An excimer lamp

Abstract

The present invention discloses an excimer lamp, comprising a light-transmitting container, at least one pair of electrodes and a dielectric film layer with a filtering function, wherein a discharge gas is encapsulated in the light-transmitting container, an electric field can be formed between the at least one pair of electrodes to ionize the discharge gas, and the dielectric film layer is arranged on the outer surface of the light-transmitting container. The present invention adds a dielectric film with a filtering function outside the high electric field region of the excimer lamp, so that the excimer lamp has the advantages of good monochromaticity, high output power, good stability and reliability, etc., which helps to broaden the application field of the excimer lamp.

Description

Technical Field

[0001] The invention belongs to the technical field of excimer lamps, and in particular relates to an excimer lamp which can effectively improve the monochromaticity of an output spectrum of the excimer lamp. Background Art

[0002] Excimer lamps mainly use high voltage and high frequency outside the lamp tube to excite the gas inside the lamp tube, thereby emitting short-wavelength ultraviolet light. It has the characteristics of short wavelength and high energy. It has important applications in integrated circuit lithography, material processing, medical research, sterilization and disinfection, etc., and has therefore received widespread attention from academia and industry.

[0003] However, the output spectrum of existing excimer lamps has multiple peak wavelengths, resulting in poor monochromaticity, which seriously limits its application prospects in medical research and sterilization and disinfection. For example, a 222nm excimer lamp outputs 235nm and 257nm ultraviolet light in addition to 222nm ultraviolet light.

[0004] The latest research results show that ultraviolet light with a wavelength of 222nm can destroy viruses in the air without causing harm to human skin. However, ultraviolet light with a wavelength of 235nm and 257nm can cause harm to human skin, eyes, etc., which seriously limits the application of excimer lamps.

[0005] Therefore, there is an urgent need to improve the monochromaticity of the excimer lamp, and the existing technology mainly focuses on improving the output power of the excimer lamp. Summary of the invention

[0006] The main purpose of the present invention is to provide an excimer lamp to overcome the deficiencies of the prior art.

[0007] In order to achieve the above-mentioned invention object, the technical solution adopted by the present invention includes:

[0008] An excimer lamp, comprising:

[0009] A light-transmitting container having a sealed space, wherein a discharge gas is encapsulated in the sealed space;

[0010] A first electrode and a second electrode matched with each other, wherein the sealed space is arranged between the first electrode and the second electrode;

[0011] The excimer lamp further comprises a dielectric film layer arranged corresponding to the wall of the light-transmitting container, wherein the dielectric film layer comprises a first dielectric film layer, and the first dielectric film layer can at least filter out light other than light of a set wavelength from light emitted by the discharge gas.

[0012] In one embodiment, the dielectric film layer is coated on the outer wall of the light-transmitting container, and at least one of the first electrode and the second electrode is disposed between the dielectric film layer and the light-transmitting container.

[0013] In one embodiment, at least one of the first electrode and the second electrode is disposed on the outer wall of the light-transmitting container, and the at least one is covered by the dielectric film layer, thereby being isolated from the external atmosphere.

[0014] In one embodiment, a containing space is further formed in the light-transmitting container, and either one of the first electrode and the second electrode is disposed in the containing space, while the other is disposed on the outer wall of the light-transmitting container.

[0015] In one embodiment, a containing space is further formed in the light-transmitting container, and either one of the first electrode and the second electrode is disposed in the containing space, while the other is disposed on the outer wall of the light-transmitting container.

[0016] In one embodiment, the first electrode and the second electrode are coaxially arranged.

[0017] In one embodiment, the first electrode and the second electrode are both disposed on the outer wall of the light-transmitting container, and the two are disposed opposite to each other.

[0018] In one embodiment, both the first electrode and the second electrode are covered by the dielectric film layer.

[0019] In one embodiment, the dielectric film layer further includes a second dielectric film layer, and the first dielectric film layer and the second dielectric film layer are both coated on the outer wall of the light-transmitting container and are arranged opposite to each other.

[0020] In one embodiment, the first dielectric film layer is an anti-reflection film, and the second dielectric film layer is an anti-reflection film or a high-reflection film. When the second dielectric film layer is a high-reflection film, light incident on the second dielectric film layer can be partially or completely reflected to the first dielectric film layer.

[0021] In one embodiment, either one of the first electrode and the second electrode is covered by a first dielectric film layer, and the other one of the first electrode and the second electrode is covered by a second dielectric film layer.

[0022] In one embodiment, different portions of any one of the first electrode and the second electrode are respectively covered by a first dielectric film layer and a second dielectric film layer.

[0023] In one embodiment, the dielectric film layer material includes one or a combination of two or more of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum gallium nitride, gallium oxide, magnesium fluoride, titanium oxide, thallium oxide, and zirconium oxide materials, and is not limited thereto.

[0024] In one embodiment, the material of the first electrode and the second electrode includes one or a combination of two or more of nickel, titanium, chromium, palladium, platinum, gold, aluminum, and gold-germanium-nickel alloy, but is not limited thereto.

[0025] In one embodiment, the discharge gas includes one or a combination of two or more of helium, neon, argon, krypton, xenon, radon, fluorine, chlorine, bromine, etc., but is not limited thereto.

[0026] Compared with the prior art, the beneficial effects of the present invention are at least:

[0027] 1. The present invention can effectively remove other stray spectra other than the main output wavelength and effectively improve the monochromaticity of the output spectrum of the excimer lamp by adding a dielectric film with a filtering function outside the high electric field region of the excimer lamp.

[0028] 2. The dielectric film added in the present invention is an anti-reflection film, which can effectively enhance the transmittance of the main wavelength output light in the output spectrum of the excimer lamp and improve the output power of the device.

[0029] 3. The dielectric film added in the present invention is arranged on the outside of the metal electrode, which can protect the metal electrode, isolate the metal electrode from the outside atmosphere, and prevent the oxygen in the air from being ionized under the strong electric field of the metal electrode to produce ozone; it can also prevent the metal electrode from being oxidized, etc., thereby effectively improving the reliability of the device.

[0030] 4. The additional dielectric film of the present invention is arranged outside the metal electrode, so that the dielectric film does not need to work under the strong electric field between the metal electrodes, which can effectively improve the reliability of the dielectric film and thus improve the reliability of the device.

[0031] 5. The excimer lamp proposed in the present invention has the advantages of good monochromaticity, high output power, good stability and reliability, etc., which helps to broaden the application field of excimer lamps. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0033] Figure 1 is a schematic structural diagram of an excimer lamp in Example 1 of the present invention;

[0034] Figure 2 is a schematic structural diagram of an excimer lamp in Example 2 of the present invention;

[0035] Figure 3It is a comparison diagram of the output spectra of the excimer lamp of the present invention and the traditional excimer lamp.

[0036] Reference numerals:

[0037] 1 / 1′, light-transmitting container, 11, accommodating space, 2, discharge gas, 3, first electrode, 4, second electrode, 5, first dielectric film layer, 6, second dielectric film layer. DETAILED DESCRIPTION

[0038] The present invention will be more fully understood through the following detailed description, which should be read in conjunction with the accompanying drawings. Detailed embodiments of the present invention are disclosed herein; however, it should be understood that the disclosed embodiments are only exemplary of the present invention, which can be embodied in various forms. Therefore, the specific functional details disclosed herein should not be interpreted as limiting, but only as the basis of the claims and as a representative basis for teaching those skilled in the art to adopt the present invention in different ways in virtually any appropriate detailed embodiment.

[0039] The present invention discloses an excimer lamp, especially a narrow line width excimer lamp, which has the advantages of good monochromaticity, high output power, good stability and reliability by adding a dielectric film with filtering function outside the high electric field region of the excimer lamp, thereby helping to broaden the application field of the excimer lamp.

[0040] The structure of the excimer lamp of the present invention is described in detail below with reference to several embodiments.

[0041] Example 1 Figure 1 As shown, an excimer lamp disclosed in this embodiment includes a light-transmitting container 1, a first electrode 3, a second electrode 4, a first dielectric film layer 5, and a second dielectric film layer 6. A discharge gas 2 is encapsulated in the inner cavity of the light-transmitting container 1, and the first electrode 3 and the second electrode 4 are respectively arranged on the outer walls of both sides of the light-transmitting container 1, and the two are arranged opposite to each other. The first dielectric film layer 5 and the second dielectric film layer 6 are also arranged on the outer wall of the light-transmitting container 1, wherein the first dielectric film layer 5 and the second dielectric film layer 6 respectively cover the first electrode 3 and the second electrode 4, and can isolate the first electrode 3 and the second electrode 4 from the outside atmosphere, so as to prevent oxygen in the air from being ionized under the strong electric field of the electrode to produce ozone, and to prevent the metal electrode from being oxidized.

[0042] Wherein, either the first dielectric film layer 5 or the second dielectric film layer 6 has a filtering function, which can effectively remove other stray spectra except the main output wavelength (e.g., ultraviolet light with a wavelength of 222nm) in the output spectrum of the excimer lamp. Further, either one is an anti-reflection film to effectively enhance the transmittance of the main wavelength output light in the output spectrum of the excimer lamp. The surface of the anti-reflection film can have a concave-convex morphology to improve the light extraction rate.

[0043] Alternatively, the first dielectric film layer 5 and the second dielectric film layer 6 may both have the aforementioned filtering function and may both play the function of the aforementioned anti-reflection film.

[0044] Alternatively, the first dielectric film layer 5 has the functions of the aforementioned filtering and anti-reflection film, and the second dielectric film layer 6 is a high-reflection film, and most or all of the light incident on the second dielectric film layer 6 will be reflected and emitted from the first dielectric film layer 5, thereby effectively improving the directionality of the device output light.

[0045] The first dielectric film layer 5 and the second dielectric film layer 6 can be integrally provided.

[0046] Example 2 Figure 2 As shown, the excimer lamp disclosed in this embodiment includes a light-transmitting container 1′, a first electrode 3, a second electrode 4, a first dielectric film layer 5, and a second dielectric film layer 6. The wall of the light-transmitting container 1′ is partially concave to form a receiving space 11, the first electrode 3 is inserted into the receiving space 11, and the second electrode 4 is arranged around the outer wall of the light-transmitting container 1′ and is coaxially arranged with the first electrode 3 (the two can be defined as coaxial electrodes). The inner cavity of the light-transmitting container 1′ also encapsulates a discharge gas 2. The first dielectric film layer 5 and the second dielectric film layer 6 are arranged on the outer wall of the light-transmitting container 1′ and cover the second electrode 4 to isolate the second electrode 4 from the external atmosphere.

[0047] Similar to the first embodiment, the first dielectric film layer 5 and the second dielectric film layer 6 may both have the functions of filtering and anti-reflection film. In this case, the first dielectric film layer 5 and the second dielectric film layer 6 may be continuous dielectric film layers formed in one piece.

[0048] Alternatively, it is also possible to configure that either one of the first dielectric film layer 5 and the second dielectric film layer 6 has the functions of filtering and anti-reflection film, and the other is a high-reflection film.

[0049] In the above embodiments 1 and 2, the light-transmitting container 1 and 1' can be a quartz tube, which has a sealed space inside, and the discharge gas 2 is encapsulated in the sealed space. The closed environment formed in the quartz tube can protect the gas inside. During implementation, the quartz tube can have a variety of shapes, such as a cube, a cuboid, a pyramid, a cylinder, a cone, an ellipsoid, a square, a rectangle, a circle, an ellipse, a trapezoid, a triangle, etc., or a combination of two or more shapes, which are all applicable to the present invention, and the present invention does not limit this.

[0050] In the above embodiments 1 and 2, the discharge gas 2 in the light-transmitting container 1 is ionized under high voltage or high frequency electric field, thereby emitting light of a specific wavelength. In practice, the discharge gas 2 can be one or a combination of two or more of helium He, neon Ne, argon Ar, krypton Kr, xenon Xe, radon Rn, fluorine F, chlorine Cl2, bromine Br, etc.

[0051] In the above embodiments 1 and 2, the electrodes 3 and 4 are used to pass high voltage or high frequency voltage, so as to form a high voltage or high frequency electric field between the two electrodes 3 and 4, so that the gas inside the quartz tube is ionized, thereby emitting light. In implementation, the arrangement position of the electrodes 3 and 4 on the light-transmitting container 1 can be changed according to the different structures of the light-transmitting container 1, and the present invention is not limited to this, as long as the gas inside the light-transmitting container 1 is ionized. In implementation, the materials of the electrodes 3 and 4 include one or a combination of two or more of nickel Ni, titanium Ti, chromium Cr, palladium Pd, platinum Pt, gold Au, aluminum Al, gold-germanium-nickel alloy, etc., and are not limited thereto.

[0052] In the above embodiments 1 and 2, the dielectric film layers 5 and 6 are arranged on the outer surface of the light-transmitting container 1 to absorb light other than the main wavelength, thereby improving the monochromaticity of the excimer lamp. During implementation, the first dielectric film layer 5 can be an anti-reflection film, which can effectively enhance the transmittance of the main wavelength output light in the output spectrum of the excimer lamp emitted from the light-transmitting container 1, thereby improving the output power of the device; the second dielectric film layer 6 can be an anti-reflection film or a high-reflection film, wherein the main function of the anti-reflection film is similar to that of the first dielectric film layer 5, which is mainly to improve the light extraction efficiency of the device, thereby improving the output power of the device; and when the second dielectric film layer 6 is a high-reflection film, it can reflect the light incident on the second dielectric film layer 6, so that most of the light is emitted from the first dielectric film layer 5, which can effectively improve the directionality of the device output light, and is unidirectional light emission, suitable for specific application scenarios. During implementation, the dielectric film layer material mainly includes one or a combination of two or more materials selected from silicon oxide SiO2, silicon nitride SiN, silicon oxynitride SiON, aluminum oxide Al2O3, aluminum nitride AlN, aluminum gallium nitride AlGaN, gallium oxide Ga2O3, magnesium fluoride MgF2, titanium oxide TiO2, thallium oxide Ta2O5, zirconium oxide ZrO2, etc., and is not limited to these.

[0053] Figure 3 The figure shows a comparison of the output spectra of an excimer lamp product in a typical embodiment of the present invention and a conventional excimer lamp (the former has a substantially identical structure to the latter, but the latter does not have the aforementioned dielectric film layer) at the same operating voltage. In the figure, the horizontal axis is the wavelength and the vertical axis is the photoluminescence intensity. Figure 3It can be seen that in addition to the ultraviolet light with a peak wavelength of 222nm, the output spectrum of the traditional excimer lamp also contains output lights of 235nm and 257nm, and the output lights of these wavelengths can cause harm to the human body; while the excimer lamp product proposed in the present invention only outputs 222nm light, and the half-width of the spectrum is very narrow, which is only 2.7nm, and there is no output light of other wavelengths, and the monochromaticity is very good; at the same time, due to the use of an anti-reflection film, the output power of the excimer lamp product proposed in the present invention is increased by about 10% compared with the traditional excimer lamp, which effectively improves the electro-optical conversion efficiency of the excimer lamp.

[0054] In addition, the dielectric film added by the present invention is arranged on the outside of the metal electrode, which can protect the metal electrode, isolate the metal electrode from the outside atmosphere, and prevent the oxygen in the air from being ionized under the strong electric field of the metal electrode to produce ozone; it can also prevent the metal electrode from being oxidized, etc., thereby effectively improving the reliability of the device. In addition, the dielectric film does not need to work under the strong electric field between the metal electrodes, which can effectively improve the reliability of the dielectric film, thereby improving the reliability of the device.

[0055] Therefore, the excimer lamp proposed in the present invention has the advantages of good monochromaticity, high output power, good stability and reliability, etc., which is helpful to broaden the application field of the excimer lamp.

[0056] The various aspects, embodiments, features and examples of the present invention should be considered as illustrative in all aspects and are not intended to limit the present invention, the scope of the present invention is defined only by the claims. Other embodiments, modifications and uses will be apparent to those skilled in the art without departing from the spirit and scope of the claimed invention.

[0057] The use of headings and sections in this disclosure is not meant to limit the disclosure; each section may apply to any aspect, embodiment, or feature of the disclosure.

[0058] Unless specifically stated otherwise, use of the terms "include," "includes," "including," "have," "has," or "having" should generally be construed as open ended and non-limiting.

[0059] Although the present invention has been described with reference to illustrative embodiments, it will be appreciated by those skilled in the art that various other changes, omissions and / or additions may be made without departing from the spirit and scope of the present invention and that the elements of the embodiments may be replaced by substantial equivalents. In addition, many modifications may be made without departing from the scope of the present invention to adapt specific circumstances or materials to the teachings of the present invention. Therefore, it is not intended herein to limit the present invention to the disclosed specific embodiments for performing the present invention, but it is intended that the present invention will include all embodiments within the scope of the appended claims. In addition, unless specifically stated, any use of the terms first, second, etc. does not indicate any order or importance, but rather uses the terms first, second, etc. to distinguish one element from another.

Claims

1. An excimer lamp, comprising: A light-transmitting container having a sealed space, wherein a discharge gas is encapsulated in the sealed space; A first electrode and a second electrode matched with each other, wherein the sealed space is arranged between the first electrode and the second electrode; The invention is characterized in that: the excimer lamp also includes a dielectric film layer arranged corresponding to the wall of the light-transmitting container, the dielectric film layer includes a first dielectric film layer and a second dielectric film layer, the first dielectric film layer and the second dielectric film layer can at least filter out light other than light of a set wavelength from the light emitted by the discharge gas; the first dielectric film layer is an anti-reflection film, the second dielectric film layer is an anti-reflection film or a high-reflection film, when the second dielectric film layer is a high-reflection film, light incident on the second dielectric film layer can be partially or completely reflected to the first dielectric film layer, and the surface of the anti-reflection film has a concave-convex morphology.

2. The excimer lamp according to claim 1, characterized in that: The dielectric film layer is coated on the outer wall of the light-transmitting container, and at least one of the first electrode and the second electrode is arranged between the dielectric film layer and the light-transmitting container.

3. The excimer lamp according to claim 2, characterized in that: At least one of the first electrode and the second electrode is arranged on the outer wall of the light-transmitting container, and the at least one is covered by the dielectric film layer, thereby being isolated from the external atmosphere.

4. The excimer lamp according to claim 3, characterized in that: A containing space is also formed in the light-transmitting container. Either one of the first electrode and the second electrode is arranged in the containing space, and the other one is arranged on the outer wall of the light-transmitting container.

5. The excimer lamp according to claim 4, characterized in that: The first electrode is coaxially arranged with the second electrode.

6. The excimer lamp according to claim 3, characterized in that: The first electrode and the second electrode are both arranged on the outer wall of the light-transmitting container and are arranged opposite to each other.

7. The excimer lamp according to claim 6, characterized in that: The first electrode and the second electrode are both covered by the dielectric film layer.

8. The excimer lamp according to claim 1, characterized in that: The first dielectric film layer and the second dielectric film layer are both covered on the outer wall of the light-transmitting container, and the two are arranged opposite to each other.

9. The excimer lamp according to claim 8, characterized in that: Either one of the first electrode and the second electrode is covered by the first dielectric film layer, and the other one is covered by the second dielectric film layer, or different parts of either one of the first electrode and the second electrode are covered by the first dielectric film layer and the second dielectric film layer, respectively.

10. The excimer lamp according to claim 1, characterized in that: The material of the dielectric film layer includes one or a combination of two or more of silicon oxide, silicon nitride, silicon oxynitride, aluminum oxide, aluminum nitride, aluminum gallium nitrogen, gallium oxide, magnesium fluoride, titanium oxide, thallium oxide, and zirconium oxide materials; and / or, the material of the first electrode and the second electrode includes one or a combination of two or more of nickel, titanium, chromium, palladium, platinum, gold, aluminum, and gold-germanium-nickel alloy; and / or, the discharge gas includes one or a combination of two or more of helium, neon, argon, krypton, xenon, radon, fluorine, chlorine, and bromine.

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