Cathode components for electroplating equipment

Abstract

According to the cathode assembly for electroplating equipment of the present invention, it includes: a roller body, which has a first fastening part and a second fastening part; a first shaft, which has a third fastening part corresponding to the first fastening part and is connected to one end of the roller body in a releasable manner; and a second shaft, which has a fourth fastening part corresponding to the second fastening part and is connected to the other end of the roller body in a releasable manner. Accordingly, excellent quality of electroplating can be ensured, and replacement of the cathode becomes easy, thereby saving manufacturing costs.

Description

Technical Field

[0001] The present invention relates to a cathode assembly for electroplating equipment, and more particularly, to a cathode assembly for electroplating equipment capable of ensuring excellent quality of an electroplating protective film and saving manufacturing costs. Background Art

[0002] Roll-to-roll electroplating equipment includes an electroplating tank and a cathode to form an electroplated protective film on a film. The cathode includes a shaft and a roller body. The electroplating tank is provided with an electroplating solution and an anode. The film can be transported through the cathode. At this time, the film is immersed in the electroplating solution inside the electroplating tank. When power is applied to the anode and the cathode, the electroplating solution will be electrolyzed, and copper will be electrodeposited on the film.

[0003] Figure 1 The figure shows a cathode assembly for electroplating equipment in the related art.

[0004] In the case of electroplating equipment in the prior art, factors such as heat generated when current flows through the cathode and surface unevenness caused by contact with the electroplating solution will reduce the quality of the electroplating protective film. As a result, the cathode needs to be replaced frequently, which increases the manufacturing cost. In particular, referring to Figure 1 The shaft 12 and the roller body 11 are welded together. Due to the welding, the roundness of the roller will be poor. As a result, the film conveyance is unstable, and wrinkles may be generated in the film. Summary of the invention

[0005] An object of one embodiment of the present invention is to provide a cathode assembly for electroplating equipment that can ensure excellent quality of an electroplating protective film and can save manufacturing costs.

[0006] In order to achieve the purpose as described above, a cathode assembly for electroplating equipment according to an embodiment of the present invention is characterized in that it includes: a roller body, which has a first fastening portion and a second fastening portion; a first shaft, which has a third fastening portion corresponding to the first fastening portion, and the first shaft is connected to one end of the roller body in a releasable manner; and a second shaft, which has a fourth fastening portion corresponding to the second fastening portion, and the second shaft is connected to the other end of the roller body in a releasable manner.

[0007] According to the present invention, the roller body and the shaft can be easily connected and disconnected, so that the number of assembly man-hours can be reduced, and when necessary, only the roller body can be replaced, so that the replacement cost can be saved.

[0008] In addition, since the roundness of the roller can be maintained, the excellent quality of the plating protective film can be ensured. BRIEF DESCRIPTION OF THE DRAWINGS

[0009] Figure 1 The figure shows a cathode assembly for electroplating equipment in the related art.

[0010] Figure 2 This is a diagram schematically showing a cathode assembly for electroplating equipment according to one embodiment of the present invention.

[0011] Figure 3 Yes Figure 2 The electroplating apparatus is shown with the two ends of the cathode assembly enlarged and illustrated.

[0012] Description of Reference Numerals

[0013] 10: Cathode assembly for electroplating equipment 100: Roller body

[0014] 110: first fastening portion 130: second fastening portion

[0015] 200: first shaft 210: third fastening portion

[0016] 220: Shaft body 240: Shaft flange

[0017] 300: second shaft 310: fourth fastening portion

[0018] 400: Support shaft 500: Sealing member

[0019] H1: Insertion slot H2: Fastening slot DETAILED DESCRIPTION

[0020] Hereinafter, a cathode assembly 10 for electroplating equipment according to a preferred embodiment of the present invention will be described in detail.

[0021] Figure 2 FIG. 1 is a diagram schematically showing a cathode assembly 10 for electroplating equipment according to an embodiment of the present invention. Figure 3 Yes Figure 2 The electroplating apparatus shown is an enlarged view of both end portions of the cathode assembly 10.

[0022] Reference Figure 2 and Figure 3 The cathode assembly 10 for electroplating equipment according to an embodiment of the present invention includes a roller body 100, a first shaft 200 and a second shaft 300, so as to ensure the excellent quality of the plated film and save manufacturing costs. The first shaft 200 and the second shaft 300 are respectively connected to the two ends of the roller body 100 in a manner that can be easily combined and released. Accordingly, after separating the roller body 100 and the two shafts 200 and 300, only the roller body can be replaced, so that the manufacturing cost (replacement fee) can be saved.

[0023] The roller body 100 has a first fastening portion 110 and a second fastening portion 130. The first fastening portion 110 is disposed at one end of the roller body 100. The second fastening portion 130 is disposed at the other end of the roller body 100. The first shaft 200 has a third fastening portion 210. The third fastening portion 210 of the first shaft 200 can be fastened and released corresponding to the first fastening portion 110. The second shaft 300 has a fourth fastening portion 310. The fourth fastening portion 310 can be fastened and released corresponding to the second fastening portion 130.

[0024] As an embodiment, the roller body 100 may have a cylindrical shape. In addition, the first fastening portion 110 and the second fastening portion 130 are arranged on the inner circumference of the roller body 100. The first fastening portion 110 and the second fastening portion 130 may have the shape of a thread crest and a thread root. As an example, the first fastening portion 110 and the second fastening portion 130 may be an internal thread and an external thread, respectively. Therefore, the first fastening portion 110 and the second fastening portion 130 extend in the circumferential direction along the inner circumference or the outer circumference of the roller body 100. As an example, in the case where the first fastening portion 110 is formed on the inner circumference of the roller body 100, the second fastening portion 130 may be formed on the inner circumference or the outer circumference of the roller body 100; in the case where the second fastening portion 130 is formed on the inner circumference of the roller body 100, the first fastening portion 110 may be formed on the inner circumference or the outer circumference of the roller body 100. The first fastening portion 110 and the second fastening portion 130 are respectively recessed from the surface formed by themselves toward the inside (the inside of the surface) or protruded toward the outside (the outside of the surface). The first fastening portion 110 is configured at one end of the roller body 100, and the second fastening portion 130 is configured at the other end of the roller body 100.

[0025] The third fastening portion 210 is disposed on the outer circumference of the first shaft 200. The fourth fastening portion 310 is disposed on the outer circumference of the second shaft 300. The third fastening portion 210 and the fourth fastening portion 310 may have the shape of a thread crest and a thread root. As an example, the third fastening portion 210 and the fourth fastening portion 310 may be an internal thread and an external thread, respectively. Therefore, the third fastening portion 210 and the fourth fastening portion 310 extend in the circumferential direction along the outer circumference or inner circumference of the first shaft 200 and the second shaft 300, respectively. As an example, in the case where the first fastening portion 110 is formed on the inner circumference or outer circumference of the roller body 100, the third fastening portion 210 may be formed on the outer circumference or inner circumference of the first shaft 200; in the case where the second fastening portion 130 is formed on the inner circumference or outer circumference of the roller body 100, the fourth fastening portion 310 may be formed on the outer circumference or inner circumference of the second shaft 300. The third fastening portion 210 and the fourth fastening portion 310 are respectively recessed from the surface formed by themselves toward the inside (the inside of the surface) or protruded toward the outside (the outside of the surface). Accordingly, the first shaft 200 can be threadedly coupled to and released from the first fastening portion 110 of the roller body 100. In addition, the second shaft 300 can be threadedly coupled to and released from the second fastening portion 130 of the roller body 100. Therefore, the assembly and replacement of the cathode become easy, thereby preventing defects and saving manufacturing costs.

[0026] The first shaft 200 and the second shaft 300 include a shaft body 220 and a shaft flange 240, respectively. The shaft body 220 supports the roller body 100 as a rotating shaft. The shaft flange 240 is connected to the shaft body 220, and at least a portion thereof is inserted into the roller body 100. Here, the shaft flange 240 has a third fastening portion 210 and a fourth fastening portion 310.

[0027] In addition, the shaft flange 240 includes: an inclined portion, the diameter of which gradually decreases from the outer diameter of the roller body 100 toward the inner diameter of the roller body 100 as it extends toward the roller body 100; and an insertion portion, which is inserted into the inner side of the roller body 100. Here, after the shaft flange 240 and the roller body 100 are fastened, the inclined portion of the shaft flange 240 and the roller body 100 corresponding to the inclined portion can be joined by heat pressing. According to this, the roller body 100 and the shaft flange 240 can be sealed. That is, the sealing between the roller body 100 and the shaft flange 240 is ensured, and at the same time, the roller body 100 and the shaft flange 240 can be connected in a manner that can be combined and released.

[0028] The cathode assembly 10 for electroplating equipment according to one embodiment of the present invention further includes a support shaft 400. The support shaft 400 is used to connect the first shaft 200 and the second shaft 300. The support shaft 400, the first shaft 200, and the second shaft 300 have the same axis as the central axis. The support shaft 400 is used to strengthen the supporting force of the combination between the first shaft 200 and the second shaft 300. Therefore, even when the first shaft 200 and the second shaft 300 are combined or released, the roundness of the roller body 100 can be maintained.

[0029] As one embodiment, one end of the support shaft 400 can be fixed to any one of the first shaft 200 and the second shaft 300. The support shaft 400 can be formed as one body (one body) with the second shaft 300 or the first shaft 200. Therefore, the support shaft 400 and the second shaft 300 can be made of the same material. In other words, there is no joint between the support shaft 400 and the second shaft 300. As another embodiment, any one of the first shaft 200 and the second shaft 300 can be formed as one body with the support shaft 400 by welding or the like. In this case, there may be a joint between any one of the first shaft 200 and the second shaft 300 and the support shaft 400. Therefore, regardless of the presence or absence of the joint, any one of the first shaft 200 and the second shaft 300 and the support shaft 400 can be formed as one body that is combined in an inseparable manner.

[0030] If the support shaft 400 is formed as one with either the first shaft 200 or the second shaft 300, it is not only easy to assemble, but also can be assembled precisely. For example, when the second shaft 300 is fastened to the roller body 100 while the roller body 100 and the first shaft 200 are combined, the end of the support shaft 400 will be inserted into the fastening groove ( Figure 3 H2 in the figure). That is, the joint surface between the end of the support shaft 400 and the first shaft 200 will be arranged between the two ends of the roller body 100. Accordingly, the first shaft 200, the support shaft 400, and the second shaft 300 can be easily fastened in a manner having the same central axis by simple assembly. Conversely, in a state where the roller body 100 and the second shaft 300 are combined, if the first shaft 200 is fastened to the roller body 100, the end of the support shaft 400 will also be inserted into the fastening groove of the first shaft 200. That is, as the end of the support shaft 400 is inserted into the fastening groove of the first shaft 200, the first shaft 200, the second shaft 300, and the support shaft 400 can be aligned with the same central axis.

[0031] In addition, the other end of the support shaft 400 can be connected to the remaining other of the first shaft 200 and the second shaft 300 in a disengageable manner. To this end, the first shaft 200 or the second shaft 300 may have a fastening groove H2. The other end of the support shaft 400 can be inserted into the fastening groove H2 and supported. As another embodiment, a thread can be arranged on the inner circumferential surface of the fastening groove H2. Correspondingly, the support shaft 400 may also have a thread. That is, the other end of the support shaft 400 can be threadedly coupled with the fastening groove H2. The fastening groove H2 extends along the circumferential direction with the central axis of the roller body 100 as a reference. In addition, the fastening groove H2 can be spaced apart from a predetermined distance from the fastening portion (threaded fastening portion) between one end of the roller body 100 and the first shaft 200 toward the second shaft 300. As another embodiment, the fastening groove H2 can be spaced apart from a predetermined distance from the fastening portion (threaded fastening portion) between the other end of the roller body 100 and the second shaft 300 toward the first shaft 200.

[0032] The cathode assembly 10 for electroplating equipment according to one embodiment of the present invention further includes a sealing member 500. The sealing member 500 may have a ring shape. The sealing member 500 is disposed between the shaft flange 240 and the roller body 100 and performs sealing. The shaft flange 240 has an insertion groove H1 corresponding to the sealing member 500. The sealing member 500 may be inserted into the insertion groove H1 and fixed. Thus, in the process of combining and releasing the shaft flange 240 and the roller body 100, the sealing member 500 may not be separated.

[0033] On the other hand, the electroplating apparatus of the present invention uses a cathode assembly 10 to transport a thin film (not shown) so that the thin film passes through an electroplating tank (not shown) to form an electroplating protective film. Here, the thin film includes a metal layer (not shown). Before the thin film is electroplated, a metal layer of a specified thickness is formed on the surface of the thin film. The metal layer plays a conductive role and can be formed by sputtering or electroplating. The metal layer can have to Here, the metal layer includes a copper (Cu) seed layer.

[0034] In addition, in the step of vertical electrolytic plating, the plating solution contained in the plating tank has a copper concentration of 30g / L to 40g / L, a sulfuric acid concentration of 170g / L to 180g / L, and a chlorine (Cl) concentration of 45ppm to 55ppm. In addition, the electroplating can be achieved by passing through 10 to 20 plating tanks. In addition, the plating tank can be adjusted to have a current density of 0.1ASD to 3.5ASD.

[0035] In addition, the film can be made with a metal layer thickness of 0.5 μm or more and a current density (ASD) of 0.1 A / m 2 Up to 3.5A / m2 The electroplating process is performed under the condition that the temperature is above 34° C. Here, a copper electroplating protective film having a thickness of 1.8 μm to 2.4 μm is electroplated on one side or both sides of the thin film in a vertical or horizontal manner.

[0036] As mentioned above, the invention made by the present inventors has been specifically described based on the above-mentioned embodiments. However, the present invention is not limited to the above-mentioned embodiments, and various modifications can be made without departing from the gist of the invention.

Claims

1. A cathode assembly for electroplating equipment, wherein: include: The roller body comprises a first fastening portion and a second fastening portion; a first shaft having a third fastening portion corresponding to the first fastening portion, wherein the first shaft is connected to one end of the roller body in a releasable manner; as well as a second shaft having a fourth fastening portion corresponding to the second fastening portion, the second shaft being connected to the other end of the roller body in a releasable manner; Also included is a support shaft connecting the first shaft and the second shaft; The first axis includes: an inclined portion having a diameter that decreases as it approaches the second axis; and An insertion portion, inserted into the inner side of the roller body; The second axis includes: an inclined portion having a diameter that decreases as it approaches the first axis; and An insertion portion, inserted into the inner side of the roller body; One end of the support shaft is fixed to the first shaft or the second shaft; The other end of the support shaft is inserted into the fastening groove of the first shaft or the second shaft; The insertion portion of the first shaft has the third fastening portion, and the insertion portion of the second shaft has the fourth fastening portion; The insertion portion of the first shaft and the insertion portion of the second shaft are arranged between the inclined portion of the first shaft and the inclined portion of the second shaft; A joining surface that contacts the inner peripheral surface of the fastening groove is formed at the other end of the support shaft.

2. The cathode assembly for electroplating equipment according to claim 1, wherein: The first fastening portion and the second fastening portion are respectively formed with threads, The third fastening portion is formed with a thread corresponding to the first fastening portion, so that the first fastening portion and the third fastening portion are threadedly coupled. The fourth fastening portion is formed with a thread corresponding to the second fastening portion, so that the second fastening portion and the fourth fastening portion are threadedly coupled.

3. The cathode assembly for electroplating equipment according to claim 1, wherein: The first axis and the second axis respectively include: a shaft body; and The shaft flange is arranged at the end of the shaft body and is coupled to the roller body.

4. The cathode assembly for electroplating equipment according to claim 1, wherein: A sealing member is also included, and the sealing member is arranged between the roller body and the first shaft and between the roller body and the second shaft.

5. The cathode assembly for electroplating equipment according to claim 4, wherein: The roller body includes an insertion groove, and the sealing member is inserted into the insertion groove.

6. A method for forming an electroplating protective film, wherein: The cathode assembly for electroplating equipment according to any one of claims 1 to 5 is used to transport a thin film to form an electroplating protective film, The thin film includes a metal layer, and the metal layer is arranged on the surface of the thin film with a predetermined thickness before electroplating. The thickness of the thin film in the metal layer is greater than 0.5 μm and the current density is 0.1 A / m 2 Up to 3.5A / m 2 , electroplating is performed at a temperature above 34°C.

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