A Radio Frequency Power Supply Output Control Device Implemented by a Reconfigurable Integral Subtraction Circuit

Abstract

The present invention relates to a radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit, comprising: a radio frequency signal amplification module; a first adjustable power supply module connected to the input end of the radio frequency signal amplification module; a subtractor-integrator main body module and a switching control module for controlling the subtractor-integrator main body module to operate in a subtractor state or an integrator state; the switching control module includes a relay, the subtractor-integrator main body module includes an operational amplifier, a switching resistor and an integrator capacitor, and the switching resistor is connected by controlling the relay, and the operational amplifier operates in the subtractor state, otherwise the operational amplifier operates in the integrator state. Compared with the prior art, the present invention realizes the connection or disconnection of the switching resistor through a relay, so as to switch the operational amplifier between the integrator state and the subtractor state, thereby ensuring that the output signal of the operational amplifier meets the requirements, controlling the rising edge time of the output signal, and ensuring that the signal output curve rises smoothly.

Description

Technical Field

[0001] The present invention relates to a radio frequency power supply, and more particularly to a radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit. Background Art

[0002] A radio frequency power supply is a special power supply widely used in the plasma industry. Most of the current radio frequency power supplies on the market have a short working life and require frequent repair and replacement of components. The reason is that when the radio frequency power supply is turned on, there is an overshoot phenomenon, and the instantaneous power is extremely high. At the same time, the matcher fails to work in time, resulting in an excessive instantaneous reflected power. After multiple long-term operations, it is inevitable to cause damage to the radio frequency source. The overshoot phenomenon is essentially due to improper internal control signal processing, and there is an instantaneous large voltage when the power supply is turned on. Currently, this problem is urgently needed to be solved in the radio frequency power supply industry. Summary of the Invention

[0003] The purpose of the present invention is to provide a radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit. By using a relay to switch the access or disconnection of a resistor, the operational amplifier can be switched between the integrator state and the subtractor state, so as to ensure that the output signal of the operational amplifier meets the requirements, control the rising edge time of the output signal, and ensure that the signal output curve rises smoothly.

[0004] The purpose of the present invention can be achieved by the following technical solutions:

[0005] A radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit, comprising:

[0006] A radio frequency signal amplification module;

[0007] A first adjustable power supply module connected to the input end of the radio frequency signal amplification module;

[0008] A subtractor-integrator main module and a switching control module for controlling the subtractor-integrator main module to operate in the subtractor state or the integrator state;

[0009] The switching control module includes a relay. The subtractor-integrator main module includes an operational amplifier, a switching resistor, and an integrator capacitor. The coil of the relay is connected to the radio frequency signal amplification module. The common terminal of the first set of contacts is connected to the non-inverting input terminal of the operational amplifier, the normally closed terminal is grounded, and the normally open terminal is connected to the positive pole of the third power supply. The common terminal of the second set of contacts is connected to the output terminal of the operational amplifier through the switching resistor. The normally closed terminal is connected to the inverting input terminal of the operational amplifier and is connected to the output terminal of the operational amplifier through the integrator capacitor. When the normally closed terminal is conducting, the switching resistor is connected, and the operational amplifier operates in the subtractor state. Otherwise, the operational amplifier operates in the integrator state.

[0010] The switching control module further includes a second triode and a third triode. The emitter of the second triode is connected to the positive pole of the fourth power supply, the base is connected to the output end of the radio frequency signal amplification module, the collector is connected to the base of the third triode, the emitter of the third triode is grounded, and the collector is connected to one end of the coil of the relay. The other end of the coil of the relay is connected to the positive pole of the fifth power supply.

[0011] The switching control module further includes an indicator light. The positive pole of the indicator light is connected to the positive pole of the fifth power supply, and the negative pole is connected to the collector of the third triode.

[0012] The switching control module further includes a thirteenth diode. The positive pole of the thirteenth diode is connected to the collector of the third triode, and the negative pole is connected to the positive pole of the fifth power supply.

[0013] The radio frequency signal amplification module includes a first triode. The base of the first triode is connected to the output end of the operational amplifier, and the collector is connected to the output end of the first adjustable power supply module.

[0014] A protection resistor is provided between the base of the first triode and the output end of the operational amplifier.

[0015] The device further includes a reflection oversize suppression module and a second adjustable power supply module. The second adjustable power supply module is connected to the reflection oversize suppression module, and the reflection oversize suppression module is connected to the operational amplifier.

[0016] The indicator light is a light-emitting diode.

[0017] The voltage of the fourth power supply is 5V.

[0018] The voltage of the third power supply is less than 4V.

[0019] Compared with the prior art, the present invention has the following beneficial effects: The access or disconnection of the switching resistor is realized through the relay, so as to switch the operational amplifier between the integrator state and the subtractor state, so as to ensure that the output signal of the operational amplifier meets the requirements, control the rising edge time of the output signal, and ensure that the signal output curve rises smoothly. Description of the Drawings

[0020] Figure 1 is a schematic structural diagram of the present invention;

[0021] Figure 2 is a schematic circuit principle diagram of an embodiment of the present invention. Detailed Embodiments

[0022] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments. This embodiment is implemented on the premise of the technical solution of the present invention, and the detailed implementation manners and specific operation processes are given, but the protection scope of the present invention is not limited to the following embodiments.

[0023] A radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit, as Figure 1 and Figure 2 shown, includes:

[0024] A radio frequency signal amplification module 3;

[0025] A first adjustable power supply module 1, connected to the input end of the radio frequency signal amplification module 3;

[0026] A subtractor-integrator main body module 5 and a switching control module 6 for controlling the subtractor-integrator main body module 5 to work in a subtractor state or an integrator state;

[0027] The switching control module 6 includes a relay. The subtractor-integrator main body module 5 includes an operational amplifier U5, a switching resistor R82, and an integrator capacitor C20. The coil of the relay is connected to the radio frequency signal amplification module 3. The common end of the first group of contacts is connected to the non-inverting input end of the operational amplifier U5, the normally closed end is grounded, and the normally open end is connected to the positive pole of the third power supply. The common end of the second group of contacts is connected to the output end of the operational amplifier U5 through the switching resistor R82. The normally closed end is connected to the inverting input end of the operational amplifier U5 and is connected to the output end of the operational amplifier U5 through the integrator capacitor C20. When the normally closed end is conducting, the switching resistor R82 is connected in, and the operational amplifier U5 works in the subtractor state. Otherwise, the operational amplifier U5 works in the integrator state.

[0028] The switching control module 6 further includes a second triode Q2 and a third triode Q3. The emitter of the second triode Q2 is connected to the positive pole of the fourth power supply, the base is connected to the output end of the radio frequency signal amplification module 3, the collector is connected to the base of the third triode Q3. The emitter of the third triode Q3 is grounded, and the collector is connected to one end of the coil of the relay. The other end of the coil of the relay is connected to the positive pole of the fifth power supply.

[0029] The switching control module 6 further includes an indicator light LD1. The positive pole of the indicator light LD1 is connected to the positive pole of the fifth power supply, and the negative pole is connected to the collector of the third triode Q3. The indicator light is a light-emitting diode.

[0030] The switching control module 6 further includes a thirteenth diode D13. The positive pole of the thirteenth diode D13 is connected to the collector of the third triode Q3, and the negative pole is connected to the positive pole of the fifth power supply. The fifth power supply is 24V

[0031] The radio frequency signal amplification module 3 includes a first triode Q1. The base of the first triode Q1 is connected to the output terminal of the operational amplifier U5, and the collector is connected to the output terminal of the first adjustable power supply module 1.

[0032] A protection resistor R36 is provided between the base of the first triode Q1 and the output terminal of the operational amplifier U5.

[0033] The device further includes a reflection oversize suppression module 4 and a second adjustable power supply module 2. The second adjustable power supply module 2 is connected to the reflection oversize suppression module 4, and the reflection oversize suppression module 4 is connected to the operational amplifier U5.

[0034] In this embodiment, the voltage of the fourth power supply is 5V, and the voltage of the third power supply is less than 4V, that is Figure 2 the SET_VALUE in

[0035] 1. Under the control of the radio frequency output signal, the SET value is 0 and SET_VALUE respectively in two states, and the resistor R82 changes between the states of being connected to the circuit and not being connected to the circuit. When the radio frequency output switch signal is not given, the relay JQ1 does not work, the SET value is 0, the resistor R82 is connected to the circuit, the FWD value is negative, and the pins 1, 2, and 3 of the operational amplifier form a subtractor. At this time, since the FWD value is a negative number close to 0, the input of the subtractor, that is, the input ui value of the 2nd pin of U5, is very small, so the output of the subtractor, that is, the output u0 value of the 1st pin of U5, is also very small, that is, the base voltage of the triode is also very small, resulting in incomplete conduction of the triode, a lower emitter voltage, a lower VGN signal, and the actual VGN size is about 0.3V. VGN is the radio frequency output control signal, that is, the emitter of Q1. In the above working state, the circuit is used to keep VGN at a lower voltage value to avoid the overshoot phenomenon during the opening power instant.

[0036] 2. When the radio frequency output switch signal is given, the relay JQ1 works, the SET value is SET_VALUE, the FWD value is the voltage value processed from the power signal sampled by the sampling circuit, the resistor R82 is not connected to the circuit, and the pins 1, 2, and 3 of the operational amplifier form an integrator. The value of ui is the potential difference at the junction of SET and R30, R31, and R33. Under the action of the integrator, the u0 value shows a gradually rising curve, so that the VGN radio frequency output control signal gradually rises, reducing the impact on the device.

[0037] 3. When the radio frequency power supply enters the state of no power output from the power output, VGN gradually drops to about 0.3V under this action. The VGN radio frequency output control signal gradually rises and then gradually drops in the above state. Therefore, it is necessary to control the rising and falling time of VGN, mainly by adjusting the size of the integrator circuit C20, changing the time constant, and controlling the rising and falling time.

[0038] 4. Meanwhile, two adjustable regulated DC power supplies are used to limit the collector voltage of the triode Q1 and the supply voltage of the operational amplifier, so as to control the maximum output voltage of the triode Q1 and reduce the maximum overshoot.

Claims

1. A radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit, characterized in that Comprising: A radio frequency signal amplification module (3); A first adjustable power supply module (1), connected to the input end of the radio frequency signal amplification module (3); A subtractor-integrator main body module (5) and a switching control module (6) for controlling the subtractor-integrator main body module (5) to operate in a subtractor state or an integrator state; The switching control module (6) includes a relay. The subtractor-integrator main body module (5) includes an operational amplifier (U5), a switching resistor (R82), and an integrator capacitor (C20). The coil of the relay is connected to the radio frequency signal amplification module (3). The common terminal of the first set of contacts is connected to the non-inverting input terminal of the operational amplifier (U5), the normally closed terminal is grounded, and the normally open terminal is connected to the positive pole of the third power supply. The common terminal of the second set of contacts is connected to the output terminal of the operational amplifier (U5) through the switching resistor (R82), the normally closed terminal is connected to the inverting input terminal of the operational amplifier (U5), and is connected to the output terminal of the operational amplifier (U5) through the integrator capacitor (C20). When the normally closed terminal is conducting, the switching resistor (R82) is connected in, and the operational amplifier (U5) operates in a subtractor state. Otherwise, the operational amplifier (U5) operates in an integrator state; The switching control module (6) further includes a second triode (Q2) and a third triode (Q3). The emitter of the second triode (Q2) is connected to the positive pole of the fourth power supply, the base is connected to the output terminal of the radio frequency signal amplification module (3), and the collector is connected to the base of the third triode (Q3). The emitter of the third triode (Q3) is grounded, and the collector is connected to one end of the coil of the relay. The other end of the coil of the relay is connected to the positive pole of the fifth power supply; The radio frequency signal amplification module (3) includes a first triode (Q1). The base of the first triode (Q1) is connected to the output terminal of the operational amplifier (U5), and the collector is connected to the output terminal of the first adjustable power supply module (1).

2. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 1, characterized in that The switching control module (6) further includes an indicator light (LD1). The positive pole of the indicator light (LD1) is connected to the positive pole of the fifth power supply, and the negative pole is connected to the collector of the third triode (Q3).

3. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 2, wherein, The switching control module (6) further includes a thirteenth diode (D13). The positive pole of the thirteenth diode (D13) is connected to the collector of the third triode (Q3), and the negative pole is connected to the positive pole of the fifth power supply.

4. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 1, characterized in that, A protection resistor (R36) is provided between the base of the first triode (Q1) and the output terminal of the operational amplifier (U5).

5. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 1, characterized in that The device further includes a reflection oversize suppression module (4) and a second adjustable power supply module (2). The second adjustable power supply module (2) is connected to the reflection oversize suppression module (4), and the reflection oversize suppression module (4) is connected to the operational amplifier (U5).

6. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 2, wherein The indicator light is a light-emitting diode.

7. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 1, characterized in that The voltage of the fourth power supply is 5V.

8. The radio frequency power supply output control device implemented by a reconfigurable integration subtraction circuit according to claim 1, wherein The voltage of the third power supply is less than 4V.

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