Vacuum chamber and hatch structure

Abstract

The present invention discloses a hatch structure, which includes a sampling hole provided on a top cover and a hatch covering the outside of the sampling hole. A protrusion is provided on the hatch. When the hatch covers the sampling hole, the protrusion extends inward into the sampling hole. The distance between the inner side surface of the protrusion and the inner side surface of the top cover is smaller than the thickness of a sampling target plate. In the hatch structure of the present invention, by setting the distance between the inner side surface of the protrusion and the inner side surface of the top cover to be smaller than the thickness of the sampling target plate, thus, when the sampling target plate is not correctly installed, interference will occur between the inner side surface of the protrusion and the sampling target plate, resulting in the hatch being unable to be normally closed. That is to say, the hatch structure of the present invention can detect whether the sampling target plate is correctly installed in the target plate groove; in addition, when there is a slight error in the installation position of the sampling target plate, during the closing process of the hatch, the protrusion can press on the sampling target plate, straighten the sampling target plate, and make it correctly installed in the target plate groove, and can also play a role in correcting the deviation.

Description

Technical Field

[0001] The present invention relates to a vacuum chamber, specifically to a vacuum chamber and hatch structure. Background Art

[0002] The hatch structure of the existing vacuum chamber generally includes a sample loading hole provided on the top cover and a hatch covering the outside of the sample loading hole. A sealing structure such as a sealing ring is provided between the hatch and the sample loading hole. During use, the target plate tray is moved to the inside of the sample loading hole. After opening the hatch, the target plate is placed in the target plate groove of the target plate tray, and then the hatch is closed and the vacuum is pumped.

[0003] Although the hatch structure of the existing vacuum chamber can meet the use requirements to a certain extent, there are still the following deficiencies:

[0004] 1. It is impossible to detect whether the sample is correctly placed in the target plate groove, and when the target plate is not correctly installed in the target plate groove, the hatch structure can still be smoothly closed;

[0005] 2. A vacuum pumping space is formed among the target plate tray, the sample loading hole and the hatch, and the volume of this vacuum pumping space is relatively large, reducing the vacuum pumping efficiency. Summary of the Invention

[0006] In view of this, the purpose of the present invention is to provide a vacuum chamber and hatch structure that can be used to detect whether the sample loading target plate is correctly installed in the target plate groove.

[0007] To achieve the above purpose, the present invention provides the following technical solutions:

[0008] A hatch structure includes a sample loading hole provided on the top cover and a hatch covering the outside of the sample loading hole. There is a protrusion on the hatch. When the hatch covers the sample loading hole, the protrusion extends inward into the sample loading hole, and the distance between the inner side surface of the protrusion and the inner side surface of the top cover is less than the thickness of the sample loading target plate.

[0009] Further, a handle mechanism is provided on the outside of the hatch. The handle mechanism includes a handle. A limit installation mechanism is provided between the handle and the hatch. The limit installation mechanism is used to limit the maximum distance between the handle and the hatch and enable the hatch to move relative to the handle within the range of this maximum distance.

[0010] Further, at least one compression spring that applies an inward pressure to the hatch is provided between the handle and the hatch.

[0011] Further, a first compression spring groove and a second compression spring groove are respectively provided corresponding to each other between the handle and the hatch, and both ends of the compression spring are respectively installed in the first compression spring groove and the second compression spring groove.

[0012] Further, the limiting and mounting mechanism includes a connecting block fixedly mounted on the outer side surface of the hatch door, and limiting pins are respectively provided at both ends of the connecting block; an installation groove covering the connecting block is provided on the inner side surface of the handle, and limiting holes corresponding to the limiting pins are respectively provided on both side walls of the installation groove; a limiting section extending into the corresponding limiting hole is provided on the limiting pin, and the length of the limiting hole in the direction perpendicular to the outer side surface of the hatch door is greater than the outer diameter of the limiting section, and the limiting section can slide along the limiting hole in the direction perpendicular to the outer side surface of the hatch door.

[0013] Further, the length of the limiting hole in the direction parallel to the outer side surface of the hatch door and perpendicular to the axis of the limiting pin is greater than the outer diameter of the limiting section, and the limiting section can slide along the limiting hole in the direction parallel to the outer side surface of the hatch door and perpendicular to the axis of the limiting pin.

[0014] Further, pin holes are respectively provided at both ends of the connecting block, the limiting pins are installed in the corresponding pin holes, and a jacking spring for jacking the corresponding limiting pin towards the corresponding limiting hole is provided in the pin hole.

[0015] Further, a limiting fit is provided between a section of the limiting pin located in the pin hole and the limiting hole.

[0016] Further, the handle mechanism includes a hinge seat fixedly mounted on the top cover, and one end of the handle is hingedly connected to the hinge seat.

[0017] Further, a magnetic attraction structure is provided between the other end of the handle and the top cover, and the magnetic attraction structure includes a magnet and a magnetic force sensor.

[0018] Further, a first spring shaft is provided on the hinge seat, a second spring shaft is provided inside the handle, and a tension spring is provided between the first spring shaft and the second spring shaft; when the hatch door covers the sample addition hole, the hinge connection shaft between the handle and the hinge seat is located outside the first spring shaft.

[0019] Further, the sum of the maximum distance between the handle and the hatch door and the distance between the inner side surface of the protrusion and the inner side surface of the top cover is less than the thickness of the sample addition target plate.

[0020] Further, a flexible pad is provided on the inner side surface of the protrusion, and the distance between the flexible pad and the inner side surface of the top cover is less than the thickness of the sample addition target plate.

[0021] Further, at least one first sealing ring is provided between the hatch door and the top cover.

[0022] The present invention also provides a vacuum chamber, including a top cover, on which the hatch structure as described above is provided.

[0023] Furthermore, it further includes a target plate tray that can run directly below the sample addition hole, and on the target plate tray, there are target plate grooves for installing the sample addition target plate.

[0024] Furthermore, there is at least one second sealing ring provided between the inner side wall of the top cover and the target plate tray.

[0025] The beneficial effects of the present invention are as follows:

[0026] For the hatch structure of the present invention, by setting the distance between the inner side surface of the protrusion and the inner side surface of the top cover to be less than the thickness of the sample addition target plate, thus, when the sample addition target plate is not installed correctly, interference will occur between the inner side surface of the protrusion and the sample addition target plate, resulting in the hatch being unable to be closed normally. That is, the hatch structure of the present invention can detect whether the sample addition target plate is correctly installed in the target plate groove; in addition, when there is a slight error in the installation position of the sample addition target plate, during the closing process of the hatch, the protrusion can press on the sample addition target plate to press the sample addition target plate into the correct position and install it correctly in the target plate groove, and it can also play a role in correcting the deviation.

[0027] By providing a limit installation mechanism between the handle and the hatch, using the limit installation mechanism to limit the maximum distance between the handle and the hatch, thereby controlling the moving distance of the hatch relative to the handle along the direction perpendicular to its outer side surface, to avoid rigid collision between the protrusion provided on the hatch and the sample addition target plate; further, by providing a compression spring between the handle and the hatch, the compression spring applies an inward elastic force to the hatch. On the one hand, it plays a role in applying a pre-pressure to the hatch covering the sample addition hole, and on the other hand, it plays a role of shrinking and giving way when the sample addition target plate is not installed correctly, to avoid rigid collision between the protrusion and the sample addition target plate.

[0028] By further setting the sum of the maximum distance between the handle and the hatch and the distance between the inner side surface of the protrusion and the inner side surface of the top cover to be less than the thickness of the sample addition target plate, when the sample addition target plate is not installed correctly, even if the hatch moves outward relative to the handle and fits with the handle, the hatch still cannot be closed, which can improve the detection reliability.

[0029] By setting the length of the limit hole in the direction parallel to the outer side surface of the hatch and perpendicular to the axis of the limit pin 11 to be greater than the length of the limit section, and enabling the limit section to slide in the direction parallel to the outer side surface of the hatch and perpendicular to the axis of the limit pin, that is, the hatch can move relative to the handle in the direction parallel to its outer side surface. In this way, the protrusion can adjust its position through movement, better enter the sample addition hole, avoid interference between the protrusion and the side wall of the sample addition hole, and make the geometric size of the protrusion closer to the geometric size of the sample addition hole, enabling the protrusion to occupy a larger space in the sample addition hole.

[0030] The hatch structure of the present invention also has the following technical effects:

[0031] 1) By arranging a tension spring between the hinge seat and the handle and making the hinge connecting shaft located outside the tension spring when the hatch is closed, thus, the tension spring applies a torque to drive the hatch to close, keeping the hatch closed; when the hatch is opened, the tension spring can rotate to the outside of the hinge connecting shaft and apply a torque to keep the hatch in the open state to balance the gravity of the hatch and the handle, etc., so that the hatch remains open at a proper position, facilitating operations such as sample addition.

[0032] 2) By arranging a magnetic attraction structure between the handle and the top cover, on the one hand, the magnetic force can enhance the closing pressure of the hatch, and on the other hand, the magnetic force sensor can detect whether the hatch is closed in place;

[0033] 3) By arranging the protrusion, a large amount of space in the sample addition hole can be occupied, and the volume of the evacuated area formed between the target plate tray, the hatch and the sample addition hole is greatly reduced, reducing the difficulty of evacuation and improving the efficiency. Description of the Drawings

[0034] In order to make the purpose, technical solution and beneficial effects of the present invention clearer, the following drawings are provided by the present invention for illustration:

[0035] Figure 1 It is a schematic structural diagram of an embodiment of the vacuum chamber of the present invention;

[0036] Figure 2 It is a schematic structural diagram of the top cover and the hatch structure;

[0037] Figure 3 It is a sectional view of the top cover and the hatch structure;

[0038] Figure 4 It is a schematic structural diagram of the hatch structure;

[0039] Figure 5 For Figure 4 Detail drawing A of

[0040] Figure 6 It is a perspective view of the hatch structure.

[0041] Explanation of the reference numerals:

[0042] 1 - Top cover; 2 - Sampling hole; 3 - Hatch door; 4 - Protrusion; 5 - Sampling target plate; 6 - Handle; 7 - Compression spring; 8 - First compression spring groove; 9 - Second compression spring groove; 10 - Connecting block; 11 - Limit pin; 11a - Limiting section; 12 - Installation groove; 13 - Limit hole; 14 - Pin hole; 15 - Ejecting spring; 16 - Hinge seat; 17 - Magnetic sensor; 18 - First spring shaft; 19 - Second spring shaft; 21 - Hinge connecting shaft; 22 - Target plate tray; 23 - Target plate groove; 24 - Second sealing ring; 25 - First sealing ring. Detailed implementation manners

[0043] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, so that those skilled in the art can better understand the present invention and be able to implement it, but the specific embodiments cited are not intended to limit the present invention.

[0044] As Figure 1 shown, it is a schematic structural diagram of an embodiment of the vacuum chamber of the present invention. The vacuum chamber of this embodiment includes a top cover 1, and a hatch door structure is provided on the top cover 1. Specifically, the hatch door structure of this embodiment includes a sampling hole 2 provided on the top cover 1 and a hatch door 3 covering the outside of the sampling hole 2. A protrusion 4 is provided on the hatch door 3. When the hatch door 3 covers the sampling hole 2, the protrusion 4 extends inward into the sampling hole 2. The distance between the inner side surface of the protrusion 4 and the inner side surface of the top cover 1 is less than the thickness of the sampling target plate 5. The hatch door structure of this embodiment sets the distance between the inner side surface of the protrusion 4 and the inner side surface of the top cover 1 to be less than the thickness of the sampling target plate 5. In this way, when the sampling target plate 5 is not installed correctly, interference will occur between the inner side surface of the protrusion 4 and the sampling target plate 5, resulting in the hatch door 3 being unable to close normally. That is, the hatch door structure of this embodiment can detect whether the sampling target plate 5 is correctly installed in the target plate groove 23; in addition, when there is a slight error in the installation position of the sampling target plate 5, during the closing process of the hatch door 3, the protrusion 4 can press on the sampling target plate 5 to press the sampling target plate 5 straight and make it correctly installed in the target plate groove 23, and it can also play a role in correcting the deviation; the protrusion 4 can occupy a large amount of space in the sampling hole, and the volume of the vacuum pumping area formed between the target plate tray, the hatch door and the sampling hole is greatly reduced, reducing the difficulty of vacuum pumping and improving the efficiency.

[0045] Further, a handle mechanism is provided on the outer side of the hatch door 3. The handle mechanism includes a handle 6. A limiting installation mechanism is provided between the handle 6 and the hatch door 3. The limiting installation mechanism is used to limit the maximum distance between the handle 6 and the hatch door 3 and enable the hatch door 3 to move relative to the handle 6 within the range of the maximum distance. Specifically, at least one compression spring 7 that applies an inward pressure to the hatch door 3 is provided between the handle 6 and the hatch door 3. Specifically, a first compression spring groove 8 and a second compression spring groove 9 are respectively provided corresponding to the handle 6 and the hatch door 3, and both ends of the compression spring 7 are respectively installed in the first compression spring groove 8 and the second compression spring groove 9. Two compression springs 7 are provided between the handle 6 and the hatch door 3 in this embodiment. The compression springs 7 apply an inward pressure to the hatch door 3. When the hatch door receives an outward force, the hatch door 3 can move outward by compressing the compression springs 7, so that a flexible structure is formed between the hatch door 3 and the handle 6 to avoid rigid collision.

[0046] [[ID=***3***]]Further, the limiting installation mechanism of this embodiment includes a connection block 10 fixedly installed on the outer side surface of the hatch door 3. Limiting pins 11 are respectively provided at both ends of the connection block 10; an installation groove 12 covering the connection block 10 is provided on the inner side surface of the handle 6, and limiting holes 13 corresponding to the limiting pins 11 are respectively provided on both side walls of the installation groove 12; a limiting section 11a extending into the corresponding limiting hole 13 is provided on the limiting pin 11. The length of the limiting hole 13 in the direction perpendicular to the outer side surface of the hatch door 3 is greater than the outer diameter of the limiting section 11a and enables the limiting section 11a to slide along the limiting hole 13 in the direction perpendicular to the outer side surface of the hatch door 3. Further, the length of the limiting hole 13 in the direction parallel to the outer side surface of the hatch door 3 and perpendicular to the axis of the limiting pin 11 is greater than the outer diameter of the limiting section 11a and enables the limiting section 11a to slide along the limiting hole 13 in the direction parallel to the outer side surface of the hatch door 3 and perpendicular to the axis of the limiting pin 11. The limiting hole 13 of this embodiment is circular, and the inner diameter of the limiting hole 13 is greater than the inner diameter of the limiting section 11a, so as to ensure that the limiting section 11a can move along the directions parallel to and perpendicular to the outer surface of the hatch door 3 within the limiting hole 13, that is, the hatch door 3 can move relative to the handle 6 in the directions parallel to and perpendicular to the outer surface of the hatch door 3. Of course, the shape structure of the limiting hole 13 can also be realized in other various ways, such as rectangular, cross-shaped, etc., which will not be elaborated here.

[0047] Further, pin holes 14 are respectively provided at both ends of the connection block 10 of this embodiment. The limiting pins 11 are installed in the corresponding pin holes 14. A top spring 15 for ejecting the corresponding limiting pin 11 towards the corresponding limiting hole 13 is provided in the pin holes 14. By providing the pin holes 14 and the top spring 15, on the one hand, it is convenient for the assembly between the connection block 10 and the handle 6, and on the other hand, the limiting section 11a can always be kept in the limiting hole 13. The section of the limiting pin 11 located in the pin hole 14 is in limiting cooperation with the limiting hole 13 to prevent the limiting pin 11 from being ejected out of the pin hole 14 by the top spring 15.

[0048] Furthermore, the handle mechanism of this embodiment further includes a hinge seat 16 fixedly installed on the top cover 1, and one end of the handle 6 is hingedly connected to the hinge seat 16. That is, the handle 6 of this embodiment rotates around the hinge connection shaft 21 between it and the hinge seat 16, thereby realizing the opening and closing of the hatch 3. A magnetic attraction structure is provided between the other end of the handle 6 of this embodiment and the top cover 1. The magnetic attraction structure includes a magnet and a magnetic force sensor 17. The magnet and the magnetic force sensor 17 can be respectively installed on the handle 6 and the top cover 1, or can be simultaneously installed on the handle 6 or the top cover 1. In this embodiment, both the magnet and the magnetic force sensor 17 are installed on the top cover 1. By setting a magnetic attraction structure between the handle and the top cover, on the one hand, the magnetic force can enhance the closing pressure of the hatch, and on the other hand, the magnetic force sensor can detect whether the hatch is closed in place.

[0049] Furthermore, a first spring shaft 18 is provided on the hinge seat 16, a second spring shaft 19 is provided inside the handle 6, and a tension spring is provided between the first spring shaft 18 and the second spring shaft 19; when the hatch 3 covers the sampling hole 2, the hinge connection shaft 21 between the handle 6 and the hinge seat 16 is located outside the first spring shaft 18. By setting a tension spring (not shown in the figure) between the hinge seat 16 and the handle 6 and making the hinge connection shaft 21 located outside the tension spring when the hatch 3 is closed, in this way, the tension spring applies a torque to drive the hatch 3 to close to the handle 6, so that the hatch 3 remains closed; when the hatch 3 is opened, the tension spring can rotate to the outside of the hinge connection shaft 21 and apply a torque to keep it in an open state to balance the gravity of the hatch 3 and the handle 6, etc., so that the hatch 3 remains in an open state at a suitable position, facilitating operations such as sampling.

[0050] Furthermore, the sum of the maximum distance between the handle 6 and the hatch 3 of this embodiment and the distance between the inner side surface of the protrusion 4 and the inner side surface of the top cover 1 is less than the thickness of the sampling target plate 5. That is, when the sampling target plate 5 is not installed correctly, even if the hatch 3 moves outward relative to the handle 6 and fits together, the hatch 3 cannot be normally closed, improving the detection accuracy. Preferably, a flexible pad can also be provided on the inner side surface of the protrusion 4, and the distance between the flexible pad and the inner side surface of the top cover 1 is less than the thickness of the sampling target plate 5, further avoiding rigid collisions between the protrusion 4 and the sampling target plate 5.

[0051] Furthermore, the vacuum chamber of this embodiment further includes a target plate tray 22 that can run directly below the sampling hole 2, and a target plate groove 23 for installing the sampling target plate 5 is provided on the target plate tray 22.

[0052] Furthermore, at least one first sealing ring 25 is provided between the hatch 3 and the top cover 1, and at least one second sealing ring 24 is provided between the inner wall of the top cover 1 and the target plate tray 22 to ensure airtightness during vacuum pumping.

[0053] Note: The "outer side" described in this article refers to the side where the hatch 3 is located relative to the top cover 1, the "inner side" refers to the side where the target plate tray 22 is located relative to the top cover 1, and the two sides of the top cover 1 are respectively the "inner side" and the "outer side".

[0054] The above - described embodiments are only preferred embodiments cited to fully illustrate the present invention, and the protection scope of the present invention is not limited thereto. Equivalent substitutions or transformations made by those skilled in the art on the basis of the present invention are within the protection scope of the present invention. The protection scope of the present invention shall be subject to the claims.

Claims

1. A hatch structure, comprising a sample loading hole (2) provided on a top cover (1) and a hatch (3) covered on the outside of the sample loading hole (2), wherein a protrusion (4) is provided on the hatch (3), characterized in that: The protrusion (4) extends inwardly into the sample loading hole (2) when the hatch (3) is covered on the sample loading hole (2), and the distance between the inner side surface of the protrusion (4) and the inner side surface of the top cover (1) is less than the thickness of the sample loading target plate (5); The sample loading target plate (5) is installed in the target plate slot (23) of the target plate tray (22), and the target plate tray (22) can be moved to the bottom of the sample loading hole (2), and a vacuum area is formed between the target plate tray (22), the hatch (3) and the sample loading hole (2).

2. The hatch door structure according to claim 1, characterized in that: A handle mechanism is provided on the outside of the hatch (3), the handle mechanism comprising a handle (6), a position limiting installation mechanism is provided between the handle (6) and the hatch (3), the position limiting installation mechanism is used to limit the maximum distance between the handle (6) and the hatch (3), and to enable the hatch (3) to move relative to the handle (6) within the range of the maximum distance.

3. The hatch door structure according to claim 2, characterized in that: At least one compression spring (7) is provided between the handle (6) and the hatch (3) for applying inward pressure to the hatch (3).

4. The hatch door structure according to claim 3, characterized in that: A first compression spring groove (8) and a second compression spring groove (9) are respectively provided between the handle (6) and the hatch (3), and both ends of the compression spring (7) are respectively installed in the first compression spring groove (8) and the second compression spring groove (9).

5. The hatch door structure according to claim 2, characterized in that: The limiting installation mechanism includes a connecting block (10) fixedly installed on the outer side of the cabin door (3), and limiting pins (11) are respectively provided at both ends of the connecting block (10); a mounting groove (12) covering the outside of the connecting block (10) is provided on the inner side of the handle (6), and limiting holes (13) are respectively provided on the two side walls of the mounting groove (12) corresponding to the limiting pins (11); a limiting section (11a) extending into the corresponding limiting hole (13) is provided on the limiting pin (11), and the length of the limiting hole (13) in a direction perpendicular to the outer side of the cabin door (3) is greater than the outer diameter of the limiting section (11a), and the limiting section (11a) can slide along the limiting hole (13) in a direction perpendicular to the outer side of the cabin door (3).

6. The hatch door structure according to claim 5, characterized in that: The length of the limiting hole (13) in a direction parallel to the outer side of the hatch (3) and perpendicular to the axis of the limiting pin (11) is greater than the outer diameter of the limiting section (11a), and the limiting section (11a) can slide along the limiting hole (13) in a direction parallel to the outer side of the hatch (3) and perpendicular to the axis of the limiting pin (11).

7. The hatch door structure according to claim 5, characterized in that: Pin holes (14) are respectively provided at both ends of the connecting block (10), the limiting pin (11) is installed in the corresponding pin hole (14), and an ejection spring (15) is provided in the pin hole (14) for ejecting the corresponding limiting pin (11) toward the corresponding limiting hole (13).

8. The hatch door structure according to claim 7, characterized in that: The limiting pin (11) is positioned in a section inside the pin hole (14) and is in limiting engagement with the limiting hole (13).

9. The hatch door structure according to any one of claims 2 to 8, characterized in that: The handle mechanism comprises a hinge seat (16) fixedly mounted on the top cover (1), and one end of the handle (6) is hingedly connected to the hinge seat (16).

10. The hatch door structure according to claim 9, characterized in that: A magnetic attraction structure is provided between the other end of the handle (6) and the top cover (1), and the magnetic attraction structure comprises a magnet and a magnetic sensor (17).

11. The hatch door structure according to claim 9, characterized in that: A first tension spring shaft (18) is provided on the hinge seat (16), a second tension spring shaft (19) is provided in the handle (6), and a tension spring is provided between the first tension spring shaft (18) and the second tension spring shaft (19); when the hatch (3) covers the sample loading hole (2), the hinge connection shaft (21) between the handle (6) and the hinge seat (16) is located outside the first tension spring shaft (18).

12. The hatch door structure according to any one of claims 2 to 8, characterized in that: The sum of the maximum distance between the handle (6) and the hatch (3) and the distance between the inner side surface of the protrusion (4) and the inner side surface of the top cover (1) is less than the thickness of the sample loading target plate (5).

13. The door structure according to claim 1, characterized in that: A flexible pad is provided on the inner side surface of the protrusion (4), and the distance between the flexible pad and the inner side surface of the top cover (1) is less than the thickness of the sample loading target plate (5).

14. The door structure according to claim 1, characterized in that: At least one first sealing ring (25) is provided between the hatch (3) and the top cover (1).

15. A vacuum chamber, comprising a top cover (1), characterized in that: The top cover (1) is provided with a hatch structure according to any one of claims 1 to 14.

16. The vacuum chamber according to claim 15, wherein: At least one second sealing ring (24) is provided between the inner side wall of the top cover (1) and the target plate tray (22).

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