Continuous coating equipment and continuous coating method

Abstract

The present invention provides a continuous coating device and a continuous coating method, wherein the continuous coating device includes an auxiliary chamber and a working chamber. By pre-vacuuming the auxiliary chamber, the sample can be directly transported from the auxiliary chamber to the working chamber. Since the working chamber does not need to be connected to the external environment, it can be maintained at a preset vacuum level, thereby making the entire coating process continuous.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating equipment, and in particular to a continuous coating equipment and a continuous coating method. Background Art

[0002] Current vacuum coating equipment typically consists of a vacuum chamber and associated extraction and feeding systems. Samples to be processed are placed within the chamber for subsequent processing. Once processed, the samples leave the chamber, and the next batch of samples is then placed into the chamber, completing the processing of multiple batches of samples to be coated.

[0003] Vacuum coating technology has high requirements for vacuum degree, which means that after the sample to be processed enters the vacuum chamber, the vacuum chamber needs to be vacuumed for a certain period of time. After the processed sample leaves the vacuum chamber, the vacuum chamber needs to be vacuumed again to achieve the vacuum degree required for vacuum coating.

[0004] In addition, a rotating rack is generally provided in the vacuum coating equipment to drive the movement of the sample. On the one hand, the moving rotating rack is conducive to stirring the raw material gas in the vacuum chamber so that the gas in the vacuum chamber is evenly distributed. On the other hand, it drives the sample to move so that the sample is evenly in contact with the gas in the vacuum chamber, so that the coating is uniform. However, in a single chamber, the sample needs to open and close the door when entering and exiting, which causes the gas pressure in the vacuum chamber to rise. On the one hand, it prolongs the processing time of the vacuum coating equipment and reduces production efficiency. On the other hand, it may cause the difference between samples to increase, which is not conducive to the quality of the final product. In detail, in a coating process, most of the time is spent waiting for the vacuum degree of the vacuum chamber of the vacuum coating equipment to reach the preset value. The actual coating time is short, and the distribution of plasma in the vacuum chamber itself is uneven, which will affect the quality of samples in the same batch. Summary of the Invention

[0005] An advantage of the present invention is that it provides a continuous coating device and a continuous coating method, wherein the continuous coating device can save vacuuming time, thereby improving production efficiency.

[0006] Another advantage of the present invention is that it provides a continuous coating device and a continuous coating method, wherein the continuous coating device includes a working chamber and at least one auxiliary chamber that can be formed, wherein the auxiliary chamber can be evacuated in advance to reduce the waiting time for the working chamber to be evacuated, wherein the sample can be placed in the auxiliary chamber and then transferred to the working chamber.

[0007] Another advantage of the present invention is that it provides a continuous coating device and a continuous coating method, wherein the number of the auxiliary chambers can be two, one is a front chamber and the other is a rear chamber, the front chamber is used to place the sample to be processed and is controlled at a preset vacuum degree, so that the sample placed in the front chamber can be quickly transferred to the working chamber, and the rear chamber is controlled at a preset vacuum degree for placing the sample after the coating is completed, so that the vacuum degree in the working chamber does not need to fluctuate greatly, thereby saving the control time of the vacuum degree change of the working chamber.

[0008] Another advantage of the present invention is that it provides a continuous coating device and a continuous coating method, wherein the number of the auxiliary chambers is at least two, and the positions of the front chamber and the rear chamber can be interchanged to facilitate the continuous operation of the continuous coating device.

[0009] Another advantage of the present invention is that it provides a continuous coating device and a continuous coating method, wherein the continuous coating device provides a buffer chamber, wherein the working chamber is arranged in the buffer chamber, and the buffer chamber can provide a buffer between the working chamber and the outside world.

[0010] According to one aspect of the present invention, the present invention provides a continuous film coating device suitable for coating a sample to be coated, wherein the continuous film coating device comprises:

[0011] a discharge device;

[0012] a feeding device;

[0013] a vacuum device;

[0014] a working chamber, wherein the working chamber has a working cavity; and

[0015] At least one auxiliary chamber, wherein the auxiliary chamber can form an auxiliary chamber, the auxiliary chamber is used to transfer samples, wherein the discharge device is used to discharge into the working chamber of the working chamber, wherein the feeding device is used to feed into the working chamber of the working chamber, the working chamber and the auxiliary chamber are connected to the vacuum device with controllable vacuum degree, wherein each of the auxiliary chamber and the working chamber has a closed state and a connected state and is operably switched between the closed state and the connected state, and in the connected state, the auxiliary chamber and the working chamber can transfer samples. The sample is transferred and kept closed from the outside. In the closed state, the auxiliary chamber and the working chamber remain independent. In the closed state, at least one of the auxiliary chambers in which the sample to be coated is placed is evacuated in advance to be connected to the working chamber to prepare for transferring the sample to be coated, and at least one of the auxiliary chambers is evacuated in advance to be connected to the working chamber to prepare for receiving the sample from the working chamber, so that the vacuum degree of the working chamber can be controlled within a preset range when the working chamber is switched between the closed state and the connected state, so that the working chamber can operate continuously.

[0016] According to one embodiment of the present invention, the working chamber has an inlet and an outlet, wherein the number of the auxiliary chambers is two, one of the auxiliary chambers is arranged at the inlet position of the working chamber, and the other auxiliary chamber is arranged at the outlet position of the working chamber. Before the sample in the working chamber completes coating, the auxiliary chamber at the inlet position of the working chamber, which is loaded with the sample to be coated, and the auxiliary chamber at the outlet position of the working chamber are respectively evacuated to a preset range. After the sample in the working chamber completes coating, the two auxiliary chambers are respectively transformed into the connected state, so that the sample in the working chamber is transferred to the auxiliary chamber at the outlet position, and the sample in the auxiliary chamber at the inlet position is transferred to the working chamber, so as to continuously perform coating.

[0017] According to one embodiment of the present invention, the working chamber has an inlet and an outlet, wherein the number of the auxiliary chambers is two and they are respectively implemented as a first auxiliary chamber and a second auxiliary chamber, wherein the first auxiliary chamber has a first auxiliary chamber and is communicatively connected to the working chamber of the working chamber, and the second auxiliary chamber has a second auxiliary chamber and is communicatively connected to the working chamber of the working chamber, wherein the first auxiliary chamber can be transformed between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber, and the second auxiliary chamber can be transformed between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber.

[0018] According to one embodiment of the present invention, the continuous coating equipment further includes a coating chamber, wherein the coating chamber includes at least two movable partitions and a coating surrounding wall, wherein the working chamber is formed between the movable partitions, and the auxiliary chamber is formed between the movable partitions and the coating surrounding wall.

[0019] According to one embodiment of the present invention, the continuous coating equipment further includes a buffer chamber, wherein the buffer chamber has a buffer cavity, the working chamber is arranged in the buffer cavity of the buffer chamber, and the auxiliary chamber is communicatively connected to the buffer cavity.

[0020] According to one embodiment of the present invention, the continuous coating equipment further includes a loading device, wherein the loading device is suitable for loading the sample to be coated, the auxiliary chamber is connected to the buffer chamber, and the loading device is suitable for moving from the auxiliary chamber of the auxiliary chamber to the buffer chamber of the buffer chamber, and then the loading device is suitable for being moved from the buffer chamber of the buffer chamber to the working chamber of the working chamber.

[0021] According to one embodiment of the present invention, the buffer chamber is communicatively connected to the feeding device, and the feeding device is suitable for feeding the buffer chamber so that raw materials can be supplied both inside and outside the working chamber.

[0022] According to one embodiment of the present invention, the continuous coating equipment further includes at least one loading device, wherein the loading device includes a mobile unit and a turntable, wherein the turntable is movably supported on the mobile unit, and wherein the sample is suitable for being mounted on the turntable and moving with the turntable.

[0023] According to one embodiment of the present invention, the continuous coating equipment further comprises a guide rail, wherein the guide rail is arranged between the auxiliary chamber and the working chamber to guide the loading device to move between the auxiliary chamber and the working chamber.

[0024] According to one embodiment of the present invention, the number of the loading devices is at least two, wherein the turntables of the loading devices are rotatably and independently accommodated in the working chamber of the working chamber, and the sample set on any one of the turntables can be transferred to the auxiliary chamber after coating.

[0025] According to another aspect of the present invention, the present invention provides a continuous film coating method, wherein the continuous film coating method comprises the following steps:

[0026] For coating a sample in a closed working chamber maintained at a preset vacuum degree;

[0027] Before the sample coating is completed, pre-vacuuming an auxiliary chamber loaded with the sample to be coated; and

[0028] After the sample in the working chamber is coated, the sample in the auxiliary chamber is transferred to the working chamber and the coated sample in the working chamber is transferred to another pre-vacuumed auxiliary chamber, wherein during the transfer process, the working chamber is opened to connect with the auxiliary chamber and is always kept closed to the outside world, so that the working chamber can be continuously coated.

[0029] According to an embodiment of the present invention, in the above method, there are two auxiliary chambers, one for loading new samples and the other for receiving samples from the working chamber.

[0030] According to one embodiment of the present invention, the continuous coating method further comprises the following steps:

[0031] The auxiliary chamber for carrying samples from the working chamber is moved to an entrance position of the working chamber, wherein the auxiliary chamber for carrying samples from the working chamber is loaded with new samples to be coated while unloading the coated samples.

[0032] According to one embodiment of the present invention, the continuous coating method further comprises the following steps:

[0033] The auxiliary chamber for transferring the sample to the working chamber is moved to an outlet position of the working chamber, wherein the sample in the auxiliary chamber for transferring the sample to the working chamber has been transferred.

[0034] According to one embodiment of the present invention, in the above method, before the auxiliary cavity is connected to the working cavity, the auxiliary cavity is connected to a closed buffer cavity, wherein the working cavity is accommodated in the buffer cavity.

[0035] According to one embodiment of the present invention, in the above method, the sample from the auxiliary chamber is transferred to the buffer chamber by a movable loading device and the sample temporarily stored in the buffer chamber is coated in the working chamber, wherein the buffer chamber remains closed to the outside during the process of being connected to the auxiliary chamber.

[0036] According to one embodiment of the present invention, in the above method, the sample from the auxiliary chamber is transferred to the buffer chamber by a movable loading device, and the buffer chamber and the working chamber are fed with raw materials through a feeding device to maintain a balanced concentration of raw materials inside and outside the working chamber, wherein the buffer chamber remains closed to the outside world during the process of being connected to the auxiliary chamber.

[0037] According to one embodiment of the present invention, in the above method, the auxiliary chamber and the working chamber are formed by moving a movable partition of a coating chamber relative to a coating wall, so that the working chamber and the auxiliary chamber can be adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 A continuous coating apparatus according to a preferred embodiment of the present invention is schematically shown.

[0039] Figure 2A 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0040] Figure 2B 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0041] Figure 2C 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0042] Figure 3 It is a schematic diagram of the continuous coating equipment according to another preferred embodiment of the present invention.

[0043] Figure 4A 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0044] Figure 4B 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0045] Figure 4C 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0046] Figure 5 It is a schematic diagram of the continuous coating equipment according to another preferred embodiment of the present invention.

[0047] Figure 6A 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0048] Figure 6B 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0049] Figure 6C 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0050] Figure 7 It is a schematic diagram of the continuous coating equipment according to another preferred embodiment of the present invention.

[0051] Figure 8A 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0052] Figure 8B 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0053] Figure 9 It is a schematic diagram of the continuous coating equipment according to another preferred embodiment of the present invention.

[0054] Figure 10A 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention.

[0055] Figure 10B 2 is a schematic diagram of the application of the continuous coating equipment according to the above preferred embodiment of the present invention. DETAILED DESCRIPTION

[0056] The following description is intended to disclose the present invention so that those skilled in the art can implement the present invention. The preferred embodiments described below are for illustrative purposes only, and those skilled in the art will readily appreciate other obvious variations. The basic principles of the present invention defined in the following description may be applied to other embodiments, variations, improvements, equivalents, and other technical solutions that do not depart from the spirit and scope of the present invention.

[0057] Those skilled in the art should understand that, in the disclosure of the present invention, the terms "longitudinal", "transverse", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside" and the like to indicate orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the above terms should not be understood as limiting the present invention.

[0058] It is to be understood that the term "one" should be understood as "at least one" or "one or more", that is, in one embodiment, the number of an element may be one, while in another embodiment, the number of the elements may be multiple, and the term "one" should not be understood as a limitation on the quantity.

[0059] Reference Attachment Figure 1 To the attached Figure 2C As shown, a continuous coating device 1 according to a preferred embodiment of the present invention is schematically shown.

[0060] The continuous coating equipment 1 can form at least two chambers, one of which is a working chamber 100 for coating the surface of the sample to be coated, and at least one is an auxiliary chamber 200, wherein the auxiliary chamber 200 is used to save time waiting for the vacuum degree of the working chamber 100 to be controlled at a preset value.

[0061] In detail, the continuous coating device 1 may include a working chamber 10, at least one auxiliary chamber 20, a feeding device 30, a discharge device 40, and a vacuum device 50, wherein the working chamber 10 may form the working chamber 100, the auxiliary chamber 20 may form the auxiliary chamber 200, the feeding device 30 is used to transport raw materials to the working chamber 100 of the working chamber 10, and the discharge device 40 is used to discharge into the working chamber 100 of the working chamber 10 to provide an environment that meets the requirements, so that at least part of the raw materials react to generate plasma, thereby depositing a film layer on the surface of the sample to be coated. The vacuum device 50 is used to control the vacuum degree of the working chamber 100 of the working chamber 10, and can increase or decrease the vacuum degree of the working chamber 100.

[0062] It is understandable that the vacuuming device 50 can not only control the vacuum degree of the working chamber 100 of the working chamber 10 , but also control the vacuum degree of the auxiliary chamber 200 of the auxiliary chamber 20 .

[0063] The vacuum pumping device 50 can simultaneously control the vacuum levels of the working chamber 100 of the working chamber 10 and the auxiliary chamber 200 of the auxiliary chamber 20, or can separately control the vacuum levels of the working chamber 100 of the working chamber 10 and the auxiliary chamber 200 of the auxiliary chamber 20. The vacuum pumping device 50 includes at least one exhaust unit 51, wherein the number of the exhaust unit 51 can be one, and the vacuum levels of the working chamber 100 of the working chamber 10 and the auxiliary chamber 200 of the auxiliary chamber 20 can be separately controlled by the same exhaust unit 51. The number of the exhaust units 51 can be two or more, wherein one exhaust unit 51 can control the vacuum level of the working chamber 100 of the working chamber 10, while the other exhaust units 51 can control the vacuum level of the auxiliary chamber 200 of the auxiliary chamber 20. It is understandable that when the number of the auxiliary cavities 200 of the auxiliary cavity 20 is two or more, they can be controlled simultaneously by one exhaust unit 51 or each auxiliary cavity 200 of the auxiliary cavity 20 can be provided with one exhaust unit 51.

[0064] Furthermore, the exhaust unit 51 may also include a primary exhaust module 511 and a secondary exhaust module 512, wherein the primary exhaust module 511 may include a mechanical pump with a high exhaust speed, a Roots pump, a cylinder, and a fore-stage valve controlled by an electromagnetic valve, and the secondary exhaust module 512 may include at least one high vacuum exhaust pump. When controlling the vacuum degree of the working chamber 100 of the working chamber 10 or the auxiliary chamber 200 of the auxiliary chamber 20, the primary exhaust module 511 may be started to exhaust until the vacuum degree reaches a preset value, and then the secondary exhaust module 512 may be started to exhaust until the required vacuum degree is reached. The recovery process of the working chamber 100 of the working chamber 10 or the auxiliary chamber 200 of the auxiliary chamber 20 is to start the control valve installed on the equipment, thereby introducing air or protective gas to increase the air pressure of the working chamber 100 or the auxiliary chamber 200.

[0065] Furthermore, the continuous coating device 1 further includes a loading device 60 , wherein the loading device 60 can be installed in the working chamber 10 and is used to carry the sample to be coated so that the sample to be coated is maintained at a certain position.

[0066] The loading device 60 is rotatably mounted on the working chamber 10 relative to the working chamber 10. When the loading device 60 moves, the sample to be coated located on the loading device 60 also moves with the loading device 60 relative to the working chamber 10. Specifically, after the raw material enters the working chamber 100 of the working chamber 10 through the feeding device 30, it is unevenly distributed within the working chamber 100 for various reasons, which may result in a poor final coating effect. The thickness of the film formed on the surface of the sample to be coated at different positions of the loading device 60 may be different. In other words, the thickness of the film formed on the surface of the sample to be coated of the same batch is difficult to guarantee. If the loading device 60 rotates and drives the sample to be coated to move together, on the one hand, the concentration of the raw material in the working chamber 100 of the working chamber 10 can be distributed more evenly, and on the other hand, the sample to be coated can also come into contact with the raw material at multiple positions to facilitate uniformity.

[0067] In this embodiment, the loading device 60 may include a rotating rack 61 and at least one carrier 62, wherein the rotating rack 61 is detachably mounted on the working chamber 10 and is drivable to be rotatably mounted on the working chamber 10. The carrier 62 is mounted on the rotating rack 61 and is used to carry the sample to be coated. It is worth mentioning that the carrier 62 can be rotatably mounted on the rotating rack 61, and the carrier 62 can be rotatably mounted on the rotating rack 61. In other words, the carrier 62 can not only rotate on its own, but also revolve around the rotation axis of the rotating rack 61, which is conducive to obtaining a product with uniform coating.

[0068] Furthermore, at least a portion of the loading device 60 is replaceably mounted on the working chamber 10, so that after the coating of the current batch of samples to be coated is completed, the next batch of samples to be coated can be quickly placed in the desired position. Optionally, the carrier 62 of the loading device 60 is replaceably mounted on the turntable 61, so that the current batch of samples that have completed coating can be quickly replaced by the carrier 62 loaded with the next batch of samples to be coated, or the entire loading device 60 is replaceably mounted on the turntable 61, so that the current batch of samples that have completed coating can be quickly replaced by the loading device 60 loaded with the next batch of samples to be coated.

[0069] In this embodiment, the entire loading device 60 is replaceable as an example for description. Those skilled in the art will appreciate that the replacement method of the samples of the previous batch and the next batch is not limited to this.

[0070] The loading device 60 may further include a moving unit 63, wherein the moving unit 63 is installed at the bottom end of the rotating frame 61 and can drive the rotating frame 61 or the platform 62 to move. The moving unit 63 may be a roller, a track, or a mechanical leg.

[0071] The continuous coating apparatus 1 may further include a guide rail 90 , which may extend between the auxiliary chamber 20 and the working chamber 10 to guide the loading device 60 to move between the auxiliary chamber 20 and the working chamber 10 .

[0072] The loading device 60 can be actively moved between the auxiliary chamber 20 and the working chamber 10, or can be passively moved between the auxiliary chamber 20 and the working chamber 10. For example, an operator can control the movement path of the loading device 60, or the loading device 60 can move automatically based on the surrounding environment.

[0073] After the samples carried by the loading device 60 in the continuous coating apparatus 1 have been coated, the loading device 60 located in the working chamber 10 can be moved to the auxiliary chamber 20 by the moving unit 63. The vacuum levels of the auxiliary chamber 20 and the working chamber 10 are similar, for example, the air pressures of the two are the same, or the air pressure in the auxiliary chamber 20 is lower than the air pressure in the working chamber 10, so that the gas in the auxiliary chamber 20 will not enter the working chamber 10, thereby avoiding affecting the working chamber 10. Another loading device 60 loaded with samples to be coated can enter the working chamber 100 of the working chamber 10 through another auxiliary chamber 200 to carry out the next batch of coating.

[0074] In other words, in this embodiment, there are two auxiliary chambers 20, one of the auxiliary chambers 20 is a front chamber, and the other auxiliary chamber 20 is a rear chamber. The loading device 60 first enters the front auxiliary chamber 20, and the front auxiliary chamber 20 is evacuated to a preset value, and then the front auxiliary front chamber is connected to the working chamber 10. Since the air pressure of the front auxiliary chamber 20 and the working chamber 10 are similar or the air pressure of the front auxiliary chamber 20 is lower than the air pressure of the working chamber 10, the connection of the front auxiliary chamber 20 to the working chamber 10 does not cause too much impact on the working chamber 10, and the loading device 60 can move from the auxiliary chamber 200 of the front auxiliary chamber 20 to the working chamber 10 of the working chamber 10.

[0075] It is understandable that the loading device 60 can be automatically moved from the auxiliary cavity 20 to the working cavity 10, or can be passively moved from the auxiliary cavity 20 to the working cavity 10. The loading device 60 can be an electric trolley that enters the working cavity 10 from the auxiliary cavity 20 along a preset path, or the loading device 60 can be operated by relevant personnel to enter the working cavity 10 from the auxiliary cavity 20. Of course, the loading device 60 can also be moved in other ways. For example, the loading device 60 can be a mechanical motion device that can be driven by other mechanical devices to move between the auxiliary cavity 20 and the working cavity 10. It should be understood by those skilled in the art that the transfer method of the loading device 60 between the auxiliary cavity 20 and the working cavity 10 can be diverse and is not limited to the above examples.

[0076] Furthermore, after the loading device 60 from the preceding auxiliary chamber 20 is moved to the working chamber 10 and to a suitable position within the working chamber 10, the loading device 60 can be driven to rotate about a fixed axis, for example, the rotating frame 61 can rotate on its own. The feeding device 30, the vacuum pumping device 50, and the discharge device 40 can cooperate with each other to provide a suitable plasma coating environment in the working chamber 100 of the working chamber 10, thereby forming a film layer of suitable thickness on the surface of the sample to be coated in the loading device 60. During this process, the preceding auxiliary chamber 20 and the working chamber 10 remain sealed, and the auxiliary chamber 200 of the preceding auxiliary chamber 20 becomes an independent part again.

[0077] After coating is completed in the working chamber 10, the auxiliary chamber 20, which was originally independent of the working chamber 10, is connected to the working chamber 100 of the working chamber 10, so that the loading device 60 loaded with the coated sample can move from the working chamber 100 to the auxiliary chamber 200 of the auxiliary chamber 20. After the loading device 60 completely enters the auxiliary chamber 20, the auxiliary chamber 20 and the working chamber 10 are again sealed. During this process, another loading device 60 carrying a sample to be coated can enter the working chamber 100 of the working chamber 10.

[0078] It is worth mentioning that, for the working chamber 10, it originally takes a long time to evacuate to the required value. However, since the front auxiliary chamber 20 and the rear auxiliary chamber 20 are provided, the working chamber 10 does not need to spend much time on evacuation during the process of the sample entering and exiting the working chamber 10.

[0079] When the sample in the working chamber 10 needs to be taken out and a new sample to be coated is put back in, since the vacuum degree of the working chamber 10 is similar to the vacuum degree of the front auxiliary chamber 20 or the rear auxiliary chamber 20, the vacuum degree of the working chamber 100 of the working chamber 10 fluctuates little and no readjustment is required or only slight adjustment is required.

[0080] As for the auxiliary chamber 20, no matter it is the front auxiliary chamber 20 or the rear auxiliary chamber 20, after the sample enters the front auxiliary chamber 20 or before entering the rear auxiliary chamber 20, the auxiliary chamber 20 needs to be evacuated so as not to cause excessive impact on the working chamber 10 when it is connected to the working chamber 10.

[0081] In other words, each of the auxiliary chambers 20 and the working chamber 10 has a closed state and a connected state and is operably switched between the closed state and the connected state. In the connected state, samples can be transferred between the auxiliary chamber 20 and the working chamber 10 and remain closed to the outside world. In the closed state, the auxiliary chamber 20 and the working chamber 10 remain independent. In the closed state, at least one of the auxiliary chambers 20 in which the uncoated sample is placed is evacuated in advance to prepare for connecting to the working chamber 10 to transfer the sample to be coated. At least one of the auxiliary chambers 20 is evacuated in advance to prepare for connecting to the working chamber 10 to receive the sample from the working chamber 10, so that the vacuum degree of the working chamber 10 can be controlled within a preset range when the working chamber 10 switches between the closed state and the connected state, so that the working chamber 10 can operate continuously.

[0082] In this embodiment, the two auxiliary chambers 20 can be respectively arranged on the same side of the working chamber 10, or respectively arranged on both sides of the working chamber 10. The shape of the working chamber 10 can be a cube or a cylindrical structure, so that when the rotating rack 61 of the loading device 60 is cylindrical, the gas around the loading device 60 arranged at the central axis position of the working chamber 10 can be distributed more evenly.

[0083] The working chamber 10 may have at least one opening, for example, two openings, one for connecting the working chamber 10 with the anterior auxiliary chamber 20, and the other for connecting the working chamber 10 with the posterior auxiliary chamber 20. The two openings may be closed or opened, respectively, so that the working chamber 10 and the auxiliary chamber 20 are independent of each other or connected to each other. In other words, the working chamber 10 may have an inlet 101 and an outlet 102, and the inlet 101 and the outlet 102 may be different openings.

[0084] It is worth noting that the number of the auxiliary chambers 20 can be two or one, and the same auxiliary chamber 20 can be used as the front auxiliary chamber 20 to transfer the sample to be coated to the working chamber 10, or as the rear auxiliary chamber 20 to transfer the coated sample from the working chamber 10.

[0085] For example, a new sample to be coated is placed in the working chamber 10, and then coating begins. During this process, the auxiliary chamber 200 of the auxiliary chamber 20 is connected to the outside, so that the new sample to be coated outside is transferred to the auxiliary chamber 200 of the auxiliary chamber 20, and then the auxiliary chamber 200 of the auxiliary chamber 20 is vacuumed. After the coating process in the working chamber 10 is completed, the coated sample can be transferred to the auxiliary chamber 20, and then the new sample to be coated in the auxiliary chamber 20 can be transferred to the working chamber 10. In other words, the auxiliary chamber 200 of the auxiliary chamber 20 can be configured to accommodate at least two batches of samples to be coated.

[0086] Reference Attachment Figure 3 To the attached Figure 4C As shown, the continuous coating device 1 according to another preferred embodiment of the present invention is schematically shown.

[0087] In this embodiment, the continuous coating equipment 1 includes the working chamber 10, the two auxiliary chambers 20, the feeding device 30, the discharge device 40, the vacuum pumping device 50 and the loading device 60, wherein the loading device 60 is drivable and rotatably installed on the working chamber 10.

[0088] The auxiliary cavity 20 is movably provided relative to the working cavity 10 . Specifically, the positions of the two auxiliary cavities 20 can be interchanged.

[0089] The two auxiliary chambers 20 are respectively referred to as a first auxiliary chamber 20A and a second auxiliary chamber 20B, wherein the first auxiliary chamber 20A and the second auxiliary chamber 20B are respectively conductively connected to the working chamber 10 .

[0090] When the working chamber 100 of the working chamber 10 is evacuated to a desired vacuum state, the first auxiliary chamber 20A can be transferred with the sample to be coated and also evacuated to a desired value. When the vacuum levels of the working chamber 100 of the working chamber 10 and the auxiliary chamber 200 of the first auxiliary chamber 20A respectively reach the required values, the working chamber 100 of the working chamber 10 can be connected to the first auxiliary chamber 20A, so that the sample to be coated in the first auxiliary chamber 20A can be transferred to the working chamber 100. During this process, the second auxiliary chamber 20B can be placed with a new sample to be coated and evacuated, so that after the working chamber 10 completes the coating of the first batch of samples, the second batch of samples can be transferred to the working chamber 10.

[0091] The first auxiliary chamber 20A, which is vacant after the first batch of samples are taken out, can be moved to the take-out opening position of the working chamber 10 to receive the first batch of samples from the working chamber 10 after the coating is completed.

[0092] When the first batch of samples is transferred from the working chamber 10 to the first auxiliary chamber 20A, the second batch of samples in the second auxiliary chamber 20B can be transferred to the working chamber 10, and the empty second auxiliary chamber 20B can be moved to the removal opening of the working chamber 10 to receive the second batch of samples that have been coated from the working chamber 10. After the first batch of samples in the first auxiliary chamber 20A are removed from the first auxiliary chamber 20A and transferred to the preset position, new samples to be coated can be placed in the first auxiliary chamber 20A. The above steps are then repeated.

[0093] This embodiment differs from the previous embodiment in that the positions of the first auxiliary chamber 20A and the second auxiliary chamber 20B are interchangeable. This approach has its unique advantages. Specifically, during the operation of the continuous coating apparatus 1, the most time-consuming process is the time required to evacuate the first auxiliary chamber 20A, the second auxiliary chamber 20B, or the working chamber 10 to a predetermined vacuum value after connecting the first auxiliary chamber 20A, the second auxiliary chamber 20B, or the working chamber 10 to a normal pressure environment.

[0094] If the first auxiliary chamber 20A, the working chamber 10, and the second auxiliary chamber 20B are fixedly arranged, that is, the first auxiliary chamber 20A corresponds to the inlet 101 of the working chamber 10, and the second auxiliary chamber 20B is aligned with the outlet 102 of the working chamber 10, then a new sample to be coated can be reloaded only after the sample to be coated in the first auxiliary chamber 20A is removed. If the coating time of the working chamber 10 is short, the working chamber 10 may need to wait for a period of time before a new sample to be coated can be reloaded. In this embodiment, since the first auxiliary chamber 20A, the second auxiliary chamber 20B, and the working chamber 10 are movably arranged, the time the working chamber 10 uses to wait for a new sample to be coated can be saved.

[0095] In this embodiment, there are two auxiliary chambers 20. It is understood that there may be more than one auxiliary chamber 20. For example, there are three auxiliary chambers 20: the first auxiliary chamber 20A, the second auxiliary chamber 20B, and the third auxiliary chamber 20C. When the first auxiliary chamber 20A is connected to the working chamber 10 to transfer a new sample to be coated to the working chamber 10, the second auxiliary chamber 20B can be used to place the new sample to be coated so that the new sample to be coated can be transferred to the working chamber 10 before the next coating cycle begins. The third auxiliary chamber 20C can be used as a post-positioned auxiliary chamber 20. The first auxiliary chamber 20A, the second auxiliary chamber 20B, and the third auxiliary chamber 20C can serve as the pre-cavity or the post-cavity of the working chamber 10.

[0096] Reference Attachment Figure 5 To the attached Figure 6C FIG. 1 is a schematic diagram of the continuous coating device 1 according to another preferred embodiment of the present invention.

[0097] In this embodiment, the continuous coating device 1 may include the working chamber 10, at least one auxiliary chamber 20, the feeding device 30, the discharge device 40, and the vacuum device 50. There is one working chamber 10 and two auxiliary chambers 20.

[0098] The auxiliary cavity 20 is configured to be variable in size, so as to assist in changing the vacuum degree of the auxiliary cavity 20 by controlling the size of the auxiliary cavity 20 .

[0099] In detail, the continuous coating device 1 may include a coating chamber 70, wherein the coating chamber 70 includes at least two movable partitions 71 and a coating surrounding wall 72, wherein the working chamber 100 of the working chamber 10 is formed between the movable partitions 71, and the auxiliary chamber 200 of the auxiliary chamber 20 may be formed between the movable partitions 71 and the coating surrounding wall 72.

[0100] The auxiliary chamber 200 of the auxiliary chamber 20 is formed by changing the position between the movable partition 71 and the coating wall 72. The coating chamber 70 can have at least two states: one in which the coating chamber 70 functions as the working chamber 10, and the coating chamber 70 is the working chamber 10; the other in which the coating chamber 70 functions as both the working chamber 10 and the auxiliary chamber 20. The working chamber 100 is located between the movable partition 71, and the auxiliary chamber 200 is located between the movable partition 71 and the coating wall 72. There are two auxiliary chambers 200, which can be formed on both sides of the working chamber 10.

[0101] When the sample to be coated needs to be transported to the coating chamber 70 for coating, the entrance of the coating chamber 70 is opened, and the sample to be coated is transported to the auxiliary chamber 20 until the vacuum degree in the auxiliary chamber 20 is controlled to a preset range, and then the auxiliary chamber 20 and the working chamber 10 are connected, so that the sample to be coated in the auxiliary chamber 20 is transported to the working chamber 10.

[0102] When the sample that has been coated needs to be transported to leave the coating chamber 70, the other auxiliary chamber 20 is pre-evacuated to a preset range, and then the auxiliary chamber 20 and the working chamber 10 are connected so that the sample that has been coated is transported to the auxiliary chamber 20, and the auxiliary chamber 200 of the auxiliary chamber 20 is communicatively connected to the outlet of the coating chamber 70, so that the sample that has been coated can leave the coating chamber 70 through the outlet of the coating chamber 70.

[0103] It is worth noting that when the sample to be coated is located in the working chamber 10, the size of the working chamber 100 can be changed by moving the movable partition 71. On the one hand, this allows the operator to adjust the distance between the sample to be coated and the working chamber 10 to control the distribution of the raw materials, and on the other hand, it allows sufficient space for the movement of the loading device 60.

[0104] Reference Attachment Figure 6A To the attached Figure 6CAs shown, when a sample to be coated is transported to the working chamber 100, the auxiliary chamber 200 can be connected to the working chamber 100, so that the entire coating chamber 700 provides a coating environment. When the sample is about to be coated, the auxiliary chamber 200 can be closed again. After a new sample enters the auxiliary chamber 200, it can be re-evacuated to connect to the working chamber 100 in subsequent steps.

[0105] Reference Attachment Figure 7 To the attached Figure 8B FIG. 1 is a schematic diagram of the continuous coating device 1 according to another preferred embodiment of the present invention.

[0106] The continuous coating device 1 may include the working chamber 10 , at least one auxiliary chamber 20 , the feeding device 30 , the discharge device 40 , the vacuum pumping device 50 , and the loading device 60 .

[0107] In this embodiment, the continuous coating device 1 further includes a buffer chamber 80 , wherein the buffer chamber 80 has a buffer cavity 800 , and the working chamber 10 can be accommodated in the buffer cavity 800 .

[0108] The buffer cavity 80 has an inlet and an outlet. The inlet and the outlet of the buffer cavity 80 can be the same opening or different openings. In this embodiment, the inlet and the outlet of the buffer cavity 80 are different openings.

[0109] When one batch of samples to be coated is placed in the working chamber 10 for coating, the next batch of samples to be coated can be transferred to one of the auxiliary chambers 20. The auxiliary chamber 20 loaded with the samples to be coated can be evacuated and then connected to the buffer chamber 800 of the buffer chamber 80, so that the samples to be coated are transported outside the working chamber 100.

[0110] After the coating of the samples to be coated in the working chamber 10 is completed, the samples to be coated outside the working chamber 10 can be transferred into the working chamber 10 to replace the samples of the previous batch.

[0111] It is worth noting that the feed device 30 can also supply material to the buffer chamber 800 of the buffer chamber 80, so that after the working chamber 100 is opened and then reclosed, there is no need to wait too long for the raw material concentration to reach a certain value. In other words, due to the presence of the buffer chamber 80, the raw material concentration inside and outside the working chamber 10 can be maintained within a certain range, thereby facilitating the coating of the surface of the sample to be coated.

[0112] Furthermore, the sample that has been coated and originally located in the working chamber 10 can be transported out of the working chamber 10 through an outlet of the working chamber 10 , and can be transported to the outside after being transferred through the buffer chamber 80 .

[0113] It is worth mentioning that the buffer chamber 80 can not only play a buffering role for the coating raw materials, but also provide a buffering effect in providing a vacuum environment. The loading device 60 from the auxiliary chamber 20 can be transported to the buffer chamber 80, and then the buffer chamber 80 is restored to a closed state, and the empty auxiliary chamber 20 can re-perform the steps of loading and vacuuming to transport new samples to the buffer chamber 80. After the working chamber 10 has completed coating the sample, the working chamber 10 can be transformed into an open state under the vacuum environment provided by the buffer chamber 80, so that the sample to be coated can be carried out into the working chamber 10 for coating. Of course, it is understandable that the sample can also directly enter the already opened working chamber 10 without staying at the buffer chamber 80.

[0114] Reference Attachment Figure 9 To the attached Figure 10B FIG. 1 is a schematic diagram of the continuous coating device 1 according to another preferred embodiment of the present invention.

[0115] The continuous coating device 1 may include the working chamber 10 , at least one auxiliary chamber 20 , the feeding device 30 , the discharge device 40 , the vacuum pumping device 50 , and the loading device 60 .

[0116] In this embodiment, there are multiple loading devices 60, which are respectively installed at various positions of the working chamber 100 of the working chamber body 10. The loading devices 60 are independent of each other and can be of different types to accommodate different batches or different types of samples.

[0117] After the sample placed on one of the plurality of loading devices 60 is coated, it can be transferred to one of the auxiliary chambers 20 , and a new sample can be moved into the working chamber 10 .

[0118] Specifically, the working chamber 10 may be provided with three loading devices 60A, 60B, and 60C. After the sample on the loading device 60A is coated, the working chamber 100 is opened, allowing the loading device 60A to move with the coated sample to one of the auxiliary chambers 20A. During this process, the working chamber 10 maintains the coating of the loading devices 60B and 60C. Alternatively, the other auxiliary chamber 20 can transfer a new sample to be coated to the working chamber 10.

[0119] If the samples on the loading devices 60B and 60C in the working chamber 10 are coated at the same time, the samples can be transferred separately through the two auxiliary chambers 20B and 20C.

[0120] It is understandable that the buffer chamber 80 in the previous embodiment can be arranged before the working chamber 10 to reduce the impact of the opening and closing of the working chamber 10 on the coating environment, thereby facilitating the continuity of the entire coating process.

[0121] It is worth noting that although the loading devices 60A, 60B, and 60C are placed together in the working chamber 10, the loading devices 60A, 60B, and 60C remain independent of each other, and when the working chamber 10 is connected to the auxiliary chamber 20, the distribution of the raw materials in the working chamber 10 can be kept uniform and stable through the control of the feeding by the feeding device 30. Therefore, the loading devices 60B and 60C that do not need to be transferred can still keep rotating the sample during the transfer of the loading device 60A to allow the sample to continue to be coated. Of course, it is understandable that the operator can also choose to temporarily stop feeding or discharging, and resume coating after the working chamber 10 is restored to a closed state.

[0122] According to another aspect of the present invention, the present invention provides a continuous film coating method, wherein the continuous film coating method comprises the following steps:

[0123] Transporting the sample to the working chamber 10 for coating;

[0124] Before the sample coating is completed, the auxiliary chamber 20 loaded with the sample to be coated is pre-evacuated; and

[0125] The auxiliary chamber 20 and the working chamber 100 are connected to transfer the sample to be coated.

[0126] According to another aspect of the present invention, the present invention provides a continuous film coating method, wherein the continuous film coating method comprises the following steps:

[0127] The sample in the working chamber 10 is subjected to film coating;

[0128] Before the sample coating is completed, the auxiliary chamber 20 loaded with the sample to be coated is pre-evacuated; and

[0129] The auxiliary chamber 20 and the working chamber 10 are connected to transfer the next batch of samples to the working chamber 10 , so that the working chamber 10 can continuously perform film coating.

[0130] According to one embodiment of the present invention, in the pre-vacuuming step, pre-vacuuming is performed on an empty auxiliary chamber 20 to facilitate the transfer of the film-coated sample from the working chamber 10 in a subsequent step.

[0131] According to one embodiment of the present invention, in the connecting step, the sample that has been coated is transferred from the working chamber 10 to the auxiliary chamber 20 that originally loaded the sample.

[0132] According to an embodiment of the present invention, in the above method, there are two auxiliary chambers 20 , one for loading new samples and the other for receiving samples that have been coated from the working chamber 10 .

[0133] According to one embodiment of the present invention, the method further comprises the following step: connecting another auxiliary chamber 20 to the outlet of the working chamber 10 to transfer the coated sample from the working chamber 10 .

[0134] According to one embodiment of the present invention, in the above method, before connecting the auxiliary cavity 20 and the working cavity 10 , the auxiliary cavity 20 is first connected to the buffer cavity 80 , wherein the working cavity 10 is accommodated in the buffer cavity 80 .

[0135] According to an embodiment of the present invention, in the above method, the auxiliary chamber 200 is formed by moving the movable partition 71 of the coating chamber 70 relative to the coating surrounding wall 72 .

[0136] According to one embodiment of the present invention, in the above method, a plurality of loading devices 60 loaded with samples are accommodated in the working chamber 10 and can be independently taken out of the working chamber 10 without interfering with other loading devices 60 .

[0137] Those skilled in the art will appreciate that the embodiments of the present invention described above and shown in the accompanying drawings are intended to be illustrative only and are not intended to limit the present invention. The objectives of the present invention have been fully and effectively achieved. The functional and structural principles of the present invention have been demonstrated and illustrated in the embodiments. Any variations or modifications may be made to the embodiments of the present invention without departing from the principles described.

Claims

1. A continuous coating device, suitable for coating a sample to be coated, characterized in that: include: a discharge device; a feeding device; a vacuum device; a working chamber, wherein the working chamber has a working cavity; as well as At least one auxiliary chamber, wherein the auxiliary chamber can form an auxiliary chamber, the auxiliary chamber is used to transfer samples, wherein the discharge device is used to discharge into the working chamber of the working chamber, wherein the feeding device is used to feed into the working chamber of the working chamber, the working chamber and the auxiliary chamber are connected to the vacuum device with controllable vacuum degree, wherein each of the auxiliary chamber and the working chamber has a closed state and a connected state and is operably switched between the closed state and the connected state, and in the connected state, the auxiliary chamber and the working chamber can transfer samples. The sample is transferred and kept closed from the outside, in the closed state, the auxiliary chamber and the working chamber remain independent, wherein in the closed state, at least one of the auxiliary chambers in which the sample to be coated is placed is evacuated in advance to be connected to the working chamber to prepare for transferring the sample to be coated, and at least one of the auxiliary chambers is evacuated in advance to be connected to the working chamber to prepare for receiving the sample from the working chamber, so that the vacuum degree of the working chamber can be controlled within a preset range when switching between the closed state and the connected state, so that the working chamber can operate continuously; The working chamber has an inlet and an outlet, and the inlet of the working chamber and the outlet of the working chamber are openings at different positions on the working chamber; the number of the auxiliary chambers is two and they are respectively implemented as a first auxiliary chamber and a second auxiliary chamber, wherein the first auxiliary chamber has a first auxiliary chamber and is communicably connected to the working chamber of the working chamber, and the second auxiliary chamber has a second auxiliary chamber and is communicably connected to the working chamber of the working chamber, wherein the first auxiliary chamber can be switched between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber, and the second auxiliary chamber can be switched between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber; When the working chamber of the working chamber is evacuated to a vacuum state, the sample to be coated is transferred into the first auxiliary chamber and is also evacuated to a desired value; when the vacuum levels of the working chamber of the working chamber and the first auxiliary chamber of the first auxiliary chamber respectively meet the requirements, the working chamber of the working chamber is connected to the first auxiliary chamber, so that the sample to be coated in the first auxiliary chamber is transferred to the working chamber; In this process, the second auxiliary chamber is placed with new samples to be coated and is evacuated so that after the working chamber completes coating of the first batch of samples, the second batch of samples can be transferred to the working chamber; The first auxiliary chamber, which has been vacant after the first batch of samples has been taken out, is moved to the take-out opening position of the working chamber to receive the first batch of samples from the working chamber after the coating process has been completed. When the first batch of samples is transferred from the working chamber to the first auxiliary chamber, the second batch of samples in the second auxiliary chamber can be transferred to the working chamber, and the empty second auxiliary chamber can be moved to the removal opening position of the working chamber to receive the second batch of samples from the working chamber that have been coated. After the first batch of samples in the first auxiliary chamber are taken out from the first auxiliary chamber, new samples to be coated can be placed in the first auxiliary chamber.

2. The continuous coating device according to claim 1, wherein the continuous coating device further comprises a coating chamber, wherein the coating chamber comprises at least two movable partitions and a coating surrounding wall, wherein the working chamber is formed between the movable partitions, and the auxiliary chamber is formed between the movable partitions and the coating surrounding wall.

3. The continuous coating equipment according to claim 1, wherein the continuous coating equipment further comprises a buffer chamber, wherein the buffer chamber has a buffer chamber, the working chamber is arranged in the buffer chamber of the buffer chamber, and the auxiliary chamber is communicatively connected to the buffer chamber.

4. The continuous coating device according to claim 3, wherein the continuous coating device further comprises a loading device, wherein the loading device is suitable for loading the sample to be coated, the auxiliary chamber is connected to the buffer chamber, and the loading device is suitable for moving from the auxiliary chamber of the auxiliary chamber to the buffer chamber of the buffer chamber, and then the loading device is suitable for being moved from the buffer chamber of the buffer chamber to the working chamber of the working chamber.

5. The continuous coating equipment according to claim 4, wherein the buffer chamber is communicatively connected to the feeding device, and the feeding device is suitable for feeding the buffer chamber so that raw materials can be supplied both inside and outside the working chamber.

6. The continuous coating device according to any one of claims 1 to 2, wherein the continuous coating device further comprises at least one loading device, wherein the loading device comprises a moving unit and a turntable, wherein the turntable is movably supported on the moving unit, wherein the sample is suitable for being mounted on the turntable and moving with the turntable.

7. The continuous coating device according to claim 6, wherein the continuous coating device further comprises a guide rail, wherein the guide rail is arranged between the auxiliary chamber and the working chamber to guide the loading device to move between the auxiliary chamber and the working chamber.

8. The continuous coating equipment according to claim 6, wherein the number of the loading devices is at least two, wherein the turntable of the loading device is rotatably and independently accommodated in the working chamber of the working chamber, and the sample set on any one of the turntables can be transferred to the auxiliary chamber after coating.

9. A continuous coating method, characterized in that: The steps include: For coating a sample in a closed working chamber maintained at a preset vacuum degree; Before the sample coating is completed, pre-vacuuming an auxiliary chamber loaded with the sample to be coated; and After the sample in the working chamber is coated, the sample in the auxiliary chamber is transferred to the working chamber, and the coated sample in the working chamber is transferred to another pre-vacuumed auxiliary chamber, wherein during the transfer process, the working chamber is opened to communicate with the auxiliary chamber and is always kept closed to the outside, so that the working chamber can be continuously coated; The working chamber has an inlet and an outlet, and the inlet of the working chamber and the outlet of the working chamber are openings at different positions on the working chamber; the number of the auxiliary chambers is two and they are respectively implemented as a first auxiliary chamber and a second auxiliary chamber, wherein the first auxiliary chamber has a first auxiliary chamber and is communicably connected to the working chamber of the working chamber, and the second auxiliary chamber has a second auxiliary chamber and is communicably connected to the working chamber of the working chamber, wherein the first auxiliary chamber can be switched between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber, and the second auxiliary chamber can be switched between being connected to the working chamber by being connected to the inlet of the working chamber and being connected to the working chamber by being connected to the outlet of the working chamber; When the working chamber of the working chamber is evacuated to a vacuum state, the sample to be coated is transferred into the first auxiliary chamber and is also evacuated to a desired value; when the vacuum levels of the working chamber of the working chamber and the first auxiliary chamber of the first auxiliary chamber respectively meet the requirements, the working chamber of the working chamber is connected to the first auxiliary chamber, so that the sample to be coated in the first auxiliary chamber is transferred to the working chamber; In this process, the second auxiliary chamber is placed with new samples to be coated and is evacuated so that after the working chamber completes coating of the first batch of samples, the second batch of samples can be transferred to the working chamber; The first auxiliary chamber, which has been vacant after the first batch of samples has been taken out, is moved to the take-out opening position of the working chamber to receive the first batch of samples from the working chamber after the coating process has been completed. When the first batch of samples is transferred from the working chamber to the first auxiliary chamber, the second batch of samples in the second auxiliary chamber can be transferred to the working chamber, and the empty second auxiliary chamber can be moved to the removal opening position of the working chamber to receive the second batch of samples from the working chamber that have been coated. After the first batch of samples in the first auxiliary chamber are taken out from the first auxiliary chamber, new samples to be coated can be placed in the first auxiliary chamber.

10. The continuous coating method according to claim 9, wherein in the above method, before the auxiliary chamber is connected to the working chamber, the auxiliary chamber is connected to a closed buffer chamber, wherein the working chamber is accommodated in the buffer chamber.

11. The continuous coating method according to claim 10, wherein in the above method, the sample from the auxiliary chamber is transferred to the buffer chamber by a movable loading device and the coating of the sample temporarily stored in the buffer chamber to the working chamber is completed, wherein the buffer chamber remains closed to the outside during the process of being connected to the auxiliary chamber.

12. The continuous coating method according to claim 10, wherein in the above method, the sample from the auxiliary chamber is transferred to the buffer chamber by a movable loading device, and the buffer chamber and the working chamber are fed with raw materials through a feeding device to maintain a balanced concentration of raw materials inside and outside the working chamber, wherein the buffer chamber remains closed to the outside world during the process of being connected to the auxiliary chamber.

13. The continuous coating method according to claim 9, wherein in the above method, the auxiliary chamber and the working chamber are formed by moving a movable partition of a coating chamber relative to a coating wall, so that the working chamber and the auxiliary chamber can be adjusted.

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