A crystal bar anti-falling device and a single crystal furnace

Abstract

This application relates to the field of single-crystal silicon production, and particularly to a device for preventing crystal bars from falling and a single-crystal furnace. It includes at least two installation mechanisms and at least two self-locking mechanisms that sense the falling of crystal bars and block the falling of crystal bars. The self-locking mechanisms are connected to the installation mechanisms. The self-locking mechanisms include a sensing component for sensing the falling of crystal bars and a clamping component for clamping the falling crystal bars. The sensing component is movably connected to the clamping component. This application has the effect that the sensing component senses the falling of crystal bars, the clamping component clamps the falling crystal bars, the clamping component forms self-locking for the crystal bars, prevents the crystal bars from continuing to fall, reduces the situation of the single-crystal furnace being damaged and personal accidents caused by the falling of crystal bars, and also enables the crystal bars to remain intact, reducing economic losses.

Description

Technical Field

[0001] This application relates to the field of single crystal silicon production, and particularly to a device for preventing crystal bars from falling and a single crystal furnace. Background Art

[0002] A single crystal furnace is a commonly used device for growing single crystals in the field of semiconductor technology. The pulling head in the secondary chamber of the single crystal furnace pulls the formed crystal bar. During the working process, due to the rotation or vibration of the secondary chamber, the seed crystal or the tungsten wire rope breaks, causing the crystal bar to fall and damaging the single crystal furnace.

[0003] Regarding the above related technology, the inventor believes that during the working process, due to the rotation or vibration of the secondary chamber, the seed crystal or the tungsten wire rope breaks, causing the crystal bar to fall and damaging the single crystal furnace, and it may also cause personal accidents. Summary of the Invention

[0004] In order to improve the problem that during the working process, due to the rotation or vibration of the secondary chamber, the seed crystal or the tungsten wire rope breaks, causing the crystal bar to fall and damaging the single crystal furnace, and it may cause personal accidents, this application provides a device for preventing crystal bars from falling and a single crystal furnace.

[0005] In a first aspect, this application provides a device for preventing crystal bars from falling, adopting the following technical solution:

[0006] A device for preventing crystal bars from falling includes at least two installation mechanisms and at least two self-locking mechanisms that sense the falling of the crystal bar and block the falling of the crystal bar. The self-locking mechanism is connected to the installation mechanism. The self-locking mechanism includes a sensing component that senses the falling of the crystal bar and a clamping component that clamps the falling crystal bar. The sensing component is movably connected to the clamping component.

[0007] By adopting the above technical solution, the sensing component senses the falling of the crystal bar, the clamping component clamps the falling crystal bar, and the clamping component forms a self-locking for the crystal bar to prevent the crystal bar from continuing to fall, reducing the situation that the crystal bar falls and damages the single crystal furnace and causes personal accidents, and also enabling the crystal bar to remain intact and reducing economic losses. The automatic control mode of the device for preventing crystal bars from falling improves the working efficiency.

[0008] Optionally, the sensing component includes a sensor located above the crystal bar and an electromagnetic push rod that limits the position of the clamping component. The sensor is electrically connected to the electromagnetic push rod. The electromagnetic push rod is located below the clamping component and is movably connected to the clamping component.

[0009] By adopting the above technical solution, the sensor senses the falling of the crystal bar, the electromagnetic push rod receives the induction signal of the crystal bar, releases the limit on the clamping component, enables the two clamping components to clamp the falling crystal bar in time, thereby blocking the crystal bar from continuing to fall, shortening the reaction time of the clamping component, and improving the working efficiency.

[0010] Optionally, the clamping assembly includes a flap and at least one torsion spring. One end of the torsion spring is connected to the mounting mechanism, and the other end is connected to the flap. The end face of the flap near the crystal bar is an arc surface, and the two flaps form an interference fit with the clamped crystal bar.

[0011] By adopting the above technical solution, the torsion spring controls the movement of the flap. When the electromagnetic push rod releases the limit on the clamping assembly, the flap starts to work. The two flaps clamp the falling crystal bar and form an interference fit with the crystal bar, so as to stably clamp the crystal bar. Since the torsion spring generates an upward resistance to the falling crystal bar through the flap, it better completes the blocking of the falling crystal bar.

[0012] Optionally, the mounting mechanism includes a circular tube. One end of the circular tube extends into the crystal bar production equipment, and the other end is connected with a mounting piece. The electromagnetic push rod and the flap are both mounted on the side of the mounting piece close to the crystal bar.

[0013] By adopting the above technical solution, the mounting piece completes the fixation of the electromagnetic push rod and the flap, assists the clamping assembly to block the falling crystal bar, and increases the stability of the crystal bar anti-falling device.

[0014] Optionally, a U-shaped frame is arranged on the side of the mounting piece close to the crystal bar. The end of the flap far from the crystal bar extends between the two side walls of the U-shaped frame. An insertion rod is inserted through the U-shaped frame and the flap, and the flap is rotatably connected to the insertion rod. One torsion spring is installed at each end of the insertion rod extending out of the side wall of the U-shaped frame. One end of the torsion spring is inserted into the mounting piece, and the other end is inserted into the side of the flap.

[0015] By adopting the above technical solution, when the electromagnetic push rod releases the limit on the clamping assembly, the flap rotates around the insertion rod. Due to the action of the torsion spring, the two flaps are inclined upward to form a block for the falling crystal bar, reducing the situation of the crystal bar continuing to fall.

[0016] Optionally, the electromagnetic push rod is located below the flap and the U-shaped frame and is inserted into the flap.

[0017] By adopting the above technical solution, the electromagnetic push rod limits the flap, thereby limiting the clamping assembly. The electromagnetic push rod receives the induction signal of the sensor to control the flap to work, making the working process of the crystal bar anti-falling device form an automatic mode and improving the working efficiency.

[0018] In a second aspect, the present application provides a single crystal furnace, adopting the following technical solution:

[0019] A single crystal furnace includes a crystal bar anti-falling device, and the crystal bar anti-falling device is arranged in the auxiliary chamber.

[0020] By adopting the above technical solution, the crystal bar anti-falling device reduces the situation of crystal bar falling caused by problems in the auxiliary chamber, reduces the impact of crystal bar falling on the auxiliary chamber, and thus improves the service life of the single crystal furnace.

[0021] Optionally, a lifting head for lifting the crystal bar is provided at the top of the auxiliary chamber, and the sensor is arranged on the lifting head.

[0022] By adopting the above technical solution, the lifting head lifts the crystal bar, and the sensor can timely sense the situation of the crystal bar, so that the electromagnetic push rod can timely release the control of the flap and block the falling of the crystal bar, shortening the reaction time of the self-locking mechanism.

[0023] In summary, the present application includes at least one of the following beneficial technical effects:

[0024] 1. The induction component in the present application senses the falling of the crystal bar, the clamping component clamps the falling crystal bar, and the clamping component forms self-locking for the crystal bar to prevent the crystal bar from continuing to fall, reducing the situation of the single crystal furnace being damaged and personal accidents caused by the falling of the crystal bar, and also enabling the crystal bar to remain intact and reducing economic losses;

[0025] 2. The sensor in the present application senses the falling of the crystal bar, the electromagnetic push rod receives the induction signal of the crystal bar, releases the limit on the clamping component, so that the two clamping components can technically fix the falling crystal bar, thereby blocking the crystal bar from continuing to fall, shortening the reaction time of the clamping component, and improving work efficiency;

[0026] 3. The crystal bar anti-falling device in the present application reduces the situation of crystal bar falling caused by problems in the auxiliary chamber, reduces the impact of crystal bar falling on the auxiliary chamber, and thus improves the service life of the single crystal furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is the overall structural schematic diagram of the present application.

[0028] Figure 2 is the structural schematic diagram of the present application showing the limit of the electromagnetic push rod and the flap.

[0029] Figure 3 is the structural schematic diagram of the present application showing the release of the limit of the electromagnetic push rod on the flap.

[0030] Figure 4 is Figure 3 the partial enlarged view of A in

[0031] Description of reference numerals: 1, mounting mechanism; 11, circular tube; 12, mounting member; 2, self-locking mechanism; 21, induction assembly; 211, sensor; 212, electromagnetic push rod; 22, clamping assembly; 221, flap; 2211, connecting rod; 222, torsion spring; 3, crystal bar; 4, U-shaped bracket; 5, insertion rod; 6, auxiliary chamber; 61, lifting head. Detailed implementation manners

[0032] The following further elaborates on this application Figures 1-4 in conjunction with the accompanying drawings.

[0033] An embodiment of this application discloses a crystal bar anti-falling device and a single crystal furnace.

[0034] Referring to Figure 1 , a crystal bar anti-falling device includes two mounting mechanisms 1 connected to the production equipment of the crystal bar 3 and two self-locking mechanisms 2, and the self-locking mechanism 2 is fixedly connected to the mounting mechanism 1.

[0035] Referring to Figure 2 and Figure 3 , the mounting mechanism 1 includes a circular tube 11 and a mounting member 12. One end of the circular tube 11 extends into the production equipment of the crystal bar 3, and the other end thereof is connected to the mounting member 12. The mounting member 12 is a flange, and the mounting member 12 mounts the crystal bar anti-falling device on the production equipment of the crystal bar 3. A clamping plate 111 is arranged on the outer edge of the port of the circular tube 11 near the mounting member 12 along the circumferential direction. The clamping plate 111 is clamped at the port of the circular tube 11 and fixedly connected to the mounting member 12. A U-shaped bracket 4 is arranged on the side of the mounting member 12 close to the crystal bar 3.

[0036] The self-locking mechanism 2 includes an induction assembly 21 and a clamping assembly 22. The induction assembly 21 is inserted into the clamping assembly 22 and limits the clamping assembly 22. The induction assembly 21 senses the fall of the crystal bar 3 and releases the limit on the clamping assembly 22, so that the clamping assembly 22 clamps the falling crystal bar 3 to prevent the crystal bar 3 from continuing to fall.

[0037] The induction assembly 21 includes a sensor 211 and an electromagnetic push rod 212 electrically connected to the sensor 211. The sensor 211 is a weighing sensor. The sensor 211 is located above the crystal bar 3. The sensor 211 senses whether the weight of the crystal bar 3 is missing. The electromagnetic push rod 212 is fixedly connected to the side of the mounting member 12 close to the crystal bar 3. The electromagnetic push rod 212 is located below the clamping assembly 22 and is inserted into the clamping assembly 22.

[0038] The clamping assembly 22 includes a flap 221 and two torsion springs 222. A connecting rod 2211 is provided at one end of the flap 221 away from the crystal bar 3. A through hole is formed along the length direction of the connecting rod 2211. The connecting rod 2211 is located between the two side walls of the U-shaped frame 4. A plug rod 5 is inserted through the two side walls of the U-shaped frame 4. The plug rod 5 penetrates through the through hole of the connecting rod 2211, so that the flap 221 is connected to the U-shaped frame 4. The flap 221 is rotatably connected to the plug rod 5. One torsion spring 222 is sleeved on one end of the plug rod 5 extending out of the side wall of the U-shaped frame 4, and the other torsion spring 222 is sleeved on the other end of the plug rod 5 extending out of the side wall of the U-shaped frame 4. One end of the torsion spring 222 is fixedly connected to the mounting member 12, and the other end is fixedly connected to the side of the flap 221. The end face of the flap 221 close to the crystal bar 3 is an arc surface. The two flaps 221 form an interference fit with the crystal bar 3.

[0039] The electromagnetic push rod 212 is located below the flap 221 and the U-shaped frame 4. A plug hole is formed on the side of the connecting rod 2211 close to the electromagnetic push rod 212, and the electromagnetic push rod 212 is inserted through the plug hole.

[0040] A through hole can be directly formed on the flap 221, and the plug rod 5 can directly penetrate through the through hole of the flap 221, so that the flap 221 is connected to the U-shaped frame 4.

[0041] Refer to Figure 1 , a single crystal furnace includes a secondary chamber and a crystal bar anti-falling device. A lifting head 61 is provided at the top of the secondary chamber 6. The lifting head 61 lifts the crystal bar 3 in the secondary chamber 6. The sensor 211 is installed on the lifting head 61. The crystal bar anti-falling device is arranged in the secondary chamber 6 and below the lifting head 61.

[0042] The implementation principle of a crystal bar anti-falling device and a single crystal furnace in an embodiment of the present application is: Refer to Figure 2 and Figure 3 , when the secondary chamber 6 is in a normal working state, the electromagnetic push rod 212 is inserted into the plug hole on the connecting rod 2211 to limit the flap 221. When the two flaps 221 do not work, the flaps 221 are in a vertically upward state;

[0043] When the seed crystal or the tungsten wire rope breaks, the sensor 211 senses the lack of the weight of the ingot 3 on the lifting head 61, that is, it is judged that the ingot 3 has fallen. The sensor 211 sends a signal of the falling of the ingot 3. The electromagnetic push rod 212 receives this signal and controls the push rod to slide out of the insertion hole of the connecting rod 2211, releasing the limit on the flap 221. Under the action of gravity and the torsion spring 222, the flap 221 flips from the vertical direction towards the center of the secondary chamber 6. The two flaps 221 come into contact with the falling ingot 3. The downward falling force of the ingot 3 is downward, and the torsion spring 222 exerts an upward resistance on the flap 221, so that the torsion spring 222 and the flap 221 form a self-locking for the falling ingot 3, blocking its continuous fall. At the same time, due to the interference fit between the two arc surfaces of the two flaps 221 and the ingot 3, the clamping of the ingot 3 by the clamping assembly 22 is increased, and then the staff can operate on the ingot 3 again.

[0044] The above are all the preferred embodiments of the present application, and the protection scope of the present application is not limited thereby. Therefore, all equivalent changes made according to the structure, shape and principle of the present application shall be covered within the protection scope of the present application.

Claims

1. A crystal bar anti-falling device, characterized in that: It includes at least two installation mechanisms (1) and at least two self-locking mechanisms (2) that sense the falling of the crystal bars (3) and block the falling of the crystal bars (3). The self-locking mechanism (2) is connected to the installation mechanism (1). The self-locking mechanism (2) includes a sensing component (21) that senses the falling of the crystal bar (3) and a clamping component (22) that clamps the falling crystal bar. The sensing component (21) is movably connected to the clamping component (22); The sensing component (21) includes a sensor (211) located above the crystal bar (3) and an electromagnetic push rod (212) that limits the clamping component (22). The sensor (211) is electrically connected to the electromagnetic push rod (212). The electromagnetic push rod (212) is located below the clamping component (22) and is movably connected to the clamping component (22); The clamping component (22) includes a flap (221) and at least one torsion spring (222). One end of the torsion spring (222) is connected to the installation mechanism (1), and the other end is connected to the flap (221). The end face of the flap (221) close to the crystal bar (3) is an arc surface. The two flaps (221) form an interference fit with the clamped crystal bar (3); The installation mechanism (1) includes a circular tube (11). One end of the circular tube (11) extends into the production equipment of the crystal bar (3), and the other end is connected with a mounting part (12). The electromagnetic push rod (212) and the flap (221) are both installed on the side of the mounting part (12) close to the crystal bar (3); A U-shaped frame (4) is arranged on the side of the mounting part (12) close to the crystal bar (3). The end of the flap (221) away from the crystal bar (3) extends between the two side walls of the U-shaped frame (4). An insertion rod (5) is inserted through the U-shaped frame (4) and the flap (221). The flap (221) is rotatably connected to the insertion rod (5). One torsion spring (222) is installed at each end of the insertion rod (5) extending out of the side wall of the U-shaped frame (4). One end of the torsion spring (222) is inserted into the mounting part (12), and the other end is inserted into the side of the flap (221); The electromagnetic push rod (212) is located below the flap (221) and the U-shaped frame (4) and is inserted into the flap (221); When the two flap plates (221) are not working, the flap plates (221) are in a vertically upward state. The ingot (3) falls, and the sensor (211) sends a signal indicating the fall of the ingot (3). The electromagnetic push rod (212) receives this signal and controls the push rod to slide out of the insertion hole of the connecting rod (2211), releasing the limit on the flap plate (221). Under the action of gravity and the torsion spring (222), the flap plate (221) flips from the vertical direction towards the center direction. The two flap plates (221) come into contact with the falling ingot (3). The downward falling force of the ingot (3) is downward, and the torsion spring (222) exerts an upward resistance on the flap plate (221), so that the torsion spring (222) and the flap plate (221) form a self-locking for the falling ingot (3), blocking its continued fall. At the same time, due to the interference fit between the two arc surfaces of the two flap plates (221) and the ingot (3), the clamping of the clamping assembly (22) on the ingot (3) is increased.

2. A single crystal furnace, characterized in that: It includes the ingot anti-falling device according to claim 1, and the ingot anti-falling device is arranged in the auxiliary chamber (6).

3. A single crystal furnace according to claim 2, characterized in that: A lifting head (61) for lifting the ingot (3) is arranged at the top of the auxiliary chamber (6), and the sensor (211) is arranged on the lifting head (61).

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