Vacuum pump and rotary drive structure

By designing a rotary driving structure in a vacuum pump, using the high density and uniform distribution of magnetic force lines, the rotation instability problem caused by uneven magnetic force lines in existing vacuum pumps is solved, and the stability of gas extraction is achieved.

CN113452227BActive Publication Date: 2025-06-27SEMICHAMP (NINGBO) SEMICON EQUIP CO LTD
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Patent Information

Application Number
CN202010231173.X
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2020-03-27
Publication Date
2025-06-27
Estimated Expiration
2040-03-27

AI Technical Summary

Technical Problem

The magnetic lines of existing vacuum pumps are uneven, resulting in the magnetic rotation shaft being unable to rotate smoothly, affecting the stability of gas extraction.

Method used

A rotary driving structure is designed, including a groove body, 24 magnetic columns, two magnetic rotary columns and a plurality of electromagnetic coils. Through this structure, a high density and uniform distribution magnetic force line is generated to drive the rotor to rotate.

Benefits of technology

The smooth rotation of the magnetic rotating column is achieved, which drives the rotor to rotate smoothly, and stably extracts gas, solving the problem of uneven magnetic lines.

✦ Generated by Eureka AI based on patent content.

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Abstract

The present invention discloses a rotary drive structure applied to a vacuum pump, and the vacuum pump includes two rotors. The rotary drive structure includes a groove body, a plurality of magnetic columns, two magnetic rotary columns and a plurality of electromagnetic coils. The groove body includes a plurality of inner side wall surfaces, and the plurality of inner side wall surfaces present flat surfaces. The two magnetic rotary columns are located in the groove body and are respectively pivotally connected to the two rotors. Each magnetic column includes a first connection end, a second connection end, a first side and a second side. Each magnetic column is dispersedly arranged and connected to the plurality of inner side wall surfaces of the groove body at the first connection end, and the second connection end surrounds the two magnetic rotary columns. Each electromagnetic coil is dispersedly arranged on each first side and each second side and is close to the groove body.
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Description

Technical Field

[0001] The present invention relates to a vacuum pump and a rotary drive structure, and particularly to a vacuum pump and a rotary drive structure that drive the rotation of the rotor of the pump by uniform magnetic lines of force. Background Art

[0002] A vacuum pump is a pump that discharges gas from a container to create a negative pressure inside the container. A general vacuum pump has twelve magnetic columns, a pair of magnetic rotating shafts, and a pair of rotors. The twelve magnetic columns surround the pair of magnetic rotating shafts and drive the magnetic rotating shafts to rotate synchronously and in opposite directions by magnetic force. When the pair of magnetic rotating shafts rotate synchronously and in opposite directions, they drive the rotors to rotate synchronously and in opposite directions to discharge the gas.

[0003] However, the magnetic lines of force formed by the twelve magnetic columns are relatively uneven and sparse in density, so the magnetic rotating shafts sometimes cannot rotate smoothly. Therefore, it is necessary to provide a new vacuum pump to solve the above problems. Summary of the Invention

[0004] The main object of the present invention is to provide a rotary drive structure that drives the rotation of the rotor of the pump by uniform magnetic lines of force.

[0005] To achieve the above object, the rotary drive structure of the present invention is applied to a vacuum pump, and the vacuum pump includes two rotors. The rotary drive structure includes a tank body, a plurality of magnetic columns, two magnetic rotating columns, and a plurality of electromagnetic coils. The tank body includes a plurality of inner side wall surfaces, and the plurality of inner side wall surfaces are flat surfaces. The two magnetic rotating columns are located inside the tank body and are respectively pivotally connected to the two rotors. Each magnetic column includes a first connection end, a second connection end, a first side, and a second side. Each magnetic column is dispersedly arranged and connected to the plurality of inner side wall surfaces of the tank body at the first connection end, and the second connection end surrounds the two magnetic rotating columns. Each electromagnetic coil is dispersedly arranged on each first side and each second side and is close to the tank body.

[0006] According to an embodiment of the present invention, both of the two magnetic rotating columns include a main body and a plurality of magnetic members, and each magnetic member is dispersedly arranged on the main body.

[0007] According to an embodiment of the present invention, each magnetic rotating column further includes a rotating shaft, the rotating shaft is arranged inside the main body, and each magnetic member is dispersedly arranged around the rotating shaft at intervals of 90 degrees with the rotating shaft as the center.

[0008] According to an embodiment of the present invention, any two adjacent magnetic members have opposite magnetic poles.

[0009] According to an embodiment of the present invention, at least one inner side wall surface includes an extension column, and at least one of the plurality of magnetic columns is connected to the extension column.

[0010] According to an embodiment of the present invention, each electromagnetic coil system is dispersedly arranged on each first side and each second side and is close to each inner wall surface.

[0011] According to an embodiment of the present invention, the number of the plurality of magnetic columns is 24, and twelve of the magnetic columns are radially arranged around one of the two magnetic rotating columns, and the second connection ends of these twelve magnetic columns form a rotation area around one of the two magnetic rotating columns.

[0012] Another main object of the present invention is to provide a vacuum pump that drives the rotation of the rotor of the pump by uniform magnetic lines of force.

[0013] To achieve the above object, the vacuum pump of the present invention includes two rotors and the rotation driving structure as described above.

[0014] Through the structural design of the vacuum pump and the rotation driving structure of the present invention, magnetic lines of force with high density and uniform distribution can be generated, so that the two magnetic rotating columns can rotate more smoothly, driving the two rotors to rotate smoothly to stably extract gas. Brief Description of the Drawings

[0015] Figure 1 It is a schematic diagram of the vacuum pump according to an embodiment of the present invention.

[0016] Figure 2 It is a schematic diagram of the rotation driving structure according to an embodiment of the present invention.

[0017] Figure 3 It is a partial schematic diagram of the rotation driving structure according to an embodiment of the present invention.

[0018] Reference Signs

[0019] Rotation driving structure 1

[0020] Tank body 10

[0021] Inner wall surfaces 11, 11a

[0022] Extension column 111

[0023] Magnetic column 20

[0024] First connection end 22

[0025] Second connection end 23

[0026] First side 24

[0027] Second side 25

[0028] Rotation area 26

[0029] Magnetic rotating column 30

[0030] Main body 31

[0031] Magnetic members 32, 32a

[0032] Rotating shaft 33

[0033] Electromagnetic coil 40

[0034] Vacuum pump 200

[0035] Rotor 210

[0036] Rotating directions A, B Detailed implementation manners

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are only some examples or embodiments of the present application. For those of ordinary skill in the art, without creative efforts, the present application can also be applied to other similar scenarios based on these drawings. Unless obvious from the language context or otherwise stated, the same reference numerals in the figures represent the same structure or operation.

[0038] As shown in the present application and the claims, unless the context clearly indicates an exceptional situation, words such as "a", "an", "one" and / or "the" are not specifically singular and may also include the plural. Generally speaking, the terms "comprising" and "including" only indicate the inclusion of the clearly identified steps and elements, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0039] Unless otherwise specifically stated, the relative arrangements, numerical expressions and values of the components and steps described in these embodiments do not limit the scope of the present application. At the same time, it should be understood that for the sake of description, the dimensions of the various parts shown in the drawings are not drawn according to the actual proportional relationship. Technologies, methods and devices known to those of ordinary skill in the relevant fields may not be discussed in detail, but in appropriate cases, the said technologies, methods and devices should be regarded as part of the authorization specification. In all the examples shown and discussed here, any specific value should be interpreted as merely exemplary and not as a limitation. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar reference numerals and letters represent similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further discussed in subsequent drawings.

[0040] In the description of the present application, it should be understood that the orientation or positional relationship indicated by orientation words such as "front, rear, upper, lower, left, right", "lateral, vertical, perpendicular, horizontal" and "top, bottom", etc. is usually based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present application and simplifying the description. Without contrary explanation, these orientation words do not indicate and imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation on the protection scope of the present application; the orientation words "inside, outside" refer to the inside and outside relative to the contour of each component itself.

[0041] For ease of description, spatial relative terms such as "above", "over", "on the upper surface", "upper" etc. may be used here to describe the spatial positional relationship of one device or feature shown in the drawings with respect to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the drawings for the device. For example, if the device in the drawing is inverted, a device described as "above" or "over" other devices or structures will then be positioned "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both the orientations of "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and corresponding interpretations are made for the spatial relative descriptions used herein.

[0042] In addition, it should be noted that the use of words such as "first", "second" etc. to limit components is only for the convenience of differentiating the corresponding components. Without additional statement, the above words have no special meaning. Therefore, it should not be construed as a limitation on the protection scope of the present application. In addition, although the terms used in the present application are selected from well-known and commonly used terms, some of the terms mentioned in the specification of the present application may be selected by the applicant according to his or her judgment, and their detailed meanings are described in the relevant parts of the description herein. In addition, it is required to understand the present application not only through the actual terms used, but also through the meaning implied by each term.

[0043] Please refer to the following together Figures 1 to 3 Regarding the rotation drive structure of an embodiment of the present invention. Figure 1 is a schematic diagram of a vacuum pump of an embodiment of the present invention; Figure 2 is a schematic diagram of a rotation drive structure of an embodiment of the present invention; Figure 3 is a partial schematic diagram of a rotation drive structure of an embodiment of the present invention.

[0044] As Figures 1 to 3As shown, in an embodiment of the present invention, a vacuum pump 200 is used to extract the gas in a container (not shown in the figure). The vacuum pump 200 includes two rotors 210 and a rotational drive structure 1. The rotational drive structure 1 can generate uniform magnetic lines of force to drive the two rotors 210 of the vacuum pump 200 to rotate smoothly. The rotational drive structure 1 includes a trough body 10, twenty-four magnetic columns 20, two magnetic rotating columns 30, and a plurality of electromagnetic coils 40.

[0045] In an embodiment of the present invention, the trough body 10 is a receiving trough made of metal and the twenty-four magnetic columns 20 are arranged in the trough body 10. The inner wall of the trough body 10 is divided into eight inner side wall surfaces 11, 11a, and the eight inner side wall surfaces 11, 11a are presented as flat surfaces; the flat metal inner side wall surfaces 11, 11a can help the metal wires in the trough body 10 to be evenly distributed. Among the eight inner side wall surfaces 11, 11a, two of the inner side wall surfaces 11a respectively include an extension column 111, and the extension columns 111 of each wall surface 11a extend towards the opposite wall surface 11a. The extension columns 111 are used to arrange a part of the magnetic columns 20 so that the arrangement of the twenty-four magnetic columns 20 presents a radial shape. However, the number of the inner side wall surfaces 11, 11a is not limited to eight and can be changed according to the design requirements.

[0046] In an embodiment of the present invention, the twenty-four magnetic columns 20 are arranged in the trough body 10. The magnetic columns 20 have magnetic force, and the magnetic force of the magnetic columns 20 can generate magnetic lines of force to make the magnetic rotating columns 30 rotate. Each magnetic column 20 includes a first connection end 22, a second connection end 23, a first side 24, and a second side 25. The twenty-four magnetic columns 20 are dispersedly arranged and connected to the eight inner side wall surfaces 11, 11a by the first connection end 22, and four of the magnetic columns 20 are connected to the two extension columns 111, and the extension columns 111 and the connected magnetic columns 20 present a Y shape. The second connection end 23 surrounds the two magnetic rotating columns 30. Among the twenty-four magnetic columns 20, twelve of the magnetic columns 20 are radially arranged with one of the two magnetic rotating columns 30 as the center and form one rotation area 26, and the other twelve magnetic columns 20 are radially arranged with the other of the two magnetic rotating columns 30 as the center and form another rotation area 26; since the twenty-four magnetic columns 20 are densely arranged in the trough body 10 and surround the two rotation areas 26, high-density and evenly distributed magnetic lines of force can be generated.

[0047] In an embodiment of the present invention, the two magnetic rotating columns 30 are both cylindrical and are respectively located in the two rotating regions 26. Each magnetic rotating column 30 includes a main body 31, four magnetic members 32, 32a and a rotating shaft 33. The main body 31 has an annular structure. The four magnetic members 32, 32a are dispersedly arranged on the main body 31 and are arranged around the rotating shaft 33 at intervals of 90 degrees with the rotating shaft 33 as the center; among them, the magnetic member 32 is a magnet with an N pole, and the magnetic member 32a is a magnet with an S pole. The magnetic members 32 of the N-pole magnets and the magnetic members 32a of the S-pole magnets are arranged alternately, so that any two adjacent magnetic members 32, 32a have opposite magnetic poles. The rotating shaft 33 is arranged inside the main body 31. The rotating shafts 33 of the two magnetic rotating columns 30 are respectively pivotally connected to the two rotors 210. The magnetic lines of force generated by the magnetic force of the twenty-four magnetic columns 20 will drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively; the rotation direction A is counterclockwise rotation, and the rotation direction B is clockwise rotation. When the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively, they will drive the two rotors 210 to rotate along the rotation directions A and B together. However, the number of the magnetic members 32, 32a is not limited to four, and it can be changed according to design requirements, such as changing to six or eight.

[0048] In an embodiment of the present invention, the multiple electromagnetic coils 40 are copper coils. The multiple electromagnetic coils 40 are respectively connected to the twenty-four magnetic columns 20 in a surrounding manner and are dispersedly arranged on each first side 24 and each second side 25 and are close to the inner side wall surfaces 11, 11a of the groove body 10; the multiple electromagnetic coils 40 can be energized to generate an electromagnetic effect to further cooperate with the surrounding magnetic columns 20 to generate stronger magnetic lines of force or weaken the magnetic lines of force; in this way, the magnetic rotating column 30 can be started or stopped rotating by the enhanced or weakened magnetic lines of force, or the rotation speed of the magnetic rotating column 30 can be adjusted, so as to further control whether the rotor 210 starts to rotate and the rotation speed.

[0049] In an embodiment of the present invention, when a user wants to use a vacuum pump 200 to extract the gas in a specific container, the user can pass current through a plurality of electromagnetic coils 40 to generate an electromagnetic effect. The electromagnetic effect of the electromagnetic coils 40 will cooperate with the surrounding magnetic columns 20 to generate stronger magnetic force lines; the strong magnetic force lines will drive the magnetic members 32, 32a of the two magnetic rotating columns 30 to rotate, so that the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively. When the two magnetic rotating columns 30 rotate along the rotation directions A and B respectively, they will drive the two rotors 210 to rotate along the rotation directions A and B together, and the two rotating rotors 210 will discharge the gas in the specific container. In addition, since the twenty-four magnetic columns 20 densely surround the two rotation regions 26, magnetic force lines with high density and uniform distribution can be generated, so that the two magnetic rotating columns 30 can rotate more smoothly.

[0050] Through the structural design of the vacuum pump of the present invention, magnetic force lines with high density and uniform distribution can be generated, so that the two magnetic rotating columns can rotate more smoothly, and drive the two rotors to rotate smoothly to stably extract gas.

[0051] The present invention shows characteristics that are quite different from the prior art in terms of purpose, means and efficacy. It should be noted, however, that the above-mentioned many embodiments are examples for the convenience of explanation, and the scope of protection claimed by the present invention should be subject to what is described in the claims, rather than being limited to the above embodiments.

Claims

1. A rotary drive structure is applied to a vacuum pump, and the vacuum pump includes two rotors. It is characterized in that, The rotational drive structure includes: A groove body including a plurality of inner side wall surfaces, and the plurality of inner side wall surfaces present as flat surfaces; Two magnetic rotating columns which are located in the groove body and are respectively pivotally connected to the two rotors; A plurality of magnetic columns, each of the magnetic columns includes a first connection end, a second connection end, a first side and a second side, wherein the magnetic columns are dispersedly arranged and connected to the plurality of inner side wall surfaces of the groove body by the first connection end, and the second connection end surrounds the two magnetic rotating columns; and A plurality of electromagnetic coils, each of the electromagnetic coils is dispersedly arranged on each of the first side and the second side and is close to the groove body; Each of the first connection ends is connected to the plurality of inner side wall surfaces, at least one inner side wall surface includes an extension column, the extension column is located on the symmetry axis of the two magnetic rotating columns, and the extension column is connected to at least two magnetic columns, the second connection ends of the two magnetic columns are respectively oriented towards the two magnetic rotating columns, so that a part of the magnetic columns among the plurality of magnetic columns are radially arranged with one of the two magnetic rotating columns as the center and form a rotation area, and the other part of the magnetic columns are radially arranged with the other of the two magnetic rotating columns as the center and form another rotation area.

2. The rotational drive structure according to claim 1, wherein Wherein the two magnetic rotating columns both include a main body and a plurality of magnetic members, and the magnetic members are dispersedly arranged on the main body.

3. The rotational drive structure according to claim 2, wherein Each of the magnetic rotating columns further includes a rotating shaft, the rotating shaft is arranged in the main body, and the magnetic members are dispersedly arranged around the rotating shaft at intervals of 90 degrees with the rotating shaft as the center.

4. The rotational drive structure according to claim 3, characterized in that, Wherein any two adjacent magnetic members have opposite magnetic poles.

5. The rotational drive structure according to claim 4, wherein Wherein each of the electromagnetic coils is dispersedly arranged on each of the first side and the second side and is close to each of the inner side wall surfaces.

6. The rotational drive structure according to claim 1, wherein Wherein the number of the plurality of magnetic columns is 24, and twelve of the magnetic columns are radially arranged with one of the two magnetic rotating columns as the center, and the second connection ends of the twelve magnetic columns form a rotation area with one of the two magnetic rotating columns.

7. A vacuum pump, comprising two rotors, characterized in that, The vacuum pump includes a rotational drive structure according to any one of claims 1 to 6.

Citation Information

Patent Citations

  • Vacuum pump and rotary drive structure

    CN211791197U