A sputtering target

Abstract

The present invention discloses a sputtering target, comprising a motor, which is connected to a stainless steel tube. At least two sections of magnetic yokes are provided along the center line of the outer circumference of the stainless steel tube. A magnet is cooperatively connected to the magnetic yoke. The outer circumference of the stainless steel tube is sleeved on the target material, and the yoke and the magnet are located on the inner circumference of the target material. The present invention effectively solves the problem that the magnetic steel is heavy and difficult to carry, install, and process, solves the problem that the magnetic steel is rusted, and solves the problem of rapid replacement of magnets.

Description

Technical Field

[0001] The present invention relates to a sputtering target. Background Art

[0002] Some existing sputtering target holders have the following shortcomings: 1. Current sputtering target holders on the market lack motor anomaly detection, making it impossible to confirm whether they are operating normally. 2. Existing magnets are made of a single Q235 iron rod, which is difficult to process and heavy, making it inconvenient to carry and install. The magnets are made of Q235 material, and the nickel plating on the surface is ineffective for rust prevention, making them prone to rust and corrosion. The magnets are directly attached to the Q235 surface, making it difficult to flexibly replace damaged magnets. 3. When replacing the target material in the existing target holder, four people are required to remove the entire target holder and target material from the top of the PVD furnace, replace the new target material, and then reinstall it. Each replacement takes four hours, which is time-consuming and labor-intensive. Summary of the Invention

[0003] In order to solve the above technical problems, an object of the present invention is to provide a sputtering target.

[0004] The present invention is achieved through the following technical solutions:

[0005] A sputtering target seat includes a motor, which is connected to a stainless steel tube. At least two sections of magnetic yokes are arranged along the center line of the outer circumference of the stainless steel tube. Magnets are matched and connected to the yokes. The outer circumference of the stainless steel tube is sleeved in the target material, and the yokes and magnets are located on the inner circumference of the target material.

[0006] In an embodiment of the present invention, a mounting plate is further included, on which a matching driving gear and a driven gear are provided. The driving gear is coupled to the motor, the driven gear is coupled to the rotating spindle, and the rotating spindle is coupled to the stainless steel pipe.

[0007] In an embodiment of the present invention, a protective cover is further included, the upper end of the protective cover is cooperated with the mounting plate, the two ends of the stainless steel tube are respectively connected to the upper sealing cover and the lower sealing cover, the upper sealing cover is cooperated with the lower end of the protective cover, and the two ends of the target material are respectively cooperated with the upper sealing cover and the lower sealing cover.

[0008] In an embodiment of the present invention, a sealing module is provided on the outer periphery of the rotating main shaft, and the sealing module includes a main body, an axial through hole is provided in the middle of the main body, and the rotating main shaft is provided in the through hole. The upper and lower ends of the through hole are provided with a retaining spring, a bearing and an oil seal that cooperate with the rotating main shaft. The retaining spring is located at the upper and lower ends of the main body, and the bearing located at the same end of the through hole is located between the retaining spring and the oil seal.

[0009] In an embodiment of the present invention, the peripheral side wall of the body is further provided with a radial through hole, one end of the through hole is located on the peripheral wall of the body, and the other end of the through hole is located between the oil seals at the upper and lower ends of the through hole.

[0010] In an embodiment of the present invention, a support plate is further provided above the mounting plate, the sealing module is provided between the support plate and the mounting plate, a support rod is provided between the mounting plate and the support plate, and the support rod is located at the periphery of the sealing module.

[0011] In an embodiment of the present invention, a water inlet pipe is further included. The water inlet pipe is cooperatively connected to the rotating main shaft, and a nut and a conductive ring are sequentially provided on the outer circumference of the water inlet pipe from top to bottom.

[0012] In an embodiment of the present invention, an insulating mounting seat is provided below the mounting plate and is located on the outer periphery of the protective cover.

[0013] The embodiment of the present invention includes a matched sensor and a sensor sheet.

[0014] In an embodiment of the present invention, a support frame connected to the motor is provided on the mounting seat, the motor is connected to the driving gear via a coupling, an inductor is provided on the support frame, and an induction sheet is provided on the coupling.

[0015] The sputtering target holder of the present invention has the following beneficial effects: 1. In actual use, the target material replacement time is reduced from 4 hours to 1 hour. 2. The processing cost of each magnetic rod is reduced by 2,000 yuan and the weight is reduced by 9 kg. 3. The service life of the magnetic rod is increased from 2 years to 4 years. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solution of the present invention, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 It is a perspective view of the present invention.

[0018] Figure 2 This is a partial schematic diagram of the present invention Figure 1 .

[0019] Figure 3 This is a partial schematic diagram of the present invention Figure 2 .

[0020] Figure 4 It is a schematic diagram of the matching of the stainless steel pipe in the present invention.

[0021] Figure 5 This is a schematic diagram of the sealing module in the present invention Figure 1 .

[0022] Figure 6 This is a schematic diagram of the sealing module in the present invention Figure 2 .

[0023] Figure 7 It is a schematic diagram of the present invention in use. DETAILED DESCRIPTION

[0024] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0025] References herein to "one embodiment" or "embodiment" refer to specific features, structures, or characteristics that may be included in at least one implementation of the present invention. In describing the present invention, it should be understood that the terms "upper," "lower," "top," "bottom," and the like, which indicate orientations or positional relationships based on those shown in the accompanying drawings, are intended solely for ease of description and simplification of the present invention and are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not intended to indicate or imply relative importance or to implicitly specify the number of the technical features referred to. Thus, a feature designated "first" or "second" may explicitly or implicitly include one or more of the features. Furthermore, the terms "first," "second," and the like are used to distinguish similar objects and are not necessarily intended to describe a specific order or sequential sequence. It should be understood that the terms used in this manner are interchangeable where appropriate, so that the embodiments of the present invention described herein can be implemented in an order other than that illustrated or described herein.

[0026] Referring to the accompanying drawings, a sputtering target 100 includes a motor 10 connected to a stainless steel tube 20. The outer periphery of the stainless steel tube is provided with at least two yokes 21 along its centerline. Magnets 22 are coupled to the yokes. The outer periphery of the stainless steel tube is sleeved within a target material 23, with the yokes and magnets located within the inner periphery of the target. The present invention primarily replaces the original rotating parts, reducing their weight and manufacturing complexity. The segmented design significantly reduces time and improves efficiency when replacement and maintenance are required. In one embodiment, the present invention uses a standard stainless steel tube instead of the original single-piece Q235 magnet, reducing weight and addressing rust and corrosion issues. The magnet is designed with four segments, onto which the magnet is attached, and the magnet is secured to the stainless steel tube via screws. This segmented design reduces manufacturing complexity and saves 2,000 yuan in material and processing costs. When the magnets need to be replaced, the old magnet can be removed and replaced with a new one. This eliminates the need to remove the magnets one by one and then attach them one by one, saving three hours of magnet replacement time. The present invention utilizes a modular design, separating the water inlet pipe from the magnet. When the target needs to be replaced, the target can be removed from the furnace by simply loosening the upper sealing cover and the screws connecting the water inlet pipe and the magnet. There is no need to remove the entire sputtering target assembly from the furnace roof.

[0027] Furthermore, it includes a mounting plate 30, on which a matching driving gear 11 and a driven gear 12 are provided. The driving gear is connected to the motor, the driven gear is connected to the rotating spindle 13, and the rotating spindle is connected to the stainless steel pipe. Preferably, the rotating spindle is connected to the upper end of the stainless steel pipe in the form of screws.

[0028] Furthermore, it also includes a protective cover 31, the upper end of the protective cover is connected to the mounting plate, the two ends of the stainless steel tube are respectively connected to the upper sealing cover 14 and the lower sealing cover 15, the upper sealing cover is connected to the lower end of the protective cover, and the two ends of the target material are respectively connected to the upper sealing cover and the lower sealing cover. Referring to the drawings in the specification, the upper and lower ends of the target material are distributed on the inner rings of the upper sealing cover and the lower sealing cover. During use, the target material does not rotate.

[0029] In one embodiment of the present invention, a sealing module 40 is provided on the outer periphery of the rotating main shaft. The sealing module comprises a body 41, with an axial through-hole 42 disposed in the middle thereof. The rotating main shaft is disposed within the through-hole. A retaining spring 43, a bearing 44, and an oil seal 45 are disposed at both the upper and lower ends of the through-hole, each of which is engaged with the rotating main shaft. The retaining spring is located at the upper and lower ends of the body, and the bearing located at the same end of the through-hole is located between the retaining spring and the oil seal. For details, refer to the accompanying drawings in the specification. A radial through-hole 46 is also provided on the circumferential sidewall of the body. One end of the through-hole is located on the outer circumferential wall of the body, and the other end of the through-hole is located between the oil seals at the upper and lower ends of the through-hole. Referring to the accompanying drawings in the specification, in one embodiment, the motor is located adjacent to the sealing module.

[0030] Specifically, a support plate 32 is provided above the mounting plate, the sealing module is provided between the support plate and the mounting plate, a support rod 33 is provided between the mounting plate and the support plate, and the support rod is located at the periphery of the sealing module.

[0031] More specifically, it also includes a water inlet pipe 50, which is coupled to the rotating main shaft. A nut 51 and a conductive ring 52 are positioned on its outer circumference, arranged from top to bottom. Referring to the accompanying drawings, a magnetic field direction adjustment block 53 may also be positioned on its outer circumference, located below the conductive ring and above the support plate. Below the mounting plate, an insulating mounting base 34 is located on the outer circumference of the protective cover. This insulating mounting base primarily couples with the furnace body during operation.

[0032] In a preferred embodiment of the present invention, a matching sensor 61 and a sensor sheet 62 are included, which are mainly used to sense whether the motor is working normally. If the motor stops abnormally, the sensor cannot sense the sensor sheet within the set time period, and the system automatically alarms to prompt maintenance personnel to check the equipment, thereby solving the problem of scarring caused by local high temperature of the target material and the problem of uneven coating surface caused by the motor not rotating.

[0033] In more detail, a support frame 35 connected to the motor is provided on the mounting seat, the motor is connected to the driving gear via a coupling 16, an inductor is provided on the support frame, and an induction sheet is provided on the coupling.

[0034] The present invention primarily solves the following problems: 1. When the motor stops abnormally, the system promptly issues an alarm, preventing localized high temperatures on the target material, which can cause surface scarring and poor coating. 2. It addresses the problems of heavy magnets making them difficult to transport, install, and process, as well as the problem of rusted magnets and the rapid replacement of magnets. 3. It addresses the time-consuming and labor-intensive issue of target replacement, which requires disassembly of the entire target assembly from the top of the furnace.

[0035] During use, the sputtering target is mounted on top of a furnace 200 with a vacuum chamber 201. The product 300 is manually loaded onto a hanger 400. The hanger rotates driven by a turret motor. The target material can be copper, chromium, titanium, titanium-aluminum alloy, or zirconium.

[0036] The foregoing description shows and describes preferred embodiments of the present invention. As previously mentioned, it should be understood that the present invention is not limited to the form disclosed herein and should not be construed as excluding other embodiments. Instead, the present invention can be used in various other combinations, modifications, and environments and can be modified within the scope of the inventive concept described herein by the teachings above or by techniques or knowledge in the relevant art. Modifications and variations made by those skilled in the art without departing from the spirit and scope of the present invention are intended to be within the scope of the appended claims.

Claims

1. A sputtering target, comprising a motor, characterized in that: The motor is connected to a stainless steel tube, and at least two sections of yokes are provided along the center line of the outer periphery of the stainless steel tube. Magnets are coupled to the yokes. The outer periphery of the stainless steel tube is sleeved in the target material, and the yokes and magnets are located on the inner periphery of the target material. It also includes a mounting plate, on which a matching driving gear and a driven gear are provided, the driving gear is coupled to the motor, the driven gear is coupled to the rotating main shaft, and the rotating main shaft is coupled to the stainless steel pipe; An insulating mounting seat is provided below the mounting plate and is located on the periphery of the protective cover; Including matching sensors and sensor sheets; A support frame connected to the motor is provided on the mounting seat. The motor is connected to the driving gear via a coupling. The sensor is provided on the support frame. The sensor sheet is provided on the coupling.

2. The sputtering target according to claim 1, wherein: It also includes a protective cover, the upper end of which is connected to the mounting plate, the two ends of the stainless steel tube are respectively connected to an upper sealing cover and a lower sealing cover, the upper sealing cover is connected to the lower end of the protective cover, and the two ends of the target material are respectively connected to the upper sealing cover and the lower sealing cover.

3. The sputtering target according to claim 2, characterized in that: A sealing module is provided on the outer periphery of the rotating main shaft, and the sealing module includes a main body, an axial through hole is provided in the middle of the main body, and the rotating main shaft is provided in the through hole. The upper and lower ends of the through hole are provided with a retaining spring, a bearing and an oil seal that cooperate with the rotating main shaft. The retaining spring is located at the upper and lower ends of the main body, and the bearing located at the same end of the through hole is located between the retaining spring and the oil seal.

4. The sputtering target according to claim 3, characterized in that: The peripheral side wall of the body is further provided with a radial through hole, one end of the through hole is located on the peripheral wall of the body, and the other end of the through hole is located between the oil seals at the upper and lower ends of the through hole.

5. The sputtering target according to claim 4, characterized in that: A support plate is further provided above the mounting plate, the sealing module is provided between the support plate and the mounting plate, a support rod is provided between the mounting plate and the support plate, and the support rod is located at the periphery of the sealing module.

6. The sputtering target according to claim 5, characterized in that: It also includes a water inlet pipe, which is cooperatively connected with the rotating main shaft. The outer circumference of the water inlet pipe is sequentially provided with nuts and conductive rings from top to bottom.

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