Driving structure and chip detection device

Abstract

The application discloses a driving structure and a chip detection device. The driving structure comprises a third base, a moving platform, a first driving member and a second driving member. The moving platform is used for carrying a chip. The shell of the first driving member is located on the third base. The shell of the second driving member is located on the output end of the first driving member. The moving platform is located on the output end of the second driving member. The first driving member is used for driving the moving platform to rotate around the axis of the moving platform. The second driving member is used for changing the height of the moving platform. Since the second driving member is located on the output end of the first driving member, the load on the output end of the second driving member can be effectively reduced. When the height of the moving platform needs to be changed, the second driving member can move at a high speed to quickly adjust the height of the moving platform.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chip detection, and discloses a driving structure and a chip detection device. BACKGROUND

[0002] In the field of chip detection, the position of the chip is generally adjusted by an R-axis driving member and a Z-axis driving member, so as to achieve the purpose of detecting the chip. In the related art, the R-axis is generally driven to move by the Z-axis. However, this will make the load of the Z-axis too large, and the Z-axis driving member cannot move at a high speed, thereby affecting the detection speed. SUMMARY

[0003] The present application aims at at least solving one of the problems in the prior art. To this end, the present application provides a driving structure and a chip detection device, which can reduce the load of the second driving member and improve the moving speed of the moving platform in the height direction.

[0004] The present application discloses a driving structure, comprising:

[0005] a third base;

[0006] a moving platform, configured to carry a chip;

[0007] a first driving member, a housing of the first driving member being located on the third base;

[0008] a second driving member, a housing of the second driving member being located on an output end of the first driving member, and the moving platform being located on an output end of the second driving member;

[0009] the first driving member is configured to drive the moving platform to rotate around an axis of the moving platform, and the second driving member is configured to change the height of the moving platform relative to the third base.

[0010] The driving structure according to the embodiments of the present application has at least the following beneficial effects: since the second driving member is located on the output end of the first driving member, and the first driving member is connected to the third base, the second driving member does not need to bear the load of the first driving member for driving the moving platform to rotate, so the load on the output end of the second driving member can be effectively reduced. When it is necessary to change the height of the moving platform, the second driving member can move at a high speed to quickly adjust the height of the moving platform.

[0011] According to some embodiments of the present application, the driving structure further comprises a guide seat and a driving slider, the guide seat is located on the output end of the first driving member, the guide seat is provided with an eighth track arranged in the movement direction of the output end of the second driving member, the driving slider can move along the eighth track, and the eighth track is connected to the moving platform.

[0012] According to some embodiments of the present application, the moving platform is provided with a plurality of suction holes on a side away from the first driving member, and the moving platform is further provided with a channel and a ventilation opening, the ventilation opening is used to be connected with a negative pressure device, the channel is connected with the ventilation opening, and the channel is capable of being connected with all the suction holes.

[0013] According to some embodiments of the present application, the driving connecting plate is capable of being connected with the driving slider and the moving platform respectively, and the working part of the adjusting screw is capable of penetrating through the driving connecting plate and being connected with the moving platform.

[0014] According to some embodiments of the present application, the rotation limiting structure further comprises a limiting column and a stopper, the limiting column is connected with the third base, and the stopper is located on the output end of the first driving member.

[0015] According to some embodiments of the present application, the stopper is provided with a protective pad on a side opposite to the limiting column.

[0016] According to some embodiments of the present application, the rotation limiting structure comprises two limiting columns and two stoppers, namely a first limiting column, a second limiting column, a first stopper and a second stopper, the first stopper corresponds to the first limiting column, the second stopper corresponds to the second limiting column, and the first stopper and the second stopper are capable of moving within an angle range formed by the first limiting column and the second limiting column.

[0017] According to some embodiments of the present application, the rotation limiting structure further comprises a travel switch, the travel switch comprises a first identification device, a second identification device and a driving identification structure, the driving identification structure is connected with the output end of the first driving member, the first identification device and the second identification device are both connected with the third base, the first identification device is electrically connected with the first driving member, and the second identification device is electrically connected with the first driving member.

[0018] According to some embodiments of the present application, the travel switch further comprises an encoder, the encoder is connected with the guide seat and is arranged adjacent to the eighth track.

[0019] The present application further provides a chip detection device with the above driving structure, and the chip detection device further comprises a probe, the probe is used to detect a chip located on the moving platform.

[0020] Additional aspects and advantages of the present application will be given in part in the following description, will become apparent in part from the following description, or will be learned by practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0021] The application will be further described below in conjunction with the drawings and embodiments, in which:

[0022] Figure 1 is a perspective view of the driving structure in the embodiment of the application;

[0023] Figure 2 is an exploded view of the structure in Figure 1 ;

[0024] Figure 3 is a top view of the structure in Figure 1 ;

[0025] Figure 4 is a sectional view of the structure in Figure 3 along A-A direction;

[0026] Figure 5 is a perspective view of the chip detection device in the embodiment of the application.

[0027] The drawings show: a third base 101, a moving platform 102, a first driving member 103, a guide seat 104, a driving connecting plate 105, a driving structure 106, a second driving member 201, a driving sliding block 202, an eighth track 203, a suction hole 204, an adjusting screw 205, a first limiting column 206, a first stop block 207, a second limiting column 208, a second stop block 209, a first identification device 210, a second identification device 211, a driving identification structure 212, a probe 501. DETAILED DESCRIPTION

[0028] The embodiments of the application are described in detail below, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by reference to the drawings are exemplary only, and are used only for explaining the application, and cannot be understood as a limitation of the application.

[0029] In the description of the application, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the application and simplifying the description, and therefore cannot be understood as a limitation of the application.

[0030] In the description of the application, if the meaning of several is more than one, the meaning of multiple is more than two, greater than, less than, more than, etc. is understood as not including the number, above, below, etc. is understood as including the number. If it is described that the first, the second is only used for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or the sequence of indicated technical features.

[0031] In the description of the present application, the words such as arrangement, installation, connection and the like should be understood in a broad sense, and the specific meanings of the words in the present application can be determined by the person skilled in the art in combination with the specific content of the technical solution.

[0032] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the present application. In the present specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0033] Since the height and angle of the chip need to be adjusted during chip detection, a rotating driving member and a height driving member are generally required in the device, and the rotating driving member is generally arranged on the output end of the height driving member, but the height driving member needs to work at high speed and frequently to quickly adjust the height of the chip, and the structure of the rotating driving member arranged on the height driving member increases the load of the height driving, thereby affecting the moving speed of the height driving member.

[0034] In view of the above problems, the present application discloses a driving structure 106, as shown in Figures 1 to 4 The driving structure 106 includes a third base 101, a moving platform 102, a first driving member 103 and a second driving member 201, the moving platform 102, the first driving member 103 and the second driving member 201 are all connected to the third base 101, wherein the moving platform 102 is used for carrying the chip, the shell of the first driving member 103 is connected to the third base 101, and the shell of the second driving member 201 is connected to the output end of the first driving member 103, so that the first driving member 103 can drive the second driving member 201 to rotate, the moving platform 102 is located on the output end of the second driving member 201, and the second driving member 201 can drive the moving platform 102 to rotate. The above structure makes the first driving member 103 drive the second driving member 201 to rotate when the chip on the moving platform 102 needs to rotate, so as to drive the moving platform 102 to rotate around its axis, and when the chip on the moving platform 102 needs to adjust the height, the first driving member 103 does not move, and the output end of the second driving member 201 drives the moving platform 102 to move in the up-down direction as shown in Figure 1

[0035] ​In the above structure, since the second driving member 201 is located on the first driving member 103, and the second driving member 201 is used to adjust the height of the moving platform 102, the first driving member 103 drives the moving platform 102 to rotate, compared with the structure in the related art, the driving structure 106 in the application effectively reduces the load on the second driving member 201, so that the second driving member 201 can drive the moving platform 102 to move quickly to change the height of the moving platform 102.

[0036] The embodiment of the application effectively reduces the load of the second driving member 201, thereby helping to improve the driving precision of the second driving member 201 to move the moving platform, and further helping to improve the motion precision of the driving structure 106 as a whole, and improving the position precision of the chip to be detected.

[0037] The use method of the above driving structure is that first, the first driving member 103 is driven to drive the second driving member 201 and the moving platform 102 to rotate together by a set angle, and then the moving platform 102 is moved by the second driving member 201 to adjust the height of the moving platform 102 in the up-down direction as shown in Figure 2 .

[0038] Specifically, as shown in Figures 1 to 4 , the driving structure 106 further comprises a guide seat 104, the guide seat 104 is located on the output end of the first driving member 103, when the moving platform 102 moves in the up-down direction as shown in Figure 2 , the guide seat 104 can guide the moving platform 102, and the motion precision of the moving platform 102 is improved.

[0039] Specifically, as shown in Figure 2 to Figure 4 , the driving structure 106 further comprises a driving slider 202, the guide seat 104 is provided with an eighth track 203, the eighth track 203 is arranged on the guide seat 104 along the direction in which the output end of the second driving member 201 moves (arranged in the up-down direction as shown in Figure 2 ), the driving slider 202 can move on the eighth track 203, the driving slider 202 is connected with the moving platform 102, so that when the second driving member 201 drives the moving platform 102 to move in the up-down direction as shown in Figure 2 , the driving slider 202 and the eighth track 203 can guide the moving platform 102, thereby ensuring the motion precision of the moving platform 102.

[0040] Specifically, as shown in Figure 2 to Figure 4As shown, the driving structure 106 further comprises a driving connecting plate 105, which is connectable with the driving slider 202 and the moving platform 102 respectively. Specifically, when the second driving member 201 works, the output end of the second driving member 201 drives the moving platform 102 to move in the up-down direction as shown, at this time, the driving connecting plate 105 connected with the moving platform 102 can move along the eighth track 203, thereby playing a guiding role on the moving platform 102. The moving platform 102 is connected with the guiding seat 104 through the driving connecting plate 105, so the structure of setting guiding blocks on the moving platform 102 is saved, thereby reducing the load of the second driving member 201 and ensuring the speed and precision of the movement of the second driving member 201. Figure 1 As shown, the driving structure 106 further comprises a driving connecting plate 105, which is connectable with the driving slider 202 and the moving platform 102 respectively. Specifically, when the second driving member 201 works, the output end of the second driving member 201 drives the moving platform 102 to move in the up-down direction as shown, at this time, the driving connecting plate 105 connected with the moving platform 102 can move along the eighth track 203, thereby playing a guiding role on the moving platform 102. The moving platform 102 is connected with the guiding seat 104 through the driving connecting plate 105, so the structure of setting guiding blocks on the moving platform 102 is saved, thereby reducing the load of the second driving member 201 and ensuring the speed and precision of the movement of the second driving member 201.

[0041] Specifically, the driving structure 106 further comprises an adjusting screw 205, the working end of which can penetrate through the driving connecting plate 105 and be connected with the moving platform 102, as shown. Figure 2 Figure 4 As shown, the driving structure 106 comprises a plurality of adjusting screws 205, which are uniformly distributed on the driving connecting plate 105. When some of the adjusting screws 205 are screwed, the working part can exert a force on the moving platform 102, thereby adjusting the height of the moving platform 102 in the direction as shown (at this time, the driving connecting plate 105 is fixed), thereby adjusting the parallelism of the moving platform 102. Figure 2

[0042] Specifically, as shown, Figure 2 Figure 4 As shown, the moving platform 102 is provided with a plurality of adsorption holes 204 on the side away from the first driving member 103, and further comprises a channel and a ventilation opening. The channel is located in the interior of the moving platform 102, and the ventilation opening is located on the outer surface of the moving platform 102. The ventilation opening is connected with the negative pressure device, and the channel is connected with the ventilation opening and all the adsorption holes. When the negative pressure device works, the negative pressure device can generate negative pressure at each adsorption hole 204 through the channel, so that the chip can be adsorbed on the adsorption hole 204, thereby completing the positioning of the chip.

[0043] Specifically, as shown, Figure 2 Figure 4 ​​​​As shown, the driving structure 106 comprises a rotation limiting structure, which comprises a limiting column and a stopper. The limiting column is fixedly connected to the third base 101, and the stopper is located on the output end of the first driving member 103. The positions of the stopper and the limiting column correspond to each other. When the first driving member 103 works and drives the moving platform 102 to rotate within a certain angle (which can be manually set), when the moving platform 102 rotates to a preset stop position, the stopper is blocked by the limiting column, thereby preventing the moving platform 102 from rotating due to inertia and affecting the accuracy of the first driving member 103.

[0044] Specifically, the side of the stopper close to the limiting column is provided with a protective pad to prevent the stopper and the limiting column from being hard collided.

[0045] Specifically, as shown in Figure 2 to Figure 4 As shown, the rotation limiting structure comprises two limiting columns, i.e., a first limiting column 206 and a second limiting column 208, and two stoppers, i.e., a first stopper 207 and a second stopper 209. The first limiting column 206 corresponds to the first stopper 207, and the second limiting column 208 corresponds to the second stopper 209. In use, the output end of the first driving member 103 can rotate by a set angle, so that the moving platform 102 can move between a preset starting position and a preset stop position. When the moving platform 102 rotates by the set angle (i.e., the moving platform 102 rotates to the preset stop position), the first stopper 207 is limited by the first limiting column 206. When the moving platform 102 is reset to the initial position (i.e., the moving platform 102 rotates to the preset starting position), the second stopper 209 is blocked by the second limiting column 208, thereby preventing the moving platform 102 from rotating due to inertia after the first driving member 103 stops moving, which affects the accuracy.

[0046] Specifically, as shown in Figure 2 to Figure 4As shown, the drive structure 106 also includes a limit switch, which includes a first identification device 210, a second identification device 211, and a drive identification structure 212. The drive identification structure 212 is connected to the output end of the first drive member 103, so that the drive identification structure 212 can rotate synchronously with the moving platform 102. The first identification device 210 and the second identification device 211 are both connected to the third base 101. The first identification device 210 and the second identification device 211 can identify the drive identification structure 212. The first identification device 210 is connected to the first drive member 103, and the second identification device 211 is connected to the first drive member 103. During the process of the first drive member 103 driving the moving platform 102 to rotate from the starting position to the stop position, when the first identification device 210 identifies the drive identification structure 212, the first drive member 103 stops moving. During the process of the first drive member 103 driving the moving platform 102 to reset from the stop position to the starting position, when the second identification device 211 identifies the drive identification structure 212, the first drive member 103 stops moving.

[0047] Specifically, when the first identification device 210 identifies the drive identification structure 212, the first drive member 103 stops moving. At this time, the first stop 207 is limited by the first limiting post 206, causing the moving platform 102 to stop moving and ensuring the rotation accuracy of the moving platform 102. When the second identification device 211 identifies the drive identification structure 212, the first drive member 103 stops moving. At this time, the second stop 209 is limited by the second limiting post 208, causing the moving platform 102 to stop moving and ensuring the reset accuracy of the moving platform 102.

[0048] Based on the structure of the limit switch, the rotation limit structure, the first drive member 103 and the second drive member 201, it can be seen that during the detection process, the range of rotation of the moving platform 102 driven by the first drive member 103 is limited. Therefore, even if the second drive member 201 is located at the output end of the first drive member 103, its influence on the overall movement of the drive structure 106 is relatively small. Compared with related technologies, the drive structure 106 in this invention has more advantages.

[0049] Specifically, the drive structure 106 also includes an encoder, which is connected to the guide seat 104. The encoder is used to measure the second drive member 201 driving the moving platform 102 in the following manner: Figure 2 The displacement shown is the vertical movement.

[0050] The present invention also discloses a chip testing device, which includes a probe 501 and a driving structure 106 in any of the above embodiments. When a chip located on a mobile platform 102 is moved to a set position by the driving structure 106, the probe 501 can test the chip located on the mobile platform 102.

[0051] The embodiments of the present application are described in detail above with reference to the drawings, but the present application is not limited to the above-described embodiments,

[0052] Within the scope of knowledge of those skilled in the art, various changes can be made without departing from the spirit of the present application. Furthermore, the embodiments of the present application and the features in the embodiments can be combined with each other in the case where there is no conflict.

Claims

1. A drive structure, characterized by, The utility model relates to a driving structure of chip detection device, including: Third base; Mobile platform for carrying chip; First drive, the shell of first drive is located on third base; Second drive, the shell of second drive is located on the output end of first drive, and the mobile platform is located on the output end of second drive; First drive is used for driving mobile platform to rotate around the axis of mobile platform, and second drive is used for changing the height of mobile platform relative to third base; Rotation limiting structure, rotation limiting structure includes limit post and fender, limit post is connected to third base, and fender is located on the output end of first drive; Rotation limiting structure includes two limit posts and two fenders, and is first limit post, second limit post, first fender and second fender respectively, first fender corresponds with first limit post, second fender corresponds with second limit post, and first fender and second fender can move within the angle range formed by first limit post and second limit post; Still include guide seat and drive sliding block, guide seat is located on the output end of first drive, and the eighth track along the movement direction of the output end of second drive is arranged on guide seat, drive sliding block can move along eighth track, and eighth track is connected with mobile platform; Still include drive connecting plate and a plurality of adjusting screws, drive connecting plate can be connected with drive sliding block and mobile platform respectively, the working part of adjusting screw can penetrate drive connecting plate and be connected with mobile platform, adjusting screw is evenly distributed on drive connecting plate, when part of adjusting screw is screwed, the force of mobile platform can be applied through the working part, so as to adjust the height of mobile platform, at this time, drive connecting plate is fixed, so as to adjust the parallelism of mobile platform.

2. The drive structure of claim 1, wherein The side of mobile platform away from first drive is provided with a plurality of adsorption holes, and the mobile platform is also provided with a channel and a ventilation opening, the ventilation opening is used to be connected with a negative pressure device, the channel is in communication with the ventilation opening, and the channel can be in communication with all the adsorption holes.

3. The drive structure of claim 1, wherein The side of fender relative to limit post is provided with a protective pad.

4. The drive structure of claim 1, wherein Still include travel switch, travel switch includes first identification device, second identification device and drive identification structure, drive identification structure is connected to the output end of first drive, first identification device and second identification device are connected to third base, first identification device and first drive are electrically connected, and second identification device and first drive are electrically connected.

5. The drive structure of claim 1, wherein Still include encoder, encoder is connected with guide seat, and is arranged close to eighth track.

6. A chip testing apparatus characterized by comprising: Including probe and the driving structure of chip detection device as claimed in any one of claims 1 to 5, probe is used to detect the chip on mobile platform. Including probe and the driving structure of chip detection device as claimed in any one of claims 1 to 5, probe is used to detect the chip on mobile platform.

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