Cavity structure, equipment and method for thin film permeation testing

Abstract

The present disclosure provides a cavity structure, equipment and method for thin film permeation testing, wherein the cavity structure includes a test cavity; a groove for being opposite to a sample is provided on one side of the opening of the test cavity, the test cavity is provided with an exhaust port connected to the groove, and the test cavity is further provided with a carrier gas inlet port and a carrier gas outlet port respectively connected to the inner cavity of the test cavity; the present disclosure can detect whether a sample is placed between the test cavities, effectively avoiding invalid tests and damage to sensors; and realizes upper cavity-free testing, which can ensure the consistency of temperature and humidity during batch testing, realize more accurate batch testing, and improve test accuracy.

Description

Technical Field

[0001] The present disclosure relates to the technical field of thin film penetration testing, and in particular to a cavity structure, equipment, and method for thin film penetration testing. Background Art

[0002] The statements in this section merely provide background information related to the present disclosure and do not necessarily constitute prior art.

[0003] When conducting film penetration testing, the existing test structure consists of an upper test chamber and a lower test chamber, with the test sample (film) placed between the upper and lower chambers. During the test, the upper test chamber presses the test sample against the lower chamber.

[0004] The inventors of the present disclosure discovered that:

[0005] (1) Existing film penetration testing products usually do not pre-judge whether to place a sample and start the test directly. If there is no sample placed between the upper and lower chambers during the test, the system will not know and the test will continue. In the worst case, the test will fail or the sensor will be damaged.

[0006] (2) Most existing gas permeation test equipment uses a combination of an upper test chamber and a lower test chamber. When testing batches of samples, it is necessary to ensure that the upper and lower chamber environments of each test structure are consistent. This results in low control accuracy and large errors in the final test results.

[0007] (3) Most existing gas permeation test systems place the sensor elements and electrical components below the test chamber. When controlling the temperature and humidity, condensation or cooling water leakage is likely to occur, which in turn has a significant impact on the sensor elements and electrical components.

[0008] (4) In the existing gas permeation test system, the upper test chamber presses the test sample onto the lower test chamber. When the test sample is replaced, the upper test chamber is opened to complete the sample replacement. This structure occupies a large space. Two or more multi-chamber structures can only be arranged in a flat manner. When replacing the sample, the upper test chamber needs to be opened. Once the operation is wrong, the upper test chamber is easy to slide onto the lower test chamber, injuring the operator and causing damage to parts. Summary of the Invention

[0009] In order to address the deficiencies of the prior art, the present disclosure provides a cavity structure, equipment and method for thin film permeability testing, which can detect whether a sample is placed between the test cavities, effectively avoiding invalid tests and damage to the sensor; it realizes upper cavity-free testing, can ensure the consistency of temperature and humidity during batch testing, achieve more accurate batch testing, and improve test accuracy.

[0010] In order to achieve the above objectives, the present disclosure adopts the following technical solutions:

[0011] A first aspect of the present disclosure provides a cavity structure for a thin film permeation test.

[0012] A cavity structure for film permeation testing, comprising:

[0013] Test chamber;

[0014] A groove for facing the sample is formed on one side of the opening of the test cavity, an exhaust port connected to the groove is formed in the test cavity, and a carrier gas inlet port and a carrier gas outlet port are respectively formed in the test cavity.

[0015] As some possible implementations, a vacuum ring is provided in the groove, and the vacuum ring is a porous mesh support body.

[0016] As some possible implementations, the groove is a closed-loop groove opening around the inner cavity of the test cavity.

[0017] As some possible implementations, the groove is a non-closed ring groove that is open around the inner cavity of the test cavity.

[0018] As some possible implementations, the grooves are grooves arranged at intervals around the inner cavity opening of the test cavity.

[0019] As some possible implementations, the grooves are a plurality of grooves opening around the inner cavity of the test cavity, and at least one hole communicating with the air extraction port is opened between two adjacent grooves.

[0020] As some possible implementations, each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

[0021] A second aspect of the present disclosure provides a cavity structure for thin film permeation testing.

[0022] A cavity structure for film permeation testing, comprising:

[0023] Test chamber;

[0024] The test cavity has a plurality of holes on one side of its opening for facing the sample, an exhaust port connected to each hole, and a carrier gas inlet port and a carrier gas outlet port respectively connected to the inner cavity of the test cavity.

[0025] As some possible implementations, a porous mesh support is provided in the hole.

[0026] As some possible implementations, the distances between adjacent holes are the same.

[0027] As some possible implementations, the holes are sequentially arranged around the inner opening of the test cavity.

[0028] As some possible implementations, at least one groove communicating with the air extraction port is provided between two adjacent holes.

[0029] As some possible implementations, each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

[0030] A third aspect of the present disclosure provides a film penetration test device, comprising the cavity structure for the film penetration test according to the first aspect or the second aspect of the present disclosure.

[0031] A fourth aspect of the present disclosure provides a film permeation testing device.

[0032] A film permeation testing device includes a first chamber body and a second chamber body, both of which contain an inner cavity. The first chamber body is arranged on the upper part or side of the second chamber body. At least one sensing element is arranged in the inner cavity of the first chamber body. The inner cavity of the second chamber body is provided with at least one cavity structure described in the first aspect or the second aspect of the present disclosure. The inner cavity of the first chamber body and the inner cavity of the second chamber body are connected by at least one pipeline.

[0033] As some possible implementations, at least one plate is fixed to the side wall of the inner cavity where the cavity structure is located, at least one cavity structure is connected to the moving end of the driving mechanism on the plate, and at least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located;

[0034] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure. The second end of the push-pull member is provided with a baffle and is located outside the bin body. A sealing gasket is provided on the side of the baffle opposite to the through slot.

[0035] As a further limitation, it includes at least two parallel plates, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate.

[0036] As a further limitation, it includes at least two parallel plates, each of which is fixed with at least two parallel guide grooves on both sides for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through respectively, and a groove for the pipeline to pass through is provided on the top wall of the inner cavity where the cavity structure is located.

[0037] As some possible implementation methods, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas supply device, and the metal hose is located in the inner cavity where the cavity structure is located.

[0038] As some possible implementations, each independent inner cavity is surrounded by a heat insulation board.

[0039] As some possible implementations, a temperature control module is provided on the side wall of each independent inner cavity, and the temperature control module includes at least one circulation fan for performing spatial air circulation.

[0040] As some possible implementation methods, a test gas exhaust port and a test gas inlet are opened on the side wall of the inner cavity where the cavity structure is located, and a temperature sensor, a humidity sensor and a humidity generating device are provided in the inner cavity where the cavity structure is located, and the humidity generating device is connected to the test gas inlet.

[0041] A fifth aspect of the present disclosure provides a film permeation testing device.

[0042] A film permeation testing device includes a chamber body containing an inner cavity, a plate is provided in the inner cavity of the chamber body, the plate divides the inner cavity into an independent first inner cavity and a second inner cavity, the first inner cavity is arranged at the upper part or side of the second inner cavity, at least one sensing element is arranged in the first inner cavity, and at least one cavity structure described in the first aspect or the second aspect of the present disclosure is arranged in the second inner cavity, and at least one through hole for a pipeline to pass through is provided on the plate.

[0043] As some possible implementations, at least one plate is fixed to the side wall of the inner cavity where the cavity structure is located, at least one cavity structure is connected to the moving end of the driving mechanism on the plate, and at least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located;

[0044] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure. The second end of the push-pull member is provided with a baffle and is located outside the bin body. A sealing gasket is provided on the side of the baffle opposite to the through slot.

[0045] As a further limitation, it includes at least two parallel plates, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate.

[0046] As a further limitation, it includes at least two parallel plates, each of which is fixed with at least two parallel guide grooves on both sides for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through respectively, and a groove for the pipeline to pass through is provided on the top wall of the inner cavity where the cavity structure is located.

[0047] As some possible implementation methods, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas supply device, and the metal hose is located in the inner cavity where the cavity structure is located.

[0048] As some possible implementations, each independent inner cavity is surrounded by a heat insulation board.

[0049] As some possible implementations, a temperature control module is provided on the side wall of each independent inner cavity, and the temperature control module includes at least one circulation fan for performing spatial air circulation.

[0050] As some possible implementation methods, a test gas exhaust port and a test gas inlet are opened on the side wall of the inner cavity where the cavity structure is located, and a temperature sensor, a humidity sensor and a humidity generating device are provided in the inner cavity where the cavity structure is located, and the humidity generating device is connected to the test gas inlet.

[0051] A sixth aspect of the present disclosure provides a film penetration test method, using the film penetration test device according to the fourth aspect or the fifth aspect of the present disclosure, comprising the following steps:

[0052] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0053] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable, the gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0054] A seventh aspect of the present disclosure provides a film penetration test method, using the film penetration test device according to the fourth aspect or the fifth aspect of the present disclosure, comprising the following steps:

[0055] Before the test begins, the driving mechanism pushes the cavity structure out through the through slot. After the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket.

[0056] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0057] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable, the gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0058] Compared with the prior art, the present invention has the following advantages:

[0059] 1. The cavity structure, equipment or method for film permeation testing disclosed in the present invention can realize testing without an upper cavity, that is, when multiple cavity structures are in the same test environment, the consistency of temperature and humidity can be ensured, more accurate batch testing can be achieved, and test accuracy can be improved.

[0060] 2. The cavity structure, equipment or method for the film permeation test disclosed in the present invention allows each independent inner cavity space to be individually temperature controlled, which greatly improves the temperature control effect and ensures the accuracy of the test results.

[0061] 3. The cavity structure, equipment or method for thin film permeation testing disclosed in the present invention can detect whether a sample is placed between the test cavities, effectively avoiding invalid tests and damage to sensors.

[0062] 4. The cavity structure, equipment or method of the film penetration test disclosed in the present invention can achieve effective adsorption of the sample by setting grooves or air holes on the test cavity and combining a vacuum pumping device, thereby effectively detecting whether the sample is placed between the test cavities.

[0063] 5. The cavity structure, equipment or method of the film permeation test disclosed in the present invention, when the groove is deep, by providing a porous mesh support body, the support body serves as a medium between the groove and the sample, and combined with a vacuum device, it can achieve effective adsorption of the sample and avoid serious deformation of the sample.

[0064] 6. The cavity structure, equipment or method of the film permeation test disclosed in the present invention does not require a porous mesh support when the groove is shallow or at least one small hole is used for sample adsorption. Effective adsorption can be achieved directly without causing significant sample deformation.

[0065] 7. The film penetration testing equipment or method disclosed in the present invention can achieve stable entry and exit of the cavity structure in the through groove through the cooperation of the metal hose, metal tube and U-shaped groove, effectively avoiding the impact of the movement of the cavity structure on the test accuracy of the sensor element.

[0066] 8. The film permeation testing device or method disclosed in the present invention, by providing baffles and sealing gaskets, ensures the sealing of the space where the cavity structure is located while achieving rapid sample change, thereby improving the stability of the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0067] The accompanying drawings, which constitute a part of the present disclosure, are used to provide a further understanding of the present disclosure. The exemplary embodiments of the present disclosure and their descriptions are used to explain the present disclosure and do not constitute an improper limitation to the present disclosure.

[0068] Figure 1 Schematic diagram of the cavity structure for thin film penetration detection provided in Example 1 of the present disclosure.

[0069] Figure 2 Schematic diagram of the cavity structure for thin film penetration detection provided in Example 2 of the present disclosure.

[0070] Figure 3This is a schematic structural diagram of the film penetration testing equipment provided in Example 6 of the present disclosure.

[0071] Figure 4 This is a schematic structural diagram of the pop-up test chamber provided in Example 6 of the present disclosure.

[0072] Among them, 1. sensor chamber; 2. valve assembly; 3. sensor chamber drain outlet; 4. metal pipe; 5. sealing gasket; 6. wind shield; 7. pop-up test chamber; 8. test chamber chamber drain outlet; 9. test chamber; 10. test chamber chamber temperature control assembly; 11. sensor chamber temperature control assembly; 12. control valve; 13. electrical component; 14. sensing element; 15. test gas outlet; 16. temperature sensor; 17. humidity sensor; 18. test gas inlet; 19. humidity generator;

[0073] 7-1. Substrate; 7-2. Connector; 7-3. Test chamber structure; 7-4. U-shaped groove; 7-5. Metal hose; 7-3-1. Test sample; 7-3-2. Test chamber; 7-3-3. Carrier gas inlet channel; 7-3-4. Carrier gas outflow channel; 7-3-5. Vacuum pipe; 7-3-6. Vacuum ring. DETAILED DESCRIPTION

[0074] The present disclosure will be further described below with reference to the accompanying drawings and embodiments.

[0075] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of the present disclosure. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the art to which the present disclosure belongs.

[0076] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments according to the present disclosure. As used herein, unless the context clearly indicates otherwise, the singular form is intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they indicate the presence of features, steps, operations, devices, components and / or combinations thereof.

[0077] In the absence of conflict, the embodiments of the present disclosure and the features thereof may be combined with each other.

[0078] Example 1:

[0079] like Figure 1 As shown, embodiment 1 of the present disclosure provides a cavity structure for film permeation testing, including: a test cavity 7-3-2;

[0080] A groove is provided on one side of the opening of the test cavity 7-3-2 for being opposite to the test sample 7-3-1, and a vacuum ring 7-3-6 is provided in the groove. The test cavity 7-3-2 is provided with an exhaust port connected to the groove, and the connecting channel constitutes a vacuum pipe 7-3-5, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum pumping device, which can preferably be a vacuum pump or a vacuum generator.

[0081] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the groove, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the groove, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0082] The test cavity also has a carrier gas inlet port connected to the inner cavity of the test cavity respectively, and the connecting channel constitutes a carrier gas inlet channel 7-3-3, that is, the port of the carrier gas inlet channel 7-3-3 is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0083] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0084] The test cavity is also provided with carrier gas outlet ports respectively connected to the inner cavity of the test cavity, and the connecting channels constitute carrier gas outflow channels 7-3-4, and the other end of the carrier gas outflow channels 7-3-4 is connected to the outside of the test cavity.

[0085] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0086] In this embodiment, the groove is a closed-loop groove around the inner cavity opening of the test cavity. It can be understood that in some other embodiments, the groove is a non-closed-loop groove around the inner cavity opening of the test cavity, such as a semicircular groove or an arc-shaped groove or a square groove, etc. Of course, the groove here can also be a plurality of intermittent grooves arranged at intervals, or at least one hole connected to the exhaust port can be arranged between two adjacent intermittent grooves. Those skilled in the art can select the groove shape according to the specific working conditions; it will not be repeated here.

[0087] Each test cavity includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0088] In this embodiment, the vacuum ring is a porous mesh support body. The mesh support body can be a metal sintered mesh, porous ceramics, metal mesh, etc., or a metal part or non-metal part with small holes. Technical personnel in this field can choose according to the specific working conditions, which will not be repeated here.

[0089] When the vacuum device is evacuating, a vacuum is generated in the groove, and the test sample is tightly adsorbed on the test cavity, and a certain vacuum degree is maintained at the vacuum ring;

[0090] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0091] Example 2:

[0092] like Figure 2 As shown, embodiment 2 of the present disclosure provides a cavity structure for film permeation testing, including: a test cavity 7-3-2;

[0093] A groove is provided on one side of the opening of the test cavity 7-3-2 for being opposite to the test sample 7-3-1. The test cavity 7-3-2 is provided with an exhaust port connected to the groove. The connecting channel constitutes a vacuum tube 7-3-5, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device. The vacuum device can preferably be a vacuum pump or a vacuum generator.

[0094] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the groove, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the groove, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0095] The test cavity also has a carrier gas inlet port connected to the inner cavity of the test cavity respectively, and the connecting channel constitutes a carrier gas inlet channel 7-3-3, that is, the port of the carrier gas inlet channel 7-3-3 is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0096] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0097] The test cavity is also provided with carrier gas outlet ports respectively connected to the inner cavity of the test cavity, and the connecting channels constitute carrier gas outflow channels 7-3-4, and the other end of the carrier gas outflow channels 7-3-4 is connected to the outside of the test cavity.

[0098] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0099] In this embodiment, the groove is a closed-loop groove around the inner cavity opening of the test cavity. It can be understood that in some other embodiments, the groove is a non-closed-loop groove around the inner cavity opening of the test cavity, such as a semicircular groove or an arc-shaped groove or a square groove, etc. Of course, the groove here can also be a plurality of intermittent grooves arranged at segmented intervals. Those skilled in the art can select the groove shape according to the specific working conditions; it will not be repeated here.

[0100] Each test cavity includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0101] During the film permeation test, when the vacuum generator is evacuated, a vacuum is generated in the groove, and the test sample is tightly adsorbed on the test cavity, maintaining a certain vacuum degree in the groove;

[0102] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0103] Example 3:

[0104] Embodiment 3 of the present disclosure provides a cavity structure for film permeation testing, comprising: a test cavity;

[0105] One side of the opening of the test cavity is provided with a plurality of holes for facing the test sample, and the test cavity is provided with an exhaust port connected to the holes, and the connecting channel constitutes a vacuum tube, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device, which can preferably be a vacuum pump or a vacuum generator.

[0106] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the hole, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the hole, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0107] The test cavity also has a carrier gas inlet port connected to the inner cavity of the test cavity respectively, and the connecting channel constitutes a carrier gas inlet channel, that is, the port of the carrier gas inlet channel is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0108] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0109] The test cavity is further provided with carrier gas outlet ports respectively connected with the inner cavity of the test cavity. The connecting passages constitute carrier gas outflow passages, and the other ends of the carrier gas outflow passages are connected with the outside of the test cavity.

[0110] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0111] Each test cavity includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0112] In this embodiment, the holes are multiple holes arranged at intervals. The holes can be arranged in a circular manner, or in other random arrangements. At least one groove connected to the exhaust port can be set between adjacent holes. Those skilled in the art can make a choice based on the specific working conditions, which will not be repeated here.

[0113] During the film permeation test, when the vacuum generator is evacuated, a vacuum is generated at the hole, and the test sample is tightly adsorbed on the test cavity, maintaining a certain vacuum degree at the hole;

[0114] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0115] Example 4:

[0116] Embodiment 4 of the present disclosure provides a cavity structure for film permeation testing, comprising: a test cavity;

[0117] A plurality of holes are provided on one side of the opening of the test cavity for facing the sample to be tested, and a porous mesh support body is provided in the holes. The test cavity is provided with an exhaust port connected to the holes, and the connecting channel constitutes a vacuum tube, that is, the exhaust port is connected to one end of the vacuum tube, and the other end of the vacuum tube is connected to the vacuum device, which can preferably be a vacuum pump or a vacuum generator.

[0118] It can be understood that in some other embodiments, a vacuum tube is provided in the communicating channel, one end of the vacuum tube is communicated with the hole, and the other end of the vacuum tube is communicated with the vacuum pumping device; of course, one end of the vacuum tube can also be sealed and communicated with the inner part of the communicating channel close to the hole, and the other end of the vacuum tube passes through the remaining part of the communicating channel and is communicated with the vacuum pumping device. Those skilled in the art can make a choice according to the specific working conditions, which will not be elaborated here.

[0119] The test cavity also has a carrier gas inlet port connected to the inner cavity of the test cavity respectively, and the connecting channel constitutes a carrier gas inlet channel, that is, the port of the carrier gas inlet channel is connected to one end of the carrier gas inlet pipe, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device, and the carrier gas supply device is preferably a carrier gas generator.

[0120] It can be understood that in some other embodiments, a carrier gas inlet pipe is provided in the connecting channel, one end of the carrier gas inlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device; of course, one end of the carrier gas inlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas inlet pipe is connected to the carrier gas supply device after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, which will not be repeated here.

[0121] The test cavity is further provided with carrier gas outlet ports respectively connected with the inner cavity of the test cavity. The connecting passages constitute carrier gas outflow passages, and the other ends of the carrier gas outflow passages are connected with the outside of the test cavity.

[0122] It can be understood that in some other embodiments, a carrier gas outlet pipe is provided in the connecting channel, one end of the carrier gas outlet pipe is connected to the inner cavity of the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world; of course, one end of the carrier gas outlet pipe can also be sealed and connected to the part of the inner cavity of the connecting channel close to the test cavity, and the other end of the carrier gas outlet pipe is connected to the outside world after passing through the remaining part of the connecting channel. Those skilled in the art can make a choice according to the specific working conditions, and will not go into details here.

[0123] Each test cavity includes at least one inner cavity. In this embodiment, one inner cavity is preferred. Those skilled in the art can select the number of inner cavities according to specific working conditions, which will not be described in detail here.

[0124] In this embodiment, the porous mesh support body can be a metal sintered mesh, porous ceramics, metal mesh, etc., or a metal part or non-metal part with small holes, etc. Those skilled in the art can choose according to the specific working conditions, which will not be repeated here.

[0125] In this embodiment, the holes are multiple holes arranged at intervals. The holes can be arranged in a circular manner, or in other random arrangements. At least one groove connected to the exhaust port can be set between adjacent holes. Those skilled in the art can make a choice based on the specific working conditions, which will not be repeated here.

[0126] During the film permeation test, when the vacuum generator is evacuated, a vacuum is generated at the hole, and the test sample is tightly adsorbed on the test cavity, maintaining a certain vacuum degree at the hole;

[0127] The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable (such as the introduction of oxygen or water vapor), this gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0128] Example 5:

[0129] Embodiment 5 of the present disclosure provides a thin film penetration testing device, including the cavity structure of the thin film penetration test described in Embodiment 1, Embodiment 2, Embodiment 3, or Embodiment 4 of the present disclosure.

[0130] Example 6:

[0131] like Figure 3 As shown, embodiment 6 of the present disclosure provides a film permeation testing device, the testing device includes a chamber structure, the chamber structure includes a test chamber 9 (i.e., a second chamber) and a sensor chamber 1 (i.e., a first chamber), both of which contain an inner cavity;

[0132] The sensor compartment 1 is arranged at the upper part of the test cavity compartment 9, and at least one sensor element 14 is arranged in the inner cavity of the sensor compartment 1. At least one pop-up test cavity 7 is arranged in the inner cavity of the test cavity compartment 9. The pop-up test cavity 7 includes the test cavity structure 7-3 described in Example 1 or Example 2 or Example 3 or Example 4 of the present disclosure. The inner cavity of the sensor compartment 1 and the inner cavity of the test cavity compartment 9 are connected by at least one pipeline.

[0133] In this embodiment, a sensor chamber drain port 3 is further provided on the sensor chamber 1, and a test chamber drain port 8 is further provided on the test chamber 9. The air outlet port of the sensor element 14 is connected to the outside of the sensor chamber 1 through a pipeline, and a control valve 12 is provided on the pipeline.

[0134] At least one base plate 7-1 is fixed to the side wall of the inner cavity where the cavity structure 7-3 is located (in this embodiment, three base plates are preferably used in parallel up and down). At least one cavity structure is connected to the moving end of the driving mechanism on the plate. At least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located.

[0135] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure 7-3. The second end of the push-pull member is provided with a windshield cover 6 and is located outside the warehouse body. A sealing gasket 5 is provided on the side of the windshield cover 6 opposite to the through slot.

[0136] In this embodiment, the driving mechanism is preferably a cylinder. It can be understood that in some other embodiments, the driving mechanism can also be an electric cylinder mechanism, an electromagnetic driving mechanism, or a hydraulic driving mechanism. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0137] It can be understood that in some other embodiments, at least two parallel base plates are included, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate, and a groove for the pipeline to pass through is provided on the top wall of the inner cavity where the cavity structure is located.

[0138] It is understandable that in some other embodiments, at least two parallel substrates are included, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each substrate.

[0139] In this embodiment, the carrier gas outlet port and the carrier gas inlet port of the cavity structure are respectively connected to one end of the corresponding metal tube 4 through different metal hoses 7-5. Preferably, the metal hose 7-5 is connected to the metal tube 4 through the connector 7-2, and the other end of one metal tube 4 is connected to the sensor element 14 through the valve assembly 2, and the other end of the other metal tube 4 is connected to the carrier gas supply device, and the metal hose 7-5 is located in the inner cavity where the cavity structure is located.

[0140] Specifically, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas supply device, and the metal hose is located in the inner cavity where the cavity structure is located; wherein, the first metal hose passes through two grooves with opposite openings, and the second metal hose passes through the other two grooves with opposite openings.

[0141] In this embodiment, each groove includes two parallel and opposite groove plates, which are fixedly connected to the plate. It can be understood that in some other embodiments, grooves can be directly opened on the plate. The grooves can be U-shaped grooves, rectangular grooves, trapezoidal grooves, etc. Those skilled in the art can make choices based on specific working conditions, which will not be elaborated here.

[0142] In this embodiment, a temperature control component is provided on the side wall of each independent inner cavity; preferably, a test cavity temperature control component 10 is provided in the inner cavity of the test cavity, and a sensor cavity temperature control component 11 is provided in the inner cavity of the sensor cavity 1;

[0143] The temperature control component includes at least one circulation fan for spatial air circulation; in this embodiment, a circulation fan is preferably provided in the sensor compartment, and three circulation fans are provided in the test cavity compartment (each circulation fan corresponds to a cavity structure). The number of circulation fans can be designed according to the specific airflow direction and the size of the cavity in the compartment or the number of cavity structures, which will not be repeated here.

[0144] It is understandable that in some other embodiments, the temperature control component can be set only in the test cavity 9 or the sensor cavity 1. Those skilled in the art can make a choice according to the specific working conditions, which will not be described here.

[0145] At least one electrical element 13 connected to a sensing element 14 is disposed in the inner cavity of the sensor compartment 1 .

[0146] In this embodiment, the test chamber 9 and the sensor chamber 1 are surrounded by insulation boards. It can be understood that in some other embodiments, only the test chamber 9 or the sensor chamber 1 may be surrounded by insulation boards, or only the panels of the two chamber bodies that are in contact with each other may be made of insulation boards. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0147] In this embodiment, the test cavity 9 and the sensor cavity 1 have the same shape and size, and the sensor cavity 1 is fixed directly above the test cavity 9. It can be understood that in some other embodiments, the shapes and sizes of the test cavity 9 and the sensor cavity 1 may also be different; the sensor cavity 1 may also be arranged on the side of the test cavity 9, that is, the two are arranged horizontally side by side, as long as they are not arranged below the test cavity 9. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0148] In this embodiment, a test gas outlet 15 and a test gas inlet 18 are further provided in the test chamber. A temperature sensor 16, a humidity sensor 17 and a humidity generator 19 are also provided in the test chamber.

[0149] Before the test begins, the driving mechanism pushes the cavity structure out through the through slot. After the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket.

[0150] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0151] The test sample is exposed in the inner cavity space of the chamber, and the test gas is injected through the test gas inlet. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0152] When used for water vapor testing, the test gas outlet 15, the test gas inlet 18, the temperature sensor 16, the humidity sensor 17 and the humidity generating device 19 are combined to implement a water vapor penetration test at a preset humidity.

[0153] Example 7:

[0154] Embodiment 7 of the present disclosure provides a film permeation testing device, comprising a chamber body having an inner cavity, wherein a plate is provided in the inner cavity of the chamber body, the plate dividing the inner cavity into a first inner cavity and a second inner cavity, wherein the first inner cavity is provided above or to the side of the second inner cavity;

[0155] The chamber structure includes a test chamber (i.e., the second chamber) and a sensor chamber (i.e., the first chamber), both of which contain an inner cavity. The test chamber (i.e., the second chamber) and the sensor chamber are divided by a plate through an inner cavity in the chamber structure.

[0156] The sensor compartment is arranged at the upper part of the test cavity compartment, and at least one sensing element is arranged in the inner cavity of the sensor compartment 1. The inner cavity of the test cavity compartment is provided with at least one cavity structure described in Example 1 or Example 2 or Example 3 or Example 4 of the present disclosure, and the cavity structure is a pop-up test cavity. The inner cavity of the sensor compartment and the inner cavity of the test cavity compartment are connected by at least one pipeline.

[0157] In this embodiment, a sensor compartment drain port is provided on the sensor compartment, and a test cavity compartment drain port is provided on the test cavity compartment. The air outlet port of the sensing element is connected to the outside of the sensor compartment through a pipeline, and a control valve is provided on the pipeline.

[0158] At least one base plate is fixed to the side wall of the inner cavity where the cavity structure is located, at least one cavity structure is connected to the moving end of the driving mechanism on the plate, and at least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located;

[0159] The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure. The second end of the push-pull member is provided with a baffle and is located outside the bin body. A sealing gasket is provided on the side of the baffle opposite to the through slot.

[0160] In this embodiment, the driving mechanism is preferably a cylinder. It can be understood that in some other embodiments, the driving mechanism can also be an electric cylinder mechanism, an electromagnetic driving mechanism, or a hydraulic driving mechanism. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0161] It can be understood that in some other embodiments, at least two parallel base plates are included, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each plate, and a groove for the pipeline to pass through is provided on the top wall of the inner cavity where the cavity structure is located.

[0162] It is understandable that in some other embodiments, at least two parallel substrates are included, and at least two parallel guide grooves for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through are fixed on both sides of each substrate.

[0163] In this embodiment, the carrier gas outlet port and the carrier gas inlet port of the cavity structure are respectively connected to one end of the corresponding metal tube 4 through different metal hoses 7-5. Preferably, the metal hose 7-5 is connected to the metal tube 4 through the connector 7-2, and the other end of one metal tube 4 is connected to the sensor element 14 through the valve assembly 2, and the other end of the other metal tube 4 is connected to the carrier gas supply device, and the metal hose 7-5 is located in the inner cavity where the cavity structure is located.

[0164] Specifically, the carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas supply device, and the metal hose is located in the inner cavity where the cavity structure is located; wherein, the first metal hose passes through two grooves with opposite openings, and the second metal hose passes through the other two grooves with opposite openings.

[0165] In this embodiment, each groove includes two parallel and opposite groove plates, which are fixedly connected to the plate. It can be understood that in some other embodiments, grooves can be directly opened on the plate. The grooves can be U-shaped grooves, rectangular grooves, trapezoidal grooves, etc. Those skilled in the art can make choices based on specific working conditions, which will not be elaborated here.

[0166] In this embodiment, a temperature control component is provided on the side wall of each independent inner cavity, a test cavity temperature control component is provided in the inner cavity of the test cavity, and a sensor cavity temperature control component is provided in the inner cavity of the sensor cavity; the temperature control component includes at least one circulation fan for spatial air circulation; in this embodiment, preferably, one circulation fan is provided in the sensor cavity, and three circulation fans are provided in the test cavity (each circulation fan corresponds to a cavity structure). The number of circulation fans can be designed according to the specific airflow direction and the size of the cavity in the cavity or the number of cavity structures, which will not be repeated here.

[0167] It is understandable that in some other embodiments, the temperature control component can be set only in the test cavity or the sensor cavity. Those skilled in the art can make a choice according to the specific working conditions, which will not be described here.

[0168] At least one electrical element connected to the sensing element is arranged in the inner cavity of the sensor compartment.

[0169] In this embodiment, the test cavity and the sensor cavity are surrounded by insulation boards. It can be understood that in some other embodiments, only the test cavity or the sensor cavity may be surrounded by insulation boards, or only the panels of the two cavity bodies that are in contact with each other may be made of insulation boards. Those skilled in the art can make a choice based on the specific working conditions, which will not be elaborated here.

[0170] In this embodiment, the test cavity and the sensor cavity are of the same shape and size, and the sensor cavity is fixed directly above the test cavity. It can be understood that in some other embodiments, the shapes and sizes of the test cavity and the sensor cavity may also be different; the sensor cavity may also be arranged on the side of the test cavity, that is, the two are arranged side by side horizontally, as long as they are not arranged below the test cavity. Those skilled in the art can design it according to the specific working conditions, which will not be repeated here.

[0171] In this embodiment, a test gas outlet and a test gas inlet are further provided in the test chamber, and a temperature sensor, a humidity sensor and a humidity generating device are also provided in the test chamber;

[0172] Before the test begins, the driving mechanism pushes the cavity structure out through the through slot. After the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket.

[0173] When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained;

[0174] The test sample is exposed in the inner cavity space of the chamber, and the test gas is injected through the test gas inlet. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

[0175] When used for water vapor testing, the test gas outlet, test gas inlet, temperature sensor, humidity sensor and humidity generating device are combined to achieve water vapor penetration testing at a preset humidity.

[0176] The foregoing description is merely a preferred embodiment of the present disclosure and is not intended to limit the present disclosure. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present disclosure shall be included within the scope of protection of the present disclosure.

Claims

1. A film permeation testing device, characterized in that: The device comprises a first housing and a second housing, each of which has an inner cavity. The first housing is disposed on an upper portion or a side portion of the second housing. At least one sensing element is disposed in the inner cavity of the first housing, and at least one cavity structure is disposed in the inner cavity of the second housing. The inner cavities of the first housing and the second housing are connected via at least one pipeline. The cavity structure includes: a test cavity; A groove is formed on one side of the opening of the test chamber for facing the sample, and the test chamber is provided with an exhaust port connected to the groove. The test chamber is also provided with a carrier gas inlet port and a carrier gas outlet port respectively connected to the inner cavity of the test chamber; When the vacuum pump is working, the test sample is adsorbed on the open side of the test chamber and the preset vacuum level is maintained in the tank. The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test chamber. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

2. The film permeation testing device according to claim 1, characterized in that: A vacuum ring is provided in the groove, and the vacuum ring is a porous mesh support body.

3. The film permeation testing device according to claim 1, wherein: The groove is a closed-loop groove that surrounds the inner opening of the test cavity.

4. The film permeation testing device according to claim 1, wherein: The groove is a non-closed ring groove that is open around the inner cavity of the test cavity.

5. The film permeation testing device according to claim 1, wherein: The grooves are multiple grooves arranged at intervals around the inner opening of the test cavity.

6. The film permeation testing device according to claim 1, wherein: The grooves are multiple grooves surrounding the inner cavity opening of the test cavity, and at least one hole communicating with the air extraction port is opened between two adjacent grooves.

7. The film permeation testing device according to claim 1, wherein: Each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

8. A film permeation testing device, characterized in that: The device comprises a first housing and a second housing, each of which has an inner cavity. The first housing is disposed on an upper portion or a side portion of the second housing. At least one sensing element is disposed in the inner cavity of the first housing, and at least one cavity structure is disposed in the inner cavity of the second housing. The inner cavities of the first housing and the second housing are connected via at least one pipeline. The cavity structure includes: a test cavity; The test chamber has a plurality of holes on one side of its opening for facing the sample, a gas extraction port communicating with each hole, and a carrier gas inlet port and a carrier gas outlet port respectively communicating with the inner cavity of the test chamber. When the vacuum pump is working, the test sample is adsorbed on the opening side of the test chamber and the preset vacuum degree is maintained in the hole. The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test chamber. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

9. The film permeation testing device according to claim 8, wherein: A porous mesh support body is arranged in the hole.

10. The film permeation testing device according to claim 8, wherein: The distance between adjacent holes is the same.

11. The film permeation testing device according to claim 8, wherein: The holes are arranged in sequence around the inner opening of the test cavity.

12. The film permeation testing device according to claim 8, wherein: At least one groove communicating with the air extraction port is provided between two adjacent holes.

13. The film permeation testing device according to claim 8, wherein: Each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

14. A film permeation testing device, characterized in that: The device comprises a chamber body having an inner cavity, wherein a plate is provided in the inner cavity of the chamber body, the plate dividing the inner cavity into a first inner cavity and a second inner cavity, wherein the first inner cavity is provided above or to the side of the second inner cavity, at least one sensing element is provided in the first inner cavity, and at least one cavity structure is provided in the second inner cavity, and at least one through hole for a pipeline to pass through is provided on the plate; The cavity structure includes: a test cavity; A groove is formed on one side of the opening of the test chamber for facing the sample, and the test chamber is provided with an exhaust port connected to the groove. The test chamber is also provided with a carrier gas inlet port and a carrier gas outlet port respectively connected to the inner cavity of the test chamber; When the vacuum pump is working, the test sample is adsorbed on the open side of the test chamber and the preset vacuum level is maintained in the tank. The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test chamber. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

15. The film permeation testing device according to claim 14, wherein: A vacuum ring is provided in the groove, and the vacuum ring is a porous mesh support body.

16. The film permeation testing device according to claim 14, wherein: The groove is a closed-loop groove that surrounds the inner opening of the test cavity.

17. The membrane permeation testing device according to claim 14, wherein: The groove is a non-closed ring groove that is open around the inner cavity of the test cavity.

18. The membrane permeation testing device according to claim 14, wherein: The grooves are multiple grooves arranged at intervals around the inner opening of the test cavity.

19. The membrane permeation testing device according to claim 14, wherein: The grooves are multiple grooves surrounding the inner cavity opening of the test cavity, and at least one hole communicating with the air extraction port is opened between two adjacent grooves.

20. The membrane permeation testing device according to claim 14, wherein: Each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

21. A film permeation testing device, characterized in that: The device comprises a chamber body having an inner cavity, wherein a plate is provided in the inner cavity of the chamber body, the plate dividing the inner cavity into a first inner cavity and a second inner cavity, wherein the first inner cavity is provided above or to the side of the second inner cavity, at least one sensing element is provided in the first inner cavity, and at least one cavity structure is provided in the second inner cavity, and at least one through hole for a pipeline to pass through is provided on the plate; The cavity structure includes: a test cavity; The test chamber has a plurality of holes on one side of its opening for facing the sample, a gas extraction port communicating with each hole, and a carrier gas inlet port and a carrier gas outlet port respectively communicating with the inner cavity of the test chamber. When the vacuum pump is working, the test sample is adsorbed on the opening side of the test chamber and the preset vacuum degree is maintained in the hole. The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space where the cavity structure is located is stable, this gas penetrates the test sample into the inner cavity of the test chamber. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

22. The membrane permeation testing device according to claim 21, wherein: A porous mesh support body is arranged in the hole.

23. The membrane permeation testing device according to claim 21, wherein: The distance between adjacent holes is the same.

24. The membrane permeation testing device according to claim 21, wherein: The holes are arranged in sequence around the inner opening of the test cavity.

25. The membrane permeation testing device according to claim 21, wherein: At least one groove communicating with the air extraction port is provided between two adjacent holes.

26. The membrane permeation testing device according to claim 21, wherein: Each test cavity includes at least one inner cavity, and each inner cavity corresponds to an independent opening.

27. The film permeation testing device according to any one of claims 1 to 26, characterized in that: At least one plate is fixed to the side wall of the inner cavity where the cavity structure is located, at least one cavity structure is connected to the moving end of the driving mechanism on the plate, and at least one through slot for the cavity structure to enter and exit is opened on the side wall of the inner cavity where the cavity structure is located; The first end of the push-pull member passes through the through slot and is fixedly connected to the cavity structure. The second end of the push-pull member is provided with a baffle and is located outside the bin body. A sealing gasket is provided on the side of the baffle opposite to the through slot.

28. The membrane permeation testing device according to claim 27, wherein: It comprises at least two parallel plates, and at least two parallel guide grooves for a carrier gas inlet pipe and a carrier gas outlet pipe to pass through are fixed on both sides of each plate.

29. The membrane permeation testing device according to claim 27, wherein: It includes at least two parallel plates, each of which has at least two parallel guide grooves fixed on both sides for the carrier gas inlet pipe and the carrier gas outlet pipe to pass through respectively, and a groove for the pipeline to pass through is provided on the top wall of the inner cavity where the cavity structure is located.

30. The film permeation testing device according to any one of claims 1 to 26, wherein: The carrier gas outlet port of the cavity structure is connected to one end of the first metal tube through a first metal hose, and the other end of the first metal tube is connected to the sensing element. The carrier gas inlet port of the cavity structure is connected to one end of the second metal tube through a second metal hose, and the other end of the second metal tube is connected to the carrier gas supply device, and the metal hose is located in the inner cavity where the cavity structure is located.

31. The film permeation testing device according to any one of claims 1 to 26, wherein: Each independent inner cavity is surrounded by a heat insulation board.

32. The film permeation testing device according to any one of claims 1 to 26, wherein: A temperature control module is provided on the side wall of each independent inner cavity, and the temperature control module includes at least one circulation fan for performing spatial air circulation.

33. The film permeation testing device according to any one of claims 1 to 26, wherein: A test gas exhaust port and a test gas inlet are provided on the side wall of the inner cavity where the cavity structure is located. A temperature sensor, a humidity sensor and a humidity generating device are provided in the inner cavity where the cavity structure is located, and the humidity generating device is connected to the test gas inlet.

34. A film permeation testing method, characterized in that: The membrane permeation testing device according to any one of claims 1 to 33 comprises the following steps: before the test begins, the driving mechanism pushes the cavity structure out through the through slot; after the test sample is replaced, the driving mechanism pulls the cavity structure back through the through slot and seals the through slot with a baffle and a sealing gasket; When the vacuum device is working, the sample to be tested is adsorbed on the opening side of the test chamber and the preset vacuum degree in the groove or hole is maintained; The test sample is exposed to the inner cavity space of the chamber. When the composition of the gas in the inner cavity space of the cavity structure is stable, the gas passes through the test sample into the inner cavity of the test cavity. The carrier gas carries the permeated gas to the sensor for analysis to obtain the test results.

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