Systems for collecting liquid samples

Abstract

Systems and methods are described to determine whether a sample delivered from a remote sampling system via a transmission line contains a suitable sample for analysis by an analysis system. System embodiments include, but are not limited to: a sample receiving line configured to receive a liquid segment; a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream of the first location; and a controller configured to record a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states before the controller records a change in state of the first detector.

Description

[0001] This application is a divisional application of the Chinese invention patent application with application number 201680037720.2, application date June 24, 2016, and invention name “System for Collecting Liquid Samples”. Background Art

[0002] In many laboratory environments, it is often necessary to analyze a large number of chemical or biological samples simultaneously. In order to simplify these processes, the manipulation of samples has been mechanized. This mechanized sampling can be referred to as automatic sampling and can be performed using an automatic sampling device or an automatic sampler.

[0003] Inductively coupled plasma (ICP) spectrometry is an analytical technique commonly used to determine trace element concentrations and isotope ratios in liquid samples. ICP spectrometry uses an electromagnetically generated partially ionized argon plasma that reaches temperatures of approximately 7,000 K. When a sample is introduced into the plasma, the high temperatures cause the sample atoms to become ionized or emit light. Since each chemical element produces a characteristic mass or emission spectrum, measuring the spectrum of the emitted mass or light allows the elemental composition of the original sample to be determined.

[0004] The sample introduction system can be used to introduce a liquid sample into an ICP spectrometry instrument (e.g., an inductively coupled plasma mass spectrometer (ICP / ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), etc.) or other sample detector or analytical instrument for analysis. For example, the sample introduction system can remove an aliquot of a liquid sample from a container and then transport the aliquot to a nebulizer, which converts the aliquot into a polydisperse aerosol suitable for ionization in a plasma through the ICP spectrometry instrument. The aerosol is then classified in a spray chamber to remove larger aerosol particles. Upon leaving the spray chamber, the aerosol is introduced into the plasma for analysis by the plasma torch assembly of the ICP-MS or ICP-AES instrument. Summary of the invention

[0005] Systems and methods are described to determine whether a sample delivered from a remote sampling system through a delivery line contains a suitable sample to be analyzed by an analysis system. System embodiments include, but are not limited to: a sample receiving line configured to receive a liquid segment; a first detector configured to detect the liquid segment at a first location in the sample receiving line; a second detector configured to detect the liquid segment at a second location in the sample receiving line downstream of the first location; and a controller configured to record a continuous liquid segment in the sample receiving line when the first detector and the second detector match detection states before the controller records a change in state of the first detector.

[0006] This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] The detailed description is described with reference to the accompanying drawings.Any dimensions included in the drawings are provided as examples only and are not meant to limit the present disclosure.

[0008] Figure 1 is a partial line diagram illustrating a system configured to analyze a sample transported over a long distance according to an exemplary embodiment of the present disclosure.

[0009] Figure 2A is an environmental diagram illustrating a remote sampling device used in a remote sampling system according to an exemplary embodiment of the present disclosure.

[0010] Figure 2B is an environmental diagram illustrating a remote sampling device used in a remote sampling system according to an exemplary embodiment of the present disclosure.

[0011] Figure 3A is an environmental diagram illustrating an analysis device used in an analysis system according to an exemplary embodiment of the present disclosure.

[0012] Figure 3B is an environmental diagram illustrating an analysis device used in an analysis system according to an exemplary embodiment of the present disclosure.

[0013] Figure 4 is a partial line diagram illustrating an analysis system within a system configured to analyze a sample transported over a long distance according to an exemplary embodiment of the present disclosure.

[0014] Figure 5 is an example of an exemplary embodiment according to the present disclosure that can be Figure 4 Partial line diagram of the detector used within the analytical system shown in .

[0015] Figure 6 is an environmental diagram illustrating an analysis system having a plurality of analysis devices to analyze samples received from a remote sampling system according to an exemplary embodiment of the present disclosure.

[0016] Figure 7 is a diagrammatic illustration of a system including a sample receiving line and a detector configured to determine when the sample receiving line contains a continuous liquid segment between detectors according to an exemplary embodiment of the present disclosure.

[0017] Figure 8is a partial cross-section of a sample transport line containing multiple segments of sample obtained by a remote sampling system according to an exemplary embodiment of the present disclosure.

[0018] Fig. 9 is a timeline illustrating a plurality of liquid sample segments supplied to a sample receiving line and recorded by two detectors according to an exemplary embodiment of the present disclosure.

[0019] Fig.10 is a flow chart illustrating a method for determining when a sample receiving line contains a continuous liquid segment between detectors according to an exemplary embodiment of the present disclosure.

[0020] Fig.11 is a process flow diagram of a control system for monitoring and controlling process operations based on chemical detection limits according to an exemplary embodiment of the present disclosure.

[0021] Fig.12 is a schematic diagram of a processing facility incorporating multiple remote sampling systems according to an exemplary embodiment of the present disclosure.

[0022] Fig.13 is a graph illustrating metal contamination of a chemical bath over time using data points representing manual sampling and data points obtained by an automated system according to an exemplary embodiment of the present disclosure. DETAILED DESCRIPTION

[0023] Overall reference Figures 1 to 13, describes an exemplary system configured to analyze samples transported over long distances. In an exemplary embodiment, one or more samples may be analyzed by multiple analysis systems, wherein such analysis systems may include different analysis techniques. System 100 includes an analysis system 102 at a first location. System 100 may also include one or more remote sampling systems 104 at a second location away from the first location. For example, one or more remote sampling systems 104 may be positioned near a chemical source, such as a chemical storage tank, a chemical processing tank (e.g., a chemical bath), a chemical transportation line or pipeline, etc. (e.g., a second location) for analysis by the analysis system 102, wherein the analysis system 102 may be positioned away from (multiple) remote sampling systems 104, such as an analysis center for a production facility (e.g., a first location). System 100 may also include one or more remote sampling systems 104 at a third location, a fourth location, etc., wherein the third location and / or the fourth location are away from the first location. In an embodiment, the third location, the fourth location, and other locations of the remote sampling system 104 may be away from the corresponding other locations of other remote sampling systems 104. For example, one remote sampling system 104 may be located at a water line (e.g., a deionized water delivery line), while one or more other remote sampling systems 104 may be located at a chemical storage tank, a chemical processing tank (e.g., a chemical bath), a chemical delivery line or pipeline, etc. In some embodiments, the system 100 may also include one or more remote sampling systems 104 at a first location (e.g., near the analysis system 102). For example, the sampling system 104 at the first location may include an automatic sampler coupled to the analysis system 102. The one or more sampling systems 104 are operable to receive samples from the first location, the second location, the third location, the fourth location, etc., and the system 100 is operable to transmit the samples to the analysis system 102 for analysis.

[0024] The remote sampling system 104 can be configured to receive a sample 150 and prepare the sample 150 for transmission (e.g., transmission to the analysis system 102) and / or analysis. In an embodiment, the remote sampling system 104 can be set at different distances from the analysis system 102 (e.g., 1 meter, 5 meters, 10 meters, 30 meters, 50 meters, 100 meters, 300 meters, 1000 meters, etc.). In an embodiment, the remote sampling system 104 may include a remote sampling device 106 and a sample preparation device 108. The sample preparation device 108 may also include a valve 148, such as a flow-through valve. In an embodiment, the remote sampling device 106 may include a device configured to collect samples from a sample stream or source (e.g., liquids such as wastewater, rinse water, chemicals, industrial chemicals, etc., gases such as air samples and / or contaminants that will come into contact with the liquid, etc.). The remote sampling device 106 may include components such as pumps, valves, tubing, sensors, etc., suitable for obtaining a sample from a sample source and transmitting the sample over the distance to the analysis system 102. The sample preparation device 108 may include a device configured to prepare a sample 150 collected from the remote sampling device 106 using a diluent 114, an internal standard 116, a carrier 154, etc., such as to provide a specific sample concentration, a spiked sample, a calibration curve, etc., and may be rinsed with a rinse solution 158.

[0025] In some embodiments, the sample 150 (e.g., prepared sample 152) may be prepared for transmission and / or analysis using one or more preparation techniques, including but not necessarily limited to: dilution, pre-concentration, addition of one or more calibration standards, and the like. For example, a viscous sample 150 may be remotely diluted (e.g., by a sample preparation device 108) before being transmitted to the analysis system 102 (e.g., to prevent the sample 150 from separating during transmission). As described herein, a sample that has been transmitted from a remote sampling system 104 may be referred to as a sample 150, wherein a sample 150 may also refer to a prepared sample 152. In some embodiments, sample dilution may be dynamically adjusted (e.g., automatically adjusted) to move (multiple) samples 150 through the system at a desired rate. For example, when the sample 150 moves through the system 100 too slowly (e.g., as measured by the transmission time from the second location to the first location), the diluent 114 added to a particular sample or sample type increases. In another example, one liter (1 L) of seawater may be remotely pre-concentrated before being delivered to the analysis system 102. In another example, electrostatic concentration is used on material from an air sample to pre-concentrate possible atmospheric pollutants. In some embodiments, the system 100 automatically performs online dilution and / or calibration. For example, the sample preparation device 108 can add one or more internal standards to a sample delivered to the analysis system 102 to calibrate the analysis system 102.

[0026] In an embodiment of the present disclosure, the analysis system 102 may include a sample collector 110 and / or a sample detector 130 configured to collect a sample 150 from a sample transmission line 144 coupled between the analysis system 102 and one or more remote sampling systems. The sample collector 110 and / or the sample detector 130 may include components such as pumps, valves, pipes, ports, sensors, etc. to receive the sample 150 from the one or more remote sampling systems 104 (e.g., via one or more sample transmission lines). For example, where the system 100 includes multiple remote sampling systems 104, each remote sampling system may include a dedicated sample transmission line 144 to couple to a separate portion of the sample collector 110 or to a separate sample collector 110 of the analysis system 102. Additionally, the analysis system 102 may include a sampling device 160 configured to collect the sample 150 local to the analysis system 102 (e.g., a local autosampler).

[0027] The analysis system 102 also includes at least one analysis device 112, which is configured to analyze the sample to determine trace element concentrations, isotope ratios, etc. (e.g., in a liquid sample). For example, the analysis device 112 may include an ICP spectrometry instrument, including but not limited to an inductively coupled plasma mass spectrometer (ICP / ICP-MS), an inductively coupled plasma atomic emission spectrometer (ICP-AES), etc. In an embodiment, the analysis system 102 includes a plurality of analysis devices 112 (i.e., more than one analysis device). For example, the system 100 and / or the analysis system 102 may include a plurality of sampling loops, each sampling loop introducing a portion of the sample into a plurality of analysis devices 112. As another example, the system 100 and / or the analysis system 102 may be configured with a multi-position valve so that a single sample can be quickly and continuously introduced into a plurality of analysis devices 112. Figure 6 A remote sampling system 104 is shown in fluid communication with an analysis system 102, wherein the analysis system 102 includes a multi-position valve 600 coupled to three analysis devices (shown as an ICPMS 602, an ion chromatography (IC) column 604, and a Fourier transform infrared spectrometer (FTIR) 606) for analyzing samples received from the remote sampling system 104. Figure 6 An embodiment in which the analysis system 102 includes three analysis devices is shown, and the analysis system 102 may include fewer (e.g., less than three) or more (e.g., more than three) analysis devices 112. In an embodiment, the analysis device 112 may include, but is not limited to, ICPMS (e.g., for trace metal determination), ICPOES (e.g., for trace metal determination), ion chromatography (e.g., for anion and cation determination), liquid chromatograph (LC) (e.g., for organic pollutant determination), FTIR infrared (e.g., for chemical composition and structural information determination), particle counter (e.g., for detecting undissolved particles), moisture analyzer (e.g., for detecting water in a sample), gas chromatograph (GC) (e.g., for detecting volatile components), etc. In an embodiment, multiple analysis devices 112 may be located at the same location as the remote sampling device 104, and the system 100 may include one or more additional analysis devices 112 located away from the remote sampling system 104 for performing additional or different sample analyses than those performed by the multiple analysis devices 112. Alternatively or additionally, the plurality of analysis devices 112 may be located at a different location than the remote sampling system 104 .

[0028] The system 100 and / or the analysis system 102 may be configured to report the analyte concentration at a location over time (see below). Fig.13Further shown). In some embodiments, the analysis device 112 can be configured to detect one or more trace metals in the sample 150. In other embodiments, the analysis device 112 can be configured for ion chromatography. For example, ions and / or cations can be collected in the sample 150 and transported to the chromatographic analysis device 112. In other embodiments, organic molecules, proteins, etc. can be collected in the sample and transmitted to a high-resolution time-of-flight (HR-ToF) mass spectrometer analysis device 112 (e.g., using a nebulizer 156). Therefore, the system described herein can be used for various applications, including but not limited to: pharmaceutical applications (e.g., with a central mass spectrometer analysis device connected to multiple pharmaceutical reactors), waste monitoring of one or more waste streams, semiconductor manufacturing facilities, and the like. For example, a waste stream can be continuously monitored for contaminants and transferred to a tank when a contaminant is detected. As another example, one or more chemical streams can be continuously monitored by analyzing samples obtained by one or more remote sampling systems 104 connected to the analysis system 102, whereby pollution limits can be set for each chemical stream. When a contaminant exceeding the pollution limit of a particular stream is detected, the system 100 can provide an alarm.

[0029] The remote sampling system 104 can be configured to selectively couple with at least one sample transmission line 144, such that the remote sampling system 104 is operable to be in fluid communication with the sample transmission line 144 to supply a continuous liquid sample segment 150 to the sample transmission line 144. For example, the remote sampling system 104 can be configured to collect the sample 150 and supply the sample 150 to the sample transmission line 144 using, for example, a flow-through valve 148, thereby coupling the remote sampling system 104 to the sample transmission line 144. The supply of the sample 150 to the sample transmission line 144 can be referred to as a "drop". The sample transmission line 144 can be coupled to a gas supply 146 and can be configured to deliver gas from a second location (and possibly a third location, a fourth location, etc.) to a first location. In this manner, the liquid sample segment supplied by the remote sampling system 104 is collected in a gas stream and delivered to a location of the analysis system 102 using gas pressure sample transport.

[0030] In some embodiments, the gas in the sample transmission line 144 may include an inert gas, including but not necessarily limited to: nitrogen, argon, etc. In some embodiments, the sample transmission line 144 may include an unsegmented or minimally segmented tube having an inner diameter of eight tenths of a millimeter (0.8 mm). However, the inner diameter of eight tenths of a millimeter is provided only as an example and is not meant to limit the present disclosure. In other embodiments, the sample transmission line 144 may include an inner diameter greater than eight tenths of a millimeter and / or an inner diameter less than eight tenths of a millimeter. In some embodiments, the pressure in the sample transmission line 144 may be in a range from at least about four (4) bars to ten (10) bars. However, this range is provided only as an example and is not meant to limit the present disclosure. In other embodiments, the pressure in the sample transmission line 144 may be greater than ten bars and / or less than four bars. In addition, in some specific embodiments, the pressure in the sample transmission line 144 may be adjusted so that the sample 150 is dispensed in a generally upward direction (e.g., vertically). Such a vertical orientation may facilitate the transport of samples collected at a lower location than the analysis system 102 (eg, at a sample source and remote sampling system located “downstairs” relative to the analysis system 102 ).

[0031] In some examples, the sample transmission line 144 can be coupled to a remote sampling system 104 in fluid communication with a first liquid bath (or chemical bath) and an analytical system 102 in fluid communication with a second liquid bath (or chemical bath). In an embodiment of the present disclosure, the system 100 may include one or more leak sensors (e.g., mounted in a water tank) to prevent or minimize overflow at a first location and / or one or more remote locations (e.g., a second location, a third location, a fourth location, etc.). A pump such as a syringe pump or a vacuum pump can be used to load the sample into the sampling device 106. A valve 148 can be used to select a sample 150 at the remote sampling system 104, and the sample 150 can be supplied to the sample transmission line 144, which can transfer the sample 150 to the analytical system 102 at the first location. Another pump (e.g., a diaphragm pump) can be used to extract effluent on the analytical system 102 and pull the sample 150 from the sample transmission line 144.

[0032] The system 100 can be implemented as a closed sampling system, wherein the gas and sample in the sample transmission line 144 are not exposed to the surrounding environment. For example, a housing and / or a sheath can enclose one or more components of the system 100. In some embodiments, one or more sample lines of the remote sampling system 104 can be cleaned between sample transfers. In addition, the sample transmission line 144 can be cleaned between samples 150 (e.g., using a cleaning solution).

[0033] The sample transmission line 144 can be configured to selectively couple with the sample receiving line 162 (e.g., sample loop 164) at the first position, so that the sample loop 164 is operable to be in fluid communication with the sample transmission line 144 to receive a continuous liquid sample segment. The transmission of the continuous liquid sample segment to the sample loop 164 can be referred to as "collection". The sample loop 164 is also configured to selectively couple with the analysis device 112, so that the sample loop 164 is operable to be in fluid communication with the analysis device 112 to supply the continuous liquid sample segment to the analysis device 112 (e.g., when the system 100 has determined that sufficient liquid sample segments are available for analysis by the analysis system 102). In an embodiment of the present disclosure, the analysis system 102 may include one or more detectors configured to determine that the sample loop 164 contains a sufficient amount of continuous liquid sample segments for analysis by the analysis system 102. In one example, the sufficient amount of continuous liquid sample may include sufficient liquid sample to be sent to the analysis device 112. Another example of a continuous liquid sample of sufficient volume may include a continuous liquid sample in the sample receiving line 162 between the first detector 126 and the second detector 128 (e.g., Figure 7 ). In an embodiment, the first detector 126 and / or the second detector 128 may include an optical analyzer 132, an optical sensor 134, a conductivity sensor 136, a metal sensor 138, a conductive sensor 140, and / or a pressure sensor 142. It is contemplated that the first detector 126 and / or the second detector 128 may include other sensors. For example, the first detector 126 may include an optical analyzer 132 that detects when the sample 150 enters the sample loop 164, and the second detector 128 may include another optical analyzer 132 that detects when the sample loop 164 is filled. This example may be referred to as a "successful acquisition". It should be noted that the optical analyzer 132 is provided only as an example and is not meant to limit the present disclosure. Other exemplary detectors include, but are not necessarily limited to: optical sensors, conductivity sensors, metal sensors, conductive sensors, pressure sensors, etc.

[0034] Reference Figure 7, describes a system 100 that can determine when a continuous liquid sample segment is contained in a sample receiving line 162 and / or when a sample loop 164 contains a sufficient amount of a continuous liquid sample segment to be analyzed (e.g., by the analysis system 102). In an exemplary embodiment, the first detector 126 can be configured to determine two or more states, which can indicate the presence of liquid (e.g., the liquid sample segment) at a first location in the sample receiving line 162, the absence of liquid at the first location in the sample receiving line 162, and so on. For example, a first state (e.g., represented by a first logic level, such as a high state) can be used to indicate the presence of a liquid sample segment at a first location in the sample receiving line 162 (e.g., near the first detector 126), and a second state (e.g., represented by a second logic level, such as a low state) can be used to indicate the absence of a liquid sample segment (e.g., a void or gas in the sample receiving line 162) at the first location in the sample receiving line 162.

[0035] In some embodiments, the first detector 126 including the pressure sensor 142 can be used to detect the presence of liquid at a first location in the sample receiving line 162 (e.g., by detecting an increase in pressure in the sample receiving line 162 near the first location when the liquid is present). The first detector 126 can also be used to detect the absence of liquid at the first location in the sample receiving line 162 (e.g., by detecting a decrease in pressure in the sample receiving line 162 near the first location). However, the pressure sensor is provided by way of example and is not meant to limit the present disclosure. In other embodiments, the first detector 126 including the optical sensor 134 can be used to detect the presence of liquid at a first location in the sample receiving line 162 (e.g., by detecting a decrease in light passing through the sample receiving line 162 near the first location when the liquid is present). The first detector 126 can also be used to detect the absence of liquid at the first location in the sample receiving line 162 (e.g., by detecting an increase in light passing through the sample receiving line 162 near the first location). In these examples, the first detector 126 can report the presence of a liquid sample at the first location as a high state and report the absence of a liquid sample at the first location as a low state.

[0036] In some embodiments, the system 100 may also include one or more additional detectors, such as a second detector 126, a third detector, etc. For example, the second detector 126 may also be configured to determine two or more states, which may indicate the presence of liquid (e.g., liquid sample segment) at a second location in the sample receiving line 162, the absence of liquid at the second location in the sample receiving line 162, etc. For example, a first state (e.g., represented by a first logic level, such as a high state) may be used to indicate the presence of a liquid sample segment at a second location in the sample receiving line 162 (e.g., near the second detector 126), and a second state (e.g., represented by a second logic level, such as a low state) may be used to indicate the absence of a liquid sample segment at the second location in the sample receiving line 162.

[0037] In some embodiments, a second detector 126 including a pressure sensor 142 can be used to detect the presence of liquid at a second location in the sample receiving line 162 (e.g., by detecting an increase in pressure in the sample receiving line 162 near the second location when liquid is present). The second detector 126 can also be used to detect the absence of liquid at the second location in the sample receiving line 162 (e.g., by detecting a decrease in pressure in the sample receiving line 162 near the second location). However, the pressure sensor is provided by way of example and is not meant to limit the present disclosure. In other embodiments, a second detector 126 including an optical sensor 134 can be used to detect the presence of liquid at a second location in the sample receiving line 162 (e.g., by detecting a decrease in light passing through the sample receiving line 162 near the second location when liquid is present). The second detector 126 can also be used to detect the absence of liquid at the second location in the sample receiving line 162 (e.g., by detecting an increase in light passing through the sample receiving line 162 near the second location). In these examples, the second detector 126 can report the presence of a liquid sample at the second location as a high state and report the absence of a liquid sample at the second location as a low state.

[0038] The controller 118 can be communicatively coupled to the one or more detectors 126 and configured to register liquid at a first location in the sample receiving line 162, at a second location in the sample receiving line 162, at another location in the sample receiving line 162, etc. For example, the controller 118 initiates a detection operation using the first detector 126, and liquid at a first location in the sample receiving line 162 can be registered by the controller 118 (e.g., when the controller 118 registers a change from a low to a high state determined by the first detector 126). The first detector 126 can then be monitored (e.g., continuously, at least substantially continuously), and the controller 118 can subsequently register the absence of liquid at the first location in the sample receiving line 162 (e.g., when the controller 118 registers a change from a high to a low state determined by the first detector 126).

[0039] Similarly, the controller 118 may also initiate a detection operation using the second detector 126, and the presence of liquid at the second location in the sample receiving line 162 may be recorded by the controller 118 (e.g., when the controller 118 records a change from a low to a high state determined by the second detector 126). The second detector 126 may then be monitored (e.g., continuously, at least substantially continuously), and the controller 118 may subsequently record the absence of liquid at the second location in the sample receiving line 162 (e.g., when the controller 118 records a change from a high to a low state determined by the second detector 126).

[0040] The controller 118 and / or one or more detectors 126 may include or affect the operation of timers to provide timing of certain events for the system 100 (e.g., the presence or absence of liquid at various locations in the sample receiving line 162 at a particular time). As an example, the controller 118 may monitor the timing of changes in state recorded by various (multiple) detectors to determine whether to allow the liquid sample to be directed to the analysis system 102 (e.g., as opposed to directing the liquid to waste or a holding loop). As another example, the controller 118 may monitor the time that the liquid spends in the sample receiving line 162 and / or the sample loop 164 based on the changes in state recorded by the controller 118 via the (multiple) detectors 126.

[0041] Liquid sample segment interruption and determination of suitable liquid segment

[0042] Typically, when a sample is obtained close to an associated analytical device (e.g., an autosampler next to the analytical device), the sample can span the entire distance between the sample source and the analytical device without requiring a large sample volume. However, for long-distance transmission of the sample, filling the entire transmission line 144 between the remote sampling system 104 and the analytical system 102 (e.g., up to hundreds of meters of sample length) may be prohibitive or undesirable, for example due to environmental issues when handling unused sample portions, viscosity of the sample, etc. Therefore, in an embodiment, rather than the remote sampling system 104 filling the entire transmission line 144 with the sample, a liquid sample segment representing a portion of the total transmission line 144 volume is sent through the transmission line 144 for analysis by the analytical system 102. For example, although the transmission line 144 may be hundreds of meters long, at any given time during delivery to the analytical system 102, the sample may occupy approximately one meter or less of the transmission line 144. Although sending a liquid sample segment through the line can reduce the amount of sample sent from the remote sample system 104, the sample may cause bubbles or gaps / voids in the sample delivery line 144 during delivery to the analysis system 102. Such bubbles or gaps / voids may form due to conditions associated with the long-distance transmission of the sample (e.g., changes in orifices between tubes during delivery), due to interaction with residual cleaning fluid used to clean the line between samples, due to reaction with residual fluid in the line, due to pressure differences along the span of the transmission line, etc. For example, if Figure 8 As shown in FIG. 3 , the liquid sample 800 can be sent from the remote sampling system 104 to the first location where the analysis system 102 is located via the delivery line 144. The volume of the total sample obtained by the remote sampling system 104 is represented by V in FIG. TOT As shown, during transmission from the remote sampling system 104, gaps or voids 802 may form in the transmission line 144. The gaps or voids 802 separate multiple sample segments 804 that do not contain a sufficient amount or volume of sample for analysis by the analysis system 102. Such sample segments 804 may be separated from each other in a volume (shown as V) sufficient for analysis by the analysis system 102. SAMPLE ) before and / or after the larger sample segment 806. In an embodiment, the amount of sample collected by the remote sampling system 104 (e.g., V TOT ) to provide a sufficient amount of sample 150 for analysis by the analysis device 112. For example, the volume ratio of the amount of sample 150 "put in" to the amount of sample 150 "collected" (e.g., V TOT / V SAMPLE) is at least about one and one quarter (1.25). However, this ratio is provided only as an example and is not meant to limit the present disclosure. In some embodiments, the ratio is greater than one and one quarter, while in other embodiments, the ratio is less than one and one quarter. In one example, two. five milliliters (2.5 mL) of sample 150 (e.g., concentrated sulfuric acid or nitric acid) is injected, and one milliliter (1 mL) of sample 150 is collected. In another example, one. five milliliters (1.5 mL) of sample 150 is injected, and one milliliter (1 mL) of sample 150 is collected. In embodiments of the present disclosure, the amount of sample 150 "injected" is adjusted to account for the distance between the first position and the second position, the amount of sample transmission line between the first position and the second position, the pressure in the sample transmission line 144, and the like. Typically, V TOT / V SAMPLE The ratio of may be greater than 1 to account for the formation of gaps / voids 802 and sample segments 804 in the sample transmission line 144 during transmission.

[0043] The system 100 can select which of the plurality of remote sampling systems 104 should send its corresponding sample to the analysis system 102 (e.g., "drop in"), whereby the detector 126 facilitates determining whether sufficient sample is present (e.g., V in the sample loop 164). SAMPLE ) is sent to the analysis system 102 (e.g., "acquisition"), or if there is a void or gap in the line (e.g., between the detectors 126) such that the sample should not be sent to the analysis system 102 at that particular time. If bubbles or gaps are present (e.g., in the sample loop 164), their presence can compromise the accuracy of the sample analysis, particularly if the sample is diluted or further diluted at the analysis system 102 prior to introduction to the analysis device 112, as the analysis device 112 may analyze a "blank" solution.

[0044] In some embodiments, the system 100 can be configured to determine when a continuous liquid sample segment (e.g., sample segment 806) is contained in the sample receiving line 162 and / or the sample loop 164, so that the system 100 can avoid transmitting gaps or voids 802 or smaller sample segments 804 to the analysis device 112. For example, the system 100 may include a first detector 126 at a first location along the sample receiving line 162 and a second detector 126 at a second location along the sample receiving line 162 (e.g., downstream of the first location). The system 100 may also include a sampling loop 164 between the first detector 126 and the second detector 126. In embodiments, such as in at least two flow path configurations (e.g., Figure 3A A first flow path configuration of valve 148 is shown in; Figure 3B148, etc.) can be positioned between the first detector 126 and the sample loop 164 and between the second detector 126 and the sample loop 164. In an embodiment of the present disclosure, the system 100 can determine that a continuous liquid sample segment is contained in the sample receiving line 162 and / or the sample loop 164 by simultaneously recording the liquid at the first position and the liquid at the second position without recording a change in state from high to low via the first detector 126 at the first position. In other words, the liquid sample has been continuously transferred from the first detector 126 to the second detector 126 without a change in state detected by the first detector 126 until the second detector 126 recognizes the presence of the liquid sample.

[0045] In an exemplary embodiment where two or more detectors are used to determine when a sample receiving line contains a continuous liquid segment between the detectors, the liquid segment is received in the sample receiving line. Figure 7 , the sample receiving line 162 receives the liquid sample segment. Then, the liquid segment is recorded at a first location in the sample receiving line by initiating a detection operation using a first detector configured to detect the presence and / or absence of the liquid segment at the first location in the sample receiving line. For example, referring to Figure 7 , the first detector 126 detects the liquid sample segment at the first location in the sample receiving line 162 as a change in state from low to high. Fig. 9 , a liquid sample segment can be detected at a first location at time t1 and t5. Then, after recording the liquid segment at the first location, the first detector is monitored. For example, referring to Figure 7 , the first detector 126 is monitored by the controller 118, and the first detector 126 detects the absence of the liquid sample segment at the first location in the sample receiving line 162 as a change in state from high to low. Fig. 9 , the first location is monitored (eg, continuously, at least substantially continuously) beginning at times t1 and t5, and the absence of the liquid sample segment may be detected at the first location at times t3 and t6.

[0046] Similarly, a liquid segment is recorded at a second location in the sample receiving circuit by initiating a detection operation using a second detector configured to detect the presence and / or absence of the liquid segment at the second location in the sample receiving circuit. Figure 7 , the second detector 126 detects the liquid sample segment at the second location in the sample receiving line 162 as a change in state from low to high. Fig. 9 , a liquid sample segment can be detected at the second location at time t2 and t7. Then, after recording the liquid segment at the second location, the second detector is monitored. For example, referring to Figure 7 , the second detector 126 is monitored by the controller 118, and the second detector 126 detects the absence of the liquid sample segment at the second location in the sample receiving line 162 as a change in state from high to low. Fig. 9 The second location may be monitored (eg, continuously, at least substantially continuously) beginning at times t1 and t7, and the absence of the liquid sample segment may be detected at the second location at times t4 and t8.

[0047] When liquid is recorded at the first location and the second location simultaneously, a continuous liquid segment is recorded in the sample receiving line between the first detector and the second detector. Figure 7 , when the high state indicates that a liquid sample segment is present at each of the first detector 126 and the second detector 126, the controller 118 records a continuous liquid sample segment in the sample receiving line 162 (eg, present between the first detector 126 and the second detector 126). Fig. 9 , when the liquid sample segment is detected at the second position, a continuous liquid sample segment can be recorded at time t2.

[0048] In some embodiments, a logical AND operation may be used to determine when a continuous liquid segment is recorded in the sample receiving circuit and initiate the transfer of the continuous liquid segment from the sample receiving circuit to the analysis device. Figure 7 , the controller 118 may use a logical AND operation of a high state on each of the first detector 126 and the second detector 126 and use the valve 148 to initiate the selective coupling of the sample loop 164 with the analytical device 112, so that the sample loop 164 is operable to be in fluid communication with the analytical device 112, thereby supplying a continuous liquid sample segment to the analytical device 112. In some embodiments, the controller 118 may only determine whether to switch the valve 148 to supply a continuous liquid sample segment to the analytical device 112 when a state change from low to high is recorded at the first detector 126 or the second detector 126. In some embodiments, the system 100 requires that the high state at the second detector 126 be maintained for a period of time (e.g., 10 seconds) before initiating the selective coupling of the sample loop 164 with the analytical device. Fig. 9 The t shown in △ ). For example, a timer or timing function of the controller 118 and / or the processor 120 can verify the time period for which the second detector 126 has maintained the high state, thereby once the second detector 126 has maintained the high state for time t △ (e.g., threshold time), and in the case where the first detector is in the high state, the controller 118 can determine that enough liquid sample segments have been collected (e.g., Figure 8The duration t is t206, and the valve 148 can be switched to supply a continuous liquid sample segment to the analysis device 112. △ This may correspond to a time period during which the second detector is less likely to measure voids or bubbles, which may depend on the flow rate or other transport conditions of the sample.

[0049] In some embodiments, the controller 118 may monitor the timing of the first detector 126 being in the high state and / or the low state. For example, in embodiments where the flow characteristics of the sample being transmitted from the remote sampling system 104 are known, the first detector 126 may be monitored to determine the length of time spent in the high state to roughly estimate whether there is sufficient liquid sample in the sample receiving line 162 and / or the sample loop 164 so that the controller 118 sends the sample to the analysis device 112 with or without confirmation of the high state at the second detector 126. For example, for a given flow rate of the sample, by monitoring the length of time that the first detector 126 has been in the high state, a rough estimate of the volume of the sample may be made. However, due to fluctuations in pump function, type of sample being transmitted, viscosity of the sample, duration of transmission, distance of transmission, ambient temperature conditions, temperature conditions of the transmission line 144, etc., the flow rate of the sample may not be readily apparent, so the function of the second detector 126 may be informative.

[0050] In an embodiment of the present disclosure, the systems and techniques described herein can be used to determine that a portion of a sample receiving line (e.g., a sample loop) between a first detector 126 and a second detector 126 is filled without bubbles. Fig. 9 As described, the absence of liquid sample at the first location between time t3 and t5 may correspond to the presence of bubbles in the sample receiving line 162. When the system 100 has reached a condition where no bubbles are present in the sample receiving line 162, the controller 118 switches the valve 148 to allow fluid in the sample loop 164 to pass to the analysis device 112 (for analysis or sample conditioning prior to analysis).

[0051] Exemplary Methods

[0052] Fig.10Process 810 in an exemplary embodiment is depicted in which two detectors are used to determine when a sample receiving line contains a sufficient amount of sample in a continuous liquid sample segment for analysis by an analytical system without gaps or voids in the continuous liquid sample segment. As shown, a liquid segment is received in the sample receiving line (box 812). For example, the sample receiving line 162 can receive a sample obtained by the remote sampling system 104 and transmitted via the transmission line 144. Process 810 also includes recording the liquid segment at a first position in the sample receiving line with a first detector, the first detector being configured to detect the presence and / or absence of the liquid segment as the liquid segment travels through the first position (box 814). For example, the first detector 126 can measure the presence of a liquid sample segment at a first position in the sample receiving line 162. Reference Fig. 9 , a liquid sample segment is detected at the first position at times t1 and t5.

[0053] Next, after recording the liquid segment at the first location, the first detector is monitored (block 816). For example, the first detector 126 can be monitored by the controller 118 to determine whether a liquid segment is present at the first location in the sample receiving line 162 (e.g., whether the first detector 126 has transitioned from a high state (indicating that sample fluid is detected) to a low state (wherein no sample fluid is detected)). Fig. 9 , monitoring the first location (e.g., continuously, at least substantially continuously) from times t1 and t5. Then, before recording a liquid segment at a second location in the sample receiving line downstream of the first location by performing a detection operation using a second detector, recording a continuous liquid segment in the sample receiving line when the absence of the liquid segment at the first location in the sample receiving line is not recorded, the second detector is configured to detect the presence and / or absence of the liquid segment at the second location (block 818). For example, referring to Fig. 9, the first detector 126 detects the presence of the sample fluid at times t1 and t5, while the second detector 126 detects the presence of the sample fluid at times t2 and t7. The liquid sample segment at the first detector between times t1 and t3 is recorded by the second detector (starting at time t2) only if the first detector does not detect its absence during the intervening time before the second detector detects the sample segment. At this point, the controller 118 can direct the valve 148 to switch to send the sample contained in the sample loop 164 to the analysis device 112. The first detector 126 records the presence of the liquid sample at t5, and the first detector also detects the absence of the liquid sample at t6 before the second detector 126 subsequently detects the presence of the liquid sample at t7. In this way, the system 100 will recognize that there is a gap or void (e.g., gap / void 802) in the sample loop 164, and will not switch the valve 148 for analysis, but will allow the inappropriate sample segment (e.g., liquid segment 804) to pass to waste. As described herein, once the second detector 126 has maintained a high state for a certain period of time (e.g., t △ ), a timer (eg, implemented by controller 118) may be used to cause valve 148 to switch.

[0054] Control System

[0055] The system 100 including some or all of its components can be operated under computer control. For example, the processor 120 can be included in the system 100 or contained in the system 100 to control the components and functions of the system described herein using software, firmware, hardware (e.g., fixed logic circuits), manual processing or a combination thereof. The terms "controller", "function", "service" and "logic" used herein generally represent software, firmware, hardware or a combination of software, firmware or hardware combined with a control system. In the case of a software implementation, a module, a function or a logic represents a program code that performs a specified task when executed on a processor (e.g., one or more central processing units (CPUs)). The program code can be stored in one or more computer-readable memory devices (e.g., internal memory and / or one or more tangible media), etc. The structures, functions, methods and techniques described herein can be implemented on various commercial computing platforms with various processors.

[0056] For example, one or more components of the system, such as the analysis system 102, the remote sampling system 104, the valve 148, the pump and / or the detector (e.g., the first detector 126, the second detector 126, the sample detector 130) can be coupled to the controller for controlling the collection, transfer and / or analysis of the sample 150. For example, the controller 118 can be configured to switch the valve 148, which couples the sample loop 164 to the analysis system 102 and directs the sample 150 from the sample loop 164 to the analysis system 102 when the first detector 126 and the second detector 126 indicate a successful "collection" (e.g., when both sensors detect liquid). In addition, the controller 118 can implement functions to determine an "unsuccessful collection" (e.g., when the sample loop 164 is not filled with enough sample 150 for the analysis system 102 to perform a complete analysis). In some embodiments, the "unsuccessful collection" is determined based on, for example, a change in the signal strength of a signal received from a sensor such as the first detector 126 or the second detector 126. In other embodiments, an “unsuccessful acquisition” is determined when the first detector 126 has indicated that the sample 150 is in the sample receiving line 162 and a predetermined amount of time has passed wherein the second detector 126 does not indicate that the sample 150 is in the sample receiving line 162 .

[0057] In some embodiments, when insufficient sample 150 is received at the first location, the controller 118 is communicatively coupled to the indicator at a remote location (such as a second location) and provides an indication (e.g., an alarm) at the second location. The indication can be used to initiate (e.g., automatically) additional sample collection and delivery. In some embodiments, the indicator provides an alarm to the operator (e.g., via one or more indicator lights, via a display readout, a combination thereof, etc.). In addition, the indication can be timed and / or initiated based on one or more predetermined conditions (e.g., only when multiple samples are missed). In some embodiments, the indicator can also be activated based on conditions measured at the remote sampling point. For example, a detector 130 at the second location can be used to determine when a sample 150 is provided to the remote sampling system 104, and the indicator can be activated when the sample 150 is not collected.

[0058] In some embodiments, the controller 118 may be operable to provide different timing for the collection of samples from different remote locations and / or for different types of samples 150. For example, the controller 118 may be alerted when the remote sampling system 104 is ready to transfer a sample 150 to the sample transfer line 144 and may initiate transfer of the sample 150 into the sample transfer line 144. The controller 118 may also be communicatively coupled to one or more remote sampling systems 102 to receive (and potentially record / log) identification information associated with the sample 150, and / or control the order in which the samples 150 are transferred within the system 100. For example, the controller 118 may remotely sequence a plurality of samples 150 and coordinate their transfer through one or more sample transfer lines 144. In this manner, the transfer of samples 150 may be coordinated along multiple simultaneous flow paths (e.g., through multiple sample transfer lines 144), one or more samples 150 may be transferred while one or more additional samples 150 are taken, and so on. For example, Fig.11 An exemplary control flow diagram of the system 100 is shown, wherein the analysis system 102 is shown as being in fluid communication with two remote sampling locations (shown as sample location 900 and sample location 902) via two remote sampling systems 104a and 104b and associated delivery lines 144a and 144b. In the illustrated embodiment, the analysis system 102 sends commands to each of the remote sampling systems 104a and 104b, respectively, as shown at 904a and 904b. The remote sampling systems 104a and 104b each transmit samples obtained at corresponding sampling locations (sampling location 900 for the remote sampling system 104a, sampling location 902 for the remote sampling system 104b) to the analysis system 102 via delivery lines 144a and 144b, respectively. The analysis system 102 then processes the samples to determine the amounts of various chemical species containers therein. The analysis system 102 then determines whether the amount of any chemical species exceeds an element-specific limit (e.g., a limit for a specific contaminant in the sample). In an embodiment, the system 100 can independently set contamination limits for each sampling location and independently for a specific chemical species at each sampling location. For example, tolerance to a specific metal contaminant may decrease during processing, so a downstream chemical sample may have a lower limit on a specific chemical species than an upstream chemical sample. Fig.11, the analysis system 102 determines that no chemical species exceeds any element-specific limit for the sample obtained by the remote sampling system 104a at the sampling location 900. The analysis system 102 then sends an indication as shown at 908a to the CIM host 906 to allow the process application at the sampling location 900 to continue due to the operation of the process application under the element-specific limit. The analysis system 102 has determined that at least one chemical species present in the sample obtained by the remote sampling system 104b at the sampling location 902 exceeds the element-specific limit (e.g., the limit of the contaminant in the sample). The analysis system 102 then sends an indication as shown at 908b to the CIM host 906 to send an alarm for the process application at the sampling location 902 due to the operation of the process application above the element-specific limit. The CIM host 906 then directs the process at the sampling location 902 via a stop process command 910 to stop operation based on the analysis of the sample obtained by the remote sampling system 104b at the sampling location 902. In an embodiment, communication between the CIM host 906 and components of the system 100 may be facilitated via SECS / GEM protocols. In an embodiment, the system 100 may include context-specific actions when an element is determined to be above a specific limit for the element in a sample at a specific sample location, wherein such context-specific actions may include, but are not limited to, ignoring the alarm and continuing process operation, stopping process operation, running a system calibration, and then rerunning the out-of-limit sample, etc. For example, upon a first alarm, the analysis system 102 may perform a calibration (or another calibration) and then rerun the sample, while a subsequent alarm (e.g., a second alarm) will cause the CIM host 906 to command the process to abort operation at the offending sampling location.

[0059] The controller 118 may include a processor 120, a memory 122, and a communication interface 124. The processor 120 provides processing functionality for the controller 118, and may include any number of processors, microcontrollers, or other processing systems, as well as resident or external memory for storing data and other information accessed or generated by the controller 118. The processor 120 may execute one or more software programs that implement the techniques described herein. The processor 120 is not limited by the materials from which it is formed or the processing mechanisms used therein, and thus may be implemented via semiconductors and / or transistors (e.g., using electronic integrated circuit (IC) components), etc.

[0060] The memory 122 is an example of a tangible computer-readable storage medium that provides storage functionality to store various data associated with the operation of the controller 118 (such as software programs and / or code segments) or other data that instructs the processor 120 and possible other components of the controller 118 to perform the functions described herein. Thus, the memory 122 can store data, such as instruction programs for operating the system 100 (including its components), etc. It should be noted that although a single memory is described, a variety of memory types and combinations (e.g., tangible, non-transitory memory) can be employed. The memory 122 can be integrated with the processor 120, can include independent memory, or can be a combination of both.

[0061] The memory 122 may include, but is not necessarily limited to, removable and non-removable memory components, such as random access memory (RAM), read-only memory (ROM), flash memory (e.g., secure digital (SD) memory card, mini SD memory card, and / or micro SD memory card), magnetic memory, optical memory, universal serial bus (USB) memory device, hard disk memory, external memory, etc. In an embodiment, the system 100 and / or the memory 122 may include a removable integrated circuit card (ICC) memory, such as the memory 122 provided by a subscriber identity module (SIM) card, a universal subscriber identity module (USIM) card, a universal integrated circuit card (UICC), etc.

[0062] The communication interface 124 is operatively configured to communicate with components of the system. For example, the communication interface 124 may be configured to transfer data stored in the system 100, retrieve data from storage in the system 100, and the like. The communication interface 124 is also communicatively coupled to the processor 120 to facilitate data transfer between components of the system 100 and the processor 120 (e.g., for transmitting input received from a device communicatively coupled to the controller 118 to the processor 120). It should be noted that while the communication interface 124 is described as a component of the controller 118, one or more components of the communication interface 124 may be implemented as external components communicatively coupled to the system 100 via wired and / or wireless connections. The system 100 may also include and / or be connected to one or more input / output (I / O) devices (e.g., via the communication interface 124), including but not necessarily limited to: a display, a mouse, a touchpad, a keyboard, and the like.

[0063] The communication interface 124 and / or the processor 120 may be configured to communicate with a variety of different networks, including, but not limited to: a wide area cellular telephone network, such as a 3G cellular network, a 4G cellular network, or a Global System for Mobile Communications (GSM) network; a wireless computer communication network, such as a Wi-Fi network (e.g., a wireless local area network (WLAN) operating using the IEEE 802.11 network standard); the Internet; the Internet; a wide area network (WAN); a local area network (LAN); a personal area network (PAN) (e.g., a wireless personal area network (WPAN) operating using the IEEE 802.15 network standard); a public telephone network; an extranet; an intranet, etc. However, this list is provided only as an example and is not meant to limit the present disclosure. In addition, the communication interface 124 may be configured to communicate with a single network or multiple networks across different access points.

[0064] Example 1 - Exemplary Monitoring System

[0065] In general, the system 100 described herein may incorporate any number of remote sampling systems 104 to collect samples from any number of sampling locations. Fig.12In the embodiment shown in , the system 100 includes five remote sampling systems 104 (shown as 104A, 104B, 104C, 104D, 104E) located at five different locations of a processing facility that utilizes chemical baths, bulk chemicals, environmental effluents, and other liquid samples. The remote sampling systems 104 obtain samples at different locations for transmission to an analysis system 102 located remote from each of the five remote sampling systems 104. The first remote sampling system 104A is located near the deionized water pipeline 1000 and is separated from the analysis system 102 by a distance of approximately forty meters (40 meters) (shown as d5). The second remote sampling system 104B is located near the valve dispensing point 1002 and is separated from the analysis system 102 by a distance of approximately eighty meters (80 meters) (shown as d4). The third remote sampling system 104C is located near the chemical supply tank 1004 and is separated from the analysis system 102 by a distance of approximately eighty meters (80 meters) (shown as d3). The chemical supply tank 1004 is located remotely from the chemical storage tank 1008 and supplies chemicals from the chemical storage tank 1008. A fourth remote sampling system 104D is located proximate to the chemical supply tank 1006 and is separated from the analysis system 102 by a distance of approximately eighty meters (80 m) (shown as d2). The chemical supply tank 1006 is located remotely from the chemical storage tank 1008 and supplies chemicals from the chemical storage tank 1008. A fifth remote sampling system 104E is located proximate to the chemical storage tank 1004 and is separated from the analysis system 102 by a distance of approximately three hundred meters (300 m) (shown as d1). Although five remote sampling systems 104 are shown, the system 100 may utilize more than five remote sampling systems 104 to monitor ultra-trace impurities throughout the processing facility, such as in other process streams, chemical baths, bulk chemical storage, environmental effluents, and other liquid samples. In an embodiment, transmission of samples from the remote sampling system 104 to the analysis system is provided at a rate of approximately one.2 meters per second (1.2 m / s), providing near real-time analysis (eg, ICPMS analysis) of ultra-trace impurities throughout the processing facility.

[0066] Example 2 - Reproducibility

[0067] In an embodiment, the analysis system 102 is located one hundred meters (100 meters) away from the remote sampling system 104. The remote sampling system 104 obtains twenty discrete samples and transmits them to the analysis system 102 to determine the signal intensity of each chemical species in each of the twenty discrete samples. Each discrete sample includes the following chemical species: lithium (Li), beryllium (Be), boron (B), sodium (Na), magnesium (Mg), aluminum (Al), calcium (Ca), manganese (Mn), iron (Fe), cobalt (Co), nickel (Ni), copper (Cu), zinc (Zn), germanium (Ge), strontium (Sr), silver (Ag), silver (Ag), cadmium (Cd), indium (In), tin (Sn), antimony (Sb), barium (Ba), cerium (Ce), hafnium (Hf), tungsten (W) and lead (Pb). After analysis by the analysis system 102, it is determined that the relative standard deviation (RSD) of all twenty discrete samples across all chemical species is less than three percent (<3%). Accordingly, the exemplary system 100 at one hundred meters between the analysis system 102 and the remote sampling system 104 provides reliable reproducibility from obtaining a sample, transmitting the sample one hundred meters to the analysis system 102 (eg, via the transmission line 144 ), and analyzing the sample with the analysis system 102 .

[0068] Example 3 - Comparison with Manual Sampling - Semiconductor Process Example

[0069] Reference Fig.13, a graph showing metal contamination of a chemical bath (SC-1 bath) used in a semiconductor manufacturing process over time is provided. The graph includes a portion 1100 showing data points of metal contaminants measured from manual samples collected at three time points. The graph also includes a portion 1102, which shows a portion 1102 of data points of metal contaminants measured from manual samples of portion 1100, which are superimposed on data points of metal contaminants measured from samples collected from system 100 (e.g., from remote sampling system 104) at a sampling frequency exceeding that of the manual sampling method (e.g., a frequency at least sixteen to seventeen times higher). As shown in portion 1102, a gradual increase in contaminants occurs over time during the semiconductor manufacturing process. The service life or life counting method for determining when to exchange chemicals in a particular semiconductor process (e.g., manual sampling techniques from portion 1100) often cannot explain the characteristics of metal contamination over time. Therefore, chemicals are usually exchanged without knowing the metal contaminants in the bath. This can result in over-exchanges, where the chemical bath could actually provide additional wafer processing but is replaced anyway (e.g., resulting in a loss of process uptime), and where the chemical bath actually has unacceptable metal contamination but is not replaced until later (e.g., potentially compromising wafers produced by the process). As can be seen in portion 1102, metal contamination can be automatically tracked at a higher frequency with the system 100. The contamination limit 1104 is configured to alert the CIM host 906 when the contamination limit of the chemical bath is reached. Thus, the system 100 can automatically cause a stop to process operations when the contamination limit 1104 is reached (e.g., to avoid under-exchanges), while allowing the process to continue when the contamination limit 1104 is not reached, thereby increasing process uptime when feasible (e.g., to avoid over-exchanges).

[0070] in conclusion

[0071] In embodiments, various analytical devices may utilize the structures, techniques, methods, etc. described herein. Thus, although a system is described herein, various analytical instruments may utilize the described techniques, methods, structures, etc. These devices may be configured with limited functionality (e.g., a streamlined device) or equipped with robust functionality (e.g., a precision device). Thus, the functionality of a device may relate to software or hardware resources of the device, such as processing power, memory (e.g., data storage capacity), analytical capabilities, etc.

[0072] Typically, any function described herein can be implemented using hardware (e.g., fixed logic circuits such as integrated circuits), software, firmware, manual processing, or a combination thereof. Therefore, the boxes discussed in the above disclosures typically represent hardware (e.g., fixed logic circuits such as integrated circuits), software, firmware, or a combination thereof. In the case of hardware configuration, the various boxes discussed in the above disclosures can be implemented as integrated circuits together with other functions. Such integrated circuits can include all functions of a given box, system, or circuit, or partial functions of a box, system, or circuit. In addition, the elements of a box, system, or circuit can be implemented across multiple integrated circuits. Such integrated circuits can include various integrated circuits, including but not necessarily limited to: monolithic integrated circuits, flip-chip integrated circuits, multi-chip module integrated circuits, and / or mixed signal integrated circuits. In an example of software implementation, the various boxes discussed in the above disclosures represent executable instructions (e.g., program codes) that perform specified tasks when executed on a processor. These executable instructions can be stored in one or more tangible computer-readable media. In some such cases, the entire system, box, or circuit can be implemented using its equivalent software or firmware. In other examples, portions of a given system, block, or circuit may be implemented in software or firmware, while other portions are implemented in hardware.

[0073] Although the subject matter has been described in language specific to structural features and / or process operations, it should be understood that the subject matter defined in the appended claims is not necessarily limited to the specific features or acts described above. Rather, the specific features and acts described above are disclosed as exemplary forms of implementing the claims.

Claims

1. A system for collecting a liquid sample, comprising: a sample receiving circuit configured to receive a liquid segment; a first detector configured to detect at least one of a presence or an absence of the liquid segment at a first location in the sample receiving line, the first detector configured to: record an absence of the liquid segment at the first location in the sample receiving line as a first state, and record a presence of the liquid segment at the first location in the sample receiving line as a second state; a second detector configured to detect at least one of a presence or an absence of the liquid segment at a second location in the sample receiving line, the second detector configured to: record the absence of the liquid segment at the second location in the sample receiving line as a first state, and record the presence of the liquid segment at the second location in the sample receiving line as a second state; as well as A controller is communicatively coupled to the first detector and the second detector, and the controller is configured to: determine that there is a continuous liquid segment with a volume sufficient for analysis in the sample receiving line when the second detector maintains the second state for a duration exceeding a threshold time before the controller records that the state of the first detector changes from the second state to the first state.

2. The system according to claim 1, further comprising: A valve is in fluid communication with the sample receiving line, the valve being switchable between at least two flow path configurations.

3. The system according to claim 2, wherein: The controller is configured to switch the valve between the at least two flow path configurations in response to recording the continuous liquid segment in the sample receiving line.

4. The system according to claim 1, wherein: The sample receiving circuit includes a sample loop.

5. The system according to claim 1, further comprising: an analysis system at a first location; a remote sampling system at a second location remote from the first location, the remote sampling system configured to receive the liquid segment for analysis; a sample transfer line configured to transport the liquid segment from the second location to the first location, the sample transfer line being coupled to the remote sampling system such that the remote sampling system is operable to fluidically communicate with the sample transfer line to drive the liquid segment to the first location.

6. The system according to claim 5, wherein: The analysis system includes the sample receiving line, and the sample receiving line is configured to be selectively coupled to the sample transmission line and the analysis system, so that the sample receiving line is operable to be in fluid communication with the sample transmission line to receive the liquid segment, and to be in fluid communication with the analysis system to supply the continuous liquid segment to the analysis system.

7. The system according to claim 6, wherein: The volume ratio of the liquid segment to the continuous liquid segment is greater than 1.

8. The system according to claim 5, wherein: The analysis system includes a plurality of analysis devices.

9. The system according to claim 8, wherein: The plurality of analysis devices include at least two of a mass spectrometer, a spectrometer, an ion chromatograph, a liquid chromatograph, a Fourier transform infrared spectrometer, a particle counter, a moisture analyzer, and a gas chromatograph.

10. The system according to claim 5, wherein: The length of the sample transmission line is at least five meters.

11. The system according to claim 5, wherein: The length of the sample transmission line is at least ten meters.

12. The system according to claim 5, wherein: The length of the sample transmission line is at least thirty meters.

13. A method for collecting a liquid sample, comprising: receiving a liquid segment in a sample receiving line; recording a first state with a first detector in response to detecting with a first detector the liquid segment at a first location in the sample receiving circuit, the first state of the first detector corresponding to the presence of the liquid segment at the first location; recording a first state with a second detector in response to detecting with a second detector the liquid segment at a second location in the sample receiving line downstream of the first location, the first state of the second detector corresponding to the presence of the liquid segment at the second location; monitoring whether the second detector registers the first state before the first detector registers a second state corresponding to the absence of the liquid segment at the first location; A continuous segment of liquid having a volume sufficient for analysis in the sample receiving line is determined when the second detector maintains the first state for a duration exceeding a threshold time before registering a change in state of the first detector from the first state to the second state.

14. The method according to claim 13, further comprising: The continuous segment of liquid is transmitted from the sample receiving line to an analysis system in response to recording the continuous segment of liquid in the sample receiving line.

15. The method according to claim 14, wherein: Transmitting the continuous liquid segment from the sample receiving line to an analysis system in response to recording the continuous liquid segment in the sample receiving line includes: In response to recording the continuous segment of liquid in the sample receiving line, a valve is automatically switched from a first flow path configuration to a second flow path configuration to transfer the continuous segment of liquid from the sample receiving line to the analysis system.

16. The method according to claim 13, wherein: Further including: A determination is made as to whether the continuous liquid segment includes a chemical component that exceeds an element specific contamination limit.

17. The method according to claim 16, further comprising: When the continuous liquid segment is determined to include the chemical component exceeding the element specific contamination limit, an alarm is automatically sent.

18. The method according to claim 13, further comprising: In response to recording the continuous fluid segment in the sample receiving line, the continuous fluid segment is transmitted from the sample receiving line to a plurality of analytical devices.

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