A centering and clamping device with adjustable span for a wafer processing equipment

Abstract

The present invention provides a centering and clamping device with adjustable span for a wafer processing equipment, which includes two slide rails, a silicon rod bearing device, two jaw systems and a jaw system driving mechanism; the jaw system includes a slide plate, a jaw guide rail, two jaws and a jaw driving mechanism, and is used for driving the two jaws to move towards or away from each other along the extending direction of the jaw guide rail. The extending directions of the slide rail and the jaw guide rail are perpendicular to each other, and the opposite surfaces of the two jaws have a V-shaped clamping opening. The present invention can achieve fixing and clamping a cylindrical wafer blank rod of different diameter specifications at the same center. Moreover, the span of the clamping points can be adjusted according to silicon rods of different lengths to ensure that the central axis of the wafer blank is horizontal.

Description

Technical Field

[0001] The present invention relates to the technical field of silicon rod clamping, and more particularly to a centering and clamping device with adjustable span for a wafer processing equipment. Background Art

[0002] During the grinding process of a silicon rod, a set of jaws is required to clamp and load the silicon rod. The clamping point is the radial surface of the silicon rod. Then, another set of jaws moves the silicon rod along the axis direction of the silicon rod. This set of jaws clamps the axial end face of the silicon rod. After that, the grinding head grinds the silicon rod. During the clamping and loading process of the silicon rod, since the roundness and diameter of each cross-sectional circle of the silicon rod along its axis direction are irregular, and the length and diameter dimensions of silicon rods of different specifications are different, different jaws are needed to grasp it, which increases the production cost and processing time.

[0003] At the same time, because the surface of the silicon rod is irregular, it is easy to cause the axis direction of the silicon rod not to be parallel to the axis of the processing machine tool after the silicon rod is clamped, which is not conducive to processing.

[0004] The existing silicon rod clamping and loading mechanism cannot directly determine the specifications of the silicon rod.

[0005] In the existing silicon rod clamping and loading mechanism, after loading, since another set of jaws clamps the axial end face of the silicon rod, and at this time the previous set of jaws still performs radial clamping, it is easy to cause damage to the first set of jaw mechanisms when moving the silicon rod in the axial direction.

[0006] In the existing silicon rod clamping and loading mechanism, the structures for carrying the silicon rod are all rigid carriers. After the silicon rod is clamped, the silicon rod will have small displacements in the up and down directions, and due to the rigid carrier, the surface of the silicon rod will be damaged. Summary of the Invention

[0007] In view of the above technical problems, a centering and clamping device with adjustable span for a wafer processing equipment is provided.

[0008] The technical means adopted by the present invention are as follows:

[0009] A centering and clamping device with adjustable span for a wafer processing equipment, comprising:

[0010] Two slide rails, the two slide rails are arranged in parallel and extend in the front and back direction;

[0011] A silicon rod carrying device, located between the two slide rails, for carrying the silicon rod;

[0012] Two jaw systems, the two jaw systems extend in the left and right direction and are used to clamp the silicon rod carried by the silicon rod carrying device; and

[0013] A jaw system driving mechanism for driving the two jaw systems to move towards or away from each other along the extension direction of the slide rail.

[0014] The jaw system includes:

[0015] A slide plate, whose extension direction is left - right extension, and the bottom of which is slidably connected to the two slide rails through slide plate sliders.

[0016] Jaw rails, located on the slide plate, and whose extension direction is left - right extension.

[0017] Two jaws, the bottoms of the two jaws are slidably connected to the jaw rails through jaw sliders, and the opposite surfaces of the two jaws have V - shaped clamping openings; and

[0018] A jaw driving mechanism, located on the slide plate, for driving the two jaws to move towards or away from each other along the extension direction of the jaw rails.

[0019] The present invention adopts the method of centering and clamping with two jaws to lift the silicon rod to the same central position, ensuring the clamping accuracy of the silicon rod and ensuring that its axis is in a horizontal state. At the same time, two jaw systems can move along the direction of the slide rail, realizing the function of adjusting the span of the clamping points of the two jaws. The stability of the clamping accuracy is ensured.

[0020] Further, the silicon rod carrying device includes:

[0021] A tray, the tray is located above the slide plate, and its extension direction is front - back extension. The two ends of the tray have vertical plates extending downward, and the length of the tray is greater than or equal to the length of the slide rail.

[0022] A crystal holder, fixed on the top of the tray for carrying the silicon rod.

[0023] A first cross - plate, fixed on the vertical plate.

[0024] A second cross - plate, located below the first cross - plate and fixedly connected to the fixed structure.

[0025] A plurality of sliding guide rods, vertically passing through the first cross - plate and the second cross - plate; and

[0026] A plurality of first springs, sleeved on the parts of the sliding guide rods between the first cross - plate and the second cross - plate; and

[0027] Two limit blocks, respectively fixed on the lower surface of the first cross - plate and the upper surface of the second cross - plate for limiting.

[0028] The silicon rod bearing device provided by the present invention adopts a floating design. After the silicon rod is placed on the crystal holder, the first spring is compressed. When the jaws clamp the silicon rod, the spring has an upward elastic force, which pushes the crystal rod upward, playing a role in saving effort. At the same time, even when the radial clamping force of the jaws is reduced, the silicon rod can still be picked up, protecting the surface of the crystal rod from damage.

[0029] Furthermore, the jaw system driving mechanism includes:

[0030] A first left-right hand double-nut lead screw, whose two output ends are respectively fixedly connected to the bottoms of the two slide plates, and whose input end is a handwheel or a first motor. The first left-right hand double-nut lead screw enables the two lead screw nuts to move towards or away from each other at one output end, achieving synchronous movement. The first left-right hand double-nut lead screw is a left-right hand double-nut ball screw or a left-right hand double-nut trapezoidal screw.

[0031] Furthermore, the first left-right hand double-nut lead screw is connected to the slide plate through a floating buffer mechanism;

[0032] The floating buffer mechanism includes:

[0033] A lead screw fixing seat, fixed in the middle of the slide plate, and the middle of the lead screw of the first left-right hand double-nut lead screw is connected to the slide plate through the lead screw fixing seat;

[0034] A fixing seat, located beside the lead screw fixing seat, and fixedly connected to the fixing structure;

[0035] A guiding bolt, whose extending direction is front-back extending, and the end away from the screwing end passes through (only passes through without thread fitting) the fixing seat and is fixedly connected to the lead screw fixing seat; and

[0036] A second spring, sleeved on the guiding bolt, with one end connected to the fixing seat and the other end connected to the lead screw fixing seat.

[0037] The setting of the floating buffer mechanism can better protect the slide plate and the second left-right hand double-nut lead screw. During the process of the silicon rod being clamped by the jaws provided by the present invention, for the subsequent grinding of the silicon rod, other jaws will axially clamp and transport the silicon rod. During the transportation process, the second spring provides floating buffering for the slide plate and the second left-right hand double-nut lead screw, avoiding their damage.

[0038] Furthermore, the jaw driving mechanism includes:

[0039] A second left-right hand double-nut lead screw, whose two output ends are respectively fixedly connected to the two jaws, and whose input end is a second motor.

[0040] Furthermore, it further includes: a jaw opening position feedback mechanism;

[0041] The jaw opening position feedback mechanism includes:

[0042] A lead screw bearing seat, which is fixed at one end of the slide plate and is close to the second motor. One end of the lead screw of the second left - right hand double - nut lead screw is connected to the slide plate through the lead screw bearing seat;

[0043] A jaw opening position trigger switch, which is installed on the lead screw bearing seat. When the two jaws move away from each other to the maximum stroke, the jaw close to the jaw opening position trigger switch touches the jaw opening position trigger switch to turn it on.

[0044] The operator can directly see from the console that the jaws are in the maximum opening position, avoiding interference between the jaws and the silicon rod at other positions.

[0045] Furthermore, the V - shaped jaw opening has a vertical surface at the inner end of its opening. Such a setting can adjust the opening degree of the jaw opening so that the jaw opening is not too deep.

[0046] Furthermore, a silicon rod detection mechanism is installed on the vertical surface;

[0047] The silicon rod detection mechanism includes:

[0048] An installation groove, which is processed in the vertical surface and extends with its opening facing the outer end of the opening of the jaw opening;

[0049] A piston, whose outer diameter matches the inner diameter of the installation groove, with part of it located in the installation groove and part of it protruding out of the notch of the installation groove;

[0050] A piston rod, extending left - right, with one end passing through the bottom of the installation groove and fixedly connected to the piston;

[0051] A third spring, located in the installation groove and sleeved on the piston rod, with one end connected to the piston and the other end connected to the bottom of the installation groove, for resetting the piston rod; and

[0052] A trigger switch, which is installed on the side of the jaw without the jaw opening and is close to the other end of the piston rod; after the jaw holds the silicon rod, the piston rod moves, and the other end of the piston rod triggers the trigger switch.

[0053] When holding a silicon rod, the silicon rod will force the piston rod to move towards the trigger switch direction, and then touch the trigger switch. At this time, it can be detected whether there is a silicon rod in the jaws.

[0054] Furthermore, the positions of the installation grooves on each vertical surface are different, or the lengths of the parts of each piston protruding out of the notches of the installation grooves are different.

[0055] The position of the installation groove can reflect the diameter range information of the clamped silicon rod, thereby distinguishing the specifications of the silicon rod. Similarly, the different lengths of the piston protruding from the notch of the installation groove can also reflect the diameter range information of the clamped silicon rod.

[0056] Furthermore, a contact displacement sensor is installed on the vertical plane. The above silicon rod detection mechanism can also be directly replaced by a contact displacement sensor.

[0057] Compared with the prior art, the present invention has the following advantages:

[0058] The present invention can achieve the same-center fixed clamping of cylindrical wafer blank rods with different diameter specifications. And it can adjust the span of the clamping points according to silicon rods of different lengths to ensure the horizontal axis of the wafer blank. And it has the functions of detecting the clamping diameter specification of the rod material and detecting whether there is material. And it has the function of unloading when the rod material is subjected to an axial thrust. And it has the function of boosting the clamping action of the rod material. And it has the function of feedback on the opening position of the jaws.

[0059] For the above reasons, the present invention can be widely promoted in the fields of silicon rod clamping and the like. Description of the Drawings

[0060] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0061] Figure 1 It is a schematic structural diagram of a centering and clamping device with adjustable span for a wafer processing device in the specific embodiment of the present invention.

[0062] Figure 2 It is a schematic structural diagram of a centering and clamping device with adjustable span for a wafer processing device from another perspective in the specific embodiment of the present invention.

[0063] Figure 3 It is a schematic structural diagram of a floating buffer mechanism in the specific embodiment of the present invention.

[0064] Figure 4 It is a schematic structural diagram of a silicon rod detection mechanism in the specific embodiment of the present invention.

[0065] In the figure: 1. skateboard guide rail; 2. skateboard; 3. jaw guide rail; 4. jaw; 5. second left - right hand dual - nut lead screw; 6. second motor; 7. first left - right hand dual - nut lead screw; 8. handwheel; 9. tray; 10. crystal holder; 11. first horizontal plate; 12. second horizontal plate; 13. sliding guide rod; 14. first spring; 15. limit block; 16. lead screw fixing seat; 17. fixing seat; 18. guide bolt; 19. second spring; 20. lead screw bearing seat; 21. jaw opening position trigger switch; 22. vertical plane; 23. installation groove; 24. piston; 25. piston rod; 26. third spring; 27. trigger switch. Detailed implementation manners

[0066] It should be noted that, without conflict, the embodiments in the present invention and the features in the embodiments may be combined with each other. The present invention will be described in detail below with reference to the drawings and in combination with the embodiments.

[0067] To make the objectives, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. The following description of at least one exemplary embodiment is actually only illustrative and in no way constitutes a limitation to the present invention and its application or use. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0068] It should be noted that the terms used herein are only for describing the specific implementation manners and are not intended to limit the exemplary embodiments of the present invention. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should be understood that when the terms "comprise" and / or "include" are used in this specification, they specify the presence of features, steps, operations, devices, components and / or their combinations.

[0069] Unless otherwise specifically stated, the relative arrangements of components and steps, numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention. At the same time, it should be clear that, for the sake of convenience in description, the dimensions of the various parts shown in the drawings are not drawn in actual proportional relationships. Technologies, methods, and devices known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that like reference numerals and letters denote like items in the following drawings, and thus, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0070] In the description of the present invention, it should be understood that the orientation or positional relationships indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal", and "top, bottom", etc. are usually based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the present invention and simplifying the description. Without contrary instructions, these orientation words do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting the protection scope of the present invention: the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0071] For the convenience of description, spatial relative terms such as "above...", "over...", "on the upper surface of...", "upper...", etc. can be used here to describe the spatial positional relationships of one device or feature with other devices or features as shown in the drawings. It should be understood that the spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation described in the drawings for the device. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "over other devices or structures" will then be positioned "below other devices or structures" or "under other devices or structures". Thus, the exemplary term "above..." can include both the orientations of "above..." and "below...". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations should be made for the spatial relative descriptions used here.

[0072] In addition, it should be noted that the use of words such as "first", "second", etc. to limit components is only for the convenience of differentiating the corresponding components. Without otherwise stating, the above words have no special meanings. Therefore, they should not be construed as limiting the protection scope of the present invention.

[0073] As Figures 1 to 4As shown in the figure, a centering and clamping device with adjustable span for a wafer processing equipment, comprising:

[0074] Two slide rails 1, the two slide rails 1 are arranged in parallel, and the extending direction is front and back;

[0075] A silicon rod carrying device, located between the two slide rails 1, for carrying a silicon rod;

[0076] Two jaw systems, the extending direction of the two jaw systems is left and right, for gripping the silicon rod carried by the silicon rod carrying device;

[0077] The jaw system includes:

[0078] A slide plate 2, whose extending direction is left and right, and its bottom is slidably connected to the two slide rails 1 through slide plate sliders;

[0079] A jaw guide rail 3, located on the slide plate 2, and its extending direction is left and right;

[0080] Two jaws 4, the bottoms of the two jaws 4 are slidably connected to the jaw guide rail 3 through jaw sliders, and the opposite faces of the two jaws 4 have V-shaped clamping mouths; and

[0081] A jaw driving mechanism, located on the slide plate 2, for driving the two jaws 4 to move towards or away from each other along the extending direction of the jaw guide rail 3. The jaw driving mechanism includes a second left and right hand double nut screw 5, whose two output ends are respectively fixedly connected to the two jaws 4, and its input end is a second motor 6.

[0082] A jaw system driving mechanism, for driving the two jaw systems to move towards or away from each other along the extending direction of the slide rail; the jaw system driving mechanism includes a first left and right hand double nut screw 7, whose two output ends are respectively fixedly connected to the bottoms of the two slide plates 2, and its input end is a handwheel 8 or a first motor. The first left and right hand double nut screw 7 enables two screw nuts to move towards or away from each other at one output end, realizing synchronous movement. The first left and right hand double nut screw 7 is a left and right hand double nut ball screw or a left and right hand double nut trapezoidal screw.

[0083] The silicon rod carrying device includes:

[0084] A tray 9, the tray 9 is located above the slide plate 2, and its extending direction is front and back. The two ends of the tray 9 have vertical plates extending downward, and the length of the tray 9 is greater than or equal to the length of the slide rail;

[0085] A crystal holder 10, fixed on the top of the tray 9, for carrying the silicon rod;

[0086] The first horizontal plate 11 is fixed to the vertical plate;

[0087] The second horizontal plate 12 is located below the first horizontal plate 11 and is fixedly connected to the fixing structure, and the fixing structure can be a fixing plate arranged between the two sliding plate guide rails 1;

[0088] A plurality of sliding guide rods 13 vertically pass through the first horizontal plate 11 and the second horizontal plate 12, and the sliding guide rods 13 can be bolts; and

[0089] A plurality of first springs 14 are sleeved on the portions of the sliding guide rods 13 located between the first horizontal plate 11 and the second horizontal plate 12; and

[0090] Two limiting blocks 15 are respectively fixed to the lower surface of the first horizontal plate 11 and the upper surface of the second horizontal plate 12 for limiting.

[0091] Furthermore, the first left - right hand double - nut lead screw 7 is connected to the sliding plate 2 through a floating buffer mechanism; the floating buffer mechanism includes:

[0092] A lead screw fixing seat 16 is fixed to the middle of the sliding plate 2, and the middle of the lead screw of the first left - right hand double - nut lead screw 7 is connected to the sliding plate 2 through the lead screw fixing seat 16;

[0093] A fixing seat 17 is located beside the lead screw fixing seat 16 and is fixedly connected to the fixing structure;

[0094] A guiding bolt 18 extends in the front - rear direction, and the end away from the screwing end passes through (only passes through without thread fitting) the fixing seat 17 and is then fixedly connected to the lead screw fixing seat 16; and

[0095] A second spring 19 is sleeved on the guiding bolt 18, one end of which is connected to the fixing seat 17 and the other end is connected to the lead screw fixing seat 16.

[0096] Furthermore, it further includes: a jaw opening position feedback mechanism;

[0097] The jaw opening position feedback mechanism includes:

[0098] A lead screw bearing seat 20 is fixed to one end of the sliding plate 2 and is close to the second motor 6, and one end of the lead screw of the second left - right hand double - nut lead screw 5 is connected to the sliding plate 2 through the lead screw bearing seat 20;

[0099] A jaw opening position trigger switch 21 is installed on the lead screw bearing seat 20. When the two jaws 4 move away from each other to the maximum stroke, the jaw 4 close to the jaw opening position trigger switch 21 touches the jaw opening position trigger switch 21 to turn it on.

[0100] Further, the V-shaped clamping opening has a vertical surface 22 at the inner end of its opening. Such a setting can adjust the opening degree of the clamping opening so that the clamping opening is not particularly deep.

[0101] Further, a silicon rod detection mechanism is installed on the vertical surface 22;

[0102] The silicon rod detection mechanism includes:

[0103] An installation groove 23 is machined in the vertical surface 22, and the opening extends towards the outer end of the opening of the clamping opening;

[0104] A piston 24, whose outer diameter matches the inner diameter of the installation groove 23, is partially located in the installation groove 23 and partially passes out of the notch of the installation groove 23;

[0105] A piston rod 25 extends left and right, and one end passes through the bottom of the installation groove 23 and is fixedly connected to the piston 24;

[0106] A third spring 26 is located in the installation groove 23 and sleeved on the piston rod 25, one end is connected to the piston 24, and the other end is connected to the bottom of the installation groove 23 for resetting the piston rod 25; and

[0107] A trigger switch 27 is installed on the side of the clamping jaw 4 without the clamping opening and close to the other end of the piston rod 25; after the clamping jaw 4 clamps the silicon rod, the piston rod 25 moves, and the other end of the piston rod 25 triggers the trigger switch 27.

[0108] Further, the positions of the installation grooves 23 on each vertical surface 22 are different, or the lengths of the notches where each piston 24 passes out of the installation groove 23 are different.

[0109] The above silicon rod detection mechanism can also be directly replaced by a contact displacement sensor.

[0110] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that: they can still modify the technical solutions recorded in the foregoing embodiments, or perform equivalent replacements on some or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A centering and clamping device with adjustable span for a wafer processing equipment, characterized in that, Comprising: Two skateboard guide rails, the two skateboard guide rails are arranged in parallel and extend in the front - rear direction; A silicon rod bearing device, located between the two skateboard guide rails, for bearing the silicon rod; Two jaw systems, the extension direction of the two jaw systems is left - right extension, for gripping the silicon rod borne by the silicon rod bearing device; And A jaw system driving mechanism, for driving the two jaw systems to move towards or away from each other along the extension direction of the skateboard guide rails; The jaw system includes: A skateboard, whose extension direction is left - right extension, and its bottom is slidably connected to the two skateboard guide rails through skateboard sliders; A jaw guide rail, located on the skateboard, and its extension direction is left - right extension; Two jaws, the bottoms of the two jaws are slidably connected to the jaw guide rail through jaw sliders, and the opposite faces of the two jaws have a V - shaped jaw opening; The V - shaped jaw opening has a vertical surface at the inner end of its opening; a silicon rod detection mechanism is installed on the vertical surface; The silicon rod detection mechanism includes: An installation groove, machined in the vertical surface, with the opening extending towards the outer end of the opening of the jaw opening; A piston, whose outer diameter matches the inner diameter of the installation groove, with part located in the installation groove and part protruding out of the notch of the installation groove; A piston rod, extending left - right, with one end passing through the bottom of the installation groove and fixedly connected to the piston; A third spring, located in the installation groove and sleeved on the piston rod, with one end connected to the piston and the other end connected to the bottom of the installation groove, for resetting the piston rod; A trigger switch, installed on the side of the jaw without the jaw opening and close to the other end of the piston rod; after the jaw grips the silicon rod, the piston rod moves, and the other end of the piston rod triggers the trigger switch; and a jaw driving mechanism, located on the skateboard, for driving the two jaws to move towards or away from each other along the extension direction of the jaw guide rail; The jaw driving mechanism includes: A second left - right double - nut lead screw, whose two output ends are respectively fixedly connected to the two jaws, and whose input end is a second motor; It further includes: a jaw opening position feedback mechanism; The jaw opening position feedback mechanism includes: A lead screw bearing seat, fixed at one end of the skateboard and close to the second motor, and one end of the screw rod of the second left - right double - nut lead screw is connected to the skateboard through the lead screw bearing seat; A jaw opening position trigger switch, installed on the lead screw bearing seat, when the two jaws move away from each other to the maximum stroke, the jaw close to the jaw opening position trigger switch touches the jaw opening position trigger switch to turn it on.

2. The centering and clamping device with adjustable span for a wafer processing equipment according to claim 1, characterized in that, The silicon rod bearing device includes: A tray, the tray is located above the skateboard and extends in the front - rear direction, both ends of the tray have vertical plates extending downward, and the length of the tray is greater than or equal to the length of the skateboard guide rail; A crystal holder, fixed on the top of the tray, for bearing the silicon rod; A first horizontal plate, fixed on the vertical plate; A second horizontal plate, located below the first horizontal plate and fixedly connected to the fixed structure; A plurality of sliding guide rods, vertically passing through the first horizontal plate and the second horizontal plate; and A plurality of first springs sleeved on the portion of the sliding guide rod between the first cross plate and the second cross plate; and Two limit blocks respectively fixed on the lower surface of the first cross plate and the upper surface of the second cross plate for limiting.

3. The centering and clamping device with adjustable span for a wafer processing equipment according to claim 1, wherein, The jaw system driving mechanism includes:[[]] A first left - right hand double - nut lead screw, the two output ends of which are respectively fixedly connected to the bottoms of the two sliding plates, and the input end of which is a hand wheel or a first motor.

4. A centering and clamping device with adjustable span for a wafer processing equipment according to claim 3, characterized in that, The first left - right hand double - nut lead screw is connected to the sliding plate through a floating buffer mechanism; The floating buffer mechanism includes:[[]] A lead screw fixing seat fixed in the middle of the sliding plate, and the middle of the lead screw of the first left - right hand double - nut lead screw is connected to the sliding plate through the lead screw fixing seat; A fixing seat located beside the lead screw fixing seat and fixedly connected to the fixing structure; A guide bolt, the extending direction of which is front - to - back, and the end far from the screwing end passes through the fixing seat and is fixedly connected to the lead screw fixing seat; and A second spring sleeved on the guide bolt, one end of which is connected to the fixing seat and the other end is connected to the lead screw fixing seat.

5. A centering and clamping device with adjustable span for a wafer processing equipment according to claim 1, characterized in that, The positions of the mounting grooves on each of the vertical surfaces are different, or the lengths of the pistons protruding from the notches of the mounting grooves are different for each of them.

6. The centering and clamping device with adjustable span for a wafer processing equipment according to claim 1, characterized in that, A contact displacement sensor is mounted on the vertical surface.

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