Chip testing equipment

Abstract

The present invention discloses a chip detection device. The chip detection device includes a base, a driving structure, a detection structure and a fine-tuning structure. The driving structure includes a third base, a mobile platform, a first driving member and a second driving member. The shell of the first driving member is located on the third base, the shell of the second driving member is located on the output end of the first driving member, and the mobile platform is located on the output end of the second driving member. The third base can move relative to the base, the first driving member is used to drive the mobile platform to rotate around the axis of the mobile platform, and the second driving member is used to change the height of the mobile platform relative to the base, and the mobile platform can move relative to the base; the detection structure is connected to the base, and the detection structure is located on the upper side of the mobile platform. The fine-tuning structure is located on the bearing plate, and the fine-tuning structure includes a probe, and the bearing plate is located on the upper side of the mobile platform. The chip detection device proposed by the present invention can adjust the position of the chip before chip detection.

Description

Technical Field

[0001] The present invention relates to the technical field of chip detection, and in particular to a chip detection device. Background Art

[0002] During the chip production process, testers need to use testers to test the performance of the chips. However, in related technologies, how to improve the detection accuracy has become a difficult problem. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a chip detection device that can ensure the accuracy of detection.

[0004] The present invention provides a chip detection device, comprising:

[0005] A base, wherein a bearing plate is provided on the base;

[0006] A driving structure, the driving structure comprising a third base, a mobile platform, a first driving member and a second driving member, the mobile platform is used to carry a chip, a housing of the first driving member is located on the third base, a housing of the second driving member is located on an output end of the first driving member, the mobile platform is located on an output end of the second driving member, the third base is movable relative to the base, the first driving member is used to drive the mobile platform to rotate around an axis of the mobile platform, the second driving member is used to change a height of the mobile platform relative to the base, and the mobile platform is movable relative to the base;

[0007] A detection structure, the detection structure is connected to the base and is located on the upper side of the mobile platform;

[0008] A fine-tuning structure, the fine-tuning structure is located on the carrying plate, the fine-tuning structure includes a probe, and the carrying plate is located on the upper side of the moving platform.

[0009] The chip detection device according to the embodiment of the present invention has at least the following beneficial effects: the position and height of the chip can be changed by the driving structure before the chip is detected, and the mobile platform can move relative to the base, so before the chip is detected, the position of the chip can be adjusted by the driving structure, which facilitates the subsequent detection of the chip and improves the detection accuracy of the chip.

[0010] According to some embodiments of the present invention, the chip detection device also includes a first slider and a second slider, the first slider is connected to all the first tracks and moves along the first tracks, at least one of the first tracks is located between two of the first tracks, and the first slider is provided with a second track on the other side of the first track; the second slider can move along the second track, and the mobile platform is connected to the second slider.

[0011] According to some embodiments of the present invention, a first moving area is provided on the first track, a first connecting portion is provided on the first slider, the first slider is connected to the first track via the first connecting portion, the first connecting portion can move in the first moving area, and a protective cover is provided at other positions on the first track excluding the first moving area;

[0012] A second moving area is provided on the second track, a second connecting portion is provided on the second slider, the second slider is connected to the second track via the second connecting portion, the second connecting portion can move in the first moving area, and a protective cover is provided at other positions on the second track excluding the second moving area.

[0013] According to some embodiments of the present invention, the fine-tuning structure includes a first base, a first movable member, a first push rod and a rotating member, the first base is provided with a third track, the first movable member can move along the third track, the first movable member can be used to connect a probe, the first push rod can move relative to the base, the rotating member can rotate relative to the base, the rotating member is provided with a first surface and a second surface perpendicular to each other, the first surface is used to abut against the first push rod, and the second surface is used to abut against the first movable member.

[0014] According to some embodiments of the present invention, a protrusion is provided on the second surface.

[0015] According to some embodiments of the present invention, a detection hole is provided on the carrier plate, the fine-tuning structure is arranged along the edge of the detection hole, and the probe can pass through the detection hole and extend toward the moving platform.

[0016] According to some embodiments of the present invention, the base includes a base base, a base support member and a base connector, one end of the base support member is connected to the base, the base connector is connected to the other side of the base support member relative to the base base, and the base support member is used to connect a supporting plate; the base base, the support member and the connector are all made of marble.

[0017] According to some embodiments of the present invention, the detection structure includes a detection member, a first moving block, a detection driving member and a sixth track, the detection member is provided with a detection surface, light enters the detection member through the detection surface, the detection member is connected to the first moving block, the driving member is connected to the first moving block, the first track is inclined relative to the detection surface, and the first moving block can move along the first track.

[0018] According to some embodiments of the present invention, the detection structure further includes a connection block, the output end of the driving member is connected to the connection block, and the connection block is connected to the first moving block and the second moving block.

[0019] According to some embodiments of the present invention, the detection structure further includes a second base, the second base is provided with an inclined surface, the sixth track is arranged along the inclined surface, and the sixth track extends on the inclined surface from high to low.

[0020] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0022] Figure 1 A schematic diagram of the three-dimensional structure of a chip detection device in an embodiment of the present invention;

[0023] Figure 2 for Figure 1 Schematic diagram of the structure of the middle base;

[0024] Figure 3 for Figure 2 A top view of

[0025] Figure 4 It is a structural schematic diagram of another embodiment of the base;

[0026] Figure 5 It is a structural schematic diagram of another embodiment of the base;

[0027] Figure 6 for Figure 5 A front view of

[0028] Figure 7 for Figure 1 Structural diagram of the fine-tuning structure;

[0029] Figure 8 for Figure 7 A top view of

[0030] Fig. 9 for Figure 7 Schematic diagram of the structure from another angle;

[0031] Fig.10 A schematic diagram of the three-dimensional structure of a chip detection device in another embodiment of the invention

[0032] Fig.11 for Figure 1 A three-dimensional schematic diagram of the detection structure;

[0033] Fig.12 for Fig.11 Right view of;

[0034] Fig.13 for Fig.12 A top view of

[0035] Fig.14 It is a schematic diagram of the structure of the driving structure;

[0036] Fig.15 for Fig.14 Exploded diagram of

[0037] Fig.16 for Fig.14 A top view of

[0038] Fig.17 for Fig.16 Sectional view along the AA direction;

[0039] Fig.18 This is the usage status diagram of the drive structure.

[0040] Reference numerals: base 1101, base support member 1102, base connector 1103, carrier plate 1104, first protrusion 1105, second protrusion 1106, first side support block 1107, second side support block 1108, second track 104, detection hole 1110, protrusion 1111, recess 1112, base 2101, first track 2102, first slider 2103, second track 104, second slider 2105, protection Shield 2201, first moving area 2202, second moving area 2203, first connecting part 2204, second connecting part 2205, gap 2301, moving platform 2401, probe 2402, fine-tuning structure 3100, first base 3101, third track 3102, first moving member 3103, first push rod 3104, rotating member 3105, first bracket 3106, fine-tuning connecting member 3107, second push rod 3108, Second elastic member 3109, third elastic member 3110, third push rod 3111, fourth track 3112, second moving member 3113, first elastic member 3201, fine-tuning protrusion 3202, fifth track 3301, detection structure 4101, detection member 4102, first moving block 4103, detection drive member 4104, sixth track 4105, positioning member 4106, detection connection block 4107, first adjustment block 4108, second adjustment block 4109, second base 4110, inclined surface 4111, adjustment slide rail 4112, detection output block 4201, detection identification structure 4202, detection first identification member 4203, detection second identification member 4204, second moving block 4205, detection surface 4206, seventh track 4301, screw rod 4302, third base 5101, mobile platform 2401, first driving member 5103, guide seat 5104, driving connecting plate 5105, A driving structure 5106, a second driving member 5201, a slider 5202, an eighth track 5203, an adsorption hole 5204, an adjustment screw 5205, a first limiting column 5206, a first stop block 5207, a second limiting column 5208, a second stop block 5209, a first identification device 5210, a second identification device 5211, a driving identification structure 5212, a base base 1101, a base support member 1102, a base connecting member 1103, a first protrusion 1105, a second protrusion 1106, a first side support block 1107, a second side support block 1108, a second track 104, a detection hole 1110, a protrusion 1111, and a connecting member recess 1112. DETAILED DESCRIPTION

[0041] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0042] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., and orientations or positional relationships indicated are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0043] In the description of the present invention, "several" means more than one, "many" means more than two, "greater than", "less than", "exceed", etc. are understood to exclude the number itself, and "above", "below", "within", etc. are understood to include the number itself. If there is a description of "first" or "second", it is only used for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.

[0044] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.

[0045] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0046] The present invention discloses a chip detection device. In this embodiment, Figure 1 , Fig.14 and Fig.18As shown, the chip detection device includes a base 2101, a driving structure 5106, a detection structure 4101 and a fine-tuning structure 3100, wherein a carrying plate 1104 is provided on the base 2101, the carrying plate 1104 is used to carry the fine-tuning structure 3100, the fine-tuning structure 3100 includes a probe 2402, and the fine-tuning structure 3100 can adjust the position of the probe 2402; the driving structure 5106 includes a third base 5101, a mobile platform 2401, a first driving member 5103 and a second driving member 5201, and the mobile platform 2401, The first driving member 5103 and the second driving member 5201 are both connected to the third base 5101, wherein the mobile platform 2401 is used to carry the chip, the shell of the first driving member 5103 is connected to the third base 5101, and the shell of the second driving member 5201 is connected to the output end of the first driving member 5103, so that the first driving member 5103 can drive the second driving member 5201 to rotate, and the mobile platform 2401 is located at the output end of the second driving member 5201, and the second driving member 5201 can drive the mobile platform 2401 to rotate. The above structure enables the first driving member 5103 to drive the second driving member 5201 to rotate when the chip on the mobile platform 2401 needs to rotate, thereby driving the mobile platform 2401 to rotate around its axis, and when the chip on the mobile platform 2401 needs to adjust the height, the first driving member 5103 does not move, and the output end of the second driving member 5201 drives the mobile platform 2401 along the axis. Fig.14 The moving platform 2401 moves in the up and down direction as shown, that is, the output end of the second driving structure 5201 drives the moving platform 2401 to move closer to or away from the carrying plate 1104; the detection structure 4101 is connected to the base 2101, and the detection structure 2101 is located on the upper side of the moving platform 2401; the detection structure 4101 is used to detect whether the position of the chip is correct. When the chip is on the moving platform 2401, the position of the probe 2402 can be adjusted by the fine-tuning structure 3100, and then the moving platform 2401 is moved as shown. Figure 1 The height in the up and down directions as shown is rotated by a certain angle, and then the mobile platform 2401 moves relative to the base to drive the chip to the set position, and the chip is detected by the detection structure 4101 and the probe 2402.

[0047] In the above structure, the operator can adjust the position of the chip before testing the chip, which not only facilitates the loading and unloading of the chip, but also makes the test result more accurate. The above structure also includes at least the following technical effects: since the second driving member 5201 is located on the first driving member 5103, the driving structure 5106 in the present invention effectively reduces the load on the second driving member 5201, so that the second driving member 5201 can drive the mobile platform 2401 to move quickly to change the height of the mobile platform 2401.

[0048] For base 2101, if Figures 1 to 3 As shown, the base 2101 includes a base base 1101, a base support 1102 and a base connector 1103. The base support 1102 and the base connector 1103 are all connected to the base base 1101, and the base base 1101 can support the base support 1102 and the base connector 1103. One end of the base support 1102 is connected to the base base 1101, and the other end of the base support 1102 opposite to the base base 1101 is connected to the base connector 1103, and the base connector 1103 is used to connect the carrier plate 1104. Compared with the base 2101 made of castings, the base 2101 in this embodiment is made entirely of marble (the base base 1101, the base support 1102 and the base connector 1103 are all made of marble). When the base 2101 is used in a chip detection device and combined with Fig.15 When the driving connecting plate 5105 and the second driving member 5201 (driving the chip to move) are working, a large vibration will be generated. However, in this embodiment, the base 2101 made of marble can effectively reduce the vibration, which makes the vibration of the fine-tuning structure 3100 placed on the base 2101 through the supporting plate 1104 also smaller, thereby improving the precision and accuracy of the detection result of the detection device.

[0049] Specifically, Figure 2 As shown, a protrusion is provided on the base connector 1103, and a plane is provided on the side of the protrusion facing the base 1101. The base connector 1103 is connected to the supporting plate 1104 via the plane, so that the supporting plate 1104 can be firmly connected to the base connector 1103, thereby ensuring the stability of the supporting plate 1104.

[0050] Specifically, Figure 2 As shown, part of the plane area is used to connect with the supporting plate 1104 , and part of the plane area is connected with the support frame, thereby ensuring the connection stability between the top surface of the base support member 1102 and the base connector 1103 , and effectively reducing the vibration of the base connector 1103 .

[0051] Specifically, Figure 2As shown, the base connector 1103 is provided with two protrusions, namely, a first protrusion 1105 and a second protrusion 1106, which are respectively located on both sides of the base connector 1103, and the first protrusion 1105 is provided with a first plane on the side facing the base base 1101, and the second protrusion 1106 is provided with a second plane on the side facing the base base 1101. The base support 1102 includes two side support blocks, namely, a first side support block 1107 and a second side support block 1108. The first side support block 1107 and the second side support block 1108 are respectively located on both sides of the base support 1102, and the first side support block 1107 corresponds to the first protrusion 1105, and the second side support block 1108 corresponds to the second protrusion 1106. The first plane on the first protrusion 1105 is connected to the top surface of the first side support block 1107, and the second plane on the second protrusion 1106 is connected to the top surface of the second side support block 1108, so that the base connector 1103 and the base support member 1102 are connected through two planes, further ensuring the connection stability between the base support member 1102 and the base connector 1103.

[0052] Specifically, Figure 2 As shown, a second track 104 and a first track 102 are provided on the side of the base base 1101 facing the base connector 1103, and the second track 104 and the first track 102 can be used to adjust the position of the chip relative to the base 2101 (the chip moves on the second track 104 and / or the first track 102 through the movable structure, thereby adjusting the position of the chip relative to the base 2101).

[0053] Specifically, Figure 1 As shown, the base 2101 further includes a bearing plate 1104, which is connected to a side of the base connector 1103 adjacent to the base 1101, and the bearing plate 1104 is used to carry the fine-tuning structure 3100 (such as Figure 1 as shown).

[0054] Specifically, Figure 1 and Figure 2 As shown, a detection hole 1110 is provided on the carrier plate 1104, the chip detection device can be arranged at the edge of the detection hole 1110, and the fine-tuning structure 3100 can be arranged along the circumference of the detection hole 1110. The fine-tuning structure 3100 is arranged on the carrier plate 1104 as shown in FIG. Figure 2 As shown in the upper side, the probe on the chip detection equipment can be Figure 2 The upper portion shown extends through the detection hole 1110 toward the base base 1101 for detecting the chip located at the lower side of the carrier plate 1104 .

[0055] Specifically, Figure 2As described above, the detection hole 1110 is a circular hole, and the chip detection equipment can be placed on the circumference of the detection hole 1110.

[0056] Specifically, Figure 2 and Figure 3 As shown, a protrusion 1111 is provided on the carrier plate 1104, and a detection hole 1110 is located on the protrusion 1111. A connector recess 1112 is provided on the side plate of the base support 1102 adjacent to the protrusion 1111, so that the base connector 1103 can avoid the position on the base support 1102 for connecting the chip detection device. Combined with the structure that the carrier plate 1104 is connected to the base connector 1103 through the protrusions (the first protrusion 1105 and the second protrusion 1106), the above structure not only meets the installation requirements of the carrier plate 1104, but also ensures the installation of the chip detection device on the carrier plate 1104. At the same time, since the carrier plate 1104 is connected to the base connector 1103 through two protrusions, the stability of the carrier plate 1104 is also ensured, and the stability of the chip detection device connected to the carrier plate 1104 is further ensured.

[0057] Specifically, in the above embodiment, the protrusion 1111 may be of a regular shape or an irregular shape, and any portion extending outward from the connection member recess 1112 of the base support 1102 may be referred to as the protrusion 1111 .

[0058] Specifically, Figures 4 to 6 As shown, a top surface is provided on the base 2101, and a plurality of first rails 2102 are provided on the top surface of the base 2101, which are parallel to each other. The first rails 2102 on the base 2101 include at least three rails, and one of the first rails 2102 is located between two first rails 2102. A first slider 2103 is connected to all the first rails 2102, and the first slider 2103 can move relative to the first rails 2102. A second slider 2105 is provided with a second rail 104 on the other side of the first rail 2102, and the second slider 2105 moves along the second rail 104, and the directions of the first rail 2102 and the second rail 104 are different, so that the second slider 2105 can move in two directions through the first rail 2102 and the second rail 104. In the above structure, since at least three first rails 2102 are provided on the base 2101, and one first rail 2102 is located between two first rails 2102, the force applied by the base 2101 to the first slider 2103 through the first rail 2102 is more uniform, and the deformation of the first slider 2103 due to gravity is reduced, so that the second rail 104 is Figure 4In the upper and lower directions shown, the horizontality and flatness are higher, so the second slider 2105 moves more smoothly along the second track 104, which reduces the probability of displacement of the chip moved by the second slider 2105 during the movement, so that in the subsequent chip detection process, the detection accuracy is higher and the detection results are more accurate.

[0059] Specifically, Figures 4 to 6 As shown, four first rails 2102 are provided on the base 2101, and the first rails 2102 are evenly distributed on the top surface of the base 2101. Compared with the related structure in which the first rails 2102 are unevenly arranged on the base 2101, this structure makes the distance between the first slider 2103 between two adjacent first rails 2102 equal, thereby avoiding the situation where the distance between the two adjacent first rails 2102 is lengthened (if the distance between the two first rails 2102 is too long, the first slider 2103 between the two is prone to deformation), thereby making the deformation of the second rail 104 located on the first slider 2103 smaller, thereby improving the movement accuracy of the second slider 2105.

[0060] like Figures 4 to 6 As shown, the first track 2102 and the second track 104 are perpendicular to each other, thereby forming an XY axis motor structure, which can drive the second slider 2105 to move, thereby driving the chip positioned on the second slider 2105. The verticality described in this embodiment is a roughly vertical state, rather than a specific vertical structure.

[0061] Specifically, Figures 1 to 4 As shown, the track structure also includes a moving platform 2401, which is connected to the other side of the second slider 2105 relative to the first track 2102. The other side of the moving platform 2401 relative to the base 2101 is used to carry chips. Several chips can be arranged on the moving platform 2401. Since the moving accuracy of the second slider 2105 is relatively high, the moving accuracy of the chip on the moving platform 2401 can be guaranteed (reducing the displacement of the mobile platform 2401 relative to the moving platform 2401 during the movement).

[0062] Specifically, Figures 1 to 4 As shown, the first track 2102 is provided with a first moving area 2202, the first slider 2103 is provided with a first connecting portion 2204, and the first slider 2103 is connected to the first track 2102 via the first connecting portion 2204. Figure 3As shown in the figure, the gap 2301 between the first track 2102 and the first connecting part 2204 is small, so when a dropped object (probe 2402, probe 2402 clamping structure, etc.) falls into it, it is difficult for the staff to clean up the dropped object, and when the dropped object falls into the gap 2301, the dropped object will be squeezed during the movement of the first connecting part 2204 relative to the first track 2102, so that the dropped object will be broken and splashed or stuck in the first moving part, affecting the processing. To address this problem, in this embodiment, when the first slider 21 03When moving on the first track 2102, the first connecting part 2204 will move in the first moving area 2202. A protective cover 2201 is provided on the non-first moving area of ​​the first track 2102. The protective cover 2201 can cover the non-first moving area of ​​the first track 2102. This reduces the probability of falling objects falling into the gap 2301 of the first track 2102 when some materials fall onto the base 2101. The above structure can reduce the possibility of falling objects falling into the gap while ensuring the movement of the first slider 2103.

[0063] Specifically, Figures 2 to 4 As shown, the second track 104 is provided with a second moving area 2203, the second slider 2105 is provided with a second connecting portion 2205, the second slider 2105 moves in the second moving area 2203 through the second connecting portion 2205, and the non-second moving area on the second track 104 is also covered with a protective cover 2201 to prevent dropped objects from falling into the gap of the second track 104. At the same time, when the second slider 2105 moves along the second track 104, the dropped objects are also likely to fall from the gap 2301 of the second track 104 into the gap 2301 of the first track 2102, thereby causing the first slider 2103 to move abnormally, so the protective cover 2201 on the second track 104 can further prevent the dropped objects from falling into the gap 2301.

[0064] Specifically, the protective cover 2201 is an accordion cover having a plurality of gaps thereon, so that when dropped objects touch the protective cover 2201 , there is a certain probability that the dropped objects will fall into the gaps of the protective cover 2201 , thereby reducing the possibility of material splashing.

[0065] In the above embodiment, if Figure 1 , Figure 7 , Figure 8 , Fig. 9 and Fig.10 As shown, a detection hole 1110 is provided on the carrier plate 1104, and a fine-tuning structure 3100 is provided axially on the detection hole 1110, that is, a plurality of fine-tuning structures 3100 can be arranged around the detection hole 1110, and each fine-tuning structure 3100 is provided with a probe 2402, which can pass through the detection hole 1110 and correspond to the detection hole 1110 on the carrier plate 1104. Fig.10 The lower chip shown (the chip is located on a moving platform) is tested.

[0066] Specifically, the fine-tuning structure 3100 includes a first base 3101, a first moving member 3103, a first push rod 3104 and a rotating member 3105. Figures 7 to 9 As shown, the first base 3101 is connected to a third track 3102, and the first moving member 3103 can move along the third track 3102 as shown in FIG. Figure 7 As shown in the left and right directions of movement, the first push rod 3104 is connected to the first base 3101 through a threaded structure, and the rotating member 3105 rotates relative to the first base 3101. The rotating member 3105 is provided with a first surface and a second surface perpendicular to each other. The working end of the first push rod 3104 can be abutted against the first surface and squeeze the first surface, and the second surface can apply force to the first movable member 3103. The first movable member 3103 can be connected to a probe 2403.

[0067] The method of using the above structure is to firstly twist the first push rod 3104 so that the first push rod 3104 moves to the position as shown in FIG. Figure 7 The first surface is pressed against the first moving member 3105, so that the rotating member 3105 rotates counterclockwise. Then, the second surface applies a force to the first moving member 3103, so that the first moving member 3103 moves along the third track 3102, and the first moving member 3103 moves toward the direction shown in FIG. Figure 7 The above structure enables the first moving member 3103 to complete the movement perpendicular to the movement direction of the first push rod 3104 through the movement of the first push rod 3104, saving Figure 7 The displacement in the left and right direction.

[0068] The fine-tuning structure 3100 further includes a first elastic member 3201 . One end of the first elastic member 3201 abuts against the rotating member 3105 , and the other end of the first elastic member 3201 is connected to the first base 3101 . The first elastic member 3201 is in a compressed state.

[0069] The method of using the above structure is as follows: when the first push rod 3104 is twisted, the first push rod 3104 is moved as follows: Figure 7 When the first moving member 3103 moves forward and backward as shown in FIG. Figure 7As shown in the left and right directions, at this time, the first elastic member 3201 is in a compressed state, and has a force acting on the first movable member 3103 to the right, and is balanced with the force acting on the first movable member 3103 by the rotating member 3105 (the first push rod 3104 can give a force to the rotating member 3105), so that the position of the first movable member 3103 relative to the third track 3102 is relatively fixed, ensuring that after the position is adjusted, the position of the first movable member 3103 can be fixed, thereby making the position of the probe connected to the first movable member 3103 fixed.

[0070] As an example, Figures 7 to 9 As shown, the second surface is provided with a fine-tuning protrusion 3202, and the fine-tuning protrusion 3202 can abut against the first moving member 3103 to apply force to the first moving member 3103, so that the first moving member 3103 can move along the third track 3102. Since the second surface is provided with the fine-tuning protrusion 3202, the distance between the contact point on the rotating member 3105 for pushing the fine-tuning connecting member 3107 and the rotating shaft of the rotating member 3105 is extended, which helps to increase the torque, thereby reducing the force of the rotating member 3105 that makes it easier for the first moving member 3103 to move.

[0071] Specifically, Figures 7 to 9 As shown, the fine-tuning structure 3100 also includes a fine-tuning connector 3107, one end of which is connected to the first movable member 3103, and the other end of the fine-tuning connector 3107 is used to resist the fine-tuning protrusion 3202. When the first pushing member pushes the rotating member 3105 to rotate, the fine-tuning protrusion 3202 can resist the fine-tuning connector 3107 and drive the first movable member 3103 to move relative to the third track 3102 through the fine-tuning connector 3107.

[0072] Specifically, Figure 7 As shown, the fine-tuning connection member 3107 is arranged along Figure 7 The length in the left-right direction is smaller than the length of the first moving member 3103 along the Figure 7 Compared with the structure in which the rotating member 3105 directly acts on the first movable member 3103, the present structure enables the fine-tuning connecting member 3107 and the fine-tuning protrusion 3202 to be integrally connected in the left-right direction as shown in FIG. Figure 7 The length in the left and right directions will be shorter, saving Figure 7 The distance in the left and right direction shown.

[0073] Specifically, Figure 7 and Figure 8 As shown, the first elastic member 3201 is located between the fine-tuning connecting member 3107 and the first bracket 3106. When the rotating member 3105 drives the fine-tuning connecting member 3107 to move Figure 7When the left side moves as shown, the first elastic member 3201 is in a compressed state, and the force it applies to the fine-tuning connecting member 3107 is balanced with the force applied by the rotating member 3105 to the fine-tuning connecting member 3107, so that the position of the fine-tuning connecting member 3107 is relatively fixed, thereby making the position of the first movable member 3103 relatively fixed.

[0074] Specifically, Figures 7 to 9 As shown, the fine-tuning structure 3100 also includes a first bracket 3106 and a second push rod 3108. The first base 3101 is provided with a fourth track 3112. The first bracket 3106 can move along the fourth track 3112. The working end of the second push rod 3108 is against the first bracket 3106. The first push rod 3104 is connected to the first base 3101 through a threaded structure. The operator can screw the second push rod 3108 so that the second push rod 3108 pushes the first bracket 3106 along the fourth track 3112. Figure 7 Movement in the forward and backward direction as shown.

[0075] Specifically, Figures 7 to 9 As shown, the third track 3102 is located on the other side of the first bracket 3106 relative to the first base 3101, and the third track 3102 is perpendicular to the fourth track 3112, so that the probe connected to the first moving member 3103 can be driven by the first push rod 3104 and the second push rod 3108 to do the following: Figure 7 Movement in the front-to-back and left-to-right directions is shown.

[0076] Specifically, the fine-tuning structure 3100 further includes a second elastic member 3109, which is located between the first base 3101 and the first bracket 3106. The second elastic member 3109 is in a stretched state. Figure 7 As shown, when the second push rod 3108 pushes the first bracket 3106 to Figure 7 During the forward movement shown, the pulling force given to the second bracket by the second spring and the force given to the first bracket 3106 by the second push rod 3108 (the second push rod 3108 and the first base 3101 are connected by threads, and the first base 3101 can give supporting force to the second push rod 3108) are balanced, so that the first bracket 3106 can be fixed in position relative to the first base 3101.

[0077] Specifically, the fine-tuning structure 3100 further includes a second moving member 3113 and a third push rod 3111. The first moving member 3103 is provided with a fifth track 3301, which is perpendicular to the third track 3102 and also perpendicular to the fourth track 3112. This allows the fifth track 3301 to move along the Figure 7As shown in the upper and lower directions, the third push rod 3111 is connected to the first movable member 3103 through a threaded structure, and the working end of the third push rod can abut against the second movable member 3113. The above structure enables the second movable member 3113 to be pushed to move along the fifth track 3301 by twisting the third push rod 3111, which enables the probe located on the second movable member 3113 to be driven to perform three-axis motion through the first bracket 3106, the first movable member 3103 and the second movable member 3113.

[0078] Specifically, Figures 7 to 9 As shown, the fine-tuning structure 3100 also includes a third elastic member 3110, one end of the third elastic member 3110 is connected to the second movable member 3113, the other end of the third elastic member 3110 is connected to the second movable member 3113, and the third elastic member 3110 is in a compressed state, which makes the pulling force given to the second movable member 3113 by the third elastic member 3110 and the force given to the second movable member 3113 by the third push rod 3111 (the first movable member 3103 can give supporting force to the third push rod 3111) balanced, so that the position of the second movable member 3113 on the fifth track 3301 can be fixed.

[0079] An embodiment of the present invention further discloses a probe fine-tuning device, including a probe 2402 and the fine-tuning structure 3100 in any one of the above embodiments, wherein the probe 2402 is connected to the second moving member 3113 .

[0080] Since the fine-tuning structure 3100 can save Figure 7 The position in the left and right directions shown, so even if the probe 2402 fine-tuning structure 3100 encounters Figure 7 When the position in the direction shown is small, the first push rod 3104 can also be used to make the probe 2402 move perpendicular to the movement direction of the first push rod 3104 (that is, the probe 2402 can move as shown in FIG. Figure 7 left and right movement as shown).

[0081] For the detection structure 4101, such as Figure 10 to Figure 3As shown, the detection structure 4101 includes a detection member 4102, a first moving block 4103, a detection driver 4104 and a sixth track 4105. The detection member 4102 is used to detect the position of the chip to determine whether the position of the chip is accurate. The detection member 4102 is provided with a detection surface 4206, and the light enters the detection device through the detection surface 4206, thereby forming an image in the detection device. In this embodiment, the detection surface may not be an imaging surface, as long as the light entering the detection device passes through the detection surface. The output end of the detection driver 4104 is connected to the first moving block 4103, and the first moving block 4103 can move along the sixth track 4105, and the sixth track 4105 is inclined relative to the detection surface. This allows the output end of the detection driver 4104 to drive the first moving block 4103 along the sixth track 4105 to the detection surface when the output end of the detection driver 4104 extends outward. Fig.12 The detection member 4102 moves to the lower left as shown, so that the detection member 4102 can move to the left and move downward at the same time through the drive of the detection driver 4104. Similarly, when the output end of the detection driver 4104 retracts, the detection member 4102 can move to the upper right through the first moving block 4103.

[0082] In the embodiment of the above-mentioned detection structure 4101, the detection member 4102 can complete the movement in the left and right directions and the up and down directions only by driving a detection driving member 4104. Compared with the prior art, the detection structure 4101 in this embodiment can effectively save the number of driving devices while ensuring the driving of the detection member 4102. At the same time, the detection structure 4101 in this embodiment can also indirectly reduce the load of the driving structure and reduce the weight of the overall detection structure 4101.

[0083] Specifically, Figures 10 to 13 As shown, the detection structure 4101 also includes a positioning member 4106 and a second moving block 4205. The positioning member 4106 is used to absorb the light emitted by the chip and determine whether the detection chip can emit light normally. The second moving block 4205 can move along the sixth track 4105 to adjust the position of the positioning member 4106. Specifically, since the sixth track 4105 is tilted, when the second moving block 4205 moves along the sixth track 4105, the positioning member 4106 can move to the position of the second moving block 4205. Fig.12 Move to the lower left as shown, or to Fig.12 As shown in the upper right movement, compared with the structure in the related art that needs to move on two vertical tracks, the structure in this embodiment simplifies the movement trajectory of the positioning member 4106, so that the positioning member 4106 can respond and move quickly.

[0084] Specifically, Figures 10 to 13As shown, the detection structure 4101 also includes a detection connection block 4107, which is connected to the output end of the detection driver 4104, and the detection connection block 4107 is connected to the first moving block 4103 and the second moving block 4205 respectively, so that the first moving block 4103 and the second moving block 4205 can be moved synchronously by the detection driver 4104 driving the detection connection block 4107, thereby making the detection member 4102 and the positioning member 4106 move synchronously. When it is necessary to position the chip, the positioning member 4106 is first adjusted by the detection driver 4104 so that the positioning member 4106 can position the chip. In this process, the detection member 4102 moves synchronously with the positioning member 4106 but does not work. When the positioning member 4106 completes the work, the detection driver 4104 drives the positioning member 4106 and the detection member 4102 to move until the detection member 4102 is located directly above the chip, and the chip is detected.

[0085] In the above embodiment, the detection member 4102 and the positioning member 4106 are driven to move together by a detection driving member 4104. Compared with the structure in the related art where different driving devices are used to drive the detection member 4102 and the positioning member 4106 to move respectively, the detection structure 4101 in this embodiment can save the number of driving devices. At the same time, through the detection connection block 4107, the detection member 4102 and the positioning member 4106 can both move along the sixth track 4105, so that the detection driving member 4104 can simultaneously make the positioning member 4106 and the detection member 4102 move to the same direction as shown in the figure. Fig.12 Move to the lower left as shown, or to Fig.12 As shown in the upper right movement, compared with the structure that requires several driving devices to drive the positioning member 4106 and the detection member 4102 to move at different angles, the detection structure 4101 in this embodiment can effectively save the number of driving devices.

[0086] Specifically, Figures 10 to 13 As shown, the detection structure 4101 also includes a first adjustment block 4108 and a second adjustment block 4109. The first adjustment block 4108 is connected to the detection connection block 4107, and the detection member 4102 is connected to the second adjustment block 4109. Fig.11 The upper and lower directions of the second adjustment block 4109 are provided with an adjustment rail 4112. Fig.11There are several positioning holes (not shown) in the upper and lower directions shown in the figure. The positioning holes can be connected to the adjustment rail 4112 through fasteners (the fasteners press the second adjustment block 4109 onto the first adjustment block 4108), so that the first adjustment block 4108 positions the second adjustment block 4109, so that the position of the detection member 4102 relative to the detection connection block 4107 is fixed. When it is necessary to adjust the height of the detection member 4102 relative to the detection connection block 4107 according to the detection requirements, the fasteners can be loosened to connect the positioning holes to other positions of the adjustment rail 4112, or the positioning holes at different positions can be connected to the same position of the adjustment rail 4112, so as to change the relative position of the detection member 4102 to the detection connection block 4107. Fig.12 The distance in the up and down directions as shown is used to adjust the distance between the detection member 4102 and the chip during the detection process.

[0087] Specifically, Figures 10 to 13 As shown, the detection structure 4101 includes a second base 4110, and the detection drive member 4104, the detection member 4102 and the positioning member 4106 are all connected to the second base 4110, and the second base 4110 supports the detection drive member 4104, the detection member 4102 and the positioning member 4106. The second base 4110 is provided with an inclined surface 4111, and the sixth track 4105 is arranged on the inclined surface 4111, so that the sixth track 4105 is arranged at an inclination. When the detection connection block 4107 moves on the sixth track 4105, the detection connection block 4107 can move to the position shown in FIG. Fig.12 Move to the lower left as shown, or to Fig.12 As shown in the upper right corner, the positioning member 4106 and the detection member 4102 are driven to the upper right corner as shown in the Fig.12 Move to the lower left as shown, or to Fig.12 In this embodiment, due to the setting of the inclined surface 4111, the detection connection block 4107 can move to the upper right as shown. Fig.12 Move to the lower left as shown, or to Fig.12 As shown in the upper right corner, in other embodiments, if the inclination direction of the inclined surface 4111 is changed, the detection connection block 4107 can drive the positioning member 4106 and the detection member 4102 to move in other directions.

[0088] Specifically, Figures 10 to 13As shown, the detection structure 4101 also includes a second base 4110, a detection output block 4201, a detection identification structure 4202, a first detection identification member 4203 and a second detection identification member 4204. The detection output block 4201 is connected to the output end of the detection drive member 4104. The detection output block 4201 can also be connected to the detection connection block 4107 to drive the detection connection block 4107 to move, thereby moving the positioning member 4106 and the detection member 4102. The detection identification structure 4202 is connected to the detection output block 4201, and the first detection identification member 4203 and the second detection identification member 4204 are arranged along the direction in which the sixth track 4105 is set, and the first detection identification member 4203 is electrically connected to the detection drive member 4104, and the second detection identification member 4204 is electrically connected to the detection drive member 4104. When the detection driver 4104 drives the detection output block 4201 to move, the detection output block 4201 drives the detection identification structure 4202 to move. When the detection identification structure 4202 moves to the first detection identification member 4203, the detection driver 4104 stops moving to prevent the first moving block 4103 and the second moving block 4205 from leaving the sixth track 4105. During the process of resetting the positioning member 4106 and the detection member 4102, when the detection identification structure 4202 moves to the second detection identification member 4204, the detection driver 4104 stops moving, and the positioning member 4106 and the detection member 4102 complete the resetting.

[0089] Specifically, Figures 10 to 13 As shown, the second base 4110 is also provided with a seventh track 4301, and the seventh track 4301 is arranged parallel to the sixth track 4105, and the first detection identification member 4203 and the second detection identification member 4204 can move relative to the seventh track 4301, so as to adapt to the detection requirements of different chips. The above structure also includes at least the following effects: since the sixth track 4105 and the seventh track 4301 are arranged in parallel, no matter where the first detection identification member 4203 and the second detection identification member 4204 move to the seventh track 4301, they can identify the detection identification structure 4202 connected to the detection output block 4201, ensuring the safety of the use of the positioning member 4106 and the detection member 4102, while ensuring the accuracy of the reset of the positioning member 4106 and the detection member 4102.

[0090] Specifically, in the above embodiment, the detection structure 4101 also includes a screw rod 4302, which is connected to the output end of the detection drive member 4104 through a coupling. The screw rod 4302 can pass through the detection output block 4201. The inner wall of the hole on the detection output block 4201 for the screw rod 4302 to pass through is provided with an internal thread. The working part of the screw rod 4302 with an external thread can be connected with the internal thread of the detection output block 4201. Through the rotation of the screw rod 4302, the detection drive member 4104 can drive the detection output block 4201 to move, thereby driving the positioning member 4106 and the detection member 4102 to move.

[0091] In the above embodiment, the detection member 4102 may include a light absorbing element, such as an integrating sphere, and the positioning member 4106 may be a camera.

[0092] Specifically, for the drive structure 5106, Figure 1 , Figures 14 to 18 As shown, the third base 5101 is connected to the second slider 2105, so that the mobile platform 2401 can move relative to the base 2101 through the first slider 2103 and the second slider 2105. Fig.14 Movement in the left-right and front-to-back directions is shown.

[0093] In the above structure, since the second driving member 5201 is located on the first driving member 5103, and the second driving member 5201 is used to adjust the height of the mobile platform 2401, the first mobile platform 2401 drives the mobile platform 2401 to rotate. Compared with the structure in the related technology, the driving structure 5106 in the present invention effectively reduces the load on the second driving member 5201, so that the second driving member 5201 can drive the mobile platform 2401 to move quickly to change the height of the mobile platform 2401.

[0094] The embodiment of the present invention effectively reduces the load of the second driving member 5201, thereby helping to improve the accuracy of the movement of the mobile platform driven by the second driving member 5201, which is beneficial to the overall movement accuracy of the driving structure 5106 and improves the position accuracy of the chip to be detected.

[0095] The method of using the above-mentioned driving structure is to first drive the first driving member 5103 to drive the second driving member 5201 and the mobile platform 2401 to rotate together at a set angle, and then drive the mobile platform 2401 to move by the second driving member 5201 to adjust the mobile platform 2401 in such a manner as to Fig.15 The height in the up and down direction shown.

[0096] Specifically, Figures 14 to 18 As shown, the driving structure 5106 also includes a guide seat 5104, which is located on the output end of the first driving member 5103. When the mobile platform 2401 is in the Fig.15In the up and down directions shown, the guide seat 5104 can guide the mobile platform 2401 to improve the movement accuracy of the mobile platform 2401.

[0097] Specifically, Figures 15 to 18 As shown, the driving structure 5106 also includes a driving slider 5202. The guide seat 5104 is provided with an eighth track 5203. The eighth track 5203 is arranged on the guide seat 5104 along the direction of movement of the output end of the second driving member 5201 (as shown in FIG. Fig.15 The driving slider 5202 can move on the eighth track 5203, and the driving slider 5202 is connected to the mobile platform 2401, so that the second driving member 5201 drives the mobile platform 2401 to move in the eighth track 5203. Fig.14 When moving in the up and down directions as shown, the driving slider 5202 and the eighth track 5203 can guide the mobile platform 2401, thereby ensuring the movement accuracy of the mobile platform 2401.

[0098] Specifically, Figures 15 to 18 As shown, the driving structure 5106 also includes a driving connecting plate 5105, which can be connected to the driving slider 5202 and the mobile platform 2401 respectively. Specifically, when the second driving member 5201 is working, the output end of the second driving member 5201 drives the mobile platform 2401 to move in a certain direction. Fig.14 The mobile platform 2401 moves in the up and down directions as shown. At this time, the driving connecting plate 5105 connected to the mobile platform 2401 can move along the eighth track 5203, thereby guiding the mobile platform 2401. The mobile platform 2401 is connected to the guide seat 5104 through the driving connecting plate 5105, so it saves the structure of setting a guide block on the mobile platform 2401, thereby reducing the load of the second driving member 5201, and ensuring the speed and precision of the movement of the second driving member 5201.

[0099] Specifically, the driving structure 5106 further includes an adjusting screw 5205, the working end of which can penetrate the driving connecting plate 5105 and be connected to the mobile platform 2401. Figures 15 to 18 As shown, the driving structure 5106 includes a plurality of adjustment screws 5205, and all the adjustment screws 5205 are evenly distributed on the driving connecting plate 5105. When some of the adjustment screws 5205 are turned, a force can be applied to the mobile platform 2401 through the working part, thereby adjusting the mobile platform 2401 in the following manner: Fig.15 The height in the direction shown (at this time the driving connecting plate 5105 is fixed) is adjusted to adjust the parallelism of the moving platform 2401.

[0100] Specifically, Figures 15 to 18As shown, a plurality of adsorption holes 5204 are provided on a side of the mobile platform 2401 away from the first driving member 5103. The mobile platform 2401 also includes a channel and a ventilation opening. The channel is located inside the mobile platform 2401, and the ventilation opening is located on the outer surface of the mobile platform 2401. The ventilation opening is used to be connected with the negative pressure device. The channel can be connected with the ventilation opening. The channel can also be connected with all the adsorption openings. When the negative pressure device is working, the negative pressure device can generate negative pressure at each adsorption hole 5204 through the channel, so that the chip can be adsorbed on the adsorption hole 5204, thereby completing the positioning of the chip.

[0101] Specifically, Figures 15 to 18 As shown, the driving structure 5106 includes a rotation limiting structure, which includes a limiting column and a stop block. The limiting column is fixedly connected to the third base 5101, and the stop block is located on the output end of the first driving member 5103. The positions of the stop block and the limiting column correspond to each other. When the first driving member 5103 is working, and the first driving member 5103 drives the mobile platform 2401 to rotate within a certain angle (which can be set manually), when the mobile platform 2401 rotates to a preset stop position, the baffle is blocked by the limiting column, thereby preventing the mobile platform 2401 from rotating due to inertia and affecting the accuracy of the first driving member 5103.

[0102] Specifically, a protective pad is provided on one side of the stopper adjacent to the limiting column to prevent a hard collision between the stopper and the limiting column.

[0103] Specifically, Figures 15 to 18 As shown, the rotation limiting structure includes two limiting columns, namely a first limiting column 5206 and a second limiting column 5208, and the rotation limiting structure also includes two blocks, namely a first block 5207 and a second block 5209, wherein the first limiting column 5206 corresponds to the first block 5207, and the second limiting column 5208 corresponds to the second block 5209. During use, the output end of the first driving member 5103 can rotate a set angle so that the mobile platform 2401 can move between a preset starting position and a preset stop position. When the mobile platform 2401 rotates a set angle (the mobile platform 2401 rotates to the preset stop position), the first stop block 5207 is limited by the first limiting column 5206. When the mobile platform 2401 is reset to the initial position (the mobile platform 2401 rotates to the preset starting position), the second stop block 5209 is blocked by the first limiting column 5206 to prevent the mobile platform 2401 from rotating due to inertia after the first driving member 5103 stops moving, thereby affecting the accuracy.

[0104] Specifically, Figures 15 to 18As shown, the driving structure 5106 also includes a travel switch, which includes a first identification device 5210, a second identification device 5211 and a driving identification structure 5212. The driving identification structure 5212 is connected to the output end of the first driving member 5103, so that the driving identification structure 5212 can rotate synchronously with the mobile platform 2401. The first identification device 5210 and the second identification device 5211 are both connected to the third base 5101. The first identification device 5210 and the second identification device 5211 can identify the driving identification structure 5212, and the first identification device The device 5210 is connected to the first driving member 5103, and the second identification device 5211 is connected to the first driving member 5103. When the first driving member 5103 drives the mobile platform 2401 to rotate from the starting position to the stopping position, when the first identification device 5210 identifies the driving identification structure 5212, the first driving member 5103 stops moving. When the first driving member 5103 drives the mobile platform 2401 to reset from the stopping position to the starting position, when the second identification device 5211 identifies the driving identification structure 5212, the first driving member 5103 stops moving.

[0105] Specifically, when the first drive identification structure 5212 identifies the drive identification structure 5212, the first drive member 5103 stops moving. At this time, the first stop block 5207 is limited by the first limiting column 5206, so that the mobile platform 2401 stops moving, thereby ensuring the rotation accuracy of the mobile platform 2401; when the second drive identification structure 5212 identifies the drive identification structure 5212, the first drive member 5103 stops moving. At this time, the second stop block 5209 is limited by the second limiting column 5208, so that the mobile platform 2401 stops moving, thereby ensuring the reset accuracy of the mobile platform 2401.

[0106] Combining the structures of the travel switch, the rotation limit structure, the first driving member 5103 and the second driving member 210, it can be known that during the detection process, the range of rotation of the mobile platform 2401 driven by the first driving member 5103 is limited, so even if the second driving member 210 is located at the output end of the first driving member 5103, its impact on the overall movement of the driving structure 5106 is relatively small. Compared with the related technology, the driving structure 5106 in the present invention has more advantages.

[0107] Specifically, the driving structure 5106 also includes an encoder, which is connected to the guide seat 5104 and is used to measure the second driving member 5201 driving the mobile platform 2401 in the following manner: Fig.15 The displacement in the up and down directions is shown.

[0108] The method for using the chip detection device of the present invention is as follows: first, the chip is arranged on the mobile platform 2401, and then the positioning member 4106 is driven to move by the detection driving member 4104, and the position of the chip is obtained by the positioning member 4106, and then the position of the positioning member 4106 is adjusted so that the positioning member is located above the probe 2402, and the position of the probe 2402 is obtained, and the position of the probe 2402 is adjusted by the fine-tuning structure 3100 so that the probe 2402 can be located at the manually set position, and then the height and angle of the chip are adjusted by the first driving member 5103 and the second driving member 5201 to facilitate the subsequent correspondence with the probe 2402 and the subsequent detection of the chip. The movement of the movable platform 2401 relative to the base 2101 causes the movable platform 2401 to move to the bottom of the carrier plate 1104, and causes the chip to contact the probe 2402 (the probe 2402 extends to the bottom of the carrier plate 1104 through the detection hole 1110, and the chip moves upward and contacts the probe 2402). The chip is energized through the probe 2402 to detect whether the chip can work normally. At the same time, by driving the detection driver 4104, the detection component 4102 is located directly above the detection hole 1110, and through the detection hole 1110, the detection component 4102 detects the chip located below the detection hole 1110 to check whether it can emit light normally, thereby completing the test.

[0109] Based on the above embodiments, the chip detection device in the present invention can improve the position accuracy of the chip during detection, and at the same time, it can also improve the stability during the chip detection process.

[0110] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments. Various changes can be made within the knowledge of ordinary technicians in the relevant technical field without departing from the purpose of the present invention. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

Claims

1. Chip testing equipment, characterized in that: include: A base, wherein a bearing plate is provided on the base; A driving structure, the driving structure comprising a third base, a mobile platform, a first driving member and a second driving member, the mobile platform is used to carry a chip, a housing of the first driving member is located on the third base, a housing of the second driving member is located on an output end of the first driving member, the mobile platform is located on an output end of the second driving member, the third base can move relative to the base, the first driving member is used to drive the mobile platform to rotate around an axis of the mobile platform, the second driving member is used to change a height of the mobile platform relative to the base, and the mobile platform can move relative to the base; A detection structure, the detection structure is connected to the base and is located on the upper side of the mobile platform; A fine-tuning structure, the fine-tuning structure is located on the carrying plate, the fine-tuning structure includes a probe, and the carrying plate is located on the upper side of the moving platform; The fine-tuning structure comprises a first base, a first moving member, a first push rod and a rotating member, wherein the first base is provided with a third track, the first moving member can move along the third track, the first moving member can be used to connect a probe, the first push rod can move relative to the first base, the rotating member can rotate relative to the first base, the rotating member is provided with a first surface and a second surface perpendicular to each other, the first surface is used to abut against the first push rod, and the second surface is used to abut against the first moving member; The fine-tuning structure also includes a first elastic member, one end of which is against the rotating member, and the other end of which is connected to the first base, and the first elastic member is in a compressed state.

2. The chip detection device according to claim 1, characterized in that: The chip detection equipment also includes a first slider and a second slider. At least three first tracks are provided on the base. The first slider is connected to all the first tracks and moves along the first tracks. At least one of the first tracks is located between two of the first tracks. A second track is provided on the other side of the first slider relative to the first track. The second slider can move along the second track, and the mobile platform is connected to the second slider.

3. The chip detection device according to claim 2, characterized in that: A first moving area is provided on the first track, a first connecting portion is provided on the first slider, the first slider is connected to the first track via the first connecting portion, the first connecting portion can move in the first moving area, and a protective cover is provided at other positions of the first track excluding the first moving area; A second moving area is provided on the second track, a second connecting portion is provided on the second slider, the second slider is connected to the second track via the second connecting portion, the second connecting portion can move in the first moving area, and a protective cover is provided at other positions on the second track excluding the second moving area.

4. The chip detection device according to claim 1, characterized in that: The second surface is provided with a protrusion.

5. The chip detection device according to claim 1, characterized in that: The carrying plate is provided with a detection hole, the fine-tuning structure is arranged along the edge of the detection hole, and the probe can pass through the detection hole and extend toward the direction of the moving platform.

6. The chip detection device according to claim 1, characterized in that: The base includes a base seat, a base support and a base connector, one end of the base support is connected to the base seat, the base connector is connected to the other side of the base support relative to the base seat, and the base support is used to connect the supporting plate; the base seat, the support and the connector are all made of marble.

7. The chip detection device according to claim 2, characterized in that: The detection structure includes a detection member, a first moving block, a detection driving member and a sixth track. The detection member is provided with a detection surface, and light enters the detection member through the detection surface. The detection member is connected to the first moving block, and the driving member is connected to the first moving block. The first track is inclined relative to the detection surface, and the first moving block can move along the first track.

8. The chip detection device according to claim 7, characterized in that: The detection structure also includes a positioning member and a second moving block, wherein the positioning member is connected to the second moving block, and the second moving block can move along the first track.

9. The chip detection device according to claim 8, characterized in that: The detection structure further includes a second base, the second base is provided with an inclined surface, the sixth track is arranged along the inclined surface, and the sixth track extends from high to low on the inclined surface.

Images