A driving mechanism for an electron microscope detector and an electron microscope detector device

Abstract

A driving mechanism for an electron microscope detector and an electron microscope detector including the driving mechanism belong to the technical field of electron microscopes. The driving mechanism includes a fixed part connected to a sample chamber; a telescopic part connected to the fixed part in a telescopic manner, the sample chamber is provided with an opening, and the telescopic part includes a telescopic portion on which the detector is installed, the telescopic portion passes through the opening and is driven to move the detector telescopically. The present invention drives the telescopic part located on the fixed part to move the detector located in the sample chamber and on the telescopic portion, thereby changing the position of the detector. When the detector is not needed, it is only necessary to change the position of the detector to separate it from the electron optical system without taking the detector out of the sample; this operation method is simple and fast.

Description

Technical Field

[0001] The present invention relates to the technical field of electron microscopes, and in particular to a driving mechanism of an electron microscope detector and an electron microscope detector device. Background Art

[0002] An electron microscope, whose full name is an electron microscope, includes a lens barrel, a vacuum device, a power cabinet, etc. There are four main types: transmission electron microscope, scanning electron microscope, reflection electron microscope, and emission electron microscope. Taking the scanning electron microscope as an example, it uses a focused electron beam to scan the surface of the sample point by point, interacting with the sample to generate various physical signals. These signals are received, amplified and converted into modulated signals by the detector, and finally an image reflecting the various features of the sample surface is displayed on the fluorescent screen.

[0003] In order to use an electron microscope for detection and analysis, an electron microscope detector is required. The electron microscope detector is located in the sample chamber under the lens barrel. The different placement positions of the electron microscope detector will affect the electron microscope detector's collection effect on the electron microscope signal. If the electron microscope detector is not properly placed, it may not receive a signal or the received signal is very weak, thereby affecting the analysis accuracy. However, the existing electron microscope detector uses a detachable fixing frame to install the electron microscope detector in the sample chamber. When the position of the electron microscope detector needs to be adjusted, it needs to be disassembled to replace the fixing frame or adjust the position of the electron microscope detector on the fixing frame to achieve the position adjustment of the electron microscope detector; and when the electron microscope detector is not needed during the detection and analysis process, the electron microscope detector needs to be removed from the sample chamber of the electron microscope together with the fixing frame, and then installed when it is used, which makes its operation very complicated and cannot achieve the problem of rapid positioning and adjustment of the detector position. Summary of the invention

[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art that the electron microscope detector is installed through a detachable fixing frame, which makes its operation very complicated and cannot achieve the rapid adjustment of the detector position, thereby providing a driving mechanism for the electron microscope detector and an electron microscope detector device.

[0005] The present invention provides the following technical solutions:

[0006] A driving mechanism for an electron microscope detector, comprising:

[0007] a fixing member connected to the sample chamber;

[0008] The telescopic member is connected to the fixed member in a telescopic manner. The sample chamber is provided with an opening. The telescopic member comprises a telescopic portion on which a detector is installed. The telescopic portion passes through the opening and is driven to drive the detector to telescopically move.

[0009] Optionally, the fixing member and the telescopic member are provided with an axial limiting structure and / or a circumferential limiting structure;

[0010] The axial limiting structure is used to limit the telescopic position of the telescopic member along the telescopic movement direction;

[0011] The circumferential limiting structure is used to limit the rotational position of the telescopic member along the circumferential direction with the telescopic movement direction as the axis.

[0012] Optionally, the fixing member is an outer sleeve, and the telescopic member is a telescopic rod telescopically arranged in the outer sleeve.

[0013] Optionally, the axial limiting structure includes: a first clamping piece arranged on one of the outer sleeve and the telescopic rod, and a first clamping groove arranged on the other of the outer sleeve and the telescopic rod; the first clamping piece is driven to be plugged and connected with the first clamping groove.

[0014] Optionally, there are at least two first slots, which are arranged along the length direction of the telescopic rod.

[0015] Optionally, the axial limiting structure further includes: a biasing member for pushing the first clamping member to extend toward the first clamping groove.

[0016] Optionally, the first clamping member is a ball embedded in the outer sleeve, and the biasing member is an annular elastic element sleeved on the outer cavity wall of the outer sleeve and abutting against the ball.

[0017] Optionally, a stopper is provided on the outer sleeve for preventing the annular elastic element from rotating along the circumferential direction of the outer sleeve.

[0018] Optionally, there are multiple balls arranged in the circumferential direction of the outer sleeve; the first groove is an annular recessed hole adapted to the shape of the balls.

[0019] Optionally, an annular receiving groove matching the shape of the annular elastic element is provided on the outer cavity wall of the outer sleeve.

[0020] Optionally, the circumferential limiting structure includes: a second clamping piece arranged on one of the outer sleeve and the telescopic rod, and a second clamping groove arranged in the circumferential direction of the other of the outer sleeve and the telescopic rod; the second clamping piece is driven to be plugged into and connected with the second clamping groove.

[0021] Optionally, the second slot is a strip-shaped slot arranged along the telescopic movement direction.

[0022] Optionally, the telescopic member further comprises: a hand-held portion provided at one end of the telescopic rod away from the detector to pull the telescopic rod to perform telescopic motion.

[0023] An electron microscope detection device, comprising:

[0024] An electron microscope detector and a driving mechanism for the electron microscope detector.

[0025] The technical solution of the present invention has the following advantages:

[0026] 1. The driving mechanism of the electron microscope detector provided by the present invention includes: a fixed part connected to the sample chamber; a telescopic part connected to the fixed part in a telescopic manner, the sample chamber is provided with an opening, and the telescopic part includes: a telescopic part on which the detector is installed, the telescopic part passes through the opening and is driven to drive the detector to move telescopically.

[0027] The electron microscope detector in the prior art is installed by a detachable fixing frame, which leads to the defect that its operation is very complicated and cannot achieve the defect of quickly adjusting the position of the detector. The present invention drives the telescopic member located on the fixing member to drive the detector located in the sample chamber and located on the telescopic part to move, so as to change the position of the detector. When the detector is not needed, it is only necessary to change the position of the detector to separate it from the electron optical system without taking the detector out of the sample. Through the above structure, the electron microscope detector in the present invention does not need to disassemble the fixing frame used to fix the electron microscope detector, and the position adjustment of the detector can be achieved, thereby realizing the separation of the detector from the electron optical system, and the function of position fine-tuning. This operation method has the advantages of simple and fast operation.

[0028] 2. The driving mechanism of the electron microscope detector provided by the present invention is provided with an axial limiting structure and / or a circumferential limiting structure on the fixed part and the telescopic part; the axial limiting structure is used to limit the telescopic position of the telescopic part along the telescopic moving direction; the circumferential limiting structure is used to limit the rotational position of the telescopic part along the circumferential direction with the telescopic moving direction as the axis.

[0029] The axial limiting structure can limit the telescopic position of the telescopic part along the telescopic movement direction, thereby positioning the detector; the circumferential limiting structure can limit the rotational position of the telescopic part along the circumferential direction with the telescopic movement direction as the axis, thereby preventing the detector from rotating in the sample chamber and avoiding affecting the analysis accuracy of the detector.

[0030] 3. In the driving mechanism of the electron microscope detector provided by the present invention, the fixing part is an outer sleeve, and the telescopic part is a telescopic rod telescopically arranged in the outer sleeve.

[0031] The outer sleeve itself can play a certain limiting role on the telescopic member, so that the telescopic member is more stable during the telescopic movement and will not produce obvious movement.

[0032] 4. The driving mechanism of the electron microscope detector provided by the present invention, the axial limiting structure includes: a first clamping piece arranged on one of the outer sleeve and the telescopic rod, and a first slot arranged on the other of the outer sleeve and the telescopic rod; the first clamping piece is driven to be plugged into and connected with the first slot; and also includes a biasing piece for pushing the first clamping piece to extend toward the first slot; the first clamping piece is a ball embedded in the outer sleeve, and the biasing piece is an annular elastic element sleeved on the outer cavity wall of the outer sleeve and abutting against the ball.

[0033] When the first slot moves to the position of the first clamping member, the biasing member can automatically press the first clamping member into the first slot to achieve positioning. When it is necessary to move out of the positioning, it is only necessary to drive the telescopic rod, and the telescopic rod can press the first clamping member out of the first slot. This limiting structure has a simple structure, is easy to operate, and is also easy to disassemble, repair and replace.

[0034] 5. The driving mechanism of the electron microscope detector provided by the present invention has at least two first slots, which are arranged along the length direction of the telescopic rod.

[0035] The number of the first slots can allow the telescopic rod to have multiple positioning positions, which firstly facilitates positioning of the detector's use position and disengagement position, and further, through the multiple positioning positions, multiple detectors can be installed on the telescopic part.

[0036] 6. The driving mechanism of the electron microscope detector provided by the present invention has an outer sleeve provided with a stopper for blocking the annular elastic element from rotating along the circumferential direction of the outer sleeve, and an annular receiving groove matching the shape of the annular elastic element is provided on the outer cavity wall of the outer sleeve.

[0037] The stopper is used to prevent the annular elastic element from rotating, and the annular receiving groove is used to prevent the annular elastic element from moving, thereby preventing the ball from falling out.

[0038] 7. The driving mechanism of the electron microscope detector provided by the present invention, the circumferential limiting structure includes: a second clamping piece arranged on one of the outer sleeve and the telescopic rod, and a second clamping groove arranged in the circumferential direction of the other of the outer sleeve and the telescopic rod; the second clamping piece is driven to be plugged into and connected with the second clamping groove; the second clamping groove is a strip groove arranged along the telescopic movement direction.

[0039] The second clamping piece and the second clamping groove are arranged so as to prevent the detector from rotating in the sample chamber and affecting the analysis accuracy without affecting the telescopic movement of the telescopic rod.

[0040] 8. The electron microscope detection device provided by the present invention includes: an electron microscope detector, and a driving mechanism of the electron microscope detector, wherein the driving mechanism of the electron microscope detector includes: a fixed part connected to a sample chamber; a telescopic part connected to the fixed part in a telescopic manner, wherein the sample chamber is provided with an opening, and the telescopic part includes: a telescopic part on which the detector is installed, wherein the telescopic part passes through the opening and is driven to telescopically move the detector.

[0041] When the detector of the electron microscope detection device needs to be separated from the electron optical system, there is no need to remove the present invention from the sample. It is only necessary to drive the telescopic part to drive the detector to move so as to separate from the electron optical system. At the same time, the position of the detector can be adjusted by driving the telescopic part, which is simple and fast to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] In order to more clearly illustrate the technical solutions in the specific implementation modes of the present invention, the drawings required for use in the description of the specific implementation modes will be briefly introduced below. Obviously, the drawings described below are some implementation modes of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0043] Figure 1 A front cross-sectional view of a first embodiment of the present invention;

[0044] Figure 2 A bottom view of a first embodiment of the present invention;

[0045] Figure 3 It is a schematic structural diagram of the first embodiment of the present invention.

[0046] Description of reference numerals:

[0047] 1. Hand-held part, 2. Stopper, 3. First clamping part, 4. Biasing part, 5. Outer sleeve, 6. Telescopic part, 7. First clamping slot, 8. Second clamping part, 9. Interface flange, 10. Bolt-on sheet, 11. Mounting frame. DETAILED DESCRIPTION

[0048] The technical solution of the present invention will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0049] In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0050] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] Example 1

[0053] This embodiment provides a driving mechanism for an electron microscope detector, such as Figure 1-Figure 3 As shown, it includes: a fixing part connected to the sample chamber and a telescopic part which is telescopically connected to the fixing part.

[0054] In this embodiment, the fixing member is an outer sleeve 5, one end of which is fixedly connected to the interface flange 9 by bolts. The interface flange 9 is fixed at the opening of the sample chamber, and a passage for the telescopic member to pass through is provided therein, and a protective sleeve for protecting the telescopic member is provided in the passage.

[0055] In this embodiment, the telescopic member is a telescopic rod telescopically arranged in the outer sleeve 5, and the end of the telescopic rod on which the detector is installed is the telescopic part 6. The telescopic part 6 passes through the opening of the sample chamber and is connected to the mounting frame 11 for mounting the detector through an L-shaped bolt piece 10. The end of the telescopic rod away from the detector is provided with a handheld part 1 for pulling it to perform a telescopic action. The handheld part 1 drives the telescopic part 6 to move, thereby driving the detector to move telescopically.

[0056] The outer sleeve 5 of this embodiment can play a certain role in limiting the telescopic member, so that the telescopic member is more stable during the telescopic movement and will not produce obvious movement.

[0057] The outer sleeve 5 and the telescopic rod are provided with an axial limiting structure and a circumferential limiting structure.

[0058] The axial limiting structure is a first clamping member 3 arranged on the outer sleeve 5, a first clamping groove 7 arranged on the telescopic rod, and a biasing member 4 used to push the first clamping member 3 to extend toward the first clamping groove 7. In this embodiment, the first clamping member 3 is a ball embedded in a conical hole on the outer sleeve 5, and the number of balls is three, which are evenly arranged in the circumferential direction of the outer sleeve 5; the first clamping groove 7 is two annular recessed holes arranged along the telescopic movement direction that are adapted to the shape of the ball; the biasing member 4 is a stop ring that is sleeved on the outer cavity wall of the outer sleeve 5 and abuts against the ball as an annular elastic element. An annular mounting groove that is adapted to the shape of the stop ring is provided on the outer cavity wall of the outer sleeve 5 to prevent the stop ring from moving, and the annular mounting groove is provided with a stop ring that blocks the stop ring from rotating along the circumferential direction of the outer sleeve 5. The stopper 2 is used to prevent the stop ring from rotating and causing the ball to escape from the opening of the stop ring. In this embodiment, the stopper 2 is a screw; the stop ring can automatically press the ball into the annular recessed hole to achieve positioning when the annular recessed hole moves to the ball position. When the telescopic rod needs to be moved out of the positioning, it is only necessary to pull the hand-held part 1 to drive the telescopic rod. The telescopic rod itself can press the ball out of the annular recessed hole. This limiting structure has a simple structure, is easy to operate, and is also easy to disassemble, repair and replace; at the same time, the number of annular recessed holes can be more than two, and the number setting can make the telescopic rod have multiple positioning positions, which is firstly convenient for positioning the use position and the disengagement position of the detector, and then by setting multiple positioning positions, the mounting frame 11 can also be equipped with multiple detectors to achieve switching of different detectors.

[0059] The circumferential limiting structure includes a second clamping member 8 arranged on the telescopic rod, and a second clamping groove arranged in the circumferential direction of the outer sleeve 5; in this embodiment, the second clamping member 8 is a slider fixed to the telescopic rod by screws, and the second clamping groove is a strip groove adapted to the slider and arranged along the telescopic movement direction. The slider can slide in the strip groove as the telescopic rod moves, preventing the telescopic rod from rotating in the circumferential direction with the telescopic movement direction as the axis, thereby preventing the detector from rotating in the sample chamber to affect the analysis accuracy. In addition, the length of the strip groove can limit the telescopic movement distance of the telescopic rod.

[0060] The method of using this embodiment is as follows:

[0061] When the detector is required to reach the use position, that is, the position connected to the electron optical system, the user pushes the hand-held part 1 to drive the telescopic part 6 to move, and then the detector moves in the sample chamber. At this time, the slider moves in the strip groove to prevent the telescopic rod from axially rotating. When the detector moves to the use position, an annular recessed hole moves with the telescopic part 6 to the ball, and the stop snap ring automatically presses the ball into the annular recessed hole to achieve positioning. At the same time, the user feels the resistance of pushing and stops pushing the hand-held part 1; when the detector needs to be out of the use position, the user pulls the hand-held part 1 to drive the telescopic part 6 to move. At this time, the telescopic rod itself presses the ball out of the annular recessed hole. When the other annular recessed hole moves to the ball, the stop snap ring automatically presses the ball into the annular recessed hole to achieve positioning. At the same time, the user feels the resistance of pushing and stops pushing the hand-held part 1.

[0062] In this embodiment, the position of the detector is changed by driving the telescopic rod located in the outer sleeve 5 to move the detector located in the sample chamber. When the detector is not needed, it is only necessary to change the position of the detector to separate it from the electron optical system without removing the detector from the sample.

[0063] As a modified implementation of the axial limiting structure of the above-mentioned embodiment 1, a space for accommodating a biasing member 4 is provided inside the telescopic rod, and the biasing member 4 is a column made of elastic material, the first clamping member 3 is a plurality of balls embedded in the telescopic rod, the first clamping groove 7 is an annular recessed hole arranged on the inner wall of the outer sleeve 5, and the biasing member 4 is used to drive the balls to be plugged and connected with the annular recessed hole to achieve positioning.

[0064] As a modified implementation of the circumferential limiting structure of the above-mentioned embodiment 1, the second clamping member 8 is a protrusion on the inner wall of the telescopic rod, and the second clamping groove is a strip groove on the telescopic rod adapted to the protrusion.

[0065] Of course, the present invention does not impose any specific restrictions on the structure of the telescopic member. In other embodiments, the telescopic member is composed of a multi-section sleeve, and the inner cavity of the sleeve is provided with a push rod driven by a motor to extend and retract. The push rod is fixedly connected to the sleeve to drive the sleeve to extend and retract.

[0066] Of course, the present invention does not impose any specific restrictions on the fixed part and the telescopic part. In other embodiments, the fixed part is a "concave"-shaped bracket provided with a slide groove, and the telescopic part is a rectangular slide rod embedded in the slide groove, which only needs to be provided with an axial limiting structure.

[0067] Example 2

[0068] An electron microscope detection device comprises: an electron microscope detector and a driving mechanism of the electron microscope detector.

[0069] The driving mechanism of the electron microscope detector is the driving mechanism of the electron microscope detector provided in Example 1.

[0070] When the detector needs to be separated from the electron optical system, there is no need to remove the entire detector from the sample. It is only necessary to drive the telescopic part to move the detector to separate from the electron optical system. At the same time, the position of the detector can be adjusted by driving the telescopic part. It is simple and fast to use.

[0071] Obviously, the above embodiments are merely examples for the purpose of clear explanation, and are not intended to limit the implementation methods. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all the implementation methods here. The obvious changes or modifications derived therefrom are still within the scope of protection of the invention.

Claims

1. A driving mechanism for an electron microscope detector, characterized in that: include: a fixing member connected to the sample chamber; A telescopic member is connected to the fixed member in a telescopic manner, the sample chamber is provided with an opening, and the telescopic member comprises: a telescopic portion (6) on which a detector is mounted, the telescopic portion (6) passes through the opening and is driven to drive the detector to move telescopically, the telescopic portion (6) passes through the opening of the sample chamber and is connected to a mounting frame (11) for mounting the detector via an L-shaped bolt plate (10); The fixing member and the telescopic member are provided with an axial limiting structure and a circumferential limiting structure, the fixing member is an outer sleeve (5), and the telescopic member is a telescopic rod telescopically arranged in the outer sleeve; The axial limiting structure is used to limit the telescopic position of the telescopic member along the telescopic moving direction, and the axial limiting structure comprises: a first clamping member (3) arranged on one of the outer sleeve (5) and the telescopic rod, a biasing member (4) used to push the first clamping member (3) to extend toward the first clamping slot (7), and a first clamping slot (7) arranged on the other of the outer sleeve (5) and the telescopic rod, wherein the first clamping slot (7) is an annular concave hole; the first clamping member (3) is driven by the biasing member (4) to be plugged and connected with the first clamping slot (7); there are at least two first clamping slots (7), which are arranged along the length direction of the telescopic rod, so that the telescopic rod has at least two positioning positions, so that a plurality of the detectors are correspondingly arranged on the mounting frame (11) to realize the switching of different detectors; The circumferential limiting structure is used to limit the rotational position of the telescopic member along the circumferential direction with the telescopic moving direction as the axis, and the circumferential limiting structure comprises: a second clamping member (8) arranged on one of the outer sleeve (5) and the telescopic rod, and a second clamping groove arranged in the circumferential direction of the other of the outer sleeve (5) and the telescopic rod, wherein the second clamping groove is a strip groove arranged along the telescopic moving direction; the second clamping member (8) is driven to be plugged and connected with the second clamping groove; A handheld part (1) is arranged on an end of the telescopic rod away from the detector.

2. The driving mechanism of the electron microscope detector according to claim 1, characterized in that: The first clamping member (3) is a ball bearing embedded in the outer sleeve, and the biasing member (4) is an annular elastic element sleeved on the outer cavity wall of the outer sleeve (5) and abutting against the ball bearing.

3. The driving mechanism of the electron microscope detector according to claim 2, characterized in that: The outer sleeve (5) is provided with a stopper (2) for stopping the annular elastic element from rotating along the circumferential direction of the outer sleeve.

4. The driving mechanism of the electron microscope detector according to claim 2, characterized in that: There are multiple balls, which are arranged in the circumferential direction of the outer sleeve (5).

5. The driving mechanism of the electron microscope detector according to claim 2, characterized in that: The outer cavity wall of the outer sleeve (5) is provided with an annular receiving groove which matches the shape of the annular elastic element.

6. An electron microscope detection device, characterized in that: include: electron microscope detector, and The driving mechanism of the electron microscope detector according to any one of claims 1 to 5.

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