Frictionless ultra-clean magnetic suspension valve

Abstract

The present invention discloses a frictionless ultra-clean magnetic suspension valve. The valve seat and the valve cover form an ultra-clean flow chamber, and the ultra-clean flow chamber has an inlet and outlet flow channels; the magnetic suspension valve core is in the ultra-clean flow chamber; the actuating assembly is installed outside the valve cover, and the actuating assembly is embedded with an external permanent magnet layered magnetic group, and the external permanent magnet layered magnetic group is driven by the actuating assembly to move up and down along the ultra-clean flow chamber, and then the magnetic suspension valve core in the ultra-clean flow chamber is driven by magnetism to move up and down along the ultra-clean flow chamber and then approach or move away from the outlet of the inlet flow channel at the valve seat to achieve valve control. The present invention avoids the dynamic sealing structure required for the valve stem to push the valve core, eliminates the risk of external leakage, and improves the overall life of the valve. The valve core can be adjusted while realizing passive magnetic suspension of the valve core, avoiding the valve core from hitting the wall and reducing particle shedding pollution.

Description

Technical Field

[0001] The invention relates to a magnetic suspension valve in the technical field of valves, and in particular to a frictionless ultra-clean magnetic suspension valve suitable for ultra-clean occasions. Background Art

[0002] Semiconductors, biomedicine, electronic-grade chemicals and other fields are very sensitive to pollutants such as particulate matter, and very high cleanliness requirements are placed on the liquids or gases required for the production process. Materials or processes that meet certain cleanliness standards are called ultra-clean materials or ultra-clean processes. In the field where ultra-clean fluids or corrosive fluids are required for transmission and control, valves must be required to strictly prevent the internal medium from communicating with the outside world, be safe, reliable and corrosion-resistant, and at the same time, no wear and particulate matter should be generated during the opening and closing process of the valve itself. Traditional valves are usually equipped with external control parts such as valve stems, which makes it difficult to eliminate dynamic sealing points in principle. In the long-term and multiple opening and closing processes, external leakage is prone to occur, and even the internal medium is connected to the outside world. The safety hazards caused by external leakage and the contamination of the conveyed fluid are very costly. In addition, traditional valves (such as ball valves, gate valves, and butterfly valves) generally have sliding seal pairs. These components will produce wear and particle shedding during the long-term sealing action, resulting in medium contamination and poor sealing.

[0003] In this regard, the general measure taken by the industry is to use elastic flexible elements as seals to completely isolate the outer valve stem and other driving devices from the flow channel, such as the diaphragm valve (see patents WO2007089689A2, CN101365904A, CN1836124A, US20030722168 for details) and bellows valves widely used in the industry. However, in these examples, because ultra-clean requirements must be met, the elastic action elements often need to be made of ultra-clean fluorine-containing plastics. However, the mechanical properties, especially fatigue stress properties, of elastic film parts made of these materials are poor, and their lifespan is much lower than that of common actuators such as springs. They are prone to rupture and perforation during long-term operation, which seriously restricts the lifespan of the entire valve and increases the risk of rupture.

[0004] The Chinese invention with application number CN201911054740.2 provides a permanent magnet embedded ultra-clean valve, which embeds a permanent magnet encapsulated in an ultra-clean material shell into the flow chamber, and the elements that control opening and closing (such as external electromagnets and external permanent magnets) are placed outside the flow chamber. The magnetic force acts on the permanent magnet valve core remotely and non-contactly to realize the opening and closing control of the valve, eliminating the dynamic sealing points of traditional valves due to the setting of control elements such as valve stems. Under the premise of ensuring ultra-cleanliness and corrosion resistance, the possibility of external leakage is fundamentally eliminated; compared with existing diaphragm valves and bellows valves, it solves the problems of short life of elastic diaphragms and weak protection after rupture, and greatly improves the service life and safety performance of ultra-clean valves. However, the invention still has disadvantages: its embedded magnet is of a single form and can only be used as a switch valve, and it is difficult to accurately control the position of the valve core to realize the flow regulation function.

[0005] The Chinese invention with application number CN202011163914.1 provides an ultra-clean proportional valve, which uses the principle of minimum magnetic resistance to open and close the valve port, and can achieve precise control of the valve port position; however, since its magnetic circuit relies on suction to drive the valve core to move, the valve core is in radial contact with the wall, which causes a small amount of friction between the wall and the valve core, increasing particle shedding and damaging the ultra-clean characteristics of the medium. Summary of the invention

[0006] In order to overcome the deficiencies of the above-mentioned prior art, the present invention provides a frictionless ultra-clean magnetic levitation valve. By spatially stratifying the magnetic levitation valve core and the magnetic group in the external drive assembly, the magnetic levitation valve core can achieve radial passive suspension to avoid the valve core from colliding with the inner wall of the flow chamber, and can rely on magnetic force to achieve non-contact control of the valve core movement, control the opening and closing of the valve port and the opening degree, thereby realizing the flow regulation function without friction.

[0007] The technical solution adopted by the present invention is:

[0008] The present invention comprises a valve seat and a valve cover, wherein the valve cover is mounted on the valve seat, and further comprises a magnetic suspension valve core and an actuating assembly; the valve seat and the valve cover are tightly assembled and enclosed internally to form an ultra-clean flow chamber, wherein the ultra-clean flow chamber has an inlet flow channel and an outlet flow channel connected to an external environment; the magnetic suspension valve core is located in the ultra-clean flow chamber; the actuating assembly is mounted outside the valve cover, and an external permanent magnet layered magnetic group is embedded in the actuating assembly, and the external permanent magnet layered magnetic group is driven by the actuating assembly to move up and down along the axial direction of the ultra-clean flow chamber, thereby magnetically driving the magnetic suspension valve core in the ultra-clean flow chamber to move up and down along the axial direction of the ultra-clean flow chamber and then approaching or moving away from the outlet of the inlet flow channel at the valve seat, thereby realizing valve control.

[0009] The actuating assembly is arranged as a whole on the outer wall of the valve cover. The actuating assembly includes an external permanent magnet layered magnetic group, a pitch adjusting hand wheel and a connecting clamp arranged in a spatial layered manner. The pitch adjusting hand wheel is threadedly mounted on the threaded shaft at the upper end of the valve cover. A connecting clamp is mounted on the outer surface of the valve cover below the pitch adjusting hand wheel. An annular cavity is provided between the bottom of the connecting clamp and the valve cover, and the external permanent magnet layered magnetic group is installed in the annular cavity.

[0010] The upper end of the connecting clamp is provided with an annular groove and an annular protrusion, and the lower end of the distance adjusting hand wheel is also provided with an annular groove and an annular protrusion. The annular protrusion of the distance adjusting hand wheel is embedded in the annular groove of the connecting clamp, and the annular protrusion of the connecting clamp is embedded in the annular groove of the distance adjusting hand wheel, so that the connecting clamp and the distance adjusting hand wheel form an axial fixed connection relationship with each other.

[0011] The magnetic suspension valve core comprises an annular body, a block body, an embedded space layered magnetic group and a connecting arm; the annular body is located above the block body, an annular cavity is provided in the annular body, an embedded space layered magnetic group is embedded in the annular cavity, a flow hole is provided in the annular body, a gap in the up and down directions is provided between the annular body and the block body, the annular body and the block body are tightly connected by a plurality of connecting arms arranged at intervals along the circumferential direction around them, the interior of the annular body is arranged as a hollow structure with an annular cavity, and the interior of the block body is solid;

[0012] The top surface of the valve seat is provided with a convex surface as a sealing boss at the outlet end of the inlet flow channel, and the bottom surface of the magnetic suspension valve core is provided with a concave surface as an annular sealing surface. The sealing boss and the annular sealing surface are correspondingly embedded in line.

[0013] The embedded spatial layered magnetic component is divided into an upper layer inner magnet, a middle layer inner connection block and a lower layer inner magnet arranged in sequence from the upper layer to the lower layer, and the middle layer inner connection block is located between the upper layer inner magnet and the lower layer inner magnet; the external permanent magnet layered magnetic component is divided into an upper layer outer magnet, a middle layer outer connection block and a lower layer outer magnet arranged in sequence from the upper layer to the lower layer, and the middle layer outer connection block is located between the upper layer outer magnet and the lower layer outer magnet;

[0014] The upper inner magnet and the upper outer magnet are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite; the lower inner magnet and the lower outer magnet are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite; the upper inner magnet and the lower inner magnet have the same magnetization direction, and the upper outer magnet and the lower outer magnet have the same magnetization direction.

[0015] When the embedded spatial layered magnetic group is magnetically adsorbed by the external permanent magnet layered magnetic group through repulsive force, the installation position of the upper inner magnet of the embedded spatial layered magnetic group is lower than the upper inner magnet of the external permanent magnet layered magnetic group, and at the same time, the installation position of the lower inner magnet of the embedded spatial layered magnetic group is higher than the lower inner magnet of the external permanent magnet layered magnetic group.

[0016] The embedded spatial layered magnetic components are an upper inner magnet located at the top layer, a lower inner magnet located at the bottom layer, and at least one layer of magnetic ring located between the upper inner magnet and the lower inner magnet; the external permanent magnet layered magnetic components are an upper outer magnet located at the top layer, a lower outer magnet located at the bottom layer, and at least one middle layer of Halbach annular array located between the upper outer magnet and the lower outer magnet;

[0017] The upper inner magnet and the upper outer magnet are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite; the lower inner magnet and the lower outer magnet are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite; the upper inner magnet and the lower inner magnet have the same magnetization direction, and the upper outer magnet and the lower outer magnet have the same magnetization direction; the magnetic ring is magnetized in a single direction along the radial diameter, and the middle-layer Halbach ring array is magnetized in a single direction along the radial diameter as a whole, and the magnetic ring and the middle-layer Halbach ring array have the same magnetization direction as a whole.

[0018] Two channels connecting the outside and the ultra-clean flow chamber are provided in the bottom end of the valve seat as an inlet flow channel and an outlet flow channel respectively. The fluid enters the ultra-clean flow chamber through the inlet flow channel and is discharged from the ultra-clean flow chamber through the outlet flow channel.

[0019] The embedded spatial layered magnetic group and the external permanent magnet layered magnetic group of the present invention include at least two layers of permanent magnets in the vertical direction of valve installation. The uppermost and lowermost inner magnets of the embedded spatial layered magnetic group and the external permanent magnet layered magnetic group are radially magnetized. The embedded magnets and the external magnets are magnetized relative to each other so that the same-name magnetic poles near the end of the same layer produce repulsive force, thereby realizing passive suspension of the valve core in the radial direction.

[0020] The valve core has an axial position adjustment function. The valve core positioning and opening adjustment can be achieved by using a two-layer external permanent magnet layered magnetic group to clamp the embedded space layered magnetic group by repulsion. The valve core axial adjustment can also be achieved by using a three-layer or more magnetic array with a suction drag layer set in the middle layer.

[0021] The spatially layered embedded spatial layered magnetic group and the external permanent magnet layered magnetic group can be formed by pressing, bonding or fixing multiple permanent magnet clamps with different magnetizing directions, or by magnetizing a large permanent magnet in different regions to obtain a layered spatial structure.

[0022] The valve cover, valve seat, annular body, block body and connecting arm of the magnetic suspension valve core are all made of ultra-clean materials.

[0023] In order to ensure the ultra-clean characteristics, the embedded spatially layered magnetic group arranged in spatial layers is embedded with ultra-clean materials during the injection molding process, or is coated or wrapped with ultra-clean materials to form an ultra-clean magnetic suspension valve core.

[0024] The ultra-clean material is a fluorine-containing plastic, including perfluoroalkoxy, polytetrafluoroethylene or polyvinylidene fluoride, or any combination thereof.

[0025] The ultra-clean differential solenoid valve is used for ultra-clean fluid transmission and control in the fields of semiconductors, biomedicine, electronic-grade chemicals, etc.

[0026] The arrangement of the magnetic layer structure of the present invention can make the magnetic suspension valve core 22 better suspended in the ultra-clean flow chamber, and a certain gap is maintained between the outer peripheral surface of the magnetic suspension valve core 22 and the inner wall of the ultra-clean flow chamber, without contact and friction.

[0027] The present invention drags the external permanent magnet layered magnetic group by a pitch-adjusting hand wheel to change the relative position of the embedded space layered magnetic group and the external permanent magnet layered magnetic group, thereby realizing non-contact control of the valve core movement, ensuring the ultra-clean characteristics of the fluid medium, and realizing the opening and closing and opening control of the valve port.

[0028] The ultra-clean magnetic suspension valve of the present invention can be used for ultra-clean fluid transmission and control in the fields of semiconductors, biomedicine, electronic-grade chemical industry, etc.

[0029] The beneficial effects of the present invention are:

[0030] The valve utilizes ultra-clean materials to layer-wrap a permanent magnet group to form a layered permanent magnet embedded magnetic suspension valve core. Through the layering of the magnetic group, the magnetic suspension valve core can achieve radial passive suspension to avoid the valve core from hitting the inner wall of the flow chamber, and can also rely on magnetic force to achieve non-contact control of the valve core movement to control the opening and closing and opening degree of the valve port.

[0031] Compared with traditional valves, the present invention avoids the dynamic sealing structure required for the valve stem to push the valve core, eliminating the risk of external leakage. Compared with the existing mainstream ultra-clean valves, no diaphragms and other vulnerable parts are required, greatly improving the overall life of the valve. Compared with the existing ultra-clean magnetic drive proportional valve, the passive magnetic suspension of the valve core can be achieved while adjusting the opening, avoiding the valve core hitting the wall, reducing the particle shedding pollution caused by the friction pair, and better meeting the ultra-clean requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a schematic diagram of the structure of Embodiment I of the present invention;

[0033] Figure 2 Schematic diagram of a magnetic suspension valve core according to an embodiment of the present invention; (a) is a stereoscopic diagram of the magnetic suspension valve core, and (b) is a cross-sectional diagram of the magnetic suspension valve core;

[0034] Figure 3 This is a schematic diagram of the appearance of Embodiment I of the present invention;

[0035] Figure 4 It is a structural schematic diagram of Embodiment II of the present invention;

[0036] Figure 5 Schematic diagram of the Halbach array used in the middle layer of Example II of the present invention and its internal magnetic field.

[0037] In the figure: inlet flow channel 1, valve seat 2, threaded sealing surface 3, valve cover 4, lower layer external magnet 5, middle layer external connecting block 6, upper layer external magnet 7, external permanent magnet layered magnetic group 8, connecting clamp 9, annular protrusion 10, pitch adjustment hand wheel 11, thread 12, shaft 13, ultra-clean wall layer 14, flow hole 15, upper layer internal magnet 16, middle layer internal connecting block 17, lower layer internal magnet 18, embedded space layered magnetic group 19, connecting arm 20, annular sealing surface 21, magnetic suspension valve core 22, sealing boss 23, outlet flow channel 24, lower layer external magnet 25, middle layer Halbach annular array 26, upper layer external magnet 27, external permanent magnet layered magnetic group 28, upper layer internal magnet 29, magnetic ring 30, lower layer internal magnet 31, embedded space layered magnetic group 32. DETAILED DESCRIPTION

[0038] The present invention is further described below in conjunction with the accompanying drawings and implementation modes.

[0039] Embodiments of the present invention are as follows:

[0040] Example I

[0041] like Figure 1 and Figure 3 As shown, a valve structure includes a valve seat 2, a valve cover 4, a magnetic suspension valve core 22 and an actuating assembly; the valve cover 4 is cylindrical, and the valve cover 4 is installed on the valve seat 2. The valve seat 2 and the valve cover 4 are tightly assembled and enclosed to form an ultra-clean flow chamber. The valve seat 2 and the valve cover 4 are connected by a threaded sealing surface 3. The ultra-clean flow chamber has an inlet flow channel 1 and an outlet flow channel 24 connected to the external environment; two channels connecting the outside and the ultra-clean flow chamber are opened in the bottom end of the valve seat 9 as the inlet flow channel 1 and the outlet flow channel 24 respectively, and the fluid enters the ultra-clean flow chamber through the inlet flow channel 1 and is discharged from the ultra-clean flow chamber through the outlet flow channel 24. The valve seat 2 and the valve cover 4 are threadedly connected by sealing surfaces at 3 locations, and the two enclose an internal flow chamber; the magnetic suspension valve core 22 is located in the ultra-clean flow chamber.

[0042] The actuating assembly is arranged as a whole on the outer wall of the valve cover 4. The actuating assembly is a displacement device. The actuating assembly includes an external permanent magnet layered magnetic group 8, a pitch adjustment hand wheel 11 and a connecting clamp 9 arranged in a spatial layered manner. The pitch adjustment hand wheel 11 is sleeved on the threaded shaft 13 at the upper end of the valve cover 4 through a thread 12. The upper end of the valve cover 4 has a shaft 13 with a thread 12. The pitch adjustment hand wheel 11 is screwed on the shaft 13 and can move up and down. The valve cover 4 below the pitch adjustment hand wheel 11 is sleeved with a connecting clamp 9. An annular cavity is provided between the bottom of the connecting clamp 9 and the valve cover 4, and the external permanent magnet layered magnetic group 8 is installed in the annular cavity. The external permanent magnet layered magnetic group 8 and the magnetic suspension valve core 22 are arranged in a relatively coordinated manner.

[0043] An annular groove and an annular protrusion 10 are provided at the upper end of the connecting clamp 9, and an annular groove and an annular protrusion are also provided at the lower end of the distance adjusting hand wheel 11. The annular grooves and annular protrusions 10 of the connecting clamp 9 and the distance adjusting hand wheel 11 are alternately embedded, the annular protrusion of the distance adjusting hand wheel 11 is embedded in the annular groove of the connecting clamp 9, and the annular protrusion of the connecting clamp 9 is embedded in the annular groove of the distance adjusting hand wheel 11, so that the connecting clamp 9 and the distance adjusting hand wheel 11 form an axial fixed relationship with each other.

[0044] like Figure 2 As shown, the magnetic suspension valve core 22 includes an annular body, a block body, an embedded spatial layered magnetic group 19 and a connecting arm 20; the annular body is located above the block body, and a closed annular cavity is provided in the annular body, and the embedded spatial layered magnetic group 19 is embedded in the annular cavity. The annular body outside the embedded spatial layered magnetic group 19 forms an ultra-clean wall layer 14 for the embedded permanent magnet 11, and the embedded spatial layered magnetic group 19 is embedded in the ultra-clean wall layer 14 by injection molding, that is, to ensure that the permanent magnet does not contact the conveying medium, the annular body is provided with a flow hole 15, and there is a gap in the up and down directions between the annular body and the block body. The annular body and the block body are tightly connected by a plurality of connecting arms 20 arranged circumferentially at intervals around them, and the connecting arm 20 is L-shaped, the interior of the annular body is arranged as a hollow structure with an annular cavity, and the interior of the block body is solid; the annular body and the block body are both made of non-magnetic conductive materials.

[0045] The top surface of the valve seat 2 is provided with a raised surface as a sealing boss 23 at the outlet end of the inlet flow channel 1, and the block bottom surface of the magnetic suspension valve core 22 is provided with an inner concave surface as an annular sealing surface 21, and the sealing boss 23 and the annular sealing surface 21 are correspondingly embedded in phase; the annular sealing surface 21 can be tightly fitted with the sealing boss 23 and block the flow channel, and when the sealing boss 23 is embedded in the annular sealing surface 21, the magnetic suspension valve core 22 is sealed and installed on the valve seat 9 to block the inlet flow channel 1. In this way, the front end of the magnetic suspension valve core has an annular sealing surface, which can be tightly matched with the boss surface of the valve seat to block the fluid.

[0046] By rotating the distance adjusting hand wheel 11, the connecting clamp 9 is driven to move up and down axially relative to the valve cover 4, thereby driving the external permanent magnet layered magnetic group 8 in the annular cavity of the valve cover 4 to move up and down, thereby changing the relative position of the embedded space layered magnetic group 19 of the magnetic suspension valve core 22 and the external permanent magnet layered magnetic group 8.

[0047] Therefore, the position of the magnetic suspension valve core 22 is changed by the actuating component, the distance between the magnetic suspension valve core 22 and the sealing boss 23 on the valve seat 2 is adjusted, or the annular sealing surface 21 and the sealing boss 23 on the valve seat 2 are closed to block the outlet flow channel 24, thereby realizing the flow regulation and opening and closing control functions of the valve.

[0048] like Figure 1 and Figure 2As shown, the spatially layered embedded spatial layered magnetic group 19 is divided into an upper layer inner magnet 16, a middle layer inner connection block 17 and a lower layer inner magnet 18 arranged in sequence from the upper layer to the lower layer, and the middle layer inner connection block 17 is located between the upper layer inner magnet 16 and the lower layer inner magnet 18; correspondingly, the spatially layered external permanent magnet layered magnetic group 8 is divided into an upper layer outer magnet 7, a middle layer outer connection block 6 and a lower layer outer magnet 5 arranged in sequence from the upper layer to the lower layer, and the middle layer outer connection block 6 is located between the upper layer outer magnet 7 and the lower layer outer magnet 5;

[0049] The upper inner magnet 16 and the upper outer magnet 7 are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite. Specifically, if the upper inner magnet 16 has an inner circle with an N pole and an outer circle with an S pole, then the upper outer magnet 7 has an outer circle with an N pole and an inner circle with an S pole. The lower inner magnet 18 and the lower outer magnet 5 are magnetized radially from inside to outside or from outside to inside, and the magnetization directions are opposite. Specifically, if the lower inner magnet 18 has an inner circle with an N pole and an outer circle with an S pole, then the lower outer magnet 5 has an outer circle with an N pole and an inner circle with an S pole. The upper inner magnet 16 and the lower inner magnet 18 have the same magnetization directions, and the upper outer magnet 7 and the lower outer magnet 5 have the same magnetization directions. In this way, a magnetic adsorption with a repulsive force is formed between the embedded space layered magnetic group 19 and the external permanent magnet layered magnetic group 8.

[0050] The middle layer outer connection block 6 and the middle layer inner connection block 17 are both made of non-magnetic conductive materials, and the relationship between the thickness of the middle layer outer connection block 6 and the thickness of the middle layer inner connection block 17 is: the thickness of the middle layer inner connection block 17 is less than the thickness of the middle layer outer connection block 6, ensuring that the overall thickness of the embedded space layered magnetic group 19 is less than the overall thickness of the external permanent magnet layered magnetic group 8. In this way, the embedded space layered magnetic group 19 can be repelled and stabilized in the middle of the magnetic field applied by the external permanent magnet layered magnetic group 8.

[0051] When the embedded space layered magnetic group 19 is magnetically adsorbed by the external permanent magnet layered magnetic group 8 through repulsion, the installation position of the upper inner magnet 16 of the embedded space layered magnetic group 19 is lower than the upper inner magnet 7 of the external permanent magnet layered magnetic group 8. At the same time, the installation position of the lower inner magnet 18 of the embedded space layered magnetic group 19 is higher than the lower inner magnet 5 of the external permanent magnet layered magnetic group 8, that is, the magnetic levitation valve core 22 is subjected to the clamping force of the external permanent magnet layered magnetic group 8 in the axial direction.

[0052] The area determined by the central axes of the upper and lower layers of the inner magnets of the magnetic levitation valve core 22 is area (b) in the figure, and the area determined by the central axes of the upper and lower layers of the inner magnets of the external magnetic array 8 is area (a) in the figure. The range in which the valve core works well is area (b) and cannot exceed area (a). At this time, the magnetic levitation valve core 22 is subjected to the stable clamping force of the external permanent magnet layered magnetic group 8. By rotating the distance adjustment hand wheel 11, the connecting clamp 9 is driven up and down, and the external permanent magnet layered magnetic group 8 is dragged to adjust the position of the magnetic levitation valve core 22, thereby realizing non-contact control of the valve core movement and completing the valve opening and closing and opening adjustment functions.

[0053] like Figure 2 The magnetic suspension valve core 22 includes an ultra-clean material wall 14, a flow hole 15 for renewing the fluid and balancing the pressure difference on both sides, an embedded permanent magnetic array 19 divided into three layers of upper, middle and lower, an ultra-clean material connecting arm 20 distributed along the circumference, and a sealing boss 21.

[0054] Preferably, the flow hole 15 is opened in the center of the valve core, which can reduce the air gap between the magnetic poles and improve the mechanical efficiency of the magnet; the number of ultra-clean material connecting arms 20 is preferably three arranged along the circumference at 120°; the sealing boss 21 is a conical ring, which can fit tightly with the sealing boss 23 on the valve seat 2, and the seal is reliable.

[0055] In this way, the inner and outer magnets of the same layer are magnetized in a relative radial direction, so that the outer layer of the inner ring and the inner layer of the outer ring have the same magnetic poles, such as Figure 1 and Figure 4 As shown in the figure, the arrow points to the N pole of the permanent magnet, and the end is the S pole. The magnetization directions of the inner and outer rings can be interchanged, and the same-name magnetic poles near the inner and outer layers of the upper and lower layers respectively generate repulsive forces to achieve passive suspension of the valve core in the radial direction, reduce the contact between the magnetic suspension valve core 22 and the inner wall of the valve cover 4, thereby reducing friction and particle shedding, and ensuring the ultra-clean characteristics of the medium.

[0056] In order to meet the needs of high-cleanliness occasions, the wall surface in contact with the fluid in the ultra-clean magnetic levitation valve is made of ultra-clean material. The embedded spatially layered magnetic group 19 arranged in a spatially layered manner is embedded with ultra-clean material during the injection molding process, or is coated or wrapped with ultra-clean material to form an ultra-clean magnetic levitation valve core 22. Optional ultra-clean materials include but are not limited to fluorine-containing plastics such as perfluoroalkoxy (PFA), polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PVDF) or any combination thereof.

[0057] The embedded spatial layered magnetic group 19 and the external permanent magnet layered magnetic group 8 arranged in spatial layers can be formed by pressing, bonding or fixing multiple permanent magnet clamps with different magnetizing directions, or by magnetizing a large permanent magnet in different regions to obtain a layered spatial structure.

[0058] Furthermore, the pitch adjustment hand wheel and the motor of the present invention constitute an external magnetic group traction device, but the external magnetic group traction device includes but is not limited to the pitch adjustment hand wheel 11, and an electric device such as a motor or a hydraulic device can also be used to axially move the external permanent magnet layered magnetic group 8.

[0059] Example II

[0060] like Figure 4 As shown, the spatially layered embedded spatial layered magnetic group 32 is divided into an upper inner magnet 29 located at the top, a lower inner magnet 31 located at the bottom, and at least one layer of magnetic ring 30 located between the upper inner magnet 29 and the lower inner magnet 31. If there are multiple magnetic rings 30, the multiple magnetic rings 30 are stacked up and down, and the upper inner magnet 29, the lower inner magnet 31 and the magnetic ring 30 are all closely arranged; correspondingly, the spatially layered external permanent magnet layered magnetic group 28 is divided into an upper outer magnet 27 located at the top, The lower outer magnet 25 at the bottom layer and at least one middle Halbach ring array 26 between the upper outer magnet 27 and the lower outer magnet 25. If there are multiple middle Halbach ring arrays 26, the multiple middle Halbach ring arrays 26 are stacked up and down, and the upper outer magnet 27, the lower outer magnet 25 and the middle Halbach ring array 26 are all closely arranged; the number of the middle Halbach ring arrays 26 is the same as the number of the magnetic rings 30 and corresponds one to one.

[0061] The upper inner magnet 29 and the upper outer magnet 27 are both magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite. Specifically, if the upper inner magnet 29 has an inner circle with an N pole and an outer circle with an S pole, then the upper outer magnet 27 has an outer circle with an N pole and an inner circle with an S pole. The lower inner magnet 31 and the lower outer magnet 25 are both magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite. Specifically, if the lower inner magnet 31 has an inner circle with an N pole and an outer circle with an S pole, then the lower outer magnet 25 has an outer circle with an N pole and an inner circle with an S pole. The upper inner magnet 29 and the lower inner magnet 31 have the same magnetization direction, and the upper outer magnet 27 and the lower outer magnet 25 have the same magnetization direction. The magnetic ring 30 is magnetized in a single radial direction along the diameter, and the middle Halbach ring array 26 is magnetized in a single radial direction along the diameter, and the magnetic ring 30 and the middle Halbach ring array 26 have the same magnetization direction as a whole. This allows the embedded spatial layered magnetic group 32 and the external permanent magnet layered magnetic group 28 to form a repulsive magnetic adsorption between the top and bottom layers, but an attractive magnetic adsorption between the middle layers, thereby expanding the movable working range of the magnetic suspension valve core 22 in the ultra-clean flow chamber.

[0062] like Figure 5As shown, the middle-layer Halbach annular array 26 is divided into a plurality of arc-shaped magnetic blocks arranged in sequence in an annular circle. The magnetization directions of the plurality of arc-shaped magnetic blocks are different. They are arranged in a certain regularity but the magnetization of the arc-shaped magnetic blocks on both sides of the middle-layer Halbach annular array 26 is symmetrical, and the middle-layer Halbach annular array 26 as a whole is magnetized in a single direction along the radial diameter.

[0063] In this way, relative radial magnetization is adopted between the inner and outer magnets of the same layer of the upper and lower layers, so that the outer layer of the inner ring and the inner layer of the outer ring are the same poles, as shown in the figure, the arrow in the figure points to the N pole of the permanent magnet, and the end is the S pole, and the magnetization directions of the inner and outer rings can be interchanged. The same poles of the inner and outer layers near the ends of the upper and lower layers respectively generate repulsive forces, thereby realizing passive suspension of the valve core in the radial direction, avoiding contact and friction between the magnetic suspension valve core 22 and the inner wall of the valve cover 4.

[0064] In the axial direction, the positioning of the magnetic suspension valve core 22 and the control of the valve opening no longer rely on the clamping force of the upper and lower magnetic rings, but the valve core is positioned and the opening is controlled by the suction force of the middle Halbach annular array 26 and the middle magnetic ring 30 magnetized along the diameter direction. Figure 5 As shown, the axial view of the Halbach annular array 26 in the middle layer of the outer magnetic group is a group of annular permanent magnet arrays with different magnetization directions. When combined according to the magnetization form shown by the arrow, the magnetic field distribution of the inner annular surface of the array is as follows: Figure 5 , which attracts the magnetic ring 30 magnetized in the diameter direction of the middle layer. When the pitch adjustment hand wheel 11 is rotated to drag the external permanent magnet layered magnetic group 28, and the relative position of the embedded space layered magnetic group 32 and the external permanent magnet layered magnetic group 28 is changed, the magnetic suspension valve core is subjected to axial force and moves, realizing the valve core position adjustment and flow adjustment functions. At this time, the design of the valve core working section does not need to be limited by the interval (a) (b) in Example I. The upper end surface of the magnetic suspension valve core 22 can be flush with or slightly lower than the upper end surface of the uppermost magnetic ring 27 of the external magnetic group.

[0065] The spatially layered embedded spatial layered magnetic group 32, the external permanent magnet layered magnetic group 28 and the outer magnetic group middle layer Halbach ring array 26 can be formed by pressing, bonding or fixing multiple permanent magnet clamps with different magnetizing directions, or by magnetizing a large permanent magnet in different areas to obtain a layered spatial structure.

[0066] In the description of the positional relationship of the present invention, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate orientation or positional relationship are based on the orientation or positional relationship shown in the drawings and are only for the convenience of describing the embodiments and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0067] The above content and structure describe the basic principle, main features and advantages of the product of the present invention, which should be understood by those skilled in the art. The above examples and descriptions are only for explaining the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention may have various changes and improvements, which are within the scope of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A frictionless ultra-clean magnetic suspension valve, comprising a valve seat (2) and a valve cover (4), wherein the valve cover (4) is mounted on the valve seat (2), and is characterized in that: It comprises a magnetic suspension valve core (22) and an actuating assembly; a valve seat (2) and a valve cover (4) are tightly assembled and enclosed internally to form an ultra-clean flow chamber, the ultra-clean flow chamber having an inlet flow channel (1) and an outlet flow channel (24) that are connected to the external environment; the magnetic suspension valve core (22) is located in the ultra-clean flow chamber; The actuating assembly is mounted outside the valve cover (4), and an external permanent magnet layered magnetic group (8 / 28) is embedded in the actuating assembly. The actuating assembly drives the external permanent magnet layered magnetic group (8 / 28) to move up and down along the ultra-clean flow chamber, thereby magnetically driving the magnetic suspension valve core (22) in the ultra-clean flow chamber to move up and down along the ultra-clean flow chamber and approach or move away from the outlet of the inlet flow channel (1) at the valve seat (2), thereby realizing valve control; The actuating assembly is integrally arranged on the outer wall of the valve cover (4), and comprises an external permanent magnet layered magnetic group (8 / 28) arranged in spatial layers, a pitch adjusting hand wheel (11) and a connecting clamp (9), wherein the pitch adjusting hand wheel (11) is sleeved on a threaded shaft (13) at the upper end of the valve cover (4) via a thread (12), and a connecting clamp (9) is sleeved on the outer surface of the valve cover (4) below the pitch adjusting hand wheel (11), and an annular cavity is provided between the bottom of the connecting clamp (9) and the valve cover (4), and the external permanent magnet layered magnetic group (8 / 28) is installed in the annular cavity; The upper end of the connecting clamp (9) is provided with an annular groove and an annular protrusion (10), and the lower end of the pitch adjusting hand wheel (11) is also provided with an annular groove and an annular protrusion, the annular protrusion of the pitch adjusting hand wheel (11) is embedded in the annular groove of the connecting clamp (9), and the annular protrusion of the connecting clamp (9) is embedded in the annular groove of the pitch adjusting hand wheel (11), so that the connecting clamp (9) and the pitch adjusting hand wheel (11) form an axial fixed connection relationship with each other; The magnetic suspension valve core (22) comprises an annular body, a block body, an embedded spatial layered magnetic group (19 / 32) and a connecting arm (20); the annular body is located above the block body, an annular cavity is provided in the annular body, the embedded spatial layered magnetic group (19 / 32) is embedded in the annular cavity, a flow hole (15) is provided in the annular body, a gap in the vertical direction is provided between the annular body and the block body, the annular body and the block body are tightly connected by a plurality of connecting arms (20) arranged at intervals along the circumferential direction around them, the interior of the annular body is arranged as a hollow structure with an annular cavity, and the interior of the block body is solid.

2. A frictionless ultra-clean magnetic suspension valve according to claim 1, characterized in that: The top surface of the valve seat (2) is provided with a raised surface as a sealing boss (23) at the outlet end of the inlet flow channel (1), and the bottom surface of the magnetic suspension valve core (22) is provided with an inner concave surface as an annular sealing surface (21), and the sealing boss (23) and the annular sealing surface (21) are embedded in corresponding phase lines.

3. A frictionless ultra-clean magnetic suspension valve according to claim 1, characterized in that: The embedded spatial layered magnetic group (19) is divided into an upper layer inner magnet (16), a middle layer inner connection block (17) and a lower layer inner magnet (18) arranged in sequence from the upper layer to the lower layer, and the middle layer inner connection block (17) is located between the upper layer inner magnet (16) and the lower layer inner magnet (18); the external permanent magnet layered magnetic group (8) is divided into an upper layer outer magnet (7), a middle layer outer connection block (6) and a lower layer outer magnet (5) arranged in sequence from the upper layer to the lower layer, and the middle layer outer connection block (6) is located between the upper layer outer magnet (7) and the lower layer outer magnet (5); The upper inner magnet (16) and the upper outer magnet (7) are magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite; the lower inner magnet (18) and the lower outer magnet (5) are magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite; the upper inner magnet (16) and the lower inner magnet (18) have the same magnetization direction, and the upper outer magnet (7) and the lower outer magnet (5) have the same magnetization direction.

4. The frictionless ultra-clean magnetic suspension valve according to claim 1 is characterized in that: The embedded spatial layered magnetic group (32) is divided into an upper inner magnet (29) located at the top layer, a lower inner magnet (31) located at the bottom layer, and at least one layer of magnetic ring (30) located between the upper inner magnet (29) and the lower inner magnet (31); the external permanent magnet layered magnetic group (28) is divided into an upper outer magnet (27) located at the top layer, a lower outer magnet (25) located at the bottom layer, and at least one middle Halbach ring array (26) located between the upper outer magnet (27) and the lower outer magnet (25); The upper inner magnet (29) and the upper outer magnet (27) are magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite; the lower inner magnet (31) and the lower outer magnet (25) are magnetized radially from the inside to the outside or from the outside to the inside, and the magnetization directions are opposite; the upper inner magnet (29) and the lower inner magnet (31) have the same magnetization direction, and the upper outer magnet (27) and the lower outer magnet (25) have the same magnetization direction; the magnetic ring (30) is magnetized in a single radial direction along the diameter, and the middle Halbach ring array (26) is magnetized in a single radial direction along the diameter, and the magnetic ring (30) and the middle Halbach ring array (26) have the same magnetization direction as a whole.

5. The frictionless ultra-clean magnetic suspension valve according to claim 1, characterized in that: Two channels connecting the outside and the ultra-clean flow chamber are provided in the bottom end of the valve seat (2), which serve as an inlet flow channel (1) and an outlet flow channel (24), respectively. The fluid enters the ultra-clean flow chamber through the inlet flow channel (1) and is discharged from the ultra-clean flow chamber through the outlet flow channel (24).

6. The frictionless ultra-clean magnetic suspension valve according to claim 1, characterized in that: The valve cover (4), valve seat (2) and the annular body, block body and connecting arm (20) of the magnetic suspension valve core (22) are all made of ultra-clean materials.

7. The use of a frictionless ultra-clean magnetic suspension valve as claimed in claim 1, characterized in that: The ultra-clean differential solenoid valve is used for ultra-clean fluid transmission and control in the fields of semiconductors, biomedicine, and electronic-grade chemical industry.

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