A high-throughput thin film preparation device with convenient crucible replacement and its application

Abstract

The present invention relates to a high-throughput thin film preparation device and its application that is convenient for replacing crucibles, comprising an evaporation chamber and a storage chamber; the evaporation chamber is connected to the storage chamber through a flexible connection pipeline; the connecting pipeline between the evaporation chamber and the storage chamber is provided with a shutoff piece; an evaporation source and a groove for placing a crucible are provided in the evaporation chamber; a crucible storage rack and a manipulator are provided in the storage chamber; the manipulator is used for transporting the crucible between the groove and the crucible storage rack; the crucible is a truncated cone-shaped crucible. The present invention realizes the replacement of the crucible in a vacuum environment through the provision of the storage chamber, thereby realizing the alternating coating of multiple materials, which is conducive to the vacuum coating of multiple materials on the same substrate, and can completely avoid the problem of cross-contamination of materials.

Description

Technical Field

[0001] The invention belongs to the technical field of film coating, and relates to a film coating device, and in particular to a high-throughput thin film preparation device which is convenient for replacing a crucible, and an application thereof. Background Art

[0002] In traditional material research, one sample is prepared in one experiment, so the material research and development cycle is long. High-throughput material chip technology draws on the mask technology used to manufacture integrated circuit chips. In one experiment on a substrate, thousands of materials with different components can be prepared, and the composition, structure, and phase can be quickly characterized, which can greatly shorten the research and development cycle of new materials. High-throughput material chip technology has become one of the most important methods for material research and development.

[0003] High-throughput material chip technology usually requires the use of multiple materials for alternating coating. The evaporation source used in electron beam evaporation can hold multiple materials at the same time. The evaporation source has a baffle with a notch. When a certain material needs to be evaporated, the electron beam evaporation source rotates the material to be evaporated to the baffle notch. The electron beam heats the material under the baffle notch, thereby evaporating the coating. Other materials are shielded by the baffle to avoid cross contamination between materials due to evaporation.

[0004] Although the electron beam evaporation source can place multiple materials at the same time, it is still limited. If you need to change or add materials, you need to break the vacuum and open the cavity. In addition, during the coating process, the evaporated material will be deposited on the edge of the baffle gap; if the vacuum cavity is not opened in time to clean the material deposited on the edge of the baffle gap, the material deposited on the edge of the gap will fall off and fall into the material under the baffle gap, causing cross contamination of the material. Therefore, this electron beam evaporation source will also cause cross contamination of the material.

[0005] CN 101985736A discloses a multi-station gradient thin film coating device, including a driving module, a substrate, a workpiece disk, a mask mechanism and a uniform mechanism, wherein the workpiece disk is located on the substrate, and the workpiece disk can rotate around its axis, and the interval between the workpiece disk and the substrate is constant. A coating station is fixedly arranged on the workpiece disk; a coating hole is arranged on the substrate corresponding to the coating station position; a mask mechanism is fixedly arranged between the coating station and the coating hole; a uniform mechanism is fixedly arranged on the substrate at the lower part of the coating hole; and the working section of the driving module is fixedly connected to the workpiece disk. However, the device has a set of substrate replacement mechanism, and the substrate to be plated can be automatically replaced in the vacuum chamber, and the coating of non-uniform thin films can be realized through a specific mask mechanism. However, a set of mask mechanisms in the device can only plate one type of plated film, and different types of plated films need to replace different mask mechanisms, which is complicated to operate.

[0006] CN 105887020A discloses a multi-evaporation source coating device and a coating method thereof, wherein a plurality of film thickness controllers are arranged in the vacuum coating chamber, wherein one of the film thickness controllers is arranged at the center of the workpiece umbrella frame for monitoring the coating rate on the coating substrate, and the remaining film thickness controllers correspond to the evaporation sources one by one to monitor and adjust the evaporation rate of each evaporation source respectively. However, this method places a plurality of evaporation sources in the same chamber, and the number of evaporation sources is limited by the vacuum chamber. Considering the uniformity of coating, it is difficult to install too many evaporation sources.

[0007] CN 1814855A discloses a multi-evaporation source system for preparing multi-component thin films, including a vacuum chamber, in which a plurality of evaporation sources heated by electron guns are arranged, each of which includes an electron gun, a sensor and a crucible, and an electromagnetic shielding device is provided between each of the evaporation sources. The invention provides an electromagnetic shielding device so that the plurality of electron guns will not interfere with each other, thereby being able to prepare multi-component thin films. However, the device requires the installation of a plurality of electron guns and a plurality of evaporation sources in the vacuum chamber, which is prone to direct cross contamination of materials.

[0008] In this regard, a high-throughput thin film preparation device is provided, which can realize easy replacement of crucibles without destroying the vacuum state in the cavity, which is conducive to vacuum coating of multiple materials on the same substrate and can completely avoid the problem of cross-contamination of materials. Summary of the invention

[0009] The object of the present invention is to provide a high-throughput thin film preparation device with easy crucible replacement and its application. The high-throughput thin film preparation device with easy crucible replacement can realize the high-throughput thin film preparation device with easy crucible replacement without destroying the vacuum state in the cavity, which is conducive to realizing vacuum coating of multiple materials on the same substrate and can completely avoid the problem of cross-contamination of materials.

[0010] In order to achieve the purpose of the invention, the present invention adopts the following technical solutions:

[0011] In a first aspect, the present invention provides a high-throughput thin-film preparation device that is easy to replace a crucible, wherein the high-throughput thin-film preparation device that is easy to replace a crucible comprises an evaporation chamber and a storage chamber.

[0012] The evaporation chamber is communicated with the storage chamber through a soft connection pipeline; and a shutoff piece is provided on the communication pipeline between the evaporation chamber and the storage chamber.

[0013] An evaporation source and a groove for placing a crucible are arranged in the evaporation chamber.

[0014] A crucible storage rack and a manipulator are provided in the storage cavity; the manipulator is used for transporting the crucible between the groove and the crucible storage rack;

[0015] The crucible is a truncated cone-shaped crucible.

[0016] The high-throughput thin film preparation device with easy crucible replacement provided by the present invention can realize the replacement of crucibles without destroying the vacuum through the arrangement of the evaporation chamber and the storage chamber, thereby realizing the alternating coating of multiple materials under vacuum conditions. The evaporation chamber is provided with an evaporation source and a groove for placing the crucible, and the crucible placed in the groove is a truncated cone-shaped crucible.

[0017] The evaporation source in the evaporation chamber of the present invention includes an electron beam evaporation source and / or a laser evaporation source, and the evaporation source is used to heat the material in the crucible. The present invention does not specifically limit the position of the evaporation source, as long as the material in the crucible can be heated.

[0018] When the truncated cone-shaped crucible is placed in the groove, the small-diameter end of the truncated cone-shaped crucible is the bottom, and the side wall of the truncated cone-shaped crucible is in contact with the inside of the groove.

[0019] The use of the flexible connecting pipeline of the present invention facilitates the leveling of the connecting pipelines of the evaporation chamber and the storage chamber, thereby facilitating the manipulator to transport the crucible between the evaporation source and the crucible storage rack.

[0020] As a preferred technical solution, the soft connection pipeline includes but is not limited to a bellows.

[0021] The cut-off piece of the present invention is used to control the connection between the evaporation chamber and the storage chamber. When vacuum coating is performed in the evaporation chamber, the cut-off piece is controlled to prevent the evaporation chamber and the storage chamber from being connected. When the crucible needs to be replaced, the cut-off piece is controlled to prevent the evaporation chamber and the storage chamber from being connected.

[0022] As a preferred technical solution, the shut-off member includes but is not limited to a shut-off valve.

[0023] The manipulator of the present invention is used to transport crucibles between the evaporation source and the crucible storage rack, which means that the manipulator can not only transport the crucibles of the crucible storage rack of the storage chamber to the groove of the evaporation source, but also transport the crucibles in the groove of the evaporation source to the crucible storage rack of the storage chamber.

[0024] Preferably, the crucible storage rack comprises a support plate, a crucible support arranged on the support plate, and a support shaft arranged at the bottom of the support plate; the support shaft passes through the storage cavity.

[0025] The support shaft is used for the axial displacement of the crucible support along the support shaft and / or the axial rotation of the crucible support along the support shaft.

[0026] When the crucible support is displaced axially along the support shaft, the crucible storage rack moves up and down along the axial direction of the support shaft, cooperating with the axial displacement and axial rotation of the manipulator to achieve the taking and placing of the crucible on the crucible support; when the crucible support is rotated axially along the support shaft, the crucible support cooperates with the axial displacement and / or axial rotation of the manipulator to achieve the taking and placing of the crucible on the crucible support.

[0027] As a further preferred technical solution, the support shaft is used for axial displacement of the crucible holder along the support shaft and axial rotation of the crucible holder along the support shaft, so that the crucible holder and the manipulator can cooperate more flexibly, facilitating the manipulator to take and place crucibles at different positions of the crucible holder, thereby improving the space utilization rate in the storage chamber.

[0028] Preferably, the crucible support comprises at least one crucible storage platform; the crucible storage platform is used to place a truncated cone-shaped crucible; and the crucible storage platform is supported by a support column.

[0029] The present invention does not specifically limit the distance between two adjacent crucible storage platforms and the bottom crucible storage platform and the support plate. Those skilled in the art can reasonably select the distance between two adjacent crucible storage platforms and the bottom crucible storage platform and the support plate according to the height of the crucible and for the convenience of the robot to take and place.

[0030] The crucible support of the present invention includes at least one crucible storage platform, for example, 1 layer, 2 layers, 3 layers, 4 layers, 5 layers or 10 layers, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable. Those skilled in the art can reasonably set it according to the size of the storage cavity and the number of crucibles.

[0031] Preferably, the crucible storage table is provided with at least two through holes for placing the truncated cone-shaped crucible; for example, the number of through holes may be 2, 3, 4, 5, 6, 7, 8, 9 or 10, but is not limited to the listed values, and other unlisted values ​​within the numerical range are also applicable.

[0032] Those skilled in the art can reasonably set the number and size of the through holes according to the size of the truncated cone crucible.

[0033] Preferably, the robot comprises a first displacement member and a second displacement member.

[0034] The first displacement member is disposed in the storage cavity, the axial direction of the first displacement member is parallel to the axial direction of the support shaft, and the axial direction of the first displacement member is perpendicular to the axial direction of the second displacement member;

[0035] The first displacement member drives the second displacement member to displace along the axial direction of the first displacement member and / or drives the second displacement member to rotate along the axial direction of the first displacement member; the second displacement member is used for transporting the crucible between the groove and the crucible storage rack.

[0036] The setting of the first displacement member of the present invention can not only cooperate with the support shaft to realize the rapid placement and take-out of the truncated cone crucible, but also realize the placement and take-out of the truncated cone crucible placed in the groove; the setting of the second displacement member can realize the movement of the truncated cone crucible between the evaporation chamber and the storage chamber.

[0037] The present invention enables the second displacement member to displace along the axial direction of the first displacement member through the arrangement of the first displacement member, and enables the second displacement member to rotate along the axial direction of the first displacement member, so as to facilitate the second displacement member to take and place the truncated cone-shaped crucible at different positions of the crucible support.

[0038] When the first displacement member drives the second displacement member to move axially along the first displacement member, the manipulator cooperates with the axial displacement and axial rotation of the support shaft to enable the second displacement member to pick up and place the truncated cone crucible near the flexible connection pipeline; when the first displacement member drives the second displacement member to rotate axially along the first displacement member, the manipulator cooperates with the axial displacement and axial rotation of the support shaft to realize the picking and placing of the truncated cone crucible at different positions of the crucible support.

[0039] Preferably, the second displacement member is provided with a recess matched with the truncated cone-shaped crucible.

[0040] As one of the preferred technical solutions of the high-throughput thin film preparation device with easy crucible replacement described in the present invention, the truncated cone crucible is a single-layer crucible; when the truncated cone crucible is placed in the groove, the truncated cone crucible is higher than the groove.

[0041] The invention makes the truncated cone-shaped crucible higher than the groove, so that the robot can take and place the truncated cone-shaped crucible easily.

[0042] As a second preferred technical solution of the high-throughput thin film preparation device for easy crucible replacement of the present invention, the truncated cone-shaped crucible is a single-layer crucible;

[0043] When the truncated cone-shaped crucible is placed in the groove, the truncated cone-shaped crucible does not protrude from the groove;

[0044] The bottom of the groove is provided with at least three through holes for passing the ejector pins; the ejector pins are used to pass through the through holes to lift up the truncated cone-shaped crucible.

[0045] At least three through holes for passing the ejector pin are arranged at the bottom of the groove, so as to ensure the stability of the crucible when the ejector pin lifts the crucible.

[0046] When the truncated cone crucible is not higher than the groove, a pin is provided through a through hole at the bottom of the groove, so that the pin can be used to lift the truncated cone crucible when the robot transfers the truncated cone crucible, thereby facilitating the second displacement member to grasp the truncated cone crucible.

[0047] The number of through holes provided at the bottom of the groove for passing the ejector pins is at least 3, for example, 3, 4, 5, 6, 8 or 10, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0048] Preferably, the at least three through holes for passing the ejector pins are axially symmetrically distributed along the central axis of the groove.

[0049] As the third preferred technical solution of the high-throughput thin film preparation device for easy crucible replacement of the present invention, the truncated cone-shaped crucible includes an inner layer and a protective layer arranged outside the inner layer;

[0050] When the truncated cone-shaped crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer protrude from the groove.

[0051] In order to facilitate the placement and removal of the truncated cone crucible in the groove, the upper end of the truncated cone crucible needs to be higher than the top surface of the groove. At this time, due to uneven heating, the truncated cone crucible is easily damaged, thereby affecting the coating effect. The present invention ensures that the inner layer is heated evenly and facilitates the placement and removal of the truncated cone crucible in the groove by making the truncated cone crucible include an inner layer and a protective layer, and making the inner layer not higher than the groove and the protective layer higher than the groove.

[0052] As a fourth preferred technical solution of the high-throughput thin film preparation device for easy crucible replacement of the present invention, the truncated cone-shaped crucible includes an inner layer and a protective layer arranged outside the inner layer;

[0053] When the truncated cone-shaped crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer does not protrude from the groove.

[0054] The bottom of the groove is provided with at least three through holes for passing the ejector pins; the ejector pins are used to pass through the through holes to lift up the truncated cone-shaped crucible.

[0055] At least three through holes for passing the ejector pin are arranged at the bottom of the groove, so as to ensure the stability of the crucible when the ejector pin lifts the crucible.

[0056] When the inner layer and the protective layer of the truncated cone crucible are not higher than the groove, a pin is provided through a through hole at the bottom of the groove, so that the pin can be used to lift the truncated cone crucible when the robot transfers the truncated cone crucible, thereby facilitating the second displacement member to grasp the truncated cone crucible.

[0057] The number of through holes provided at the bottom of the groove for passing the ejector pins is at least 3, for example, 3, 4, 5, 6, 8 or 10, but is not limited to the listed values, and other values ​​not listed within the numerical range are also applicable.

[0058] Preferably, the at least three through holes for passing the ejector pins are axially symmetrically distributed along the central axis of the groove.

[0059] The material of the inner layer of the present invention is a conventional crucible material, and the material of the protective layer is a heat-conducting material.

[0060] Preferably, the material used for the inner layer includes Al 2 O 3 Or graphite.

[0061] Preferably, the material used for the protective layer includes any one of molybdenum, tungsten or copper.

[0062] In a second aspect, the present invention provides an application of coating using the high-throughput thin film preparation device with easy crucible replacement as described in the first aspect, the application comprising the following steps:

[0063] (1) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed on the crucible storage rack is transferred to the groove through the cooperation of the crucible storage rack and the manipulator, so as to place the crucible in the evaporation chamber;

[0064] (2) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed in the groove is transferred to the crucible storage rack through the cooperation of the crucible storage rack and the manipulator, so as to remove the crucible from the evaporation chamber;

[0065] There is no particular order in which steps (1) and (2) are performed.

[0066] In the application described in the second aspect of the present invention, after the crucible is placed in the evaporation chamber or the crucible is taken out of the evaporation chamber, the evaporation chamber and the storage chamber are selectively controlled to be disconnected according to the subsequent process requirements; the connection or non-connection between the evaporation chamber and the storage chamber is controlled by the shut-off piece.

[0067] Preferably, in the application described in the second aspect of the present invention, when the crucible is placed in the groove, the crucible is higher than the groove. That is, when the truncated cone-shaped crucible is a single-layer crucible, when the truncated cone-shaped crucible is placed in the groove, the truncated cone-shaped crucible is higher than the groove; when the truncated cone-shaped crucible includes an inner layer and a protective layer, when the truncated cone-shaped crucible is placed in the groove, the inner layer does not exceed the groove, and the protective layer exceeds the groove.

[0068] In a third aspect, the present invention provides an application of performing evaporative film deposition using the high-throughput thin film preparation device that is easy to replace the crucible as described in the second aspect, the application comprising the following steps:

[0069] (1) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed on the crucible storage rack is transferred to the groove through the cooperation of the crucible storage rack and the manipulator, so as to place the crucible in the evaporation chamber;

[0070] (2) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible is pushed out of the groove using an ejector pin. Then, the crucible placed in the groove is transferred to the crucible storage rack through the cooperation of the crucible storage rack and the manipulator, so as to remove the crucible from the evaporation chamber;

[0071] There is no particular order in which steps (1) and (2) are performed.

[0072] In the application described in the third aspect of the present invention, after the crucible is placed in the evaporation chamber or the crucible is taken out of the evaporation chamber, the evaporation chamber and the storage chamber are selectively controlled to be disconnected according to the subsequent process requirements; the connection or disconnection between the evaporation chamber and the storage chamber is controlled by the shut-off piece.

[0073] Preferably, in the application described in the third aspect of the present invention, when the crucible is placed in the groove, the crucible does not protrude from the groove, and at this time, at least three through holes for passing the ejector pins are provided at the bottom of the groove, and the crucible is pushed out of the groove by the ejector pins, so as to facilitate the manipulator to take and place the crucible in the groove. When the truncated cone-shaped crucible is a single-layer crucible, when the truncated cone-shaped crucible is placed in the groove, the truncated cone-shaped crucible does not protrude from the groove; when the truncated cone-shaped crucible includes an inner layer and a protective layer, when the truncated cone-shaped crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer does not protrude from the groove.

[0074] Compared with the prior art, the present invention has the following beneficial effects:

[0075] (1) The high-throughput thin film preparation device with easy crucible replacement provided by the present invention can realize the replacement of the truncated cone crucible in a vacuum environment through the arrangement of the storage chamber and the evaporation chamber, thereby realizing the alternating coating of multiple materials;

[0076] (2) The present invention enables the crucible support to be displaced along the axial direction of the support shaft through the support shaft, and can enable the crucible support to be rotated along the axial direction of the support shaft, so that the manipulator can easily take and place the truncated cone-shaped crucible at different positions of the crucible support, thereby improving the space utilization rate in the storage chamber;

[0077] (3) The present invention enables the second displacement member to be displaced along the axial direction of the first displacement member through the arrangement of the first displacement member, and enables the second displacement member to be rotated along the axial direction of the first displacement member, so as to facilitate the second displacement member to take and place the truncated cone-shaped crucible at different positions of the crucible support frame;

[0078] (4) The present invention makes the truncated cone crucible include an inner layer and a protective layer arranged on the outer side of the inner layer, and when the truncated cone crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer protrude from the groove. This can ensure that the inner layer is heated evenly and facilitate the placement of the truncated cone crucible in the groove. BRIEF DESCRIPTION OF THE DRAWINGS

[0079] Figure 1 A schematic structural diagram of a high-throughput thin film preparation device that facilitates the replacement of crucibles provided by the present invention;

[0080] Figure 2 A schematic diagram of the structure of the crucible storage rack provided by the present invention;

[0081] Figure 3 A schematic diagram of the structure of the manipulator provided by the present invention;

[0082] Figure 4 It is a schematic diagram of the ejector pin function in Application Example 5;

[0083] Figure 5 A schematic diagram of a truncated cone-shaped crucible provided in Example 5-6 when placed in a groove;

[0084] Figure 6 A schematic diagram of the structure of a truncated cone-shaped crucible provided in Example 5-6;

[0085] Figure 7 This is a schematic diagram of the structure of the truncated cone crucible provided in Example 7.

[0086] Among them: 1, evaporation chamber; 1-2, ejector pin; 1-1, evaporation source; 2, storage chamber; 2-1, truncated cone-shaped crucible; 2-1-1, inner layer; 2-1-2, protective layer; 2-2, crucible storage rack; 2-3, manipulator; 2-4, crucible storage table; 2-5, support shaft; 2-6, first displacement member; 2-7, second displacement member; 2-8, support column; 3, stop member; 4, flexible connection pipeline. DETAILED DESCRIPTION

[0087] The technical solution of the present invention is further described below by specific implementation methods. It should be understood by those skilled in the art that the embodiments are only to help understand the present invention and should not be regarded as specific limitations of the present invention.

[0088] Example 1

[0089] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The structural schematic diagram of the high-throughput thin film preparation device that is easy to replace the crucible is as shown in FIG. Figure 1 As shown, it includes an evaporation chamber 1 and a storage chamber 2.

[0090] The evaporation chamber 1 is connected to the storage chamber 2 via a flexible connection pipe 4 ; a shutoff piece 3 is provided on the connecting pipe between the evaporation chamber 1 and the storage chamber 2 .

[0091] The evaporation chamber 1 is provided with an electron beam evaporation source and a groove for placing a truncated cone-shaped crucible 2 - 1 .

[0092] The storage chamber 2 is provided with a crucible storage rack 2-2 and a manipulator 2-3; the manipulator 2-3 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0093] The structural schematic diagram of the crucible storage rack 2-2 is as follows Figure 2 As shown, it includes a support plate, a crucible support arranged on the support plate, and a support shaft 2-5 arranged at the bottom of the support plate; the support shaft 2-5 passes through the storage cavity 2 and is used for the axial displacement of the crucible support along the support shaft 2-5.

[0094] The crucible support includes two layers of crucible storage tables 2-4; the crucible storage table 2-4 is provided with a through hole for placing a truncated cone-shaped crucible 2-1; the crucible storage table 2-4 is supported by a support column 2-8.

[0095] The structural diagram of the manipulator 2-3 is as follows Figure 3 As shown, it includes a first displacement member 2-6 and a second displacement member 2-7.

[0096] The first displacement member 2-6 is disposed in the storage cavity 2, and the axial direction of the first displacement member 2-6 is parallel to the axial direction of the support shaft 2-5, and the axial direction of the first displacement member 2-6 is perpendicular to the axial direction of the second displacement member 2-7. The first displacement member 2-6 drives the second displacement member 2-7 to move along the axial direction of the first displacement member 2-6, and the first displacement member 2-6 can also drive the second displacement member 2-7 to rotate along the axial direction of the first displacement member 2-6; the second displacement member 2-7 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0097] The truncated cone crucible 2 - 1 used in this embodiment is a single-layer crucible, and has a truncated cone shape. When the truncated cone crucible 2 - 1 is placed in the groove, the truncated cone crucible 2 - 1 is higher than the groove.

[0098] Application Example 1

[0099] When the high-throughput thin film preparation device for easily replacing the crucible provided in Example 1 is used in this application example, the connecting pipeline between the evaporation chamber 1 and the storage chamber 2 is firstly leveled through the flexible connecting pipeline 4; then the second displacement member 2-7 rotates along the axial direction of the first displacement member 2-6 under the action of the first displacement member 2-6, so that the second displacement member 2-6 rotates to the position of the truncated cone-shaped crucible 2-1 to be taken out, and the truncated cone-shaped crucible 2-1 to be taken out is taken out through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; the shut-off member 3 is opened to allow the evaporation chamber 1 to be replaced. The evaporation chamber 1 is connected with the storage chamber 2, and then the second displacement member 2-7 is rotated along the axial direction of the first displacement member 2-6 to the connecting direction under the action of the first displacement member 2-6, and the truncated cone crucible 2-1 is placed in the groove through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; finally, the second displacement member 2-7 is returned to the storage chamber 2 through the coordination of its own axial displacement and the axial displacement along the first displacement member 2-6, and then the shut-off member 3 is closed to prevent the evaporation chamber 1 and the storage chamber 2 from being connected.

[0100] When the truncated cone crucible 2-1 in the evaporation chamber 1 needs to be replaced, the shut-off piece 3 is first opened to connect the evaporation chamber 1 with the storage chamber 2; the second displacement piece 2-7 is moved to the evaporation chamber 1 along its own axial displacement and the axial displacement along the first displacement piece 2-6, and under the action of the axial displacement of the first displacement piece 2-6, the second displacement piece 2-7 moves the truncated cone crucible 2-1 out of the groove, and then the truncated cone crucible 2-1 is transported to the storage chamber 2 by the second displacement piece along its own axial displacement; then the truncated cone crucible 2-1 is placed on the crucible storage rack 2-2 by the second displacement piece 2-7 along its own axial displacement and the axial displacement along the first displacement piece 2-6; the steps of taking out the truncated cone crucible 2-1 are repeated to realize the replacement of the truncated cone crucible 2-1 in the evaporation chamber 1.

[0101] Application Example 2

[0102] This application example provides a high-throughput thin film preparation device for easy crucible replacement provided by Application Example 1. The difference from Application Example 1 is that when taking and placing the truncated cone-shaped crucible 2-1, the crucible storage rack 2-2 is axially displaced along the support shaft 2-5 by the support shaft 2-5, thereby cooperating with the axial movement of the manipulator 2-3 along the first displacement member 2-6, so as to facilitate the taking and placing of the truncated cone-shaped crucible 2-1.

[0103] Example 2

[0104] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The structural schematic diagram of the high-throughput thin film preparation device that is easy to replace the crucible is as shown in FIG. Figure 1 As shown, it includes an evaporation chamber 1 and a storage chamber 2.

[0105] The evaporation chamber 1 is connected to the storage chamber 2 via a flexible connection pipe 4 ; a shutoff piece 3 is provided on the connecting pipe between the evaporation chamber 1 and the storage chamber 2 .

[0106] The evaporation chamber 1 is provided with a laser evaporation source and a groove for placing a truncated cone-shaped crucible 2 - 1 .

[0107] The storage chamber 2 is provided with a crucible storage rack 2-2 and a manipulator 2-3; the manipulator 2-3 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0108] The structural schematic diagram of the crucible storage rack 2-2 is as follows Figure 2 As shown, it includes a support plate, a crucible support arranged on the support plate, and a support shaft 2-5 arranged at the bottom of the support plate; the support shaft 2-5 passes through the storage cavity 2, and is used for the crucible support to rotate along the axial direction of the support shaft 2-5.

[0109] The crucible support includes two layers of crucible storage tables 2-4; the crucible storage table 2-4 is provided with a through hole for placing a truncated cone-shaped crucible 2-1; the crucible storage table 2-4 is supported by a support column 2-8.

[0110] The structural diagram of the manipulator 2-3 is as follows Figure 3 As shown, it includes a first displacement member 2-6 and a second displacement member 2-7.

[0111] The first displacement member 2-6 is disposed in the storage cavity 2, and the axial direction of the first displacement member 2-6 is parallel to the axial direction of the support shaft 2-5, and the axial direction of the first displacement member 2-6 is perpendicular to the axial direction of the second displacement member 2-7. The first displacement member 2-6 drives the second displacement member 2-7 to move along the axial direction of the first displacement member 2-6, and the first displacement member 2-6 can also drive the second displacement member 2-7 to rotate along the axial direction of the first displacement member 2-6; the second displacement member 2-7 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0112] The truncated cone crucible 2 - 1 used in this embodiment is a single-layer crucible, and has a truncated cone shape. When the truncated cone crucible 2 - 1 is placed in the groove, the truncated cone crucible 2 - 1 is higher than the groove.

[0113] Application Example 3

[0114] When the high-throughput thin film preparation device for easily replacing the crucible provided in Example 2 is used in this application example, the connecting pipeline between the evaporation chamber 1 and the storage chamber 2 is firstly leveled through the flexible connecting pipeline 4; then the second displacement member 2-7 rotates along the axial direction of the first displacement member 2-6 under the action of the first displacement member 2-6, so that the second displacement member 2-6 rotates to the position of the truncated cone-shaped crucible 2-1 to be taken out, and the truncated cone-shaped crucible 2-1 to be taken out is taken out through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; the shut-off member 3 is opened to allow the evaporation chamber 1 to be replaced. The evaporation chamber 1 is connected with the storage chamber 2, and then the second displacement member 2-7 is rotated along the axial direction of the first displacement member 2-6 to the connecting direction under the action of the first displacement member 2-6, and the truncated cone crucible 2-1 is placed in the groove through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; finally, the second displacement member 2-7 is returned to the storage chamber 2 through the coordination of its own axial displacement and the axial displacement along the first displacement member 2-6, and then the shut-off member 3 is closed to prevent the evaporation chamber 1 and the storage chamber 2 from being connected.

[0115] When the truncated cone crucible 2-1 in the evaporation chamber 1 needs to be replaced, the shut-off piece 3 is first opened to connect the evaporation chamber 1 with the storage chamber 2; the second displacement piece 2-7 is moved to the evaporation chamber 1 along its own axial displacement and the axial displacement along the first displacement piece 2-6, and under the action of the axial displacement of the first displacement piece 2-6, the second displacement piece 2-7 moves the truncated cone crucible 2-1 out of the groove, and then the truncated cone crucible 2-1 is transported to the storage chamber 2 by the second displacement piece along its own axial displacement; then the truncated cone crucible 2-1 is placed on the crucible storage rack 2-2 by the second displacement piece 2-7 along its own axial displacement and the axial displacement along the first displacement piece 2-6; the steps of taking out the truncated cone crucible 2-1 are repeated to realize the replacement of the truncated cone crucible 2-1 in the evaporation chamber 1.

[0116] Application Example 4

[0117] This application example provides a high-throughput thin film preparation device for easy crucible replacement provided by Application Example 2. The difference from Application Example 3 is that when taking and placing the truncated cone-shaped crucible 2-1, the crucible storage rack 2-2 rotates axially along the support shaft 2-5 through the support shaft 2-5, thereby cooperating with the manipulator 2-3 to rotate axially and axially displace along the first displacement member 2-6, thereby facilitating the taking and placing of the truncated cone-shaped crucible 2-1.

[0118] Example 3

[0119] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The difference from the first embodiment is that the truncated cone crucible 2-1 used in this embodiment is a single-layer crucible in the shape of a truncated cone, and when the truncated cone crucible 2-1 is placed in the groove, the truncated cone crucible 2-1 does not protrude from the groove. In order to facilitate the removal of the truncated cone crucible 2-1, three through holes for passing the ejector pin 1-2 are provided at the bottom of the groove, and the three through holes for passing the ejector pin are symmetrically distributed along the central axis of the groove.

[0120] Application Example 5

[0121] When the high-throughput thin film preparation device for easily replacing the crucible provided in Example 3 is used in this application example, the connecting pipeline between the evaporation chamber 1 and the storage chamber 2 is firstly leveled through the flexible connecting pipeline 4; then the second displacement member 2-7 rotates along the axial direction of the first displacement member 2-6 under the action of the first displacement member 2-6, so that the second displacement member 2-6 rotates to the position of the truncated cone-shaped crucible 2-1 to be taken out, and the truncated cone-shaped crucible 2-1 to be taken out is taken out through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; the shut-off member 3 is opened to allow the evaporation chamber 1 to be replaced. The evaporation chamber 1 is connected with the storage chamber 2, and then the second displacement member 2-7 is rotated along the axial direction of the first displacement member 2-6 to the connecting direction under the action of the first displacement member 2-6, and the truncated cone crucible 2-1 is placed in the groove through the coordination of the second displacement member 2-7 along its own axial displacement and the axial displacement along the first displacement member 2-6; finally, the second displacement member 2-7 is returned to the storage chamber 2 through the coordination of its own axial displacement and the axial displacement along the first displacement member 2-6, and then the shut-off member 3 is closed to prevent the evaporation chamber 1 and the storage chamber 2 from being connected.

[0122] When the truncated cone-shaped crucible 2-1 in the evaporation chamber 1 needs to be replaced, the shut-off member 3 is first opened to connect the evaporation chamber 1 with the storage chamber 2, and the ejector pin 1-2 ejects the truncated cone-shaped crucible 2-1 out of the groove (such as Figure 4 As shown); the second displacement member 2-7 moves to the evaporation chamber 1 along its own axial displacement and the axial displacement along the first displacement member 2-6, and under the action of the axial displacement of the first displacement member 2-6, the second displacement member 2-7 moves the truncated cone 2-1 out of the groove, and then the second displacement member moves the truncated cone 2-1 along its own axial displacement and transports it to the storage chamber 2; then, the second displacement member 2-7 is placed on the crucible storage rack 2-2 by the axial displacement of the second displacement member 2-7 along its own axial displacement and the axial displacement of the first displacement member 2-6; repeat the steps of taking out the truncated cone 2-1 to realize the replacement of the truncated cone 2-1 in the evaporation chamber 1.

[0123] Example 4

[0124] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The structural schematic diagram of the high-throughput thin film preparation device that is easy to replace the crucible is as shown in FIG. Figure 1 As shown, it includes an evaporation chamber 1 and a storage chamber 2.

[0125] The evaporation chamber 1 is connected to the storage chamber 2 via a flexible connection pipe 4 ; a shutoff piece 3 is provided on the connecting pipe between the evaporation chamber 1 and the storage chamber 2 .

[0126] The evaporation chamber 1 is provided with an electron beam evaporation source and a groove for placing a truncated cone-shaped crucible 2 - 1 .

[0127] The storage chamber 2 is provided with a crucible storage rack 2-2 and a manipulator 2-3; the manipulator 2-3 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0128] The structural schematic diagram of the crucible storage rack 2-2 is as follows Figure 2 As shown, it includes a support plate, a crucible support arranged on the support plate, and a support shaft 2-5 arranged at the bottom of the support plate; the support shaft 2-5 passes through the storage cavity 2 and is used for the axial rotation of the crucible support along the support shaft 2-5 and the axial displacement of the support shaft 2-5.

[0129] The crucible support includes two layers of crucible storage tables 2-4; the crucible storage table 2-4 is provided with a through hole for placing a truncated cone-shaped crucible 2-1; the crucible storage table 2-4 is supported by a support column 2-8.

[0130] The structural diagram of the manipulator 2-3 is as follows Figure 3 As shown, it includes a first displacement member 2-6 and a second displacement member 2-7.

[0131] The first displacement member 2-6 is disposed in the storage cavity 2, and the axial direction of the first displacement member 2-6 is parallel to the axial direction of the support shaft 2-5, and the axial direction of the first displacement member 2-6 is perpendicular to the axial direction of the second displacement member 2-7. The first displacement member 2-6 drives the second displacement member 2-7 to move along the axial direction of the first displacement member 2-6, and the first displacement member 2-6 can also drive the second displacement member 2-7 to rotate along the axial direction of the first displacement member 2-6; the second displacement member 2-7 is used for transporting the truncated cone-shaped crucible 2-1 between the groove and the crucible storage rack 2-2.

[0132] The truncated cone crucible 2 - 1 used in this embodiment is a single-layer crucible, and has a truncated cone shape. When the truncated cone crucible 2 - 1 is placed in the groove, the truncated cone crucible 2 - 1 is higher than the groove.

[0133] Application Example 6

[0134] This application example applies the high-throughput thin film preparation device with easy crucible replacement provided by Example 4. The difference between Example 4 and the high-throughput thin film preparation device with easy crucible replacement provided by Example 1 is that the crucible support provided by Example 4 can be displaced along the axial direction of the support shaft 2-5 and can also be rotated along the axial direction of the support shaft 2-5.

[0135] Therefore, when using the high-throughput thin film preparation device that is easy to replace the crucible provided in Example 4, the crucible support can be selectively displaced axially and / or rotated axially along the support shaft 2-5, thereby cooperating with the robot 2-3 to realize the taking and placing of the truncated cone-shaped crucible 2-1 on the crucible storage rack 2-2.

[0136] When the crucible support is fixed, the method of taking and placing the truncated cone-shaped crucible 2-1 on the crucible storage rack 2-2 by using the robot 2-3 is referred to Application Example 1 and Application Example 3.

[0137] When the crucible support is displaced along the axial direction of the support shaft 2-5, the method of taking and placing the truncated cone-shaped crucible 2-1 on the crucible storage rack 2-2 by using the manipulator 2-3 is referred to Application Example 2.

[0138] When the crucible support rotates along the axial direction of the support shaft 2-5, the method of taking and placing the truncated cone-shaped crucible 2-1 on the crucible storage rack 2-2 by using the robot 2-3 is referred to Application Example 4.

[0139] Example 5

[0140] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The difference from the embodiment 1 is that the structural schematic diagram of the truncated cone-shaped crucible 2-1 provided in this embodiment is as shown in FIG. Figure 6 As shown, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged outside the inner layer 2-1-1.

[0141] The schematic diagram of the truncated cone-shaped crucible 2-1 in this embodiment after being placed in the groove is as follows Figure 5 shown.

[0142] The material used for the inner layer 2-1-3 is Al 2 O 3 , the material used for the protective layer 2-1-4 is tungsten.

[0143] In this embodiment, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged on the outer side of the inner layer 2-1-1. When the truncated cone crucible 2-1 is placed in a groove, the inner layer 2-1-1 does not protrude from the groove, and the protective layer 2-1-2 protrude from the groove. This can ensure that the inner layer 2-1-1 is heated evenly and can facilitate the placement and removal of the truncated cone crucible 2-1 in the groove.

[0144] Example 6

[0145] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The difference from the embodiment 1 is that the structural schematic diagram of the truncated cone-shaped crucible 2-1 provided in this embodiment is as shown in FIG. Figure 6 As shown, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged outside the inner layer 2-1-1.

[0146] The schematic diagram of the truncated cone-shaped crucible 2-1 in this embodiment after being placed in the groove is as follows Figure 5 shown.

[0147] The material used for the inner layer 2-1-3 is graphite, and the material used for the protective layer 2-1-4 is molybdenum.

[0148] In this embodiment, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged on the outer side of the inner layer 2-1-1. When the truncated cone crucible 2-1 is placed in a groove, the inner layer 2-1-1 does not protrude from the groove, and the protective layer 2-1-2 protrude from the groove. This can ensure that the inner layer 2-1-1 is heated evenly and can facilitate the placement and removal of the truncated cone crucible 2-1 in the groove.

[0149] Example 7

[0150] This embodiment provides a high-throughput thin film preparation device that is easy to replace the crucible. The difference from Embodiment 3 is that the structural schematic diagram of the truncated cone crucible 2-1 used in this embodiment is as shown in FIG. Figure 7 As shown, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged outside the inner layer 2-1-1, and when the truncated cone crucible 2-1 is placed in the groove, the inner layer 2-1-1 does not protrude from the groove, and the protective layer 2-1-2 does not protrude from the groove.

[0151] In order to facilitate the removal of the truncated cone-shaped crucible 2-1, three through holes for passing the ejector pins 1-2 are provided at the bottom of the groove, and the three through holes for passing the ejector pins are symmetrically distributed along the central axis of the groove.

[0152] In this embodiment, the truncated cone crucible 2-1 includes an inner layer 2-1-1 and a protective layer 2-1-2 arranged outside the inner layer 2-1-1, so that the inner layer 2-1-1 is heated evenly; and the truncated cone crucible 2-1 can be easily taken in and out by providing three through holes for passing the ejector pins.

[0153] In summary, the high-throughput thin film preparation device for facilitating the replacement of crucibles provided by the present invention can realize the replacement of the truncated cone crucible in a vacuum environment through the arrangement of the storage chamber and the evaporation chamber, thereby realizing the alternating coating of multiple materials; the present invention enables the crucible support to be displaced axially along the support shaft through the support shaft, and enables the crucible support to be rotated axially along the support shaft, which is convenient for the manipulator to take and place the truncated cone crucible at different positions of the crucible support, thereby improving the space utilization rate in the storage chamber; the present invention enables the second displacement member to be displaced axially along the first displacement member through the arrangement of the first displacement member, and enables the second displacement member to be rotated axially along the first displacement member, which is convenient for the second displacement member to take and place the truncated cone crucible at different positions of the crucible support; the present invention enables the truncated cone crucible to include an inner layer and a protective layer arranged on the outer side of the inner layer, and when the truncated cone crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer protrude from the groove, which can not only ensure uniform heating of the inner layer, but also facilitate the taking and placing of the truncated cone crucible in the groove.

[0154] The applicant declares that the above is only a specific implementation mode of the present invention, but the protection scope of the present invention is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention are within the protection scope and disclosure scope of the present invention.

Claims

1. A high-throughput thin film preparation device that is easy to replace crucibles, characterized in that: The high-throughput thin film preparation device that is easy to replace the crucible includes an evaporation chamber and a storage chamber; The evaporation chamber is connected to the storage chamber through a soft connection pipeline; the connecting pipeline between the evaporation chamber and the storage chamber is provided with a shutoff piece; The evaporation chamber is provided with an evaporation source and a groove for placing a crucible; A crucible storage rack and a manipulator are provided in the storage cavity; the manipulator is used for transporting the crucible between the groove and the crucible storage rack; The crucible storage rack comprises a support plate, a crucible support arranged on the support plate, and a support shaft arranged at the bottom of the support plate; the support shaft passes through the storage cavity; the support shaft is used for axial displacement of the crucible support along the support shaft and axial rotation of the crucible support along the support shaft; The manipulator comprises a first displacement member and a second displacement member; the first displacement member is disposed in the storage cavity, the axial direction of the first displacement member is parallel to the axial direction of the support shaft, and the axial direction of the first displacement member is perpendicular to the axial direction of the second displacement member; the first displacement member drives the second displacement member to displace along the axial direction of the first displacement member and drives the second displacement member to rotate along the axial direction of the first displacement member; the second displacement member is used for transporting the crucible between the groove and the crucible storage rack; The crucible is a truncated cone-shaped crucible.

2. The high-throughput thin film preparation device with easy crucible replacement according to claim 1, characterized in that: The crucible support comprises at least one crucible storage platform; the crucible storage platform is used to place a truncated cone-shaped crucible; and the crucible storage platform is supported by a support column.

3. The high-throughput thin film preparation device with easy crucible replacement according to claim 2, characterized in that: The crucible storage table is provided with at least two through holes for placing the truncated cone-shaped crucibles.

4. The high-throughput thin film preparation device with easy crucible replacement according to claim 1, characterized in that: The truncated cone-shaped crucible is a single-layer crucible; When the truncated cone-shaped crucible is placed in the groove, the truncated cone-shaped crucible is higher than the groove.

5. The high-throughput thin film preparation device with easy crucible replacement according to claim 1, characterized in that: The truncated cone-shaped crucible is a single-layer crucible; When the truncated cone-shaped crucible is placed in the groove, the truncated cone-shaped crucible does not protrude from the groove; The bottom of the groove is provided with at least three through holes for passing the ejector pins; the ejector pins are used to pass through the through holes to lift up the truncated cone-shaped crucible.

6. The high-throughput thin film preparation device with easy crucible replacement according to claim 1, characterized in that: The truncated cone crucible includes an inner layer and a protective layer arranged outside the inner layer; When the truncated cone-shaped crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer protrude from the groove.

7. The high-throughput thin film preparation device with easy crucible replacement according to claim 1, characterized in that: The truncated cone crucible includes an inner layer and a protective layer arranged outside the inner layer; When the truncated cone-shaped crucible is placed in the groove, the inner layer does not protrude from the groove, and the protective layer does not protrude from the groove; The bottom of the groove is provided with at least three through holes for passing the ejector pins; the ejector pins are used to pass through the through holes to lift up the truncated cone-shaped crucible.

8. The high-throughput thin film preparation device with easy crucible replacement according to claim 6 or 7, characterized in that: The material used for the inner layer includes Al2O3 or graphite.

9. The high-throughput thin film preparation device with convenient crucible replacement according to claim 6 or 7, characterized in that: The material used for the protection layer includes any one of molybdenum, tungsten or copper.

10. An application of the high-throughput thin film preparation device with easy crucible replacement according to any one of claims 1 to 9 for evaporation coating, characterized in that: The application comprises the following steps: (1) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed on the crucible storage rack is transferred to the groove through the cooperation of the crucible storage rack and the manipulator, so as to place the crucible in the evaporation chamber; (2) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed in the groove is transferred to the crucible storage rack through the cooperation of the crucible storage rack and the manipulator, so as to remove the crucible from the evaporation chamber; There is no particular order in which steps (1) and (2) are performed.

11. An application of the high-throughput thin film preparation device with easy crucible replacement according to any one of claims 1 to 9 for evaporation coating, characterized in that: The application comprises the following steps: (1) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible placed on the crucible storage rack is transferred to the groove through the cooperation of the crucible storage rack and the manipulator, so as to place the crucible in the evaporation chamber; (2) Under vacuum conditions, the evaporation chamber is connected to the storage chamber, and the crucible is pushed out of the groove using an ejector pin. Then, the crucible placed in the groove is transferred to the crucible storage rack through the cooperation of the crucible storage rack and the manipulator, so as to remove the crucible from the evaporation chamber; There is no particular order in which steps (1) and (2) are performed.

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