A fluorine gas purification device and method

Abstract

The application relates to a fluorine gas purification device and method, and belongs to the fluorine gas purification technical field.The device comprises a base, a supporting plate, a reaction cylinder, a first gas outlet pipe, a first filter screen, a first valve, a feeding mechanism and a heat treatment mechanism; the feeding mechanism is provided with a first driving mechanism and a purification mechanism. The purification mechanism can make the adsorbent fully adsorb hydrogen fluoride gas doped in fluorine gas, the first driving mechanism can realize intermittent discharging to prevent the feeding pipe from being blocked, the second driving mechanism does not need to additionally set a power source to drive the second spiral conveying rod to rotate, so that the purpose of saving resources is achieved, and the heat treatment mechanism does not need to additionally use equipment to heat treat the adsorbent, so that resource utilization is more reasonable.

Description

TECHNICAL FIELD

[0001] The present application relates to a fluorine gas purification device and method, belonging to fluorine gas purification technical field. BACKGROUND

[0002] In the preparation process of fluorine gas, 1% to 8% hydrogen fluoride (HF) gas is mixed in the fluorine gas, and the hydrogen fluoride gas needs to be removed before the fluorine gas is put into use. The adsorption method is a widely used method for removing hydrogen fluoride at present. By using alkali metal fluoride such as sodium fluoride, potassium fluoride, lithium fluoride, etc., hydrogen fluoride gas is adsorbed at room temperature to generate alkali metal hydrofluoride such as sodium hydrofluoride, potassium hydrofluoride, lithium hydrofluoride, etc. The generated alkali metal hydrofluoride desorbs the adsorbed hydrogen fluoride gas at 250°C or above, and the chemical properties of the alkali metal fluoride are changed to purify the fluorine gas.

[0003] In the purification process of removing hydrogen fluoride by using the adsorption method in the prior art, the adsorbent is usually stacked in the filter tower, and then fluorine gas is introduced into the filter tower to purify the fluorine gas. Since the adsorbent is usually in powder form and is stacked in the filter container, it is difficult for the fluorine gas to fully contact and react with the adsorbent, so that a certain amount of hydrogen fluoride gas is still contained in the purified fluorine gas, and the purification effect is not good. SUMMARY

[0004] In order to overcome the defects existing in the prior art, the purpose of the present application is to provide a fluorine gas purification device and method.

[0005] In order to achieve the purpose of the present application, the following technical scheme is provided.

[0006] A fluorine gas purification device, the device comprises a base, a support plate, a reaction cylinder, a first gas outlet pipe, a first filter screen, a first valve, a feeding mechanism and a heat treatment mechanism.

[0007] The support plate is fixedly connected to the top of the base, and the side wall of the support plate above the base is fixedly connected with the reaction cylinder. The reaction cylinder is provided with a first gas outlet pipe which communicates with the inside of the reaction cylinder. The first gas outlet pipe is provided with a detachable first filter screen. The first gas outlet pipe is provided with a first valve. The top of the reaction cylinder is connected with the feeding mechanism. The bottom of the reaction cylinder is below the base, and the heat treatment mechanism is arranged on the base.

[0008] The feeding mechanism is as follows:

[0009] The feed cylinder is fixedly connected to the top of the reaction cylinder. A placement plate is fixedly connected to the outer wall of one end of the feed cylinder. The motor is fixedly mounted on the placement plate. The motor's transverse output shaft extends from the side wall of one end of the feed cylinder into the feed cylinder and is fixedly connected to one end of a first screw conveying rod. The other end of the first screw conveying rod, away from the motor, is rotatably connected to the inner wall of the other end of the feed cylinder. A feed pipe connected to the interior of the feed cylinder is provided on the top of the feed cylinder adjacent to the motor. A baffle is located above the motor, with one end sliding through the side wall of the feed pipe from outside and extending into the feed pipe. A discharge pipe connected to the interior of the feed cylinder is provided on the bottom of the feed cylinder away from the motor. The discharge pipe extends from the top of the reaction cylinder into the reaction cylinder, passes through the entire reaction cylinder, and extends from the bottom of the reaction cylinder. A second valve is provided at the bottom of the discharge pipe. The feed cylinder is provided with a first drive mechanism for driving the movement of the baffle. A purification mechanism for purifying fluorine gas is provided within the reaction cylinder.

[0010] The preferred first driving mechanism is as follows:

[0011] The cam is fixedly connected to the horizontal output shaft of the motor located outside the discharging cylinder, and the feeding cylinder is fixedly connected to a vertical plate adjacent to a side wall of one side of the motor, and the vertical plate is adjacent to a side wall of the motor and is rotatably connected to one end of the second rotating rod, and the other end of the second rotating rod is fixedly connected to the first bevel gear and meshes with the second bevel gear, and the second rotating rod is adjacent to one end of the vertical plate and the disc, and the disc is adjacent to the side wall of one side of the motor, and is fixedly connected to two protrusions symmetrically distributed on both sides of the second rotating rod, and the baffle is fixedly connected to the fixing plate by a baffle connecting rod on one side wall of the vertical plate, and the bottom of the fixing plate is fixedly connected to the second control plate, and the vertical plate is adjacent to the side wall of one side of the disc and is rotatably connected to the first control plate through a connecting rod. One end of the first control plate is penetrated by a waist-shaped hole, and the fixing plate is fixedly connected to the fixing block on the side wall of one side of the first control plate, and the fixing block passes through the waist-shaped hole and is fixedly connected to the limiting block at one end through the waist-shaped hole.

[0012] The preferred purification mechanism is as follows:

[0013] The air inlet end of the air inlet pipe extends into the reaction cylinder from the outside of the side wall of the reaction cylinder, and is distributed in a serpentine shape and inserted on the discharge pipe. The air outlet end of the air inlet pipe extends out of the discharge pipe and is located in the reaction cylinder. A second filter is provided at the intersection of the air inlet pipe and the discharge pipe.

[0014] The preferred heat treatment mechanism is as follows:

[0015] The heating cylinder is arranged below the bottom of the reaction cylinder, and an electric heating plate is provided below the bottom of the heating cylinder; the lower end of the discharge pipe extends from the bottom of the reaction cylinder and is connected to one side of the top of the heating cylinder and is communicated with the interior of the heating cylinder; one end of the second spiral conveying rod extends into the heating cylinder and is rotatably connected to the inner wall of the side wall of the heating cylinder adjacent to the discharge pipe, and the other end of the second spiral conveying rod extends out of the side wall of the heating cylinder away from the discharge pipe and is connected to a second driving mechanism for driving the second spiral conveying rod to move; the top of the side wall of the heating cylinder away from the discharge pipe is connected to the second air outlet pipe, the second air outlet pipe is communicated with the interior of the heating cylinder, and a third filter is provided in the second air outlet pipe.

[0016] The preferred second driving mechanism is as follows:

[0017] The heating cylinder is rotatably connected to the outside of the side wall of the second air outlet pipe on one side, and the first rotating rod is rotatably connected to one end of the first rotating rod, and the other end of the first rotating rod is provided with a second gear; the second spiral conveying rod extending out of the heating cylinder is provided with a slidable first gear, and the first gear is fixedly connected to the moving block away from the side wall of the heating cylinder, and the side wall of the moving block is penetrated by a socket, and two limiting holes are also penetrated on the end of the second spiral conveying rod extending out of the heating cylinder, the socket cooperates with one of the limiting holes and is fixed by a limiting pin, the first rotating rod and the horizontal output shaft of the motor are fixedly connected to the roller, and the side wall of the placement plate is fixedly connected to the transmission roller, and the roller is driven by a belt and the transmission roller.

[0018] Preferably, the cross section of the first control plate is an L-shaped structure, and the cross section of the second control plate is a rectangular structure.

[0019] A method for purifying fluorine gas, wherein the method is performed using the fluorine gas purification device of the present invention, and the steps include:

[0020] ① First, pour the adsorbent from the feed pipe, then start the motor. The motor drives the first spiral conveying rod to rotate, so that the adsorbent is transported along the feed cylinder to the discharge pipe, and then falls from the discharge pipe into the reaction cylinder. While the motor rotates, it can drive the first bevel gear to rotate, and then drive the second bevel gear to rotate, and then drive the second rotating rod to rotate, and then drive the disc to rotate, and then drive the two protrusions to rotate. When the protrusion contacts the second control plate during the rotation process, it can drive the baffle to move to the right. When the protrusion contacts the first control plate, it can cause it to rotate, and then drive the baffle to move to the left, and finally realize the reciprocating movement of the baffle, thereby achieving the purpose of intermittent unloading, which can prevent the feed pipe from being blocked. After a certain amount of adsorbent accumulates in the discharge pipe, the motor can be turned off;

[0021] ②In the initial state, the first valve and the second valve are both in the closed state, and the adsorbent will accumulate in the discharge pipe. The fluorine gas to be purified can be introduced into the reaction cylinder from the air inlet pipe. When the fluorine gas passes through the discharge pipe, it can fully contact with the adsorbent. The adsorbent can react with the fluorine gas and then absorb the hydrogen fluoride gas inside it. After the fluorine gas passes through the serpentine air inlet pipe and fully reacts with the adsorbent, it will be discharged into the reaction cylinder. The first valve can be opened to extract the fluorine gas in the reaction cylinder;

[0022] ③In the initial state, the first gear and the second gear are not engaged. After the reaction is completed, open the second valve, and the adsorbent in the discharge pipe will fall into the heating cylinder. Then remove the limit pin, move the first gear and the moving block to the right, and insert the limit pin into the right limit hole and fix it. At this time, the first gear is just engaged with the second gear, and the motor is started. The motor drives the roller on the motor output shaft to rotate, which in turn drives the transmission roller to rotate, which in turn drives the roller on the first rotating rod to rotate, which in turn drives the second gear to rotate, which in turn drives the first gear to rotate, and then drives the second spiral conveying rod to rotate;

[0023] ④ The rotation of the second spiral conveying rod causes the adsorbent to churn and move continuously, and at the same time the electric heating plate is started to heat the adsorbent in the heating cylinder. When the heating cylinder is heated to the point where the hydrogen fluoride gas in the adsorbent is desorbed, the hydrogen fluoride gas can be collected through the second outlet pipe.

[0024] Beneficial effects

[0025] 1. The present invention provides a fluorine gas purification device and method. By setting a purification mechanism, the air inlet pipe is allowed to pass through the discharge pipe multiple times. When fluorine gas is introduced into the air inlet pipe, the fluorine gas can pass through the adsorbent multiple times through the serpentine-shaped air inlet pipe, thereby fully contacting and reacting with the adsorbent, thereby enabling the adsorbent to fully absorb the hydrogen fluoride gas doped in the fluorine gas.

[0026] 2. The present invention provides a fluorine gas purification device and method. By setting a first driving mechanism, when the motor rotates, it can drive the first bevel gear and the second bevel gear to rotate, and then drive the disc to rotate, and then drive the two protrusions to rotate, so that the two protrusions periodically contact the first control plate and the second control plate, and then the baffle moves back and forth, thereby achieving the purpose of intermittent unloading, preventing blockage in the feed pipe, and ensuring the normal operation of the equipment.

[0027] 3. The present invention provides a fluorine gas purification device and method. By setting a second driving mechanism, the motor can drive the roller on the motor output shaft to rotate while the motor rotates, and then drive the transmission roller to rotate, and then drive the roller on the first rotating rod to rotate, and then drive the second gear to rotate. At the same time, by adjusting the position of the moving block and the first gear, the first gear and the second gear are engaged, and then the second gear can be rotated, and finally the second screw conveying rod is rotated. There is no need to set up an additional power source to drive the second screw conveying rod to rotate, thereby achieving the purpose of saving resources.

[0028] 4. The present invention provides a fluorine gas purification device and method. By providing a heat treatment mechanism, after the reaction is completed, the second valve is opened to allow the adsorbent in the discharge pipe to fall into the heating cylinder. The second driving mechanism rotates the second spiral conveying rod, causing the adsorbent to continuously tumble and move in the heating cylinder. At the same time, the electric heating plate is started to heat the heating cylinder, which can desorb the hydrogen fluoride gas in the adsorbent and make the adsorbent put into use again. There is no need to use additional equipment to heat the adsorbent, making resource utilization more reasonable. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 This is a schematic diagram of the cross-sectional structure of a fluorine gas purification device in Example 1.

[0030] Figure 2 This is a left view of a fluorine gas purification device in Example 1.

[0031] Figure 3 for Figure 1 A magnified view of the structure in Figure 2.

[0032] Figure 4 for Figure 1 A magnified view of the structure at point B in FIG.

[0033] Figure 5 for Figure 2 Enlarged view of the structure at point C in the figure.

[0034] Figure 6 for Figure 2 Enlarged view of the structure at E in .

[0035] Figure 7 for Figure 2 Schematic diagram of the moving block structure in the enlarged view of the structure at D in .

[0036] Among them: 1-base, 2-support plate, 3-reaction cylinder, 4-feeding cylinder, 5-feeding pipe, 6-discharging pipe, 7-air inlet pipe, 8-first spiral conveying rod, 9-placing plate, 10-motor, 11-vertical plate, 12-baffle, 13-first air outlet pipe, 14-first filter screen, 15-second filter screen, 16-second spiral conveying rod, 17-second air outlet pipe, 18-third filter screen, 19-electric heating plate, 20-heating cylinder, 21-disc, 22-first bevel gear, 23-second bevel gear, 24-bump, 25-first control plate, 26-second control plate, 27-first gear, 28-second gear, 29-first rotating rod, 30-moving block, 31-limiting hole, 32-limiting pin, 33-second rotating rod, 34-fixing plate, 35-fixing block, 36-waist-shaped hole DETAILED DESCRIPTION

[0037] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments, but this does not limit the present invention.

[0038] Example 1

[0039] A fluorine gas purification device, such as Figures 1 to 7 As shown, the device includes a base 1, a support plate 2, a reaction cylinder 3, a first air outlet pipe 13, a first filter 14, a first valve, a feeding mechanism and a heat treatment mechanism.

[0040] Four supporting legs are fixedly connected to the bottom of the base 1, and a support plate 2 is fixedly connected to the top. A reaction cylinder 3 is fixedly connected to the side wall of the support plate 2 above the base 1. A first air outlet pipe 13 communicating with the interior of the reaction cylinder 3 is provided on the top of the reaction cylinder 3. A removable first filter screen 14 is provided in the first air outlet pipe 13 for removing dust and impurities in the fluorine gas. A first valve is provided on the first air outlet pipe 13. The top of the reaction cylinder 3 is connected to the feeding mechanism. A heat treatment mechanism is provided on the base 1 below the bottom of the reaction cylinder 3.

[0041] The feeding mechanism is as follows:

[0042] The feeding cylinder 4 is fixedly connected to the top of the reaction cylinder 3, and a placement plate 9 is fixedly connected to the outer wall of one end of the feeding cylinder 4. The motor 10 is fixedly installed on the placement plate 9. The horizontal output shaft of the motor 10 extends from the side wall of one end of the feeding cylinder 4 into the feeding cylinder 4 and is fixedly connected to one end of the first spiral conveying rod 8. The other end of the first spiral conveying rod 8 is away from the motor 10 and is rotatably connected to the inner wall of the other end of the feeding cylinder 4; a feeding pipe 5 connected to the interior of the feeding cylinder 4 is provided on the side of the top of the feeding cylinder 4 adjacent to the motor 10, and a baffle 12 is located above the motor 10, and one end slides from the outside of the feed pipe 5 through the side wall of the feed pipe 5 and extends into the feed pipe 5. A discharge pipe 6 connected to the interior of the feeding cylinder 4 is provided on the side of the bottom of the feeding cylinder 4 away from the motor 10. The discharge pipe 6 extends into the reaction cylinder 3 from the top of the reaction cylinder 3, passes through the entire reaction cylinder 3, and extends out from the bottom of the reaction cylinder 3; a second valve is provided at the bottom of the discharge pipe 6. The feeding cylinder 4 is provided with a first driving mechanism for driving the baffle 12 to move, and the reaction cylinder 3 is provided with a purification mechanism for purifying fluorine gas.

[0043] The first driving mechanism is as follows:

[0044] The first bevel gear 22 is fixedly connected to the horizontal output shaft of the motor 10 on the outside of the discharge barrel, and the side wall of the feeding barrel 4 adjacent to the motor 10 is fixedly connected with a vertical plate 11. The vertical plate 11 is rotatably connected to one end of the second rotating rod 33 adjacent to the side wall of the motor 10, and the other end of the second rotating rod 33 is fixedly connected to the second bevel gear 23. The first bevel gear 22 is meshed with the second bevel gear 23. On the inner side of the vertical plate 11, one end of the second rotating rod 33 adjacent to the vertical plate 11 passes through the center of the disc 21 and is fixedly connected. The disc 21 is adjacent to the side wall of the motor 10 and is fixedly connected to two symmetrically distributed on the second rotating rod. The protrusions 24 on both sides of the rod 33, the side wall of the baffle 12 adjacent to the vertical plate 11 is fixedly connected to the fixed plate 34 through the baffle connecting rod, the bottom of the fixed plate 34 is fixedly connected to the second control plate 26, the side wall of the vertical plate 11 adjacent to the disc 21 is rotatably connected to the first control plate 25 through the connecting rod, and a waist-shaped hole 36 is provided at one end of the first control plate 25. The side wall of the fixed plate 34 adjacent to the first control plate 25 is fixedly connected to a fixed block 35, the fixed block 35 passes through the waist-shaped hole 36, and one end passing through the waist-shaped hole 36 is fixedly connected to a limiting block to prevent the fixed block 35 from detaching from the waist-shaped hole 36.

[0045] The purification mechanism is as follows:

[0046] The air inlet end of the air inlet pipe 7 extends from the outside of the side wall of the reaction tube 3 into the reaction tube 3, and is distributed in a serpentine shape and inserted on the discharge pipe 6, which can increase the number of contacts between the fluorine gas and the adsorbent. The air outlet end of the air inlet pipe 7 extends out of the discharge pipe 6 and is located in the reaction tube 3. A second filter 15 is provided at the intersection of the air inlet pipe 7 and the discharge pipe 6 to prevent the adsorbent from entering the air inlet pipe 7.

[0047] The heat treatment mechanism is as follows:

[0048] The heating cylinder 20 is arranged below the bottom of the reaction cylinder 3, and an electric heating plate 19 is arranged below the bottom of the heating cylinder 20; the lower end of the discharge pipe 6 is connected to one side of the top of the heating cylinder 20 and communicates with the inside of the heating cylinder 20; one end of the second spiral conveying rod 16 extends into the heating cylinder 20 and is rotatably connected to the inner wall of the side wall of the heating cylinder 20 adjacent to the discharge pipe 6, and the other end of the second spiral conveying rod 16 extends out of the side wall of the heating cylinder 20 away from the discharge pipe 6 and is connected to the second driving mechanism for driving the second spiral conveying rod 16 to move; the top of the side wall of the heating cylinder 20 away from the discharge pipe 6 is connected to the second gas outlet pipe 17, the second gas outlet pipe 17 communicates with the inside of the heating cylinder 20, and the third filter screen 18 is arranged in the second gas outlet pipe 17 to prevent the adsorbent from being taken out when the hydrogen fluoride gas is sucked.

[0049] The second driving mechanism is as follows:

[0050] The first rotating rod 29 is rotatably connected to the outside of the side wall of the heating cylinder 20 adjacent to the second gas outlet pipe 17, and the second gear 28 is sleeved on the other end of the first rotating rod 29; the first gear 27 is sleeved on the end of the second spiral conveying rod 16 extending out of the heating cylinder 20, and the moving block 30 is fixedly connected to the side wall of the first gear 27 away from the side wall of the heating cylinder 20; the side wall of the moving block 30 is provided with a insertion hole, and the end of the second spiral conveying rod 16 extending out of the heating cylinder 20 is also provided with two limiting holes 31, the insertion hole cooperates with one of the limiting holes 31 and is fixed by the limiting pin 32, and the first rotating rod 29 and the motor 10 are both fixedly connected with the rollers, and the side wall of the placing plate 9 is fixedly connected with the transmission roller, and the rollers are drivingly connected with the transmission roller through the belt.

[0051] The cross section of the first control plate 25 is L-shaped structure, and the cross section of the second control plate 26 is rectangular structure.

[0052] A purification method of fluorine gas is provided, which is completed by using the purification device of fluorine gas.

[0053] ① First, pour the adsorbent from the feed pipe 5, and then start the motor 10. The motor 10 drives the first spiral conveying rod 8 to rotate, so that the adsorbent is transported along the feed cylinder 4 to the discharge pipe 6, and then falls from the discharge pipe 6 into the reaction cylinder 3. When the motor 10 rotates, it can drive the first bevel gear 22 to rotate, and then drive the second bevel gear 23 to rotate, and then drive the second rotating rod 33 to rotate, and then drive the disc 21 to rotate, and then drive the two protrusions 24 to rotate. When the protrusion 24 contacts the second control plate 26 during the rotation, it can drive the baffle 12 to move to the right. When the protrusion 24 contacts the first control plate 25, it can rotate, and then drive the baffle 12 to move to the left, and finally realize the reciprocating movement of the baffle 12, thereby achieving the purpose of intermittent unloading, which can prevent the feed pipe 5 from being blocked. After a certain amount of adsorbent is accumulated in the discharge pipe 6, the motor 10 can be turned off;

[0054] ② In the initial state, the first valve and the second valve are both in the closed state, and the adsorbent will accumulate in the discharge pipe 6. The fluorine gas to be purified can be introduced into the reaction cylinder 3 from the air inlet pipe 7. When the fluorine gas passes through the discharge pipe 6, it can fully contact with the adsorbent. The adsorbent can react with the fluorine gas and then absorb the hydrogen fluoride gas inside it. After the fluorine gas fully reacts with the adsorbent through the serpentine air inlet pipe 7, it will be discharged into the reaction cylinder 3. The first valve can be opened to extract the fluorine gas in the reaction cylinder 3;

[0055] ③ In the initial state, the first gear 27 and the second gear 28 are not engaged. After the reaction is completed, the second valve is opened, and the adsorbent in the discharge pipe 6 will fall into the heating cylinder 20. Then, the limit pin 32 is removed, and the first gear 27 and the moving block 30 are moved to the right. The limit pin 32 is inserted into the right limit hole 31 and fixed. At this time, the first gear 27 is just engaged with the second gear 28, and the motor 10 is started. The motor 10 drives the roller on the output shaft of the motor 10 to rotate, and then drives the transmission roller to rotate, and then drives the roller on the first rotating rod 29 to rotate, and then drives the second gear 28 to rotate, and then drives the first gear 27 to rotate, and then drives the second spiral conveying rod 16 to rotate;

[0056] ④ The second spiral conveying rod 16 rotates to cause the adsorbent to churn and move continuously, and at the same time the electric heating plate 19 is started to heat the adsorbent in the heating cylinder 20. When the heating cylinder 20 is heated until the hydrogen fluoride gas in the adsorbent is desorbed, the hydrogen fluoride gas can be collected through the second outlet pipe 17.

[0057] In this embodiment, the cross section of the first control board 25 is an L-shaped structure, and the cross section of the second control board 26 is a rectangular structure.

[0058] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A fluorine gas purification device, characterized in that: The device comprises a base (1), a support plate (2), a reaction cylinder (3), a first air outlet pipe (13), a first filter screen (14), a first valve, a feeding mechanism and a heat treatment mechanism; The top of the base (1) is fixedly connected to a support plate (2), the side wall of the support plate (2) above the base (1) is fixedly connected to a reaction cylinder (3), the top of the reaction cylinder (3) is provided with a first air outlet pipe (13) communicating with the interior of the reaction cylinder (3), the first air outlet pipe (13) is provided with a detachable first filter screen (14), the first air outlet pipe (13) is provided with a first valve, the top of the reaction cylinder (3) is connected to the feeding mechanism, and the base (1) is provided with a heat treatment mechanism below the bottom of the reaction cylinder (3); The feeding mechanism is as follows: The feeding barrel (4) is fixedly connected to the top of the reaction barrel (3), and a placement plate (9) is fixedly connected to the outer wall of one end of the feeding barrel (4). The motor (10) is fixedly installed on the placement plate (9). The transverse output shaft of the motor (10) extends from the side wall of one end of the feeding barrel (4) into the feeding barrel (4) and is fixedly connected to one end of the first spiral conveying rod (8). The other end of the first spiral conveying rod (8) away from the motor (10) is rotatably connected to the inner wall of the other end of the feeding barrel (4); a feeding pipe (5) connected to the inside of the feeding barrel (4) is provided on the side adjacent to the motor (10) at the top of the feeding barrel (4). The baffle (12 ) is located above the motor (10), one end of which slides from the outside of the feed tube (5) through the side wall of the feed tube (5) and extends into the feed tube (5), and a discharge pipe (6) connected to the inside of the feed tube (4) is provided on the side of the bottom of the feed tube (4) away from the motor (10), and the discharge pipe (6) extends from the top of the reaction tube (3) into the reaction tube (3), passes through the entire reaction tube (3), and extends from the bottom of the reaction tube (3); a second valve is provided at the bottom of the discharge pipe (6); a first driving mechanism for driving the baffle (12) to move is provided on the feed tube (4), and a purification mechanism for purifying fluorine gas is provided in the reaction tube (3); The purification mechanism is as follows: The air inlet end of the air inlet pipe (7) extends from the outside of the side wall of the reaction tube (3) into the reaction tube (3) and is arranged in a serpentine shape and inserted on the discharge tube (6). The air outlet end of the air inlet pipe (7) extends out of the discharge tube (6) and is located in the reaction tube (3). A second filter (15) is provided at the intersection of the air inlet pipe (7) and the discharge tube (6); The heat treatment mechanism is as follows: The heating cylinder (20) is arranged below the bottom of the reaction cylinder (3), and an electric heating plate (19) is provided below the bottom of the heating cylinder (20); the lower end of the discharge pipe (6) extends from the bottom of the reaction cylinder (3) and is connected to one side of the top of the heating cylinder (20) and is communicated with the interior of the heating cylinder (20); one end of the second spiral conveying rod (16) extends into the heating cylinder (20) and is rotatably connected to the inner wall of the side wall of the heating cylinder (20) adjacent to the discharge pipe (6), and the other end of the second spiral conveying rod (16) extends out of the side wall of the heating cylinder (20) away from the discharge pipe (6) and is connected to a second driving mechanism for driving the second spiral conveying rod (16) to move; the top of the side wall of the heating cylinder (20) away from the discharge pipe (6) is connected to the second air outlet pipe (17), the second air outlet pipe (17) is communicated with the interior of the heating cylinder (20), and a third filter (18) is provided in the second air outlet pipe (17).

2. A fluorine gas purification device according to claim 1, characterized in that: The first driving mechanism is as follows: The first bevel gear (22) is fixedly connected to the horizontal output shaft of the motor (10) located outside the discharge barrel, and the side wall of the feeding barrel (4) adjacent to the motor (10) is fixedly connected with a vertical plate (11), the side wall of the vertical plate (11) adjacent to the motor (10) is rotatably connected to one end of the second rotating rod (33), and the other end of the second rotating rod (33) is fixedly connected to the second bevel gear (23), the first bevel gear (22) is meshed with the second bevel gear (23), and the end of the second rotating rod (33) adjacent to the vertical plate (11) is fixedly connected to the disc (21), and the disc (21) is adjacent to the side wall of the motor (10), and is fixedly connected to two symmetrically distributed first bevel gears (22, 23) and second bevel gears (23). The protrusions (24) on both sides of the second rotating rod (33) are fixedly connected to the fixed plate (34) on the side wall of the baffle (12) adjacent to the vertical plate (11) through the baffle connecting rod, and the bottom of the fixed plate (34) is fixedly connected to the second control plate (26). The side wall of the vertical plate (11) adjacent to the disk (21) is rotatably connected to the first control plate (25) through the connecting rod, and a waist-shaped hole (36) is provided through one end of the first control plate (25). The side wall of the fixed plate (34) adjacent to the first control plate (25) is fixedly connected to the fixed block (35), and the fixed block (35) passes through the waist-shaped hole (36), and one end of the fixed block passing through the waist-shaped hole (36) is fixedly connected to the limiting block.

3. A fluorine gas purification device according to claim 1, characterized in that: The second driving mechanism is as follows: The heating cylinder (20) is rotatably connected to the outer side of the side wall adjacent to the second air outlet pipe (17) with one end of the first rotating rod (29), and the other end of the first rotating rod (29) is sleeved with a second gear (28); the end of the second spiral conveying rod (16) extending out of the heating cylinder (20) is sleeved with a slidable first gear (27), and the first gear (27) is fixedly connected to the side wall away from the heating cylinder (20) with a moving block (30), and a jack is provided through the side wall of the moving block (30). Two limiting holes (31) are also provided through the end of the second spiral conveying rod (16) extending out of the heating cylinder (20), and the jack cooperates with one of the limiting holes (31) and is fixed by a limiting pin (32). The first rotating rod (29) and the horizontal output shaft of the motor (10) are both fixedly connected with a roller, and the side wall of the placement plate (9) is fixedly connected with a transmission roller, and the roller is connected to the transmission roller through a belt.

4. A fluorine gas purification device according to claim 2, characterized in that: The cross section of the first control plate (25) is an L-shaped structure, and the cross section of the second control plate (26) is a rectangular structure.

5. A method for purifying fluorine gas, characterized in that: The purification method is carried out using a fluorine gas purification device according to any one of claims 1 to 4, and the steps include: ① First, pour the adsorbent from the feed pipe (5), then start the motor (10), the motor (10) drives the first spiral conveying rod (8) to rotate, so that the adsorbent is transported along the feed barrel (4) to the discharge pipe (6), and then falls from the discharge pipe (6) into the reaction barrel (3). When the motor (10) rotates, it can drive the first bevel gear (22) to rotate, and then drive the second bevel gear (23) to rotate, and then drive the second rotating rod (33) to rotate, and then drive the disc (21) to rotate. Then, the two protrusions (24) are driven to rotate. When the protrusions (24) contact the second control plate (26) during the rotation process, the baffle (12) can be driven to move to the right. When the protrusions (24) contact the first control plate (25), the first control plate (25) can be rotated, thereby driving the baffle (12) to move to the left. Finally, the baffle (12) is moved back and forth, thereby achieving the purpose of intermittent feeding and preventing the feed pipe (5) from being blocked. After a certain amount of adsorbent is accumulated in the discharge pipe (6), the motor (10) can be turned off. ② In the initial state, the first valve and the second valve are both in the closed state, and the adsorbent will accumulate in the discharge pipe (6). The fluorine gas to be purified is passed into the reaction cylinder (3) from the air inlet pipe (7). When the fluorine gas passes through the discharge pipe (6), it can fully contact with the adsorbent. The adsorbent can react with the fluorine gas and then absorb the hydrogen fluoride gas inside it. After the fluorine gas passes through the serpentine air inlet pipe (7) and fully reacts with the adsorbent, it will be discharged into the reaction cylinder (3). The first valve is opened and the fluorine gas in the reaction cylinder (3) is extracted; ③ In the initial state, the first gear (27) and the second gear (28) are not engaged. After the reaction is completed, the second valve is opened, and the adsorbent in the discharge pipe (6) will fall into the heating cylinder (20). Then, the limit pin (32) is removed, and the first gear (27) and the moving block (30) are moved to the right. The limit pin (32) is inserted into the right limit hole (31) and fixed. At this time, the first gear (27) is just engaged with the second gear (28). The motor (10) is started. The motor (10) drives the roller on the output shaft of the motor (10) to rotate, and then drives the transmission roller to rotate, and then drives the roller on the first rotating rod (29) to rotate, and then drives the second gear (28) to rotate, and then drives the first gear (27) to rotate, and then drives the second spiral conveying rod (16) to rotate; ④ The second spiral conveying rod (16) rotates to cause the adsorbent to churn and move continuously, and at the same time, the electric heating plate (19) is started to heat the adsorbent in the heating cylinder (20). When the heating cylinder (20) is heated until the hydrogen fluoride gas in the adsorbent is desorbed, the hydrogen fluoride gas is collected through the second gas outlet pipe (17).

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