Ultraviolet irradiation device

Abstract

Provided is an ultraviolet irradiation device that can prevent a excimer lamp from falling downward even if a light-emitting tube is broken, and that does not damage a workpiece or a roller as a conveyance mechanism located below the device. The ultraviolet irradiation device includes: a excimer lamp including a long strip-shaped light-emitting tube that is transparent to ultraviolet light, a pair of electrodes disposed in a manner that faces each other in the up-down direction on an outer wall surface of the light-emitting tube, and a reflection film formed on an inner wall surface on the upper side of the light-emitting tube; a box body disposed on the upper side of the excimer lamp, holding both ends in the length direction of the excimer lamp; a movement restriction body protruding from the lower surface of the box body toward the excimer lamp; and a fall prevention body disposed on the lower side of the excimer lamp; at least a portion of the fall prevention body overlaps the light-emitting tube in a first region and a second region on both sides of the excimer lamp in the length direction, with the movement restriction body as a reference, when viewed in the up-down direction.

Description

Technical Field

[0001] This invention relates to an ultraviolet irradiation device. Background Technology

[0002] Previously, there were known ultraviolet irradiation devices that used excimer lamps irradiating vacuum ultraviolet light as a light source for the purpose of cleaning the substrates in the manufacturing process of semiconductor substrates and liquid crystal substrates.

[0003] The excimer lamp used in the ultraviolet irradiation device contains xenon gas sealed inside a quartz glass light-emitting tube, emitting 172nm ultraviolet light.

[0004] An excimer lamp has a rectangular cross-sectional shape for its light-emitting tube, a pair of electrodes on opposite outer surfaces, an ultraviolet-reflective film formed on the inner surface of one electrode, and emits ultraviolet light from the other electrode. The excimer lamp has its two ends in the axial direction held and supported inside the housing by a lamp holder, and the central part of the lamp has a structure in which the lower surface of the light-emitting tube is supported by a support part, and the light-emitting tube is supported from below (see Patent Document 1).

[0005] Furthermore, as the excimer lamp is lit, the light-emitting tube bends towards the side opposite to the light-emitting surface (the side with the ultraviolet reflective film). This bending is because, as the lamp is lit, ultraviolet strain accumulates in the light-emitting tube on the light-emitting surface. On the other hand, because an ultraviolet reflective film is formed on the inner surface of the light-emitting tube other than the light-emitting surface, ultraviolet strain is less likely to accumulate in the light-emitting tube. As a result, the light-emitting tube on the light-emitting surface mainly contracts along its length (tube axis), bending convexly towards the direction in which the ultraviolet reflective film is formed.

[0006] To prevent this bending, there is a known technique of providing a movement restraint with rotating rollers on the housing of the ultraviolet irradiation device to mechanically suppress the bending of the light-emitting tube (see Patent Document 2).

[0007] Existing technical documents

[0008] Patent documents

[0009] Patent Document 1: Japanese Patent Application Publication No. 2011-139988

[0010] Patent Document 2: Japanese Patent Application Publication No. 2010-80351 Summary of the Invention

[0011] The problem that the invention aims to solve

[0012] However, as the lamp continues to be lit, the light-emitting tube will bend further and be pushed more forcefully by the moving restrictor, eventually causing the light-emitting tube to break at the point of contact with the moving restrictor.

[0013] Near the center of the light-emitting tube, there is a support part to support the light-emitting tube from below. However, the position of the support part is not particularly considered. If the light-emitting tube breaks, the two ends of the excimer lamp are held by the housing. However, depending on the location of the break, there is a problem that the front end of the broken side of the light-emitting tube may fall downwards and damage the workpiece or the rollers that serve as the conveying mechanism.

[0014] In view of the above-mentioned problems, the present invention aims to provide an ultraviolet irradiation device that can prevent the excimer lamp from falling downwards even if the light-emitting tube breaks, and will not damage the workpiece or the rollers that serve as the conveying mechanism located below the device.

[0015] Methods used to solve problems

[0016] The ultraviolet irradiation apparatus of the present invention comprises: an excimer lamp having an elongated light-emitting tube that is transmissive to ultraviolet light, a pair of electrodes disposed opposite each other in the vertical direction on the outer wall surface of the light-emitting tube, and a reflective film formed on the inner wall surface of the upper side of the light-emitting tube; a housing disposed on the upper side of the excimer lamp and holding both ends of the excimer lamp in the longitudinal direction; a movement restraint protruding from the lower surface of the housing toward the excimer lamp; and a drop arrestor disposed on the lower side of the excimer lamp; when viewed from the vertical direction, at least a portion of the drop arrestor overlaps with the light-emitting tube in a first region and a second region on both sides of the excimer lamp in the longitudinal direction, based on the movement restraintor.

[0017] According to this structure, even if the light-emitting tube breaks at the point where it comes into contact with the movement restriction body, the front end of the broken light-emitting tube can be held in place by the anti-falling body. Therefore, even if the light-emitting tube breaks, the excimer lamp can be prevented from falling downwards and will not damage the workpiece or the rollers that serve as the conveying mechanism located below the device.

[0018] Alternatively, at least a portion of the aforementioned anti-fall device may independently overlap with the aforementioned light-emitting tube in both the first and second regions. Furthermore, at least a portion of the aforementioned anti-fall device may continuously overlap with the aforementioned light-emitting tube across the aforementioned movement restriction body in both the first and second regions.

[0019] According to these structures, the anti-fall body is configured such that, based on the movement restriction body, at least a portion of the anti-fall body overlaps with the light-emitting tube in the first and second regions on both sides of the excimer lamp's length direction, thereby preventing the excimer lamp from falling downwards even if the light-emitting tube breaks.

[0020] Preferably, when viewed from above, the aforementioned anti-fall device does not overlap with the aforementioned electrode disposed on the outer wall surface of the lower side of the aforementioned light-emitting tube.

[0021] According to this structure, less light is blocked by the fall arrestor.

[0022] Alternatively, the ultraviolet irradiation device may have a shielding plate that protrudes from the inner sidewall of the housing toward the light-emitting tube and is arranged such that its front end is close to the light-emitting tube; the anti-falling body protrudes further from the front end of the shielding plate toward the light-emitting tube.

[0023] By setting the anti-fall device to protrude further from the front end of the shielding plate toward the light tube, the distance between the anti-fall device and the light tube can be brought closer, thus making it easier to ensure the strength of the anti-fall device.

[0024] Preferably, the base end of the shielding plate is supported by the housing such that the front end of the shielding plate can rotate in a direction away from the light-emitting tube.

[0025] According to this structure, when replacing the excimer lamp, the shielding plate is rotated so that its front end moves away from the light-emitting tube, thereby moving the shielding plate and the anti-fall device away from the light-emitting tube, making it easy to replace the excimer lamp. Attached Figure Description

[0026] Figure 1 This is a schematic front view showing the structure of the ultraviolet irradiation device according to this embodiment.

[0027] Figure 2 yes Figure 1 A cross-sectional view of an ultraviolet irradiation device.

[0028] Figure 3 This is a cross-sectional view of an excimer lamp.

[0029] Figure 4A It is a 3D view of the excimer lamp and the shielding plate.

[0030] Figure 4B It is a 3D view of the shielding panel.

[0031] Figure 5 It is a plan view of the excimer lamp and the shielding plate.

[0032] Figure 6 This is a diagram showing the excimer lamp and shield viewed from the tube axis.

[0033] Figure 7 This is a diagram showing the excimer lamp and shield from below.

[0034] Figure 8A This is a plan view of the excimer lamp and shielding plate in other embodiments.

[0035] Figure 8B This is a plan view of the excimer lamp and shielding plate in other embodiments.

[0036] Figure 8C This is a plan view of the excimer lamp and shielding plate in other embodiments.

[0037] Figure 8D This is a plan view of the excimer lamp and shielding plate in other embodiments.

[0038] Label Explanation

[0039] 1: Ultraviolet irradiation device; 2: Box body; 2a: Lower surface of the box body; 3: Excimer lamp; 3a: Light emission surface; 5: Movement restraint body; 6: Shielding plate; 6a: Front end; 6b: Base end; 7: Anti-fall body; 7a: Anti-fall body; 7b: Anti-fall body; 7c: Anti-fall body; 7d: Anti-fall body; 30: Light-emitting tube; 31: Upper wall; 32: Lower wall; 33: Side wall; 34: Electrode; 35: Electrode; 36: Reflective film; 52: Rotating roller; 61: Hinge; 71: Main body; 72: Protrusion; W1: Workpiece. Detailed Implementation

[0040] Embodiments of the ultraviolet irradiation device of the present invention will be described with reference to the accompanying drawings. Furthermore, the following figures are schematic illustrations, and the aspect ratios shown may not necessarily correspond to actual aspect ratios, nor may they necessarily be consistent between different figures.

[0041] Figure 1 This is a front view schematically illustrating the structure of one embodiment of the ultraviolet irradiation device. Figure 2 yes Figure 1 AA sectional view. For example... Figure 1 As shown, the ultraviolet irradiation device 1 includes a housing 2 and an excimer lamp 3. The ultraviolet irradiation device 1 irradiates the workpiece W1, which is positioned on the light emission surface 3a side of the excimer lamp 3, with ultraviolet light.

[0042] In the following explanation, such as Figure 1 As shown, the direction in which the excimer lamp 3 extends (the tube axis direction) is designated as the X direction, the direction in which the electrodes 34 and 35 of the excimer lamp 3 face each other is designated as the Y direction, and the direction orthogonal to both the X and Y directions is designated as the Z direction. Furthermore, when representing directions, if a positive or negative orientation is distinguished, it is labeled with a positive or negative sign, such as "+X direction" or "-X direction." If no positive or negative orientation is distinguished, the direction is simply referred to as "X direction." The ultraviolet irradiation device 1 of this embodiment is arranged with the Y direction as the vertical direction.

[0043] Below (on the -Y side) of the ultraviolet irradiation device 1, a conveying mechanism 4 for conveying workpiece W1 is arranged. The conveying mechanism 4 includes multiple rollers 41 and drive units 42 provided at both ends of each roller 41 to rotate the rollers 41. The workpiece W1, which is fed into the conveying mechanism 4, is placed on the rollers 41 and is conveyed to the area directly below the excimer lamp 3 by the rotational drive of the rollers 41. The conveyed workpiece W1 approaches the excimer lamp 3 and is irradiated with vacuum ultraviolet light from the excimer lamp 3. The workpiece W1, which has been irradiated with vacuum ultraviolet light, is then conveyed out of the conveying mechanism 4.

[0044] The box 2 has a rectangular upper surface 21 and side surfaces 22 extending downward from each side of the upper surface 21, forming a box shape with an opening 23 at the bottom. The box 2 is made of metal, such as aluminum.

[0045] Figure 3 This is a cross-sectional view of the excimer lamp 3 cut along a plane perpendicular to the X direction. The excimer lamp 3 includes a light-emitting tube 30. The light-emitting tube 30 is formed of a material that is transmissive to ultraviolet light (e.g., quartz glass). The light-emitting tube 30 has an upper wall 31, a lower wall 32, and a side wall 33, and is a rectangular tube with a flat cross-section. The light-emitting tube 30 is elongated in the X direction.

[0046] Inside the light-emitting tube 30, a discharge gas is sealed to form excimers through discharge. In this embodiment, the discharge gas contains xenon (Xe). As a more detailed example of the discharge gas, it may also be a gas composed of a mixture of xenon (Xe) and neon (Ne) in a predetermined ratio, and may also contain trace amounts of oxygen or hydrogen.

[0047] A pair of opposing electrodes 34 and 35 are provided on the outer surfaces of the upper wall 31 and the lower wall 32 of the light-emitting diode 30. The electrode 34 on the outer surface of the upper wall 31 is a high-voltage supply electrode, and the electrode 35 on the outer surface of the lower wall 32 is a grounding electrode. The electrodes 34 and 35 are mesh-like, allowing light to pass through the gaps in the mesh.

[0048] Furthermore, the shapes of electrodes 34 and 35 can be different. Since electrode 34 does not need to allow light to pass through, it can also be formed as a single surface. In addition, electrode 35 can be any shape that allows light to pass through, for example, it can be an electrode 35 with a slit.

[0049] Furthermore, in this embodiment, electrodes 34 and 35 are made of the same material and are formed by screen printing on the outer surface of the light-emitting diode 30 and then firing. However, they can also be formed using different materials and different methods. Additionally, the materials used to form electrodes 34 and 35 can be, for example, gold, platinum, or alloys containing them.

[0050] The excimer lamp 3 includes a reflective film 36. The reflective film 36 is formed on the inner wall surface of the upper wall 31 of the light-emitting tube 30, on the side opposite to the light-emitting surface 3a. The reflective film 36 reflects ultraviolet rays generated inside the light-emitting tube 30 and traveling upwards downwards. In this embodiment, the reflective film 36 is formed only on the inner wall surface of the upper wall 31, but it may also be formed on the inner wall surface of the side wall 33.

[0051] The material forming the reflective film 36 can be, for example, a material formed by coating a suspension containing particulate silica (SiO2), alumina (Al2O3), etc., and then firing it.

[0052] The excimer lamp 3 is disposed inside the housing 2. The excimer lamp 3 is separated from the housing 2 on the lower side and is held by a pair of lamp holders 24.

[0053] In this embodiment, as the lamp is lit for a period of time, strain caused by ultraviolet light accumulates on the lower wall 32 of the light-emitting surface 3a side of the light-emitting tube 30. On the other hand, strain caused by ultraviolet light does not easily accumulate on the upper wall 31 where the reflective film 36 is formed. Therefore, the lower wall 32 mainly contracts in the X direction, resulting in an overall upward (+Y side) convex bend. Thus, the ultraviolet irradiation device 1 includes a movement limiting body 5 that restricts the upward movement of the excimer lamp 3 relative to the housing 2.

[0054] A movement restrictor 5 is disposed between the excimer lamp 3 and the housing 2. The movement restrictor 5 is configured to protrude downward from the lower surface 2a of the housing 2 toward the excimer lamp 3. The movement restrictor 5 includes a U-shaped base 51 fixed to the lower surface 2a of the housing 2, and a rotating roller 52 rotatably supported relative to the base 51. The rotating roller 52 is mounted so that it can rotate relative to the opening of the base 51 by a fixing screw 53. The rotating roller 52 can rotate in the X direction, and when the rotating roller 52 abuts against the upper wall 31 of the light-emitting tube 30, the rotating roller 52 rotates in response to the displacement of the light-emitting tube 30 in the X direction. In addition, the rotating roller 52 is made of an insulating material such as ceramic.

[0055] Two movement restrictors 5 are provided at intervals in the X direction. In this embodiment, the movement restrictors 5 are respectively arranged at positions approximately 25% inward of the length of the excimer lamp 3 from both ends in the X direction. Alternatively, only one movement restrictor 5 may be arranged approximately at the center in the X direction of the excimer lamp 3. Furthermore, three or more movement restrictors 5 may be arranged.

[0056] The ultraviolet irradiation device 1 is equipped with a pair of shielding plates 6. Figure 4A This is a 3D view of the excimer lamp 3 and the shielding plate 6. Figure 4B This is just a three-dimensional view of shielding plate 6. Figure 5This is a plan view of the excimer lamp 3 and the shielding plate 6 viewed from above. Figure 6 This is a diagram showing the excimer lamp 3 and the shielding plate 6 viewed from the X direction.

[0057] The shielding plates 6 are respectively disposed on both sides of the light-emitting tube 30 in the Z direction and extend along the X direction. The shielding plates 6 are as follows: Figure 6 As shown, the shielding plate 6 protrudes horizontally from the inner wall of the side 22 of the housing 2 toward the light-emitting tube 30. The shielding plate 6 is located at approximately the same height as the lower wall 32 of the light-emitting tube 30. The material forming the shielding plate 6 is, for example, stainless steel. The thickness of the shielding plate 6 is, for example, 1 to 1.5 mm.

[0058] The shielding plate 6 is used to block airflow and prevent cooling gas from flowing towards the light-emitting surface 3a. This cooling gas is, for example, gas injected onto the upper part of the light-emitting tube 30 by a cooling mechanism (not shown) to cool the light-emitting tube 30. Furthermore, the shielding plate 6 has the function of shielding the electric field formed between the pair of electrodes 34, 35. Therefore, the front end 6a of the shielding plate 6 is positioned close to the side wall 33 of the light-emitting tube 30. Here, "close" means a distance of 3 mm or less. Specifically, in the ultraviolet irradiation device 1 of this embodiment, the distance between the shielding plate 6 and the light-emitting tube 30 is 3 mm. Alternatively, the front end 6a of the shielding plate 6 may be configured to contact the side wall 33 of the light-emitting tube 30.

[0059] The base end 6b of the shielding plate 6 is rotatably supported on the lower part of the side 22 of the housing 2. The base end 6b of the shielding plate 6 is fixed to the housing 2 via hinges 61. There are four hinges 61 for each shielding plate 6. There is one hinge 61 at each end of the shielding plate 6 in the X direction, and two hinges are located in the center in the X direction.

[0060] The shielding plate 6 can rotate via hinge 61, allowing its posture to change to a first posture that is approximately parallel to the horizontal plane (in... Figure 6 (represented by solid lines) and the second posture (in which the plane is tilted at approximately 45 degrees relative to the horizontal plane). Figure 6 (Used as a double-dotted line). In the first position, the front end 6a of the shielding plate 6 is close to the light-emitting tube 30; in the second position, the front end 6a of the shielding plate 6 moves away from the light-emitting tube 30. When the ultraviolet irradiation device 1 irradiates ultraviolet light, the shielding plate 6 is in the first position, shielding the cooling gas from the air. On the other hand, when the excimer lamp 3 is replaced, the shielding plate 6 is in the second position, making it easy to replace the excimer lamp 3.

[0061] The ultraviolet irradiation device 1 has multiple anti-drop elements 7 on the lower side (light emission surface 3a side) of the excimer lamp 3. The anti-drop elements 7 are disposed on the shielding plate 6. The material forming the anti-drop elements 7 is, for example, stainless steel.

[0062] In this embodiment, four fall arrestors 7 are provided for each shielding plate 6, for a total of eight. In this embodiment, the shielding plate 6 is divided into multiple plates, and the fall arrestors 7 are welded and fixed between them.

[0063] The fall arrestor 7 is disposed between the movement restriction body 5 and the hinge 61 in the X direction. The fall arrestor 7 has a rectangular main body 71 that is fixed to the shielding plate 6, and a protrusion 72 that protrudes from the main body 71 toward the light-emitting tube 30 in the Z direction.

[0064] The protrusion 72 extends beyond the front end 6a of the shielding plate 6, reaching a position overlapping with the lower wall 32 of the light-emitting tube 30 when viewed from the Y direction (vertical direction). However, the protrusion 72 is preferably as follows: Figure 7 As shown, it is positioned so that it does not overlap with the electrode 35 disposed on the lower wall 32 of the light-emitting tube 30 when viewed from the Y direction. In addition, the protrusion 72 may normally contact the lower wall 32 of the light-emitting tube 30, but it may not.

[0065] Four anti-fall devices 7 are arranged to surround a movement restriction 5. Hereinafter, the four anti-fall devices 7 surrounding the movement restriction 5 will be referred to as anti-fall devices 7a to 7d (see reference). Figure 5 The anti-drop body 7 is disposed on both sides of the X direction, namely the +X side and the -X side, with reference to the movement restrictor 5. With reference to the movement restrictor 5, the +X side area corresponds to the first area R1 of the present invention, and the -X side area corresponds to the second area R2 of the present invention. In this embodiment, anti-drop bodies 7a and 7b are disposed in the first area R1, and anti-drop bodies 7c and 7d are disposed in the second area R2. Thus, when viewed from above and below, with reference to the movement restrictor 5, the anti-drop body 7 is disposed in the first area R1 on the +X side and the second area R2 on the -X side, with the protrusion 72 overlapping the light-emitting tube 30. This allows the protrusion 72 of the anti-drop body 7 to hold the front end of the light-emitting tube 30 in place, so that even if the light-emitting tube 30 breaks at the point of contact with the movement restrictor 5, the broken front end of the light-emitting tube 30 will not fall off.

[0066] Preferably, the protrusion 72 is configured such that the distance 72X from the movement restrictor 5 in the X direction is 200 mm or less. Here, the distance 72X is the shortest distance in the X direction from the lower end of the rotating roller 52 to the protrusion 72. If the distance 72X is greater than 200 mm, the ruptured light-emitting tube 30 may flex downwards and its front end may come into contact with the workpiece W1.

[0067] Preferably, the width 72W of the protrusion 72 is 10 to 30 mm. If the width 72W is smaller than 10 mm, it will be difficult to adequately retain the broken light-emitting tube 30. On the other hand, if the width 72W is larger than 30 mm, the amount of ultraviolet light from the excimer lamp 3 will be blocked more, which may adversely affect the processing of the workpiece W1.

[0068] Preferably, the protrusion length 72L of the protrusion 72 from the front end 6a of the shielding plate 6 is 5 to 7 mm. If the protrusion length 72L is less than 5 mm, it will be difficult to adequately retain the broken light-emitting tube 30. On the other hand, if the protrusion length 72L is greater than 7 mm, the amount of ultraviolet light from the excimer lamp 3 will be blocked more, which may have an adverse effect on the processing of the workpiece W1.

[0069] Preferably, the thickness 72T of the protrusion 72 is 1.5 mm or less. If the thickness 72T is greater than 1.5 mm, the distance between the excimer lamp 3 and the workpiece W1 needs to be increased in order to prevent the protrusion 72 from touching the workpiece W1, making it difficult to efficiently irradiate the workpiece W1 with ultraviolet light.

[0070] Preferably, the anti-fall device 7, such as Figure 5 As shown, the protrusions 72 are staggered in the X direction. Since the workpiece W1 is conveyed and irradiated with ultraviolet light while being transported in the Z direction orthogonal to the X direction, if the portions blocked by the protrusions 72 overlap in the X direction, it may adversely affect the processing of the workpiece W1. Therefore, it is preferable to stagger the protrusions 72 so that they do not overlap in the X direction. Furthermore, by staggering the protrusions 72 in the X direction, the front end of the broken light-emitting tube 30 can be reliably held in place, depending on the location of the breakage.

[0071] The embodiments of the present invention have been described above based on the accompanying drawings, but it should be understood that the specific structure is not limited to these embodiments. The scope of the present invention is indicated not only by the description of the embodiments above, but also by the claims, and further includes all modifications in the same sense and scope as the claims.

[0072] The structures used in the above embodiments can be employed in any other implementation. The specific structure of each part is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention.

[0073] (1) In the ultraviolet irradiation device 1 of the above embodiment, when viewed from the Y direction, the protrusion 72 of the anti-fall body 7 independently overlaps with the light-emitting tube 30 in the first region R1 and the second region R2, but is not limited thereto. The protrusion 72 of the anti-fall body 7 may also continuously overlap with the light-emitting tube 30 in the first region R1 and the second region R2 in a manner that spans the movement restriction body 5. Specifically, as Figure 8A As shown, it can also be configured such that the protrusion 72 of the anti-fall body 7 extends from the movement restriction body 5 in the +X and -X directions. Alternatively, it can be configured such that the protrusion 72 extends integrally across the X direction of the excimer lamp 3.

[0074] (2) In the ultraviolet irradiation device 1 of the above embodiment, anti-falling bodies 7 are provided on the +Z side and -Z side of the excimer lamp 3, but it is not limited to this. For example, such as Figure 8B and Figure 8C As shown, the anti-fall device 7 can also be set only on the +Z side of the excimer lamp 3.

[0075] (3) In the ultraviolet irradiation device 1 of the above embodiment, two anti-fall elements 7 are provided in each of the first region R1 and the second region R2, but it is not limited to this. As long as at least one anti-fall element 7 is provided in each of the first region R1 and the second region R2, for example, it can also be as follows: Figure 8D The anti-fall device 7 is configured as shown.

[0076] (4) In the ultraviolet irradiation device 1 of the above-described embodiments, the shielding plate 6 and the anti-falling body 7 are different components, but are not limited thereto. The shielding plate 6 and the anti-falling body 7 may also be an integral structure.

Claims

1. An ultraviolet irradiation device characterized by comprising: a excimer lamp including an elongated light emitting tube having transmissivity to ultraviolet rays, a pair of electrodes disposed in a manner that opposed to each other in an up-and-down direction on an outer wall surface of the light emitting tube, and a reflective film formed on an inner wall surface on an upper side of the light emitting tube; a housing configured on an upper side of the excimer lamp, holding both ends in a length direction of the excimer lamp by a lamp support; a movement restriction body protruding from a lower surface of the housing toward the excimer lamp; a shielding plate extending along a tube axis of the light emitting tube on both sides of the excimer lamp, and protruding from an inner wall of the housing toward the light emitting tube, configured in a manner that a leading end portion, i.e., an edge, approaches the light emitting tube; a drop prevention body further protruding from the leading end portion, i.e., the edge, of the shielding plate toward the light emitting tube, configured on a lower side of the excimer lamp; when viewed in the up-and-down direction, the drop prevention body is configured to overlap the light emitting tube in a first region and a second region on both sides of the excimer lamp in the length direction, respectively, with the movement restriction body as a reference.

2. The ultraviolet irradiation device according to claim 1, characterized in that the drop prevention body overlaps the light emitting tube independently in the first region and the second region, respectively.

3. The ultraviolet irradiation device according to claim 1, characterized in that the drop prevention body overlaps the light emitting tube continuously across the movement restriction body in the first region and the second region.

4. The ultraviolet irradiation device according to any one of claims 1 to 3, characterized in that when viewed in the up-and-down direction, the drop prevention body does not overlap the electrodes disposed on an outer wall surface on a lower side of the light emitting tube.

5. The ultraviolet irradiation device according to claim 1, characterized in that a base end portion of the shielding plate is supported by the housing so that the leading end portion of the shielding plate can be turned in a direction away from the light emitting tube. ​ ​

Images