A pressure relief safety device and dry exhaust gas treatment equipment

Abstract

The present invention relates to a pressure relief safety device, comprising an air intake pipeline (10), an air outlet pipeline (20), a first pneumatic valve (30), a second pneumatic valve (40) and a pressure sensor (50), wherein the first pneumatic valve (30) is connected to the upper part of the air intake pipeline (10) and the air outlet pipeline (20), the second pneumatic valve (40) is connected to the lower part of the air intake pipeline (10) and the air outlet pipeline (20), and the pressure sensor (50) is arranged on the air intake pipeline (10). The present invention also provides a dry exhaust gas treatment device using the pressure relief safety device. The present invention can improve the safety of the equipment, improve the yield rate, and reduce the loss.

Description

Technical Field

[0001] The present invention belongs to the field of waste gas treatment in the technical fields of semiconductors, solar energy, thin-film batteries, TFTs, etc., and in particular relates to a pressure relief safety device and dry waste gas treatment equipment. Background Art

[0002] Process waste gas treatment equipment belongs to both the environmental protection industry and high-end intelligent auxiliary equipment for emerging industries such as semiconductors. In the production and manufacturing process of integrated circuits, some process modules such as chemical vapor deposition (CVD), etching, ion implantation and diffusion, as well as PECVD processes of amorphous silicon thin film solar energy and liquid crystal TFT-LCD thin films, will use a large amount of special gases. After participating in the process reaction, these gases are discharged in the form of waste gas, which can be divided into: toxic, acidic, alkaline, self-ignitable, flammable, corrosive, perfluorinated compounds (PFCs) and volatile organic compounds (VOC) gases.

[0003] Among the dry waste gas treatment equipment currently on the market, the dry scrubber has the highest technological content for treating metal etching and hydrides. It is mainly used to decompose the toxic gases (arsine, phosphine, hydrogen selenide, hydrogen sulfide, etc.) generated in the semiconductor manufacturing process. The adsorbent in the reaction tank of the dry waste gas treatment equipment can be customized according to the toxic gases generated in the manufacturing process.

[0004] The medium in each reaction tank has different functions. When working, the medium in the tank will react chemically with the incoming waste gas to make its content far lower than the TLV standard. After the reaction, the waste gas will become solid. The poison gas will react with the medium in the tank, and the toxin will quickly decrease to a controllable range. The exothermic reaction in the reaction tank will generate a lot of heat to accelerate the decomposition of the poison gas. The thermocouple in the tank will measure the temperature in the tank in real time to ensure the safety of the reaction.

[0005] Toxic gas enters from the air inlet on the top of the dry processing equipment cabinet, and then the Venturi pump connected to the reactor outlet accelerates the gas to flow through the entire system. At the same time, the pressure sensor monitors the vacuum degree in real time and controls the proportional valve to maintain the system vacuum degree at around 720Torr.

[0006] The advantages of dry treatment are simple structure, high pest removal ability, simple daily operation, and only need to replace the adsorption barrel.

[0007] The disadvantages are: the gas processing volume is small, and the adsorbent must be properly handled after use; dust will enter the equipment in some processes, and long-term operation of the dust will cause blockage inside the tank, thereby affecting the fluidity of the exhaust gas, causing excessive pressure in the tank, and thus there is a risk of exhaust gas leakage.

[0008] In view of the above shortcomings, the solution is to focus on prevention and combine prevention and treatment. A pressure relief safety device is added to the air inlet of the equipment to monitor the changes in gas pressure in the pipeline in real time through pressure detection, effectively preventing the risk of toxic gas leakage. When the exhaust gas flow rate is greater than the equipment processing capacity, pressure detection can also be used to ensure the safety of equipment operation.

[0009] Based on this, the present invention is proposed. Summary of the invention

[0010] In order to solve the above problems existing in the prior art, one of the purposes of the present invention is to provide a pressure relief safety device for dry exhaust gas treatment equipment. The specific technical solution is as follows:

[0011] A pressure relief safety device for dry exhaust gas treatment equipment includes an air intake pipeline, an air outlet pipeline, a first pneumatic valve, a second pneumatic valve and a pressure sensor, wherein the first pneumatic valve is connected to the upper part of the air intake pipeline and the air outlet pipeline, the second pneumatic valve is connected to the lower part of the air intake pipeline and the air outlet pipeline, and the pressure sensor is arranged on the air intake pipeline.

[0012] Furthermore, the air intake pipeline includes a first air intake tee, a first reducer, and a second air intake tee, the large diameter end of the first reducer is connected to the first air intake tee, and the small diameter end of the first reducer is connected to the second air intake tee.

[0013] Optionally, the small diameter end of the first reducer is connected to the second air inlet tee through a section of arc-shaped pipe.

[0014] Furthermore, the air outlet pipeline includes a first air outlet tee, a second reducer, and a second air outlet tee, wherein the large diameter end of the second reducer is connected to the first air outlet tee, and the small diameter end of the second reducer is connected to the second air outlet tee.

[0015] Optionally, the small diameter end of the second reducer is connected to the second gas outlet tee through a section of arc-shaped pipe.

[0016] One of the objects of the present invention is to provide a dry exhaust gas treatment equipment, which includes a pressure relief safety device, a pneumatic angle valve and an adsorption tank, wherein the air inlet pipe of the pressure relief safety device is connected to the air inlet of the adsorption tank through a first pneumatic angle valve, and the air outlet pipe of the pressure relief safety device is connected to the air outlet of the adsorption tank through a second pneumatic angle valve.

[0017] Furthermore, an adsorbent is arranged inside the adsorption tank for chemically reacting with the exhaust gas.

[0018] Furthermore, the dry exhaust gas treatment equipment of the present invention also has an equipment outer box, and the adsorption tank is arranged in the equipment outer box.

[0019] Furthermore, a roller is provided at the lower part of the adsorption tank to facilitate the replacement of the adsorption tank.

[0020] Beneficial effects of the present invention:

[0021] 1. Improve equipment safety: When the internal pressure of the equipment adsorption tank exceeds 850 (Torr), the second pneumatic valve inside the equipment outer box opens to avoid toxic gas leakage due to excessive pressure; when the reaction chamber of the process equipment is in the cleaning mode, the gas flow is huge. At this time, the first pneumatic valve outside the equipment outer box opens to release pressure (because the second pneumatic valve inside is not enough to meet the pressure relief requirements in the cleaning mode) to avoid toxic gas leakage due to excessive pressure.

[0022] 2. Improve the yield rate and reduce losses: In the absence of a pressure relief safety device, when the dry exhaust gas treatment equipment is blocked, the process equipment will automatically trip the pump due to excessive pressure, causing the chips in the process to be scrapped; when a pressure relief safety device is added, the chip scrapping caused by excessive pressure can be effectively prevented, and the exhaust gas will automatically switch to the spare dry treatment equipment for treatment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the pressure relief safety device of the present invention.

[0024] Figure 2 It is a structural schematic diagram of the dry exhaust gas treatment equipment of the present invention.

[0025] Among them, 10-inlet pipeline, 11-first inlet tee, 12-first reducer, 13-second inlet tee, 20-outlet pipeline, 21-first outlet tee, 22-second reducer, 23-second outlet tee, 30-first pneumatic valve, 40-second pneumatic valve, 50-pressure sensor, 60-first pneumatic angle valve, 70-second pneumatic angle valve, 80-adsorption tank, 81-adsorbent, 82-outlet pipe, 83-inlet connecting pipe, 84-outlet connecting pipe, 85-roller, 90-equipment outer box. DETAILED DESCRIPTION

[0026] In order to have a clearer understanding of the technical features, objectives and beneficial effects of the present invention, Figure 1-2The technical solutions of the present invention are described in detail below with specific examples. Technical means not described in the present invention are carried out in a conventional manner in the art. It should be understood that these embodiments are only used to illustrate the present invention and are not used to limit the scope of the present invention.

[0027] like Figure 1 As shown, the pressure relief safety device of the present invention includes an air intake pipeline 10, an air outlet pipeline 20, a first pneumatic valve 30, a second pneumatic valve 40 and a pressure sensor 50. The first pneumatic valve 30 is a pneumatic valve with a larger diameter, such as an NW80 Bypass pneumatic valve, which is connected to the upper part of the air intake pipeline 10 and the air outlet pipeline 20. The second pneumatic valve 40 is a pneumatic valve with a smaller diameter, such as a KF40 Bypass pneumatic valve, which is connected to the lower part of the air intake pipeline 10 and the air outlet pipeline 20. The pressure sensor 50 is arranged on the air intake pipeline 10.

[0028] The air intake pipeline 10 includes a first air intake tee 11, a first reducer 12, and a second air intake tee 13. The large diameter end of the first reducer 12 is connected to the first air intake tee 11, and the small diameter end of the first reducer 12 is connected to the second air intake tee 13. In order to make the volume of the overall dry exhaust gas treatment equipment as small as possible, and to facilitate the connection of the second pneumatic valve 40 with a smaller size to the lower part of the air intake pipeline 10 and the air outlet pipeline 20, a section of arc pipe is connected between the small diameter end of the first reducer 12 and the second air intake tee 13, so that the second air intake tee 13 can be close to the air outlet pipeline 20.

[0029] The structure of the outlet pipe 20 is similar to that of the inlet pipe 10, and includes a first outlet tee 21, a second reducer 22, and a second outlet tee 23. The large diameter end of the second reducer 22 is connected to the first outlet tee 21, and the small diameter end of the second reducer 22 is connected to the second outlet tee 23. In order to make the volume of the overall dry exhaust gas treatment equipment as small as possible, and to facilitate the connection of the second pneumatic valve 40 of smaller size to the lower part of the inlet pipe 10 and the outlet pipe 20, a section of arc pipe is connected between the small diameter end of the second reducer 22 and the second outlet tee 23, so that the second outlet tee 23 can be close to the inlet pipe 10.

[0030] like Figure 2 As shown, a dry exhaust gas treatment device of the present invention comprises a pressure relief safety device, a pneumatic angle valve (60, 70) and an adsorption tank 80, wherein an air inlet pipe 10 of the pressure relief safety device is connected to an air inlet of the adsorption tank 80 via a first pneumatic angle valve 60, and an air outlet pipe 20 of the pressure relief safety device is connected to an air outlet of the adsorption tank 80 via a second pneumatic angle valve 70.

[0031] An adsorbent 81 is disposed inside the adsorption tank 80 for chemically reacting with the exhaust gas.

[0032] The air inlet of the adsorption tank 80 is connected to the first pneumatic angle valve 60 via an air inlet connecting pipe 83 , and the air outlet pipe 82 of the adsorption tank 80 is connected to the second pneumatic angle valve 70 via an air outlet connecting pipe 84 .

[0033] The dry exhaust gas treatment equipment further comprises an equipment outer box 90 , and the adsorption tank 80 and the lower part of the pressure relief safety device are arranged in the equipment outer box 90 .

[0034] A roller 85 is provided at the lower part of the adsorption tank 80 to facilitate the replacement of the adsorption tank.

[0035] There are three situations in which the pressure relief safety device of the present invention is activated:

[0036] 1. Dust will enter the equipment during some processes. Long-term operation will cause the adsorption tank 80 to be blocked, thereby affecting the circulation of the exhaust gas and causing excessive pressure inside the adsorption tank 80, which will lead to the risk of exhaust gas leakage. Add a pressure relief safety device to the equipment ( Figure 1 ), through the pressure detection of the pressure sensor 50, the change of the gas pressure in the pipeline is monitored in real time. When the pressure exceeds 850 (Torr), the second pneumatic valve 40 inside the box is opened to release the pressure (the first pneumatic valve 30 is in the closed state at this time), and the gas flows through the second pneumatic valve 40 directly to the first outlet tee 21 for discharge, effectively preventing the risk of toxic gas leakage.

[0037] 2. When the exhaust gas flow rate is greater than the specified processing capacity of the equipment, the pressure at the air inlet of the equipment increases. When the pressure exceeds 850 (Torr), the second pneumatic valve 40 inside the box opens to release the pressure (the first pneumatic valve 30 is in a closed state at this time), and the gas flows through the second pneumatic valve 40 directly to the first outlet tee 21 for discharge, effectively preventing the risk of toxic gas leakage.

[0038] 3. When the reaction chamber of the process equipment is in the cleaning mode, the gas flow is huge. At this time, the first pneumatic valve 30 outside the box is opened to release pressure (the second pneumatic valve 40 is in a closed state at this time), and the gas flows through the first pneumatic valve 30 and directly enters the first gas outlet tee 21 for discharge, ensuring that the equipment will not be affected by excessive pressure.

[0039] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein by equivalents. These modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention, and they should all be included in the scope of the claims and specification of the present invention.

Claims

1. A pressure relief safety device, characterized in that: The invention comprises an air inlet pipeline (10), an air outlet pipeline (20), a first pneumatic valve (30), a second pneumatic valve (40) and a pressure sensor (50), wherein the first pneumatic valve (30) is connected to an end of the air inlet pipeline (10) closer to an air inlet of the air inlet pipeline and an end of the air outlet pipeline (20) closer to an air outlet of the air outlet pipeline, the second pneumatic valve (40) is connected to an end of the air inlet pipeline (10) farther from an air inlet of the air inlet pipeline and an end of the air outlet pipeline (20) farther from an air outlet of the air outlet pipeline, and the pressure sensor (50) is arranged on the air inlet pipeline (10); The first pneumatic valve (30) is a pneumatic valve with a larger diameter, and the second pneumatic valve (40) is a pneumatic valve with a smaller diameter.

2. The pressure relief safety device according to claim 1, characterized in that: The air intake pipeline (10) comprises a first air intake tee (11), a first reducer (12) and a second air intake tee (13), wherein the large-diameter end of the first reducer (12) is connected to the first air intake tee (11), and the small-diameter end of the first reducer (12) is connected to the second air intake tee (13).

3. The pressure relief safety device according to claim 2, characterized in that: The small diameter end of the first reducer (12) is connected to the second air inlet tee (13) via a section of arc-shaped pipe.

4. The pressure relief safety device according to claim 1, characterized in that: The gas outlet pipeline (20) comprises a first gas outlet tee (21), a second reducer (22) and a second gas outlet tee (23), wherein the large diameter end of the second reducer (22) is connected to the first gas outlet tee (21), and the small diameter end of the second reducer (22) is connected to the second gas outlet tee (23).

5. The pressure relief safety device according to claim 4, characterized in that: The small diameter end of the second reducer (22) is connected to the second gas outlet tee (23) via a section of arc-shaped pipe.

6. A dry exhaust gas treatment device, characterized in that: It comprises a pneumatic angle valve (60, 70), an adsorption tank (80) and a pressure relief safety device as described in any one of claims 1 to 5, wherein the air inlet pipeline (10) of the pressure relief safety device is connected to the air inlet of the adsorption tank (80) through a first pneumatic angle valve (60), and the air outlet pipeline (20) of the pressure relief safety device is connected to the air outlet of the adsorption tank (80) through a second pneumatic angle valve (70).

7. The dry exhaust gas treatment equipment according to claim 6, characterized in that: An adsorbent (81) is arranged inside the adsorption tank (80) for chemically reacting with the exhaust gas.

8. The dry exhaust gas treatment equipment according to claim 6, characterized in that: It also includes an equipment outer box (90), and the adsorption tank (80) is arranged in the equipment outer box (90).

9. The dry exhaust gas treatment equipment according to any one of claims 6 to 8, characterized in that: A roller (85) is provided at the lower part of the adsorption tank (80) to facilitate the replacement of the adsorption tank.

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