Substrate processing apparatus

Abstract

The present invention relates to a substrate processing apparatus, including: a rotary table on which a wafer is placed on an upper surface thereof; a ring-shaped seal ring coupled to an upper portion of the rotary table, having a plurality of hooking grooves formed along an inner circumferential surface thereof; a plurality of opening and closing units disposed to be linked in a radial direction with respect to a vertical rotation center of the rotary table, hooked to the hooking grooves when a locking operation is performed, and unhooked from the hooking grooves when an unlocking operation is performed, thereby releasing the hooking; and a power transmission unit disposed in a disposition space of the rotary table, which links the opening and closing units to the locking position or the unlocking position by an external force.

Description

TECHNICAL FIELD

[0001] The present application relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus that makes a coupling and a separation process of a seal ring simple and can reduce a coupling error (twisting, etc.) of the seal ring. BACKGROUND

[0002] Generally, in a semiconductor process, a process of performing etching and washing a wafer, etc. is performed, and a substrate processing apparatus is used in a process of etching or washing a wafer. The substrate processing apparatus for washing a wafer is configured of a rotary table provided in a rotatable manner and having a wafer placed on an upper portion, and a seal ring coupled to an edge region of the rotary table in a ring shape, etc., and supplies a processing liquid to the wafer placed on the rotary table. However, according to the existing substrate processing apparatus, a process of coupling the seal ring to the upper portion of the rotary table is complicated, and when the seal ring is coupled, a coupling completion state of the seal ring is not fixed, and a coupling error (twisting, etc.) can occur, and when the error occurs, becomes a main cause of reducing a function of the seal ring.

[0003] As a prior art document related to the present application, there is Korean Patent Publication No. 10-2016-0122067 (October 21, 2016), which discloses a wafer processing apparatus and a seal ring for the wafer processing apparatus. SUMMARY

[0004] Technical Problem to be Solved

[0005] The present application relates to a substrate processing apparatus, and more particularly, to a substrate processing apparatus that makes a coupling and a separation process of a seal ring simple and can reduce a coupling error (twisting, etc.) of the seal ring.

[0006] In addition, an object of the present application is to provide a substrate processing apparatus that can further improve a sealing performance of a seal ring and can prevent a chemical solution from penetrating between a rotary table and the seal ring.

[0007] Means for Solving Technical Problem

[0008] The substrate processing apparatus according to the present application is characterized by including: a rotary table on an upper surface of which a wafer is placed; a seal ring coupled to an upper portion of the rotary table in a ring shape, a plurality of hooking grooves being formed along an inner circumferential surface of the seal ring; a plurality of opening and closing units provided to be linked in a radial direction with a vertical rotation center of the rotary table as a reference, the opening and closing units being hooked to the hooking grooves when a locking operation is performed, and the opening and closing units being separated from the hooking grooves to thereby release the hooking when an unlocking operation is performed; and a power transmission unit provided in a provided space of the rotary table, the power transmission unit linking the opening and closing units to a locking position or an unlocking position by an external force.

[0009] Further, the rotating table is characterized in that a placement portion protruding from a side surface of the rotating table is provided to place a lower end of the seal ring, the lower end of the seal ring is placed on the placement portion, and an inner circumferential surface of the seal ring is in close contact with the side surface of the rotating table.

[0010] The opening and closing unit is characterized in that a rotating shaft is arranged in a radial direction with respect to a vertical rotation center of the rotating table, a lower end of the rotating shaft is coupled to the rotating table in a horizontally rotatable manner, a driven gear is coupled to the lower end of the rotating shaft in a horizontally rotatable manner, and a lever is coupled to an upper end of the rotating shaft in a horizontally rotatable manner, one end of the lever eccentric to one side is engaged with the engagement groove when the lever is rotated to the locking position, and the one end of the lever eccentric to one side is disengaged from the engagement groove when the lever is rotated to the unlocking position, thereby releasing the engagement.

[0011] The lever is further characterized in that a tapered surface is formed on a lower surface of the lever, the tapered surface is inclined upward toward the one end eccentric to one side, and the tapered surface supports a lower surface of the engagement groove in a downwardly pressing manner when the lever is rotated to the locking position.

[0012] The power transmission unit is characterized in that the power transmission unit is mechanically engaged with the driven gear to rotate the driven gear to the locking position or the unlocking position. The power transmission unit is characterized in that the power transmission unit includes a rotating plate rotatable in a locking direction or an unlocking direction with respect to a vertical rotation center, a plurality of guide holes formed in an up-and-down direction in a radial direction, and a connecting lever having one end coupled to the rotating plate in a slidable manner along the guide hole and the other end formed with a moving sawtooth portion to be engaged with the driven gear. The power transmission unit is further characterized in that the connecting lever slides to an outside of the rotating plate when the rotating plate is rotated in the locking direction, thereby rotating the driven gear to the locking position, and the connecting lever slides to the vertical rotation center of the rotating plate when the rotating plate is rotated in the unlocking direction, thereby rotating the driven gear to the unlocking position. The guide hole has a long hole shape having an inclined direction with respect to a length of an edge of the rotating plate, and the one end of the connecting lever has a guide shaft inserted into the guide hole in a slidable manner.

[0013] The power transmission unit is further characterized in that an elastic member having both ends coupled to the setting space and the rotating plate is provided to apply a tension force to the rotating plate in the locking direction.

[0014] The rotating table is characterized in that a plurality of fastening pins are vertically arranged along an upper surface of the placement portion, and the seal ring has a fastening groove formed in a concave-convex manner at a lower end to be inserted by the fastening pins.

[0015] The rotary stage further comprises an annular outer seal gasket groove formed continuously along the upper surface of the placement portion, and an annular outer seal gasket inserted into the outer seal gasket groove, the upper end of the outer seal gasket protruding toward the upper portion of the outer seal gasket groove abutting against the lower end of the seal ring.

[0016] In addition, an extension is formed protruding along the inner circumferential surface of the seal ring, and the rotary stage can further comprise an annular inner seal gasket groove formed continuously along the upper surface of the edge side of the seal ring, and an annular inner seal gasket inserted into the inner seal gasket groove, the upper end of the inner seal gasket protruding toward the upper portion of the inner seal gasket groove abutting against the lower surface or the inner circumferential surface of the extension.

[0017] Effects of the Invention

[0018] The present invention uses the linear motion of the connecting pin linked with the rotary motion of the rotary plate to rotate the plurality of rods to the locked position or the unlocked position, thereby simultaneously achieving the locking and unlocking of the rods, and thus the combination and separation of the seal ring is simple, and the effect of not generating combination errors (distortion, etc.) of the seal ring is achieved.

[0019] In addition, the present invention combines the seal gasket having elasticity itself at the corresponding portions of the rotary stage and the seal ring, thereby further improving the sealing performance of the seal ring, and the effect of preventing the permeation of the chemical liquid between the rotary stage and the seal ring is achieved. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 FIG. 1 is a perspective view for showing a substrate processing apparatus according to an embodiment of the present invention.

[0021] Figure 2 FIG. 2 is a perspective view for showing the substrate processing apparatus according to the embodiment of the present invention from below.

[0022] Figure 3 FIG. 3 is a front sectional view for showing the substrate processing apparatus according to the embodiment of the present invention.

[0023] Figure 4 FIG. 4 is an exploded perspective view for showing the state of separating the seal ring of the substrate processing apparatus according to the embodiment of the present invention.

[0024] Figure 5 FIG. 5 is a main portion enlarged perspective view for showing the hanging groove and the fastening groove of the seal ring in the substrate processing apparatus according to the embodiment of the present invention.

[0025] Figure 6 FIG. 6 is a bottom view for showing the power transmission unit in the substrate processing apparatus according to the embodiment of the present invention.

[0026] Figure 7 is a top view for illustrating a connection relationship of an opening and closing unit and a power transmission unit in a substrate processing apparatus according to an embodiment of the present application in detail.

[0027] Figure 8 is a split perspective view for illustrating an outer side gasket groove and an outer side gasket and an inner side gasket groove and an inner side gasket in a substrate processing apparatus according to an embodiment of the present application.

[0028] Figure 9 is a front sectional view for partially illustrating a state in which a shaft is formed with a tapered surface in a substrate processing apparatus according to an embodiment of the present application.

[0029] Explanation of Reference Numerals

[0030] 100: rotary table; 101: placement portion; 110: installation space; 120: fastening pin; 130: outer side gasket groove; 140: inner side gasket groove; 150: outer side gasket; 160: inner side gasket; 170: first connection portion; 200: seal ring; 201: extension portion; 210: hooking groove; 220: fastening groove; 300: opening and closing unit; 310: rotary shaft; 320: driven gear; 330: shaft; 331: tapered surface; 400: power transmission unit; 410: rotary plate; 411: guide hole; 412: hollow portion; 413: turning sawtooth portion; 414: second connection portion; 420: connecting shaft; 421: moving sawtooth portion; 422: guide shaft; 430: guide module; 440: elastic member; 510: motor; 511: drive shaft; 520: drive gear; C1: vertical rotation center; C2: vertical rotation center. DETAILED DESCRIPTION

[0031] Hereinafter, embodiments according to the present application will be described in detail with reference to the accompanying drawings. Advantages and features of the present application and a method of achieving them can be ascertained by the reference to the embodiments with reference to the accompanying drawings as well as the detailed description. However, the present application is not limited to the following multiple embodiments disclosed below, and can be achieved in various other ways. The multiple embodiments are provided only for more complete disclosure of the present application and to fully convey the scope of the protection of the present application to those skilled in the art to which the present application pertains, and the present application is defined based on the claims.

[0032] In addition, in explaining the present application, when it is judged that the relevant known technology or the like is likely to confuse the gist of the present application, the detailed description thereof is omitted.

[0033] Figure 1 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present application, Figure 2 is a perspective view for illustrating a substrate processing apparatus according to an embodiment of the present application from below, Figure 3is a front sectional view for showing a substrate processing apparatus according to an embodiment of the present application. In addition, Figure 4 is an exploded perspective view for showing a state of a separation seal ring of a substrate processing apparatus according to an embodiment of the present application, Figure 5 is a main part enlarged perspective view for showing a hanging groove and a fastening groove of a seal ring in a substrate processing apparatus according to an embodiment of the present application, Figure 6 is a bottom view for showing a power transmission unit in a substrate processing apparatus according to an embodiment of the present application. In addition, Figure 7 is a top view for showing a connection relationship of an opening and closing unit and a power transmission unit in a substrate processing apparatus according to an embodiment of the present application, Figure 8 is an exploded perspective view for showing an outer side seal gasket groove and an outer side seal gasket and an inner side seal gasket groove and an inner side seal gasket in a substrate processing apparatus according to an embodiment of the present application, Figure 9 is a front sectional view for partially showing a state that a shaft is formed with a tapered surface in a substrate processing apparatus according to an embodiment of the present application.

[0034] As Figures 1 to 9 shows that a substrate processing apparatus according to an embodiment of the present application includes a rotary table 100, a seal ring 200, an opening and closing unit 300, a power transmission unit 400, and a driving unit 500.

[0035] An upper portion of the rotary table 100 is for placing a wafer as an object of processing (washing, etc.), and a vertical rotation center of the rotary table 100 is combined with a rotation shaft in a manner capable of horizontal rotation. Among them, the rotary table 100 can have a circular plate shape, and the rotation shaft of the rotary table 100 can be transmitted with a rotation force by an additional rotation driving part (not shown). For the rotary table 100, a structure of various modes for horizontally supporting a wafer can be applied, and an edge of the rotary table 100 can be protrusively formed with a placing portion 101 so as to be capable of placing a lower end of the seal ring 200 described later. That is, in a case where the seal ring 200 is combined with the upper portion of the rotary table 100, an inner peripheral surface of the seal ring 200 is in close contact with a side surface of the rotary table 100, and the lower end of the seal ring 200 is placed on an upper surface of the placing portion 101.

[0036] The upper surface of the placing portion 101 is provided with a fastening pin 120, and the fastening pin 120 can be vertically provided in a state that a plurality of fastening pins 120 are separated along the upper surface of the placing portion 101. Among them, the fastening pin 120 can have a cylindrical shape in which a side surface constitutes a circumference, and an upper end of the fastening pin 120 can have a taper shape in which a diameter is gradually reduced toward the upper portion.

[0037] The fastening pin 120 is configured by being inserted in a concave-convex manner with a fastening groove 220 of the seal ring 200 described later, and can be formed in the same number as the fastening groove 220.

[0038] The sealing ring 200 is coupled to the upper portion of the rotary table 100, and can have a ring shape corresponding to the edge of the rotary table 100. The center of the sealing ring 200 can be hollowed out, and a protrusion 201 can be continuously formed along the inner circumferential surface of the sealing ring 200.

[0039] The upper surface of the protrusion 201 can have a tapered shape that gradually decreases in height toward the center, and the lower surface of the protrusion 201 can be placed on the upper surface of the rotary table. That is, the protruding end of the protrusion 201 can be closely attached to the upper surface of the rotary table 100, and the lower end of the sealing ring 200 can be placed on the upper surface of the seating portion 101. At this time, the inner circumferential surface of the sealing ring 200 can be closely attached to the side surface of the rotary table 100, and the lower end of the sealing ring 200 can be placed on the upper surface of the seating portion 101.

[0040] A plurality of hook grooves 210 can be recessed at predetermined intervals along the circumferential direction on the inner circumferential surface of the sealing ring 200. The hook grooves 210 are components for allowing one end of a rod 330 to be inserted and withdrawn, and can be recessed in the radial direction with the center of the sealing ring 200 as a reference. A fastening groove 220 can be recessed at the lower end of the sealing ring 200, so that the upper end of the fastening pin 120 can be correspondingly inserted.

[0041] As Figure 3 As shown, when the sealing ring 200 is coupled to the upper portion of the rotary table 100, the fastening pin 120 is vertically inserted through the lower portion of the fastening groove 220, so the sealing ring 200 does not sway to the side. Also, an outer seal pad groove 130 can be continuously formed in a ring shape along the upper surface of the seating portion 101, as Figure 3 shown, the outer seal pad groove 130 can be located outside the fastening pin 120.

[0042] Meanwhile, an outer seal pad 150 can be correspondingly inserted into the outer seal pad groove 130, and the upper end of the outer seal pad 150 can protrude toward the upper portion of the outer seal pad groove 130, so as to be closely attached to the lower end of the sealing ring 200. The outer seal pad 150 can be made of a material having elastic restoring force (rubber, resin series, etc.), and one or more rows of the outer seal pad groove 130 and the outer seal pad 150 can be formed as needed. The lower portion of the outer seal pad groove 130 can be recessed to have a hook platform that extends wider in the radial direction, and the lower end of the outer seal pad 150 can also protrude to have a corresponding hook protrusion. As Figure 3 shown, the outer seal pad 150 is closely attached to the lower end of the sealing ring 200 by the elastic force of the outer seal pad 150 itself, so as to shield against the inflow of a chemical liquid (not shown) between the sealing ring 200 and the seating portion 101.

[0043] As Figure 3 shown, the outer seal pad 150 is closely attached to the lower end of the sealing ring 200 by the elastic force of the outer seal pad 150 itself, so as to shield against the inflow of a chemical liquid (not shown) between the sealing ring 200 and the seating portion 101.Figure 8 It is shown that the upper surface of the rotary table 100 can be continuously formed with the inner side gasket groove 140 along the edge side upper surface. Meanwhile, the inner side gasket 160 can be correspondingly inserted into the inner side gasket groove 140, and the upper end of the inner side gasket 160 can be closely attached to the lower surface or the inner circumferential surface of the extension portion 201 described above. Among them, the inner side gasket 160 can use a material (rubber, resin series, etc.) having elastic restoring force, and one or more rows of inner side gasket grooves 140 and inner side gaskets 160 can be formed as needed.

[0044] The lower part of the inner side gasket groove 140 can be recessed to form a hanging table extending wider in the radial direction, and the lower end of the inner side gasket 160 can also protrude with a corresponding hanging protrusion. As Figure 3 It is shown that such an inner side gasket 140 is closely attached to the extension portion 201 of the seal ring 200 by its own elasticity, so that shielding can be achieved to prevent the inflow of liquid medicine (not shown) between the seal ring 200 and the rotary table 100. By adjusting the hardness of the inner side gasket 140 and the outer side gasket 150 in various ways, the sealing force of the seal ring 200 can be adjusted in various ways.

[0045] On the other hand, although not specifically described, the inside of the rotary table 100 can also be provided with a separate structure (suction structure, support structure, etc.) for horizontally positioning the wafer (not shown).

[0046] The opening and closing unit 300 is a component for hanging or releasing the seal ring 200 from the upper end of the rotary table 100, and is configured to be linked in the radial direction with the vertical rotation center of the rotary table 100 as a reference. Such an opening and closing unit 300, when performing a locking action, is hung in the hanging groove 210 of the seal ring 200, and when performing an unlocking action, is separated from the hanging groove 210 of the seal ring 200 to release the hanging. More specifically, as Figure 3 and Figure 7 It is shown that the opening and closing unit 300 can have a rotating shaft 310, a driven gear 320, and a lever 330.

[0047] The rotating shaft 310 is arranged in the radial direction with the vertical rotation center C1 of the rotary table 100 as a reference, and its lower end is combined to the rotary table 100 in a manner that can be horizontally rotated. At this time, the lower end of the rotating shaft 310 can be vertically located inside the installation space 110, and the driven gear 320 can be combined to the lower end of the rotating shaft 310.

[0048] The driven gear 320 can be horizontally rotated together with the rotating shaft 310, and is engaged with the moving sawtooth portion 421 of the connecting lever 420 described later.

[0049] The lever 330 is a member coupled to the upper end of the rotating shaft 310 in a manner capable of horizontal rotation, and the eccentrically-located one end can be rotated to a locking position or an unlocking position. Herein, the lever 330, when rotated to the locking position, has the eccentrically-located one end hooked to the hooking groove 210, and when rotated to the unlocking position, is released from the hooking groove 210, thereby releasing the hooking. That is, when the lever 330 is hooked to the hooking groove 210, the sealing ring 200 can be fixedly located at the upper portion of the rotating table 100, and when the lever 330 is released from the hooking groove 210, the sealing ring 200 can be separated from the rotating table 100.

[0050] On the other hand, as shown in FIG. 3, the lower surface of the lever 330 can further be formed with a tapered surface 331 inclined upward toward the eccentrically-located one end. When the lever 330 is rotated to the locking position, such a tapered surface 331 presses the lower surface of the hooking groove 210 downward, so that the lower end of the sealing ring 200 can be closely adhered to the upper end of the outer sealing gasket 150. Figure 9

[0051] The power transmission unit 400 is provided in the installation space 110 of the rotating table 100, and drives the above-described rotating lever to the locking position or the unlocking position by an external force. In more detail, as shown in FIG. 4, the power transmission unit 400 can be provided with a rotating plate 410 and a plurality of connecting levers 420. Figure 6

[0052] The rotating plate 410 can be rotated in the locking or unlocking direction with the vertical rotation center C as a reference, and can exert a centrifugal force when rotated. In the radial direction, a plurality of guide holes 411 can be formed in a manner penetrating the upper and lower portions. Herein, the rotating plate 410 can have a circular plate shape, and the vertical rotation center C1 of the rotating plate 410 can be formed with a hollow portion 412 in a manner penetrating the upper and lower portions.

[0053] The guide hole 411 can have a shape in which the length thereof is inclined toward the vertical rotation center C of the rotating plate 410 and the edge of the rotating plate 410. That is, both ends of the length direction of the guide hole 411 are positioned in an inclined manner toward the vertical rotation center C of the rotating plate 410 and the edge of the rotating plate 410, so that the guide shaft 422, which will be described later, can be linearly moved to the locking position or the unlocking position by the bidirectional rotation of the rotating plate 410.

[0054] In addition, the inner circumferential surface of the rotating plate 410 can be formed with a rotating sawtooth portion 413 so as to be engaged with the driving gear 520, which will be described later. The rotating sawtooth portion 413 can be arranged in a curvature identical to the radius of rotation of the rotating plate 410, and the rotating plate 410 can be rotated in the locking or unlocking direction by the rotational force transmitted to the rotating sawtooth portion 413.

[0055] ​​Further, the elastic member 440 can be combined in the installation space 110 of the rotary base 100. The elastic member 440, which is combined at both ends to the installation space 110 and the rotary plate 410, can apply a tension force to the locking direction of the rotary plate 410. Here, the elastic member 440 can have a coil spring shape, and the installation space 110 can be provided with a first connecting portion 170 to connect one end of the elastic member 440, and the inner circumferential surface of the rotary plate 410 can be formed with a second connecting portion 414 to connect the other end of the elastic member 440. Such an elastic member 440 can apply a tension force to the locking direction of the rotary plate 410, but various positions of the elastic member 440 and the direction of the tension force can be implemented as needed.

[0056] The connecting rod 420 is a member for converting the rotary motion of the rotary plate 410 into linear motion in the installation space 110 and then transmitting the linear motion to the opening and closing unit 300, and moves back and forth in the radial direction with the vertical rotation center C of the rotary plate 410 as a reference. Here, one end of the connecting rod 420 is combined in a slidable manner along the guide hole 411, and the other end in the width direction is formed with a moving sawtooth portion 421 in the length direction to be engaged with the driven gear 320.

[0057] The sawtooth portion 421 is arranged in the length direction of the connecting rod 420 and is engaged with the vertical rotation center C2 of the driven gear 320 in a perpendicular manner.

[0058] In addition, the one end of the connecting rod 420 in the length direction opposite to the sawtooth portion 421 can have a guide shaft 422 inserted into the inside of the guide hole 411 in a slidable manner. The guide shaft 422 can slide in the length direction of the guide hole 411 in a state of being vertically penetrated and combined in the guide hole 411. The guide shaft 422 can also have a bearing to reduce friction when moving along the guide hole 411.

[0059] When the rotary plate 410 rotates in the locking direction, such a connecting rod 420 slides to the outside of the rotary plate 410, thereby rotating the driven gear 320 to the locking position. In contrast, when the rotary plate 410 rotates in the unlocking direction, it slides in the direction of the vertical rotation center C1 of the rotary plate 410, thereby rotating the driven gear 320 to the unlocking position.

[0060] In addition, the installation space 110 of the rotary base 100 can have a guide module 430 for slidably supporting the connecting rod 420. The guide module 430 slidably supports the outside of the connecting rod 420, so the connecting rod 420 can move in the locking and unlocking directions without shaking in the width direction.

[0061] The drive unit 500 is a component used to rotate the rotating plate 410 to the locked position or the unlocked position, and may include a motor 510 and a drive gear 520.

[0062] The motor 510 is a component installed in the installation space to generate driving force. It can be mechanically connected to the drive gear 520, which is engaged with the drive shaft of the motor 510 in a horizontally rotatable manner. The drive gear 520 is engaged with the rotating sawtooth part 413 to move the rotating plate 410 to the locked position or the unlocked position.

[0063] Below, refer to Figure 3 and Figure 6 as well as Figure 7 This describes the sealing ring bonding process of a substrate processing apparatus according to an embodiment of the present invention.

[0064] First, when the sealing ring 200 is attached to the upper part of the rotary table 100, as follows: Figure 3 As shown, the fastening pin 120 of the rotary table 100 is inserted into the fastening groove 220 of the sealing ring 200. Then, if the drive shaft 511 of the motor 510 is rotated, the rotational force of the motor 510 drives the gear 520 to rotate in the locking direction, and simultaneously the rotary plate 410 rotates in the locking direction. At this time, the guide hole 411 of the rotary plate 410 moves to the locking position, and simultaneously the guide shaft 422 of the connecting rod 420 slides along the length direction of the guide hole 411. Simultaneously, the connecting rod 420 moves to the locking position, and the driven gear 320, which meshes with the moving serrated portion 421 of the connecting rod 420, rotates in the locking direction. At this time, through the rotation of the driven gear 320, the rotary shaft 310 rotates in the locking direction, and simultaneously the eccentric end of the rod 330 rotates in the locking direction and inserts into the hook groove 210. In this state, the eccentric end of the rod 330 is engaged with the hanging groove 210, so that the sealing ring 200 is not separated from the upper part of the rotary table 100.

[0065] Furthermore, through the engagement of the fastening pin 120 and the fastening groove 220, the sealing ring 200 can be aligned in the correct position, and the supporting force of the fastening pin 120 prevents the sealing ring 200 from wobbling to the side. Moreover, the upper end of the outer sealing gasket 150 is tightly pressed against the lower end of the sealing ring 200, while the upper end of the inner sealing gasket 160 is tightly pressed against the lower surface or inner circumferential surface of the extension 201 formed on the inner circumferential surface of the sealing ring 200. Conversely, when the sealing ring 200 is separated from the upper part of the rotary table 100, the drive shaft 511 of the motor 510 can be rotated in the unlocking direction, driving in the reverse order of the locking sequence described above.

[0066] Finally, the linear motion of the connecting rod 420 linked with the rotational motion of the rotating plate 410 according to an embodiment of the present application enables the plurality of rods 330 to rotate to the locked position or the unlocked position, thereby simultaneously achieving the locking and unlocking of the rods 330, and the coupling and decoupling of the seal ring 200, and the coupling error (distortion, etc.) of the seal ring 200 can be eliminated.

[0067] In addition, the substrate processing apparatus according to an embodiment of the present application couples the inner seal gasket 160 and the outer seal gasket 150, each having elasticity, at the corresponding positions of the rotating table 100 and the seal ring 200, thereby further improving the sealing performance of the seal ring 200 and preventing the permeation of a chemical liquid between the rotating table 100 and the seal ring 200.

[0068] The above has described the specific embodiments of the substrate processing apparatus according to the present application, but it should be understood that various modifications can be made within the scope of the present application. Therefore, the scope of the present application is not limited to the described embodiments, but should be determined based on the claims described below and the contents equivalent thereto. That is, the above-described embodiments are exemplary in all aspects, and should be interpreted as non-limiting, and the scope of the present application is shown by the claims, not by the detailed description, and all modifications or variations derived from the meaning and scope of the claims and the concept equivalent thereto are included in the scope of the present application.

Claims

1. A substrate processing apparatus characterized by comprising: The substrate processing apparatus includes: a rotary table on an upper surface of which a wafer is placed; a ring-shaped seal ring coupled to an upper portion of the rotary table, a plurality of hooking grooves being formed along an inner circumferential surface of the seal ring; a plurality of opening and closing units configured to be linked in a radial direction with a vertical rotation center of the rotary table as a reference, allowing a locking operation to be performed; a power transmission unit provided in a provided space of the rotary table, the power transmission unit causing the opening and closing units to be linked to a locking position or an unlocking position by an external force, the opening and closing unit includes: a rotary shaft configured in a radial direction with the vertical rotation center of the rotary table as a reference, and a lower end of the rotary shaft being coupled to the rotary table in a horizontally rotatable manner; and a lever coupled to an upper end of the rotary shaft in a horizontally rotatable manner, one end of the lever eccentric to one side being hooked to the hooking groove when the lever is rotated to the locking position, and the one end of the lever eccentric to one side being released from the hooking groove when the lever is rotated to the unlocking position, thereby releasing the hooking, the power transmission unit includes: a rotary plate rotatable to a locking direction or an unlocking direction with the vertical rotation center as a reference, a plurality of guide holes being formed in a radial direction and vertically through the rotary plate; and a connecting lever, one end of the connecting lever being coupled to the guide hole in a slidable manner. 2.The substrate processing apparatus according to claim 1, wherein the rotary table includes a placement portion protruding from a side surface of the rotary table to place a lower end of the seal ring, the lower end of the seal ring is placed on the placement portion, and an inner circumferential surface of the seal ring is in close contact with the side surface of the rotary table. 3.The substrate processing apparatus according to claim 2, wherein the opening and closing unit further includes: a driven gear coupled to the lower end of the rotary shaft in a horizontally rotatable manner. 4.The substrate processing apparatus according to claim 3, wherein a lower surface of the lever further includes a tapered surface formed to be inclined upward toward the one end eccentric to one side, and the tapered surface supports a lower surface of the hooking groove in a downward direction when the lever is rotated to the locking position. 5.The substrate processing apparatus according to claim 3, wherein the power transmission unit is mechanically engaged with the driven gear to cause the driven gear to be rotated to the locking position or the unlocking position. 6.The substrate processing apparatus according to claim 5, wherein one end of the connecting lever in a width direction is formed with a moving sawtooth portion to be engaged with the driven gear. 7.The substrate processing apparatus according to claim 6, wherein when the rotary plate is rotated to the locking direction, the connecting lever is slid to an outer side of the rotary plate, thereby causing the driven gear to be rotated to the locking position, and when the rotary plate is rotated to the unlocking direction, the connecting lever is slid to a vertical rotation center direction of the rotary plate, thereby causing the driven gear to be rotated to the unlocking position. 8.The substrate processing apparatus according to claim 6, wherein ​ ​ ​ ​ ​ ​ ​ ​ ​ The guide hole has a long hole shape having an inclined direction toward a vertical rotation center of the rotation plate and a length of an edge, One end of the length direction side of the connecting rod is provided with a guide shaft which is inserted into the inside of the guide hole in a slidable manner.

9. The substrate processing apparatus according to claim 6, wherein Further comprising: An elastic member which is coupled to both ends of the setting space and the rotation plate and applies a pulling force to the locking direction of the rotation plate.

10. The substrate processing apparatus according to claim 2, wherein A plurality of fastening pins are vertically provided on the upper surface of the placement portion of the rotation table, A fastening groove is recessed at the lower end of the seal ring to correspond to the fastening pins being inserted in a concave-convex manner.

11. The substrate processing apparatus according to claim 2, wherein The rotation table further comprises: An annular outer seal pad groove which is continuously formed along the upper surface of the placement portion, and An annular outer seal pad which is correspondingly inserted into the outer seal pad groove, and the upper end of the outer seal pad which protrudes toward the upper portion of the outer seal pad groove is in close contact with the lower end of the seal ring.

12. The substrate processing apparatus according to claim 2, wherein An extension is protruded on the seal ring along the inner circumferential surface of the seal ring, The rotation table further comprises: an annular inner seal pad groove which is continuously formed along the upper surface of the edge side of the rotation table, and an annular inner seal pad which is correspondingly inserted into the inner seal pad groove, and the upper end of the inner seal pad which protrudes toward the upper portion of the inner seal pad groove is in close contact with the lower surface or the inner circumferential surface of the extension.

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