Excimer lamp, light irradiation device

Abstract

Provided are an excimer lamp and a light irradiation device capable of more accurately detecting the state of output emitted from a light irradiation surface. The excimer lamp comprises: an elongated light-emitting tube transmissive to ultraviolet light; a pair of electrodes spaced apart in a radial direction of the light-emitting tube; and a reflective film formed on the inner wall of the light-emitting tube. The reflective film comprises: a first reflective region facing a light emitting surface emitting light toward a target area; and a second reflective region facing a light collecting portion disposed at a position different from the light emitting surface.

Description

Technical Field

[0001] The present invention relates to an excimer lamp and a light irradiation device including the excimer lamp. Background Art

[0002] Ultraviolet light has traditionally been used in the manufacture of semiconductors and liquid crystal panels, or in the generation of ozone for air purification. Excimer lamps, such as those described in Patent Document 1, have been used as light sources for emitting ultraviolet light. Patent Document 1 discloses an excimer lamp having a reflective film formed on the inner wall surface of a light-emitting tube in order to efficiently direct the ultraviolet light emitted from the tube toward an object.

[0003] In the manufacture of semiconductors or liquid crystal panels, it is desirable to uniformize the illumination intensity across the irradiated objects (workpieces) in order to minimize quality variations between products. Based on this viewpoint, Patent Document 2 discloses a structure for providing a light aperture on a portion of the inner wall surface at a position different from the light exit surface, and measuring the light intensity, in order to ensure stable irradiation of the processed object from a light irradiation device.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2007-335350

[0007] Patent Document 2: Japanese Patent Application Laid-Open No. 2010-225343 Summary of the Invention

[0008] Problems to be solved by the invention

[0009] However, the present inventors have studied the structure of the excimer lamp disclosed in the above patent document 2 and found that there are the following problems. Figure 1 While explaining.

[0010] Figure 18 This is an enlarged perspective view of the periphery of the lighting portion 105 of the excimer lamp 100 having a conventional structure. Figure 18 The excimer lamp 100 shown has: a pair of electrodes 102, which are arranged in a manner opposite to the outer wall surface 101a of the light emitting tube 101; and a reflective film 103, Figure 18 The -X direction in the inner portion is set as the light extraction direction and is formed on the wall surface of the light emitting tube 101 in order to change the direction of travel of the ultraviolet light L1 traveling in the +X direction to the -X direction. Figure 18 As shown, the conventional excimer lamp 100 is provided with a light collecting portion 105 as an opening for extracting the ultraviolet light L1 from a location other than the light emitting surface 104 on a part of the reflective film 103 .

[0011] In the following description, Figure 18 As shown, the direction in which the light-emitting tube 101 of the excimer lamp 100 extends (the tube axis direction) is the Z direction, the direction in which the electrodes 102 face each other is the X direction, and the direction perpendicular to the X and Z directions is the Y direction. Furthermore, when expressing directions, when distinguishing between positive and negative directions, they are expressed with positive and negative signs, such as "+Z direction" and "-Z direction." When expressing directions without distinguishing between positive and negative directions, they are simply expressed as "Z direction."

[0012] In this configuration, the ultraviolet light L1 emitted from the lighting section 105 is only the ultraviolet light L1 emitted from the light emitting tube 101 and traveling toward the lighting section 105. It does not include the ultraviolet light L1 reflected by the reflective film 103, as is the case with the ultraviolet light L1 emitted from the light emitting surface 104 toward the irradiated object. In other words, even if a light intensity sensor is used to measure the light emitted from the lighting section 105 in the conventional excimer lamp 100, the light output cannot detect information such as the deterioration of the reflective film 103.

[0013] Furthermore, because the transmittance of the arc tube 101 changes over time in response to the emitted ultraviolet light L1, the amount of change varies depending on the material forming the arc tube 101. Furthermore, the changes in the arc tube 101 and the reflective film 103 over time also vary depending on the usage environment, making it difficult to present them as uniform changes. In other words, it is difficult to predict changes in the characteristics of the arc tube 101 and the state of degradation using data related to light output and degradation.

[0014] In view of the above-mentioned problems, an object of the present invention is to provide an excimer lamp capable of more accurately detecting the light output state.

[0015] Means used to solve problems

[0016] The excimer lamp of the present invention is characterized in that it comprises: a long strip-shaped light-emitting tube that is transmissive to ultraviolet rays; a pair of electrodes arranged radially apart from each other in the above-mentioned light-emitting tube; and a reflective film formed on the inner wall surface of the above-mentioned light-emitting tube; the above-mentioned reflective film comprises: a first reflective area that is opposite to a light emitting surface that emits light toward a light-irradiated target area; and a second reflective area that is opposite to a lighting portion arranged at a position different from the above-mentioned light emitting surface.

[0017] The light emitted from the light exit surface includes light emitted from the interior of the light emitting tube and traveling toward the light exit surface, and light reflected by the first reflective region of the reflective film and traveling toward the light exit surface. The light emitted from the daylighting portion includes light emitted from the interior of the light emitting tube and traveling toward the daylighting portion, and light reflected by the second reflective region of the reflective film and traveling toward the daylighting portion.

[0018] Therefore, light emitted from the lighting portion includes light reflected by the reflective film, similarly to light emitted from the light emitting surface. Therefore, changes in light output over time, including degradation of the reflective film of the excimer lamp, can be detected.

[0019] In the excimer lamp, the lighting portion may be formed at a position of the light emitting tube different from an effective light emitting region on the light emitting surface side with respect to the tube axis direction of the light emitting tube.

[0020] In an excimer lamp composed of a long light-emitting tube, the intensity of the emitted light is relatively low because the amount of irradiation from the surroundings is smaller at the end portions than at the center portion in the tube axis direction.

[0021] Therefore, most excimer lamps are composed of a light-emitting tube that is longer than the width of the irradiated object (the length in the same direction as the tube axis) to avoid uneven irradiation of the irradiated object. Only the area on the central side that emits light with a light intensity above the specified intensity is used for irradiation.

[0022] The "effective light-emitting area" as used in this specification refers to the area that outputs a specified light intensity along the tube axis of the light-emitting tube and can be used to illuminate an object. More specifically, it refers to the area in which light of at least 60% of the peak value of the light intensity distribution along the tube axis of the light-emitting tube is emitted.

[0023] With the above-described structure, light having a uniform intensity distribution can be emitted toward an irradiation object without forming a light collecting portion and / or a second reflective region of the reflective film in the effective light emitting region.

[0024] In the excimer lamp, the lighting portion may be formed on a side opposite to the light emitting surface.

[0025] As mentioned above, excimer lamps emit ultraviolet light, and the area near the light-emitting surface is exposed to high-intensity ultraviolet light. Ultraviolet light has higher energy than visible light, and if exposed to high-intensity ultraviolet light, the light sensor that measures the amount of light emitted from the light-collecting unit may rapidly degrade its light sensitivity.

[0026] With the above-described configuration, exposure to high-intensity light (especially ultraviolet rays) emitted from the light exit surface is reduced, and thus rapid degradation of light-receiving sensitivity and the like can be suppressed.

[0027] In the excimer lamp, the reflective film may include a first reflective film constituting the first reflective region and a second reflective film constituting the second reflective region and formed at a position spaced apart from the first reflective film.

[0028] In the excimer lamp, the second reflective film may be formed closer to an end portion of the light emitting tube than the first reflective film in the tube axis direction of the light emitting tube.

[0029] If the first reflective film and the second reflective film overlap in a part of the tube axis direction, light is repeatedly reflected in the overlapping part, so the light intensity near the overlapping part of the light emitting surface and the lighting part may vary greatly, or the degradation of the reflective film may progress locally and rapidly.

[0030] With the above-described structure, the first reflective film and the second reflective film do not overlap in the tube axis direction, and light does not repeatedly reflect between the first reflective film and the second reflective film. This prevents significant local variations in the light intensity distribution of light emitted from the light exit surface and the light collection portion.

[0031] The light irradiation device of the present invention comprises: the excimer lamp; and a light quantity sensor having a light receiving portion for detecting light incident on the light receiving portion; the light quantity sensor is configured so that the light receiving area of ​​the light receiving portion is included in the light collecting portion.

[0032] With the above configuration, the light emitted from the lighting portion of the excimer lamp can be measured by the light quantity sensor, and the amount of change and degradation of the light emitted from the light emitting surface of the excimer lamp can be detected.

[0033] Effects of the Invention

[0034] According to the present invention, an excimer lamp capable of more accurately detecting the light output state is realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 This is a schematic diagram of one embodiment of the light irradiation device when viewed in the Y direction.

[0036] Figure 2 This is a schematic cross-sectional view of one embodiment of an excimer lamp when viewed in the Y direction.

[0037] Figure 3 yes Figure 2 An enlarged stereoscopic view of the surrounding area of ​​the excimer lamp's lighting unit.

[0038] Figure 4 It will Figure 2 Schematic diagram of an excimer lamp when viewed in the X direction.

[0039] Figure 5 It will Figure 2 Schematic cross-sectional view of an excimer lamp when viewed in the Z direction.

[0040] Figure 6 It will Figure 2A schematic diagram of an excimer lamp when viewed from the +X side, and a graph showing the intensity distribution of ultraviolet rays emitted from the light exit surface.

[0041] Figure 7 It will Figure 1 Schematic cross-sectional view of the light irradiation device when viewed in the Z direction.

[0042] Figure 8 It will Figure 1 Schematic diagram of the light irradiation device when viewed from the +X side.

[0043] Figure 9A It is a cross-sectional view of the periphery of the lighting portion of the prepared arc tube when viewed in the Y direction.

[0044] Figure 9B It means in Figure 9A A cross-sectional view showing a state where a masking tape is attached to the inner wall surface of the light-emitting tube.

[0045] Figure 9C It means in Figure 9B A cross-sectional view showing a state where a suspension for forming a reflective film is applied to the inner wall surface of a light-emitting tube.

[0046] Figure 9D It means from Figure 9C A cross-sectional view of a light-emitting tube with the masking tape removed.

[0047] Figure 10 This is a cross-sectional view of another embodiment of an excimer lamp when viewed in the Y direction.

[0048] Figure 11 yes Figure 10 An enlarged stereoscopic view of the surrounding area of ​​the excimer lamp's lighting unit.

[0049] Figure 12A This is a schematic cross-sectional view of another embodiment of an excimer lamp when viewed in the Z direction.

[0050] Figure 12B It will Figure 12A Schematic cross-sectional view of an excimer lamp when viewed in the Y direction.

[0051] Figure 13A This is a schematic cross-sectional view of another embodiment of an excimer lamp when viewed in the Z direction.

[0052] Figure 13B It will Figure 13A Schematic cross-sectional view of an excimer lamp when viewed in the Y direction.

[0053] Figure 14 This is a schematic cross-sectional view of another embodiment of an excimer lamp when viewed in the Y direction.

[0054] Figure 15 This is a schematic cross-sectional view of another embodiment of an excimer lamp when viewed in the Y direction.

[0055] Figure 16 This is a schematic cross-sectional view of another embodiment of an excimer lamp when viewed in the Y direction.

[0056] Figure 17 This is an enlarged perspective view of the periphery of the lighting unit of another embodiment of an excimer lamp.

[0057] Figure 18 This is an enlarged perspective view of the surrounding area of ​​the lighting portion of an excimer lamp with a conventional structure.

[0058] Description of labels

[0059] 1: Light irradiation device; 2: Excimer lamp; 3: Light quantity sensor; 3a: Light receiving part; 3s: Light-receiving area; 4: Conveying mechanism; 10: Light-emitting tube; 10a: Outer wall surface; 10b: Inner wall surface; 10c: Light-emitting space; 11: Electrode; 11h: Light extraction part; 12: Light emitting surface; 13: Light-collecting part; 14: Reflection film; 14a: First reflection film; 14b: Second reflection film; 14p: First reflection area; 14q: Second reflection area; 70: Shielding belt; 71: Suspension; 100: Excimer lamp; 101: Light-emitting tube; 101a: Outer wall surface; 102: Electrode; 103: Reflection film; 104: Light emitting surface; 105: Light-collecting part; G1: Luminescent gas; L1: Ultraviolet rays; W1: Irradiated object. DETAILED DESCRIPTION

[0060] The excimer lamp and light irradiation device of the present invention are described below with reference to the accompanying drawings.

[0061] Figure 1 1 is a schematic diagram of an embodiment of the light irradiation device 1 when viewed in the Y direction. Figure 1 As shown, the light irradiation device 1 includes an excimer lamp 2 , a light quantity sensor 3 , and a transport mechanism 4 on which an irradiation object W1 is placed.

[0062] In addition, in the following description, Figure 1As shown, the direction in which the excimer lamp 2 extends (the tube axis direction) is defined as the Z direction, and the plane parallel to the light emitting surface 12 of the excimer lamp 2 is defined as the XY plane defined by the X and Y directions. Furthermore, when expressing a direction, if the positive and negative directions are distinguished, they are expressed with positive and negative signs, such as "+Z direction" and "-Z direction." If the direction is expressed without distinguishing between positive and negative directions, it is simply expressed as "Z direction."

[0063] First, the structure of the excimer lamp 2 will be described. The excimer lamp 2 is arranged so that the light emitting surface 12 faces the transport mechanism 4, and irradiates the irradiation object W1 with ultraviolet rays.

[0064] Figure 2 This is a schematic cross-sectional view of one embodiment of the excimer lamp 2 when viewed in the Y direction. Figure 3 yes Figure 2 An enlarged perspective view of the surrounding area of ​​the lighting portion 13 of the excimer lamp 2. Figure 2 As shown, the excimer lamp 2 includes a light emitting tube 10, a pair of electrodes 11, a light emitting surface 12, a lighting portion 13, a first reflecting film 14a, and a second reflecting film 14b. Figure 3 In order to easily understand the shape of the second reflective film 14b, the -Z side of the second reflective film 14b is not shown. Figure 2 and Figure 3 As shown, the direction in which the light emitting tube 10 of the excimer lamp 2 extends (the tube axis direction) is defined as the Z direction, the direction in which the electrodes 11 face each other is defined as the X direction, and the direction perpendicular to the X and Z directions is defined as the Y direction, so as to correspond to the direction in which the excimer lamp 2 is installed in the light irradiation device 1. Figure 1 The definition of direction corresponds to .

[0065] The light emitting tube 10 is made of a material (such as quartz glass) that is transmissive to light (especially ultraviolet rays). Figure 2 As shown, a long light-emitting space 10 c is provided in which a light-emitting gas G1 is sealed. Ultraviolet rays L1 generated in the light-emitting space 10 c are radiated outward.

[0066] Figure 4 It will Figure 2 Schematic diagram of the excimer lamp 2 when viewed in the X direction. The electrode 11 is as shown in FIG. Figure 4 As shown, a light extraction portion 11h is formed in a mesh pattern on the outer wall 10a of the arc tube 10, with a plurality of openings therein, for extracting light emitted from the light emitting space 10c of the arc tube 10. When a voltage required for light emission is applied to the electrode 11, discharge occurs within the light emitting space 10c, and ultraviolet light L1 is emitted from the light extraction portion 11h.

[0067] Figure 5 It will Figure 2 A cross-sectional view of the excimer lamp 2 when viewed in the Z direction. Figure 5 As shown, the arc tube 10 of this embodiment has a rectangular cross-section when cut along the XY plane, and a pair of electrodes 11 are formed on opposing flat outer wall surfaces 10a. However, the cross-sectional shape of the arc tube 10 may also be circular, elliptical, or other polygonal shapes such as hexagonal or octagonal.

[0068] Light exit surface 12 (see Figure 2 and Figure 3 ) is a portion of the wall surface of the light emitting tube 10 that is irradiated toward the irradiation object W1 by the ultraviolet light L1 emitted from the light emitting space 10c of the light emitting tube 10. Of the ultraviolet light L1 emitted from the light emitting space 10c, the ultraviolet light L1 that travels toward the light emitting surface 12 passes through the light extraction portion 11h of the electrode 11 as is and is emitted toward the outside of the light emitting tube 10.

[0069] Of the ultraviolet rays L1 emitted from the light-emitting space 10 c, the ultraviolet rays L1 traveling toward the opposite side of the light-emitting surface 12, that is, in the +X direction, are reflected by the first reflecting film 14 a toward the light-emitting surface 12, that is, in the −X direction, pass through the light extraction portion 11 h of the electrode 11, and are emitted toward the outside of the light-emitting tube 10.

[0070] The light collecting portion 13 is an emission window for ultraviolet light L1 formed on the wall of the light emitting tube 10, allowing the light intensity sensor 3 to measure the amount of ultraviolet light L1 emitted from the light emitting space 10c of the light emitting tube 10. Of the ultraviolet light L1 emitted from the light emitting space 10c, the portion traveling toward the light collecting portion 13 passes through the light extraction portion 11h of the electrode 11 as is and is emitted toward the outside of the light emitting tube 10.

[0071] Among the ultraviolet rays L1 emitted from the light-emitting space 10 c, the ultraviolet rays L1 traveling in the −X direction on the opposite side of the lighting section 13 are reflected by the second reflective film 14 b in the +X direction on the side of the lighting section 13 , pass through the light extraction portion 11 h of the electrode 11 , and are emitted toward the outside of the light-emitting tube 10 .

[0072] The second reflective film 14b is as follows Figure 2 As shown in FIG. 1 , the first reflective film 14a is formed closer to the end of the light emitting tube 10 than the first reflective film 14a. Figure 3 As shown, the first reflective film 14 a and the second reflective film 14 b are formed so as to face each other when viewed in the Z direction.

[0073] Here, the positional relationship between the effective light-emitting area and the lighting unit is explained. The effective light-emitting area refers to the area that outputs a specified light intensity in the Z direction and can be used to illuminate the irradiation object W1. More specifically, it refers to the area that emits light that accounts for 60% or more of the peak value in the Z-direction intensity distribution.

[0074] Figure 6 1 is a schematic diagram showing the excimer lamp 2 when viewed from the +X side, and a graph showing the intensity distribution of the ultraviolet light L1 emitted from the light emitting surface 12. Figure 6 As shown in FIG. 1 , the effective light emitting region A1 is a region on the central side of the first reflective film 14a, that is, a region on the central side of the light emitting surface 12 facing the first reflective film 14a. Figure 6 In order to facilitate confirmation of the internal structure of the arc tube 10 , the electrode 11 is not shown, and the light emitting surface 12 is shielded by the first reflective film 14 a .

[0075] With the above configuration, the lighting portion 13 is formed at a position different from the effective light emitting area A1 of the light emitting surface 12. In the case of an excimer lamp 2 having a plurality of light emitting surfaces 12, the lighting portion 13 is formed at a position different from each effective light emitting area A1.

[0076] Furthermore, since it is expected that the ultraviolet rays L1 emitted from the lighting portion 13 reflected by the same reflective film as the light emitting surface 12 can be detected, the first reflective film 14 a and the second reflective film 14 b are preferably formed of the same material.

[0077] The first reflective film 14 a and the second reflective film 14 b can be formed by applying a suspension containing particulate silica (SiO 2 ), aluminum oxide (Al 2 O 3 ), or the like and then firing the suspension.

[0078] With this configuration, ultraviolet light L1 emitted from the lighting section 13 is radiated from the light-emitting space 10 c of the light-emitting tube 10, and is divided into ultraviolet light L1 that travels toward the lighting section 13 and ultraviolet light L1 that is reflected by the second reflective film 14 b toward the lighting section 13. This makes it possible to detect changes in light output over time, including degradation of the reflective film of the excimer lamp 2.

[0079] Furthermore, according to the above embodiment, since the second reflective film 14b is formed closer to the end of the first reflective film 14a in the Z direction, light is no longer repeatedly reflected between the first reflective film 14a and the second reflective film 14b. Consequently, it is possible to suppress significant local variations in the intensity distribution of light emitted from the light exit surface 12 and the light collecting portion 13.

[0080] Next, the structure of the light irradiation device 1 other than the excimer lamp 2 will be described. Figure 7 It will Figure 1 FIG. 1 is a schematic cross-sectional view of the light irradiation device 1 when viewed in the Z direction. Figure 8 It will Figure 1The light amount sensor 3 is a schematic diagram of the light irradiation device 1 when viewed from the +X side. The light amount sensor 3 depends on the structure, the device used as the light receiving part 3a and the materials constituting them, such as Figure 7 and Figure 8 As shown, there is a specific light-receiving area 3s.

[0081] like Figure 7 and Figure 8 As shown, the light sensor 3 is arranged so that its light-receiving area 3s is contained within the light-collecting portion 13 of the excimer lamp 2. This allows the ultraviolet rays emitted from the light-collecting portion 13 of the excimer lamp 2 to be sufficiently received by the light-receiving portion 3a. Alternatively, a light-guiding member may be provided to guide light received by the light sensor 3 toward the light-collecting portion 3a, with the area where the light-receiving member can receive light contained within the light-collecting portion 13. In other words, the light sensor 3 may be arranged so as not to face the light-collecting portion 13.

[0082] Light sensor 3 can be, for example, a silicon photodiode. Light sensor 3 can also be configured to directly observe light emitted from light collecting unit 13 using the silicon photodiode. Furthermore, if the wavelength of light emitted from light collecting unit 13 differs from the range measurable by the silicon photodiode, light sensor 3 can be configured to measure light by converting the wavelength into a measurable range using a fluorescent substance or the like.

[0083] The transport mechanism 4 is configured to transport the placed irradiation object W1 so that the irradiation object W1 passes through the light irradiation target area of ​​the excimer lamp 2 and is irradiated with ultraviolet rays emitted from the light emitting surface 12. In this embodiment, the transport mechanism 4 is configured to transport the irradiation object W1 in the Y direction.

[0084] The conveying mechanism 4 of this embodiment is composed of a plurality of rollers arranged separately, but can also be a belt conveyor, etc. As long as the distance between the excimer lamp 2 and the irradiation object W1 is maintained and the irradiation object W1 can be conveyed in a specified direction, any structure can be used.

[0085] The light irradiation device 1 of this embodiment receives ultraviolet light emitted from the light collecting portion 13 of the excimer lamp 2 by the light amount sensor 3 at the light receiving portion 3 a and measures the light amount, thereby being able to grasp the deterioration state of the excimer lamp 2 .

[0086] Here, a method for forming the first reflective film 14 a and the second reflective film 14 b according to this embodiment will be described.

[0087] Figure 9A This is a cross-sectional view of the surrounding area of ​​the lighting portion 13 of the prepared light emitting tube 10 when viewed in the Y direction. Figure 9A 1 and 2 are steps for preparing the arc tube 10 .

[0088] Figure 9B It means in Figure 9A The second step is a cross-sectional view of the state where the masking tape 70 is attached to the inner wall surface 10b of the arc tube 10. Figure 9B 1 , a masking tape 70 is attached to the portion of the inner wall surface 10 b of the arc tube 10 prepared in the first step where the reflective film is not to be formed.

[0089] Figure 9C It means in Figure 9B The inner wall surface 10b of the arc tube 10 is coated with a suspension 71 for forming a reflective film. As described above, the suspension 71 can be formed from particles of silica (SiO2), aluminum oxide (Al2O3), etc. The third step is as follows. Figure 9C The figure shows a process for applying a suspension 71 for forming a reflective film to the inner wall surface 10b of the arc tube 10 to which the masking tape 70 is attached in the second step. The suspension 71 can be applied by inserting a nozzle into the inner side of the arc tube 10 and sweeping the suspension 71, or by allowing the suspension 71 to flow into the arc tube 10.

[0090] Figure 9D It means from Figure 9C The fourth step is a cross-sectional view of the light emitting tube 10 after the masking tape 70 is removed. Figure 9D 1 , which is a step of removing the masking tape 70 after the suspension 71 applied in the third step has dried.

[0091] The fifth step is a step of baking the suspension 71 dried on the inner wall surface 10 b of the arc tube 10 to form a reflective film.

[0092] After the above process, the Figure 3 The first reflective film 14a and the second reflective film 14b are shown. In this embodiment, no reflective film is formed on the wall surfaces facing each other in the Y direction, so description thereof is omitted. However, if a reflective film is formed on these wall surfaces, in the second step, a masking tape 70 is attached to the inner wall surface 10b of the arc tube 10 in an appropriate shape and the suspension 71 is applied.

[0093] The second reflective film 14b can also be formed at a position opposite to the light-collecting portion 13 without spanning the entire portion. Preferably, when equipped on the light irradiation device 1, it is formed within the range of the light-receiving area 3s of the light quantity sensor 3, relative to the area of ​​the light-receiving area 3s, which is more than 50%.

[0094] [Other embodiments]

[0095] Other embodiments will be described below.

[0096] <1> Figure 10 This is a cross-sectional view of another embodiment of the excimer lamp 2 when viewed in the Y direction. Figure 11 yes Figure 10 An enlarged perspective view of the periphery of the lighting portion of the excimer lamp 2. Figure 10 and Figure 11 As shown, a reflective film 14 may be formed that includes a first reflective region 14p that reflects the ultraviolet light L1 toward the light emitting surface 12 and a second reflective region 14q that reflects the ultraviolet light L1 toward the lighting portion 13. Figure 11 In order to make the shape of the reflective film 14 easier to understand, the −Z side of the second reflective region 14 q is not shown in the figure.

[0097] like Figure 10 and Figure 11 As shown, the reflective film 14 has a first reflective region 14p formed at a position opposing the light exit surface 12, and a second reflective region 14q formed at a position opposing the light collecting portion 13. These are connected via the side surface of the light emitting tube 10 using a member made of the same material as the reflective film 14. This corresponds to the structure of the above-described embodiment, where both the first reflective film 14a and the second reflective film 14b are formed so as to oppose each other in the X direction over a circumference centered on the tube axis of the light emitting tube 10, spanning more than half the circumference, and partially overlapping in the Z direction.

[0098] <2> Figure 12A and Figure 13A This is a schematic cross-sectional view of another embodiment of the excimer lamp 2 when viewed in the Z direction. Figure 12B It will Figure 12A A schematic cross-sectional view of the excimer lamp 2 when viewed in the Y direction, Figure 13B It will Figure 13A Schematic cross-sectional view of the excimer lamp 2 when viewed in the Y direction. Figure 5 The above-mentioned excimer lamp 2 is a structure in which the shape of the light emitting tube 10 is rectangular when viewed in the Z direction, which is called a flat tube shape. However, the excimer lamp 2 is not limited to this and may also be Figure 12A The shape shown is called a single-layer tube, or Figure 13A The structure shown is called a double tube shape.

[0099] like Figure 13A As shown in FIG. 1 , in the case of the double-tube-shaped excimer lamp 2, the second reflective film 14b is formed on the tube wall 10d disposed inside the light emitting tube 10. Figure 13A In the figure, the second reflective film 14b is formed on the inner tube wall 10d of the arc tube 10 over a half circumference in the circumferential direction, but may be formed over the entire circumference.

[0100] In any shape, the pair of electrodes 11 are formed so as to be separated in the radial direction with the tube axis of the arc tube 10 as the center. Figures 12A to 13B In any of the structures shown, the electrode 11 formed on the outer wall of the arc tube 10 is a mesh electrode formed of metal wires, but it can also be a metal film formed by vapor deposition or an electrode 11 composed of a metal plate. Figure 12A The electrodes 11 and 12 are arranged in the light emitting space 10c of the light emitting tube 10. Figure 13A The same is true for the electrode 11 formed inside the arc tube 10 shown, and the structure is not limited to that shown in the figure.

[0101] <3> A plurality of the first reflecting film 14a and the second reflecting film 14b may be formed in one excimer lamp 2. In addition, the reflecting film 14 may be formed with a plurality of the first reflecting regions 14p and the second reflecting regions 14q. Figures 14 to 16 is a schematic cross-sectional view of another embodiment of the excimer lamp 2 when viewed in the Y direction. Figure 14 and Figure 15 As shown, two lighting units 13 are provided, and two second reflection films 14b and second reflection regions 14q are formed.

[0102] Furthermore, it is also possible to Figure 16 As shown, in the excimer lamp 2, the second reflective film 14b is formed between the plurality of first reflective films 14a in the Z direction, and the light-collecting portion 13 is formed in the center of the light-emitting tube 10. Although not shown, the same applies to the first reflective region 14p and the second reflective region 14q. Alternatively, the second reflective region 14q may be formed between the plurality of first reflective regions 14p, and the light-collecting portion 13 may be formed in the center of the light-emitting tube 10.

[0103] <4> Figure 17 This is an enlarged perspective view of the periphery of the lighting portion 13 of another embodiment of the excimer lamp 2. In the above structure, the light emitting surface 12 and the lighting portion 13 are both configured to face the X direction, but it can also be as follows Figure 17 As shown in FIG. 1 , the light emitting surface 12 is formed to face the X direction, and the lighting portion 13 is formed to face the Y direction. Figure 17 In order to easily understand the shape of the second reflection film 14b, the -Z side of the second reflection film 14b is not shown in the figure.

[0104] <5> The configurations of the light irradiation device 1 and the excimer lamp 2 described above are merely examples, and the present invention is not limited to the configurations shown in the drawings.

Claims

1. An excimer lamp, characterized in that have: The long strip of light-emitting tube is transparent to ultraviolet rays; a pair of electrodes spaced apart from each other in the radial direction of the light-emitting tube; and A reflective film formed on the inner wall surface of the light-emitting tube; The reflective film has: a first reflecting region facing a light emitting surface that emits light toward a light irradiation target region; and The second reflecting area is opposed to the light-collecting portion, and the light-collecting portion is provided at a position different from the light-emitting surface in the circumferential direction of the light-emitting tube.

2. The excimer lamp according to claim 1, wherein The lighting portion is formed at a position of the light emitting tube different from an effective light emitting region on the light emitting surface side in relation to the tube axis direction of the light emitting tube.

3. The excimer lamp according to claim 1 or 2, characterized in that The lighting portion is formed on the opposite side to the light emitting surface.

4. The excimer lamp according to claim 1 or 2, wherein: The reflective film includes a first reflective film and a second reflective film. The first reflective film constitutes the first reflective region. The second reflective film constitutes the second reflective region and is formed at a position away from the first reflective film.

5. The excimer lamp according to claim 4, wherein The second reflective film is formed closer to the end of the light emitting tube than the first reflective film in the tube axis direction of the light emitting tube.

6. A light irradiation device, characterized in that have: The excimer lamp according to any one of claims 1 to 5; and a light sensor having a light receiving portion, wherein the light sensor detects light incident on the light receiving portion; The light amount sensor is arranged so that the light-receiving region of the light receiving portion is included in the light collecting portion.

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