A galvanometer detection and debugging tooling

Abstract

A galvanometer detection and debugging tooling, comprising a bottom frame, a galvanometer, and a reference plate. A galvanometer XY stage and a reference plate stage are installed on the bottom frame. Among them, the galvanometer XY stage is installed at the left end above the bottom frame, and the galvanometer is detachably installed on the galvanometer XY stage. The relative position of the galvanometer can be adjusted by adjusting the galvanometer XY stage. The reference plate stage is installed at the right end above the bottom frame, and the reference plate is installed on the reference plate stage. The galvanometer and the reference plate are arranged opposite to each other. A crosshair is also provided on the side of the reference plate facing the galvanometer. Among the galvanometer XY stage and the reference plate stage, at least one is movably installed on the bottom frame. The galvanometer detection and debugging tooling of the present invention has a simple structure and is convenient for debugging; the precision level of the tooling can be adjusted, and compared with the traditional prior art solutions, the galvanometer debugging precision and consistency are better; the tooling structure is stable, convenient for moving, and can be conveniently debugged and produced at any position.

Description

Technical Field

[0001] The present invention relates to the technical field of laser galvanometer devices, and more specifically, to a galvanometer detection and debugging tooling. Background Art

[0002] The general principle of a laser galvanometer is that a beam of laser light starts from a laser light source, irradiates on the X mirror of the X galvanometer motor, is reflected by the X mirror to the Y mirror of the Y galvanometer motor, and then the Y mirror of the Y motor reflects the laser light out. The swinging of the XY galvanometer motors causes the swinging and change of the XY mirrors, that is, adjusts the angle of the laser light emitted by the XY mirrors. In this way, the position of the finally reflected laser light changes. Through this principle, the galvanometer can sweep out different light path trajectories within a certain range.

[0003] At present, the general methods for detecting and debugging ordinary laser galvanometer products are generally to detect the performance of the galvanometer by using the galvanometer to mark the central cross line and the outer frame of the corresponding amplitude, and to debug the galvanometer according to the marking effect of the galvanometer to achieve a satisfactory effect. The existing technologies for detecting and debugging laser galvanometer products have the following deficiencies:

[0004] When detecting and debugging ordinary laser galvanometers, the error is relatively large, and small errors cannot be detected, making it difficult to debug a high-precision laser galvanometer; the consistency of the galvanometers debugged by ordinary laser galvanometer detection and debugging methods is relatively poor, and when different galvanometers are installed on a laser marking machine, the parameters of the laser marking machine need to be re-debugged. Summary of the Invention

[0005] To solve the above problems, the present invention provides a galvanometer detection and debugging tooling, which can adjust the debugging precision, is convenient for detecting small errors at high precision, and has better consistency. The technical solution is as follows:

[0006] A galvanometer detection and debugging tooling includes a bottom frame, a laser galvanometer, and a reference plate. A galvanometer XY stage and a reference plate stage are installed on the bottom frame. Among them, the galvanometer XY stage is installed at the left end above the bottom frame, and a laser galvanometer is detachably installed on the galvanometer XY stage. By adjusting the galvanometer XY stage, the relative position of the laser galvanometer can be adjusted. The reference plate stage is installed at the right end above the bottom frame, and a reference plate is installed on the reference plate stage. The laser galvanometer and the reference plate are arranged opposite to each other. A cross line, that is, an intersecting horizontal line and vertical line, is also provided on the side of the reference plate facing the laser galvanometer. Among the galvanometer XY stage and the reference plate stage, at least one is movably installed on the bottom frame and can slide along the left-right direction of the bottom frame. An incident light source matching the laser galvanometer is detachably installed on the galvanometer XY stage, and a horizontal light source is also detachably installed on the laser galvanometer.

[0007] In the present invention, the above-mentioned horizontal line is the intersection line of a horizontal plane and the plane where the reference plate is located, and the vertical line is the intersection line of a vertical plane and the plane where the reference plate is located.

[0008] Furthermore, in the present invention, the reference plate can be set as a flat plate or a curved plate. The reference plate can be set vertically or inclined. When the reference plate is a flat plate, both the horizontal line and the vertical line are straight lines. When the reference plate is a curved plate, both the horizontal line and the vertical line may be curves or straight lines on its curved surface.

[0009] Furthermore, the galvanometer XY stage is fixedly installed on the bottom frame, and the reference plate stage is movably installed on the bottom frame.

[0010] Furthermore, slide rails are provided on the bottom frame, and pulleys corresponding to the slide rails are provided on the reference plate stage. The pulleys cooperate with the slide rails to enable the reference plate stage to slide along the bottom frame.

[0011] In a preferred embodiment of the present invention, the bottom frame includes a bracket provided at its left end, and the galvanometer XY stage is fixedly installed on the bracket.

[0012] Alternatively, the galvanometer XY stage is movably installed on the bottom frame, and the reference plate stage is fixedly installed on the bottom frame.

[0013] Alternatively, both the galvanometer XY stage and the reference plate stage are movably installed on the bottom frame.

[0014] In the above technical solution, since at least one of the galvanometer XY stage and the reference plate stage is movably installed on the bottom frame, that is, it can slide along the bottom frame to adjust the relative distance between the galvanometer XY stage and the reference plate stage. By adjusting the distance, different debugging precisions can be achieved. In the present invention, it can be either a mode where the laser galvanometer is fixed and the reference plate moves, or a mode where the reference plate is fixed and the laser galvanometer moves.

[0015] Preferably, the galvanometer XY stage and the reference plate stage are respectively at the middle positions at both ends of the bottom frame.

[0016] In a preferred embodiment of the present invention, the reference plate is a flat plate, and the reference plate is perpendicular to the horizontal plane. For the galvanometer XY stage or the reference plate stage movably installed on the bottom frame, its sliding direction is perpendicular to the plane where the reference plate is located.

[0017] Preferably, the intersection position of the horizontal line and the vertical line is located on the vertical axis of the reference plate.

[0018] Preferably, a square line is further provided on the reference plate, and each side of the square line is parallel or perpendicularly intersects with the horizontal line.

[0019] Further, the light rays emitted by the incident light source and the horizontal light source are both visible light. The light rays emitted by the incident light source and the horizontal light source can be light of any wavelength in visible light. Specifically, blue light, green light or red light can be selected.

[0020] In a preferred embodiment of the present invention, both the incident light source and the horizontal light source are selected as red light.

[0021] Further, a foot cup is fixedly connected to the lower end of the bottom frame.

[0022] Alternatively, casters are provided at the lower end of the bottom frame.

[0023] Further, it further includes a vision camera, which is used to capture and track the position of the light spot scanned by the laser galvanometer;

[0024] Alternatively, a four-quadrant light spot detector or a PSD sensor is installed on the reference plate, which is used to capture and track the position of the light spot scanned by the laser galvanometer.

[0025] The steps of detecting and debugging using the above galvanometer detection and debugging tooling are as follows:

[0026] 1. Debug and calibrate the levelness of the galvanometer XY stage, and calibrate the perpendicularity of the reference plate relative to the horizontal plane;

[0027] 2. Install the laser galvanometer and the incident light source on the galvanometer XY stage, and install the horizontal light source on the light outlet of the outer shell of the laser galvanometer;

[0028] 3. Turn on the horizontal light source switch, adjust the galvanometer XY stage to align the light ray of the horizontal light source with the center of the scale of the reference plate, that is, the intersection point of the horizontal line and the vertical line. After adjustment, lock the galvanometer XY stage;

[0029] 4. Remove the horizontal light source, power on the laser galvanometer and the incident light source. At this time, the laser galvanometer is in the power-on self-locking state;

[0030] 5. Debug the laser galvanometer to make the light ray of the incident light source reflected by the laser galvanometer coincide with the center of the scale of the reference plate. At this time, the galvanometer XY stage is in the locked state, and the laser galvanometer and the galvanometer XY stage maintain a fixed relative position. During the debugging of the laser galvanometer, the galvanometer motor inside the laser galvanometer works, and the galvanometer for reflecting the light ray inside it swings;

[0031] 6. Test the deviation parameters of the light spot emitted by the laser galvanometer on the reference plate from the crosshair and the square line, and record the performance parameters of the galvanometer;

[0032] 7. Replace the laser galvanometer and repeat the above debugging and testing process.

[0033] In the above steps, the distance between the reference plate and the laser galvanometer can be adjusted by adjusting the position of the reference plate slide or the galvanometer XY slide installed movably. The longer the distance, the higher the debugging difficulty, the higher the debugging accuracy, and the better the galvanometer consistency.

[0034] Compared with the prior art, the advantages of the present invention are as follows:

[0035] The galvanometer detection and debugging tooling of the present invention has a simple structure and is convenient for debugging; the accuracy level of the tooling can be adjusted, and the galvanometer debugging accuracy and consistency are better than those of the traditional prior art solutions; the tooling structure is stable, easy to move, and can be conveniently debugged and produced at any position. Brief Description of the Drawings

[0036] Figure 1 It is a schematic diagram of the overall structure of an embodiment of the present invention;

[0037] Figure 2 It is a schematic diagram of the reference plate structure of an embodiment of the present invention, and a crosshair and a square are provided on the reference plate.

[0038] Description of the reference numerals in the drawings:

[0039] 1. Bottom frame; 2. Laser galvanometer; 3. Galvanometer XY slide; 4. Reference plate slide; 5. Support; 6. Reference plate; 7. Incident light source; 8. Horizontal light source. Detailed Embodiment

[0040] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0041] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "top / bottom end", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0042] In the description of the present invention, it should be noted that unless otherwise clearly specified and defined, terms such as "installation", "provided with", "sheathed / connected", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection, it can be a mechanical connection, an electrical connection, it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

[0043] Please refer to Figure 1 , a galvanometer detection and debugging tooling, which includes a bottom frame 1, a laser galvanometer 2 and a reference plate 6. A galvanometer XY stage 3 and a reference plate stage 4 are installed on the bottom frame 1. Among them, the left end above the bottom frame 1 includes a bracket 5. The galvanometer XY stage 3 is fixedly installed on the bracket 5, and the laser galvanometer 2 is installed on the galvanometer XY stage 3. The relative position of the laser galvanometer 2 can be adjusted by adjusting the galvanometer XY stage 3.

[0044] The reference plate stage 4 is movably installed at the right end above the bottom frame 1. The galvanometer XY stage 3 and the reference plate stage 4 are respectively located at the middle positions of both ends of the bottom frame 1.

[0045] Specifically, a slide rail is provided on the bottom frame 1, and pulleys corresponding to the slide rail are provided on the reference plate stage 4. The pulleys cooperate with the slide rail to realize the sliding of the reference plate stage 4 along the bottom frame 1. That is, it can slide along the bottom frame to adjust the relative distance between the galvanometer XY stage 3 and the reference plate stage 4. By adjusting the distance, different debugging precisions can be achieved.

[0046] A reference plate 6 is installed on the reference plate stage 4. The reference plate 6 is a flat plate and is perpendicular to the horizontal plane. Its vertical state needs to be detected and calibrated. The galvanometer XY stage 3 or the reference plate stage 4 movably installed on the bottom frame 1 has a sliding direction perpendicular to the plane where the reference plate 6 is located.

[0047] As Figure 2 shown, a crosshair is also provided on the side of the reference plate 6 facing the laser galvanometer 2, that is, a horizontal line and a vertical line that intersect perpendicularly. Among them, the intersection position of the horizontal line and the vertical line is located on the vertical axis of the reference plate 6. A square line is also provided on the reference plate 6, and each side of the square line is parallel or perpendicularly intersects with the horizontal line.

[0048] In this embodiment, for the convenience of operation, the galvanometer XY stage 3 is an electric stage.

[0049] In this embodiment, an incident light source 7 matching the laser galvanometer 2 is detachably installed on the galvanometer XY stage 3, and a horizontal light source 8 is also detachably installed on the laser galvanometer 2.

[0050] In this embodiment, the light rays emitted by the incident light source 7 and the horizontal light source 8 are both visible red light. Among them, the incident light source 7 is a vertical red light source, and the horizontal light source 8 is a horizontal red light source.

[0051] In this embodiment, in order to facilitate movement, casters are provided at the lower end of the bottom frame 1.

[0052] The steps of detecting and debugging using the above galvanometer detection and debugging tooling are as follows:

[0053] 1. Debug and calibrate the levelness of the galvanometer XY stage 3, and calibrate the perpendicularity of the calibration reference plate 6 relative to the horizontal plane;

[0054] 2. Install the laser galvanometer 2 and the vertical red light source on the galvanometer XY stage 3, and install the horizontal red light source on the outer shell of the laser galvanometer 2, and its installation position is at the light outlet position of the laser galvanometer 2;

[0055] 3. Turn on the horizontal red light source switch, adjust the galvanometer XY stage 3 to make the light ray of the horizontal red light source align with the center of the scale of the reference plate 6, that is, the intersection point of the horizontal line and the vertical line. After adjustment, lock the galvanometer XY stage 3;

[0056] 4. Remove the horizontal red light source, power on the laser galvanometer 2 and the vertical red light source. At this time, the laser galvanometer 2 is in the power-on self-locking state;

[0057] 5. Debug the laser galvanometer 2 to make the vertical red light source light ray reflected by the laser galvanometer 2 coincide with the center of the reference plate scale. At this time, the galvanometer XY stage 3 is in the locked state, and the laser galvanometer 2 and the galvanometer XY stage 3 maintain a fixed relative position. During the debugging of the laser galvanometer 2, the galvanometer motor inside the laser galvanometer 2 works, and the galvanometer inside for reflecting light rays swings;

[0058] 6. Test the deviation parameters of the light spot emitted by the laser galvanometer 2 on the reference plate from the crosshair and the square line, and record the performance parameters of the galvanometer;

[0059] 7. Replace the laser galvanometer 2 and repeat the above debugging and testing process.

[0060] In the above steps, the distance between the reference plate 6 and the laser galvanometer 2 can be adjusted by adjusting the position of the movably installed reference plate slide 4 or the galvanometer XY stage 3. The distance between the reference plate slide 4 and the laser galvanometer 2 corresponds to different accuracy levels. The longer the distance, the higher the accuracy, the higher the debugging difficulty, the higher the debugging accuracy, and the better the consistency of the laser galvanometer 2.

[0061] Specifically:

[0062] Debugging process: Install a horizontal light source 8 at the center of the light output port of the laser galvanometer 2. Adjust the XY stage 3 of the galvanometer so that the red light spot projected by the horizontal light source 8 emitted from the center of the light output port of the galvanometer coincides with the center of the reference plate 6. At this time, lock the XY stage 3 of the galvanometer to fix the position of the galvanometer (the center of the light output port of the laser galvanometer 2 coincides with the center of the reference plate 6); Remove the horizontal red light. The red light emitted by the vertical red light source is vertically upward, and the light beam coincides with the light input port of the laser galvanometer 2 and is reflected by the lens of the XY motor and emitted from the light output port of the laser galvanometer 2. Power on the XY motor to make the motor self-lock, and adjust the reflection mirror angle of the galvanometer XY motor so that the projected light spot of the light beam reflected by the vertical red light through the galvanometer coincides with the center scale line of the reference plate 6 (the light beam vertically incident from the center of the light input port is reflected by the self-locked galvanometer and vertically emitted from the center of the light output port).

[0063] Testing process: The laser galvanometer 2 after debugging controls the movement of the motor through software and sweeps out a cross and a square on the reference plate 6. If the red light cross trajectory swept by the laser galvanometer 2 coincides with the cross on the reference plate 6, it indicates that the laser galvanometer 2 is normal. Adjust the software parameter settings so that the red light square trajectory swept by the laser galvanometer 2 coincides with the square line on the reference plate 6, and observe whether the red light square trajectory is horizontal and vertical, and there is no deformation at the turning right angle. The straighter the red light trajectory and the closer the turning angle is to 90° perpendicular, the better the performance of the laser galvanometer 2. The light spot trajectory projected by the light beam reflected by the laser galvanometer 2 on the reference plate is captured by a high-precision height capture vision camera, and the deviation between the light spot movement trajectory and the scale line on the reference plate is calculated and analyzed through vision software.

[0064] As described above, it is only a preferred specific embodiment of the present invention; however, the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its improved concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A galvanometer detection and debugging tooling, comprising a bottom frame (1), a laser galvanometer (2) and a reference plate (6), characterized in that, A galvanometer XY stage (3) and a reference plate stage (4) are installed on the bottom frame (1). Among them, the galvanometer XY stage (3) is installed at the left end above the bottom frame (1), and a laser galvanometer (2) is detachably installed on the galvanometer XY stage (3). By adjusting the galvanometer XY stage (3), the relative position of the laser galvanometer (2) can be adjusted. The reference plate stage (4) is installed at the right end above the bottom frame (1), and a reference plate (6) is installed on the reference plate stage (4). The laser galvanometer (2) and the reference plate (6) are arranged opposite to each other. A crosshair is also provided on the side of the reference plate facing the laser galvanometer (2), that is, an intersecting horizontal line and vertical line. The horizontal line is the intersection line of a horizontal plane and the plane where the reference plate (6) is located, and the vertical line is the intersection line of a vertical plane and the plane where the reference plate (6) is located. Among the galvanometer XY stage (3) and the reference plate stage (4), at least one is movably installed on the bottom frame (1) and can slide along the left-right direction of the bottom frame (1). An incident light source (7) matching the laser galvanometer (2) is detachably installed on the galvanometer XY stage (3), and a horizontal light source (8) is also detachably installed on the laser galvanometer (2). A vision camera is also included, and this vision camera is used to capture and track the position of the light spot scanned by the laser galvanometer.

2. The galvanometer detection and debugging tooling according to claim 1, wherein: The galvanometer XY stage (3) is fixedly installed on the bottom frame (1), and the reference plate stage (4) is movably installed on the bottom frame (1).

3. The galvanometer detection and debugging tooling according to claim 2, characterized in that: A slide rail is provided on the bottom frame (1), and a pulley corresponding to the slide rail is provided on the reference plate stage (4). The pulley cooperates with the slide rail to enable the reference plate stage (4) to slide along the bottom frame (1).

4. A galvanometer detection and debugging tooling according to claim 2, characterized in that: The bottom frame (1) includes a bracket (5) provided at its left end, and the galvanometer XY stage (3) is fixedly installed on this bracket (5).

5. A galvanometer detection and debugging tooling according to claim 1, characterized in that: The galvanometer XY stage (3) is movably installed on the bottom frame (1), and the reference plate stage (4) is fixedly installed on the bottom frame (1).

6. The galvanometer detection and debugging tooling according to claim 1, characterized in that: Both the galvanometer XY stage (3) and the reference plate stage (4) are movably installed on the bottom frame (1).

7. The galvanometer detection and debugging tooling according to claim 1, characterized in that: The galvanometer XY stage (3) and the reference plate stage (4) are respectively at the middle positions at both ends of the bottom frame (1).

8. The galvanometer detection and debugging tooling according to any one of claims 1-7, characterized in that: The reference plate (6) is a flat plate, and this reference plate (6) is perpendicular to the horizontal plane. For the galvanometer XY stage (3) or the reference plate stage (4) movably installed on the bottom frame (1), its slidable direction is perpendicular to the plane where the reference plate (6) is located, and the intersection position of the horizontal line and the vertical line is located on the vertical axis of the reference plate (6).

9. The galvanometer detection and debugging tooling according to claim 8, wherein: A square line is also provided on the reference plate (6), and each side of the square line is parallel or perpendicularly intersects with the horizontal line.

10. A debugging method for a galvanometer detection and debugging tooling according to claim 9, characterized in that It includes the following steps: S1. Debug and calibrate the levelness of the galvanometer XY stage (3), and calibrate the perpendicularity of the reference plate (6) relative to the horizontal plane; S2. Install the laser galvanometer (2) and the incident light source (7) on the galvanometer XY stage (3), and install the horizontal light source (8) on the light outlet of the housing of the laser galvanometer (2); S3. Turn on the switch of the horizontal light source (8), adjust the galvanometer XY stage (3) so that the light of the horizontal light source (8) is aligned with the center of the scale on the reference plate, that is, the intersection point of the horizontal line and the vertical line. After adjustment, lock the galvanometer XY stage (3). S4. Remove the horizontal light source (8), power on the laser galvanometer (2) and the incident light source (7). At this time, the laser galvanometer (2) is in the power-on self-locking state. S5. Debug the laser galvanometer (2) so that the light of the incident light source (7) reflected by the laser galvanometer (2) coincides with the center of the scale on the reference plate. S6. Test the deviation parameters between the light spot emitted by the laser galvanometer (2) on the reference plate and the crosshair and the square line, and record the performance parameters of the galvanometer. S7. Replace the laser galvanometer (2) and repeat the above debugging and testing process.

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