Sensors for X-ray machines that detect static electricity
By installing sensors of film and photosensitive components on the X-ray machine, the problem of monitoring the normal operation of the X-ray machine is solved, accurate sensing of X-rays and timely detection of faults is achieved, and the reliability and yield of the panel is improved. .
Patent Information
- Application Number
- CN201911286461.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2019-12-13
- Publication Date
- 2024-12-27
- Estimated Expiration
- 2039-12-13
AI Technical Summary
The prior art cannot effectively monitor and sense the normal operation of the electrostatic-eliminating X-ray machine, resulting in the inability to detect and resolve static electricity in a timely manner, affecting the reliability and yield of semiconductors, liquid crystal panels and printed circuit boards.
Design a sensor, including a film, photosensitive component and a processor, which is arranged in the sensing window, receives X-rays and converts them into current signals, and the processor transmits the signal to an external device for judging the X-ray machine. Whether it is functioning normally and ensure accurate sensing by filtering out other light interferences.
Real-time monitoring of the normal operation of the X-ray machine, timely detection of faults and repairs, improving the reliability and yield of semiconductors, LCD panels and printed circuit boards, and preventing circuit damage caused by static electricity.
Smart Images

Figure CN112987071B_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of optoelectronic semiconductors, and in particular to a sensor of an X-ray machine for sensing and eliminating static electricity on a liquid crystal panel. Background Art
[0002] In the past, in the manufacturing process of semiconductors, liquid crystals, organic EL, and printed circuit boards, a common problem was the processing / handling steps of semiconductor panels, liquid crystal panels, organic EL panels, and printed circuit boards. Since the insulating oxide film (SiO2) or the glass surface is a high insulator, it is easy to be charged with static electricity. The surface of the glass substrate has static electricity, which will absorb dust in the air and easily damage the circuits on the semiconductor panel, liquid crystal panel, organic EL panel, and printed circuit board. The charged voltage generated by static electricity can cause failures of devices such as thin-film transistors, which makes the product face problems such as reduced reliability and poor yield.
[0003] To solve the above-mentioned problem, an X-ray machine for eliminating static electricity can be installed on the panel to eliminate static electricity on the panel and / or prevent the surface of the panel from being charged. The X-ray machine for eliminating static electricity irradiates the air with X-rays to ionize the air and generate high-concentration ions. Therefore, static electricity can be eliminated in a very short time, and the voltage of the residual static electricity is very low. Static electricity can also be prevented in inactive gases under atmospheric pressure. However, when the X-ray machine for eliminating static electricity fails, it cannot eliminate the static electricity attached to the panel. Failure situations include: the X-ray machine for eliminating static electricity cannot emit X-rays normally; the X-ray tube is aged, resulting in insufficient X-ray intensity and cannot operate normally; the indicator light of the X-ray machine cannot be displayed in an abnormal state, etc.
[0004] Therefore, there is a great need for a technology that can sense and monitor whether an X-ray machine that eliminates static electricity is operating normally. Summary of the invention
[0005] In order to solve the above-mentioned problems, the main purpose of the present invention is to provide a sensor for an X-ray machine for sensing and eliminating static electricity, which is used to sense the X-rays emitted by the X-ray machine. The sensor includes a film, a photoelectric sensing component and a processor. The film is arranged in the sensing window, and the film is aligned with the outlet of the X-ray machine for emitting X-rays, so as to sense the X-rays emitted by the X-ray machine; the photoelectric sensing component receives the X-rays sensed by the film and converts the X-rays into current signals; the processor receives the current signal from the photoelectric sensing component and transmits the current signal to an external device, and the user can use the external device to judge or monitor whether the X-ray machine is normal based on the current signal.
[0006] The present invention further provides a sensor for an X-ray machine for sensing and eliminating static electricity, which is used to sense the X-rays emitted by the X-ray machine. The sensor includes a film, a light conversion component, a photoelectric sensing component and a processor. The film is arranged in the sensing window, and the film is aligned with the outlet of the X-ray machine for emitting X-rays, so as to sense the X-rays emitted by the X-ray machine; the light conversion component receives the X-rays sensed by the film and converts the X-rays into visible light; the photoelectric sensing component receives the visible light from the light conversion component and converts the visible light into a current signal; the processor receives the current signal from the photoelectric sensing component and transmits the current signal to an external device, and the user can use the external device to judge or monitor whether the X-ray machine is normal based on the current signal.
[0007] The sensor of the X-ray machine for sensing and eliminating static electricity of the present invention has a film that can sense X-rays and filter out other light except X-rays to shield visible light from interfering with the X-rays emitted by the X-ray machine, thereby reducing the probability of the sensor sensing other light except X-rays, thereby achieving the purpose of sensing X-rays emitted by the X-ray machine for eliminating static electricity. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 FIG. 1 is a schematic side view of a first embodiment of a sensor for sensing static electricity elimination in an X-ray machine according to the technology described in the present invention.
[0009] Figure 2 is a block diagram showing a first embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the techniques described in the present invention.
[0010] Figure 3 is a block diagram showing a second embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the techniques described in the present invention.
[0011] Figure 4A FIG. 1 is a schematic side view of a third embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the technology described in the present invention.
[0012] Figure 4B is a block diagram showing a third embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the technology described in the present invention.
[0013] Figure 5 is a block diagram showing a fourth embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the techniques described in the present invention. DETAILED DESCRIPTION
[0014] In order to make the purpose, technical features and advantages of the present invention more understandable to those skilled in the relevant technical field and to implement the present invention, the technical features and implementation methods of the present invention are specifically explained in conjunction with the attached drawings, and preferred embodiments are listed for illustration. The drawings compared in the following text are for expressing the features of the present invention, and are not and do not need to be fully drawn according to the actual situation. The technical content familiar to those skilled in the art in the description of the implementation method of this case is not described again.
[0015] First, please refer to Figure 1 , Figure 1 FIG. 1 is a side view schematic diagram of a first embodiment of a sensor for an X-ray machine for sensing and eliminating static electricity according to the present invention. Figure 1 As shown, in order to be able to sense in real time whether the function of the X-ray machine 20 for eliminating static electricity is normal, the sensor 10 is set on the X-ray machine 20 to sense the X-ray rays emitted by the X-ray machine 20. Preferably, the sensor 10 and the X-ray machine 20 can be connected to the adapter cable using a double-headed connection so as to be quickly installed on the production line. The sensor 10 includes a film 121 set in the sensing window 12, a photoelectric sensing component and a processor (refer to Figure 2 ). The sensing window 12 extends outward from the sensor body 11 and is protruded outside the sensor body 11; the film 121 is arranged in the sensing window 12 to receive X-rays and is aligned with the outlet 21 of the X-ray machine 20 for emitting X-rays, and the photoelectric sensing component and the processor are arranged in the sensor body 11.
[0016] Next, please refer to Figure 2 . Figure 2 FIG. 1 is a block diagram of a first embodiment of a sensor for an X-ray machine for sensing static electricity elimination according to the present invention. Figure 2In the embodiment, the sensor 10 is at least composed of a film 121 disposed in a sensing window 12, a circuit board 110 having a processor 16, and a photoelectric sensing component 14, wherein the photoelectric sensing component 14 is electrically connected to the circuit board 110. In addition, the processor 16 is used to receive the X-ray signal converted into a current signal by the photoelectric sensing component 14, and transmit the current signal to an external device 100 connected to the sensor 10, and use the current signal to determine whether the X-ray machine 20 configured by the sensor 10 is operating normally. In a preferred embodiment of the present invention, after the X-ray machine 20 emits X-rays, the film 121 in the sensing window 12 above the light source outlet 21 of the X-ray machine 20 receives the X-rays emitted by the X-ray machine 20, and the film 121 filters out other ambient light sources other than the X-rays to avoid interference caused by other ambient light sources, thereby affecting the accuracy of determining whether the X-ray machine 20 is operating normally. The filtered X-rays are transmitted to the photoelectric sensing component 14, which converts the X-ray signal into a corresponding current signal and transmits the current signal to the processor 16. Then, the current signal is transmitted to the external device 100, such as a computer or a display, via the processor 16. The user can use the external device 100 to determine or monitor whether the X-ray machine 20 is operating normally based on the current signal. In the present invention, the material of the film 121 can be metal, polymer material or composite material. The external device 100 includes computer hardware, network, computer, mobile phone, server or display, which can be used as a platform for monitoring whether the process equipment on the production line is operating normally. Therefore, the external device 100 can be connected to multiple sensors 10 to monitor whether multiple X-ray machines 20 are operating normally at the same time, so as to reflect replacement measures or maintenance needs in real time.
[0017] Next, please also refer to Figure 1 and Figure 3 . Figure 31 is a block diagram of a second embodiment of a sensor for an X-ray machine for sensing and eliminating static electricity according to the present invention. The sensor 10 is composed of at least a film 121 disposed in a sensing window 12, a circuit board 110 having a processor 16, a photoelectric sensing component 14, and a light conversion component 13, wherein the photoelectric sensing component 14 is electrically connected to the light conversion component 13 and the circuit board 110, respectively, and the light conversion component 13 is connected to the film 121. Therefore, after the X-ray machine 20 emits X-rays, the film 121 in the sensing window 12 above the light source outlet 21 of the X-ray machine 20 will receive the X-rays emitted by the X-ray machine 20, and the film 121 will filter out light sources of other wavelengths except the X-rays, and the filtered X-rays are transmitted to the light conversion component 13, which converts the X-rays into visible light and transmits them to the photoelectric sensing component 14. The photoelectric sensing element 14 converts the visible light signal into a corresponding current signal, and then transmits the current signal to the external device 100 via the processor 16. The user can use the external device 100 to determine or monitor whether the X-ray machine 20 is operating normally based on the current signal.
[0018] In another embodiment of the present invention, a sensor component such as a photoelectric sensing component is built into an X-ray machine, such as Figure 4A , Figure 4B shown. Figure 4A is a side view schematic diagram of a third embodiment of a sensor for sensing an X-ray machine for eliminating static electricity according to the present invention; Figure 4B FIG. 1 is a block diagram of a third embodiment of a sensor for an X-ray machine for sensing static electricity elimination according to the present invention. Figure 4A , Figure 4B In the embodiment, a sensing window 32 is protrudingly provided on the light source outlet 31 of the X-ray machine 30, that is, the sensing window 32 extends outward from the X-ray machine 30 toward the light source outlet 31. A film 321 is provided in the sensing window 32, and the film 321 is aligned with the X-ray emitting outlet 31, so that the film 321 in the sensing window 32 above the light source outlet 31 of the X-ray machine 30 can receive the X-rays emitted by the X-ray machine 30 and filter out other ambient light sources except the X-rays. In this embodiment, the photoelectric sensing component 34 is disposed in the X-ray machine 30, and the processor 16 originally in the sensor 10 can be disposed on the circuit board 310 of the X-ray machine 30 and integrated with the processor 36 of the X-ray machine 30. When the X-ray machine 30 emits X-rays, the film 321 located in the sensing window 32 can sense and receive the X-rays, and then transmit the X-rays to the photoelectric sensing component 34. The photoelectric sensing component 34 converts the X-ray signal into a corresponding current signal, and transmits the current signal to the processor 36, which is then transmitted to the external device 100 by the processor 36. The user can use the external device 100 to determine or monitor whether the operation of the X-ray machine 30 is normal.
[0019] In another embodiment of the present invention, the sensor components such as the photoelectric sensing component and the light conversion component are built into the X-ray machine at the same time. Figure 5 As shown, Figure 5 3 is a block diagram of a fourth embodiment of a sensor for an X-ray machine for sensing and eliminating static electricity according to the present invention. The light conversion component 33 and the photoelectric sensing component 34 are arranged in the X-ray machine 30. The processor 16 originally in the sensor 10 can be arranged on the circuit board 310 of the X-ray machine 30 and integrated with the processor 36 of the X-ray machine 30. When the film 321 in the sensing window 32 receives the X-rays emitted by the X-ray machine 30, the film 321 senses and filters out the ambient light source other than the X-rays, and then transmits the filtered X-rays to the light conversion component 33, which converts the X-rays into visible light and transmits it to the photoelectric sensing component 34. The photoelectric sensing component 34 converts the visible light signal into a current signal, and then the processor 36 arranged on the circuit board 310 in the X-ray machine 30 transmits the current signal to the external device 100. The user can use the external device 100 to judge or monitor whether the operation of the X-ray machine 30 is normal.
[0020] Therefore, when the X-ray machines 20 and 30 fail to emit X-rays, the sensing windows 12 and 32 cannot sense any X-rays. At this time, the user can find out from the external device 100 that there is no current signal corresponding to the X-ray machines 20 and 30, and can immediately find out that the X-ray machines 20 and 30 are faulty, so that the faulty X-ray machines 20 and 30 can be replaced or repaired immediately; or when the error between the current signal corresponding to the X-rays and the default current signal exceeds the default value, the user can also find out in real time and immediately troubleshoot the fault, thereby ensuring the normal operation of the X-ray machines 20 and 30 and the yield of the liquid crystal panel.
[0021] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of rights of the present invention. At the same time, the above description should be understandable and implementable for professionals in the relevant technical field. Therefore, other equivalent changes or modifications that do not deviate from the spirit disclosed by the present invention should be included in the scope of the patent application.
Claims
1. A sensor for an X-ray machine for eliminating static electricity, used for sensing X-rays emitted by the X-ray machine, characterized in that: The sensor comprises: A film is arranged on the sensing window, the film is aligned with the outlet of the X-ray machine for emitting the X-rays, and is used to sense the X-rays emitted by the X-ray machine, and the film is used to filter out other light except the X-rays; A photoelectric sensing component receives the X-rays sensed by the film and converts the X-rays into current signals; and The processor receives the current signal from the photoelectric sensing component and transmits the current signal to an external device, and the external device determines or monitors whether the X-ray machine is normal according to the current signal.
2. The sensor for an X-ray machine for sensing and eliminating static electricity as claimed in claim 1, characterized in that: The film is made of metal, polymer material or composite material.
3. The sensor for an X-ray machine for sensing static elimination as claimed in claim 1, characterized in that: The photoelectric sensing component and the processor are disposed in a sensor body, and the sensing window extends outward from the sensor body.
4. The sensor for an X-ray machine for sensing and eliminating static electricity according to claim 1, characterized in that: The sensor is disposed on the X-ray machine or built in the X-ray machine.
5. A sensor for an X-ray machine for eliminating static electricity, used for sensing X-rays emitted by the X-ray machine, characterized in that: The sensor comprises: A film is arranged on the sensing window, the film is aligned with the outlet of the X-ray machine for emitting the X-rays, so as to sense the X-rays emitted by the X-ray machine, and the film is used to filter out other light except the X-rays; A light conversion component receives the X-rays sensed by the film and converts the X-rays into visible light; A photoelectric sensing component receives the visible light from the light conversion component and converts the visible light into a current signal; and The processor receives the current signal from the photoelectric sensing component and transmits the current signal to an external device, and the external device determines or monitors whether the X-ray machine is normal according to the current signal.
6. The sensor for an X-ray machine for sensing and eliminating static electricity as claimed in claim 5, characterized in that: The film is made of metal, polymer material or composite material.
7. The sensor for an X-ray machine for sensing and eliminating static electricity as claimed in claim 5, characterized in that: The light conversion component, the photoelectric sensing component and the processor are arranged in a sensor body, and the sensing window extends outward from the sensor body.
8. The sensor for an X-ray machine for sensing and eliminating static electricity as claimed in claim 5, characterized in that: The sensor is disposed on the X-ray machine or built in the X-ray machine.