Equipment for exposing plate-shaped workpieces with high productivity

Abstract

The problem solved by the present invention is to provide a novel option for machining flat workpieces (6), wherein particularly high productivity and improved precision can be achieved with only one machining unit (4). The problem is solved according to the present invention in that the movable table system (2) comprises two identical tables (21, 22) on a common track arrangement (23), the common track arrangement (23) having a linear track area below the detection unit (3) and the machining unit (4), and thus the tables (21, 22) can be moved linearly alternatingly along the common track arrangement (23) completely below the detection unit (3) and the machining unit (4) in the same table movement direction, and the tables (21, 22) can be independently controlled by a computer unit (5).

Description

Technical Field

[0001] The invention relates to an apparatus for processing plate-shaped workpieces with a high workpiece throughput, in particular for increasing the throughput during the direct exposure of photosensitive coatings on circuit boards or wafers for subsequent etching of conductive tracks or electronic circuits. Background Art

[0002] Direct exposure systems are increasingly being used in the production of circuit boards and wafers. These manufacturing processes are automated to a high degree. An important production parameter for direct exposure systems is the achievable output. The shorter the machine's inherent cycle time, the more efficiently the system can be used.

[0003] The inherent cycle time of a machine is usually given by the sum of handling time, exposure time and non-productive time. Non-productive time includes processes such as transporting the workpiece to the processing table, target registration, workpiece alignment and machine adjustment.

[0004] The actual processing operation in a direct exposure device, for example, is to expose a workpiece (e.g. a resist-coated substrate), wherein the exposure time is substantially predetermined by material properties (such as resist sensitivity, etc.) and the available exposure energy. In this way, only handling time and non-productive time can be reduced to increase material throughput.

[0005] The prior art discloses an exposure system for a plate-like workpiece, which can expose the workpiece in a predetermined pattern by means of electromagnetic radiation (mainly in the visible or ultraviolet spectrum) with a laser beam or with an electron beam or a particle beam. The exposure is not carried out until a correct positional relationship between the workpiece and the predetermined pattern stored in the exposure device has been established, the workpiece having a marking (target mark or target) located thereon. For this purpose, the target located on the workpiece is captured by a camera, and the workpiece and the exposure pattern are aligned with each other before or in the exposure area.

[0006] In order to produce conductive tracks or very small electronic structures on plate-like workpieces (such as circuit boards or wafers, etc.), the exposure process to be performed with high spatial precision and the time required for handling and aligning the plate-like workpieces for this purpose are limiting factors for increasing the workpiece yield. For this reason, efforts are made to perform the handling step and the exposure step (if front and rear side exposure is desired) in the same device and in an overlapping manner or simultaneously by turning the workpiece over, in order to reduce the non-productive time of the exposure process. Such solutions are disclosed, for example, in documents EP 0951054 A1, EP 0722123 B1, US 6,806,945 B2 and JP 2010-181519A.

[0007] A disadvantage of these systems is that either two exposure devices with a turning device between the two exposure devices or two exposure devices for simultaneous exposure of the top and bottom sides must be present.

[0008] A solution with a separate light source for simultaneously exposing both sides is known from JP 2009-092723 A, in which two beam paths are generated via a beam splitter and parallel, oppositely directed light beams via a mirror collimator through corresponding photomasks are used to expose both sides of the substrate, however, in which essentially contact exposure is required and the masks required for this purpose are extremely expensive since they are difficult to adapt to the desired changes in the exposure pattern. Summary of the invention

[0009] The object of the invention is to provide a novel possibility for machining plate-shaped workpieces, in which a particularly high throughput and improved precision are achieved with only one machining unit. As a further object, machining of both sides of the workpiece should be possible with one and the same machining unit without intermediate storage, and a reduction in the required footprint of the entire machining machine should be achieved in comparison with a machine with an equivalent throughput.

[0010] According to the present invention, in an apparatus for processing a plate-like workpiece, the apparatus has a movable worktable system for receiving a plate-like workpiece, and an alignment unit for acquiring a target above the movable worktable system, and a processing unit having a controllable processing path for processing the workpiece, and the apparatus includes a computer unit for controlling the alignment between the processing unit and the workpiece and for spatially distinguishing a predetermined processing according to the position of the workpiece, the position of the workpiece being determined based on the aligned target, the above purpose being achieved in that the movable worktable system has two identical worktables on a common track arrangement, the common track arrangement having a linear track area below the alignment unit and the processing unit, so that the worktables can move in a straight line alternately along the common track arrangement completely below the alignment unit and the processing unit in a coordinated worktable movement direction, and the worktables are independently controllable from each other by the computer unit.

[0011] The computer unit advantageously comprises a tool for independently controlling the two work tables with respect to the speed and direction of movement of the work tables and the alternating inward and outward movement of the work tables for the purpose of loading and unloading plate-like workpieces, so as to feed the plate-like workpieces from two opposite sides of the track arrangement to align the targets during the inward movement, to carry out row-by-row processing according to the determined position of the targets during the outward movement, and to load and unload the corresponding work tables that have been completely moved out of the processing housing.

[0012] The registration unit preferably has a linear orientation transversely to the direction of movement of the worktable and has at least two sensor areas for spatially detecting position marks at least in the lateral edge area of ​​the worktable or in the lateral edge area of ​​a plate-like workpiece located on the worktable during a passage of one of the worktables under the registration unit.

[0013] The machining unit is preferably arranged parallel to the registration unit and has a controllable machining path transverse to the moving direction of the table so as to perform row-by-row machining of the plate-like workpiece.

[0014] The registration unit advantageously comprises cameras for detecting the position of the target plate-shaped workpiece, so that the position of the workpiece can be detected and the dimensions of the workpiece can be preset by means of the computer unit and a signal can be generated for ending the in-movement and out-movement of one of the introduction tables for predetermined processing.

[0015] The computer unit preferably has a delay device for reversing the direction of the in-movement to the out-movement, which direction reversal is triggered first according to the distance between the registration unit and the machining unit, when the rear edge of the plate-like workpiece has exceeded the machining path of the machining unit or exceeded the detection area of ​​the registration unit, depending on which of the two it passed last.

[0016] It has proven advantageous if the computer unit comprises different speed states for the in-movement and out-movement of the worktable, the speed states being adapted to a sensing speed of the registration unit and a predefined processing speed of the processing unit, wherein an average speed for the in-movement is selected so as to be faster than an average speed for the out-movement.

[0017] The registration unit advantageously has a flash illumination for limiting the object sensing to those areas of the table or of the plate-like workpiece located on the table in which the objects are expected.

[0018] It has proven particularly advantageous if one of the workbenches is provided inside the processing housing for sensing the target during the inward movement by means of the alignment unit and for row-by-row processing by means of the processing unit during the outward movement, wherein simultaneously the other workbench is guided outside the processing housing for loading and unloading the workpiece in the outward state.

[0019] Preferably, two grippers operating in parallel transversely to the direction of movement of the worktables are arranged outside the processing housing for loading and unloading one of the worktables at each exit side of the track arrangement.

[0020] The device according to the present invention advantageously includes a transport system, which is provided outside the processing shell and inside the machine shell, for providing plate-like workpieces for processing on both sides, through which the workpiece with one side processed can be transferred from one outlet side of the track arrangement to another outlet side of the track arrangement by a flipping movement.

[0021] In a first preferred embodiment, two articulated arm robots are provided as a transport system, which have a double-sided rotatable gripper head, which is configured to remove completely processed workpieces and store unfinished workpieces by rotating the gripper head, and the articulated arm robots are arranged to perform an inherent flipping movement by transferring a workpiece with one side processed from one articulated arm robot to another articulated arm robot.

[0022] Alternatively, in a second preferred embodiment, a roller conveyor is provided as transport system, which is arranged adjacent to the common track arrangement and is assisted by a double arrangement of grippers which can be moved transversely to the table movement in order to remove completely machined workpieces and deposit unfinished workpieces.

[0023] The tilting device is advantageously integrated into the roller conveyor as a forked tilting flap which is pivotable in the roller plane of the roller conveyor on the longitudinal sides of the tilting flap, wherein the plate-shaped workpiece can be moved into and out of the fork opening of the forked tilting flap by means of the conveying rollers of the roller conveyor after the pivoting movement.

[0024] The turning device is preferably formed as a fork-shaped turning flap, so that the turning device is rotatable in the roller plane at its longitudinal side and can be fixed in a 90° position relative to the conveyor plane, wherein the plate-like workpiece can be moved through the gap between the rotatable longitudinal side and the fork element of the fork-shaped turning flap without turning by means of the conveying rollers of the roller conveyor.

[0025] Advantageously, a gripper is arranged outside the machining housing at each exit side of a common track arrangement of the workbench system, the gripper being capable of moving transversely to the direction of movement of the workbench for loading and unloading the corresponding removed workbench, the gripper being formed to simultaneously remove machined workpieces and place unmachined or not yet completely machined workpieces on the exit side of the track arrangement as a double arrangement of grippers operating in parallel.

[0026] Furthermore, the registration unit and the processing unit are preferably arranged as parallel dual units directly adjacent to each other in the center above a common track arrangement of the worktable system, so that both worktables can be sensed and processed from both sides in each case with the same registration unit and processing unit, wherein the position of the target detected in the instant registration and processing state during the worktable's movement in the incoming movement and deviating from the template processing pattern is taken into account immediately during the worktable's movement in order to adapt the alignment of the exposure pattern to the position of the target by allowing deviations of the data of the processing pattern for the alignment of the processing pattern.

[0027] Alternatively, the registration unit can be divided into two registration devices, which are arranged on both sides of the processing unit, so that the states of instant registration and processing can be achieved simultaneously, but are achieved alternately for the two workbenches.

[0028] Furthermore, the registration unit for object sensing has at least two cameras arranged in a line transverse to the direction of movement of the table, wherein the position along the line is adjustable depending on the desired position of the object on the workpiece. The cameras are preferably equipped with a flash device to allow image capture with a short shutter time during rapid table movement. Optionally, a camera equipped with a flash device is additionally provided for image capture in the longitudinal direction with a short shutter time during rapid table movement and also for image capture transverse to the table movement during slow or stopped table movement when multiple objects are not arranged in the edge region of the table or the workpiece and the other table is in processing.

[0029] The processing unit is preferably formed as a line-by-line scanning exposure unit in order to provide the photosensitive layer with an exposure pattern.

[0030] The exposure unit desirably comprises a controllable light source for exposing the workpiece by means of a scanned laser beam controlled, for example, by means of a polygon mirror.

[0031] Furthermore, the machining unit can advantageously be designed as a laser machining unit in order to machine the workpiece by laser ablation or laser cutting by means of a controlled laser beam.

[0032] In a further preferred embodiment, the processing unit is formed as a material deposition unit in order to process the workpiece by means of controlled material application. For this purpose, the processing unit is preferably formed as a laser processing unit according to the LIFT technique in order to apply the solid material of the donor layer substrate as a coating pattern to the workpiece by controlled induced forward transfer. Alternatively, the processing unit is formed as an inkjet unit in order to apply a transient fluid material as a coating pattern to the workpiece by means of a controllable nozzle.

[0033] The invention is based on the following basic consideration: the output during the machining of workpieces under fixed machining parameters can only be increased if the machining unit is utilized to the maximum extent possible almost continuously by the desired machining operation, for example, because the exposure process as well as the handling time and non-productive time are shortened, in particular because the target registration and alignment of the workpiece relative to the machining pattern is similarly carried out continuously and in parallel with the machining operation, and the machining interruption due to the change of the workpiece takes up as little time as possible. According to the invention, the stated object is met in that the two worktables are arranged in a plane on a common linear guide system in order to reduce the workpiece change time during the passage through the machining unit to the worktable change time. During the movement, the two worktables move independently of each other along the same guide rails of the linear guide system and can approach each other up to a predetermined minimum distance, the two worktables moving at the same speed or at different speeds in the same or opposite movement direction.

[0034] A machining path that spreads out line by line transversely to the direction of table movement, preferably using a laser scanner for the desired machining operation, wherein a registration unit is required for capturing the position of the workpiece or target located thereon, for example the target is formed as a circular target or a through hole, in order to ensure the required accuracy. The registration unit comprises a camera (two or more cameras with area sensors or linear sensors) that is movable transversely to the direction of table movement, so that the edge of the workpiece or the target can be captured at any selectable position. In this way, the registration time by strip-shaped target capture can be adapted to the demonstrated line-by-line machining, preferably with scanning laser line exposure. A full-frame evaluation of the entire workpiece for capturing the target can be avoided, and the alignment of the machining pattern with the position of the workpiece detected by target registration can be produced by means of an electronic alignment of the machining data. Further, the camera should have dynamic characteristics (high image capture rate) that allow gapless acquisition of the workpiece during the table movement (in the y direction) and thus instantaneous target acquisition in the running operation of the table movement for the immediately subsequent machining operation ("on-the-fly" registration).

[0035] Since the loading and unloading of the table itself, for example with rectangular workpieces (e.g. circuit boards), allows a very precise alignment with the table coordinates, the target registration in this case can be used directly for calculating the electronically adapted alignment of the machining pattern without further intermediate storage of the image data (“on the fly” alignment). Thus, any mechanical table correction or workpiece position correction is avoided and non-productive time for alignment is actually saved, combined with the data flow preparation for the run.

[0036] Furthermore, the machine output of the machining unit is increased, since the machining unit is fully utilized from both sides, wherein two individually controllable work tables are passed through alternately.

[0037] It is also advantageous to reduce the travel distance of the two workstations in order to maximize machine efficiency and workpiece output. The total length of the system is given by the four workstation lengths plus the safety distance and the area of ​​the registration unit and processing unit arranged in the middle of the entire system. During the initial processing operation at the permissible registration speed, each workpiece passes completely through both the registration unit and the processing unit (the order varies depending on the workstation entry side) and, after reversing the direction, is processed / exposed on the return path at a predetermined processing speed. The processing speed is determined by the above-mentioned predetermined exposure time, for example during the exposure of the photosensitive resist coating. The dimensions of the registration unit and the processing unit in the y direction have a decisive influence on the total travel distance of the workstations.

[0038] In known DMD-based exposure systems (digital micromirror devices), which require an xy movement of at least two rows with offset DMD heads and typically have a significant y dimension of the exposure area greater than 120 mm, the present invention must take into account the longer travel distance of the table compared to the preferably used polygon scanners, which have a beam dimension in the y direction of significantly less than 0.5 mm, thus having a minimal impact on the required table travel distance. The need for increased travel distance of the table of other processing units utilizing fluid or droplet jets should be evaluated in a similar manner, for example when using inkjet technology to apply materials such as paints, varnishes, adhesives, resists and solder mask markers, etc.

[0039] Furthermore, by means of different handling systems adapted to the device, it is possible to process both sides of a workpiece in a workpiece flow by means of the same processing facility. For this purpose, loading and unloading the processing unit on both sides can be utilized in a particularly advantageous manner by using a handling unit preferably mounted inside the machine housing, which enables the workpiece, which has already been processed on one side, to be transported from table to table by its inherent rotation, while at the same time another workpiece is loaded and processed on one side of the device that can be loaded and unloaded on both sides.

[0040] By means of the invention, it is possible to make the processing of plate-shaped workpieces, such as circuit boards or wafers, more efficient, so that a particularly high throughput can be achieved by one processing unit by means of two separate workstations operating in opposite directions on a common track arrangement. In this way, by using one and the same common track arrangement, not only the throughput is increased, but also the processing accuracy of the two workstations is increased. By means of an adapted handling system, it is possible to process both sides of a workpiece in a particularly efficient manner with the same processing unit with a single workpiece flow, so that no intermediate storage unit or a second downstream processing unit is required, wherein a reduction in the required footprint of the entire processing machine is achieved compared to a machine with an equivalent throughput. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] The present invention will be described more fully below with reference to embodiments. The accompanying drawings show:

[0042] Figure 1 are two schematic diagrams of a processing device according to the present invention for loading a plate-shaped workpiece in an alternating manner on both sides, wherein sub-figure a) shows the registration and processing of the workpiece on the left-hand side and the replacement of the workpiece on the right-hand side, and sub-figure b) shows the registration and processing of the workpiece on the right-hand side and the replacement of the workpiece on the left-hand side;

[0043] Figure 2 are eight sub-figures (sub-figures a to h) of a schematic process flow for workpiece processing and parallel workpiece handling by means of two articulated arm robots;

[0044] Figure 3 is a timing diagram of registration and processing and table-to-table transport with rotation of a workpiece for a rear side machining process;

[0045] Figure 4 and Figure 2 Compared to these are two sub-figures (sub-figures a and b) of a schematic sequence of workpiece handling by means of an alternative roller conveyor;

[0046] Figure 5 is a detailed view of the flipping device, wherein arrows show the flow of movement;

[0047] Figure 6 is an advantageous embodiment of the turning device which has a through opening, when the turning device stops halfway through the swivel path, in order to allow the workpiece to pass through instead without turning it over;

[0048] Figure 7 is relative to Figure 1 Two views of a modified machining operation, wherein sub-figure a) shows the registration and machining of a workpiece located on the left-hand side and the replacement of a workpiece on the right-hand side, and sub-figure b) shows the registration and machining of a workpiece located on the right-hand side and the replacement of a workpiece on the left-hand side, and in the machining housing there are separate registration devices for the targets of the workpieces on each exit side of the track arrangement, making it possible to carry out the registration on one workbench and the machining on another workbench in parallel;

[0049] Figure 8 is a diagram of an advantageous embodiment of a registration unit for capturing targets in two strip-like regions along an edge of a workpiece;

[0050] Fig. 9 is a timing diagram of real-time target registration with details showing target distortion due to stage movement;

[0051] Fig.10is a diagram of another advantageous embodiment of a registration unit for capturing an object in three strip-like regions;

[0052] Fig.11 is shown in an advantageous embodiment with two grippers guided in parallel according to Figure 4 Two partial diagrams (sub-diagram a and sub-diagram b) of the loading and unloading process of two workstations of the arrangement shown. DETAILED DESCRIPTION

[0053] like Figure 1 As schematically shown in FIG. 1 , the processing device 1 for processing a plate-shaped workpiece 6 according to the present invention comprises a movable table system 2 for receiving and moving the workpiece 6, and a movable table system 2 for acquiring a target 33 (only in FIG. 1 ). Figure 8 and Fig.10 The processing device 1 includes a registration unit 3 and a processing unit 4, the processing unit 4 being formed as a processing station for scanning the workpiece 6 line by line transversely to the moving direction of the worktable, and the processing device 1 includes a computer unit 5 for controlling the alignment between the processing unit 4 and the workpiece 6 and the spatial distinction of the predetermined processing according to the position of the workpiece 6, the position of the workpiece 6 being determined based on the registration target 33.

[0054] The movable workbench system 2 has two identical workbenches 21 and 22 on a common track arrangement 23 (in terms of a common linear guide system), wherein the common track arrangement 23 has a linear track area preferably formed by two tracks under the alignment unit 3 and the processing unit 4, so that the workbenches 21 and 22 can move alternately in a straight line along the common track arrangement 23 completely under the alignment unit 3 and the processing unit 4 and in the coordinated workbench movement direction (y direction).

[0055] The registration unit 3 has a linear orientation transversely to the direction of movement of the table and has at least two sensor areas for spatially detecting position marks at least in the lateral edge area of ​​the table 21, 22 or of the workpiece 6 located on the table during the passage of one of the tables 21, 22 under the registration unit 3. The sensor area is preferably formed by a compact camera 31, which can be, for example, an area camera or a line camera.

[0056] The processing unit 4 is advantageously designed as a processing station which is arranged parallel to the registration unit 3 and has a controllable processing path transverse to the direction of movement of the table, preferably in the form of a scanning processing beam, in order to process the plate-like workpiece 6 line by line. Linear scanning laser beams, in particular electron beams or particle beams, can also be considered for the controllable processing path. They can be used in a particularly preferred manner for the line-by-line scanning exposure unit 41 (see Figure 2Alternatively, however, the processing unit 4 may also have another processing station which is linearly and row-by-row controllable, such as a laser cutting device or another laser processing system, such as a laser ablation unit or a LIFT system, i.e. a laser induced forward transfer system (not shown, see for example https: / / www.hiperlam.eu / technologies) or an inkjet unit 42 (only in Figure 7 ) or other material deposition system.

[0057] The computer unit 5 is equipped with tools for independently controlling the two worktables 21, 22 with respect to the direction of the worktable movement, the speed and the alternating inward and outward movement of the worktables 21, 22 for the purpose of loading and unloading, so as to feed the plate-like workpiece 6 from two opposite sides of the track arrangement 23 to align with the target 33 during the inward movement and to perform row-by-row processing during the outward movement. The processing is controlled by the computer unit 5 according to the alignment between the processing unit 4 and the workpiece 6 and according to the position of the workpiece 6 determined based on the aligned target 33 in accordance with a predetermined processing pattern by spatial differentiation. In addition, the computer unit 5 provides for loading and unloading of one of the worktables 21 or 22, which are alternately completely moved out of the processing housing 7. The processing housing 7 encloses a space, which is equipped with clean room conditions and contains a processing device 1 with an alignment unit 3 and a processing unit 4 in the center, and contains a space with at least one worktable length, which extends in two directions to the corresponding exit area of ​​the track arrangement 23. Figure 1 In the working variant shown, the processing housing 7 has cleaning elements (cleaners 71 ) for cleaning the surface of the workpiece 6 at two opposite exit regions of the worktables 21 , 22 .

[0058] Now we will see Figure 1 The parallel workpiece machining according to the invention in the machining device 1 is described by means of two sub-figures in FIG. Sub-figure a) shows the following process: wherein the first table 21 has been loaded with an unmachined workpiece 61 and is moved along the track arrangement 23 into the machining housing 7, first passing through the cleaner 71 and completely traversing the registration unit 3, and immediately thereafter traversing the machining unit 4 in the moving-in direction indicated by the large dashed line. The unmachined workpiece 61 must pass through both units 3 and 4, and at least all parts of the unmachined workpiece 61 must have left the registration unit 3 and the machining unit 4, which, as indicated by the thin dashed outlines of the unmachined workpiece 61 and the table 21, may not be able to pass completely when the surface area of ​​the table 21 is larger than the surface area of ​​the unmachined workpiece 61. The difference in surface area between the table 21 and the workpiece 61 is large, which can save valuable time.

[0059] When passing through the registration unit 3, the unprocessed workpiece 61 is already sensed relative to the target markings 33 (preferably targets or through holes) arranged thereon. For this purpose, the registration unit 3 contains a camera 31 (two or more cameras with area sensors or linear sensors) that is movable in the x-direction in order to capture any selectable position on the unprocessed workpiece 61. However, during normal operation, the unprocessed workpiece 61, the dimensions of the unprocessed workpiece 61 and the number of targets 33 located on these workpieces are precisely known, so that the camera 31 is fixedly pre-adjusted for sensing the targets of the actual workpiece charge while being movable. The movement of the camera 31 can also be omitted when the combination of area cameras or linear cameras can capture the entire width of the worktables 21, 22 without gaps.

[0060] For the target 33 to be sensed immediately (on the fly) as it passes through, the camera 31 must possess dynamic features (high frame capture rate), which allows gapless acquisition of the unprocessed workpiece during movement in the direction of table movement (y direction). "On-the-fly" registration as used herein means that the position data of the target 33 and, accordingly, the position of the unprocessed workpiece 61 are directly processed by the computer unit 5 for the alignment between the unprocessed workpiece 61 and the processing pattern by adapting the processing data for processing in the processing unit 4.

[0061] When the first table 21 has finished its inward movement, wherein all parts of the unprocessed workpiece 61 have passed through the registration unit 3 and the machining unit 4, the computer unit 5 reverses the movement direction of the first table 21 as indicated by the large dashed movement line and the first table 21 passes backwards through the machining unit 4 and the registration unit 3. In the machining unit 4, the row-by-row machining of the unprocessed workpiece 61 is performed.

[0062] In a parallel time period, the workpiece 62 whose one side has been machined is unloaded from the second workbench 22 on the right-hand side of the sub-figure a), and a new unmachined workpiece 61 is loaded onto the second workbench 22 .

[0063] Thus, also before the first workbench 21 has left the processing housing 7, the second workbench 22 is also ready for processing, and also while the first workbench 21 is being processed, the second workbench 22 can have moved into the processing housing 7, passed through the cleaner 71 and followed the workbench 21 at a minimum distance. Figure 1 It is shown in sub-figure b).

[0064] The second table 22 moves into the processing housing 7 according to the large dashed moving line, first passes through the processing unit 4 without being processed, and then is sensed "on the fly" in relation to the position of the target 33 when passing through the registration unit 3. The table 22 must be moved again through the registration unit 3 until the unprocessed workpiece 61 has completely left the registration unit 3 (all its parts). The direction of movement of the table 21 is then reversed, and the computer unit 5 provides in the processing unit 4 the processing of the adaptation and alignment of the processing pattern.

[0065] When the second workbench 22 moves in, the first workbench 21 simultaneously leaves the processing housing 7 at the opposite side, unloads the workpiece 62 whose one side has been processed from the processing housing 7, loads a new unprocessed workpiece 61, and the first workbench 21 is accordingly ready to move in again, which starts precisely when the second workbench 22 performs row-by-row processing in the processing unit 4 after reversing direction. At the end of the processing of the second workbench 22, the processing according to Figure 1 The procedure of sub-figure a) is performed, and the process of sub-figure b) is continued, and so on.

[0066] In order to reduce the table change time as much as possible, the two tables 21, 22 are moved as close to each other as possible in the plane on the common track arrangement 23. In each case, the two tables 21, 22 are moved independently of each other in the y direction from one of the two ends of the track arrangement 23 and can approach each other up to a predetermined minimum distance during the table movement, and the two tables 21, 22 can move at the same speed or at different speeds and in the same movement direction or in different movement directions.

[0067] The process flow for processing a workpiece 6 - in this case, a circuit board exposure, for example - is Figure 2 The eight sub-figures a) to h) are shown in FIG. 8, which are associated with an associated handling system 8, which in addition to Figure 1 In addition to the parallel machining variant shown in FIG. 1 , the machining device 1 can also be used to machine the front and rear sides of a workpiece 6 .

[0068] exist Figure 2 In the above example, all subgraphs contain Figure 1 A variant of the processing device 1 is shown, in which - without loss of generality for all applicable processing operations - the processing unit 4 is formed as an exposure unit 41, which has a controllable light source for exposing the workpiece 6, preferably a laser beam scanned by means of a polygon mirror, wherein, as Figure 1 As shown, the rail arrangement 23 extends out of the processing housing 7 in order to allow alternating loading and unloading of the work tables 21 and 22 .

[0069] In this embodiment, a handling system 8 is provided outside the processing shell 7 for loading workpieces on both side surfaces of the processing shell. The handling system 8 is accommodated in a machine shell 9 surrounding the processing device 1, which includes a workbench system 2 with a protruding track arrangement 23, and the handling system 8 includes two articulated arm robots 81, which are each associated with one of the workbenches 21, 22 and ensure the unloading of the workpiece 62 on the exposed side and the loading of a new unexposed workpiece 61 on the workbenches 21, 22.

[0070] In this specific example, the handling system 8 comprises two identical articulated-arm robots 81 , each of which can load or unload workpieces 6 at a respective moved-out workstation 21 and 22 at a respective end of the track arrangement 23 .

[0071] Each articulated arm robot 81 has a (preferably multi-segmented) articulated arm 811 and a rotatable double-sided head 812, which is equipped with two grippers 84, which are arranged at opposite surfaces and contain, for example, a vacuum system. The articulated arm robots 81 are arranged so that they can access the associated workbenches 21 and 22 in each case and can contact the other articulated arm robots 81. When two articulated arm robots 81 are in contact with each other, one articulated arm robot 81 can transport the workpiece 62, whose one side has been processed, via the gripper 84 arranged at the double-sided head 812 to an intermediate position at half the distance to the other articulated arm robot 81, while the other articulated arm robot 81 takes over the workpiece 62 in a "mirror alignment" manner. The processing and handling operations are described below with reference to Figure 2 The process is described in the eight sub-figures of FIG. 6 , wherein the letter A is used to mark the front side of each workpiece 6, and the letter B is used to mark the rear side of each workpiece 6, the filled letters are used to mark the visible upper side of the workpiece 6, and the hollow letters are used to mark the invisible lower side of the workpiece 6. In addition, it should be noted that although the workpiece stack 64 is usually provided by an external handling device, only for the sake of more compact simplified depiction, the workpiece stack 64 is always shown in all sub-figures inside the machine housing 9.

[0072] Sub-figure a) shows a snapshot of the processing device 1 in the machine housing 9, wherein the exposed workpiece 62 (on one side) has left the processing housing 7 on the first workbench 21 along the track arrangement 23. Figure 2As shown in the sub-figure a), a new unexposed workpiece 61 is received on one surface of the double-sided head 812, and the head 812 rotates and swivels on the first workbench 21. At the same time, the workpiece 62, one side of which has been exposed, moves on the second workbench 22, passes through the registration unit 3 and the exposure unit 4, to sense the target 33 in the moving-in direction marked by the hollow arrow. In addition, the articulated arm robot 81 stores the workpiece 63 with both sides exposed in the workpiece pile 64, and the workpiece 63 was removed from the second workbench 22 not long ago. The articulated arm robot 81 then swivels to a middle position half the distance from the articulated arm robot 81 of the first workbench 21, as shown by the articulated arm robot 81 on the right-hand side of the sub-figure b).

[0073] The articulated robot 81 at the first workbench 21 has stopped above the first workbench 21 (as shown in sub-figure b), and the articulated robot 81 carries the unexposed workpiece 61 on the upper surface of the double-sided head 812 and descends to the first workbench 21 through the bottom surface, so as to receive the workpiece 62 with one side exposed from the first workbench 21. In the moving-out direction of the workbench 22, line-by-line exposure is simultaneously performed on the second workbench 22.

[0074] exist Figure 2 In the sub-figure c of FIG), the exposure on the second workbench 22 is finished, and the workbench 22 is moved out of the processing housing 7 at a higher speed. After the workpiece 62 with one side exposed is received, the articulated arm robot 81 at the first workbench 21 rotates the head 812 by 180° again, and then places the unexposed workpiece 61 on the workbench 21.

[0075] According to sub-figure d), the articulated arm 811 rotates from the first workbench 21 to the middle position half the distance from the other articulated arm robot 81 waiting without loading, along with the workpiece 62 whose one side has been exposed and located on the other surface of the double-sided head 812, and stops at the available surface of the double-sided head 812 to transfer the workpiece 62 whose one side has been exposed. At the same time, the workpiece 63 whose two sides have been exposed and located on the second workbench 22 has left the processing housing 7, and the first workbench 21 moves from the other side into the processing housing 7 to reach the registration unit 3.

[0076] As shown in sub-figure e), the articulated arm robot 81 associated with the second workbench 22 pivots to the workpiece 63, which has been exposed on both sides, on the second workbench 22 and, in doing so, rotates its head 812 so that the free surface of the head 812 can receive the workpiece 63, which has been exposed on both sides. At the same time, the first workbench 21, on which the unexposed workpiece 61 is placed, has passed the registration unit 3 in the processing housing 7, in which the registration of the target 33 has been carried out, and has almost passed through the exposure unit 41.

[0077] As shown in sub-figure f), after at least the unexposed workpiece 61 has completely passed through the exposure unit 41, the first table 21 reverses its direction of movement and starts the exposure process in the exposure unit 4 during the removal movement. At the same time, the associated articulated arm robot 81 receives the workpiece 63, which has been exposed on both sides at the second table 22, and then - as can be seen in sub-figure g) - the articulated robot 81 rotates the head 812 by 180° in order to deposit the workpiece 62, which has been exposed on one side and received by the articulated robot 81 of the first table 21, on the second table 22. During this time, in sub-figure g), the exposure program on the first table 21 ends, and then the first table 21 is removed at high speed.

[0078] exist Figure 2 In sub-figure h), the articulated arm robot 81 at the first workstation 21 receives a new unexposed workpiece 61 from the workpiece pile 64, so that the unexposed workpiece 61 can then replace the workpiece 62 which has been exposed on one side and has been removed from the processing housing 7 - as already described with reference to sub-figures a) and b). At the same time, the articulated arm robot 81 at the second workstation 22 has deposited the already received workpiece 63 which has been exposed on both sides in the corresponding workpiece pile 64, and the second workstation 22 starts to move the already deposited workpiece 62 which has been exposed on one side into the processing housing 7, so that it can be registered in the registration unit 3 at the maximum possible registration speed. Then the whole process starting from sub-figure a) is repeated.

[0079] The above process Figure 3 2 is shown again as a position-time diagram in order to demonstrate the tight control of the movement of the tables 21, 22 shown as black, solid zigzag lines. The time axis t is drawn vertically along the spatial centerline of the registration unit 3 and the processing unit 4 and allows the different speeds of the tables 21 and 22 to be discerned. Registration is performed during the steeper rise (i.e. at a higher table speed), while exposure is performed in the area with a flatter rise (i.e. at a slower speed). The tables 21 and 22 are stopped (monotonously) outside the processing housing 7.

[0080] Figure 3 The flowchart in FIG. 1 shows in a simplified manner the transport from workbench to workbench by means of a handling system 8 using curved arrow strips, for example by means of an articulated arm robot 81 (according to Figure 2 ) or roller conveyor 82 (according to Figure 4 ) and by virtue of Figure 2 The turning device 83 in the figure rotates the workpiece (for example according to sub-figure d), as a workpiece transfer between the two-sided heads 812 of the two articulated arm robots 81, or according to Figure 4 and Figure 5By fork-shaped flip plate 831), processing (exposure) can be performed on both sides of the workpiece 6. This registration and exposure procedure for the two workpieces 6 is Figure 3 , where solid numerals 1 and 2 indicate the front side A and the rear side B. The workpiece 6 with hollow numerals 3 and 4 shows the parallel running process for the next workpiece 6. The workpieces indicated by reference numerals 61, 62 and 63 show the difference between an unexposed workpiece 61, a workpiece 62 with one side exposed, and a workpiece 63 with both sides exposed.

[0081] Figure 4 The figure in FIG. 1 has two sub-figures a) and b), which show a handling system 8 in the form of a roller conveyor 82, which can be used as Figure 2 alternative.

[0082] In this example, the processing device 1 is based on Figure 1 4, however, the processing unit 4 (again without loss of generality) is formed as an exposure unit 41. A complete handling system 8 is arranged around the processing device 1 in a machine housing 9, which handling system 8 can be used in combination with the processing device 1 as Figure 2 An alternative to the handling system used in , so that a workpiece 62 which has been exposed on one side can be fed to a rear side exposure in the same processing device 1 without intermediate stacking.

[0083] In this embodiment, the handling system 8 includes a roller conveyor 82, two dual arrangements of two clamps 85 and 86, and a flipping device 83, wherein the roller conveyor 82 transports the workpiece 62 with one side exposed from the first workbench 21 to the second workbench 22, the two dual arrangements of two clamps 85 and 86 each perform parallel loading and unloading of the corresponding workbench 21, 22, and the flipping device 83 is arranged on the path along the roller conveyor 82 so as to flip the exposed upper side up and down during the workbench-to-workbench transportation of the workpiece 62 with one side exposed, and thus expose the workpiece 6 on both sides in one machine flow by using the processing device 1 twice.

[0084] In accordance with Figure 4 In this embodiment of the invention, sub-figure a) shows processing for the first workbench 21 and the second workbench 22 running in parallel. When the workpiece 62 with one side exposed is replaced by the unexposed workpiece 61 on the first workbench 21 that has been removed from the processing housing 7, the exposure process takes place simultaneously on the second workbench 22, which follows the first workbench 21 during the removal movement of the first workbench 21, so that the target 33 (only shown) can be sensed in the registration unit 3. Figure 8 ).

[0085] The unloading and loading of the first table 21 is carried out with two grippers 85 and 86 that move in parallel (in the x-direction). The gripper 85 receives and lifts (e.g. pneumatically) an unexposed workpiece 61 that is previously available on the roller conveyor 82 off the workpiece stack 64, and at the same time, the gripper 86 receives and lifts in a similar manner a workpiece 62 that has been exposed on one side and is located on the first table 21. The two grippers 85, 86 are then moved in the x-direction (transversely to the direction of table movement) until the gripper 85 deposits the unexposed workpiece 61 at the correct position on the table 21 and the gripper 86 can transfer the workpiece 62 that has been exposed on one side to the roller conveyor 82 on the other side of the table 21. During this change procedure, the second table 22 has already moved through the exposure unit 41 and has ended its removal movement by leaving the process housing 7. This state is Figure 4 However, the first table 21 has already followed closely behind the outgoing movement of the second table 22 and, in doing so, has already traversed the registration unit 3 and the exposure unit 41, only the registration unit 3 having completed its task of sensing the target "on the fly", so that the exposure pattern calculated in the computer unit 5 to accommodate the target deviation can be used for the exposure performed in the exposure unit 41 after the reversal of the direction of the first table 21.

[0086] During this time period, the following items occur at the second workbench 22 that has been moved out: the workpiece 63 with both sides exposed is removed, the workpiece 62 with one side exposed and transported from the first workbench 21 by the roller conveyor 82 is placed in parallel, and the workpiece 62 has been turned over on the way to the second workbench 22. The rotation of the workpiece 62 with one side exposed is carried out by a turning device 83, which is integrated in the gap between the separated rollers in the roller conveyor 82 and is formed as a forked turning plate 831, which rotates on one longitudinal side. The enlarged details of this preferred embodiment are shown in FIG. Figure 5 and will be described more precisely below.

[0087] Again, two grippers 85, 86 are provided for unloading and loading the second workbench 22, which are movable parallel to the x-direction on the side of the first workbench 21 and are preferably equipped with pneumatic elements. The gripper 86 receives the workpiece 62 with both sides exposed, and the gripper 85 lifts the workpiece 62 with one side exposed from the roller conveyor 82, and the grippers 85 and 86 are moved in the same direction (x-direction) until the workpiece 62 with one side exposed can be deposited in the correct position on the second workbench 22, and the workpiece 63 with both sides exposed is deposited on a separate section of the roller conveyor 82, so that both workpieces 62 and 63 can be deposited, and the next cycle begins, as shown in FIG. Figure 4As shown in sub-figure a) in .

[0088] Figure 5 Shown is a reference Figure 4 A preferred embodiment of the mentioned turning device 83. The turning device 83 is formed as a forked turning flap 831 which can be swiveled 180° about a longitudinal rotation axis 832 extending in the plane of the roller conveyor 82. In the horizontal state, the forked turning flap 831 can be lowered halfway into the gap between the separating rollers of the roller conveyor 82 so that the arriving workpiece 62 with one side exposed can pass into the open forks of the turning flap 831. When this happens, the forked turning flap 831 is rotated about one of its longitudinal edges having the rotation axis 832 until the turning flap 831 enters the gap between the separating rollers of the roller conveyor 82, which is also present, on the continuous roller conveyor 82, and the workpiece 62 with one side exposed (now with the exposed side facing downwards) is deposited again on the rollers of the roller conveyor 82 and can extend freely. This way of rotating the workpieces has a decisive advantage: the workpiece 62 which has already been exposed on one side does not stay at the position of the axis of rotation 832 during the rotation process, but moves further at almost the same rhythm during the rotation process. Thus, during the change of the worktable for exposing the rear side, there is no delayed transport, so that the handling time is not extended by turning over the workpiece 62 which has already been exposed on one side. The only limiting factor for the throughput of the workpieces 62 to be turned over in this turning device 83 is the time interval between the rotation with the workpiece 62 and the swinging back without the workpiece, because within this time interval, no further workpiece 62 can travel into the area of ​​the turning flap 831. However, this time interval remains free only for the duration of the exposure process, so that in this case this limitation has no effect in the transport path.

[0089] Figure 6 A further variant of the flipping flap 831 is shown, which also allows the workpiece 62 to be transported further without flipping. For this purpose, a continuous slot 833 is incorporated between the longitudinal rotation axis 832 and the forked flipping flap 831, which extends exactly in the plane of the top of the rollers of the roller conveyor 82. In order to transport the workpiece 62 further without flipping, the flipping flap 831 only needs to be turned back 90° and thus vertically upwards. In this way, the slot 833 is emptied and the workpiece 62 can pass through the flipping device 83 without obstacles or changes.

[0090] Figure 7 Shown in a similar Figure 1 In the description of the process Figure 1 Compared to the modified processing device 1. Figure 7The modification in the embodiment is that the registration unit 3 comprises two separate registration devices 34, which are respectively directly associated with the outlet of the processing housing 7, while the processing unit 4 is located in the middle of the processing device 1 as in the previous example, but in this embodiment, the processing unit 4 is formed as an inkjet unit 42, by means of which a coating or other controlled material coating can be achieved, for example, LIFT deposition can also be achieved. The unloading and loading of the worktables 21 and 22 is similar to the reference Figure 1 The same time sequence as described is carried out. Because the registration unit 3 is divided into two parts, the separate registration device 34 for each workstation 21 and 22 is operated immediately at the beginning of the move-in movement. Therefore, for example, as shown by the dashed line in sub-figure a), the first workstation 21 can already receive the target 33 while the second workstation 22 is still in the processing operation. The difference between the starting position of the first workstation 21 shown in dashed lines and the forward position of the first workstation 21 shown in solid lines approximately corresponds to the saved non-productive time, which occurs due to the earlier start time of the first workstation 21 immediately at the beginning of the processing of the second workstation 22. However, it is actually slightly slower, because the registration occurs at a higher speed of the first workstation 21 compared to the processing speed of the second workstation 22, so that the actual start time of the first workstation 21 is later, and the first workstation 21 does not catch up with the second workstation 22 during processing.

[0091] However, due to the earlier start time of the first workstation 21, the registration can be reorganized so that, in the case where the targets 33 are arranged in more than two rows (respectively at the edges of the workpiece 6), it will be possible to sense the targets 33 more slowly or even stop the first workstation 21. In this case, it is even possible to stop the first workstation 21 in order to move one or both cameras 31 along the adjustment device in the x-direction so that all available targets 33 can be captured.

[0092] This situation actually occurs when a circuit board panel is produced as the workpiece 6, in which a plurality (e.g. 4, 8 or 16) of individual circuit boards are to be processed on one workpiece 6 and four targets 33 are arranged in each case on the corresponding part. In this case, the targets 33 will have to be detected at some y positions of the table movement, at a plurality of positions in the x direction and can be sensed by one or two cameras 31 (which are movable during alignment) without additional cross sensing causing further non-productive time.

[0093] The above discussion on reducing the non-productive time by shortening the time for the first workbench 21 to follow the second workbench 22 is equally applicable to the following Figure 7 ) is a reverse layout of sub-figure b), although the continuous movement of the worktable is not shown in the same way as in sub-figure a).

[0094] Figure 8 and Fig. 9 The preferred operating principle of the registration unit 3 is schematically shown. In this example, it is assumed that the target 33 is present on the workpiece 6 only in two tracks along the edge of the workpiece in the direction of table movement (y direction), so that the registration job can be performed by two cameras 31. The cameras 31 are mounted on a camera adjustment device 32 so that they can be adjusted transversely to the direction of table movement (i.e. in the x direction), transversely to the dimensions of the workpiece 6 and transversely to any optional position of the target 33 arranged thereon. Usually, only one adjustment is required for each workpiece or machining job and the adjustment remains unchanged during the registration process.

[0095] Depending on the number of tracks of the target 33 , two or more cameras 31 with area sensors or linear sensors are used as sensing or detection units in the registration unit 3 .

[0096] exist Figure 8 In the preferred embodiment shown in Figure 1 for the variant with only two cameras 31, a position-triggered capture process is used with the cameras 31, i.e. an illumination flash is generated at a predetermined position of the first table 21 during movement, which "freezes" the camera image. The typical flash time is less than 5 μs. Next, the image data is read out and a new recording is prepared.

[0097] Preferably, a circular mark or a through hole is used as the target 33. Fig. 9 The timing and distortion of the target imaging to be considered are shown in FIG. As long as the selected integration time of the sensor of the camera 31 is not too short, it is necessary to allow for the target distortion caused by the worktable movement. The integration time is adjusted by the corresponding flash duration. For this purpose, the signal is triggered as follows.

[0098] The scale A ("ruler") is part of the positioning system of the first workbench 21 and the second workbench 22. The control electronics for position acquisition can record the current position of the workbench 21, 22 (position (I), (II), (III) of the scale A along the clock signal of the positioning system of the workbench 21, 22) during movement by means of an external trigger signal.

[0099] During the passage of the worktable 21, 22, the workpiece 6 placed thereon is below the registration unit 3, a trigger signal "measurement request" is generated at the intended target position (the target 33 is located in the field of view (FOV) of the corresponding camera 31), and the position (I) is stored in the position capture signal B. The same trigger signal is transmitted to the camera electronics (frame grabber) as an image readout signal C. The camera 31 thereby receives the shutter signal E and subsequently opens the shutter for image capture. For this purpose, a camera 31 with a so-called global shutter is preferably used. In addition, a short flash of the target 33 for illuminating the workpiece 6 is triggered with a short time delay at the rising edge of the shutter signal E by means of the flash control signal D. The rising edge of the flash control signal D generates a second trigger signal, which leads to the storage of the worktable position (II). The falling edge of the flash control signal D finally generates a third trigger signal, which is used to store the worktable position (III).

[0100] The integration time E of the camera 31 is always set longer than the maximum possible flash duration of the flash control signal D. Since the worktables 21, 22 move in parallel, the image capture of the target 33 arranged on the workpiece 6 is distorted in time and geometry during the whole process. Both the temporal position difference is generated, which is the internal signal propagation time: position (II)-position (I), and the geometric distortion of the image in the camera 31 is the length of the flash time: position (III)-position (II).

[0101] The actual target position provided for the position of the target 33 on the workpiece 6 is calculated as follows:

[0102] Target position = "determined position in the field of view" – total distortion caused by the time delay of the flash trigger + the target median displacement of half the flash duration

[0103] ZP = [position II - position I] + [(position III - position II) / 2]

[0104] like Fig.10 As schematically shown, for a preferred circuit board layout that usually occurs, the total workpiece 6 is divided into four quadrants, each of which can itself contain a plurality of individual circuit boards, and sixteen targets 33 are used for processing. These targets 33 are arranged in each case at the corners of each quadrant. In this layout, according to Fig.10Three area cameras 31 are used, wherein when these targets 33 are adjacent to each other at the seams of all four quadrants, the middle camera 31 must be able to simultaneously capture four targets 33 in a corresponding large field of view (FOV). Here, the registration scheme is carried out in three strips of the target 33 that are the same as the variant of two strips. In the case of a preferred circuit board layout with four quadrants, a total of nine image areas must be collected during the movement of the workbench 21, and the entire circuit board panel is located below the camera 31. Each of the three cameras 31 provided for this purpose collects three image areas in turn, wherein the target 33 is included in the 1-2-1, 2-4-2 and 1-2-1 layouts. At this point, it is not necessary to collect the entire circuit board substrate without gaps. Therefore, the speed of the workbench 21 can be higher than the speed initially determined by the frame rate of the camera 31. This registration method has long been used by Orbotech in direct exposure devices. The principle of data processing performed after target acquisition is described in, for example, WO 2003 / 094582 A2 and US 7,508,515 B2.

[0105] The arrangement of two grippers 85 and 86 for moving adjacent to each other for the handling system 8 is Fig.11 The transport system 8 has been shown in detail in Figure 4 The process cycle is described based on the roller conveyor 82. The required minimum handling in the area of ​​the unloading and loading stations 21 and 22 is organized in such a way that the grippers 85, 86 can be moved in the x direction (transverse to the station movement direction) and the movement length is designed to be greater than the station width. Only the unloading and loading process of the first station 21 is described below. The process is similar for the second station 22.

[0106] When the workpiece 62 with one side machined is unloaded from the workbench 21, the two grippers 85 and 86 move in parallel and in a linear manner, and while receiving the workpiece 62 with one side machined from the workbench 21, the unmachined workpiece 61 is lifted from the feed area of ​​the roller conveyor 82, as shown in FIG. Fig.11 As shown in sub-figure a) of , the two grippers 85, 86 are independently movable but preferably guided in a coupled manner. The two grippers 85 and 86 then move simultaneously in the x-direction past the first workbench 21. As a result, the workpiece 62 whose side has been machined leaves the workbench area and is displaced by the roller conveyor 82, while the unmachined workpiece 61 is moved to a predetermined position on the workbench 21 and is preferably stored again synchronously with the workpiece 62 whose side has been machined. By doubling the gripper arrangement in this way, the handling during unloading and loading of the two workbenches 21 and 22 is parallelized, so that no additional non-productive time is caused.

[0107] The above description is applicable to the second workbench 22 in the same manner, the only difference being that, in the case where the workpiece 6 is machined on both sides, the workpiece 63 having both sides machined is unloaded and the workpiece 62 having one side machined is loaded on the second workbench 22. The movement process of the grippers 85 and 86 is exactly the same as that of the first workbench 21.

[0108] In addition to the preferred processing of circuit boards described herein, the processing device 1 according to the invention covers all other processing operations of plate-like workpieces 6, provided that a row-by-row linear processing path transverse to the direction of table movement is performed by alignment assisted by a target 33 or alignment control of the workpiece 6 relative to a provided processing path s, and an improvement in the efficiency of the processing operations is achieved by minimizing handling time and non-productive time, possibly by increasing the workpiece output of the processing device 1 by table-to-table transport for double-sided workpiece processing by the same processing device 1, by means of a two-table solution on a common track arrangement 23.

[0109] Reference numerals list

[0110] 1 Processing device (for plate-shaped workpieces)

[0111] 2 (movable) workbench systems

[0112] 21 (First) Workbench

[0113] 22 (Second) Workbench

[0114] 23 (Shared) Track Layout

[0115] 3 Registration unit

[0116] 31 Camera

[0117] 32 Camera adjustment device

[0118] 33 Target

[0119] 34 (Single) Registration Device

[0120] 4 Processing units

[0121] 41 Exposure unit

[0122] 42 inkjet unit

[0123] 5 Computer unit

[0124] 6 Workpiece

[0125] 61 Unprocessed / unexposed workpiece

[0126] 62 Workpiece with one side processed / exposed

[0127] 63 Workpiece with both sides processed / exposed

[0128] 64 Workpiece pile

[0129] 7. Processing the shell

[0130] 71 Cleaner

[0131] 8 Handling system

[0132] 81 Articulated Arm Robot

[0133] 811 Articulated Arm

[0134] 812 (Bilateral) Head

[0135] 82 Roller Conveyor

[0136] 83 Flipping device

[0137] 831 (Fork-shaped) Flip Folding Plate

[0138] 832 (longitudinal) rotation axis

[0139] 833 Slot

[0140] 84 Gripper (of articulated arm robot 81)

[0141] 85, 86 Gripper (operating in parallel)

[0142] 9 Machine housing

Claims

1. A device for processing a plate-shaped workpiece, the device comprising: A movable worktable system, the movable worktable system is used to receive a plate-shaped workpiece, a registration unit, the registration unit being used for acquiring a target above the movable workbench system, a machining unit having a controllable linear machining path for machining the workpiece, and a computer unit for controlling the alignment between the machining unit and the workpiece and for spatially differentiating the predetermined machining according to the position of the workpiece, the position of the workpiece being determined based on the registered target, wherein the movable table system (2) has two identical tables (21, 22) on a common track arrangement (23), the common track arrangement (23) having a linear track area below the alignment unit (3) and the processing unit (4), both of which extend laterally to the linear track area, so that the tables (21, 22) can be moved linearly alternately along the common track arrangement (23) in a coordinated table movement direction to completely cross under the alignment unit (3) and the processing unit (4), so that the tables (21, 22) are controllable independently of each other by the computer unit (5); wherein the registration unit (3) has a linear orientation transverse to the direction of movement of the worktable and has at least two sensor areas for spatially detecting a target at least in the lateral edge area of ​​the worktable (21, 22) or in the lateral edge area of ​​the plate-like workpiece (6) located on the worktable during the passage of one of the worktables (21, 22) under the registration unit (3), so that the position of the workpiece is detectable and a signal is generated to end the moving-in movement of one of the worktables and to initiate the moving-out movement of the one of the worktables, so as to perform the predetermined processing on the workpiece on the one of the worktables when the workpiece on the one of the worktables has passed through the registration unit (3) and the processing unit (4); and wherein the processing unit is arranged parallel to the registration unit and has a controllable processing path so as to process the plate-like workpiece line by line, and A transport system is provided outside the processing shell (7) and inside the external machine shell (9), wherein the transport system is used to provide the plate-shaped workpiece (6) for processing on both sides, and the transport system workpiece (62) with one side processed can be directly transferred from one exit side of the common track arrangement (23) to the other exit side of the common track arrangement (23) through a flipping movement.

2. An apparatus according to claim 1, wherein the computer unit (5) is configured to independently control the two worktables (21, 22) with respect to the worktable movement direction, the worktable movement speed and the alternating inward and outward movement of the worktables (21, 22) for the purpose of loading and unloading plate-like workpieces (6), so as to feed the plate-like workpieces (6) from two opposite sides of the common track arrangement (23) to align the target (33) during the inward movement, to perform row-by-row processing according to the determined position of the target (33) during the outward movement, and to load and unload the corresponding worktables (21, 22) that have been completely moved out of the processing shell (7).

3. An apparatus according to any one of claims 1 to 2, wherein the computer unit (5) has a delay device for reversing the direction from the in-movement to the out-movement, and when the rear edge of the plate-like workpiece (6) has exceeded the processing path of the processing unit (4) or exceeded the detection area of ​​the alignment unit (3), depending on which of the processing unit and the alignment unit it passed last, the direction reversal is triggered first according to the distance between the alignment unit (3) and the processing unit (4).

4. An apparatus according to any one of claims 1 to 2, wherein the computer unit (5) includes different speed states for the in-movement and out-movement of the worktable (21, 22), the speed states being adapted to the sensing speed of the alignment unit (3) and the predefined processing speed of the processing unit (4), wherein the average speed of the in-movement is selected to be faster than the average speed of the out-movement.

5. An apparatus according to any one of claims 1 to 2, wherein the alignment unit (3) has flash lighting, which is used to limit target sensing to those areas of the workbench (21, 22) or the plate-like workpiece (6) located on the workbench (21, 22) in which the target (33) is expected.

6. An apparatus according to any one of claims 1 to 2, wherein one of the workbenches (21, 22) is provided inside the processing housing (7) to sense the target (33) through the alignment unit (3) during the moving-in movement, and is used for row-by-row processing through the processing unit (4) during the moving-out movement, wherein the other workbench (21, 22) is guided to load and unload the workpiece (6) in the moving-out state outside the processing housing (7).

7. An apparatus according to any one of claims 1 to 2, wherein two clamps (84; 85, 86) are arranged on the outside of the processing shell (7) and move transversely to the workbench and work in parallel, so as to load and unload the workbench (21, 22) respectively at each exit side of the common track arrangement (23).

8. The apparatus according to claim 1, wherein two articulated arm robots (81) are provided as the transport system, the articulated arm robot (81) having a double-sided rotatable head (812), the head (812) being configured to remove processed workpieces (62; 63) and store workpieces (61; 62) that have not been completely processed by rotating the head (812), and the articulated arm robot (81) being configured to provide an inherent flipping movement by transferring a workpiece (62) whose one side has been processed from one articulated arm robot (81) to another articulated arm robot.

9. An apparatus according to claim 1, wherein a roller conveyor (82) is provided as the transport system, the roller conveyor (82) being arranged adjacent to the common track (23) and being assisted by a doubly arranged gripper (85, 86), the grippers (85, 86) being able to move transversely to the movement of the workbench in order to remove processed workpieces (62; 63) and to store workpieces (61; 62) that have not yet been completely processed.

10. An apparatus according to claim 9, wherein a flipping device (83) is integrated in the roller conveyor (82), the flipping device (83) is formed as a fork-shaped flipping turntable (831), and the flipping turntable (831) is rotatable in the roller plane of the roller conveyor (82) on the longitudinal side of the flipping turntable (831), wherein the plate-shaped workpiece (6) can be moved into the fork opening of the fork-shaped flipping turntable (831) and moved out of the fork opening via the conveying rollers of the roller conveyor (82) after the rotational movement.

11. An apparatus according to claim 10, wherein the flipping device (83) is formed as a fork-shaped flipping turntable (831), so that the flipping device (83) is rotatable in the roller plane at its longitudinal side and can be fixed in a 90° position relative to the conveyor plane, wherein the plate-shaped workpiece (6) can be moved through the narrow gap (833) between the rotatable longitudinal side and the fork element of the fork-shaped flipping turntable (831) by the conveying roller of the roller conveyor (82) without flipping.

12. An apparatus according to any one of claims 1 to 2, wherein a clamp (85, 86) is arranged outside the processing shell (7) at each exit side of the common track arrangement (23) of the workbench system (2), and the clamp (85, 86) can be moved transversely to the workbench movement direction for loading and unloading the corresponding removed workbench (21, 22), and the clamp (85, 86) is formed to simultaneously remove the processed workpiece (62; 63) and place the unprocessed or not completely processed workpiece (61) in each case on the exit side of the common track arrangement (23), in each case as a double arrangement of clamps (85, 86) operating in parallel.

13. An apparatus according to any one of claims 1 to 2, wherein the alignment unit (3) and the processing unit (4) are arranged as parallel dual units directly adjacent to each other centrally above the common track arrangement (23) of the worktable system (2), so that the two worktables (21, 22) are sensed and processed from both sides by the same alignment unit (3) and processing unit (4) in each case, wherein the position of the target (33) detected in the instant alignment and processing state during the move-in movement of the worktable and deviating from the template processing pattern is immediately taken into account during the move-in movement of the worktable, so that the alignment of the exposure pattern is adapted to the position of the target (33) for the alignment of the processing pattern by allowing deviations of the data of the processing pattern.

14. The device according to any one of claims 1 to 2, wherein the alignment unit (3) is divided into two alignment devices (34), and the two alignment devices (34) are arranged on both sides of the processing unit (4), so that the state of simultaneous instant alignment and alternating processing is feasible for the two workbenches (21, 22).

15. An apparatus according to any one of claims 1 to 2, wherein the alignment unit (3) for target sensing has at least two cameras (31) arranged on a line transverse to the movement direction of the workbench, wherein the position along the line is adjustable according to the expected position of the target (33) on the workpiece (6).

16. Apparatus according to claim 15, wherein the camera (31) is equipped with a flash device to allow image capture with a shutter time in the longitudinal direction during table movement and further to allow image capture transversely to the table movement during slow or stopped table movement when a plurality of targets (33) are not arranged in the edge region of one of the tables (21, 22) or the workpiece (6) and when the other table (21, 22) is in a processing state.

17. Apparatus according to any one of claims 1 to 2, wherein the processing unit (4) is formed as a line-scanning exposure unit (41) in order to provide the photosensitive layer with an exposure pattern.

18. The device according to claim 17, wherein the exposure unit (41) has a controllable light source for exposing the workpiece (6) by means of a laser beam scanned by a polygon mirror.

19. The device according to any one of claims 1 to 2, wherein the machining unit (4) is formed as a laser machining unit in order to machine the workpiece (6) by means of a controlled laser beam by laser ablation or laser cutting.

20. Apparatus according to any one of claims 1 to 2, wherein the machining unit (4) is formed as a material deposition unit in order to machine a workpiece (6) by controlled application of material.

21. Apparatus according to claim 20, wherein the machining unit (4) is formed as a laser machining unit according to the laser induced forward transfer (LIFT) technique so as to apply the solid material of the donor layer substrate to the workpiece (6) as a coating pattern by controlled laser induced forward transfer.

22. The apparatus according to claim 20, wherein the machining unit (4) is formed as an inkjet unit (42) for applying the fluid material to the workpiece (6) as a coating pattern through a controllable nozzle.

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