 68 for loading and unloading.

[0054] A pulse motor (not shown) is connected to the end of the ball screw 62. When the pulse motor rotates the ball screw 62, the detachable unit 68 supported by the support member 66 moves in the X-axis direction along the ball screw 62. Thus, the position of the detachable unit 68 in the X-axis direction is controlled.

[0055] Figure 3 : is a perspective view showing the loading and unloading unit 68. The supporting member 66 supporting the loading and unloading unit 68 includes: a plate-shaped upper wall portion 66a fixed to the lower surface side of the moving member 64 along the horizontal direction; a columnar side wall portion 66b protruding downward from the rear end of the upper wall portion 66a; and a plate-shaped supporting portion 66c protruding forward from the lower end of the side wall portion 66b and arranged substantially parallel to the upper wall portion 66a. The loading and unloading unit 68 is supported by the supporting portion 66c of the supporting member 66.

[0056] The detaching unit 68 includes a nut detaching unit 100 for attaching and detaching a nut 86 (see FIG. 1 ) for fixing the cutting tool 80 to the spindle 72. Figure 2 and a tool handling unit 140, which performs the installation of the cutting tool 80 to the spindle 72 and the removal of the cutting tool 80 from the spindle 72. The nut handling unit 100 and the tool handling unit 140 are fixed to the support portion 66c of the support member 66, respectively.

[0057] The nut attaching and detaching unit 100 includes a motor 102 constituting a rotational drive source and a power transmission unit (power transmission mechanism) 104 connected to the motor 102. The motor 102 and the power transmission unit 104 are arranged adjacent to each other along the X-axis direction.

[0058] The motor 102 has a hollow cubic housing 102a that houses components such as a rotor and a stator, and a rotating shaft (output shaft) 102b (see Figure 4 ), which is connected to the rotor and arranged along the Z-axis direction. The upper end of the rotating shaft 102b is exposed from the upper surface of the housing 102a, and a disk-shaped pulley member (pulley part) 102c is fixed to the upper end. When power is supplied to the motor 102, the rotating shaft 102b and the pulley member 102c rotate around a rotating axis substantially parallel to the Z-axis direction.

[0059] The power transmission unit 104 includes a housing 104a formed in a hollow cubic shape and a rotating shaft 104b housed in the housing 104a and arranged along the Z-axis direction. The upper end of the rotating shaft 104b is exposed from the upper surface of the housing 104a, and a disk-shaped pulley member (pulley portion) 104c is fixed to the upper end.

[0060] In addition, a through hole 104d is formed on the housing 104a, which passes through the housing 104a left and right (in the Y-axis direction). The rotating shaft 106 is inserted into the through hole 104d in a manner that penetrates the housing 104a, and both ends of the rotating shaft 106 are exposed from both side surfaces of the housing 104a. Figure 3 , an example is shown in which the rotating shaft portion 106 is composed of a single cylindrical shaft.

[0061] The rotating shaft portion 106 is held rotatably about a rotating axis substantially parallel to the Y-axis direction, and is connected to the rotating shaft 104b inside the housing 104a. The details of the connection mechanism between the rotating shaft 104b and the rotating shaft portion 106 will be described later.

[0062] The motor 102 and the power transmission unit 104 are connected by an annular connection member 108 composed of a belt, a chain, etc. The connection member 108 is wound in an oblong shape in plan view so as to contact the side surface of the pulley member 102c of the motor 102 and the side surface of the pulley member 104c of the power transmission unit 104. The pulley member 102c, the pulley member 104c and the connection member 108 constitute a pulley mechanism.

[0063] When electric power is supplied to the motor 102, the rotating shaft 102b of the motor 102 rotates. Furthermore, the rotating power of the motor 102 is transmitted to the rotating shaft 104b via the pulley member 102c, the connecting member 108 and the pulley member 104c, and the rotating shaft 104b rotates around the rotating shaft substantially parallel to the Z-axis direction. Furthermore, the rotating power of the rotating shaft 104b is transmitted to the rotating shaft portion 106, and the rotating shaft portion 106 rotates around the rotating shaft substantially parallel to the Y-axis direction. In this way, the power of the motor 102 is transmitted to the rotating shaft portion 106 through the power transmission unit 104.

[0064] A nut 86 (see FIG. 1 ) that holds the spindle 72 for fixing the cutting tool 80 to the cutting unit 38 a is fixed to one end of the rotating shaft portion 106 . Figure 2 ) and rotates. In addition, a nut rotating portion (nut rotating unit) 110a is fixed to the other end side of the rotating shaft portion 106, and a nut rotating portion (nut rotating unit) 110b is fixed to the other end side of the rotating shaft portion 106, which rotates while holding a nut 86 for fixing the cutting tool 80 to the spindle 72 of the cutting unit 38b.

[0065] When the rotating shaft 106 rotates, the nut rotating parts 110a and 110b rotate together with the rotating shaft 106 about the rotating axis substantially parallel to the Y-axis direction. In addition, the rotating axes of the nut rotating parts 110a and 110b are set on the same straight line along the longitudinal direction of the rotating shaft 106.

[0066] The nut rotating parts 110a and 110b each have a cylindrical rotating member 112 fixed to the front end of the rotating shaft part 106. The rotating member 112 is urged toward the side opposite to the power transmission unit 104 by a spring or the like, and is configured to be movable along the Y-axis direction by applying an external force. In addition, the rotating member 112 has a front side 112a located on the side opposite to the power transmission unit 104.

[0067] The rotating member 112 is provided with four retaining pins 114 protruding from the front surface 112a. The retaining pins 114 and the nuts 86 (see Figure 2 ) is formed corresponding to the position and size of the through hole 86b, and can be inserted into the through hole 86b. In addition, the number of retaining pins 114 is appropriately set according to the number of through holes 86b.

[0068] In addition, a plurality of holding members 116 for holding the nut 86 are arranged at approximately equal intervals around the rotating member 112 along the circumferential direction of the rotating member 112. The holding members 116 are each formed in a columnar shape, and the base end portion (one end side) of the holding member 116 is fixed to the outer peripheral surface of the rotating member 112. Figure 3 2 shows an example in which four holding members 116 are provided to hold the outer peripheral surface of the nut 86 from four sides.

[0069] The front end (the other end side) of the holding member 116 protrudes from the front face 112a of the rotating member 112, and a claw portion 116a is formed at the front end and is bent toward the center side of the rotating member 112. In addition, the holding member 116 is biased toward the radially outer side of the rotating member 112 by a spring or the like, so that the claw portion 116a can move along the radial direction of the rotating member 112.

[0070] In addition, a cover 118 formed in a hollow cylindrical shape is provided around the rotating member 112. The base end side (power transmission unit 104 side) of the rotating member 112 and the holding member 116 is accommodated inside the cover 118. When the rotating member 112 is pressed toward the inside of the cover 118, the spring or the like that urges the rotating member 112 contracts, and the rotating member 112 is pushed into the inside of the cover 118 together with the plurality of holding members 116.

[0071] In addition, when the rotating member 112 is pressed and pushed into the inner side of the cover 118, the front end side (claw 116a side) of the plurality of holding members 116 contacts the inner wall of the cover 118 and is pressed, and the spring or the like that applies force to the holding members 116 contracts. As a result, the front end sides of the plurality of holding members 116 move toward the inner side in the radial direction of the rotating member 112. And, the plurality of holding members 116 are arranged so that their length direction is along the inner wall of the cover 118 (closed state). At this time, the claw 116a of the holding member 116 is arranged, for example, at a position closer to the inner side in the radial direction of the rotating member 112 than the outer peripheral edge of the rotating member 112.

[0072] On the other hand, when the pressure on the rotating member 112 is released, the rotating member 112 moves toward the outside of the cover 118, and the state in which the front end side of the holding member 116 is pressed by the inner wall of the cover 118 is released. As a result, the front end sides of the plurality of holding members 116 move toward the radially outer side of the rotating member 112. And, the front end sides of the plurality of holding members 116 are arranged at a position closer to the radially outer side of the rotating member 112 than in the closed state (open state). At this time, the claw portion 116a of the holding member 116 is arranged, for example, at a position closer to the radially outer side of the rotating member 112 than the outer peripheral edge of the rotating member 112.

[0073] The nut rotating parts 110a and 110b rotate while holding the nut 86. Specifically, first, the holding pin 114 of the rotating member 112 is inserted into the through hole 86b of the nut 86 (see Figure 2 ) is used to make the nut 86 contact the front surface 112a of the rotating member 112. When the rotating member 112 is pushed into the inner side of the cover 118 in this state, the plurality of holding members 116 are closed, and the claws 116a contact the outer peripheral surface of the nut 86, thereby holding the nut 86.

[0074] When the motor 102 is driven while the nut 86 is held by the plurality of gripping members 116, the power of the motor 102 is transmitted to the rotating shaft 106 via the power transmission unit 104, and the rotating shaft 106 rotates. As a result, the rotating member 112 included in the nut rotating parts 110a and 110b rotates, and the nut 86 held by the gripping members 116 also rotates.

[0075] The nut 86 is held and rotated by the nut rotating parts 110a and 110b, so that the nut 86 can be automatically tightened and removed when the cutting tool 80 mounted on the cutting unit 38a and 38b is replaced. In addition, the specific operation of the nut mounting and dismounting unit 100 when the cutting tool 80 is replaced will be described later.

[0076] As described above, the power of the motor 102 is transmitted to the rotating shaft portion 106 through the power transmission unit 104. More specifically, the power transmission unit 104 has a mechanism for rotating the rotating shaft portion 106 by the power of the rotation of the rotating shaft 104b. Figure 4 is a perspective view showing the power transmission unit 104, Figure 5 1 is a perspective view showing the interior of the power transmission unit 104. Figure 5 In the figure, the housing 104a of the power transmission unit 104 is omitted.

[0077] like Figure 4 and Figure 5 As shown, the power transmission unit 104 includes an annular first bearing 120 and an annular second bearing 122 that support the rotating shaft portion 106 inside the housing 104a. The first bearing 120 is fixed to surround the rotating shaft portion 106 on the nut rotating portion 110a side. In addition, the second bearing 122 is fixed to surround the rotating shaft portion 106 on the nut rotating portion 110b side.

[0078] In addition, the power transmission unit 104 has a rotating shaft 104b (see Figure 3 ) into the rotational power of the rotating shaft portion 106. The gear unit 124 is composed of, for example, a first gear 126 fixed to the rotating shaft 104b and a second gear 128 fixed to the rotating shaft portion 106, and transmits power between mutually intersecting axes.

[0079] The first gear 126 is disposed on the rotating shaft 104b (see Figure 3 ) is connected along the Z-axis direction and rotates around a rotation axis substantially parallel to the Z-axis direction. A tooth portion 126a that meshes with the second gear 128 is formed at the lower end of the first gear 126.

[0080] The second gear 128 is formed in an annular shape and fixed between the first bearing 120 and the second bearing 122 so as to surround the rotating shaft portion 106. A tooth portion 128a that meshes with the tooth portion 126a of the first gear 126 is formed on the surface side of the second gear 128 that faces the second bearing 122. In addition, the surface of the second gear 128 that faces the first bearing 120 constitutes a support surface 128b that supports the first bearing 120.

[0081] The first gear 126 and the second gear 128 are configured so that the tooth portion 126a and the tooth portion 128a mesh with each other. In addition, the tooth portion 126a and the tooth portion 128a are configured so that when the first gear 126 with the rotation axis rotating along the Z-axis direction rotates, the second gear 128 with the rotation axis rotating along the Y-axis direction rotates. For example, the first gear 126 and the second gear 128 are composed of bevel gears (arc bevel gears, spur bevel gears, etc.) or hypoid gears.

[0082] In addition, a cover portion 130 having a rectangular shape in side view is provided on the nut rotating portion 110b side of the second bearing 122. A portion of the cover portion 130 is inserted into the interior of the housing 104a (see Figure 4 ), covers the side surface of the housing 104a that is opposite to the nut rotating portion 110b. In addition, the surface of the cover portion 130 that is opposite to the second bearing 122 constitutes a support surface 130a that supports the second bearing 122.

[0083] When the motor 102 (refer to Figure 3 ) rotates the rotating shaft 104b of the power transmission unit 104, the first gear 126 rotates, and the second gear 128 meshing with the first gear 126 rotates around the rotating shaft substantially parallel to the Y-axis direction. As a result, the rotating shaft portion 106 to which the second gear 128 is fixed rotates together with the nut rotating portions 110a and 110b. In this way, the power of the rotation of the rotating shaft 104b is transmitted to the rotating shaft portion 106 through the gear unit 124.

[0084] In addition, when the number of teeth of the second gear 128 is made larger than the number of teeth of the first gear 126, the power of the motor 102 is transmitted to the rotating shaft portion 106 in such a manner that the rotation speed of the rotating shaft portion 106 is lower than the rotation speed of the motor 102 (the rotation speeds of the rotating shaft 102b and the rotating shaft 104b). That is, the power transmission unit 104 functions as a speed reducer. In this case, the torque of the nut rotating portions 110a and 110b can also be made larger than the torque of the motor 102.

[0085] In addition, if Figure 3As shown, a tool attachment unit 140 is provided behind the nut attachment unit 100. The tool attachment unit 140 includes a motor 142 and a power transmission unit (power transmission mechanism) 144 connected to the motor 142. The motor 102 and the power transmission unit 104 are arranged adjacent to each other along the X-axis direction.

[0086] The motor 142 has a hollow cubic housing 142a and a rotating shaft (not shown). The upper end of the rotating shaft is exposed from the upper surface of the housing 142a, and a disk-shaped pulley member (pulley part) 142b is fixed to the upper end. When power is supplied to the motor 142, the rotating shaft of the motor 142 and the pulley member 142b rotate around the rotating shaft roughly parallel to the Z-axis direction. In addition, the motor 142 can be configured similarly to the motor 102 of the nut mounting and disassembly unit 100, for example.

[0087] The power transmission unit 144 includes a housing 144a formed in a hollow cubic shape and a rotating shaft 144b housed in the housing 144a and arranged along the Z-axis direction. The upper end of the rotating shaft 144b is exposed from the upper surface of the housing 144a, and a disk-shaped pulley member (pulley portion) 144c is fixed to the upper end.

[0088] In addition, a through hole 144d is formed on the housing 144a, which passes through the housing 144a left and right (in the Y-axis direction). The rotating shaft portion 146 is inserted into the through hole 144d in a manner that penetrates the housing 144a, and both ends of the rotating shaft portion 146 are exposed from the two side surfaces of the housing 144a. In addition, the power transmission unit 144 and the rotating shaft portion 146 can be respectively configured similarly to the power transmission unit 104 and the rotating shaft portion 106 of the nut mounting and disassembly unit 100, for example.

[0089] The motor 142 and the power transmission unit 144 are connected by an annular connection member 148 composed of a belt, a chain, etc. The connection method of the motor 142 and the power transmission unit 144 is the same as the connection method of the motor 102 and the power transmission unit 104 in the nut attachment and detachment unit 100.

[0090] The cutting tool 80 is fixed to one end of the rotating shaft 146 to mount the cutting tool 80 on the cutting unit 38a (see Figure 1 ) and a tool holding unit 150a for removing the cutting tool 80 from the cutting unit 38a. In addition, a tool holding unit 150a for mounting the cutting tool 80 on the cutting unit 38b (see Figure 1 ) and a tool holding unit 150b for removing the cutting tool 80 from the cutting unit 38b.

[0091] The tool holding units 150a and 150b respectively include a plate-like support member 152 formed into an oblong shape in side view, and tool holding units 154a and 154b fixed to the surface side of the support member 152 located on the side opposite to the power transmission unit 144. The tool holding unit 154a is fixed to one end side of the support member 152, and the tool holding unit 154b is fixed to the other end side of the support member 152.

[0092] The tool holding units 154a and 154b each have a cylindrical base 156 fixed to the support member 152. The base 156 has a front surface 156a located on the opposite side of the power transmission unit 144. In addition, a positioning pin 158 protruding from the front surface 156a is provided on the base 156. The front end of the positioning pin 158 is connected to the mounting seat 74 (see Figure 2 ) is formed so as to correspond to the position and size of the recessed portion 78b of the support shaft 78 and can be inserted into the recessed portion 78b.

[0093] Around the base 156, gripping portions 82b for the cutting tool 80 are arranged at substantially equal intervals along the circumferential direction of the base 156 (see Figure 2 ) for holding the base 156. The holding members 160 are each formed in a columnar shape, and the base end portion (one end side) of the holding member 160 is fixed to the outer peripheral surface of the base 156.

[0094] exist Figure 3 1 shows an example of four holding members 160 for holding the outer peripheral surface of the holding portion 82b of the cutting tool 80 from four sides. The front end (the other end side) of the holding member 160 protrudes from the front surface 156a of the base 156, and a claw portion 160a bent toward the center side of the base 156 is formed at the front end.

[0095] The front end side of the gripping member 160 is moved along the radial direction of the base 156 by, for example, a moving mechanism (not shown) housed inside the base 156. The moving mechanism is used to move the claw portion 160a and the gripping portion 82b of the cutting tool 80 (see Figure 2 ) in contact with the outer peripheral surface of the base 156 to hold the cutting tool 80 (closed state) and in a state (open state) in which the claw portion 160a is arranged at a position radially outside the base 156 than in the closed state to release the grip of the cutting tool 80.

[0096] The tool holding unit 150a is used to hold the cutting tool 80 and the tool holder 52a (see Figure 1 ) holds and holds the replacement cutting tool 80 held by the cutting unit 38b. In addition, the tool holding unit 150b holds and holds the cutting tool 80 and the tool holder 52b (see Figure 1) is used to hold and retain the replacement cutting tool 80.

[0097] When the cutting tool 80 mounted on the cutting units 38a and 38b is replaced, the cutting tool 80 is attached and detached by the tool holding units 150a and 150b. The specific operation of the tool holding units 150a and 150b when replacing the cutting tool 80 will be described later.

[0098] In addition, if Figure 1 As shown, the cutting device 2 has a control unit (control unit) 90 that controls the actions of the components constituting the cutting device 2. The components of the cutting device 2 (moving mechanism 10, chuck table 14, moving mechanism 24, holding unit 26, moving mechanism 30, holding unit 32, moving mechanisms 36a, 36b, cutting units 38a, 38b, imaging unit 40, cleaning unit 42, tool changing device 50, etc.) are respectively connected to the control unit 90, and their actions are controlled by the control unit 90.

[0099] For example, the control unit 90 is constituted by a computer including a processing device such as a CPU and a storage device such as a flash memory. The control unit 90 controls each component by operating the processing device according to the software stored in the storage device.

[0100] By using the tool replacement device 50 provided in the cutting device 2, the cutting tool 80 mounted on the cutting units 38a and 38b can be automatically replaced. Figure 1 and Figure 3 A specific example of the operation of the tool replacement device 50 when replacing the cutting tool 80 will be described below. In addition, as an example, the operation when replacing the cutting tool 80 attached to the cutting unit 38a will be described below.

[0101] First, the attachment and detachment unit 68 is moved by the moving mechanism 60, so that the tool holding unit 150a (see Figure 3 ) has a tool holding unit 154b and a cutting tool 80 (replaceable cutting tool 80) held by the tool holder 52a. In addition, the support shaft 54a of the tool holder 52a is rotated together with the holding portion 56a, so that the cutting tool 80 facing the tool holding unit 154b can be changed.

[0102] Then, for example, the tool holder 52a is moved in the Y-axis direction by a moving mechanism (not shown) connected to the tool holder 52a, so that the tool holding unit 154b is brought close to the cutting tool 80. At this time, the plurality of holding members 160 of the tool holding unit 154b are in an open state.

[0103] Then, the plurality of gripping members 160 are closed while the replacement cutting tool 80 is disposed inside the plurality of gripping members 160. Thus, the cutting tool 80 held by the tool holder 52a is gripped by the tool gripping unit 154b. Then, for example, the tool holder 52a is moved in the Y-axis direction to move away from the tool holder 52a and the tool gripping unit 154b.

[0104] Next, the detachable unit 68 is moved along the Y-axis direction by the moving mechanism 60, and the detachable unit 68 is arranged at a position facing the cutting unit 38a via the lower side of the first support structure 20 and the second support structure 34. Figure 1 In the figure, for the sake of convenience of explanation, the loading and unloading unit 68 is shown on the upper rear side of the first supporting structure 20 and the second supporting structure 34, but in fact the loading and unloading unit 68 is arranged at the same height as the cutting units 38a and 38b and can pass under the first supporting structure 20 and the second supporting structure 34.

[0105] The detachable unit 68 first rotates the nut rotating portion 110a (see Figure 3 ) is positioned to face the cutting tool 80 mounted on the cutting unit 38a. In addition, the positional relationship between the nut rotating portion 110a and the cutting unit 38a is adjusted by the moving mechanism 36a and the moving mechanism 60.

[0106] Then, the cutting unit 38a is moved toward the nut rotating portion 110a by the moving mechanism 36a. Thus, the nut 86 (see FIG. 1 ) that fixes the cutting tool 80 mounted on the cutting unit 38a is moved. Figure 2 ) is pressed against the rotating member 112 (see Figure 3 At this time, the plurality of retaining pins 114 of the nut rotating portion 110a are inserted into the through holes 86b of the nut 86 (see Figure 2 ).

[0107] When the rotating member 112 is pressed by the nut 86, the rotating member 112 is pushed into the inner side of the cover 118, and the plurality of holding members 116 (see Figure 3 ) is in a closed state. Thus, the nut 86 is gripped by the claws 116a of the plurality of gripping members 116.

[0108] Next, the motor 102 (see Figure 3 ) is used to rotate the rotating shaft 106, thereby causing the nut rotating portion 110a to move in the first direction (for example Figure 3 As a result, the nut 86 held by the nut rotating portion 110a rotates and loosens, and is released from the mounting seat 74 (see Figure 2 )'s supporting shaft 78 is removed.

[0109] Then, the cutting unit 38a is moved in the Y-axis direction to move the nut rotating portion 110a away from the cutting unit 38a. In addition, the nut rotating portion 110a is configured to maintain the state in which the rotating member 112 is pushed into the inner side of the cover 118, and the nut 86 is also held by the nut rotating portion 110a after being removed from the support shaft 78.

[0110] Next, the attachment and detachment unit 68 is moved by the moving mechanism 60, so that the tool holding unit 150a (see Figure 3 ) is opposed to the cutting tool 80 mounted on the cutting unit 38a. And, the cutting unit 38a is moved toward the tool holding unit 154a by the moving mechanism 36a, so that the cutting tool 80 is close to the tool holding unit 154a.

[0111] At this time, the plurality of gripping members 160 of the tool gripping unit 154a are in an open state. In addition, the positioning pin 158 of the tool gripping unit 154a is inserted into the position formed on the mounting seat 74 (see Figure 2 ) of the support shaft 78. Thus, the tool holding unit 154a and the cutting tool 80 are aligned.

[0112] Then, the plurality of gripping members 160 are closed while the cutting tool 80 is disposed inside the plurality of gripping members 160. Thus, the gripping portion 82b (see FIG. 1 ) of the cutting tool 80 mounted on the cutting unit 38a is closed. Figure 2 ) is gripped by the claws 160a of the plurality of gripping members 160. In this state, the cutting unit 38a is moved along the Y-axis direction to move the tool gripping unit 154a away from the cutting unit 38a. Thus, the cutting tool 80 is removed from the cutting unit 38a.

[0113] Next, the motor 142 (see Figure 3 ) is used to rotate the rotating shaft 146 by 180°. As a result, the support member 152 is rotated, and the position of the tool holding unit 154a and the position of the tool holding unit 154b are switched. As a result, the tool holding unit 154b that holds the replacement cutting tool 80 is arranged at a position opposite to the cutting unit 38a.

[0114] Then, the cutting unit 38a is moved toward the tool holding unit 154b by the moving mechanism 36a, so that the cutting unit 38a and the tool holding unit 154b are close to each other. Thus, the support shaft 78 of the mounting seat 74 is inserted into the opening 82a (refer to the opening 82a of the replacement cutting tool 80 held by the tool holding unit 154b) Figure 2 ).

[0115] In this state, the plurality of gripping members 160 of the tool gripping unit 154b are opened, thereby attaching the replacement cutting tool 80 to the front end of the spindle 72. The cutting unit 38a is moved in the Y-axis direction to separate the tool gripping unit 154b from the cutting unit 38a.

[0116] Next, the attachment and detachment unit 68 is moved by the moving mechanism 60, and the nut 86 (see Figure 2 ) of the nut rotating portion 110a (refer to Figure 3 ) is positioned to face the replacement cutting tool 80 mounted on the cutting unit 38a. Then, the cutting unit 38a is moved toward the nut rotating portion 110a by the moving mechanism 36a. Thus, the nut 86 held by the nut rotating portion 110a is positioned on the mounting seat 74 (refer to Figure 2 ) at the front end of the support shaft 78.

[0117] In this state, the motor 102 (see Figure 3 ) causes the rotating shaft portion 106 to rotate, thereby causing the nut rotating portion 110a to rotate in a second direction (eg, Figure 3 As a result, the nut 86 rotates and engages with the mounting seat 74 (see Figure 2 ) is tightened to the threaded portion 78a of the support shaft 78. As a result, the replacement cutting tool 80 is clamped by the protrusion 76b of the mounting seat 74 and the nut 86 and fixed to the cutting unit 38a.

[0118] In addition, as described above, when the gear unit 124 is composed of the first gear 126 and the second gear 128 (see Figure 4 , Figure 5 ) and the number of teeth of the second gear 128 is greater than the number of teeth of the first gear 126, a speed reducer is formed. When the power transmission unit 104 having the gear unit 124 is used, the torque of the nut rotating part 110a can be increased. Thus, when the nut rotating part 110a is rotated to rotate the nut 86 (see Figure 2 ) is threadedly engaged with the threaded portion 78a of the mounting seat 74, the nut 86 can be securely fastened.

[0119] Then, the cutting unit 38a is moved in the Y-axis direction to move the nut rotating portion 110a away from the cutting unit 38a. At this time, the rotating member 112 moves toward the outside of the cover 118, and the plurality of gripping members 116 are opened. Thus, the gripping of the nut 86 by the plurality of gripping members 116 is released.

[0120] Next, the loading and unloading unit 68 is moved backward by the moving mechanism 60 and is placed in the initial position (between the tool holders 52a and 52b). The tool holder 52a holds the used cutting tool 80 held by the tool holding unit 154a. In this way, the cutting tool 80 is replaced by the tool replacement device 50.

[0121] In addition, in the above description, an example of replacing the cutting tool 80 mounted on the cutting unit 38a is described, and the replacement of the cutting tool 80 mounted on the cutting unit 38b is also implemented in the same manner. In this case, the cutting tool 80 mounted on the cutting unit 38b and the replacement cutting tool 80 stored in the tool holder 52b are replaced by the tool holding unit 150b. In addition, the nut 86 for fixing the cutting tool 80 to the cutting unit 38b is attached and detached by the nut rotating part 110b.

[0122] When the cutting tool 80 installed on the cutting unit 38b is replaced, the actions of the cutting unit 38b, the nut rotating part 110b, and the tool holding unit 150b are respectively the same as the actions of the cutting unit 38a, the nut rotating part 110a, and the tool holding unit 150a when the cutting tool 80 installed on the cutting unit 38a is replaced.

[0123] As described above, the cutting device 2 of the present embodiment has the tool replacement device 50 for replacing the cutting tool 80. In addition, the tool replacement device 50 has: the motor 102; the rotating shaft portion 106, which has the nut rotating portion 110a fixed at one end side and the nut rotating portion 110b fixed at the other end side; and the power transmission unit 104, which transmits the power of the motor 102 to the rotating shaft portion 106.

[0124] The tool changing device 50 can transmit the power of the motor 102 to the nut rotating parts 110a and 110b via the power transmission unit 104 and the rotating shaft 106. That is, the two nut rotating parts 110a and 110b can be driven by one motor 102. Thus, it is not necessary to separately provide motors for the nut rotating parts 110a and 110b, and the tool changing device 50 can be miniaturized, lightweighted, or reduced in cost.

[0125] In addition, the structure of the tool replacement device 50 of the present embodiment can be appropriately changed within the range in which the cutting tool 80 can be replaced. For example, the tool replacement device 50 may also have a moving mechanism that moves the loading and unloading unit 68 along the Y-axis direction, a moving mechanism that moves the loading and unloading unit 68 along the Z-axis direction, etc. In this case, these moving mechanisms can be used to control the position of the loading and unloading unit 68 when the cutting tool 80 is replaced.

[0126] In addition, in the present embodiment, an example in which the tool changing device 50 is disposed at the rear of the second support structure 34 is described, but there is no limitation on the configuration of the tool changing device 50. For example, the tool holders 52a, 52b and the loading and unloading unit 68 may be disposed at the front or side of the first support structure 20, respectively. In addition, there is no limitation on the mechanism for controlling the movement of the loading and unloading unit 68, and for example, the movement of the loading and unloading unit 68 may be controlled by a robot arm connected to the loading and unloading unit 68.

[0127] The tool racks 52a and 52b are not limited in structure as long as they can accommodate a plurality of cutting tools 80. For example, the tool racks 52a and 52b may have a moving mechanism for accommodating a plurality of cutting tools 80 and positioning a cutting tool 80 selected for replacement at a position where it can be mounted on the loading and unloading unit 68.

[0128] In addition, in this embodiment, the rotation shaft portion 106 (see Figure 3 Although the example of the rotating shaft portion 106 being composed of one shaft is described above, the rotating shaft portion 106 may be composed of a first rotating shaft (first shaft) having the nut rotating portion 110a fixed at the front end thereof and a second rotating shaft (second shaft) having the nut rotating portion 110b fixed at the front end thereof. In this case, a first gear 126 (see Figure 5 ) is meshed with the second gear 128. In addition, the first rotation axis and the second rotation axis are set on the same straight line, for example.

[0129] In addition, the structure, method, etc. of the above-mentioned embodiment can be carried out with appropriate changes as long as it does not depart from the scope of the purpose of the present invention.

Claims

1. A cutting device, comprising: A chuck table, which holds the workpiece; a first cutting unit and a second cutting unit, each having a spindle, and cutting the workpiece held by the chuck table using a cutting tool mounted on the spindle; and a tool replacement device for replacing the cutting tool mounted on the spindle of the first cutting unit with the cutting tool mounted on the spindle of the second cutting unit, It is characterized in that The tool changing device has: a nut handling unit for tightening and removing a nut for fixing the cutting tool to the spindle; and a tool handling unit for mounting the cutting tool on the spindle and removing the cutting tool from the spindle, The nut handling unit has: Rotating shaft; a first nut rotating portion, which is fixed to one end side of the rotating shaft portion and rotates while holding the nut for fixing the cutting tool to the spindle of the first cutting unit; a second nut rotating portion, which is fixed to the other end side of the rotating shaft portion and rotates while holding the nut for fixing the cutting tool to the spindle of the second cutting unit; an electric motor having an output shaft; and A power transmission unit having a rotating shaft, which is connected to the output shaft of the motor and the rotating shaft portion of the nut loading and unloading unit, and transmits the power of the motor to the rotating shaft portion to rotate the rotating shaft portion, wherein each of the rotating shaft and the output shaft has a longitudinal axis that intersects the rotation axis of the rotating shaft portion, the first nut rotating portion and the second nut rotating portion.

2. The cutting device according to claim 1, characterized in that: The rotation axis of the first nut rotating portion and the rotation axis of the second nut rotating portion are set on the same straight line along the longitudinal direction of the rotating shaft portion.

3. The cutting device according to claim 1 or 2, characterized in that: The power transmission unit is a speed reducer that transmits the power so that the rotation speed of the rotating shaft portion is lower than the rotation speed of the motor and makes the torque of the first nut rotating portion and the second nut rotating portion larger than the torque of the motor.

4. The cutting device according to claim 3, characterized in that: The speed reducer has a bevel gear or a hypoid gear.

Images